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CN115707794A - Surface-binding agent and method for treating substrate surface - Google Patents

Surface-binding agent and method for treating substrate surface Download PDF

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CN115707794A
CN115707794A CN202111615347.3A CN202111615347A CN115707794A CN 115707794 A CN115707794 A CN 115707794A CN 202111615347 A CN202111615347 A CN 202111615347A CN 115707794 A CN115707794 A CN 115707794A
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acid
binding agent
substrate
surface binding
compound
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简志胜
范志宏
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Baiqun Technology Co ltd
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Abstract

一种表面结合剂,包括三唑化合物以及咪唑化合物。本发明的表面结合剂于基材表面上形成有机层,有效提升未预先粗化处理的基材表面与涂布材料之间的附着力,该涂布材料例如光刻胶、油墨及待添加的金属层(以溅镀、蒸镀等方式形成),故可避免涂布材料从基材表面上剥离。

Figure 202111615347

A surface binding agent includes a triazole compound and an imidazole compound. The surface binding agent of the present invention forms an organic layer on the surface of the substrate, effectively improving the adhesion between the surface of the substrate that has not been roughened in advance and the coating material, such as photoresist, ink and to-be-added Metal layer (formed by sputtering, vapor deposition, etc.), so that the coating material can be prevented from peeling off from the surface of the substrate.

Figure 202111615347

Description

表面结合剂及处理基材表面的方法Surface binder and method for treating substrate surface

技术领域technical field

本发明涉及一种表面结合剂及使用其处理基材表面的方法,尤其涉及一种使用表面结合剂处理非金属面(如玻璃、硅晶、聚酰亚胺(PI)膜等的表面)及金属面(如铜与铜合金、铁铸、铝、钢、镍、锌、镍铁合金等的表面),以提升基材的表面与光刻胶、油墨或待添加的金属层(以溅镀、蒸镀等方式形成)等涂布材料之间的附着力的方法。The present invention relates to a kind of surface binding agent and the method for using it to treat the substrate surface, especially relate to a kind of surface binding agent treatment non-metallic surface (such as the surface of glass, silicon crystal, polyimide (PI) film etc.) and Metal surfaces (such as the surface of copper and copper alloys, cast iron, aluminum, steel, nickel, zinc, nickel-iron alloys, etc.) to enhance the surface of the substrate and photoresist, ink or metal layer to be added (by sputtering, Evaporation, etc.) and other methods of adhesion between coating materials.

背景技术Background technique

通常,为了增进基材表面与涂布材料之间的附着力,会采用预先粗化处理基材表面的方法,例如,在印刷电路板的粗化铜箔上形成光刻胶,然后曝光使光刻胶具有特定图案形状,使部分的铜箔表面外露,接着蚀刻除去外露的铜,当除去光刻胶后,保留未被蚀刻除去的铜,形成所期望的铜线路图案于印刷电路板上。Usually, in order to improve the adhesion between the surface of the substrate and the coating material, the method of pre-roughening the surface of the substrate is adopted, for example, forming a photoresist on the roughened copper foil of the printed circuit board, and then exposing to make the light The resist has a specific pattern shape, so that part of the surface of the copper foil is exposed, and then the exposed copper is removed by etching. After the photoresist is removed, the copper that has not been removed by etching remains, and the desired copper circuit pattern is formed on the printed circuit board.

然而,若采用粗化处理,表面粗糙的铜表面会保形于线路图案上,而高频高速传输的讯号传递路径通常发生于线路表面(集肤效应),若线路表面不平整,将产生讯号不良的问题。而且,粗化处理通常伴随污染废水,亦存在有环保的问题。另一方面,随着线路图案逐渐线细化、缩小化,粗化处理的铜表面和图案化光刻胶的附着力问题更趋严重。因此,在目前趋向高频高速传输时代中,业界期望以不粗化基材导体表面的方式来制作线路。However, if roughening is used, the rough copper surface will conform to the circuit pattern, and the signal transmission path of high-frequency and high-speed transmission usually occurs on the surface of the circuit (skin effect). If the surface of the circuit is uneven, it will generate signal bad question. Moreover, roughening treatment is usually accompanied by polluted wastewater, which also has environmental protection problems. On the other hand, as the line patterns gradually become thinner and smaller, the problem of adhesion between the roughened copper surface and the patterned photoresist becomes more serious. Therefore, in the current era of high-frequency and high-speed transmission, the industry expects to fabricate circuits in a manner that does not roughen the surface of the substrate conductor.

目前,已知有使用表面处理组合物预先处理金属表面的方法,然而先前技术所描述的表面处理组合物,仍存在有表面处理组合物过度腐蚀或不均匀腐蚀基材表面、或附着力提升效果不明显等问题。At present, there are known methods for pre-treating metal surfaces with surface treatment compositions. However, the surface treatment compositions described in the prior art still have the effect of excessive corrosion or uneven corrosion of the substrate surface, or adhesion enhancement effects of the surface treatment composition. Not obvious issues.

发明内容Contents of the invention

为了解决上述问题,本发明提供一种表面结合剂,用于提升非金属基材的表面附着力,该表面结合剂包括三唑化合物及咪唑化合物。In order to solve the above problems, the present invention provides a surface binding agent for improving the surface adhesion of non-metallic substrates, the surface binding agent includes triazole compounds and imidazole compounds.

在一种实施方案中,该三唑化合物包括选自苯并三唑及5-甲基苯并三唑的至少一者,该咪唑化合物包括选自咪唑、二氢咪唑及1,2-二甲基咪唑的至少一者。In one embodiment, the triazole compound includes at least one selected from benzotriazole and 5-methylbenzotriazole, and the imidazole compound includes at least one selected from imidazole, dihydroimidazole, and 1,2-dimethyl At least one of kiimidazoles.

在一种实施方案中,表面结合剂进一步包括吡啶化合物,且在另一实施方案中,该吡啶化合物包括选自2-甲基吡啶及2-巯基吡啶的至少一者。In one embodiment, the surface binding agent further includes a pyridine compound, and in another embodiment, the pyridine compound includes at least one selected from 2-picoline and 2-mercaptopyridine.

在一种实施方案中,三唑化合物、咪唑化合物以及吡啶化合物各者的浓度介于0.05g/L至50g/L之间。In one embodiment, the concentration of each of the triazole compound, imidazole compound and pyridine compound is between 0.05 g/L and 50 g/L.

在一种实施方案中,表面结合剂进一步包括二甲基乙酰胺,以作为催化剂,且在另一实施方案中,二甲基乙酰胺的浓度介于5mL/L至100mL/L之间。In one embodiment, the surface binding agent further includes dimethylacetamide as a catalyst, and in another embodiment, the concentration of dimethylacetamide is between 5 mL/L and 100 mL/L.

在一种实施方案中,表面结合剂不包括酸类化合物。In one embodiment, the surface binding agent does not include acidic compounds.

在一种实施方案中,表面结合剂可进一步用于提升金属基材的表面附着力,且在另一实施方案中,表面结合剂进一步包括无机酸化合物及有机酸化合物的至少一者。In one embodiment, the surface bonding agent can further be used to improve the surface adhesion of the metal substrate, and in another embodiment, the surface bonding agent further includes at least one of an inorganic acid compound and an organic acid compound.

在一种实施方案中,无机酸化合物包括选自由硫酸、盐酸、硝酸、磷酸所组成的组的至少一者。In one embodiment, the inorganic acid compound includes at least one selected from the group consisting of sulfuric acid, hydrochloric acid, nitric acid, and phosphoric acid.

在一种实施方案中,有机酸化合物包括选自由甲酸、乙酸、丙酸、丁酸、戊酸、己酸、草酸、丙烯酸、丁烯酸、异丁烯酸、乙二酸、丙二酸、丁二酸、戊二酸、己二酸、庚二酸、顺丁烯二酸、苯甲酸、苯二甲酸、肉桂酸、乙醇酸、乳酸、苹果酸、水杨酸、甘氨酸、酒石酸、柠檬酸、胺磺酸、β-氯丙酸、烟酸、抗坏血酸、羟基三甲基乙酸及乙酰丙酸所组成的组的至少一者。In one embodiment, the organic acid compound comprises a compound selected from the group consisting of formic acid, acetic acid, propionic acid, butyric acid, valeric acid, caproic acid, oxalic acid, acrylic acid, crotonic acid, methacrylic acid, oxalic acid, malonic acid, butanedioic acid Acid, glutaric acid, adipic acid, pimelic acid, maleic acid, benzoic acid, phthalic acid, cinnamic acid, glycolic acid, lactic acid, malic acid, salicylic acid, glycine, tartaric acid, citric acid, amine At least one selected from the group consisting of sulfonic acid, β-chloropropionic acid, nicotinic acid, ascorbic acid, hydroxytrimethylacetic acid, and levulinic acid.

