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CN115764260A - Butterfly antenna suitable for embedding meander line of superconducting series Josephson double-crystal junction - Google Patents

Butterfly antenna suitable for embedding meander line of superconducting series Josephson double-crystal junction Download PDF

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CN115764260A
CN115764260A CN202211459025.9A CN202211459025A CN115764260A CN 115764260 A CN115764260 A CN 115764260A CN 202211459025 A CN202211459025 A CN 202211459025A CN 115764260 A CN115764260 A CN 115764260A
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郁梅
施金
吴钢雄
梁图禄
姜芮芮
杨永杰
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Nantong University
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Abstract

本发明公开一种适用超导串联约瑟夫森双晶结的嵌入蜿蜒线的蝶形天线,包括多个低阻抗混频器,多个低阻抗混频器之间连接有蜿蜒线金属层;左右两侧边缘的蜿蜒线金属层连接有弯折线金属层;所述弯折线金属层一侧连接有蝶形金属层;所述低阻抗混频器位于同一竖直线上,该竖直线所构成的晶界线在超导薄膜处形成为约瑟夫森结;该晶界线与左右两个蝶形金属层所形成的平行线垂直。本发明能够完成单一天线与各个串联结间的低阻抗匹配外,还避免天线主体分布在具有超导材料的双晶晶界上以免造成晶界处对串联的约瑟夫森结混频器的影响,减少制备过程中多次光刻显影时水对YBCO薄膜的损伤。

Figure 202211459025

The invention discloses a bowtie antenna embedded with a meandering line suitable for a superconducting series Josephson double crystal junction, which includes a plurality of low-impedance mixers, and a meandering line metal layer is connected between the plurality of low-impedance mixers; The meandering line metal layers on the left and right edges are connected with a bent line metal layer; one side of the bent line metal layer is connected with a butterfly metal layer; the low impedance mixer is located on the same vertical line, and the vertical line The formed grain boundary line forms a Josephson junction at the superconducting thin film; the grain boundary line is perpendicular to the parallel line formed by the left and right butterfly metal layers. The present invention can complete the low-impedance matching between a single antenna and each series junction, and also prevents the main body of the antenna from being distributed on the double crystal grain boundary with superconducting material so as to avoid the influence of the grain boundary on the Josephson junction mixer connected in series. Reduce water damage to the YBCO film during multiple photolithographic developments in the preparation process.

Figure 202211459025

Description

一种适用超导串联约瑟夫森双晶结的嵌入蜿蜒线的蝶形天线A Bowie Antenna Embedded with Serpentine Wires Applicable to Superconducting Series Josephson Twin Junctions

技术领域technical field

本发明涉及一种适用超导串联约瑟夫森双晶结的嵌入蜿蜒线的蝶形天线,属于超导和太赫兹通信领域。The invention relates to a bowtie antenna embedded with meandering lines suitable for superconducting series Josephson double crystal junctions, which belongs to the field of superconducting and terahertz communication.

背景技术Background technique

超导约瑟夫森结在制造高频器件方面具有巨大潜力,例如太赫兹发射源、电压标准、灵敏探测器和混频器。目前最具吸引力的发展是太赫兹通信中的太赫兹接收机。由于太赫兹波段大气衰减严重,超灵敏太赫兹接收机的有效检测面临巨大挑战。高温超导混频器是太赫兹接收机前端的理想选择,因为与用于冷却低温超导器件的混频器相比,它们的混频谐波数大,灵敏度高,带宽宽,本振功率要求低,低温成本低。Superconducting Josephson junctions have great potential for fabricating high-frequency devices such as terahertz emission sources, voltage standards, sensitive detectors, and mixers. The most attractive development currently is the terahertz receiver in terahertz communication. Due to the severe atmospheric attenuation in the terahertz band, the effective detection of ultra-sensitive terahertz receivers faces great challenges. High-temperature superconducting mixers are ideal for THz receiver front-ends because of their high mixing harmonic number, high sensitivity, wide bandwidth, and local oscillator power compared to mixers used to cool low-temperature superconducting devices. Low requirements and low cryogenic cost.

