CN115289969A - Method and device for detecting substrate position abnormality - Google Patents

Abstract

The embodiment of the disclosure provides a method and a device for detecting substrate position abnormity, wherein the method comprises the following steps: acquiring standard images of substrates respectively positioned on a manipulator and a rotating frame; acquiring detection images when the substrate is respectively positioned on the manipulator or the rotating frame again; judging whether the deviation between the position of a preset feature in the standard image and the position of the preset feature in the detection image is within a preset range or not; if the position of the substrate is not within the preset range, judging that the position of the substrate on the manipulator or the rotating frame again is abnormal. The substrate position abnormity detection method provided by the disclosure can identify whether the substrate position is abnormal or not in a visual detection mode.

Description

Method and device for detecting substrate position abnormality

technical field

The present disclosure relates to the technical field of coating equipment, in particular, to a method for detecting an abnormal position of a substrate and a device for detecting an abnormal position of a substrate.

Background technique

A common coating machine has the function of automatically loading and unloading substrates, and usually includes a loading chamber, a transfer chamber and a process chamber. The transfer chamber has a vacuum manipulator responsible for transporting the substrate in the loading chamber to the process chamber, or from the process chamber to the loading chamber. Since the loading chamber, transfer chamber and process chamber are all working in a vacuum state, and the servo motor used to drive the movement of the manipulator and the rotation of the turret cannot work in a vacuum, magnetic fluids are respectively installed on the transfer chamber and the process chamber for sealing.

The turret servo motor on the process chamber is connected to one end of the magnetic fluid through a coupling, and the other end of the magnetic fluid is also connected to the workpiece turret through a coupling. The drive motor of the manipulator on the transfer chamber is connected to one end of the other magnetic fluid through a coupling, and the other end of the magnetic fluid is also connected to the sheet taking mechanism of the manipulator through a coupling.

During the operation of the system, as long as a coupling slips, the position of the moving parts will be inaccurate, resulting in an abnormal position of the substrate.

It should be noted that the information disclosed in the above background section is only for enhancing the understanding of the background of the present disclosure, and therefore may include information that does not constitute the prior art known to those of ordinary skill in the art.

Contents of the invention

The purpose of the embodiments of the present disclosure is to provide a detection method and detection device for an abnormal substrate hand position, which can identify whether the state of the substrate is abnormal by visual detection.

Other features and advantages of the present disclosure will become apparent from the following detailed description, or in part, be learned by practice of the present disclosure.

According to an aspect of an embodiment of the present disclosure, a method for detecting an abnormal position of a substrate is provided, the method for detecting includes:

Obtain standard images when the substrate is on the manipulator and the turntable respectively;

Obtain the inspection image when the substrate is relocated on the manipulator or the turntable respectively;

judging whether the deviation between the position of the preset feature in the standard image and the position of the preset feature in the detection image is within a preset range;

If it is not within the preset range, it is judged that the position where the substrate is repositioned on the manipulator or the turntable is abnormal.

In an exemplary embodiment of the present disclosure, the detection method further includes:

If it is within the preset range, it is judged that the position of the substrate on the manipulator or the turntable is normal again.

In an exemplary embodiment of the present disclosure, the preset feature is a plurality of feature points, including structural features on the substrate, structural features on the manipulator, and structural features on the turntable.

In an exemplary embodiment of the present disclosure, the preset feature is a line feature.

In an exemplary embodiment of the present disclosure, the manipulator is provided with a plurality of first features; when the first features are not identified in the detection image, it is determined that the substrate is on the manipulator Hanging in place; when the multiple first features are recognized in the detection image, it is judged that the substrate is not hung on the manipulator; when part of the first features are recognized in the detection image, it is judged that the The substrate is not hung in place on the manipulator;

A plurality of second features are provided on the turntable; when the second features are not recognized in the detection image, it is judged that the substrate is suspended in place on the manipulator; For the plurality of second features, it is judged that the substrate is not hung on the turntable; when part of the second features are recognized in the detection image, it is judged that the substrate is not hung on the turntable Hang in place.

In an exemplary embodiment of the present disclosure, the boundary positions of the standard image and the detection image are consistent.

