CN115326803A - Method and device for detecting position abnormality of rotating frame - Google Patents

Abstract

The embodiment of the disclosure provides a detection method and a detection device for position abnormality of a rotating frame, wherein the detection method comprises the following steps: acquiring an image of the rotating frame at a detection position; extracting a first characteristic line of the rotating frame from the image; extracting a second characteristic line of the manipulator from the image; determining an included angle between the first characteristic line and the second characteristic line, and judging whether the included angle is larger than or equal to a preset included angle; and if the included angle is larger than the preset included angle, judging that the position of the rotating frame is abnormal. The method for detecting the position abnormality of the rotating frame can detect whether the state of the rotating frame is abnormal or not.

Description

Detection method and detection device for abnormal position of turret

technical field

The disclosure relates to the technical field of coating equipment, in particular, to a method for detecting an abnormal position of a turntable and a device for detecting an abnormal position of a manipulator.

Background technique

A common coating machine has the function of automatic loading and unloading, and usually includes a loading chamber, a transfer chamber and a process chamber. The transfer chamber has a vacuum manipulator responsible for transporting the substrate in the loading chamber to the process chamber, or from the process chamber to the loading chamber. Since the loading chamber, transfer chamber and process chamber are all working in a vacuum state, and the servo motor used to drive the movement of the manipulator and the rotation of the turret cannot work in a vacuum, magnetic fluids are respectively installed on the transfer chamber and the process chamber for sealing.

The turret servo motor on the process chamber is connected to one end of the magnetic fluid through a coupling, and the other end of the magnetic fluid is also connected to the workpiece turret through a coupling. The drive motor of the manipulator on the transfer chamber is connected to one end of the other magnetic fluid through a coupling, and the other end of the magnetic fluid is also connected to the sheet taking mechanism of the manipulator through a coupling.

During the operation of the system, as long as a coupling slips, it will cause the position of the moving parts to be inaccurate, resulting in damage to the moving parts.

It should be noted that the information disclosed in the above background section is only for enhancing the understanding of the background of the present disclosure, and therefore may include information that does not constitute the prior art known to those of ordinary skill in the art.

Contents of the invention

The purpose of the embodiments of the present disclosure is to provide a detection method and detection device for an abnormal position of the turret, which can identify whether the state of the turret is abnormal through visual detection.

Other features and advantages of the present disclosure will become apparent from the following detailed description, or in part, be learned by practice of the present disclosure.

According to an aspect of an embodiment of the present disclosure, a method for detecting an abnormal position of a turret is provided, and the method for detecting includes:

Obtain the image of the turret at the detection position;

extracting a first feature line of the turret from the image, and extracting a second feature line of the manipulator from the image;

determining the included angle between the first characteristic line and the second characteristic line, and judging whether the included angle is greater than or equal to a preset included angle;

If the included angle is greater than the preset included angle, it is determined that the position of the turntable is abnormal.

In an exemplary embodiment of the present disclosure, the detection method further includes:

If the included angle is less than or equal to the preset included angle, it is determined that the position of the turntable is normal.

In an exemplary embodiment of the present disclosure, the first characteristic line is a structural feature on the turntable and a structural feature on the manipulator.

In an exemplary embodiment of the present disclosure, the second feature line is a structural feature on the manipulator.

In an exemplary embodiment of the present disclosure, when the turret is at a standard position, the first characteristic line is parallel to the second characteristic line.

According to another aspect of the embodiments of the present disclosure, a detection device for an abnormal position of a turntable is provided, the detection device includes:

An image acquisition module, configured to acquire the detection images of the turret at the detection position and the manipulator at the detection position;

A feature extraction module, connected to the image acquisition module, extracts the first feature line on the turntable and the second feature line on the manipulator from the detection image;

an included angle calculation module, connected to the feature extraction module, configured to calculate an included angle between the first feature line and the second feature line;

The included angle comparison module is connected with the included angle calculation module, and compares the obtained included angle with a preset included angle;

The output module is connected with the included angle comparison module, and if the included angle is larger than the preset included angle, then output the information about the abnormal position of the turret.

