CN115019025A - Cutting calibration method, apparatus and computer readable storage medium - Google Patents

Abstract

Embodiments of the present invention provide a cutting calibration method, device, and computer-readable storage medium, wherein the method includes: acquiring a blade edge line collected by a camera; determining a target tick mark at the center position of the blade edge line and the camera lens The deflection angle, the horizontal offset and/or the vertical offset between them; the target movement parameter associated with the camera lens is generated according to the deflection angle, the horizontal offset and/or the vertical offset ; Control the camera adjustment axis according to the target movement parameter, so as to control the center position of the camera lens to coincide with the cutting position of the blade through the camera adjustment axis. By calibrating the center position of the camera lens and the cutting position of the blade before cutting the wafer, the cutting precision is improved and the problem of low cutting precision is solved.

Description

Cutting calibration method, apparatus, and computer-readable storage medium

technical field

The present invention relates to the technical field of wafer cutting, and in particular, to a cutting calibration method, a device and a computer-readable storage medium.

Background technique

In the wafer slicing process, the camera needs to be positioned to the slicing line of the slicing, and then the positioned slicing line is moved to the right under the rib for slicing. The center of the camera's field of view is the corresponding edge of the rib. Split position.

However, in the actual cutting process, since there may be a relative position offset between the riving knife and the camera, that is, the actual position of the riving knife and the position of the camera positioning do not coincide, and then splitting according to the camera positioning will reduce the The accuracy of lobe cutting affects the quality of the cut lobes.

The above content is only used to assist the understanding of the technical solutions of the present invention, and does not mean that the above content is the prior art.

SUMMARY OF THE INVENTION

The main purpose of the present invention is to provide a cutting calibration method, aiming at solving the problem of how to improve the cutting accuracy.

In order to achieve the above object, the present invention provides a cutting calibration method, the cutting calibration method comprises:

Obtain the blade edge line collected by the camera;

determining the deflection angle, the horizontal offset and/or the vertical offset between the blade edge line and the target tick mark at the center of the camera lens;

generating a target movement parameter associated with the camera lens according to the deflection angle, the horizontal offset and/or the vertical offset;

The camera adjustment axis is controlled according to the target movement parameter, so as to control the center position of the camera lens to coincide with the cutting position of the blade through the camera adjustment axis.

Optionally, the step of determining the offset angle, horizontal offset and vertical offset between the blade edge line and the target scale line at the center of the camera lens includes:

Obtain the preset area where the target tick mark is located;

When the blade edge line is in the preset area, determining a relative offset position of the blade edge line in the preset area;

According to the relative offset position, the offset angle, the lateral offset amount and the longitudinal offset amount between the blade edge line and the target scale line are determined.

Optionally, when the blade edge line is in the preset area, the step of determining the relative offset position of the blade edge line in the preset area includes:

obtaining the grayscale value corresponding to each pixel in the preset area;

Taking the area corresponding to the pixel point in the gray value that satisfies the preset gray matching condition and is located in the preset area as the blade edge line located in the preset area;

The relative distance between the cutting edge line and the central area of the preset area is determined, and the relative offset position of the cutting edge line in the preset area is obtained.

Optionally, the step of generating the target movement parameter associated with the camera lens according to the deflection angle, the horizontal offset and/or the vertical offset includes:

The horizontal movement amount corresponding to the camera lens is determined according to the horizontal offset, wherein the horizontal movement amount includes a horizontal horizontal movement amount and/or a horizontal vertical movement amount;

A first target movement parameter associated with the camera lens is determined according to the horizontal lateral movement amount and/or the horizontal vertical movement amount.

Optionally, the step of determining the first target movement parameter associated with the camera lens according to the horizontal horizontal movement amount and/or the horizontal vertical movement amount includes:

Determine the horizontal and lateral movement parameters of the first target movement parameter according to the horizontal and lateral movement amount, and/or determine the horizontal and vertical movement parameters of the first target movement parameter according to the horizontal and vertical movement amount, and determine the horizontal and vertical movement parameters of the first target movement parameter according to the horizontal and vertical movement amount. The lateral movement parameter and/or the horizontal and vertical movement parameter determine the first target movement parameter; or

A linear movement parameter of the first target movement parameter is determined according to the horizontal lateral movement amount and the horizontal longitudinal movement amount, and the linear movement parameter is used as the first target movement parameter.

