CN115161599A - Vacuum cavity opening structure and method - Google Patents
Vacuum cavity opening structure and method Download PDFInfo
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- CN115161599A CN115161599A CN202210629853.6A CN202210629853A CN115161599A CN 115161599 A CN115161599 A CN 115161599A CN 202210629853 A CN202210629853 A CN 202210629853A CN 115161599 A CN115161599 A CN 115161599A
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- chamber
- cavity
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- vacuum chamber
- open structure
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The application discloses a vacuum cavity opening structure and a vacuum cavity opening method. This open cavity structure includes: the top rotating device is arranged on the upper side of the cavity and provided with a body, a perforation is arranged at one side end of the body, the body is sleeved on the center guiding mechanism through the perforation, a sliding assembly is arranged on the side, away from the perforation, of the body and is configured to slide along the surface of the rotating guide rail, a lifting mechanism is arranged on one side of the body, a connecting mechanism matched with the number of the cavities is sleeved on the center guiding mechanism and connected to the cavities corresponding to the cavities in a matched mode, a pushing structure is arranged on one side of the rotating guide rail and connected with the body, and based on the action of the pushing structure, the body rotates along the center guiding mechanism and the sliding assembly slides along the surface of the rotating guide rail to open the cavities. This allows for easy opening of the selected chamber without the aid of external tools.
Description
Technical Field
The application relates to the field of semiconductor equipment, in particular to a vacuum cavity opening structure and a vacuum cavity opening method.
Background
A relatively difficult problem is encountered in the installation and maintenance of larger vacuum chambers, the chamber opening process is complicated, and a typical chamber opening process includes: and (3) unscrewing all the connecting bolts in front of the chamber, detaching the associated parts, lifting the chamber by means of an external tool, finally carrying out installation and maintenance operation, and assembling the chamber in reverse order after the maintenance is finished. In the mode, the cavity opening process is complex, and the cavity opening operation can be carried out only by unscrewing the connecting piece, detaching the associated part and using an external tool; in addition, the problem of easy dead locking of repeatedly used parts during the disassembly of the connecting piece exists, and installation errors easily occur when pipelines are more and related accessories are disassembled. Furthermore, the requirement for a working space is high with the aid of external tools.
There is a need for improvements to existing chamber structures.
Disclosure of Invention
To overcome the above disadvantages, the present application aims to: the vacuum cavity opening structure can realize the function of automatically opening the cavity without an external tool in equipment, and can automatically select the cavity to be opened under the occasion of multilayer cavities.
In order to achieve the purpose, the following technical scheme is adopted in the application:
a vacuum chamber open cavity structure, comprising:
a center guide mechanism, a top rotating device, a guide part and a pushing structure,
the top rotating device is arranged at the upper side of the chamber,
the top rotating device is provided with a body, one side end of the body is provided with a perforation, the body is sleeved on the central guide mechanism through the perforation, the side of the body far away from the perforation is provided with a sliding component, a roller of the sliding component is configured to slide along the surface of the guide part,
one side of the body is provided with a lifting mechanism, the central guide mechanism is sleeved with connecting mechanisms with the number matched with the number of the chambers and connected to the corresponding matched chambers,
one side of the guide portion is provided with a pushing structure, the pushing structure is connected with the body, based on the action of the pushing structure, the body rotates along the central guide mechanism, and the sliding assembly slides along the surface of the guide portion to open the cavity. Through the design, when in maintenance, the selected chamber can be conveniently opened in the equipment without an external tool, thereby simplifying the chamber opening process and shortening the maintenance time.
Preferably, the guide portion includes a guide rail having an arc, and a center of curvature of the guide rail is located on a centerline of the center guide mechanism,
the output end of the lifting mechanism is connected with the cover plate, and the chamber is moved based on the ascending or descending of the lifting mechanism. I.e. the curvature of the guide rail is the same as the curvature of the body rotation.
Preferably, the lifting mechanism comprises a cylinder or motor which acts to raise or lower the moving chamber.
Preferably, the body is provided with side guide means on one side thereof, arranged on the same side as the lifting means, said side guide means being arranged to slide along the side of the chamber.
Preferably, the chamber includes a first chamber, a second chamber and a third chamber stacked in sequence, and at least one locking mechanism is disposed between two adjacent chambers.
Preferably, the locking mechanism is configured as a latch. This may be manually locked or automatically locked based on instructions.
Preferably, the locking mechanism comprises an air cylinder or a motor, the output end of the air cylinder or the motor is connected with the bolt, and the air cylinder or the motor is electrically connected to the controller and acts to lock or unlock based on the instruction of the controller.