在一种实施方案中,表面结合剂进一步包括选自由乙醇胺、二乙二醇单丁醚、二甲氧基乙烷所组成的组的至少一者。In one embodiment, the surface binding agent further includes at least one member selected from the group consisting of ethanolamine, diethylene glycol monobutyl ether, and dimethoxyethane.

本发明还提供一种处理基材表面的方法,包括使本发明的表面结合剂与基材的表面接触,以提升该基材的表面与覆于该基材的表面上的层之间的附着力,其中,该基材为金属基材或非金属基材,且该覆于该基材的表面上的层为金属层或非金属层。The present invention also provides a method for treating the surface of a substrate, comprising contacting the surface bonding agent of the present invention with the surface of the substrate to enhance the adhesion between the surface of the substrate and a layer covering the surface of the substrate. Concentrating on, wherein, the substrate is a metal substrate or a non-metal substrate, and the layer covering the surface of the substrate is a metal layer or a non-metal layer.

在一种实施方案中,金属基材与金属层的材质包括选自铜、铝、镍、锌、铁、铬及其合金所组成的组的至少一者。在一种实施方案中,非金属基材与非金属层的材质为玻璃、聚酰亚胺膜、预浸体、可成像的介电体、可成像的树脂、防焊材、蚀刻光刻胶或硅晶。In one embodiment, the material of the metal substrate and the metal layer includes at least one member selected from the group consisting of copper, aluminum, nickel, zinc, iron, chromium and alloys thereof. In one embodiment, the material of the non-metal substrate and the non-metal layer is glass, polyimide film, prepreg, imageable dielectric, imageable resin, solder mask, etch photoresist or silicon crystals.

在一种实施方案中,表面结合剂通过旋涂、浸泡或喷洒的方式与基材的表面接触。In one embodiment, the surface bonding agent is contacted with the surface of the substrate by spin coating, dipping or spraying.

在一种实施方案中,使表面结合剂与基材的表面接触时,反应温度为介于20℃至60℃之间。In one embodiment, the reaction temperature is between 20°C and 60°C when the surface binding agent is brought into contact with the surface of the substrate.

在一种实施方案中,使表面结合剂与基材的表面接触时,反应时间为介于30秒至900秒之间。In one embodiment, the surface-binding agent is brought into contact with the surface of the substrate for a reaction time of between 30 seconds and 900 seconds.

在一种实施方案中,基材的表面是未预先粗化处理的表面。In one embodiment, the surface of the substrate is a surface that has not been previously roughened.

在一种实施方案中,表面结合剂预先稀释至10%至20%后再与基材的表面接触。In one embodiment, the surface-binding agent is pre-diluted to 10% to 20% before contacting the surface of the substrate.

在一种实施方案中,本发明处理基材表面的方法进一步包括在表面结合剂与基材的表面接触后,进行水洗洗净多余的表面结合剂,之后热烘干燥该基材。In one embodiment, the method for treating the surface of the substrate of the present invention further comprises washing the excess surface bonding agent with water after the surface bonding agent is in contact with the surface of the substrate, and then drying the substrate with heat.

本发明的表面结合剂具有以下特点:Surface binding agent of the present invention has the following characteristics:

1.表面结合剂施用于基材的表面上形成有机层,有效提升未预先粗化处理的基材表面与覆于其上的材料之间的附着力,避免覆于其上的材料脱落、剥离;1. The surface binding agent is applied on the surface of the substrate to form an organic layer, which can effectively improve the adhesion between the surface of the substrate that has not been pre-roughened and the material covering it, and prevent the material covering it from falling off and peeling off ;

2.由于可排除粗化处理(例如刷磨、喷砂、微蚀刻等)制程,避免产生粗化处理用废弃物(重金属废水、腐蚀性强酸等),同时,基材表面具有较佳的平整性;2. Since the roughening treatment (such as brushing, sandblasting, micro-etching, etc.) process can be eliminated, waste for roughening treatment (heavy metal wastewater, corrosive strong acid, etc.) can be avoided. At the same time, the surface of the substrate has better flatness sex;

3.所适用的基材及覆于其上的层的种类广泛,包括玻璃、聚酰亚胺膜、预浸体、可成像的介电体、可成像的树脂、防焊材、蚀刻光刻胶及硅晶等的非金属、以及铜、铝、镍、锌、铁、铬及其合金的金属;3. A wide range of applicable substrates and layers on them, including glass, polyimide film, prepreg, imageable dielectric, imageable resin, solder mask, etch lithography Nonmetals such as rubber and silicon crystals, and metals such as copper, aluminum, nickel, zinc, iron, chromium and their alloys;

4.表面结合剂所形成的有机层为透明无色,不会改变基材表面的颜色,于使用铜做为基材时,不会有铜面色差,有利于自动光学检查(Auto-Optical Inspection,AOI)检测;4. The organic layer formed by the surface binder is transparent and colorless, and will not change the color of the substrate surface. When copper is used as the substrate, there will be no color difference on the copper surface, which is conducive to automatic optical inspection (Auto-Optical Inspection) , AOI) detection;

5.表面结合剂具有重工性,重复使用本发明的表面结合剂仍具有优异的效果;5. The surface binding agent has reworkability, and the repeated use of the surface binding agent of the present invention still has excellent effects;

6.基材表面经表面结合剂处理后形成的有机层具有疏水性,于使用铜作为基材时,能改善后续涂布防焊油墨于导通孔中所产生的油墨吹孔问题。6. The organic layer formed after the surface of the substrate is treated with a surface binder is hydrophobic, and when copper is used as the substrate, it can improve the problem of ink blowing caused by subsequent coating of solder resist ink in the via hole.

附图说明Description of drawings

图1至图3是比较例3至5的测试结果。1 to 3 are the test results of Comparative Examples 3 to 5.

图4至图6是本发明表面结合剂实施例17至19的测试结果。Fig. 4 to Fig. 6 are test results of examples 17 to 19 of the surface binding agent of the present invention.

具体实施方式Detailed ways

须知,本说明书中任何比例关系的改变或大小的调整,在不影响本发明所能产生的功效及所能达成的目的下,均应仍落在本发明所描述的技术内容所能涵盖的范围内。同时,本说明书中所引用的如“上”等用语,也仅为便于叙述的明了,而非用以限定本发明可实施的范围,其相对关系的改变或调整,在无实质变更技术内容下,当亦视为本发明可实施的范畴。It should be noted that any change in the proportional relationship or adjustment of the size in this specification should still fall within the scope covered by the technical content described in the present invention without affecting the effects and goals that can be achieved by the present invention. Inside. At the same time, terms such as "above" quoted in this specification are only for the convenience of description, and are not used to limit the scope of the present invention. , should also be regarded as the scope where the present invention can be implemented.

本发明的表面结合剂包括三唑化合物以及咪唑化合物。The surface binding agent of the present invention includes triazole compounds and imidazole compounds.

三唑化合物与咪唑化合物是提升基材表面与涂布材料之间的附着力的主要成分,其于基材表面上形成有机层。三唑化合物例如为苯并三唑及5-甲基苯并三唑等,咪唑化合物例如为咪唑、二氢咪唑及1,2-二甲基咪唑等。三唑化合物与咪唑化合物可作为桥连配体,其以N-1以及N-3为配位原子,分别连接至基材表面上的原子以及涂布材料的原子形成键结,从而达到桥接基材表面与涂布材料的效果。The triazole compound and the imidazole compound are the main components to enhance the adhesion between the surface of the substrate and the coating material, and form an organic layer on the surface of the substrate. Examples of triazole compounds include benzotriazole and 5-methylbenzotriazole, and examples of imidazole compounds include imidazole, dihydroimidazole, and 1,2-dimethylimidazole. Triazole compounds and imidazole compounds can be used as bridging ligands, which use N-1 and N-3 as coordinating atoms, respectively connected to the atoms on the surface of the substrate and the atoms of the coating material to form bonds, so as to achieve the bridging group The effect of the material surface and the coating material.