According to another aspect of the embodiments of the present disclosure, a detection device for abnormal substrate position is provided, the detection device includes:

The image acquisition module is used to obtain the standard image when the substrate is respectively located on the manipulator and the turntable, and the detection image when the substrate is respectively placed on the manipulator or the turntable;

An image comparison module, connected to the image acquisition module, the image comparison module is configured to determine whether the deviation between the position of the preset feature in the standard image and the position of the preset feature in the detection image is within a preset range. within the set range;

An output module, connected to the image comparison module, if the deviation between the position of the preset feature in the standard image and the position of the preset feature in the detection image is not within the preset range, then output the Information about substrate repositioning on the robot or turret where it is out of position.

In an exemplary embodiment of the present disclosure, if the deviation between the position of the preset feature in the standard image and the position of the preset feature in the detection image is within the preset range, the output The information that the above-mentioned substrate is repositioned on the manipulator or the turntable is normal.

In an exemplary embodiment of the present disclosure, the manipulator is provided with a plurality of first features; when the image comparison module does not identify the first features in the detection image, the output module outputs The information that the substrate is hung in place on the manipulator; when the image comparison module recognizes the plurality of first features in the detection image, the output module outputs that the substrate is not hung on the manipulator. The information of the chip; when the image comparison module recognizes part of the first feature in the detection image, the output module outputs the information that the substrate is not hung in place on the manipulator;

A plurality of second features are provided on the turntable; when the image comparison module does not recognize the second features in the detection image, the output module outputs that the substrate is hung in place on the manipulator information; when the image comparison module recognizes the plurality of second features in the detection image, the output module outputs the information that the substrate is not hung on the turntable; when the image comparison module If part of the second feature is recognized in the detection image, the output module outputs information that the substrate is not suspended in place on the turntable.

In an exemplary embodiment of the present disclosure, the detection device further includes:

A display module, connected to the output module, for displaying information about the abnormal position and information about the normal position of the output terminal of the output module;

The control module is connected with the image acquisition module, the image comparison module, the output module and the display module.

The present disclosure provides a detection method for the abnormal position of the substrate. Firstly, the standard image when the substrate is respectively located on the manipulator and the turntable is obtained, and then the detection image is obtained when the substrate is respectively placed on the manipulator or the turntable again; Whether the deviation between the position of the preset feature and the position of the preset feature in the detection image is within the preset range; if it is not within the preset range, it is judged that the position of the substrate relocated on the manipulator or the turntable is abnormal. The abnormality of the substrate position is detected by visual recognition with high reliability, and due to the convenient preset function, the operation is simple and fast.

It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the present disclosure.

Description of drawings

The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the disclosure and together with the description serve to explain the principles of the disclosure. Apparently, the drawings in the following description are only some embodiments of the present disclosure, and those skilled in the art can obtain other drawings according to these drawings without creative efforts. In the attached picture:

FIG. 1 is a flow chart of a method for detecting an abnormal substrate position provided by an embodiment of the present disclosure;

FIG. 2 is a schematic diagram of a coating machine system and a visual recognition system provided by an embodiment of the present disclosure;

FIG. 3 is a process diagram for detecting an abnormal position of a substrate by a visual recognition device provided by an embodiment of the present disclosure;

FIG. 4 is a process diagram for detecting an abnormal position of a substrate by a visual recognition device provided by an embodiment of the present disclosure;

FIG. 5 is a schematic diagram of the manipulator after performing the unloading action provided by an embodiment of the present disclosure;

FIG. 6 is a schematic diagram of the substrate not in place after the manipulator performs the unloading action provided by an embodiment of the present disclosure;

FIG. 7 is a schematic diagram of an unhanging substrate on a manipulator provided by an embodiment of the present disclosure;

FIG. 8 is a schematic diagram of a deflection of the substrate that is not in place after the manipulator performs the unloading action provided by an embodiment of the present disclosure;

FIG. 9 is a schematic diagram of a substrate positioned on a turntable after a manipulator performs a loading action according to an embodiment of the present disclosure;

FIG. 10 is a schematic diagram of the substrate being not in place on the turntable after the manipulator performs the loading action provided by an embodiment of the present disclosure;

FIG. 11 is a schematic diagram of an unhanging substrate on a turntable provided by an embodiment of the present disclosure;

Fig. 12 is a schematic diagram of the substrate on the turntable after the manipulator performs the film loading action provided by an embodiment of the present disclosure;

Fig. 13 is a schematic diagram of a detection device for an abnormal substrate position provided by an embodiment of the present disclosure.