Preferably, one side configuration end of the first cavity of the vacuum cavity open cavity structure is configured with an annular connecting portion, the connecting portion is provided with a plurality of first jacks, the second cavity is provided with a second jack matched with the first jack, and at least part of the bolt of the locking mechanism is embedded into the corresponding second jack and the corresponding first jack to lock the first cavity and the second cavity.
Preferably, the connecting mechanism is provided with a second through hole which is fixed on the corresponding chamber through a connecting piece.
The embodiment of the application provides a cavity opening method, which comprises the vacuum cavity body cavity opening structure,
the cavity opening method comprises the following steps:
selecting a chamber to be opened:
unlocking a locking mechanism corresponding to the matched cavity to be opened based on the control module;
moving the upper cover or a chamber connected with the upper cover to a preset position based on the movement of the lifting mechanism;
based on the action of the pushing mechanism, one side of the top rotating device rotates along the central guide mechanism, and the sliding assembly on the other side synchronously slides on the rotating guide rail so as to drive the upper cover or the chamber connected with the upper cover to synchronously rotate to a preset position and open the selected chamber.
Advantageous effects
The application provides a vacuum cavity opens chamber structure, it can be inside not realizing the automatic function of opening the chamber with the help of external instrument at equipment, and the cavity that multilayer cavity can independently select to open carries out the automation and opens, realizes safety, and is convenient, swift division chamber flow. The function realizes the automatic opening of the connecting piece between the cavities, the cavity position is automatically lifted and moved, and the connecting fittings are not detached.
Drawings
The accompanying drawings are included to provide an understanding of the disclosed embodiments and are incorporated in and constitute a part of this specification, illustrate embodiments of the disclosure and together with the example serve to explain the principles of the disclosure and not to limit the disclosure. The shapes and sizes of the various elements in the drawings are not to be considered as true proportions, but rather are merely intended to illustrate the context of the application.
FIG. 1 is a perspective view of an open cavity combination according to an embodiment of the present application;
FIG. 2 is a schematic structural diagram of a three chamber stack according to an embodiment of the present application;
FIG. 3 is a schematic illustration of an embodiment of the present application with the second chamber removed;
fig. 4 is a schematic view of the second chamber being opened according to an embodiment of the present application.
Detailed Description
The above-described scheme is further illustrated below with reference to specific examples. It should be understood that these examples are for illustrative purposes and are not intended to limit the scope of the present application. The conditions employed in the examples may be further adjusted as determined by the particular manufacturer, and the conditions not specified are typically those used in routine experimentation.
The vacuum chamber open structure proposed in the present application is described below with reference to fig. 1-4 by taking 3 chambers (also called chambers) as an example.
This vacuum chamber body open cavity structure 100, it includes:
a center guide 140, a top rotating device 160, a rotating guide 150 and a pushing structure 170,
the top rotary device 160 has a body 162, a through hole 163 is disposed at one side end of the body 162, the body 162 is sleeved on the central guide 140 through the through hole 163, a sliding component 164 is disposed at the side of the body 162 far away from the through hole 163, and the sliding component 164 slides along the surface of the rotary guide 150, so that the top rotary device 160 rotates along the central guide 140. A lifting mechanism 161 is disposed on one side of the top rotating device 160, and the lifting mechanism 161 is connected to the third chamber 130 and a cover plate 132 is disposed thereon. The cover is closed after being removed or the chamber is lifted or lowered based on the action (ascending/descending) of the lifting mechanism 161. A side guide 165 is disposed through the opening 163 in a side of the body 162, and the side guide 165 is slidable along a side of the third chamber 130.
A push structure 170 is provided at one side of the top rotating means 160, and a push rod is provided on the push structure 170 for pushing out a selected chamber.
The pushing structure 170 is used for pushing to enable the cavities (the first cavity 110, the second cavity 120 and the third cavity 130) to rotate, the pushing mechanism acts during pushing, the top rotating device drives the cavities to rotate together, the pushing mechanism can be achieved through a cylinder or a motor, and the pushing mechanism is matched with a sliding assembly and a bottom guide rail to form in the rotating process to enable the sliding to be smoother.
The first chamber 110, the second chamber 120 and the third chamber 130 are stacked in sequence, and adjacent two chambers are locked by at least one locking mechanism 131. The locking mechanism 131 is configured as a latch that is removably mounted to adjacent chambers.
The locking between the first chamber 110 and the second chamber 120 will be described as an example,
an annular connecting portion 111 is disposed at one side of the first chamber 110, and a plurality of first insertion holes 112 are formed in the connecting portion 111. Preferably, the first insertion holes 112 are uniformly arranged along the circumferential direction of the connection portion 111.