与具有高电阻的光电混频器不同,超导约瑟夫森结混频器具有相当低的阻抗。例如,材料为YBa2Cu3O7-δ(YBCO)的超导约瑟夫森结的正常态电阻的典型值约为1–40欧姆. 应用在混频器上的太赫兹天线应与混频器达成共轭匹配,以传输最大功率。然而,传统的天线没有如此低的阻抗。对于光电混合器,耦合天线的阻抗应提高到千欧姆以实现良好的阻抗匹配。相反,对于超导约瑟夫森结混频器,耦合的天线阻抗应大大降低。关于降低耦合天线的输入阻抗以匹配超导约瑟夫森结混频器,已有了相关报道。实验证明,混合性能得到了很大改善。Unlike opto-electronic mixers, which have high resistance, superconducting Josephson junction mixers have fairly low impedance. For example, the typical value of the normal-state resistance of a superconducting Josephson junction made of YBa 2 Cu 3 O 7-δ (YBCO) is about 1–40 ohms. The terahertz antenna applied to the mixer should be combined with the mixer A conjugate match is achieved for maximum power transfer. However, conventional antennas do not have such low impedance. For opto-electric hybrids, the impedance of the coupled antenna should be raised to kilo ohms for good impedance matching. In contrast, for superconducting Josephson junction mixers, the coupled antenna impedance should be greatly reduced. There have been reports on reducing the input impedance of coupled antennas to match superconducting Josephson junction mixers. Experiments show that the mixing performance is greatly improved.

另一方面,串联约瑟夫森结可以改善器件的阻抗,从而实现与耦合天线的阻抗匹配。足够多的串联结可以达到常见类型天线的阻抗。但许多的约瑟夫森结串联很难实现加工技术的一致性及同相位工作,良好的混频性能也不能得到提升。3个串联的约瑟夫森结混频器最大谐波数已提高到154。然而,天线和每个串联结之间的阻抗不匹配仍然存在。对于串联的约瑟夫森结器件,应研究多源激励下输入电阻低于常用天线类型电阻的新型天线。特别地,对于双晶结构的约瑟夫森结,因为其晶界位置的固定性,串联的约瑟夫森结必须在晶界所在的直线上才能构成约瑟夫森结特性,为降低制备工艺的复杂性和避免天线主体分布在双晶晶界上造成晶界处超导材料对串联的约瑟夫森结混频器的影响,适用于串联约瑟夫森结混频器的天线需要做到单一天线与各个串联结的传输匹配特性,并且需考虑放置串联结的位置,即天线主体与串联结连线的不相干性。On the other hand, a series Josephson junction can improve the impedance of the device, thereby achieving impedance matching with the coupled antenna. Enough series junctions can achieve the impedance of common types of antennas. However, many Josephson junctions in series are difficult to achieve the consistency of processing technology and work in the same phase, and the good mixing performance cannot be improved. The maximum harmonic number of 3 Josephson junction mixers connected in series has been increased to 154. However, the impedance mismatch between the antenna and each series junction still exists. For Josephson junction devices in series, novel antennas with input resistance lower than that of common antenna types under multi-source excitation should be investigated. In particular, for the Josephson junction of the twin crystal structure, because of the fixed position of the grain boundary, the Josephson junction in series must be on the straight line of the grain boundary to form the characteristics of the Josephson junction. In order to reduce the complexity of the preparation process and avoid The main body of the antenna is distributed on the double crystal grain boundary, which causes the influence of the superconducting material at the grain boundary on the Josephson junction mixer in series. The antenna suitable for the series Josephson junction mixer needs to achieve the transmission between a single antenna and each series junction Matching characteristics, and the position of placing the series junction needs to be considered, that is, the incoherence between the antenna body and the connection line of the series junction.