本发明的表面结合剂进一步包括吡啶化合物,其作为提升基材表面与涂布材料之间的附着力的次要成分。吡啶化合物例如为2-甲基吡啶及2-巯基吡啶等。The surface-binding agent of the present invention further includes a pyridine compound as a secondary component for enhancing the adhesion between the surface of the substrate and the coating material. Pyridine compounds include, for example, 2-picoline, 2-mercaptopyridine, and the like.

表面结合剂中,三唑化合物、咪唑化合物以及吡啶化合物中每一种的浓度介于0.05g/L至50g/L之间、0.1g/L至40g/L之间、0.25g/L至30g/L之间、0.5g/L至25g/L之间、或者1g/L至25g/L之间,浓度例如可以是0.05、0.06、0.07、0.08、0.09、0.1、0.15、0.2、0.25、0.3、0.35、0.4、0.45、0.5、0.6、0.7、0.8、0.9、1、1.5、2、2.5、3、3.5、4、4.5、5、5.5、6、6.5、7、7.5、8、8.5、9、9.5、10、11、12、13、14、15、16、17、18、19、20、21、22、23、24、25、26、27、28、29、30、31、32、33、34、35、36、37、38、39、40、41、42、43、44、45、46、47、48、49、50g/L,但不限于此。In the surface binding agent, the concentration of each of the triazole compound, imidazole compound and pyridine compound is between 0.05g/L and 50g/L, between 0.1g/L and 40g/L, between 0.25g/L and 30g /L, between 0.5g/L and 25g/L, or between 1g/L and 25g/L, the concentration can be 0.05, 0.06, 0.07, 0.08, 0.09, 0.1, 0.15, 0.2, 0.25, 0.3 , 0.35, 0.4, 0.45, 0.5, 0.6, 0.7, 0.8, 0.9, 1, 1.5, 2, 2.5, 3, 3.5, 4, 4.5, 5, 5.5, 6, 6.5, 7, 7.5, 8, 8.5, 9 , 9.5, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33 , 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50g/L, but not limited thereto.

提升附着力的化合物的总浓度可介于0.05g/L至200g/L之间、0.1g/L至200g/L之间、1g/L至150g/L之间、10g/L至100g/L之间、或者25g/L至100g/L之间,浓度例如可以是0.05、0.06、0.07、0.08、0.09、0.1、0.15、0.2、0.25、0.3、0.35、0.4、0.45、0.5、0.6、0.7、0.8、0.9、1、1.5、2、2.5、3、3.5、4、4.5、5、5.5、6、6.5、7、7.5、8、8.5、9、9.5、10、11、12、13、14、15、16、17、18、19、20、21、22、23、24、25、26、27、28、29、30、31、32、33、34、35、36、37、38、39、40、41、42、43、44、45、46、47、48、49、50、55、60、65、70、75、80、85、90、95、100、105、110、115、120、125、130、135、140、145、150、155、160、165、170、175、180、185、190、195、200g/L,但不限于此。The total concentration of the adhesion promoting compound can be between 0.05g/L and 200g/L, between 0.1g/L and 200g/L, between 1g/L and 150g/L, between 10g/L and 100g/L Between, or between 25g/L and 100g/L, the concentration can be, for example, 0.05, 0.06, 0.07, 0.08, 0.09, 0.1, 0.15, 0.2, 0.25, 0.3, 0.35, 0.4, 0.45, 0.5, 0.6, 0.7, 0.8, 0.9, 1, 1.5, 2, 2.5, 3, 3.5, 4, 4.5, 5, 5.5, 6, 6.5, 7, 7.5, 8, 8.5, 9, 9.5, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 55, 60, 65, 70, 75, 80, 85, 90, 95, 100, 105, 110, 115, 120, 125, 130, 135, 140, 145, 150, 155, 160, 165, 170, 175, 180, 185, 190, 195, 200g/L, but not limited thereto.

使三唑化合物、咪唑化合物以及吡啶化合物溶解于溶剂中以配制成表面结合剂。溶剂的种类并无限定,只要是可使其以适当的浓度溶解的溶剂即可。在一种实施方案中溶剂为水,在其他实施方案中溶剂可为其他有机溶剂,溶剂也可以同时包含有机溶剂及水。A triazole compound, an imidazole compound, and a pyridine compound are dissolved in a solvent to formulate a surface-binding agent. The type of solvent is not limited as long as it can be dissolved at an appropriate concentration. In one embodiment, the solvent is water, and in other embodiments, the solvent can be other organic solvents, and the solvent can also contain both organic solvents and water.

