CN115078279A - A differential reflection detection method and device suitable for variable temperature environment - Google Patents

Abstract

The invention relates to a differential reflection detection method suitable for a variable-temperature environment, which is characterized in that a first light split and a second light split which have the same wavelength and the same intensity and are obtained based on light split of light emitted by a light source (1) are switched and controlled according to a first substrate (4) in a temperature-controllable environment, the first light split and the second light split are sequentially reflected by the first substrate (4) and reflected by a two-dimensional sample to be detected arranged on the surface of a second substrate (5) in a sample chamber (3), and structural feature detection of the two-dimensional sample to be detected is realized according to an absorption feature spectrum of a standard product corresponding to the two-dimensional sample to be detected through differential operation between the obtained first detection light reflection light intensity information and the second detection light reflection light intensity information; the design method has the advantages of strong temperature interference resistance and good environmental adaptability; and the device for realizing the method is further designed, and the working efficiency of the structural characteristic detection of the sample to be detected can be further improved through the modular light path layout structure design.

Description

A differential reflection detection method and device suitable for variable temperature environment

technical field

The invention relates to a differential reflection detection method and device suitable for a variable temperature environment, belonging to the technical field of optical characterization and detection instruments.

Background technique

Optical detection instruments and their technologies play a pivotal role in the characterization of material properties and in-situ monitoring of material growth. Its development is conducive to exploring the properties of materials and preparing high-quality materials. Differential reflection detection is an optical detection method that uses the changes of the reflected light of the sample under different states to obtain the spectral information of the measured object, and analyzes the relationship between the photon energy and the amount of reflected light change to judge the structural characteristics and state of the measured object. technology. It has the characteristics of fast, non-destructive, high sensitivity and non-contact, and is especially suitable for in-situ monitoring of material growth.

At present, common optical testing instruments for material properties, including optical microscopes, atomic force microscopes, transmission electron microscopes, scanning electron microscopes, Raman spectrometers, etc., have certain defects to varying degrees. Optical microscope detection is simple and fast, but the detection accuracy is low and the detection space is limited; atomic force microscopy has high detection accuracy, but the detection range is limited; transmission electron microscope has high resolution, but requires extremely high detection environment; scanning electron microscope has high detection resolution, Intuitive, but it will destroy the sample structure; Raman spectrometer has fast detection speed and simple detection method, but the detection structure is complex.

As mentioned in the review, the above detection instruments and technologies have obvious shortcomings, and it is difficult to apply them to in-situ monitoring of materials; in addition, in many test conditions, the test temperature is not static, and the changing temperature environment will have an impact on the properties of the material substrate, thus error in the test results. Due to the shortcomings of the existing detection devices, it is of great significance to develop a detection device and a test method suitable for the variable temperature environment.

SUMMARY OF THE INVENTION

The technical problem to be solved by the present invention is to provide a differential reflection detection method suitable for a variable temperature environment. Based on the spectroscopic operation under the light source, combined with the first substrate in a temperature-controlled environment, for the second substrate set on the surface of the second substrate in the sample chamber Structural feature detection of the sample to be tested.

In order to solve the above technical problems, the present invention adopts the following technical solutions: The present invention designs a differential reflection detection method suitable for a variable temperature environment, based on a light source and a spectrometer, and according to the first substrate in a temperature-controlled environment, according to the following steps A to steps F, performing structural feature detection on the two-dimensional sample to be tested set on the surface of the second substrate in the sample chamber;

Step A. Splitting the light emitted from the light source, obtaining a first splitting light and a second splitting light with the same wavelength and the same intensity, and entering step B;

Step B. Based on the constant time duration t of the temperature in the sample chamber, block the first light split, while controlling the second light split to be directed to the surface of the two-dimensional sample to be tested set on the surface of the second substrate, and generate the second detection light through reflection, which is transmitted by the receiving end of the spectrometer. Receive the second detection light, keep this state for a duration t, and obtain the temperature T in the sample chamber in this state, and then enter step C;

Step C. Control the temperature of the environment where the first substrate is located to be temperature T, and block the second light splitting, while controlling the first splitting light to be directed to the surface of the first substrate, generating the first detection light by reflection, and receiving the first light by the spectrometer receiving end. Detect light, keep this state for a duration of t, and then enter step D;