Detailed ways

Example embodiments will now be described more fully with reference to the accompanying drawings. Example embodiments may, however, be embodied in many forms and should not be construed as limited to the examples set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete and will fully convey the concept of example embodiments to those skilled in the art.

Furthermore, the described features, structures, or characteristics may be combined in any suitable manner in one or more embodiments. In the following description, numerous specific details are provided in order to give a thorough understanding of embodiments of the present disclosure. However, those skilled in the art will appreciate that the technical solutions of the present disclosure may be practiced without one or more of the specific details, or other methods, components, means, steps, etc. may be employed. In other instances, well-known methods, apparatus, implementations, or operations have not been shown or described in detail to avoid obscuring aspects of the present disclosure.

The block diagrams shown in the drawings are merely functional entities and do not necessarily correspond to physically separate entities. That is, these functional entities may be implemented in software, or in one or more hardware modules or integrated circuits, or in different networks and/or processor devices and/or microcontroller devices entity.

The flow charts shown in the drawings are only exemplary illustrations, and do not necessarily include all contents and operations/steps, nor must they be performed in the order described. For example, some operations/steps can be decomposed, and some operations/steps can be combined or partly combined, so the actual order of execution may be changed according to the actual situation.

Embodiments of the present disclosure firstly provide a detection method for substrate position abnormality, as shown in FIG. 1 , the detection method includes:

Step S100, obtaining standard images when the substrate is respectively located on the manipulator and the turntable;

Step S200, acquiring detection images when the substrate is repositioned on the manipulator or the turntable respectively;

Step S300, judging whether the deviation between the position of the preset feature in the standard image and the position of the preset feature in the detection image is within a preset range;

Step S400, if it is not within the preset range, it is judged that the position of the substrate on the manipulator or the turntable is abnormal.

The present disclosure provides a detection method for the abnormal position of the substrate. Firstly, the standard image when the substrate is respectively located on the manipulator and the turntable is obtained, and then the detection image is obtained when the substrate is respectively placed on the manipulator or the turntable again; Whether the deviation between the position of the preset feature and the position of the preset feature in the detection image is within the preset range; if it is not within the preset range, it is judged that the position of the substrate relocated on the manipulator or the turntable is abnormal. The abnormality of the substrate position is detected by visual recognition with high reliability, and due to the convenient preset function, the operation is simple and fast.

In one embodiment of the present disclosure, the detection method also includes:

Step S500, if it is within the preset range, it is judged that the position of the substrate on the manipulator or the turntable is normal again.

If the deviation between the position of the preset feature in the standard image and the position of the preset feature in the detection image is within the preset range, it is judged that the position of the substrate after moving to the detection position is normal, and the recognition of the substrate by the visual recognition algorithm is realized. Whether the state of the device is abnormal, effectively avoiding the possibility of equipment collision damage due to incorrect position, high reliability, simple and fast operation.

In the following, each step in the method for detecting an abnormal substrate position provided by the present disclosure will be described in detail.

In step S100, the standard images when the substrate is respectively located on the manipulator and the turntable are acquired.

Specifically, as shown in FIG. 2 , the coating machine includes a loading chamber, a transport chamber 620 and a process chamber 630 . The transfer chamber 620 has a robot arm 640 in a vacuum state, which is responsible for transporting the substrate in the loading chamber to the process chamber 630 or from the process chamber 630 to the loading chamber. Since the loading chamber, the transfer chamber 620 and the process chamber 630 work in a vacuum state, and the XO-axis servo motor 650 used to drive the manipulator 640 to move and the M-axis servo motor 660 to rotate the turntable 670 cannot work under vacuum, so in The transfer chamber 620 and the process chamber 630 are respectively provided with magnetic fluid for sealing. The M-axis servo motor 660 on the process chamber 630 is connected to one end of the magnetic fluid through a coupling, and the other end of the magnetic fluid is also connected to the turntable 670 through a coupling. The XO-axis servo motor 650 on the transmission chamber 620 is connected to one end of another magnetic fluid through a coupling, and the other end of the magnetic fluid is also connected to the manipulator 640 through a coupling. During the operation of the system, as long as a coupling slips, the position of the moving parts will be inaccurate, which will cause the substrate position to be incorrect. The situations that cause this problem are mainly divided into: the position of the manipulator 640 driven by the XO axis is not correct, the position of the substrate on the manipulator 640 is not correct, the position of the turntable 670 driven by the M axis is not correct, and the position of the substrate on the turntable 670 is not correct.

