CN114962227A - Piezoelectric driving gas micropump with double vibration layers and preparation method thereof - Google Patents

Abstract

The invention discloses a piezoelectric-driven gas micropump with double vibration layers and a preparation method thereof. The gas micropump includes an inflow layer, a vibrating substrate layer, and an outer shell layer that are stacked in sequence, and a first vibration layer fixed on the side of the vibration substrate layer facing the inflow layer, and a first vibration layer fixed on the side of the vibration substrate layer facing the outer shell layer. a cavity layer, and a second vibration layer fixed on the side of the cavity layer facing the outer shell layer. The preparation method obtains the structure of each layer by performing laser cutting, grinding, turning, electroplating and other operations on the material, and then uses conductive glue and epoxy resin to bond to assemble the gas micropump. In the present application, two piezoelectric vibrators are respectively composed of the first vibration layer, the vibration substrate layer, the cavity layer and the second vibration layer, so that both sides of the cavity layer are affected by the vibration layer, and the vibration of the cavity layer can be changed to the greatest extent. The volume of the gas micro-pump is increased under the condition that the overall volume of the gas micro-pump does not change significantly.

Description

Piezoelectric driven gas micropump with double vibration layers and preparation method thereof

technical field

The invention belongs to the technical field of gas micro-pumps, relates to a high-flow gas micro-pump with double-layer piezoelectric materials, and in particular relates to a piezoelectric-driven gas micro-pump with double-vibration layers and a preparation method thereof.

Background technique

In recent years, with the continuous development of piezoelectric materials and computer numerical control precision machining (CNC), the structure and principle of micropumps have become more and more diverse. Gas micropumps using piezoelectric materials as driving sources have been widely used in many fields such as drug delivery, fish farming and oxygenation, beauty instruments, and CPU heat dissipation due to their small size, fast response, and large flow rate, showing broad development. prospect.

The piezoelectric pumps studied at this stage are mainly divided into two categories: valved piezoelectric pumps and valveless piezoelectric pumps. The valved piezoelectric pump cannot work in the ultrasonic frequency band exceeding 20KHz due to its valve structure, which brings noise, while the valveless piezoelectric pump relies on the height difference between the upper and lower chambers or changing the flow resistance difference of the inlet and outlet pipe walls to achieve macroscopic output. flow, but there are also complex transient flow changes and discontinuities, and the flow is low.

In the reference document 1 (CN105240252B), the piezoelectric micro-pump device adopts a ninety-degree-bending elastic connector. After simulation and theoretical force analysis, although the flow rate is improved compared with ordinary piezoelectric micro-pumps, its elastic connection The parts and the surrounding still need to be bonded by silica gel, and the integrated structure is not achieved. In addition, the air inlet directly faces the silver electrode layer of the piezoelectric material, and the long-term high-frequency and high-flow fluid impact also accelerates its aging degree. and increase the risk of its failure.

In the reference document 2 (CN114151317A), the piezoelectric micropump works with a single vibration layer, and its flow rate is low and its structure is complex, which leads to its complicated preparation process and high cost, which greatly limits its application scenarios.

SUMMARY OF THE INVENTION

Aiming at the deficiencies of the prior art, the present invention proposes a piezoelectrically driven gas micropump with double vibration layers and a preparation method thereof. The volume of the body is increased, thereby increasing the output flow. By designing a vibration elastic connector, the working frequency of the micropump is increased to more than 20kHz, so as to avoid working in the frequency range that can be heard by the human ear and remove noise.

A piezoelectrically driven gas micropump with dual vibration layers, comprising an inflow layer, a vibration substrate layer, and an outer shell layer stacked in sequence, and a first vibration layer fixed on the side of the vibration substrate layer facing the inflow layer, fixed on the side of the inflow layer. The vibrating substrate layer faces the cavity layer on the side of the outer shell layer, and the second vibration layer is fixed on the side of the cavity layer facing the outer shell layer.

The vibrating substrate layer includes an edge fixing part, an elastic connecting piece and a central vibrating part. The vibrating substrate layer is fixed to the inflow layer and the outer shell layer by the edge fixing part, and is fixed to the first vibration layer and the cavity layer by the central vibrating part. The elastic connecting piece is used to connect the edge fixing part and the central vibrating part. The flow passage between the edge fixing part and the central vibrating part is communicated with the through hole opened on the inflow layer to form the input flow passage of the pump body.