Step D. The spectrometer respectively detects and obtains the reflected light intensity information R ₂ corresponding to the second detection light and the reflected light intensity information R 1 corresponding to the first detection light for the received second detection light and the first detection light, and obtains the reflected light intensity information R ₁ corresponding to the first detection light. Enter step E;

Step E. carry out differential operation according to the following formula;

Obtain the absorption spectrum Δ corresponding to the two-dimensional sample to be tested, that is, the relationship between the light absorption characteristics of the sample and the wavelength, and enter step F;

Step F. According to the absorption characteristic spectrum of the standard corresponding to the two-dimensional test sample, analyze the light absorption characteristics and wavelength spectrum corresponding to the two-dimensional test sample, that is, realize the structural feature detection of the two-dimensional test sample.

As a preferred technical solution of the present invention: in the step A, firstly, the output light of the light source is processed to obtain parallel light, and then the parallel light is split to obtain the first split light and the second light beam with the same wavelength and the same intensity. Divided light.

As a preferred technical solution of the present invention: in the step E, the difference operation result is processed and updated by the SG smoothing algorithm to obtain the absorption spectrum corresponding to the two-dimensional sample to be tested, that is, the relationship between the light absorption characteristics and the wavelength.

The technical problem to be solved by the present invention is to provide a device for a differential reflection detection method suitable for a variable temperature environment, which adopts a new module layout structure design, which can efficiently implement the designed method and improve the work efficiency of the structural feature detection of the sample to be tested.

In order to solve the above technical problems, the present invention adopts the following technical solutions: the present invention designs a device for a differential reflection detection method suitable for a variable temperature environment, based on the light source and the spectrometer, including a first off-axis parabolic mirror, a beam splitter, The second off-axis parabolic mirror, the electronically controlled baffle, and the upper computer; wherein, the inner arc surface of the first off-axis parabolic mirror faces the exit end of the light source, and the outgoing light of the light source is directed to the inner arc surface of the first off-axis parabolic mirror to generate parallel light; the beam splitter is arranged on the optical path of the parallel light emitted by the first off-axis parabolic mirror, and the beam splitter generates the first beam splitting and the second beam splitting with the same wavelength and the same intensity for the parallel light through reflection and transmission; the The surface of the two-dimensional sample to be tested faces the second light splitting direction, and the second light splitting generates the second reflected light through the surface of the two-dimensional sample to be tested; the surface of the first substrate faces the first light splitting direction, and the first light splitting generates the second light beam through the surface of the first substrate. a reflected light; the inner arc surface of the second off-axis parabolic mirror faces the first reflected light and the second reflected light, and the first reflected light and the second reflected light respectively pass through the inner arc surface of the second off-axis parabolic mirror to generate the first detection light and second detection light; the receiving end of the spectrometer faces and receives the first detection light and the second detection light; the upper computer is respectively connected with the spectrometer and the electric control baffle, and the electric control baffle is switched under the control of the upper computer to select one Blocking is performed for the first split light or the second split light.

As a preferred technical solution of the present invention: it also includes an incident optical fiber, a collimating mirror, and an outgoing optical fiber. The outgoing end of the light source is connected to one end of the incident optical fiber, and the other end of the incident optical fiber points to the inner arc of the first off-axis parabolic mirror. The output light of the light source is directed to the inner arc surface of the first off-axis parabolic mirror through the incident optical fiber to generate parallel light; the input end of the collimating mirror faces and receives the first detection light and the second detection light, and the output end of the collimating mirror faces and receives the first detection light and the second detection light. One end of the outgoing optical fiber is docked, and the other end of the outgoing optical fiber is docked with the receiving end of the spectrometer, and the spectrometer receives the first detection light and the second detection light through the outgoing optical fiber.

As a preferred technical solution of the present invention: the electronically controlled baffle includes a baffle controller and an optical baffle that are connected to each other, the upper computer is connected to the baffle controller, and the optical baffle is controlled by the upper computer through the baffle. Under the control of the controller, switch to choose one to block the first split light or the second split light.

As a preferred technical solution of the present invention, the surface of the optical baffle is covered with a black surface.