In an exemplary embodiment of the present disclosure, if the included angle is less than or equal to the preset included angle, the output module outputs the normal information of the turret position.

In an exemplary embodiment of the present disclosure, the detection device further includes:

A display module, connected to the output module, for displaying the abnormal position information and the normal position information of the output terminal of the output module.

In an exemplary embodiment of the present disclosure, the detection device further includes:

The control module is connected with the image acquisition module, the feature extraction module, the included angle calculation module, the included angle comparison module, the output module and the display module.

In an exemplary embodiment of the present disclosure, when the turret is at a standard position, the first characteristic line is parallel to the second characteristic line.

The present disclosure provides a detection method for an abnormal position of the turret. First, the image of the turret at the detection position is obtained, and then the first characteristic line of the turret is extracted from the image, and the second characteristic line of the manipulator is extracted from the image; then the second characteristic line is determined. The included angle between the first characteristic line and the second characteristic line, and judge whether the included angle is greater than or equal to the preset included angle; if the included angle is larger than the preset included angle, it is judged that the position of the turret is abnormal. The abnormality of the turret position is detected by visual recognition with high reliability, and because of the convenient preset function, the operation is simple and fast.

It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the present disclosure.

Description of drawings

The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the disclosure and together with the description serve to explain the principles of the disclosure. Apparently, the drawings in the following description are only some embodiments of the present disclosure, and those skilled in the art can obtain other drawings according to these drawings without creative efforts. In the attached picture:

FIG. 1 is a flow chart of a method for detecting an abnormal position of a turret provided by an embodiment of the present disclosure;

FIG. 2 is a schematic diagram of a coating machine system and a visual recognition system provided by an embodiment of the present disclosure;

FIG. 3 is a process diagram for detecting an abnormal position of a turntable by a visual recognition device provided by an embodiment of the present disclosure;

FIG. 4 is a schematic diagram of preset feature positions on a turntable provided by an embodiment of the present disclosure;

FIG. 5 is a schematic diagram of an abnormal position of the turret provided by an embodiment of the present disclosure;

FIG. 6 is a schematic diagram of calculating an abnormal position of a turret provided by an embodiment of the present disclosure;

Fig. 7 is a schematic diagram of a detection device for an abnormal position of a turntable provided by an embodiment of the present disclosure.

Detailed ways

Example embodiments will now be described more fully with reference to the accompanying drawings. Example embodiments may, however, be embodied in many forms and should not be construed as limited to the examples set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete and will fully convey the concept of example embodiments to those skilled in the art.

Furthermore, the described features, structures, or characteristics may be combined in any suitable manner in one or more embodiments. In the following description, numerous specific details are provided in order to give a thorough understanding of embodiments of the present disclosure. However, those skilled in the art will appreciate that the technical solutions of the present disclosure may be practiced without one or more of the specific details, or other methods, components, means, steps, etc. may be employed. In other instances, well-known methods, apparatus, implementations, or operations have not been shown or described in detail to avoid obscuring aspects of the present disclosure.

The block diagrams shown in the drawings are merely functional entities and do not necessarily correspond to physically separate entities. That is, these functional entities may be implemented in software, or in one or more hardware modules or integrated circuits, or in different networks and/or processor devices and/or microcontroller devices entity.

The flow charts shown in the drawings are only exemplary illustrations, and do not necessarily include all contents and operations/steps, nor must they be performed in the order described. For example, some operations/steps can be decomposed, and some operations/steps can be combined or partly combined, so the actual order of execution may be changed according to the actual situation.