Optionally, the step of generating the target movement parameter associated with the camera lens according to the deflection angle, the horizontal offset and/or the vertical offset includes:

The rotation angle corresponding to the camera lens is determined according to the deflection angle, the horizontal movement amount corresponding to the camera lens is determined according to the horizontal offset, and/or the vertical offset corresponding to the camera lens is determined vertical movement;

A second target movement parameter associated with the camera lens is determined according to the rotation angle, the horizontal movement amount and/or the vertical movement amount.

In addition, the present invention also provides a cutting calibration device, the cutting calibration device includes: a riving knife, a light source, a camera, a camera adjustment shaft, and a control circuit board, the control circuit board includes a memory, a processor, and storage on the memory. and a cutting calibration program executable on the processor, the cutting calibration program implementing the steps of the cutting calibration method as described above when executed by the processor.

Optionally, the cutting calibration device includes: a riveting knife is provided at the top of the cutting calibration device, and the ripping knife is used to perform a cutting action after calibration; the light source and the camera are provided on the lower side of the ripping knife , the camera is used to collect the edge line of the riving knife under the illumination of the light source; the camera includes a camera lens on the upper side and a camera support on the lower side, the camera lens is used for cutting calibration, and the camera The support is connected with the camera adjustment shaft at the bottom; the camera adjustment shaft includes a vertical adjustment shaft, a horizontal adjustment shaft and a rotation shaft, and the camera adjustment shaft is used to control the camera lens to perform cutting and calibration actions.

In addition, the present invention also provides a computer-readable storage medium, where the computer-readable storage medium stores a cutting calibration program, and when the cutting calibration program is executed by a processor, implements each step of the cutting calibration method described in the above embodiment .

Embodiments of the present invention provide a cutting calibration method, device, and computer-readable storage medium, wherein the method includes: acquiring a blade edge line collected by a camera; determining a target tick mark at the center position of the blade edge line and the camera lens The deflection angle, the horizontal offset and/or the vertical offset between them; the target movement parameter associated with the camera lens is generated according to the deflection angle, the horizontal offset and/or the vertical offset ; Control the camera adjustment axis according to the target movement parameter, so as to control the center position of the camera lens to coincide with the cutting position of the blade through the camera adjustment axis. By calibrating the center position of the camera lens and the cutting position of the blade before cutting the wafer, the cutting precision is improved and the problem of low cutting precision is solved.

Description of drawings

1 is a schematic diagram of a hardware architecture of a cutting calibration device involved in an embodiment of the present invention;

Fig. 2 is the schematic flow chart of the first embodiment of the cutting calibration method of the present invention;

3 is a schematic diagram of a refinement flow of step S20 in the second embodiment of the cutting calibration method of the present invention;

4 is a schematic diagram of a refinement flow of step S30 in the third embodiment of the cutting calibration method of the present invention;

FIG. 5 is a schematic diagram of another refinement flow of step S30 in the fourth embodiment of the cutting calibration method of the present invention.

The realization, functional characteristics and advantages of the present invention will be further described with reference to the accompanying drawings in conjunction with the embodiments.

Detailed ways

It should be understood that, while exemplary embodiments of the present invention are shown in the accompanying drawings, the present invention may be embodied in various forms and should not be limited by the embodiments set forth herein. Rather, these embodiments are provided so that the present invention will be more thoroughly understood, and will fully convey the scope of the present invention to those skilled in the art.

As an implementation solution, the cutting calibration equipment may be as shown in FIG. 1 .

The embodiments of the present invention relate to a cutting calibration device, and the cutting calibration device includes: a processor 101 , such as a CPU, a memory 102 , and a communication bus 103 . Among them, the communication bus 103 is used to realize the connection and communication between these components.