已报道的超导串联约瑟夫森结混频器嵌入在蜿蜒线中,如图1所示,为保持拓扑网络的对称性,中心点没有放置激励源。超导双晶约瑟夫森结的形成在晶界处,经过结界的超导膜越窄,临界电流越小,器件越灵敏。若已报到的天线应用在串联双晶结混频器,晶界经过天线(Au层)的地方,天线下的YBCO薄膜需要刻蚀掉,否则超流很大而破坏器件性能,其制备流程如图2所示。除了位置中心线上的4个位置留有YBCO膜,其他位置都需刻蚀掉,见步骤④。整个芯片的制备需要两次光刻显影,YBCO薄膜怕水,因多次接触水器件的性能会有所降低。The reported superconducting series Josephson junction mixer is embedded in a meandering line, as shown in Figure 1. In order to maintain the symmetry of the topological network, no excitation source is placed at the central point. The superconducting twin-crystal Josephson junction is formed at the grain boundary. The narrower the superconducting film passing through the junction, the smaller the critical current and the more sensitive the device. If the reported antenna is used in a series double crystal junction mixer, where the grain boundary passes through the antenna (Au layer), the YBCO film under the antenna needs to be etched away, otherwise the supercurrent will be too large and the performance of the device will be damaged. The preparation process is as follows Figure 2 shows. Except for the 4 positions on the center line where the YBCO film is left, the other positions need to be etched away, see step ④. The preparation of the entire chip requires two photolithographic developments. The YBCO film is afraid of water, and the performance of the device will be reduced due to repeated contact with water.

发明内容Contents of the invention

针对上述现有技术存在的问题,本发明提供一种适用超导串联约瑟夫森双晶结的嵌入蜿蜒线的蝶形天线,从而避免天线主体分布在具有超导材料的双晶晶界上以免造成晶界处对串联的约瑟夫森结混频器的影响,减少制备过程中多次光刻显影时水对YBCO薄膜的损伤。Aiming at the problems existing in the above-mentioned prior art, the present invention provides a bowtie antenna embedded with meandering lines suitable for superconducting series Josephson twin junctions, so as to prevent the main body of the antenna from being distributed on the twin crystal grain boundaries with superconducting materials to avoid The influence of the grain boundary on the Josephson junction mixer connected in series reduces the damage of water to the YBCO film during multiple photolithographic developments in the preparation process.

为了实现上述目的,本发明采用的技术方案是:一种适用超导串联约瑟夫森双晶结的嵌入蜿蜒线的蝶形天线,包括多个低阻抗混频器,多个低阻抗混频器之间连接有蜿蜒线金属层;左右两侧边缘的蜿蜒线金属层连接有弯折线金属层;所述弯折线金属层一侧连接有蝶形金属层;所述低阻抗混频器位于同一竖直线上,该竖直线所构成的晶界线在超导薄膜处形成为约瑟夫森结;该晶界线与左右两个蝶形金属层所形成的平行线垂直。In order to achieve the above object, the technical solution adopted in the present invention is: a bowtie antenna embedded in a meandering line suitable for superconducting series Josephson twin junctions, including a plurality of low-impedance mixers, a plurality of low-impedance mixers A meandering line metal layer is connected between them; the meandering line metal layer on the left and right edges is connected with a bent line metal layer; one side of the bent line metal layer is connected with a butterfly metal layer; the low impedance mixer is located at On the same vertical line, the grain boundary line formed by the vertical line forms a Josephson junction at the superconducting thin film; the grain boundary line is perpendicular to the parallel line formed by the left and right butterfly metal layers.

进一步的,所述低阻抗混频器的阻抗为15欧姆;串联连接多个低阻抗混频器的蜿蜒线金属层长度和间距可为不同,以此来调节有源阻抗的大小。Further, the impedance of the low-impedance mixer is 15 ohms; the length and spacing of metal layers of meandering lines connected in series to multiple low-impedance mixers can be different, so as to adjust the size of the active impedance.

进一步的,嵌入蜿蜒线的蝶形天线以行波模式工作。Further, the bowtie antenna embedded in the meandering wire operates in traveling wave mode.

进一步的,蝶形天线的基底表面波效应通过在背面放置硅超半球透镜消除。Furthermore, the base surface wave effect of the bowtie antenna is eliminated by placing a silicon hyper-hemispherical lens on the back.

进一步的,蝶形天线结构关于中心原点对称。Further, the bowtie antenna structure is symmetrical about the central origin.