A cavity is provided between the first vibration layer and the inflow layer, and a cavity is provided between the second vibration layer and the outer shell layer. The edge of the cavity layer is fixed with the edge of the central vibrating part, and a cavity is formed between the interior and the central vibrating part. The flow passages opened on the cavity layer, the second vibration layer and the outer casing layer and communicated with each other form the output flow passage of the pump body. The cavity layer is connected to an external lead, so that the first vibration layer and the second vibration layer realize anisotropic vibration.

Preferably, on the side of the vibrating substrate layer facing the inflow layer, the thickness of the elastic connecting member and the central vibrating portion is smaller than that of the edge fixing portion, so that a cavity is formed between the first vibrating layer and the inflow layer.

Preferably, on the side of the inflow layer facing the vibration substrate layer, the edge portion is higher than the central portion, so that a cavity is formed between the first vibration layer and the inflow layer.

Preferably, an O-ring fixed on the side of the outer shell layer facing the cavity layer is also included.

Preferably, the inner diameter of the O-ring is the same as the outer diameter of the second vibration layer.

Preferably, a plurality of uniformly arranged and non-overlapping elastic connecting pieces are included between the edge fixing portion and the central vibrating portion, and the elastic connecting pieces are not in a linear shape.

Preferably, the elastic connecting member includes a first connecting portion, a second connecting portion and an elastic segment. Wherein, the elastic segment is in the shape of a circular arc. One end of the first connecting part is connected with the central vibrating part, and the other end is connected with one end of the elastic segment. One end of the second connecting portion is connected to the edge fixing portion connected to the other end of the elastic segment, and the other end is connected to the edge fixing portion.

Preferably, the edge of the outer shell layer is fixed to the edge fixing part of the vibration substrate layer, and the thickness of the central part is lower than that of the edge part, so that a cavity is formed between the second vibration layer and the outer shell layer.

A method for manufacturing a piezoelectrically driven gas micropump with double vibration layers, specifically comprising the following steps:

(1) Select a metal plate with a side length of 10mm to 20mm and a thickness of 0.5mm to 2mm, and laser punch a plurality of through holes with a diameter of 0.5mm to 2mm on the surface to obtain an inflow layer.

(2) Select a metal plate with a side length of 10mm to 20mm and a thickness of 0.2mm to 1mm, and grind a circle with a diameter of 9mm to 13mm and a thickness of 0.2mm in the center of the surface, and then laser punch the edge of the circle. A plurality of uniformly arranged flow channels are obtained to obtain a vibrating substrate layer.

(3) Select a piezoelectric material with a diameter of 8mm to 12mm and a thickness of 0.1mm to 0.3mm as the first vibration layer, the top of which is made of a single-component epoxy resin glue through a screen printing process and bonding step (2) In the grinding concentric circles, the thickness of the adhesive layer is less than 20um.

(4) Use a high-mesh screen printing process to print a single-component high-viscosity epoxy resin glue on the edge of the vibrating substrate layer where the first vibrating layer is fixed, align with the edge of the inflow layer, and then pass high temperature hot pressing technology bond.

(5) Select a metal plate with a diameter of 8mm to 12mm and a thickness of 0.1mm to 0.3mm, grind its center downward, and then laser drill a through hole with a diameter of 0.1mm to 0.5mm at the center of the circle to obtain a cavity Floor. Use single-component conductive glue on the unground part of the cavity layer, bond it to the other side of the vibration substrate layer through a precision glue dispenser, and connect external leads on the cavity layer.

(6) Select a piezoelectric material with a diameter of 8 mm to 12 mm, a thickness of 0.1 mm to 0.3 mm, and a small hole in the middle with a diameter of 0.2 mm to 1 mm as the second vibration layer. After aligning the second vibration layer with the through holes on the surface of the cavity layer, use one-component epoxy glue to bond the second vibration layer to the cavity layer, and use wires to attach the upper part of the second vibration layer to the first vibration layer. connected to the bottom of the layer.