The memory 102 may be high-speed RAM memory, or may be non-volatile memory, such as disk memory. As shown in FIG. 1, the memory 102, which is a computer-readable storage medium, may include a cutting calibration program; and the processor 101 may be used to call the cutting calibration program stored in the memory 102, and perform the following operations:

Obtain the blade edge line collected by the camera;

determining the deflection angle, the horizontal offset and/or the vertical offset between the blade edge line and the target tick mark at the center of the camera lens;

generating a target movement parameter associated with the camera lens according to the deflection angle, the horizontal offset and/or the vertical offset;

The camera adjustment axis is controlled according to the target movement parameter, so as to control the center position of the camera lens to coincide with the cutting position of the blade through the camera adjustment axis.

In one embodiment, the processor 101 may be configured to invoke the cutting calibration program stored in the memory 102 and perform the following operations:

Obtain the preset area where the target tick mark is located;

obtaining the grayscale value corresponding to each pixel in the preset area;

Taking the area corresponding to the pixel point in the gray value that satisfies the preset gray matching condition and is located in the preset area as the blade edge line located in the preset area;

determining the relative distance between the blade edge line and the central area of the preset area, to obtain the relative offset position of the blade edge line in the preset area;

According to the relative offset position, the offset angle, the lateral offset amount and the longitudinal offset amount between the blade edge line and the target scale line are determined.

In one embodiment, the processor 101 may be configured to invoke the cutting calibration program stored in the memory 102 and perform the following operations:

The horizontal movement amount corresponding to the camera lens is determined according to the horizontal offset, wherein the horizontal movement amount includes a horizontal horizontal movement amount and/or a horizontal vertical movement amount;

Determine the horizontal and lateral movement parameters of the first target movement parameter according to the horizontal and lateral movement amount, and/or determine the horizontal and vertical movement parameters of the first target movement parameter according to the horizontal and vertical movement amount, and determine the horizontal and vertical movement parameters of the first target movement parameter according to the horizontal and vertical movement amount. The lateral movement parameter and/or the horizontal and vertical movement parameters determine the first target movement parameter; or, according to the horizontal lateral movement amount and the horizontal and vertical movement amount, determine the linear movement parameter of the first target movement parameter, The linear movement parameter is used as the first target movement parameter.

In one embodiment, the processor 101 may be configured to invoke the cutting calibration program stored in the memory 102 and perform the following operations:

The rotation angle corresponding to the camera lens is determined according to the deflection angle, the horizontal movement amount corresponding to the camera lens is determined according to the horizontal offset, and/or the vertical offset corresponding to the camera lens is determined vertical movement;

A second target movement parameter associated with the camera lens is determined according to the rotation angle, the horizontal movement amount and/or the vertical movement amount.

Based on the hardware architecture of the cutting calibration device based on the wafer cutting technology, an embodiment of the cutting calibration method of the present invention is proposed.

2, in the first embodiment, the cutting calibration method includes the following steps:

Step S10, acquiring the blade edge line collected by the camera;

In this embodiment, before the cutting edge is cut, the cutting position of the cutting edge needs to be calibrated. The lens of the camera is perpendicular to the blade, and the edge line part of the cutting knife is photographed under the illumination of the light source to obtain a clear image of the blade edge line, and then the image of the blade edge line is collected. The blade edge line is extracted from the line image.

Step S20, determining the deflection angle, the horizontal offset and/or the vertical offset between the blade edge line and the target scale line at the center of the camera lens;

In this embodiment, after the cutting edge line is obtained, the position of the cutting edge line is used as the reference position, and the deviation between the camera lens and the reference position is determined, and the deviation includes deflection angle, horizontal deviation and At least one of the vertical offsets, the target tick mark can be a horizontal tick mark indicating the position of the center of the camera, it should be emphasized that the target tick mark is not actually engraved in the center of the camera lens, but as a computer program to identify the cut position calibration line.