The present disclosure aims at the problem of improper position of the substrate on the manipulator and the turntable, and a visual recognition device is provided on the coating machine to judge the state of the substrate and detect the problem of incorrect position of the substrate on the manipulator 640 and the turntable 670.

Among them, the visual recognition device includes an industrial camera and light source 720, a controller 710, a display 740, preset features of the detected object and auxiliary positioning of the detected object. The visual recognition device includes a substrate position discrimination algorithm.

Specifically, the visual identification device is provided with an observation window 730 above the transmission chamber. The industrial camera and light source 720 are erected above the observation window 730, and work in an atmospheric state. Below the observation window 730 is a robot arm 640 in a vacuum state. The industrial camera and light source 720 are connected to the controller 710, and the controller 710 receives instructions from the coating machine control system 610 to control the industrial camera and light source 720 to take pictures. The display 740 is used to display the state of the detected object, and related parameters can be set through the interface. The controller 710 is provided with an XO-axis driven manipulator position visual recognition algorithm, an M-axis driven manipulator position visual recognition algorithm, and a substrate position visual recognition algorithm.

Wherein, the standard image of the substrate at the detection position is obtained by the visual recognition device for subsequent comparison.

In step S200, the detection images when the substrate is relocated on the manipulator or the turntable respectively are acquired.

Specifically, as shown in Figure 3, first start the visual recognition device, and send a ready signal to the coating control system, as shown in Figure 5, the coating machine control system drives the manipulator to execute the moving film, and the visual recognition device starts the light source and industrial camera Take a picture, and after image preprocessing, obtain the detection image after the manipulator performs unloading, that is, the detection image when the substrate is repositioned on the manipulator.

Or, as shown in Figure 9, the control system of the coating machine drives the manipulator to load the film, and the visual recognition device starts the light source and the industrial camera to take pictures. Inspection image while on the turret.

In step S300, it is determined whether the deviation between the position of the preset feature in the standard image and the position of the preset feature in the detected image is within a preset range.

Specifically, as shown in Figure 3, the controller invokes the substrate position anomaly detection algorithm. The substrate position anomaly detection algorithm mainly detects whether the substrate is offset, whether it is an unmounted substrate or a mounted substrate, and whether the substrate has been placed. Hang in place.

At the same time, compare the position of the preset feature in the standard image and the detection image by comparing the abnormal detection algorithm of the substrate position, and judge whether the deviation between the positions of the preset feature is within the preset range.

In one embodiment of the present disclosure, the preset feature is a plurality of feature points, including structural features on the substrate, on the manipulator, and on the turntable, so as to facilitate setting of the preset features and Extract it.

For example, as shown in Figure 5, the control system of the coating machine drives the manipulator to execute the moving film. The preset feature 810 is a line feature. By setting the preset feature 810 as a line feature, it is convenient to compare the standard image with the preset in the detection image. The positional deviation of the feature; as shown in Figure 9, the control system of the coating machine drives the manipulator to perform the loading of the film, and the preset feature 820 is a line feature. By setting the preset feature 820 as a line feature, it is convenient to compare the standard image and the detection image. Positional deviation of preset features.

Wherein, the line feature may include multiple extending directions, so as to determine whether the substrate has position abnormality in multiple directions.

Wherein, the boundary positions of the standard image and the detection image are consistent, so as to compare the position deviation of the preset features in the standard image and the detection image more accurately.

In step S400, if it is not within the preset range, it is determined that the position of the substrate on the manipulator or the turntable is abnormal.

Specifically, as shown in FIG. 3 and FIG. 6, when the control system of the coating machine drives the manipulator to execute the moving film, if the preset feature 810 of the standard image is compared with the preset feature in the detection image by comparing the abnormal detection algorithm of the substrate position If the deviation A between the positions of 810' is not within the preset range, it is determined that the position of the substrate 800 is abnormal.

As shown in Figure 3 and Figure 10, when the control system of the coating machine drives the manipulator to perform the loading of the moving film, if the difference between the preset feature 820 of the standard image and the preset feature 820' in the detection image is compared by comparing the abnormal detection algorithm of the substrate position If the deviation B between the positions is not within the preset range, it is determined that the position of the substrate 800 is abnormal.

Among them, if an abnormality is detected, an alarm signal and abnormal information will be sent to the coating control system, and the coating machine control system will process it.