(7) Select an insulating material with a side length of 10 mm to 20 mm, and after laser drilling a through hole with a diameter of 0.5 mm to 2 mm at the center position, the outer shell layer is obtained. Align the edge of the outer shell layer with the edge of the vibration substrate layer and bond.

The present invention has the following beneficial effects:

1. When the double vibration layer in the gas micropump is displaced positively, the volume of the cavity layer becomes larger, resulting in a decrease in the pressure in the cavity layer, and the fluid flows into the cavity layer through the through holes on the surface of the second vibration layer. The layer is in contact with the O-ring, which blocks the output flow channel and the input flow channel, so that the fluid is sucked from the through hole on the surface of the outer shell layer without escaping to the input flow channel, avoiding the reciprocating operation of the double vibrating layer. When the fluid convection, it can increase the stability of the fluid unidirectional movement. When the double vibration layer is negatively displaced, the volume of the cavity layer becomes smaller, resulting in an increase in the pressure in the cavity layer, and the fluid is pumped out from the cavity layer. Repeated high-frequency vibration, so as to achieve the pulse jet of fluid and one-way high-quality flow delivery.

2. By using the double-layer piezoelectric material, both sides of the cavity layer are affected by the vibration layer, and the volume of the cavity layer must be changed to the greatest extent. Micropumps based on single-layer piezoelectric materials, increasing flow.

3. The use of elastic connectors to connect the central vibrating part and the edge fixing part not only enables the fluid to move in one direction, but also reduces the stress of the vibrating substrate layer, increases its displacement output capability, and increases the operating frequency of the device to more than 20kHz. Removes noise beyond what the human ear can hear. In addition, the thinning of the central vibrating portion and the elastic connection provides space for the bonding of the lower vibrating portion.

Description of drawings

1 is a schematic cross-sectional view of a piezoelectrically driven gas micropump with dual vibration layers in an embodiment;

Fig. 2 is the schematic diagram of the inlet layer in the embodiment;

3 is a schematic diagram of a vibrating substrate layer in an embodiment;

Fig. 4 is the schematic diagram of the first vibration layer in the embodiment;

5 is a schematic diagram of a cavity layer in an embodiment;

Fig. 6 is the schematic diagram of the second vibration layer in the embodiment;

7 is a schematic diagram of an outer shell layer in an embodiment;

Fig. 8 is the flow output comparison diagram of single vibrating layer and double vibrating layer in the embodiment;

FIG. 9 is a performance comparison diagram of the vibrating substrate layer of the present invention and the common substrate layer in the embodiment.

Detailed ways

The present invention will be further explained below in conjunction with the accompanying drawings;

As shown in FIG. 1 , a piezoelectrically driven gas micropump with dual vibration layers includes an inflow layer 100, a vibration substrate layer 103, and an outer shell layer 112 stacked in sequence, and is fixed on the vibration substrate layer 103 toward the inflow layer. The first vibration layer 102 on the side of the layer 100 , the cavity layer 106 fixed on the side of the vibration substrate layer 103 facing the outer shell layer 112 , and the second vibration layer 108 fixed on the side of the cavity layer 106 facing the outer shell layer 112 .

As shown in FIG. 2 , the length of the inflow layer 100 is 15 mm and the thickness is 1 mm, and the material is a combination of one or more of stainless steel, copper, silver, aluminum, aluminum alloy, and the like. The surface of the inflow layer 100 is provided with a plurality of evenly distributed air intake holes 101 . The diameter of the air inlet hole 101 is 1 mm.

As shown in FIG. 3 , the vibrating substrate layer 103 has a length of 15 mm and a thickness of 0.5 mm, and the material is one or a combination of stainless steel, copper, silver, aluminum, and aluminum alloys. The vibrating substrate layer includes an edge fixing portion, a central vibrating portion, and a plurality of uniformly distributed and non-overlapping elastic connecting members 104, wherein the thickness of the elastic connecting members 104 and the central vibrating portion is 0.3 mm. The elastic connecting member 104 includes a first connecting portion, a second connecting portion and an elastic segment. Wherein, the elastic segment is in the shape of a circular arc. One end of the first connecting part is connected with the central vibrating part, and the other end is connected with one end of the elastic segment. One end of the second connecting portion is connected to the edge fixing portion connected to the other end of the elastic segment, and the other end is connected to the edge fixing portion. The non-linear elastic connecting member 104 has elasticity and allows the central vibrating portion of the vibrating substrate layer 103 to vibrate up and down relative to the edge fixing portion. In addition, a flow passage 105 can also be formed between the central vibrating part and the edge fixing part. While realizing gas circulation, a difference in fluid flow velocity is also generated, so as to alleviate the effect of large pressure on the center of the first vibrating layer 102 and thus significantly reduce the amplitude Case.