作为溶剂,例如可选用苯、甲苯、二甲苯、乙基苯、甲酚及氯苯等的芳香族类;甲醇、乙醇、正丙醇、异丙醇、正丁醇、正己醇及环己醇等脂肪族醇类;乙二醇、二乙二醇、丙二醇及二丙二醇等二醇类;丙三醇;丙酮、甲基乙基酮、二乙基酮、甲基异丁基酮、乙基异丁基酮、及环己酮等酮类;二乙醚、二丙醚、二丁醚、二己醚、苄基甲基醚、苄基乙基醚、及四氢呋喃等醚类;乙二醇单甲基醚、乙二醇单乙基醚、乙二醇单丙基醚、乙二醇单丁基醚、丙二醇单甲基醚、丙二醇单乙基醚、丙二醇单丙基醚、丙二醇单丁基醚、二乙二醇单甲基醚、二乙二醇单乙基醚、二乙二醇单丙基醚、二乙二醇单丁基醚及二乙二醇单苯基醚等二醇单醚类;乙二醇二甲基醚、乙二醇二乙基醚、乙二醇二丙基醚、丙二醇二甲基醚、丙二醇二乙基醚、丙二醇二丙基醚、二乙二醇二甲基醚、二乙二醇二乙基醚及二乙二醇二丙基醚等二醇二醚类;乙二醇单甲基醚乙酸酯、乙二醇单乙基醚乙酸酯、乙二醇单丙基醚乙酸酯、乙二醇单丁基醚乙酸酯、乙二醇单苯基醚乙酸酯、二乙二醇单甲基醚乙酸酯及二乙二醇单乙基醚乙酸酯等二醇单乙酸酯类;二乙二醇单丙基醚乙酸酯、二乙二醇单丁基醚乙酸酯、二乙二醇单苯基醚乙酸酯、丙二醇单甲基醚乙酸酯、丙二醇单乙基醚乙酸酯、丙二醇单丙基醚乙酸酯、2-甲氧基丁基乙酸酯、3-甲氧基丁基乙酸酯、4-甲氧基丁基乙酸酯、2-甲基-3-甲氧基丁基乙酸酯、3-甲基-3-甲氧基丁基乙酸酯、3-乙基-3-甲氧基丁基乙酸酯、2-乙氧基丁基乙酸酯、4-乙氧基丁基乙酸酯、4-丙氧基丁基乙酸酯、2-甲氧基戊基乙酸酯、3-甲氧基戊基乙酸酯、4-甲氧基戊基乙酸酯、2-甲基-3-甲氧基戊基乙酸酯、3-甲基-3-甲氧基戊基乙酸酯、3-甲基-4-甲氧基戊基乙酸酯及4-甲基-4-甲氧基戊基乙酸酯等二醇类的单醚单乙酸酯类;丙酸甲酯、丙酸乙酯、丙酸丙酯、丙酸异丙酯、2-羟基丙酸甲酯、2-羟基丙酸乙酯、2-羟基-2-甲基、甲基-3-甲氧基丙酸酯、乙基-3-甲氧基丙酸酯、乙基-3-乙氧基丙酸酯、乙基-3-丙氧基丙酸酯、丙基-3-甲氧基丙酸酯、异丙基-3-甲氧基丙酸酯、乙氧基乙酸乙酯、羟基乙酸乙酯、2-羟基-3-甲基丁酸甲酯、乙酸甲酯、乙酸乙酯、乙酸丙酯、乙酸异丙酯、乙酸丁酯、乙酸异戊酯、碳酸甲酯、碳酸乙酯、碳酸丙酯、碳酸丁酯、丙酮酸甲酯、丙酮酸乙酯、丙酮酸丙酯、丙酮酸丁酯、乙酰乙酸甲酯、乙酰乙酸乙酯、乙酸苄酯、苯甲酸乙酯、草酸二乙酯、马来酸二乙酯、及γ-丁内酯等酯类;N,N,N',N'-四甲基脲、N-甲基-2-吡咯烷酮、N,N-二甲基甲酰胺、N,N-二甲基乙酰胺、六甲基磷酰胺、1,3-二甲基-2-咪唑啉酮、及二甲基亚砜等非质子性极性有机溶剂。在一种实施方案中,溶剂例如水及二乙二醇单丁醚。As solvents, for example, aromatics such as benzene, toluene, xylene, ethylbenzene, cresol, and chlorobenzene; methanol, ethanol, n-propanol, isopropanol, n-butanol, n-hexanol, and cyclohexanol can be used Aliphatic alcohols such as ethylene glycol, diethylene glycol, propylene glycol and dipropylene glycol; glycerol; acetone, methyl ethyl ketone, diethyl ketone, methyl isobutyl ketone, ethyl Ketones such as isobutyl ketone and cyclohexanone; ethers such as diethyl ether, dipropyl ether, dibutyl ether, dihexyl ether, benzyl methyl ether, benzyl ethyl ether, and tetrahydrofuran; ethylene glycol mono Methyl ether, ethylene glycol monoethyl ether, ethylene glycol monopropyl ether, ethylene glycol monobutyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol monopropyl ether, propylene glycol monobutyl Ether, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol monopropyl ether, diethylene glycol monobutyl ether and diethylene glycol monophenyl ether Ethers: ethylene glycol dimethyl ether, ethylene glycol diethyl ether, ethylene glycol dipropyl ether, propylene glycol dimethyl ether, propylene glycol diethyl ether, propylene glycol dipropyl ether, diethylene glycol di Glycol diethers such as methyl ether, diethylene glycol diethyl ether and diethylene glycol dipropyl ether; ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, Ethylene glycol monopropyl ether acetate, ethylene glycol monobutyl ether acetate, ethylene glycol monophenyl ether acetate, diethylene glycol monomethyl ether acetate and diethylene glycol mono Diol monoacetate such as ethyl ether acetate; diethylene glycol monopropyl ether acetate, diethylene glycol monobutyl ether acetate, diethylene glycol monophenyl ether acetate, Propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, propylene glycol monopropyl ether acetate, 2-methoxybutyl acetate, 3-methoxybutyl acetate, 4 -Methoxybutyl acetate, 2-methyl-3-methoxybutyl acetate, 3-methyl-3-methoxybutyl acetate, 3-ethyl-3-methyl Oxybutyl acetate, 2-ethoxybutyl acetate, 4-ethoxybutyl acetate, 4-propoxybutyl acetate, 2-methoxypentyl acetate ester, 3-methoxypentyl acetate, 4-methoxypentyl acetate, 2-methyl-3-methoxypentyl acetate, 3-methyl-3-methoxy Monoether monoacetates of diols such as amyl acetate, 3-methyl-4-methoxypentyl acetate and 4-methyl-4-methoxypentyl acetate; Methyl propionate, ethyl propionate, propyl propionate, isopropyl propionate, methyl 2-hydroxypropionate, ethyl 2-hydroxypropionate, 2-hydroxy-2-methyl, methyl-3- Methoxypropionate, Ethyl-3-methoxypropionate, Ethyl-3-ethoxypropionate, Ethyl-3-propoxypropionate, Propyl-3-methoxy propionate, isopropyl-3-methoxypropionate, ethyl ethoxyacetate, ethyl glycolate, methyl 2-hydroxy-3-methylbutyrate, methyl acetate, ethyl acetate , Propyl acetate, Isopropyl acetate, Butyl acetate, Isoamyl acetate, Methyl carbonate, Ethyl carbonate, Propyl carbonate, Butyl carbonate, Methyl pyruvate, Ethyl pyruvate, Propyl pyruvate, Butyl pyruvate, methyl acetoacetate, ethyl acetoacetate, benzyl acetate, ethyl benzoate, diethyl oxalate, diethyl maleate, and γ-butyrolactone and other esters; N,N, N',N'-tetramethylurea, N-methyl-2-pyrrolidone, N,N-dimethylformamide, N,N-dimethylacetamide, hexamethylphosphoramide, 1,3- Aprotic polar organic solvents such as dimethyl-2-imidazolinone and dimethyl sulfoxide. In one embodiment, solvents such as water and diethylene glycol monobutyl ether.

本发明的表面结合剂还可包括催化剂,催化剂的种类并无限制,具体可举例为二甲基乙酰胺。催化剂加速表面结合剂与基材表面之间的作用,可缩短处理时间,有利于制程的控制。催化剂的浓度可介于5mL/L至100mL/L之间,浓度例如为5、6、7、8、9、10、11、12、13、14、15、16、17、18、19、20、25、30、35、40、45、50、55、60、65、70、75、80、85、90、95、100mL/L,但不限于此。The surface binding agent of the present invention may also include a catalyst, and the type of the catalyst is not limited, specifically, dimethylacetamide may be exemplified. The catalyst accelerates the interaction between the surface binder and the surface of the substrate, which can shorten the processing time and facilitate the control of the process. The catalyst concentration can be between 5mL/L and 100mL/L, such as 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20 , 25, 30, 35, 40, 45, 50, 55, 60, 65, 70, 75, 80, 85, 90, 95, 100mL/L, but not limited thereto.

本发明的表面结合剂的pH值一般可介于7至8之间,但不限于此。pH值例如可为7.0、7.1、7.2、7.3、7.4、7.5、7.6、7.7、7.8、7.9、8.0。上述表面结合剂的pH值是不含有酸类化合物时所测量得到的,即本发明的表面结合剂可不含有无机酸及/或有机酸。不过,在其他实施方案中,本发明的表面结合剂还可包括无机酸化合物,其可调整表面结合剂的pH值,另一方面,无机酸化合物也可有微蚀刻的作用,使基材的表面形成极细微的腐蚀痕迹,从而增加与涂布材料的接触面积,提升附着力。The pH value of the surface binding agent of the present invention can generally be between 7 and 8, but is not limited thereto. The pH can be, for example, 7.0, 7.1, 7.2, 7.3, 7.4, 7.5, 7.6, 7.7, 7.8, 7.9, 8.0. The pH value of the above-mentioned surface binding agent is measured when no acid compound is contained, that is, the surface binding agent of the present invention may not contain inorganic acid and/or organic acid. However, in other embodiments, the surface binding agent of the present invention may also include an inorganic acid compound, which can adjust the pH value of the surface binding agent. On the other hand, the inorganic acid compound may also have a microetching effect, making the substrate Microscopic corrosion traces are formed on the surface, thereby increasing the contact area with the coating material and improving adhesion.

无机酸化合物的种类不无特别限定,例如可为选自由硫酸、盐酸、硝酸及磷酸所组成的组中的至少一者,于使用无机酸混合物时,各酸可以任何适当比例组合。在一种实施方案中,表面结合剂中包含硫酸。The type of the inorganic acid compound is not particularly limited. For example, it may be at least one selected from the group consisting of sulfuric acid, hydrochloric acid, nitric acid, and phosphoric acid. When using an inorganic acid mixture, each acid may be combined in any appropriate ratio. In one embodiment, sulfuric acid is included in the surface binding agent.

无机酸化合物的浓度可介于50g/L至400g/L之间,浓度例如为50、55、60、65、70、75、80、85、90、95、100、105、110、115、120、125、130、135、140、145、150、155、160、165、170、175、180、185、190、195、200、210、220、230、240、250、260、270、280、290、300、310、320、330、340、350、360、370、380、390、400g/L,但不限于此。The concentration of the mineral acid compound may be between 50 g/L and 400 g/L, such as 50, 55, 60, 65, 70, 75, 80, 85, 90, 95, 100, 105, 110, 115, 120 ,125,130,135,140,145,150,155,160,165,170,175,180,185,190,195,200,210,220,230,240,250,260,270,280,290 , 300, 310, 320, 330, 340, 350, 360, 370, 380, 390, 400g/L, but not limited thereto.