Further, for the position of the blade without deviation, the image of the blade edge line should be in the center of the camera lens, and keep a certain overlap with the target scale line. Therefore, it is assumed that the position of the blade line is between the target scale line. If they do not coincide, it means that there is a deviation in the cutting position. The deflection angle is the angle value between the blade edge line and the horizontal target scale line, that is, the camera lens has a certain deflection relative to the cutting knife; the horizontal offset is the horizontal direction of the blade line relative to the target scale line (ie. The offset on the x-axis, y-axis) means that the lens has a deviation in the horizontal direction relative to the cutting knife; the vertical offset is the height deviation of the lens in the vertical direction (ie, the z-axis).

Step S30, generating a target movement parameter associated with the camera lens according to the deflection angle, the horizontal offset and/or the vertical offset;

Step S40 , controlling the camera adjustment axis according to the target movement parameter, so as to control the center position of the camera lens to coincide with the cutting position of the blade through the camera adjustment axis.

In this embodiment, after the deviation between the camera lens and the cutting knife is determined, a corresponding movement parameter is generated according to the deviation value, and then the camera adjustment axis controls the camera lens to move according to the movement parameter, so that the camera lens can move. The center position of the blade coincides with the cutting position of the blade, so as to realize the cutting calibration.

In the technical solution provided by this embodiment, by collecting the cutting edge line of the cutting knife, the deviation between the cutting edge line and the center position of the camera lens is determined, and then the corresponding deviation compensation movement parameters are determined according to the deviation, and finally the compensation The movement parameter controls the camera adjustment axis, so that the center position of the camera lens coincides with the cutting position of the blade, so as to realize the cutting calibration. Improved cutting accuracy.

3, in the second embodiment, based on the first embodiment, the step S20 includes:

Step S21, obtaining the preset area where the target scale line is located;

Step S221, obtaining the grayscale value corresponding to each pixel in the preset area;

Step S222, taking the area corresponding to the pixel point in the gray value that meets the preset grayscale matching condition and is located in the preset area as the blade edge line located in the preset area;

Step S223: Determine the relative distance between the blade edge line and the central area of the preset area, and obtain the relative offset position of the blade edge line in the preset area.

Step S23, according to the relative offset position, determine the offset angle, the lateral offset and the longitudinal offset between the blade edge line and the target scale line.

Optionally, since the collected image of the blade edge line may be too far away from the camera lens, and this situation is often caused by an error during the collection process, in this embodiment, based on the target scale line A preset area is set, and when the edge line is within the preset area, further actions are performed.

Further, based on the preset area, the gray value corresponding to each pixel in the area is obtained, and the preset gray matching condition will be satisfied by gray matching, and the corresponding pixel in the preset area will be The area formed by the pixel points is used as the blade edge line, and then the relative position of the blade edge line in the preset area is determined based on the center position coordinates of the preset area—that is, the position of the target tick mark. Offset position, the relative offset position includes lens angle offset, horizontal position offset and vertical position offset, and the offset angle between the blade edge line and the target scale line is determined according to the relative offset position, the lateral offset and the vertical offset.

Exemplarily, the preset area may be a three-dimensional space, and the coordinates corresponding to its center position are set to (0, 0, 0), and grayscale matching is performed in the preset area to determine the blade edge line, and then further obtain To the position of the blade edge line, based on the center coordinates, assuming that the coordinates of the blade edge line are (-1, 2, 1), the offset of the camera is determined as: the amount of movement in the positive direction of the X axis 1, Y-axis negative movement amount 2, Z-axis negative movement amount 1. After moving, the offset angle of the camera lens is determined according to the angle between the two lines. When the angle between the two lines is 0° or 180°, it is determined that the two lines are coincident.

In the technical solution provided in this embodiment, a preset area is set, and the edge line of the blade is determined by performing grayscale matching based on the preset area, and then the target scale line is moved in the preset area according to the edge line of the blade, and finally The way of making the two lines overlap improves the accuracy of cutting.