An annular connecting portion 121 is disposed at one side of the second chamber 120, an annular connecting portion 123 is disposed at the side opposite to the connecting portion 121, and a plurality of second insertion holes 124 are formed in the connecting portion 123. When connected, the second housing 120 is stacked on the first housing 110, the first receptacle 112 is aligned with the second receptacle 124, and the locking mechanism 131 (also called a latch) is inserted into the first receptacle 112 and the second receptacle 124. The plurality of first jacks 112 and the plurality of second jacks 124 are connected in the same manner. Thereby achieving the connection of the first chamber 110 and the second chamber 120. The second chamber 120 is now connected to the central guide 140 by the connection 141. Such as: a first through hole 142 is disposed on one side of the connecting structure 141, the connecting structure 141 is sleeved on the central guide mechanism 140, a second through hole 143 is disposed on the side of the connecting structure 141 away from the first through hole 142, and the second through hole 143 is fixed on the second chamber 120 through the locking mechanism 131. Locking of the first chamber and the second chamber is achieved, and the connection of the second chamber 120 and the third chamber 130 is similarly not repeated. Through the design, the chamber can be opened quickly without external tools during maintenance, and the whole opening and closing process is safe, convenient and quick.
In the above manner, the locking mechanism 131 is a plug-in plug, and in other embodiments, the locking mechanism 131 can be plugged in and out by using an air cylinder or a motor, and the opening and closing of the locking mechanism is controlled by an external controller. The cylinder is a rotary clamping cylinder also called a rotary clamping cylinder (such as MK series of SMC), and the working principle of the cylinder is that a groove is formed on a piston rod of the cylinder, a convex device is arranged on a cylinder barrel and matched with the groove, the piston and the piston rod complete rotation in advance in work by utilizing pneumatic or hydraulic drive, and the clamping action is completed after the piston and the piston rod rotate to a preset position and angle.
In the above mode, the cavity goes up and down, and the cavity is opened and is promoted or fall the cavity through the hoist mechanism at top, and this mechanism can be realized through cylinder or motor, and side guide structure and central guiding mechanism and coupling mechanism carry out the direction that rises to the cavity simultaneously, prevent to go up and down the in-process position and appear the deviation.
In the above-mentioned manner, 3 chambers (the first chamber, the second chamber and the third chamber are described as an example), and in other embodiments, there may be 2 chambers or 4 chambers or more.
The opening of the cavity/chamber is described next,
opening the first chamber:
opening the first chamber, enabling the upper computer to select a locking mechanism matched with the first chamber to act, and detecting the signal of the sensor in place;
sending an instruction to the lifting mechanism to act, lifting the cavity upper cover lifting mechanism in place along the side guide mechanism and the center guide mechanism, and detecting by the in-place sensor in place;
the upper computer sends an instruction to drive the pushing mechanism to act, the pushing mechanism is linked with the top rotating plate to drive the side edge guide mechanism and the cavity body, the cover rotates along the central guide mechanism, and the sliding assembly slides on the rotating guide rail;
the connecting component on the upper part of the upper cover of the cavity rotates along with the upper cover of the cavity.
The pushing structure outputs a signal in place, and the upper computer judges that the cavity rotates in place so as to open the first cavity. Closing the first chamber is the reverse of the opening step.
Opening the second chamber:
the upper computer selects a locking mechanism matched with the second chamber to act, and the signal of the sensor is detected in place;
the upper computer sends out an instruction to the lifting mechanism to act, the cavity upper cover lifting mechanism lifts in place along the side edge guide mechanism and the center guide mechanism, and the in-place sensor detects in place;
the pushing mechanism acts in a linkage manner to drive the top rotating plate to drive the side edge guide mechanism and the cavity upper cover to rotate along the central guide mechanism, and the sliding assembly slides on the rotating guide rail; the connecting part of the second chamber rotates along with the upper cover of the cavity, the pushing structure outputs a signal in place, the upper computer judges that the cavity rotates in place, and the locking mechanism of the upper cover of the cavity is in a locking state all the time. The open state is shown in fig. 4. The closing of the second layer cavity is opposite to the opening step.
The flow of opening the third layer cavity is analogized. Through the design, the cavity opening process is safe, the whole cavity opening action is carried out in the equipment, and other accessories do not need to be dismantled. And selecting the locking mechanisms corresponding to the chambers of different layers to realize the automatic opening and closing of the chambers of different layers.
The above-mentioned embodiments are only for illustrating the technical idea and features of the present application, and the purpose of the present application is to enable one skilled in the art to understand the content of the present application and implement the present application, and not to limit the protection scope of the present application. All equivalent changes and modifications made according to the spirit of the present application are intended to be covered by the scope of the present application.