In step S500, if it is within the preset range, it is judged that the position of the substrate on the manipulator or the turntable is normal.

Specifically, as shown in Figure 3, if the deviation between the position of the preset feature in the standard image and the detection image is within the preset range by comparing the abnormal detection algorithm of the substrate position, it is determined that the substrate has moved to the detection position again. The position is normal, and a normal signal is sent to the coating control system.

In an embodiment of the present disclosure, as shown in FIG. 7 , a plurality of first features 641 are provided on the manipulator. As shown in Figure 4 and Figure 5, when the control system of the coating machine drives the manipulator to perform the unloading action, and when the first feature 641 is not recognized in the detection image, it is judged that the substrate 800 is suspended on the manipulator 640 in place; as shown in Figure 7 As shown, when a plurality of first features 641 are recognized in the detection image, it is judged that the substrate 800 is not hung on the manipulator 640; as shown in FIG. The manipulator 640 is not in place. Wherein, the first feature 641 is a structural feature of the hook on the manipulator 640 .

In one embodiment of the present disclosure, as shown in FIG. 11 , a plurality of second features 671 are provided on the turret. As shown in Figure 4 and Figure 9, when the control system of the coating machine drives the manipulator to perform the loading action, and when the second feature 671 is not recognized in the detection image, it is determined that the substrate 800 is suspended on the turntable 670 in place; as shown in Figure 11 As shown, when a plurality of second features are recognized in the detection image, it is judged that the substrate 800 is not hung on the turntable 670; as shown in FIG. Not hanging in place on turret 670. Wherein, the second feature 671 is a structural feature of the hook on the turntable 670 .

Embodiments of the present disclosure also provide a detection device for an abnormal substrate position. As shown in FIG. 13 , the detection device 900 includes:

An image acquisition module 910, configured to acquire a standard image when the substrate is respectively placed on the manipulator and the turntable, and a detection image when the substrate is respectively placed on the manipulator or the turntable;

The image comparison module 920 is connected to the image acquisition module 910, and the image comparison module 920 is configured to determine whether the deviation between the position of the preset feature in the standard image and the position of the preset feature in the detection image is within a preset range;

The output module 930 is connected to the image comparison module 920. If the deviation between the position of the preset feature in the standard image and the position of the preset feature in the detection image is not within the preset range, the output substrate is relocated to the position on the manipulator or the turntable unusual information.

The disclosure provides a detection device for substrate position abnormality. The image acquisition module first acquires the standard images when the substrate is respectively located on the manipulator and the turntable, and then acquires the detection image when the substrate is respectively placed on the manipulator or the turntable again; image comparison The module judges whether the deviation between the position of the preset feature in the standard image and the position of the preset feature in the detection image is within the preset range; if it is not within the preset range, the output module outputs the substrate and repositions it on the manipulator or the turntable unusual information. The abnormality of the substrate position is detected by visual recognition with high reliability, and due to the convenient preset function, the operation is simple and fast.

In one embodiment of the present disclosure, if the image comparison module 920 compares that the deviation between the position of the preset feature in the standard image and the position of the preset feature in the detection image is within a preset range, the output substrate is relocated to the manipulator Or the information that the position on the carousel is normal.

In an embodiment of the present disclosure, the detection device further includes: a display module connected to the output module for displaying abnormal position information and normal position information of the output terminal of the output module.

In an embodiment of the present disclosure, the detection device further includes: a control module. The control module is connected with the image acquisition module, the image comparison module, the output module and the display module, and controls the connection of the image acquisition module, the image comparison module, the output module and the display module to work.

Wherein, the image acquisition module 910 may include an industrial camera and a light source 720 ; the image comparison module 920 , the output module 930 and the control module may be integrated in the controller 710 ; the display module may include a display 740 .

In an embodiment of the present disclosure, the manipulator is provided with a plurality of first features; when the image comparison module does not recognize the first feature in the detection image, the output module outputs the information that the substrate is suspended on the manipulator; when the image When the comparison module recognizes multiple first features in the detection image, the output module outputs information that the substrate is not hung on the manipulator; when the image comparison module recognizes some first features in the detection image, the output module outputs the information that the substrate is not hung on the manipulator information in place;

In an embodiment of the present disclosure, multiple second features are provided on the turntable; when the image comparison module does not recognize the second feature in the detection image, the output module outputs the information that the substrate is suspended on the manipulator; when When the image comparison module recognizes multiple second features in the detection image, the output module outputs the information that the substrate is not hung on the turntable; Information not hanging in place on shelf.