4, in the third embodiment, based on the first embodiment, the step S30 includes:

Step S31, determining a horizontal movement amount corresponding to the camera lens according to the horizontal offset, wherein the horizontal movement amount includes a horizontal horizontal movement amount and/or a horizontal vertical movement amount;

Step S321: Determine the horizontal and lateral movement parameters of the first target movement parameter according to the horizontal and lateral movement amount, and/or determine the horizontal and vertical movement parameters of the first target movement parameter according to the horizontal and vertical movement amount, and according to The horizontal lateral movement parameter and/or the horizontal and vertical movement parameter determine the first target movement parameter; or the linear movement parameter of the first target movement parameter is determined according to the horizontal lateral movement amount and the horizontal and vertical movement amount , and the linear movement parameter is used as the first target movement parameter.

Optionally, this embodiment provides a method for determining a target movement parameter in a horizontal direction. In this embodiment, when there is a deviation in the horizontal direction between the cutting blade and the cutting position of the wafer, the movement parameter of the camera is determined according to the deviation amount determined in the horizontal direction. In the actual cutting process, the cutting position deviation in the horizontal direction is a common deviation. For the horizontal position deviation, there are horizontal and vertical directions (that is, the x-axis and the y-axis). The point is used as the origin, and a two-dimensional coordinate system is established. According to the obtained horizontal offset between the camera and the cutting blade, at least one of the corresponding horizontal horizontal movement and horizontal vertical movement is determined. According to the horizontal horizontal movement The amount and/or the amount of said horizontal and vertical movement determines the target movement parameter of the camera lens.

Further, for the movement mode of the camera, after a target position is determined, the camera adjustment axis can be moved according to the horizontal and vertical coordinates of the target position, that is, first move the corresponding distance horizontally and then move the corresponding distance vertically (or Move the corresponding distance vertically and then move the corresponding distance horizontally); the camera adjustment axis can also directly control the camera to move to the target position in a straight line according to the straight-line distance between the target position and the current position. The specific implementation can be based on the actual cutting process. actually needs to be set.

Exemplarily, in the display interface of the cutting calibration program, the center of the blue cross line is set as the center of the camera's field of view (ie, the midpoint of the target scale line), and the yellow line is set as the deviation distance between the cutting blade and the camera center. The left and right ends of the interface are provided with tick marks, which are used to measure the deviation distance. Assuming that there is a deviation between the edge line and the camera center on the y-axis, after the cutting calibration program obtains the image of the blade edge line, it automatically determines the deviation distance between the two, and visualizes the deviation distance with the length of the yellow line, for example The length of the generated yellow line is 7.204mm, and the yellow line is parallel to the vertical line of the blue cross, which means that there is a distance error of 7.204mm between the cutting edge line and the camera lens on the y-axis in the horizontal direction.

In a number of technical solutions provided in this embodiment, the horizontal movement amount corresponding to the camera lens is determined by the horizontal offset, and the association of the camera lens is determined according to the horizontal horizontal movement amount and/or the horizontal vertical movement amount The method of moving the parameters of the first target, so that the camera lens is adjusted to align the cutting knife when the cutting position has a horizontal deviation, which improves the cutting accuracy.

5, in the fourth embodiment, based on the first embodiment, the step S30 further includes:

Step S33, determining the rotation angle corresponding to the camera lens according to the deflection angle, determining the horizontal movement amount corresponding to the camera lens according to the horizontal offset, and/or determining the camera according to the vertical offset The vertical movement amount corresponding to the lens;

Step S34: Determine a second target movement parameter associated with the camera lens according to the rotation angle, the horizontal movement amount and/or the vertical movement amount.