在其他实施方案中,本发明的表面结合剂还可包括有机酸化合物,其如上述无机酸化合物般可调整表面结合剂的pH值,另一方面,有机酸化合物也可有微蚀刻的作用,使基材的表面形成极细微的腐蚀痕迹,从而增加与涂布材料的接触面积,提升附着力。In other embodiments, the surface binding agent of the present invention can also include an organic acid compound, which can adjust the pH value of the surface binding agent like the above-mentioned inorganic acid compound. On the other hand, the organic acid compound can also have a micro-etching effect, Form very fine corrosion traces on the surface of the substrate, thereby increasing the contact area with the coating material and improving adhesion.

有机酸化合物的种类不无特别限定,例如可为选自由甲酸、乙酸、丙酸、丁酸、戊酸、己酸、草酸、丙烯酸、丁烯酸、异丁烯酸、乙二酸、丙二酸、丁二酸、戊二酸、己二酸、庚二酸、顺丁烯二酸、苯甲酸、苯二甲酸、肉桂酸、乙醇酸、乳酸、苹果酸、水杨酸、甘氨酸、酒石酸、柠檬酸、胺磺酸、β-氯丙酸、烟酸、抗坏血酸、羟基三甲基乙酸及乙酰丙酸所组成的组中的至少一者,在使用有机酸混合物时,各酸可以任何适当比例组合。在一种实施方案中,表面结合剂中包含乙酸。The type of the organic acid compound is not particularly limited, for example, it may be selected from formic acid, acetic acid, propionic acid, butyric acid, pentanoic acid, hexanoic acid, oxalic acid, acrylic acid, crotonic acid, methacrylic acid, oxalic acid, malonic acid, Succinic acid, glutaric acid, adipic acid, pimelic acid, maleic acid, benzoic acid, phthalic acid, cinnamic acid, glycolic acid, lactic acid, malic acid, salicylic acid, glycine, tartaric acid, citric acid , sulfamic acid, β-chloropropionic acid, nicotinic acid, ascorbic acid, hydroxytrimethylacetic acid, and levulinic acid. When using an organic acid mixture, the acids can be combined in any appropriate ratio. In one embodiment, acetic acid is included in the surface binding agent.

有机酸化合物的浓度可介于5g/L至100g/L之间,浓度例如为5、6、7、8、9、10、11、12、13、14、15、16、17、18、19、20、21、22、23、24、25、26、27、28、29、30、31、32、33、34、35、36、37、38、39、40、41、42、43、44、45、46、47、48、49、50、55、60、65、70、75、80、85、90、95、100g/L,但不限于此。The concentration of the organic acid compound can be between 5 g/L and 100 g/L, such as 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19 , 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44 , 45, 46, 47, 48, 49, 50, 55, 60, 65, 70, 75, 80, 85, 90, 95, 100g/L, but not limited thereto.

在添加有机酸化合物、无机酸化合物等酸类化合物的情况,本发明的表面结合剂的pH值大幅降低,例如pH为小于4、小于3、或小于2,但不限于此。具体地,添加有机酸及/或无机酸时的表面结合剂的pH值可为3.9、3.8、3.7、3.6、3.5、3.4、3.3、3.2、3.1、3.0、2.9、2.8、2.7、2.6、2.5、2.4、2.3、2.2、2.1、2.0、1.9、1.8、1.7、1.6、1.5、1.4、1.3、1.2、1.1、1.0。当本发明的表面结合剂不包括酸类化合物时,通常较适合用于非金属的基材表面上;当本发明的表面结合剂包括酸类化合物时,通常较适合用于金属的基材表面上,但不限于此。When acid compounds such as organic acid compounds and inorganic acid compounds are added, the pH value of the surface binding agent of the present invention is greatly reduced, for example, the pH is less than 4, less than 3, or less than 2, but not limited thereto. Specifically, the pH value of the surface binding agent when adding organic acid and/or inorganic acid can be 3.9, 3.8, 3.7, 3.6, 3.5, 3.4, 3.3, 3.2, 3.1, 3.0, 2.9, 2.8, 2.7, 2.6, 2.5 , 2.4, 2.3, 2.2, 2.1, 2.0, 1.9, 1.8, 1.7, 1.6, 1.5, 1.4, 1.3, 1.2, 1.1, 1.0. When the surface binding agent of the present invention does not include acid compounds, it is generally more suitable for use on the surface of non-metallic substrates; when the surface binding agent of the present invention includes acid compounds, it is generally more suitable for use on the surface of metal substrates on, but not limited to.

本发明的表面结合剂还可包括选自由乙醇胺、二乙二醇单丁醚、二甲氧基乙烷所组成的组中的至少一者的其他成分。在不阻碍本发明的目的的情况下,还可添加各种添加剂,可列举例如pH调整剂、分散剂、表面活性剂、防腐剂、粘度调整剂、抗氧化剂、紫外线吸收剂、稳定剂及着色剂等。The surface-binding agent of the present invention may further include at least one other component selected from the group consisting of ethanolamine, diethylene glycol monobutyl ether, and dimethoxyethane. In the case where the object of the present invention is not hindered, various additives may be added, for example, pH adjusters, dispersants, surfactants, preservatives, viscosity adjusters, antioxidants, ultraviolet absorbers, stabilizers and colorants agent etc.

本发明提供一种处理基材表面的方法,包括清洁基材的表面;使表面结合剂与基材的表面接触;任选地以水清洗多余的表面结合剂;以及进行热烘干燥或光固化以于该基材的表面上形成有机层。通过表面结合剂处理基材表面,以提升该基材与覆该基材的表面上的材料之间的附着力。The invention provides a method for treating the surface of a substrate, comprising cleaning the surface of the substrate; contacting a surface bonding agent with the surface of the substrate; optionally cleaning the excess surface bonding agent with water; and performing thermal drying or photocuring An organic layer is formed on the surface of the substrate. The surface of the substrate is treated with a surface binding agent to promote adhesion between the substrate and materials overlying the surface of the substrate.

清洁基材的表面可通过使用有机溶剂或酸性清洁剂来达成,具体地,例如可使用硫酸、磷酸等溶液、异丙酮,但不限于此。Cleaning the surface of the substrate can be achieved by using an organic solvent or an acidic cleaner, specifically, sulfuric acid, phosphoric acid and other solutions, isopropyl ketone, but not limited thereto.

清洁完基材的表面后,使表面结合剂与基材的表面接触。接触的方法无特别限定,可采用溅镀、蒸镀、浸泡或浸渍、旋涂、或喷雾等方法,可任选地选择合适的接触方法。从形成均匀的有机层的观点来看,可优先选用浸泡或浸渍处理。After cleaning the surface of the substrate, the surface bonding agent is brought into contact with the surface of the substrate. The method of contact is not particularly limited, methods such as sputtering, vapor deposition, soaking or immersion, spin coating, or spraying can be used, and an appropriate contact method can be optionally selected. From the viewpoint of forming a uniform organic layer, soaking or immersion treatment is preferably used.

本发明的表面结合剂可适用基材的种类广泛,可以是金属基材或非金属基材,而后续覆于该基材的表面上的层的种类亦广泛,可以是金属层或非金属层。金属基材及金属层的材质例如铜、铝、镍、锌、铁、铬及其合金等,非金属基材及非金属层的材质例如玻璃、聚酰亚胺膜、预浸体、可成像的介电体、可成像的树脂、防焊材、蚀刻光刻胶及硅晶等。由于使用表面结合剂大幅强化了基材的表面附着力,故基材的表面可以是未预先粗化处理的表面。The surface bonding agent of the present invention can be applied to a wide range of substrates, which can be metal substrates or non-metal substrates, and the types of layers subsequently coated on the surface of the substrate are also wide, which can be metal layers or non-metal layers. . Materials of metal substrates and metal layers such as copper, aluminum, nickel, zinc, iron, chromium and their alloys, etc. Materials of non-metal substrates and non-metal layers such as glass, polyimide film, prepreg, imageable Dielectrics, imageable resins, solder resists, etch photoresists and silicon crystals. Since the use of the surface binding agent greatly strengthens the surface adhesion of the substrate, the surface of the substrate may be a surface that has not been roughened in advance.

当采用浸渍处理时,表面结合剂的温度优选介于20℃至60℃之间,更优选介于30℃至50℃之间;浸渍时间优选介于60秒至900秒之间,更优选介于60秒至600秒之间。通常在浸渍处理之后任选地进行水洗步骤,最后进行干燥步骤。When dipping is used, the temperature of the surface binding agent is preferably between 20°C and 60°C, more preferably between 30°C and 50°C; the dipping time is preferably between 60 seconds and 900 seconds, more preferably between Between 60 seconds and 600 seconds. Typically, the dipping treatment is optionally followed by a water washing step and finally a drying step.