As a preferred technical solution of the present invention: the incident optical fiber is a circular fiber bundle multimode fiber of an SMA905 connector, and the collimating lens is a collimating lens of an SMA connector with a lens diameter of 5 mm or 10 mm, The outgoing optical fiber is a circular fiber bundle multimode fiber with a diameter of 1.3 mm or 2.0 mm and an SMA905 connector.

As a preferred technical solution of the present invention, it further includes a temperature-changing table, the first substrate is disposed on the temperature-changing table, and the temperature-changing table constitutes a temperature-controlled environment, so that the first substrate is located in the temperature-controlled environment.

As a preferred technical solution of the present invention: the first off-axis parabolic mirror is an off-axis parabolic mirror with a reflective focal length of 1 inch or 2 inches and is coated with UV-enhanced aluminum mold, and the second off-axis parabolic mirror is a reflective focal length It is a 2-inch or 3-inch 90-degree off-axis parabolic mirror with UV-enhanced aluminum mold, and the beam splitter is a non-polarized 50:50 beam splitting cube with a side length of 10 mm. The parallel light generated by the inner arc surface of the mirror is equally divided into the first split light and the second split light with the same wavelength, the same intensity and the same intensity.

A differential reflection detection method and device suitable for a variable temperature environment according to the present invention, using the above technical solution compared with the prior art, has the following technical effects:

The present invention designs a differential reflection detection method suitable for a temperature-variable environment. The first and second light splits with the same wavelength and the same intensity are obtained based on the light splitting of the light emitted by the light source, and the first substrate in a temperature-controlled environment is used as the basis. , switch and control the first split light and the second split light to be reflected by the first substrate and the two-dimensional sample to be tested set on the surface of the second substrate in the sample chamber, and the reflected light intensity information of the first detection light and the second detection light are obtained respectively. The differential operation between the light reflected light intensity information, based on the absorption characteristic spectrum of the standard corresponding to the two-dimensional sample to be tested, realizes the structural feature detection of the two-dimensional sample to be tested; the design method has strong resistance to temperature interference and environmental adaptability and further design a device for realizing the method, through the modular optical path layout structure design, the work efficiency of the structural feature detection of the sample to be tested can be further improved.

Description of drawings

FIG. 1 is a schematic block diagram of an apparatus for designing a differential reflection detection method suitable for a variable temperature environment according to the present invention.

Among them, 1. light source, 2. spectrometer, 3. sample chamber, 4. first substrate, 5. second substrate, 6. first off-axis parabolic mirror, 7. beam splitter, 8. second off-axis parabolic mirror, 9. Host computer, 10. Incident fiber, 11. Collimating mirror, 12. Outgoing fiber, 13. Baffle controller, 14. Optical baffle, 15. Variable temperature stage, 16. Light source controller.

Detailed ways

The specific embodiments of the present invention will be described in further detail below with reference to the accompanying drawings.

The present invention designs a differential reflection detection method suitable for a variable temperature environment. In practical applications, based on the light source 1 and the spectrometer 2, and according to the first substrate 4 in a temperature-controlled environment, the following steps A to F are performed for the sample chamber. The two-dimensional sample to be tested set on the surface of the second substrate 5 in 3 is subjected to structural feature detection.

Step A. First, process the outgoing light of the light source 1 to obtain parallel light, and then split the parallel light to obtain the first and second light splits with the same wavelength and the same intensity, and proceed to step B.

Step B. Based on the constant time duration t of the temperature in the sample chamber 3, block the first light split, and simultaneously control the second light split to be directed to the surface of the two-dimensional sample to be measured set on the surface of the second substrate 5, and generate the second detection light by reflection, which is composed of The receiving end of the spectrometer 2 receives the second detection light, maintains this state for a duration t, and obtains the temperature T in the sample chamber 3 in this state, and then proceeds to step C.

Step C. Control the temperature of the environment where the first substrate 4 is located to be the temperature T, and block the second light splitting, while controlling the first splitting light to be directed to the surface of the first substrate 4, generating the first detection light by reflection, which is received by the receiving end of the spectrometer 2 The first detection light is kept in this state for a duration of t, and then the process proceeds to step D.