Optionally, this embodiment provides another way of determining the target movement parameter. In addition to the relatively common positional deviation in the horizontal direction mentioned in the third embodiment, the vertical direction and the angle deviation of the camera lens may also occur in the cutting process. The deviation in the vertical direction can easily lead to the cutting knife not cutting the target position or the cutting position is too deep when the knife is lowered; while in the wafer cutting process, when cutting the wafer split, the direction of the split is fixed, so the camera lens The deviation of the angle deviation will lead to the error of the cut position, which reduces the accuracy of wafer cutting. Because in each cutting calibration process, not every type of error will exist at the same time, and the type of error that often exists is at least one of them. Therefore, when the cutting calibration program does not recognize this type of position error, no error will be generated. The corresponding type of move parameter.

Illustratively, assuming that the program determines that there is a 4mm error in the positive x-axis of the blade and the lens in the horizontal direction, there is a 0.3° lens deflection (assuming clockwise is positive), but the deviation in the vertical direction is 0, then the generated target The movement parameters are: move 4mm in the negative direction of the x-axis, and rotate the lens counterclockwise by 0.3°. Since there is no deviation in the vertical direction, no vertical movement parameters are generated.

In this embodiment, the rotation angle corresponding to the camera lens is determined according to the deflection angle, the horizontal movement amount corresponding to the camera lens is determined according to the horizontal offset, and/or the vertical movement amount corresponding to the camera lens is determined according to the vertical offset , which covers the more common types of positional deviations, and generates corresponding positional compensation data based on these types of positional deviations, improving the accuracy of cutting.

In addition, the present invention also provides a cutting calibration device, the cutting calibration device includes: a riving knife, a light source, a camera, a camera adjustment shaft, and a control circuit board, the control circuit board includes a memory, a processor, and storage on the memory. and a cutting calibration program executable on the processor, the cutting calibration program implementing the steps of the cutting calibration method as described above when executed by the processor.

Optionally, the cutting calibration device includes: a riveting knife is provided at the top of the cutting calibration device, and the ripping knife is used to perform a cutting action after calibration; the light source and the camera are provided on the lower side of the ripping knife , the camera is used to collect the edge line of the riving knife under the illumination of the light source; the camera includes a camera lens on the upper side and a camera support on the lower side, the camera lens is used for cutting calibration, and the camera The support is connected with the camera adjustment shaft at the bottom; the camera adjustment shaft includes a vertical adjustment shaft, a horizontal adjustment shaft and a rotation shaft, and the camera adjustment shaft is used to control the camera lens to perform cutting and calibration actions.

In addition, the present invention also provides a computer-readable storage medium, where the computer-readable storage medium stores a cutting calibration program, and when the cutting calibration program is executed by a processor, implements each step of the cutting calibration method described in the above embodiment .

It should be noted that, herein, the terms "comprising", "comprising" or any other variation thereof are intended to encompass non-exclusive inclusion, such that a process, method, article or device comprising a series of elements includes not only those elements, It also includes other elements not expressly listed or inherent to such a process, method, article or apparatus. Without further limitation, an element qualified by the phrase "comprising a..." does not preclude the presence of additional identical elements in a process, method, article or apparatus that includes the element.

From the description of the above embodiments, those skilled in the art can clearly understand that the method of the above embodiment can be implemented by means of software plus a necessary general hardware platform, and of course can also be implemented by hardware, but in many cases the former is better implementation. Based on such understanding, the technical solutions of the present invention can be embodied in the form of software products in essence or the parts that contribute to the prior art, and the computer software products are stored in the above-mentioned computer-readable storage medium (such as ROM/RAM, magnetic disk, optical disk), including several instructions to make a terminal device (which may be a mobile phone, computer, server, air conditioner, or network device, etc.) execute the methods described in various embodiments of the present invention.

The above are only preferred embodiments of the present invention, and are not intended to limit the scope of the present invention. Any equivalent structure or equivalent process transformation made by using the contents of the description and drawings of the present invention, or directly or indirectly applied in other related technical fields , are similarly included in the scope of patent protection of the present invention.