本发明的有益效果是:本发明为针对串联的约瑟夫森双晶结设计多源激励的低输入阻抗的太赫兹天线,并在太赫兹天线中嵌入多个低阻抗混频器,完成阻抗匹配且不影响天线性能。同时,除了天线中嵌入的约瑟夫森结混频器,天线主体不能在形成约瑟夫森结的晶界处,以减少制备工艺的复杂性、提高样品成品率。蝶形中嵌入的蜿蜒线可连接多个低阻抗的混频器,完成阻抗匹配的同时不影响天线性能;蜿蜒线的长度和间距可任意调节,以调节有源阻抗,完成与混频器的低阻抗匹配;嵌入的低阻抗混频器可根据实际应用的需求进行增减;串联结的连线与一对蝶形的连线垂直;结构关于中心原点对称;嵌入蜿蜒线的蝶形以行波的工作模式工作;本发明适用于其他低阻抗的太赫兹检测器。The beneficial effects of the present invention are: the present invention designs a terahertz antenna with multi-source excitation and low input impedance for the Josephson double junction in series, and embeds a plurality of low-impedance mixers in the terahertz antenna to complete impedance matching and Does not affect antenna performance. At the same time, except for the Josephson junction mixer embedded in the antenna, the main body of the antenna cannot be at the grain boundary forming the Josephson junction, so as to reduce the complexity of the preparation process and improve the sample yield. The meandering lines embedded in the butterfly can be connected to multiple low-impedance mixers to complete impedance matching without affecting the performance of the antenna; the length and spacing of the meandering lines can be adjusted arbitrarily to adjust the active impedance and complete the mixing The low impedance matching of the device; the embedded low impedance mixer can be increased or decreased according to the actual application requirements; the connection line of the series junction is perpendicular to the connection line of a pair of butterfly; the structure is symmetrical about the central origin; the butterfly embedded in the meandering line The shape works in a traveling wave working mode; the invention is applicable to other low-impedance terahertz detectors.

附图说明Description of drawings

图1为现有的可用于串联约瑟夫森结的蝶形加载蜿蜒线天线结构示意图;FIG. 1 is a schematic structural diagram of an existing bow-shaped loaded meander antenna that can be used in series with Josephson junctions;

图2为现有的天线用于超导串联双晶结混频器的制备流程示意图;Fig. 2 is a schematic diagram of the preparation process of an existing antenna used in a superconducting series double crystal junction mixer;

图3为本发明实施例中的嵌入7个低阻抗混频器的以蜿蜒线连接的蝶形天线结构图;Fig. 3 is a structural diagram of a bowtie antenna connected with meandering lines embedded with seven low-impedance mixers in an embodiment of the present invention;

图4为本发明实施例的天线各组成部分的参数示意图;FIG. 4 is a schematic diagram of the parameters of each component part of the antenna according to the embodiment of the present invention;

图5为本发明实施例的蜿蜒线中嵌入(a)7个和(b)5个低阻抗混频器的有源反射系数仿真对比图;Fig. 5 is a simulation comparison diagram of active reflection coefficients of (a) 7 and (b) 5 low-impedance mixers embedded in the meandering line of the embodiment of the present invention;

图6为本发明实施例的蜿蜒线中嵌入(a)7个和(b)5个低阻抗混频器分别在(a)216GHz和(b)226 GHz的远场辐射方向仿真对比图。Fig. 6 is a simulation comparison diagram of far-field radiation directions at (a) 216 GHz and (b) 226 GHz respectively embedded in the serpentine line of the embodiment of the present invention (a) 7 and (b) 5 low-impedance mixers.

图中:1、低阻抗混频器,2、蜿蜒线金属层,3、弯折线金属层,4、蝶形金属层,5、晶界线。In the figure: 1. Low-impedance mixer, 2. Serpentine line metal layer, 3. Bend line metal layer, 4. Butterfly-shaped metal layer, 5. Grain boundary line.

具体实施方式Detailed ways

为使本发明的目的、技术方案和优点更加清楚明了,下面通过附图及实施例,对本发明进行进一步详细说明。但是应该理解,此处所描述的具体实施例仅仅用以解释本发明,并不用于限制本发明的范围。In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. However, it should be understood that the specific embodiments described here are only used to explain the present invention, and are not intended to limit the scope of the present invention.