Step D. The spectrometer 2 respectively detects and obtains the reflected light intensity information R ₂ corresponding to the second detection light and the reflected light intensity information R ₁ corresponding to the first detection light for the received second detection light and the first detection light, and go to step E.

Step E. carry out differential operation according to the following formula;

The absorption spectrum Δ corresponding to the two-dimensional sample to be tested is obtained, and the absorption spectrum Δ corresponding to the two-dimensional sample to be tested is further processed and updated by the SG smoothing algorithm to obtain the absorption spectrum corresponding to the two-dimensional sample to be tested, that is, the light absorption characteristics vs wavelength, and proceed to step F.

Step F. According to the absorption characteristic spectrum of the standard corresponding to the two-dimensional test sample, analyze the light absorption characteristics and wavelength spectrum corresponding to the two-dimensional test sample, that is, realize the structural feature detection of the two-dimensional test sample.

Regarding the above-designed differential reflection detection method suitable for variable temperature environments, a device for implementing the method is further designed. As shown in FIG. 1 , based on the light source 1 and the spectrometer 2 , the light source 1 and the spectrometer 2 include a first off-axis parabolic mirror 6 , a beam splitter Mirror 7, second off-axis parabolic mirror 8, electronically controlled baffle, and host computer 9; wherein, the inner arc surface of the first off-axis parabolic mirror 6 faces the exit end of the light source 1, and the outgoing light of the light source 1 is directed to the first off-axis parabolic mirror 6. The inner arc surface of the axial parabolic mirror 6 generates parallel light; the beam splitter 7 is arranged on the optical path of the first off-axis parabolic mirror 6 to emit parallel light, and the beam splitter 7 produces parallel light through reflection and transmission to produce the same wavelength and intensity. The same first split and second split; the surface of the two-dimensional sample to be tested faces the second split direction, and the second split generates second reflected light through the surface of the two-dimensional sample to be tested; the surface of the first substrate 4 faces the first In the beam splitting direction, the first beam passes through the surface of the first substrate 4 to generate the first reflected light; the inner arc surface of the second off-axis parabolic mirror 8 faces the first reflected light and the second reflected light, and the first reflected light and the second reflected light are respectively The first detection light and the second detection light are generated through the inner arc surface of the second off-axis parabolic mirror 8; the receiving end of the spectrometer 2 faces and receives the first detection light and the second detection light; The control baffles are connected, and under the control of the host computer 9, the electronic control baffles switch to select one to block the first light splitting or the second light splitting.

Among them, the light source 1 is composed of a wide-spectrum light source and an analog light source controller 16; the wide-spectrum light source is mainly composed of a tungsten lamp or a xenon lamp; the analog light source controller can control the light-emitting state of the light source on/off and the brightness of the light source; the wide-spectrum light source and the analog light source The controllers are connected by transmission lines.

Regarding the design that the first substrate 4 is located in a temperature-controlled environment, the specific design adopts a temperature-changing table 15, the first substrate 4 is arranged on the temperature-changing table 15, and the temperature-changing table 15 constitutes a temperature-controlled environment, so that the first substrate 4 is located in a temperature-controlled environment. in a controlled environment.

In practical application, based on the scheme of the above designed device, an incident optical fiber 10, a collimating mirror 11, and an outgoing optical fiber 12 are further designed. The outgoing end of the light source 1 is connected to one end of the incident optical fiber 10, and the other end of the incident optical fiber 10 points to On the inner arc surface of the first off-axis parabolic mirror 6, the outgoing light of the light source 1 is directed to the inner arc surface of the first off-axis parabolic mirror 6 through the incident optical fiber 10 to generate parallel light; the input end of the collimating mirror 11 faces and receives the first off-axis parabolic mirror 6. For the detection light and the second detection light, the output end of the collimating mirror 11 is docked with one end of the outgoing optical fiber 12, and the other end of the outgoing optical fiber 12 is docked with the receiving end of the spectrometer 2, and the spectrometer 2 receives the first detection light and the second detection light through the outgoing optical fiber 12. 2. Detection light.