Other embodiments of the present disclosure will be readily apparent to those skilled in the art from consideration of the specification and practice of the invention disclosed herein. This application is intended to cover any modification, use or adaptation of the present disclosure, and these modifications, uses or adaptations follow the general principles of the present disclosure and include common knowledge or conventional technical means in the technical field not disclosed in the present disclosure . The specification and examples are to be considered exemplary only, with a true scope and spirit of the disclosure being indicated by the following claims.

It should be understood that the present disclosure is not limited to the precise constructions which have been described above and shown in the drawings, and various modifications and changes may be made without departing from the scope thereof. The scope of the present disclosure is limited only by the appended claims.

Claims (10)

1. A detection method for substrate position abnormality, characterized in that, comprising: Obtain standard images when the substrate is on the manipulator and the turntable respectively; Obtain the inspection image when the substrate is relocated on the manipulator or the turntable respectively; judging whether the deviation between the position of the preset feature in the standard image and the position of the preset feature in the detection image is within a preset range; If it is not within the preset range, it is judged that the position where the substrate is repositioned on the manipulator or the turntable is abnormal. 2. detection method according to claim 1, is characterized in that, described detection method also comprises: If it is within the preset range, it is judged that the position of the substrate on the manipulator or the turntable is normal again. 3. The detection method according to claim 1, wherein the preset feature is a plurality of feature points, including structural features on the substrate, structural features on the manipulator, and structures on the turntable feature. 4. The detection method according to claim 1, wherein the preset feature is a line feature. 5. The detection method according to claim 1, wherein the manipulator is provided with a plurality of first features; when the first features are not recognized in the detection image, it is judged that the substrate is The manipulator is suspended in place; when the plurality of first features are recognized in the detection image, it is judged that the substrate is not hung on the manipulator; when part of the first features are recognized in the detection image , it is judged that the substrate is not hung in place on the manipulator; The turntable is provided with a plurality of second features; when the second feature is not recognized in the detection image, it is judged that the substrate is suspended in place on the turntable; If the multiple second features are detected, it is judged that the substrate is not hung on the turntable; when part of the second features are recognized in the detection image, it is judged that the substrate is on the turntable Not hanging in place. 6 . The detection method according to claim 1 , wherein the boundary position of the standard image is consistent with that of the detection image. 6 . 7. A detection device for abnormal substrate position, characterized in that it comprises: The image acquisition module is used to obtain the standard image when the substrate is respectively located on the manipulator and the turntable, and the detection image when the substrate is respectively placed on the manipulator or the turntable; An image comparison module, connected to the image acquisition module, the image comparison module is configured to determine whether the deviation between the position of the preset feature in the standard image and the position of the preset feature in the detection image is within a preset range. within the set range; An output module, connected to the image comparison module, if the deviation between the position of the preset feature in the standard image and the position of the preset feature in the detection image is not within the preset range, then output the Information about substrate repositioning on the robot or turret where it is out of position. 8. The detection device according to claim 7, wherein if the deviation between the position of the preset feature in the standard image and the position of the preset feature in the detection image is within the preset range , then output the information that the substrate is located on the manipulator or the turntable again and the position is normal. 9. The detection device according to claim 7, wherein the manipulator is provided with a plurality of first features; when the image comparison module does not identify the first features in the detection image, the The output module outputs the information that the substrate is hung in place on the manipulator; when the image comparison module recognizes the plurality of first features in the detection image, the output module outputs the information that is not on the manipulator. Hanging the information of the substrate; when the image comparison module recognizes part of the first feature in the detection image, the output module outputs the information that the substrate is not hung on the manipulator; A plurality of second features are provided on the turntable; when the image comparison module does not recognize the second features in the detection image, the output module outputs that the substrate is hung in place on the manipulator information; when the image comparison module recognizes the plurality of second features in the detection image, the output module outputs the information that the substrate is not hung on the turntable; when the image comparison module If part of the second feature is identified in the detection image, the output module outputs information that the substrate is not suspended in place on the turntable. 10. detection device according to claim 8, is characterized in that, described detection device also comprises: A display module, connected to the output module, for displaying information about the abnormal position and information about the normal position of the output terminal of the output module; The control module is connected with the image acquisition module, the image comparison module, the output module and the display module.

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