除非另有定义,本文所使用的所有的技术术语和科学术语与属于本发明的技术领域的技术人员通常理解的含义相同,本文中在本发明的说明书中所使用的术语只是为了描述具体的实施例的目的,不是旨在于限制本发明。Unless otherwise defined, all technical terms and scientific terms used herein have the same meaning as commonly understood by those skilled in the technical field of the present invention, and the terms used in the description of the present invention herein are only to describe specific implementations The purpose of the example is not intended to limit the present invention.

本实施例中,本发明的设计是嵌入了多个低阻抗混频器以蜿蜒线连接的蝶形天线,其结构如图3所示。它主要包含7个低阻抗混频器1,连接低阻抗混频器1的蜿蜒线金属层2和弯折线金属层3,以及蝶形金属层4。混频器的阻抗约15欧姆,连接混频器的各段蜿蜒线长度和间距可以不等,以调节有源阻抗的大小。蜿蜒线的长度可以随意调节,以放置所需个数的混频器。超导材料在基底上的晶界线5即蜿蜒线的中心线,形成约瑟夫森结。In this embodiment, the design of the present invention is a bowtie antenna embedded with multiple low-impedance mixers connected by meandering lines, and its structure is shown in FIG. 3 . It mainly includes seven low-impedance mixers 1 , a meander metal layer 2 and a bent-line metal layer 3 connecting the low-impedance mixers 1 , and a butterfly metal layer 4 . The impedance of the mixer is about 15 ohms, and the length and spacing of the meandering lines connected to the mixer can vary to adjust the size of the active impedance. The length of the meandering line can be adjusted freely to place the required number of mixers. The grain boundary line 5 of the superconducting material on the substrate, that is, the center line of the meandering line, forms a Josephson junction.

嵌入蜿蜒线的蝶形天线以行波的模式工作。实际应用时,可调节蜿蜒线的长度和间距来确定放置的串联混频器的个数,加上调节蝶形的长度来确定工作频率;太赫兹天线的基底表面波效应可通过在背面放置硅超半球透镜消除。A bowtie antenna embedded in a meandering wire operates in a traveling wave pattern. In practical applications, the length and spacing of the meandering lines can be adjusted to determine the number of series mixers placed, and the length of the butterfly shape can be adjusted to determine the operating frequency; the basal surface wave effect of the terahertz antenna can be adjusted by placing Silicon hyper hemispherical lenses eliminate.

制备样品时可以缩少图2中的步骤④-⑦,整个芯片版图可以和约瑟夫森结一起成形。Steps ④-⑦ in Figure 2 can be shortened when preparing samples, and the entire chip layout can be formed together with the Josephson junction.

本发明的关键点为针对串联的约瑟夫森双晶结设计多源激励的低输入阻抗的太赫兹天线,并在太赫兹天线中嵌入多个低阻抗混频器,完成阻抗匹配且不影响天线性能。同时,除了天线中嵌入的约瑟夫森结混频器,天线主体不能在形成约瑟夫森结的晶界处,以减少制备工艺的复杂性、提高样品成品率。The key point of the present invention is to design a terahertz antenna with multi-source excitation and low input impedance for the series-connected Josephson double junction, and embed multiple low-impedance mixers in the terahertz antenna to complete impedance matching without affecting the performance of the antenna . At the same time, except for the Josephson junction mixer embedded in the antenna, the main body of the antenna cannot be at the grain boundary forming the Josephson junction, so as to reduce the complexity of the preparation process and improve the sample yield.