In practical applications, regarding the electronically controlled baffles, the electronically controlled baffles are further designed to include the interconnected baffle controller 13 and the optical baffle 14 , the upper computer 9 is connected to the baffle controller 13 , and the optical baffle 14 is in the upper position. Under the control of the baffle controller 13, the machine 9 switches to choose one to block the first split light or the second split light; and in the application, the surface of the optical baffle 14 is further designed to be covered with a black surface.

Applying the above-designed device to practice, the incident optical fiber 10 adopts a circular fiber bundle multimode fiber with an SMA905 connector, and the collimating mirror 11 adopts a collimating mirror with an SMA connector with a lens diameter of 5 millimeters or 10 millimeters, The outgoing optical fiber 12 adopts a circular fiber bundle multimode fiber with a diameter of 1.3 mm or 2.0 mm SMA905 connector; the first off-axis parabolic mirror 6 is a reflection focal length of 1 inch or 2 inches, and is coated with UV-enhanced aluminum mode. Off-axis parabolic mirror, the second off-axis parabolic mirror 8 is a 90-degree off-axis parabolic mirror with a reflective focal length of 2 inches or 3 inches and a UV-enhanced aluminum mold, and the beam splitter 7 is a non-parabolic mirror with a side length of 10 mm. For the beam splitting cube with polarization of 50:50, the parallel light generated by the inner arc surface of the first off-axis parabolic mirror 6 is equally divided by the beam splitter 7 into the first beam splitting and the second beam splitting with the same wavelength, the same intensity and the same intensity.

In practical applications, the following steps A to F are performed based on the differential reflection detection method suitable for a variable temperature environment under the above designed device.

Step A. Start the light source controller, select the appropriate brightness of the light source 1, so that the light source 1 emits outgoing light, and the outgoing light of the light source 1 is directed to the inner arc surface of the first off-axis parabolic mirror 6 through the incident optical fiber 10 to generate parallel light, and is generated by The beam splitter 7 generates a first split beam and a second split beam with the same wavelength and the same intensity with respect to the parallel light through reflection and transmission, and then proceeds to step B.

Step B. Based on the time length t of the constant temperature in the sample chamber 3, the electronically controlled baffle is switched to block the first beam under the control of the host computer 9, while the second beam is directed to the two-dimensional set on the surface of the second substrate 5. The surface of the sample to be tested generates a second reflected light through reflection, and the second reflected light passes through the inner arc surface of the second off-axis parabolic mirror 8 to generate a second detection light. Send to the spectrometer 2, receive the second detection light by the spectrometer 2, maintain this state for a duration t, and obtain the temperature T in the sample chamber 3 in this state, and then proceed to step C.

Step C. Control the temperature changing stage 15, so that the temperature of the environment where the first substrate 4 is located is the temperature T, and based on the electronically controlled baffle, under the control of the host computer 9, the second split light is switched to block the second beam, and the first beam is controlled simultaneously. To the surface of the first substrate 4, the first reflected light is generated by reflection. The first reflected light generates the first detection light through the inner arc surface of the second off-axis parabolic mirror 8, and is sent to the spectrometer 2 through the exit fiber 12, and the spectrometer 2 The first detection light is received, and this state is maintained for a duration of t, and then step D is entered.

Step D. The spectrometer 2 respectively detects and obtains the reflected light intensity information R ₂ corresponding to the second detection light and the reflected light intensity information R ₁ corresponding to the first detection light for the received second detection light and the first detection light, and go to step E.

Step E. The host computer 9 receives the reflected light intensity information R ₂ corresponding to the second detection light and the reflected light intensity information R ₁ corresponding to the first detection light, and performs a differential operation according to the following formula;

The absorption spectrum Δ corresponding to the two-dimensional sample to be tested is obtained, and the absorption spectrum Δ corresponding to the two-dimensional sample to be tested is further processed and updated by the SG smoothing algorithm to obtain the absorption spectrum corresponding to the two-dimensional sample to be tested, that is, the light absorption characteristics vs wavelength, and proceed to step F.

Step F. The upper computer 9 analyzes the light absorption characteristics and wavelength spectrum corresponding to the two-dimensional sample to be tested according to the absorption characteristic spectrum of the standard product corresponding to the two-dimensional sample to be tested, that is, to realize the structural characteristics of the two-dimensional sample to be tested. detection.