As shown in FIG. 4 , the first vibration layer 102 has a diameter of 10 mm and a thickness of 0.2 mm, and is made of common pressure materials such as aluminum nitride, doped aluminum nitride, zinc oxide, lithium nickelate, or lead zirconate titanate. electrical material. The edge of the first vibrating layer 102 is bonded to the central vibrating portion of the vibrating substrate layer 103 after the single-component epoxy resin glue is printed by the screen printing process. The thickness of the printed adhesive layer is less than 20um. The edge fixing part of the vibration substrate layer 103 is bonded to the edge of the inflow layer 100 by epoxy resin glue, and the flow passage 105 communicates with the air inlet hole 101 opened on the inflow layer 100 to form the input flow passage of the pump body. A cavity is formed between the first vibration layer 102 and the inflow layer 100, which further enhances the flow, pressure and efficiency while reducing the driving load of the piezoelectric material.

As shown in FIG. 5 , the diameter of the cavity layer 106 is 10 mm, the thickness is 0.1 mm, and a first air outlet 107 with a diameter of 0.2 mm is opened at the center of the circle. One side of the cavity layer is flat, and the edge of the other side is raised upward. The protruding part of the edge and the center vibrating part on the other side of the vibration substrate layer 103 are bonded by conductive glue. The glue material can be conductive gel or two-component copper-containing epoxy resin glue, so that the cavity layer 106 and the vibration substrate Cavities are formed between the layers 103 .

As shown in FIG. 6 , the second vibration layer 108 is a piezoelectric material with a diameter of 10 mm and a thickness of 0.2 mm. The center of the second vibration layer 108 is provided with a second air outlet with a diameter of 0.5 mm. The second vibration layer 108 is bonded to the surface of the cavity layer 106 by one-component epoxy resin glue, and the second air outlet 109 and the first air outlet 107 communicate with each other.

The first vibration layer 102 and the second vibration layer 108 are respectively located on both sides of the cavity layer 106, and the cavity layer 106 is connected with external leads, so that the two are excited by the same size and frequency to realize anisotropic vibration, which can amplify the vibration layer amplitude. , to enhance the drive performance.

As shown in FIG. 7 , the side length of the outer shell layer 112 is 15 mm, and a third air outlet 111 with a diameter of 1 mm is opened at the center position. The inner side edge of the outer shell layer 112 is bonded to the edge fixing portion of the vibration substrate layer. An O-ring 110 with an inner diameter of 10 mm and used to prevent gas leakage is also fixed on the inner side of the outer shell layer. A cavity exists between the O-ring 110 and the second vibration layer 108 . The outer shell layer 112 is selected from a material with a higher hardness coefficient, such as one or more of glass, silicon, silicon carbide, silicon nitride or ceramics.

As shown in FIG. 8 , when only the second vibration layer 108 is used, the output flow rate of the micropump is only 130 ml/min. When the double-layer vibration layers, namely the first vibration layer 102 and the second vibration layer 108 are used, the flow rate of the micropump is The output performance is greatly improved and can reach 300ml/min.

As shown in FIG. 9 , the working frequency of the micropump with the hollow vibrating substrate layer 103 is much higher than that of the ordinary substrate layer, which is mainly manifested in that it uses the periodic formula of the spring vibrator to increase its resonant frequency by reducing the mass of the vibrator. , In addition, the design also minimizes the stress during vibration, and when the working frequency of the vibrator is increased by 120%, the vibration amplitude is only reduced by 20%.

Where T represents the oscillator period; m represents the oscillator mass; k represents the oscillator stiffness coefficient.