当采用喷雾处理时,表面结合剂的温度优选也介于20℃至60℃之间,更优选介于30℃至50℃之间。喷雾压力优选介于0.01MPa至0.3MPa之间且喷雾时间介于15至600秒的条件下进行处理,更优选为喷雾压力介于0.05MPa至0.2MPa且喷雾时间介于30至300秒的条件下进行处理。通常在浸渍处理之后任选地进行水洗步骤,以洗净多余表面结合剂,最后进行热烘干燥或光固化步骤以令该表面结合剂于基材的表面上形成有机层。When spraying is used, the temperature of the surface binding agent is also preferably between 20°C and 60°C, more preferably between 30°C and 50°C. The spray pressure is preferably between 0.01MPa to 0.3MPa and the spray time is between 15 to 600 seconds, more preferably the spray pressure is between 0.05MPa to 0.2MPa and the spray time is between 30 to 300 seconds processed below. Usually, a water washing step is optionally performed after the dipping treatment to remove excess surface binder, and finally a heat drying or photocuring step is performed to allow the surface binder to form an organic layer on the surface of the substrate.

在一种实施方案中,本发明的表面结合剂于接触基材的表面前,可以先稀释成10%至20%的稀释浓度。In one embodiment, the surface-binding agent of the present invention may be diluted to a concentration of 10% to 20% before contacting the surface of the substrate.

本发明的表面结合剂接触基材的表面后,于基材的表面上形成有机层,该有机层为透明且疏水性,由于该有机层极薄,肉眼难辨视,故可通过将水滴落在基材的表面上,观察水是否与表面具有大接触角而呈现水滴状来确定有机层是否成功形成。After the surface-binding agent of the present invention contacts the surface of the substrate, an organic layer is formed on the surface of the substrate. The organic layer is transparent and hydrophobic. Since the organic layer is extremely thin and difficult to see with the naked eye, it can be absorbed by dripping water. On the surface of the substrate, it is observed whether the water has a large contact angle with the surface in a drop shape to determine whether the organic layer is successfully formed.

具体地,本发明的表面结合剂可与如铜板、铜箔基板等金属基材的表面接触,例如将如铜板、铜箔基板等基材浸泡于含有本发明的表面结合剂的浴中,以于该基材的表面上形成有机层,随后再形成如光刻胶的聚合物涂覆材料于该有机层上,以令该有机层介于该涂覆材料与基材之间。另一方面,也可将表面结合剂与玻璃、聚酰亚胺膜等非金属基材的表面接触,形成有机层,随后再镀上镍、铬、铜等金属层,俾令该有机层介于该金属层与基材之间。Specifically, the surface bonding agent of the present invention can be in contact with the surface of metal substrates such as copper plates and copper foil substrates, for example, substrates such as copper plates and copper foil substrates are immersed in a bath containing the surface bonding agent of the present invention to An organic layer is formed on the surface of the substrate, and then a polymer coating material such as photoresist is formed on the organic layer so that the organic layer is interposed between the coating material and the substrate. On the other hand, the surface bonding agent can also be contacted with the surface of non-metallic substrates such as glass and polyimide film to form an organic layer, and then plated with metal layers such as nickel, chromium, and copper to make the organic layer intersect. between the metal layer and the substrate.

以下通过特定的具体实施例说明本发明的实施方式,本领域技术人员可由本说明书所描述的内容轻易地了解本发明的其他优点及功效。Embodiments of the present invention are described below through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the content described in this specification.

测试例1test case 1

实施例1的表面结合剂包括苯并三唑、咪唑以及二氢咪唑等提升附着力的化合物。于室温下,将未粗化处理的铜板浸泡于实施例1的表面结合剂内15分钟,使表面结合剂处理铜表面,接着水洗、烘干,然后于铜表面上涂布/压膜干膜光刻胶(干膜光刻胶E9500,购自长兴材料工业股份有限公司)。以3%NaOH溶液作为去膜液,并将涂布有光刻胶的铜板浸泡于去膜液内,操作温度为50℃,观察光刻胶自铜面上剥离的情形,当光刻胶剥离面积达到30%时记录时间。The surface binding agent in Example 1 includes compounds that can improve adhesion, such as benzotriazole, imidazole, and dihydroimidazole. At room temperature, soak the unroughened copper plate in the surface bonding agent of Example 1 for 15 minutes, so that the surface bonding agent treats the copper surface, then wash with water, dry, and then apply/press a dry film on the copper surface Photoresist (dry film photoresist E9500, purchased from Eternal Materials Industry Co., Ltd.). Use 3% NaOH solution as the film removal solution, and soak the copper plate coated with photoresist in the film removal solution at an operating temperature of 50°C. Observe the peeling of the photoresist from the copper surface. The time is recorded when the area reaches 30%.

实施例2至7以实施例1相同步骤进行测试,但调整表面结合剂的组成、表面结合剂浸泡时间等参数如下表1所示。而比较例1是未浸泡表面结合剂,直接使未粗化处理的铜板浸泡于去膜液内。Examples 2 to 7 were tested in the same steps as in Example 1, but parameters such as the composition of the surface binding agent and the soaking time of the surface binding agent were adjusted as shown in Table 1 below. In Comparative Example 1, the surface binding agent was not soaked, and the unroughened copper plate was directly soaked in the film-removing solution.

实施例1至7及比较例1的表面结合剂组成、表面结合剂浸泡时间及光刻胶剥离时间如下表1所示。表面结合剂原液组成中,苯并三唑的浓度介于3g/L至30g/L之间、咪唑的浓度介于0.5g/L至5g/L之间、二氢咪唑的浓度介于0.5g/L至5g/L之间、2-甲基吡啶的浓度介于3g/L至30g/L之间、5-甲基苯并三唑的浓度介于0.5g/L至5g/L之间、1,2-二甲基咪唑的浓度介于0.5g/L至5g/L之间、2-巯基吡啶的浓度介于0.5g/L至5g/L之间、二甲基乙酰胺的浓度介于5mL/L至50mL/L之间。以表面结合剂处理基材表面之前,将原液以水稀释为20%再进行处理。The surface binding agent composition, surface binding agent soaking time and photoresist stripping time of Examples 1 to 7 and Comparative Example 1 are shown in Table 1 below. In the composition of the surface binding agent stock solution, the concentration of benzotriazole is between 3g/L and 30g/L, the concentration of imidazole is between 0.5g/L and 5g/L, and the concentration of dihydroimidazole is between 0.5g /L to 5g/L, the concentration of 2-picoline is between 3g/L and 30g/L, the concentration of 5-methylbenzotriazole is between 0.5g/L and 5g/L , the concentration of 1,2-dimethylimidazole is between 0.5g/L and 5g/L, the concentration of 2-mercaptopyridine is between 0.5g/L and 5g/L, the concentration of dimethylacetamide Between 5mL/L and 50mL/L. Before treating the surface of the substrate with the surface binding agent, the stock solution is diluted to 20% with water and then treated.

表1Table 1

Figure BDA0003436578420000101
Figure BDA0003436578420000101

由上表1的结果可知,铜面经实施例1的表面结合剂处理可减缓光刻胶自铜面剥离的时间,由1分01秒延长至2分02秒,显示实施例1的表面结合剂可有效提升铜面与光刻胶之间的附着力。另一方面,随着表面结合剂中的提升附着力的化合物种类增加,铜面与光刻胶的间的附着力提升效果更加显著,实施例6的结果显示光刻胶自铜面剥离的时间已大幅延长至3分29秒,而且,即便使表面结合剂浸泡时间缩减为3分钟,如实施例7所示,光刻胶自铜面剥离的时间仍能维持在3分18秒,远远优于未使用表面结合剂的比较例1。As can be seen from the results in Table 1 above, the copper surface treated with the surface bonding agent of Example 1 can slow down the time for the photoresist to peel off from the copper surface, extending from 1 minute 01 seconds to 2 minutes 02 seconds, showing that the surface bonding agent of Example 1 The agent can effectively improve the adhesion between the copper surface and the photoresist. On the other hand, as the types of compounds that improve the adhesion in the surface binder increase, the effect of improving the adhesion between the copper surface and the photoresist is more significant. The results of Example 6 show that the time for the photoresist to peel off from the copper surface It has been significantly extended to 3 minutes and 29 seconds, and even if the soaking time of the surface bonding agent is reduced to 3 minutes, as shown in Example 7, the time for the photoresist to be peeled off from the copper surface can still be maintained at 3 minutes and 18 seconds, which is far from It is better than Comparative Example 1 which does not use surface binding agent.