Embodiments of the present disclosure firstly provide a detection method for an abnormal position of the turret, as shown in FIG. 1 , the detection method includes:

Step S100, acquiring an image of the turret at the detection position;

Step S200, extracting the first characteristic line of the turret from the image, and extracting the second characteristic line of the manipulator from the image;

Step S300, determining the included angle between the first characteristic line and the second characteristic line, and judging whether the included angle is greater than or equal to a preset included angle;

Step S400, if the included angle is greater than the preset included angle, it is determined that the position of the turntable is abnormal.

The present disclosure provides a detection method for an abnormal position of the turret. First, the image of the turret at the detection position is obtained, and then the first characteristic line of the turret is extracted from the image, and the second characteristic line of the manipulator is extracted from the image; then the second characteristic line is determined. The included angle between the first characteristic line and the second characteristic line, and judge whether the included angle is greater than or equal to the preset included angle; if the included angle is larger than the preset included angle, it is judged that the position of the turret is abnormal. The abnormality of the turret position is detected by visual recognition with high reliability, and because of the convenient preset function, the operation is simple and fast.

In one embodiment of the present disclosure, the detection method also includes:

Step S500, if the included angle is less than or equal to the preset included angle, it is judged that the position of the turret is normal.

If the included angle between the first characteristic line and the second characteristic line is less than or equal to the preset included angle, it is determined that the position of the turret is normal. It realizes the identification of whether the state of the vacuum turret is abnormal through the visual recognition algorithm, effectively avoiding the possibility of equipment collision damage due to incorrect position, high reliability, and simple and quick operation.

Specifically, as shown in FIG. 2 , the coating machine includes a loading chamber, a transport chamber 620 and a process chamber 630 . The transfer chamber 620 has a robot arm 640 in a vacuum state, which is responsible for transporting the substrate in the loading chamber to the process chamber 630 or from the process chamber 630 to the loading chamber. Since the loading chamber, the transfer chamber 620 and the process chamber 630 work in a vacuum state, and the XO-axis servo motor 650 used to drive the manipulator 640 to move and the M-axis servo motor 660 to rotate the turntable 670 cannot work under vacuum, so in The transfer chamber 620 and the process chamber 630 are respectively provided with magnetic fluid for sealing. The M-axis servo motor 660 on the process chamber 630 is connected to one end of the magnetic fluid through a coupling, and the other end of the magnetic fluid is also connected to the turntable 670 through a coupling. The XO-axis servo motor 650 on the transmission chamber 620 is connected to one end of another magnetic fluid through a coupling, and the other end of the magnetic fluid is also connected to the manipulator 640 through a coupling. During the operation of the system, as long as a coupling slips, it will cause the position of the moving parts to be inaccurate, resulting in damage to the moving parts. The situations that cause this problem are mainly divided into: the position of the manipulator 640 driven by the XO axis is not correct, the position of the substrate on the manipulator 640 is not correct, the position of the turret 670 driven by the M axis is not correct, and the position of the substrate on the turret 670 is not correct.

This disclosure aims at the problem of incorrect position of the turntable driven by the M-axis. A visual identification device is provided on the coating machine to judge the state of the turntable from the position of the turntable driven by the M-axis, and solve the collision damage of the moving parts caused by the incorrect position of the turntable. The problem.

Among them, the visual recognition device includes an industrial camera and light source 720, a controller 710, a display 740, preset features of the detected object and auxiliary positioning of the detected object. The visual recognition device includes an M-axis driven turntable position discrimination algorithm.

Specifically, the visual recognition device is provided with an observation window 730 above the process chamber 630. The industrial camera and light source 720 are erected above the observation window 730 and work in an atmospheric state. Below the observation window 730 is a manipulator 640 in a vacuum state. The industrial camera and light source 720 are connected to the controller 710, and the controller 710 receives instructions from the coating machine control system 610 to control the industrial camera and light source 720 to take pictures. The display 740 is used to display the state of the detected object, and related parameters can be set through the interface. The controller 710 is provided with an M-axis driven turntable position visual recognition algorithm for judging the abnormal state of the turntable.