本发明的一个设计案例,其示意图如图4所示。在CST仿真软件中,天线材料设置为 理想导电体,置于氧化镁(相对介电常数为9.6)基底上,检测器分别用15 欧姆的离散端口 表示,进行多端口有源仿真,蜿蜒线上的离散端口可根据实际应用进行增减,其有源反射系 数和远场辐射方向图分别如图5和图6所示。当天线参数

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=
Figure 99223DEST_PATH_IMAGE010
=10 μm,
Figure DEST_PATH_IMAGE011
=17 μm时,7个端口在216 GHz,其 有源反射系数分别为-15 dB,-24 dB,-37 dB,-17 dB,-37 dB,-24 dB和 -15 dB,方向性系 数达7.42 dBi;5个端口激励,除去
Figure 422757DEST_PATH_IMAGE007
Figure 923926DEST_PATH_IMAGE010
参数部分的蜿蜒线长度,226 GHz处的有源反射系 数分别为-15 dB,-21 dB,-21 dB,-21 dB和 -15 dB,方向性系数达7.59 dBi。 A design case of the present invention, its schematic diagram is shown in Figure 4. In the CST simulation software, the antenna material is set as an ideal conductor, placed on a magnesium oxide (relative permittivity of 9.6) substrate, and the detectors are represented by discrete ports of 15 ohms, for multi-port active simulation, the meandering line The discrete ports can be increased or decreased according to the actual application, and its active reflection coefficient and far-field radiation pattern are shown in Figure 5 and Figure 6, respectively. When the antenna parameters
Figure DEST_PATH_IMAGE001
=135 μm,
Figure 239293DEST_PATH_IMAGE002
=515 μm,
Figure DEST_PATH_IMAGE003
=30μm,
Figure 24716DEST_PATH_IMAGE004
=4μm,
Figure DEST_PATH_IMAGE005
=10 μm, =
Figure 993415DEST_PATH_IMAGE006
=
Figure DEST_PATH_IMAGE007
=4μm,
Figure 206091DEST_PATH_IMAGE008
=
Figure DEST_PATH_IMAGE009
=
Figure 99223DEST_PATH_IMAGE010
=10μm,
Figure DEST_PATH_IMAGE011
=17 μm, 7 ports at 216 GHz, their active reflection coefficients are -15 dB, -24 dB, -37 dB, -17 dB, -37 dB, -24 dB and -15 dB, directivity coefficient Up to 7.42 dBi; 5 port excitation, except
Figure 422757DEST_PATH_IMAGE007
and
Figure 923926DEST_PATH_IMAGE010
The length of the meander line in the parameter section, the active reflection coefficient at 226 GHz are -15 dB, -21 dB, -21 dB, -21 dB and -15 dB respectively, and the directivity coefficient reaches 7.59 dBi.

以上所述仅为本发明的较佳实施例而已,并不用以限制本发明,凡在本发明的精神和原则之内所作的任何修改、等同替换或改进等,均应包含在本发明的保护范围之内。The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention. Any modification, equivalent replacement or improvement made within the spirit and principles of the present invention shall be included in the protection of the present invention. within range.

Claims (5)

1. A butterfly antenna with embedded meander line suitable for superconducting serial Josephson double crystal junction is characterized in that the butterfly antenna comprises a plurality of low impedance mixers (1), a meander line metal layer (2) is connected between the low impedance mixers (1); the meander line metal layers (2) at the edges of the left side and the right side are connected with a meander line metal layer (3); one side of the bent line metal layer (3) is connected with a butterfly metal layer (4); the low-impedance mixers (1) are positioned on the same vertical line, and a grain boundary line (5) formed by the vertical line is formed into a Josephson junction at the superconducting thin film; the grain boundary line (5) is vertical to a parallel line formed by the left butterfly metal layer and the right butterfly metal layer (4).
2. A meander line embedded butterfly antenna applicable for superconducting serial josephson bicrystal junction according to claim 1, wherein the impedance of the low impedance mixer (1) is 15 Ω; the length and the spacing of the meander line metal layers (2) connecting the 7 low impedance mixers (1) in series can be different, so as to adjust the size of the active impedance.
3. The embedded meander line bowtie antenna adapted for a superconducting serial josephson twin junction as claimed in claim 1, wherein the embedded meander line bowtie antenna operates in a traveling wave mode.
4. The embedded meander line bowtie antenna for superconducting serial josephson twin junction as claimed in claim 1, wherein the substrate surface wave effect of bowtie antenna is eliminated by placing a silicon hyper-hemispherical lens on the back side.
5. The meander-line embedded bowtie antenna suitable for a superconducting serial josephson bicrystal junction as claimed in claim 1, wherein the bowtie antenna structure is symmetric about a central origin.
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