The differential reflection detection method designed by the above technical solution is suitable for a variable temperature environment. Based on the light splitting of the light emitted by the light source 1, the first and second light splits with the same wavelength and the same intensity are obtained. The first substrate 4 in a temperature-controlled environment is According to the switching control, the first split light and the second split light are sequentially reflected by the first substrate 4 and the two-dimensional sample to be tested set on the surface of the second substrate 5 in the sample chamber 3, and the reflected light intensity of the first detected light is obtained by respectively The differential operation between the information and the reflected light intensity information of the second detection light, based on the absorption characteristic spectrum of the standard corresponding to the two-dimensional sample to be tested, realizes the structural feature detection of the two-dimensional sample to be tested; the design method has the ability to resist temperature interference The advantages of strong and good environmental adaptability; and a device for realizing the method is further designed, and the work efficiency of the structural feature detection of the sample to be tested can be further improved through the modular optical path layout structure design.

The embodiments of the present invention have been described in detail above in conjunction with the accompanying drawings, but the present invention is not limited to the above-mentioned embodiments, and can also be made within the scope of knowledge possessed by those of ordinary skill in the art without departing from the purpose of the present invention. Various changes.

Claims (10)

1. A differential reflection detection method suitable for a temperature-varying environment is characterized by comprising the following steps: based on the light source (1) and the spectrometer (2), according to the first substrate (4) in the temperature-controllable environment, carrying out structural feature detection on a two-dimensional sample to be detected arranged on the surface of the second substrate (5) in the sample chamber (3) according to the following steps A to F;

step A, splitting light of emergent light of a light source (1) to obtain first split light and second split light which have the same wavelength and the same intensity, and entering step B;

b, blocking the first light split based on the time T of constant temperature in the sample chamber (3), controlling the second light split to be directed to the surface of a two-dimensional sample to be detected arranged on the surface of a second substrate (5), generating second detection light through reflection, receiving the second detection light by a receiving end of a spectrometer (2), keeping the state for the time T, obtaining the temperature T in the sample chamber (3) in the state, and entering the step C;

c, controlling the temperature of the environment where the first substrate (4) is located to be the temperature T, blocking the second light split, controlling the first light split to be emitted to the surface of the first substrate (4), generating first detection light through reflection, receiving the first detection light by a receiving end of the spectrometer (2), keeping the state for a duration T, and then entering the step D;

step D, the spectrometer (2) respectively detects and obtains the reflected light intensity information R corresponding to the second detection light aiming at the received second detection light and the first detection light ₂ The reflected light intensity information R corresponding to the first detection light ₁ And entering step E;

step E, carrying out differential operation according to the following formula;

obtaining an absorption spectrum delta corresponding to a two-dimensional sample to be detected, namely the relation between the light absorption characteristic of the sample and the wavelength, and entering the step F;

and F, analyzing the light absorption characteristics and the wavelength spectrum corresponding to the two-dimensional sample to be detected according to the absorption characteristic spectrum of the standard substance corresponding to the two-dimensional sample to be detected, namely realizing the detection of the structural characteristics of the two-dimensional sample to be detected.

2. The differential reflection detection method suitable for use in a variable temperature environment according to claim 1, wherein: in the step A, the emergent light of the light source (1) is processed to obtain parallel light, and then the parallel light is split to obtain first split light and second split light which have the same wavelength and the same intensity.

3. The differential reflection detection method suitable for use in a variable temperature environment according to claim 1, wherein: and in the step E, aiming at the difference operation result, the difference operation result is processed and updated by an SG smoothing algorithm, and the absorption spectrum corresponding to the two-dimensional sample to be detected, namely the relation between the light absorption characteristic and the wavelength, is obtained.