Wherein, the image of the turret at the detection position is obtained by the visual recognition device for subsequent comparison. Specifically, as shown in Figure 3, first start the visual recognition device, send a ready signal to the coating control system, the coating machine control system drives the turntable 670 to the detection position, the visual recognition device starts the industrial camera and the light source 720 to take pictures, and after the image preview After the processing, the detection image after the turret 670 moves to the detection position is acquired.

As shown in Figure 3, the controller invokes the abnormality detection algorithm of the turret position. The abnormality detection algorithm of the turret position mainly detects whether the M-axis driving the turret slips. Wherein, the positions of the first characteristic line of the turret 670 and the second characteristic line of the manipulator 640 are determined by the abnormality detection algorithm of the turret position, and it is determined whether the included angle between the first characteristic line and the second characteristic line is within a preset range .

Specifically, as shown in FIG. 6 , a first characteristic line 671 is preset on the turntable 670 , and a second characteristic line 641 is preset on the manipulator 640 . Then, the model is trained according to the preset first characteristic line 671 and second characteristic line 641 . Next, according to the trained model, the first characteristic line 671 of the turntable 670 and the second characteristic line 641 of the manipulator 640 are extracted from the image obtained by the visual recognition device when the turntable is at the detection position.

In one embodiment of the present disclosure, the first feature line 671 is a structural feature on the turret 670, and the second feature line 641 is a structural feature on the manipulator 640, so that the first feature line and the second feature line and extract it. Exemplarily, as shown in FIG. 4 , the first characteristic line 671 on the turret 670 is the edge of the turret 670 , and the second characteristic line 641 on the manipulator 640 is the edge of the turret manipulator 640 .

Specifically, as shown in FIG. 5 and FIG. 6, the first characteristic line 671 of the turntable and the second characteristic line 641 of the manipulator 640 are extracted from the image obtained by the visual recognition device when the turntable 670 is at the detection position, and then the first characteristic line 641 is determined. The included angle A between the characteristic line 671 and the second characteristic line 641, and determine whether the included angle A is greater than or equal to a preset included angle; if the included angle A is larger than the preset included angle, it is determined that the position of the turret is abnormal. If the included angle A is less than or equal to the preset included angle, it is judged that the position of the turret is normal. Wherein, as shown in FIG. 4 , when the turret 670 is in the standard position, the first characteristic line 671 is parallel to the second characteristic line 641 .

Wherein, the preset included angle can be set according to specific conditions, for example, 10°, 20° or 30°, etc., which is not limited in the present disclosure.

Embodiments of the present disclosure also provide a detection device for an abnormal position of the turret, as shown in FIG. 7 , the detection device 900 includes:

An image acquisition module 910, configured to acquire a detection image of the turntable at the detection position and the manipulator at the detection position;

The feature extraction module 920 is connected with the image acquisition module, and extracts the first feature line on the turntable and the second feature line on the manipulator from the detection image;

The included angle calculation module 930, connected to the feature extraction module, is configured to calculate the included angle between the first feature line and the second feature line;

The included angle comparison module 940 is connected with the included angle calculation module, and compares the obtained included angle with the preset included angle;

The output module 950 is connected with the included angle comparison module, and if the included angle is larger than the preset included angle, output the information about the abnormal position of the turret.

This disclosure provides a detection device for the abnormal position of the turret. The image acquisition module 910 first acquires the detection image of the turret at the detection position and the manipulator at the detection position, and the feature extraction module 920 then extracts the first characteristic line on the turret from the detection image. And the second characteristic line on the manipulator, the angle calculation module 930 then calculates the angle between the first characteristic line and the second characteristic line, the angle comparison module 940 compares the obtained angle with the preset angle, if the angle If the angle is greater than the preset included angle, the output module 950 outputs abnormal information about the position of the turret. The abnormality of the turret position is detected by visual recognition with high reliability, and because of the convenient preset function, the operation is simple and fast.