Claims (10)
1. A vacuum chamber open cavity structure, comprising:
a central guide mechanism, a top rotating device, a guide part and a pushing structure,
the top rotating device is arranged at the upper side of the chamber,
the top rotating device is provided with a body, one side end of the body is provided with a perforation, the body is sleeved on the central guide mechanism through the perforation, the side of the body far away from the perforation is provided with a sliding component, a roller of the sliding component is configured to slide along the surface of the guide part,
one side of the body is provided with a lifting mechanism, the central guide mechanism is sleeved with connecting mechanisms with the number matched with the number of the chambers and connected to the corresponding matched chambers,
one side of the guide portion is provided with a pushing structure, the pushing structure is connected with the body, based on the action of the pushing structure, the body rotates along the central guide mechanism, and the sliding assembly slides along the surface of the guide portion to open the cavity.
2. The open structure of vacuum chamber according to claim 1,
the guide part comprises a guide rail with radian, the curvature center of the guide rail is positioned on the central line of the central guide mechanism,
the output end of the lifting mechanism is connected with the cover plate, and the chamber is moved based on the ascending or descending of the lifting mechanism.
3. The vacuum chamber open structure of claim 2,
the lifting mechanism includes a cylinder or motor that acts to raise and lower to move the chamber.
4. The vacuum chamber open structure of claim 1,
a side guide mechanism is arranged on one side of the body and arranged on the same side as the lifting mechanism, and the side guide mechanism can slide along the side of the cavity.
5. The vacuum chamber open structure of claim 1,
the chamber comprises a first chamber, a second chamber and a third chamber which are sequentially stacked, and at least one locking mechanism is arranged between every two adjacent chambers.
6. The open structure of vacuum chamber according to claim 5,
the locking mechanism is configured as a latch.
7. The vacuum chamber open structure of claim 5,
the locking mechanism comprises an air cylinder or a motor, the output end of the air cylinder or the motor is connected with the bolt, the air cylinder or the motor is electrically connected to the controller, and the locking mechanism is used for locking or unlocking based on the command action of the controller.
8. The open structure of vacuum chamber according to claim 5,
the side configuration end of the first chamber is provided with an annular connecting portion, the connecting portion is provided with a plurality of first jacks, the second chamber is provided with a second jack matched with the first jack, and at least part of the bolt of the locking mechanism is embedded into the corresponding second jack and the corresponding first jack in a matched mode to lock the first chamber and the second chamber.
9. The vacuum chamber open structure of claim 1,
the connecting mechanism is provided with a second through hole which is fixed on the corresponding chamber through a connecting piece.
10. A method of opening a cavity, comprising: the vacuum chamber open structure according to any one of claims 1 to 9,
the cavity opening method comprises the following steps:
selecting a chamber to be opened:
unlocking a locking mechanism corresponding to the matched cavity to be opened based on the control module;
moving the upper cover or a chamber connected with the upper cover to a preset position based on the movement of the lifting mechanism;
based on the action of the pushing mechanism, one side of the top rotating device rotates along the central guide mechanism, and the sliding assembly on the other side synchronously slides on the rotating guide rail, so that the upper cover or the chamber connected with the upper cover is driven to synchronously rotate to a preset position, and the selected chamber is opened.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210629853.6A CN115161599B (en) | 2022-06-05 | 2022-06-05 | Vacuum cavity opening structure and method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210629853.6A CN115161599B (en) | 2022-06-05 | 2022-06-05 | Vacuum cavity opening structure and method |
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| Publication Number | Publication Date |
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| CN115161599A true CN115161599A (en) | 2022-10-11 |
| CN115161599B CN115161599B (en) | 2024-04-12 |
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| CN103276369A (en) * | 2013-05-06 | 2013-09-04 | 南方科技大学 | PECVD (plasma enhanced chemical vapor deposition) film coating system |
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| CN115161599B (en) | 2024-04-12 |
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Address after: 215000 building s, 104 Sumu Road, Suzhou Industrial Park, Suzhou area, China (Jiangsu) pilot Free Trade Zone, Suzhou City, Jiangsu Province Patentee after: Xin San Dai Semiconductor Technology (Suzhou) Co.,Ltd. Country or region after: China Address before: 215000 building s, 104 Sumu Road, Suzhou Industrial Park, Suzhou area, China (Jiangsu) pilot Free Trade Zone, Suzhou City, Jiangsu Province Patentee before: Core semiconductor technology (Suzhou) Co.,Ltd. Country or region before: China |
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| CP03 | Change of name, title or address |