The first vibration layer 102, the vibration substrate layer 103, the cavity layer 106 and the second vibration layer 108 respectively form two piezoelectric vibrators, using the inverse piezoelectric effect of piezoelectric materials, that is, when an electric field is applied in the polarization direction of the dielectric, These dielectrics will produce mechanical deformation or mechanical pressure in a certain direction. When the applied electric field is removed, these deformations or stresses will also disappear, which can make the piezoelectric vibrator perform periodic reciprocating motion, thereby changing the cavity of the cavity layer 106. The pressure difference with the input flow channel and the output flow channel promotes the directional flow of the fluid.

A rectangular wave signal with the same peak-to-peak value of 20V and the first-order resonance frequency of the piezoelectric vibrator is applied to the lower surface of the first vibration layer 102 and the upper surface of the second vibration layer 108 through the external lead on the cavity layer 106 .

When the first vibration layer 102 and the second vibration layer 108 receive the first half of the excitation signal, the second vibration layer 108 stretches along the radial direction, driving the upper surface of the cavity layer 106 to move upward, and at the same time the first vibration layer 102 also Pulling along the radial direction drives the lower surface of the cavity layer 106 to move downward, and the two move together to make the volume in the cavity layer 106 larger, so that the gas enters the cavity layer 106 through the air inlet 101, and a small amount of gas enters the cavity layer 106 from the air inlet 101. The three air outlets 111 enter the cavity layer. Due to the O-ring 110 provided on the inner side of the outer casing layer 112 , most of the gas flowing from the third air outlet 111 flows into the cavity layer 106 and cannot be connected with the air inlet 101 . The incoming gas forms convection.

When the first vibration layer 102 and the second vibration layer 108 receive the second half of the excitation signal, the second vibration layer 108 contracts along the radial direction, driving the upper surface of the cavity layer 106 to move downward, and at the same time the first vibration layer 102 It also shrinks along the radial direction, driving the lower surface of the cavity layer 106 to move upward, and the two move together to reduce the volume in the cavity layer 106 , so that a large amount of gas is pumped out of the cavity layer 106 .

In such a reciprocating process of inhalation/deflation, the gas near the third air outlet 111 will have a higher shearing action. Due to the principle of synthetic jet, a large number of For the opposite vortex pair, when inhaling in the next cycle, due to inertia, the vortex pair generated in the previous cycle has moved away from the third air outlet 111, so it will not be sucked back again. Continuous fluid actuation with valveless actuators can be achieved using the synthetic jet principle.

Claims (10)

1. A piezoelectric driven gas micropump with double vibration layers is characterized in that: the vibration isolation structure comprises an inflow layer (100), a vibration substrate layer (103) and a shell body layer (112) which are sequentially stacked, a first vibration layer (102) fixed on the vibration substrate layer (103) and facing to the side of the inflow layer (100), a cavity body layer (106) fixed on the vibration substrate layer (103) and facing to the side of the shell body layer (112), and a second vibration layer (108) fixed on the cavity body layer (106) and facing to the side of the shell body layer (112);

the vibration substrate layer (103) comprises an edge fixing part, an elastic connecting piece (104) and a central vibration part, and the vibration substrate layer (103) is fixed with the inflow layer (100) and the outer shell layer (112) through the edge fixing part and is fixed with the first vibration layer (102) and the cavity layer (106) through the central vibration part; the elastic connecting piece (104) is used for connecting the edge fixing part and the central vibrating part; a flow passage between the edge fixing part and the central vibrating part is communicated with a through hole formed on the flow inlet layer (100) to form an input flow passage of the pump body;

a cavity is arranged between the first vibration layer (102) and the inflow layer (100), and a cavity is arranged between the second vibration layer (108) and the outer shell layer (112); the edge of the cavity layer (106) is fixed with the edge of the central vibration part, and a cavity is formed between the inner part and the central vibration part; the circulation passages which are arranged on the cavity layer (106), the second vibration layer (108) and the shell layer (112) and are communicated with each other form an output flow passage of the pump body; during operation, the first vibration layer (102) and the second vibration layer (108) vibrate in different directions, so that the volume of the cavity inside the cavity layer (106) changes periodically.

2. A piezoelectric driven gas micropump having dual vibration layers as claimed in claim 1, wherein: the distance between the central vibration part and the elastic connecting piece (104) and the inflow layer (100) is larger than the distance between the edge fixing part and the inflow layer (100).