In an embodiment of the present disclosure, if the included angle between the first characteristic line and the second characteristic line is less than or equal to the preset included angle, the output module 950 outputs information about the normal position of the turret. When the turntable is at a standard position, the first characteristic line is parallel to the second characteristic line.

In an embodiment of the present disclosure, the detection device further includes: a display module connected to the output module for displaying abnormal position information and normal position information of the output terminal of the output module.

In an embodiment of the present disclosure, the detection device further includes a control module. Control module is connected with image acquisition module 910, feature extraction module 920, included angle calculation module 930, included angle comparison module 940, output module 950 and display module, controls image acquisition module 910, feature extraction module 920, included angle calculation module 930, The angle comparison module 940, the output module 950 and the display module work.

Wherein, the image acquisition module 910 may include an industrial camera and a light source 720; the feature extraction module 920, the included angle calculation module 930, the included angle comparison module 940, the output module and the control module may be integrated in the controller 710; the display module may include a display 740 .

Other embodiments of the present disclosure will be readily apparent to those skilled in the art from consideration of the specification and practice of the invention disclosed herein. This application is intended to cover any modification, use or adaptation of the present disclosure, and these modifications, uses or adaptations follow the general principles of the present disclosure and include common knowledge or conventional technical means in the technical field not disclosed in the present disclosure . The specification and examples are to be considered exemplary only, with a true scope and spirit of the disclosure being indicated by the following claims.

It should be understood that the present disclosure is not limited to the precise constructions which have been described above and shown in the drawings, and various modifications and changes may be made without departing from the scope thereof. The scope of the present disclosure is limited only by the appended claims.

Claims (10)

1. A detection method for an abnormal position of a turntable, characterized in that it comprises: Obtain the image of the turret at the detection position; extracting a first feature line of the turret from the image, and extracting a second feature line of the manipulator from the image; determining the included angle between the first characteristic line and the second characteristic line, and judging whether the included angle is greater than or equal to a preset included angle; If the included angle is greater than the preset included angle, it is determined that the position of the turntable is abnormal. 2. detection method according to claim 1, is characterized in that, described detection method also comprises: If the included angle is less than or equal to the preset included angle, it is determined that the position of the turntable is normal. 3. The detection method according to claim 1, wherein the first characteristic line is a structural feature on the turntable and a structural feature on the manipulator. 4. The detection method according to claim 1, wherein the second characteristic line is a structural feature on the manipulator. 5 . The detection method according to claim 1 , wherein when the turntable is at a standard position, the first characteristic line is parallel to the second characteristic line. 6. A detection device for an abnormal position of a turret, characterized in that it comprises: An image acquisition module, configured to acquire the detection images of the turret at the detection position and the manipulator at the detection position; A feature extraction module, connected to the image acquisition module, extracts the first feature line on the turntable and the second feature line on the manipulator from the detection image; an included angle calculation module, connected to the feature extraction module, configured to calculate an included angle between the first feature line and the second feature line; The included angle comparison module is connected with the included angle calculation module, and compares the obtained included angle with a preset included angle; The output module is connected with the included angle comparison module, and if the included angle is larger than the preset included angle, then output the information about the abnormal position of the turret. 7 . The detection device according to claim 6 , wherein, if the included angle is less than or equal to the preset included angle, the output module outputs the information that the position of the turret is normal. 8. detection device according to claim 7, is characterized in that, described detection device also comprises: A display module, connected to the output module, for displaying the abnormal position information and the normal position information of the output terminal of the output module. 9. detection device according to claim 8, is characterized in that, described detection device also comprises: The control module is connected with the image acquisition module, the feature extraction module, the included angle calculation module, the included angle comparison module, the output module and the display module. 10 . The detection device according to claim 6 , wherein when the turntable is at a standard position, the first characteristic line is parallel to the second characteristic line. 11 .

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