Claims (9)

1. A cutting calibration method, characterized in that the steps of the cutting calibration method comprise:

acquiring a blade line of a blade collected by a camera;

determining a deflection angle, a horizontal offset and/or a vertical offset between the blade edge line and a target scale line of the center position of the camera lens;

generating a target movement parameter associated with the camera lens according to the deflection angle, the horizontal offset and/or the vertical offset;

and controlling a camera adjusting shaft according to the target moving parameters so as to control the center position of the camera lens to coincide with the cutting position of the cutting edge through the camera adjusting shaft.

2. The cutting calibration method of claim 1, wherein the step of determining the offset angle, horizontal offset and vertical offset between the blade edge line and the target graduation line at the center position of the camera lens comprises:

acquiring a preset area where the target scale mark is located;

determining a relative offset position of the edge line in the preset area when the edge line is in the preset area;

and determining the offset angle, the transverse offset and the longitudinal offset between the edge line and a target graduation line according to the relative offset position.

3. The cutting calibration method of claim 2 wherein said step of determining the relative offset position of said edge line in said predetermined area when said edge line is in said predetermined area comprises:

acquiring a gray value corresponding to each pixel point in the preset area;

taking the area, corresponding to the pixel point in the preset area, of the gray values meeting the preset gray matching condition as the edge line of the blade in the preset area;

and determining the relative distance between the edge line and the central area of the preset area to obtain the relative offset position of the edge line in the preset area.

4. The cut calibration method of claim 1, wherein the step of generating the camera lens associated target movement parameter based on the yaw angle, the horizontal offset, and/or the vertical offset comprises:

determining a horizontal movement amount corresponding to the camera lens according to the horizontal offset, wherein the horizontal movement amount comprises a horizontal transverse movement amount and/or a horizontal longitudinal movement amount;

and determining a first target movement parameter related to the camera lens according to the horizontal transverse movement amount and/or the horizontal longitudinal movement amount.

5. The cut calibration method of claim 4, wherein the step of determining the first target movement parameter associated with the camera lens based on the horizontal amount of lateral movement and/or the horizontal amount of longitudinal movement comprises:

determining a horizontal transverse movement parameter of the first target movement parameter according to the horizontal transverse movement amount, and/or determining a horizontal longitudinal movement parameter of the first target movement parameter according to the horizontal longitudinal movement amount, and determining the first target movement parameter according to the horizontal transverse movement parameter and/or the horizontal longitudinal movement parameter; or

And determining a linear movement parameter of the first target movement parameter according to the horizontal transverse movement amount and the horizontal longitudinal movement amount, and taking the linear movement parameter as the first target movement parameter.

6. The cut calibration method of claim 1, wherein the step of generating the camera lens associated target movement parameter based on the yaw angle, the horizontal offset, and/or the vertical offset comprises:

determining a rotation angle corresponding to the camera lens according to the deflection angle, determining a horizontal movement amount corresponding to the camera lens according to the horizontal offset, and/or determining a vertical movement amount corresponding to the camera lens according to the vertical offset;

and determining a second target movement parameter related to the camera lens according to the rotation angle, the horizontal movement amount and/or the vertical movement amount.

7. A cutting calibration apparatus, comprising: a riving knife, a light source, a camera adjustment axis, and a control circuit board, the control circuit board including a memory, a processor, and a cut calibration program stored on the memory and executable on the processor, the cut calibration program when executed by the processor implementing the steps of the cut calibration method of any of claims 1-6.

8. The cutting calibration device of claim 7, wherein the top end of the cutting calibration device is provided with a riving knife for performing a cutting action after calibration; the light source and the camera are arranged on the lower side of the riving knife, and the camera is used for collecting a blade line of the riving knife irradiated by the light source; the camera comprises a camera lens on the upper side and a camera support on the lower side, the camera lens is used for cutting calibration, and the camera support is connected with the camera adjusting shaft on the bottom; the camera adjusting shaft comprises a vertical adjusting shaft, a horizontal adjusting shaft and a rotating shaft, and is used for controlling the camera lens to execute cutting calibration actions.

9. A computer-readable storage medium, having a cut calibration program stored thereon, which when executed by a processor, performs the steps of the cut calibration method according to any one of claims 1-6.

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