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CN115443439A - 显示生产设备的运转状况的显示装置及基板生产系统 - Google Patents

显示生产设备的运转状况的显示装置及基板生产系统 Download PDF

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Publication number
CN115443439A
CN115443439A CN202080100014.4A CN202080100014A CN115443439A CN 115443439 A CN115443439 A CN 115443439A CN 202080100014 A CN202080100014 A CN 202080100014A CN 115443439 A CN115443439 A CN 115443439A
Authority
CN
China
Prior art keywords
display
unit
level
production
production line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202080100014.4A
Other languages
English (en)
Chinese (zh)
Inventor
市川崚
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Corp
Original Assignee
Fuji Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Corp filed Critical Fuji Corp
Publication of CN115443439A publication Critical patent/CN115443439A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/4184—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by fault tolerance, reliability of production system
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31467—Display of operating conditions of machines, workcells, selected programs
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45031—Manufacturing semiconductor wafers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Quality & Reliability (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • User Interface Of Digital Computer (AREA)
CN202080100014.4A 2020-05-01 2020-05-01 显示生产设备的运转状况的显示装置及基板生产系统 Pending CN115443439A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2020/018475 WO2021220519A1 (ja) 2020-05-01 2020-05-01 生産設備の稼働状況を表示する表示装置及び基板生産システム

Publications (1)

Publication Number Publication Date
CN115443439A true CN115443439A (zh) 2022-12-06

Family

ID=78373601

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202080100014.4A Pending CN115443439A (zh) 2020-05-01 2020-05-01 显示生产设备的运转状况的显示装置及基板生产系统

Country Status (4)

Country Link
JP (1) JP7369282B2 (ja)
CN (1) CN115443439A (ja)
DE (1) DE112020007142T5 (ja)
WO (1) WO2021220519A1 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023286178A1 (ja) 2021-07-13 2023-01-19 株式会社Fuji 工程管理装置

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10301756A (ja) * 1997-04-25 1998-11-13 Nippon Telegr & Teleph Corp <Ntt> 選択項目提示方法及び装置
JP2004363312A (ja) * 2003-06-04 2004-12-24 Fuji Mach Mfg Co Ltd 対基板作業ライン管理システム
JP2005346444A (ja) * 2004-06-03 2005-12-15 Yokogawa Electric Corp 機器管理システム
JP2012160056A (ja) * 2011-02-01 2012-08-23 Denso Corp 製造ライン監視システム
WO2014049871A1 (ja) * 2012-09-28 2014-04-03 富士機械製造株式会社 情報表示システム
WO2017159501A1 (ja) * 2016-03-15 2017-09-21 日本精機株式会社 表示装置及びプラント機器状態収集システム

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61136333A (ja) * 1984-12-07 1986-06-24 Yamatake Honeywell Co Ltd 警報選択表示方式
JP3445409B2 (ja) * 1995-06-12 2003-09-08 東芝システムテクノロジー株式会社 プラント警報監視装置
JP2011118493A (ja) 2009-12-01 2011-06-16 Hitachi High-Tech Control Systems Corp プラント監視制御システム

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10301756A (ja) * 1997-04-25 1998-11-13 Nippon Telegr & Teleph Corp <Ntt> 選択項目提示方法及び装置
JP2004363312A (ja) * 2003-06-04 2004-12-24 Fuji Mach Mfg Co Ltd 対基板作業ライン管理システム
JP2005346444A (ja) * 2004-06-03 2005-12-15 Yokogawa Electric Corp 機器管理システム
JP2012160056A (ja) * 2011-02-01 2012-08-23 Denso Corp 製造ライン監視システム
WO2014049871A1 (ja) * 2012-09-28 2014-04-03 富士機械製造株式会社 情報表示システム
WO2017159501A1 (ja) * 2016-03-15 2017-09-21 日本精機株式会社 表示装置及びプラント機器状態収集システム

Also Published As

Publication number Publication date
JPWO2021220519A1 (ja) 2021-11-04
DE112020007142T5 (de) 2023-02-16
JP7369282B2 (ja) 2023-10-25
WO2021220519A1 (ja) 2021-11-04

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