4. An apparatus for implementing the differential reflection detection method suitable for use in a temperature-varying environment according to any one of claims 1 to 3, wherein: based on the light source (1) and the spectrometer (2), the spectrometer comprises a first off-axis parabolic mirror (6), a spectroscope (7), a second off-axis parabolic mirror (8), an electric control baffle plate and an upper computer (9); the inner cambered surface of the first off-axis parabolic mirror (6) faces the emergent end of the light source (1), and emergent light of the light source (1) emits to the inner cambered surface of the first off-axis parabolic mirror (6) to generate parallel light; the spectroscope (7) is arranged on a light path of parallel light emitted by the first off-axis parabolic mirror (6), and the spectroscope (7) generates first light split and second light split which have the same wavelength and the same intensity aiming at the parallel light in a reflection and transmission mode; the surface of the two-dimensional sample to be detected faces a second light splitting direction, and second reflected light is generated by the second light splitting through the surface of the two-dimensional sample to be detected; the surface of the first substrate (4) faces a first light splitting direction, and first reflected light is generated by the first light splitting through the surface of the first substrate (4); the inner arc surface of the second off-axis parabolic mirror (8) faces the first reflected light and the second reflected light, and the first reflected light and the second reflected light respectively generate first detection light and second detection light through the inner arc surface of the second off-axis parabolic mirror (8); the receiving end of the spectrometer (2) faces and receives the first detection light and the second detection light; the upper computer (9) is respectively connected with the spectrometer (2) and the electric control baffle, and the electric control baffle switches to select one light splitting device to shield the first light splitting device or the second light splitting device under the control of the upper computer (9).

5. The apparatus of claim 4, wherein the apparatus is adapted for use in a differential reflection detection method in a temperature-varying environment, and comprises: the light source device is characterized by further comprising an incident optical fiber (10), a collimating mirror (11) and an emergent optical fiber (12), wherein the emergent end of the light source (1) is in butt joint with one end of the incident optical fiber (10), the other end of the incident optical fiber (10) points to the inner arc surface of the first off-axis parabolic mirror (6), and emergent light of the light source (1) is emitted to the inner arc surface of the first off-axis parabolic mirror (6) through the incident optical fiber (10) to generate parallel light; the input end of the collimating mirror (11) faces and receives the first detection light and the second detection light, the output end of the collimating mirror (11) is in butt joint with one end of the emergent optical fiber (12), the other end of the emergent optical fiber (12) is in butt joint with the receiving end of the spectrometer (2), and the spectrometer (2) receives the first detection light and the second detection light through the emergent optical fiber (12).

6. The apparatus of claim 4, wherein the apparatus is adapted for use in a differential reflection detection method in a temperature-varying environment, and comprises: the electronic control baffle comprises a baffle controller (13) and an optical baffle (14) which are connected with each other, the upper computer (9) is connected with the baffle controller (13), and the optical baffle (14) is switched to be selected to shield the first light splitting or the second light splitting under the control of the upper computer (9) through the baffle controller (13).

7. The apparatus of claim 6, wherein the apparatus is adapted for use in a differential reflection detection method in a variable temperature environment, and comprises: the surface of the optical baffle plate (14) is covered with a black surface.

8. The apparatus of claim 5, wherein the apparatus is adapted for use in a differential reflection detection method in a variable temperature environment, and comprises: incident fiber (10) are the round fiber bundle multimode fiber of SMA905 connector, collimating mirror (11) are the collimating mirror of the SMA connector that the lens diameter is 5 millimeters or 10 millimeters, emergent fiber (12) are the round fiber bundle multimode fiber of the SMA905 connector of diameter 1.3 millimeters or 2.0 millimeters.

9. The apparatus of the differential reflection detection method for use in temperature-varying environments according to any one of claims 4 to 6, wherein: the temperature-changing table (15) is further included, the first substrate (4) is arranged on the temperature-changing table (15), the temperature-changing table (15) forms a temperature-controllable environment, and the first substrate (4) is located in the temperature-controllable environment.

10. The apparatus for differential reflection detection method suitable for use in temperature-varying environments according to claim 9, wherein: the first off-axis parabolic mirror (6) is an off-axis parabolic mirror with a reflection focal length of 1 inch or 2 inches and plated with an ultraviolet enhanced aluminum mold, the second off-axis parabolic mirror (8) is a 90-degree off-axis parabolic mirror with a reflection focal length of 2 inches or 3 inches and plated with an ultraviolet enhanced aluminum mold, the spectroscope (7) is a non-polarized 50:50 beam splitting cube with the side length of 10 millimeters, and parallel light generated by the beam splitter (7) through the inner arc surface of the first off-axis parabolic mirror (6) is divided into a first beam splitter and a second beam splitter which are identical in wavelength, intensity and intensity.

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