测试例2test case 2

实施例8至15是准备具有1oz厚度的铜箔基板(FR-4,购自南亚塑胶工业股份有限公司),并以酸性清洁剂清洁铜箔表面,接着于室温下使铜箔基板浸泡于表面结合剂内,其中,该表面结合剂包括苯并三唑、咪唑、二氢咪唑、2-甲基吡啶、5-甲基苯并三唑、1,2-二甲基咪唑及2-巯基吡啶等提升表面附着力的化合物以及二甲基乙酰胺,且表面结合剂原液各成分比例如测试例1所述;之后水洗、烘干;再于铜箔表面上涂布/压膜干膜光刻胶(干膜光刻胶E9500,购自长兴材料工业股份有限公司),形成25μm厚度的光刻胶;以10*10共计100个圆点图形对光刻胶曝光,其中每个圆点图形的直径为50μm,且各圆点的间距为50μm;后续以浓度1%(即10g/L)的碳酸钠溶液作为显影液,以喷洒的方式对光刻胶进行显影,温度控制为30℃、压力设置为30psi、喷洒处理时间为60秒,然后水洗、烘干;最后观察光刻胶的圆点图形的保留情况。比较例2则未浸泡表面结合剂,直接使铜箔基板涂布光刻胶后曝光、显影、水洗、烘干。实施例8至15及比较例2的参数及结果如下表2所示。Embodiments 8 to 15 are to prepare a copper foil substrate (FR-4, purchased from Nan Ya Plastic Industry Co., Ltd.) with a thickness of 1 oz, and clean the surface of the copper foil with an acidic cleaner, and then soak the copper foil substrate on the surface at room temperature In the binding agent, wherein the surface binding agent includes benzotriazole, imidazole, dihydroimidazole, 2-picoline, 5-methylbenzotriazole, 1,2-dimethylimidazole and 2-mercaptopyridine Compounds and dimethylacetamide that improve surface adhesion, and the ratio of the components of the surface binder stock solution are as described in Test Example 1; then washed with water and dried; then coated/laminated dry film photolithography on the surface of copper foil Glue (dry film photoresist E9500, purchased from Changxing Materials Industry Co., Ltd.) to form a photoresist with a thickness of 25 μm; a total of 100 dot patterns of 10*10 are used to expose the photoresist, wherein each dot pattern The diameter is 50 μm, and the distance between each dot is 50 μm; subsequently, the sodium carbonate solution with a concentration of 1% (ie 10g/L) is used as the developing solution to develop the photoresist by spraying, the temperature is controlled at 30°C, the pressure The setting is 30psi, the spraying treatment time is 60 seconds, then washed with water and dried; finally observe the retention of the dot pattern of the photoresist. In Comparative Example 2, the surface bonding agent was not soaked, and the copper foil substrate was directly coated with photoresist and then exposed, developed, washed with water, and dried. The parameters and results of Examples 8 to 15 and Comparative Example 2 are shown in Table 2 below.

表2Table 2

Figure BDA0003436578420000111
Figure BDA0003436578420000111

圆点数量存留的比例越高,表示铜箔表面与光刻胶的间的附着力越好。表2的结果中,未使用表面结合剂的比较例2的完整圆点数量仅有71个,而使用表面结合剂的实施例8至15的完整圆点数量达到92个以上,且随着浸泡时间的增加及稀释浓度的提升,完整圆点数量更可达到100个,拥有极佳的良率。The higher the ratio of dots remaining, the better the adhesion between the copper foil surface and the photoresist. In the results of Table 2, the number of complete dots in Comparative Example 2 that did not use the surface binding agent was only 71, while the number of complete dots in Examples 8 to 15 that used the surface binding agent reached more than 92, and as the immersion With the increase of time and the increase of dilution concentration, the number of complete dots can reach 100, with excellent yield.

测试例3Test case 3

另以表面结合剂喷洒处理玻璃基板的表面,其中,该表面结合剂包括苯并三唑、咪唑、二氢咪唑、2-甲基吡啶、5-甲基苯并三唑、1,2-二甲基咪唑及2-巯基吡啶等提升表面附着力的化合物以及二甲基乙酰胺,作为实施例16,其中,表面结合剂原液各成分比例如测试例1所述,且以水稀释原液为20%使用。接着于该玻璃基板表面上设计形成有数条并行排列且宽度为2μm、厚度为20μm的长条形光刻胶(压模参数:压膜温度90℃、压膜压力3kg,压膜速度2m/min),并以测试例2的条件进行曝光显影。结果显示显影后的光刻胶没有浮离、脱落的现象发生,即表面结合剂也能有效提升玻璃表面与光刻胶之间的附着力。In addition, the surface of the glass substrate is sprayed with a surface binding agent, wherein the surface binding agent includes benzotriazole, imidazole, dihydroimidazole, 2-picoline, 5-methylbenzotriazole, 1,2-bis Compounds such as methylimidazole and 2-mercaptopyridine, and dimethylacetamide that promote surface adhesion, as Example 16, wherein the ratio of each component of the surface-binding agent stock solution is as described in Test Example 1, and the stock solution is diluted with water to 20 %use. Then, on the surface of the glass substrate, several long strips of photoresist with a width of 2 μm and a thickness of 20 μm are designed and formed (molding parameters: lamination temperature 90°C, lamination pressure 3kg, lamination speed 2m/min ), and carry out exposure development with the condition of test example 2. The results showed that the developed photoresist did not float off or fall off, that is, the surface binder can also effectively improve the adhesion between the glass surface and the photoresist.

测试例4Test case 4

将聚酰亚胺膜以异丙醇(IPA)处理5分钟后水洗烘干,接着于聚酰亚胺膜的表面上溅镀100nm厚度的铬层,再溅镀500nm厚度的铜层,作为比较例3至5。再以3M#610胶带贴附至镀层表面上,去除胶带与镀层间的气泡后,于贴附胶带后1分钟内以90度垂直拉扯的方式以小于3秒的速度快速将胶带自镀层表面撕离,观察镀层的剥落情况。其中,3M#600、3M610胶带的初期粘性为32oz/inch,约为357g/cm。The polyimide film was treated with isopropyl alcohol (IPA) for 5 minutes, then washed and dried with water, then a chromium layer with a thickness of 100nm was sputtered on the surface of the polyimide film, and a copper layer with a thickness of 500nm was sputtered again, as a comparison Examples 3 to 5. Then attach 3M#610 tape to the surface of the coating, remove the air bubbles between the tape and the coating, and within 1 minute after attaching the tape, pull the tape vertically at 90 degrees at a speed of less than 3 seconds to tear off the tape from the surface of the coating to observe the peeling off of the coating. Among them, the initial viscosity of 3M#600 and 3M610 adhesive tape is 32oz/inch, which is about 357g/cm.

适用:CID A-A-113,Type 1,Class B,3M Brand Premium Transparent FilmTape 600,3M Brand Premium Cellophane Tape 610Applicable: CID A-A-113,Type 1,Class B,3M Brand Premium Transparent FilmTape 600,3M Brand Premium Cellophane Tape 610

依据:IPC-TM-650Number 2.4.1/2.4.1.1/2.4.1.3/2.4.1.4/2.4.28/2.4.28.1According to: IPC-TM-650Number 2.4.1/2.4.1.1/2.4.1.3/2.4.1.4/2.4.28/2.4.28.1

图1至图3的结果显示,在未使用表面结合剂的情形下,胶带下金属镀层的剥落面积达70至99%,表示聚酰亚胺膜与金属镀层之间的附着力不足,无法抵抗胶带的剥离力。The results in Figures 1 to 3 show that, without the use of a surface adhesive, the peeling area of the metal plating under the tape reached 70 to 99%, indicating that the adhesion between the polyimide film and the metal plating was insufficient to resist The peel force of the tape.

另一方面,将聚酰亚胺膜以表面活性剂处理5分钟后水洗;其后浸泡于表面结合剂内5分钟后水洗烘干,使表面结合剂处理聚酰亚胺膜表面,其中,该表面结合剂包括苯并三唑、咪唑、二氢咪唑、2-甲基吡啶、5-甲基苯并三唑、1,2-二甲基咪唑及2-巯基吡啶等提升表面附着力的化合物以及二甲基乙酰胺,其中,表面结合剂原液各成分比例如测试例1所述,且以水稀释原液为20%使用;之后水洗、烘干;接着使用直流溅镀(功率600W),溅镀100nm厚度的铬层、500nm厚度的铜层为金属镀层,作为实施例17至19。最后以3M 610胶带贴附至金属镀层以前述的方法测试金属镀层的剥落情况。On the other hand, the polyimide film is washed with water after being treated with a surfactant for 5 minutes; then soaked in the surface binding agent for 5 minutes and then washed and dried to make the surface binding agent treat the surface of the polyimide film, wherein the Surface binding agents include benzotriazole, imidazole, dihydroimidazole, 2-picoline, 5-methylbenzotriazole, 1,2-dimethylimidazole and 2-mercaptopyridine, etc. to enhance surface adhesion And dimethylacetamide, wherein, the ratio of each component of the surface-binding agent stock solution is as described in Test Example 1, and it is 20% to use the stock solution diluted with water; then wash with water and dry; then use DC sputtering (power 600W), sputtering The chromium layer plated with a thickness of 100nm and the copper layer with a thickness of 500nm are metal plating layers, as examples 17 to 19. Finally, 3M 610 adhesive tape was attached to the metal coating, and the peeling of the metal coating was tested by the aforementioned method.

图4至图6的结果显示使用表面结合剂处理聚酰亚胺膜表面后,胶带下金属镀层的剥落面积小于1%,此表示聚酰亚胺膜表面通过表面结合剂处理后可实现与金属层之间的优异结合,可抵抗胶带的剥离力。The results of Fig. 4 to Fig. 6 show that after using the surface binding agent to treat the surface of the polyimide film, the peeling area of the metal coating under the adhesive tape is less than 1%, which means that the surface of the polyimide film can be bonded to the metal after the surface binding agent is processed. Excellent bond between layers, resists tape peel forces.

由上述可知,本发明的表面结合剂可处理基材表面,于基材表面上形成有机层,有效提升未预先粗化处理的基材表面与涂布材料之间的附着力,避免涂布材料脱落、剥离。由于可排除粗化处理制程,降低制程成本且避免产生粗化处理用废弃物(重金属废水、腐蚀性强酸等),而且,所适用的基材及涂布材料种类广泛,也具有重工性,重复使用本发明的表面结合剂仍具有优异的效果。From the above, it can be known that the surface binding agent of the present invention can treat the surface of the substrate, form an organic layer on the surface of the substrate, effectively improve the adhesion between the surface of the substrate that has not been roughened in advance and the coating material, and avoid the coating material To fall off, to peel off. Because the roughening process can be eliminated, the cost of the process can be reduced and the waste for roughening (heavy metal wastewater, corrosive strong acid, etc.) The use of the surface binding agent of the present invention still has excellent effects.

上述实施例用以例示性说明本发明的原理及其功效,而非用于限制本发明。任何本领域技术人员均可在不违背本发明的精神及范畴下,对上述实施例进行修改。因此本发明的权利保护范围,应如后述的权利要求书所列。The above-mentioned embodiments are used to illustrate the principles and effects of the present invention, but not to limit the present invention. Any person skilled in the art can modify the above-mentioned embodiments without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention should be listed in the following claims.

应当理解地,在本发明所描述的技术内容所能涵盖的范围内,各技术特征(例如实施方案及实施例所描述的)可以自由地相互组合以形成新的或更优选的技术方案,为简洁起见,在此不赘述。且本发明所述的由端值构成的数值范围中,只要数值落于上下两端值之间,即应包含在本发明所描述的范围内,且其与端点或其他数值所形成的次范围也应理所当然地包含在本发明所描述的范围内。It should be understood that within the scope covered by the technical content described in the present invention, various technical features (such as those described in the embodiments and examples) can be freely combined with each other to form new or more preferred technical solutions, for For the sake of brevity, it is not repeated here. And in the numerical range composed of end values described in the present invention, as long as the numerical value falls between the upper and lower end values, it shall be included in the range described in the present invention, and it and the sub-range formed by the end points or other numerical values It should also be naturally included within the scope of the present invention.

Claims (23)

1. A surface bonding agent for improving the surface adhesion of a non-metal base material is characterized by comprising a triazole compound and an imidazole compound.
2. The surface binding agent according to claim 1, wherein the triazole compound comprises at least one selected from benzotriazole and 5-methylbenzotriazole, and the imidazole compound comprises at least one selected from imidazole, dihydroimidazole and 1, 2-dimethylimidazole.
3. The surface binding agent of claim 1, further comprising a pyridine compound.
4. The surface binding agent of claim 3, wherein the pyridine compound comprises at least one selected from the group consisting of 2-methylpyridine and 2-mercaptopyridine.
5. The surface binding agent of claim 1, wherein the concentration of the triazole compound and the imidazole compound is each between 0.05g/L and 50 g/L.
6. The surface binding agent of claim 3, wherein the pyridine compound is present at a concentration of between 0.05g/L and 50 g/L.
7. The surface binding agent of claim 1, further comprising dimethylacetamide.
8. The surface binding agent of claim 7, wherein the concentration of dimethylacetamide is between 5mL/L and 100 mL/L.
9. The surface binding agent according to claim 1, wherein the surface binding agent does not comprise an acid compound.
10. The surface bonding agent of claim 1, further used for improving the surface adhesion of a metal substrate.
11. The surface binding agent of claim 10, further comprising at least one of an inorganic acid compound and an organic acid compound.
12. The surface binding agent of claim 11, wherein the inorganic acid compound comprises at least one selected from the group consisting of sulfuric acid, hydrochloric acid, nitric acid, and phosphoric acid.
13. The surface binding agent of claim 11, wherein the organic acid compound comprises at least one selected from the group consisting of formic acid, acetic acid, propionic acid, butyric acid, valeric acid, caproic acid, oxalic acid, acrylic acid, crotonic acid, methacrylic acid, oxalic acid, malonic acid, succinic acid, glutaric acid, adipic acid, pimelic acid, maleic acid, benzoic acid, phthalic acid, cinnamic acid, glycolic acid, lactic acid, malic acid, salicylic acid, glycine, tartaric acid, citric acid, sulfamic acid, beta-chloropropionic acid, nicotinic acid, ascorbic acid, hydroxytrimethylacetic acid and levulinic acid.
14. The surface binding agent according to claim 1, further comprising at least one member selected from the group consisting of ethanolamine, diethylene glycol monobutyl ether, and dimethoxyethane.
15. A method of treating a surface of a substrate comprising contacting the surface-binding agent of any one of claims 1 to 14 with the surface of the substrate to promote adhesion to a layer overlying the surface of the substrate, wherein the substrate is a metal substrate or a non-metal substrate and the layer overlying the surface of the substrate is a metal layer or a non-metal layer.
16. The method of claim 15, wherein the metal substrate and the metal layer are formed of a material including at least one selected from the group consisting of copper, aluminum, nickel, zinc, iron, chromium, and alloys thereof.
17. The method of claim 15, wherein the non-metallic substrate and the non-metallic layer are formed from glass, polyimide film, prepreg, imageable dielectric, imageable resin, solder resist, etch resist, or silicon crystal.
18. The method of claim 15, wherein the surface binding agent is contacted with the surface of the substrate by spin coating, dipping, or spraying.
19. The method of claim 15, wherein the surface binding agent is contacted with the surface of the substrate at a reaction temperature of between 20 ℃ and 60 ℃.
20. The method of claim 15, wherein the surface binding agent is contacted with the surface of the substrate for a reaction time of between 30 seconds and 900 seconds.
21. The method of claim 15, wherein the surface of the substrate is a surface that has not been previously roughened.
22. The method as claimed in claim 15, wherein the surface binding agent is pre-diluted to 10% to 20% prior to contacting the surface of the substrate.
23. The method of claim 15, further comprising washing excess surface binder after the surface binder contacts the surface of the substrate, and then heat drying the substrate.
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