3. A piezoelectric driven gas micropump having dual vibration layers as claimed in claim 1, wherein: the edge fixing part and the central vibrating part comprise a plurality of elastic connecting pieces (104) which are uniformly arranged and do not overlap with each other.

4. A piezoelectric driven gas micropump having dual vibration layers according to claim 3, wherein: the elastic connecting piece (104) comprises a first connecting part, a second connecting part and an elastic section; wherein, the elastic section is in the shape of circular arc; one end of the first connecting part is connected with the central vibrating part, and the other end of the first connecting part is connected with one end of the elastic section; one end of the second connecting part is connected with the edge fixing part connected with the other end of the elastic section, and the other end of the second connecting part is connected with the edge fixing part.

5. A piezoelectric driven gas micropump having dual vibration layers as claimed in claim 1, wherein: the device also comprises an O-shaped sealing ring (110) which is fixed on the side surface of the outer shell layer (112) facing the cavity layer (106).

6. A piezoelectric driven gas micropump having dual vibration layers according to claim 5, wherein: the inner diameter of the O-shaped sealing ring (110) is the same as the outer diameter of the second vibration layer (108).

7. A piezoelectric driven gas micropump having dual vibration layers as claimed in claim 1, wherein: one surface of the shell body layer (112) is flat, the edge of the other surface of the shell body layer is convex, and the convex part is fixed with the edge fixing part of the vibration substrate layer (103).

8. A piezoelectric driven gas micropump having a double vibrating layer according to any one of claims 1 to 7, wherein: the working method comprises the following steps: through a lead externally connected to the cavity layer (106), a rectangular wave signal with a peak-to-peak value of 20V and under the first-order resonant frequency of the piezoelectric vibrator is synchronously applied to the surfaces of the first vibration layer (102) and the second vibration layer (108) which are far away from each other;

when the first vibration layer (102) and the second vibration layer (108) are subjected to the first half excitation signal, the second vibration layer (108) stretches along the radial direction to drive the cavity layer (106) to move upwards, meanwhile, the first vibration layer (102) stretches along the radial direction to drive the central vibration part to move downwards, the first vibration layer and the second vibration layer move together to increase the volume in the cavity layer (106), so that gas enters the cavity layer (106) from the through holes in the surface of the inflow layer (100), and a small amount of gas enters the cavity layer (106) from the through holes in the surface of the outer shell layer (112);

when the first vibration layer (102) and the second vibration layer (108) are subjected to a latter half excitation signal, the second vibration layer (108) contracts along the radial direction to drive the cavity layer (106) to move downwards, meanwhile, the first vibration layer (102) also contracts along the radial direction to drive the central vibration part to move upwards, and the first vibration layer and the second vibration layer move together to reduce the volume in the cavity layer (106) so that gas is pumped out from the cavity layer (106) in a large quantity;

the volume of the cavity layer (106) is continuously increased and reduced through the reciprocating opposite-direction movement of the first vibration layer (102) and the second vibration layer (108), and continuous fluid driving of the valveless driver is realized.

9. A preparation method of a piezoelectric driving gas micropump with double vibration layers is characterized in that: the method comprises the following steps of:

(1) selecting a metal plate with the side length of 10-20 mm and the thickness of 0.5-2 mm, and laser-punching a plurality of through holes with the diameter of 0.5-2 mm on the surface to obtain a flow inlet layer (100);

(2) selecting a metal plate with the side length of 10-20 mm and the thickness of 0.2-1 mm, grinding a circle with the diameter of 9-13 mm and the thickness of 0.2mm at the center of the surface of the metal plate, and then laser drilling a plurality of uniformly arranged flow passages at the edge of the circle to obtain a vibrating substrate layer (103);

(3) selecting a piezoelectric material with the diameter of 8-12 mm and the thickness of 0.1-0.3 mm as a first vibration layer (102), wherein single-component epoxy resin glue is utilized at the top of the first vibration layer to be in a concentric circle ground in the bonding step (2) through a screen printing process, and the thickness of a glue layer is less than 20 micrometers;

(4) printing single-component high-viscosity epoxy resin glue at the edge of one surface of a vibration substrate layer (103) on which a first vibration layer (102) is fixed by using a high-mesh screen printing process, aligning with the edge of an inflow layer (100), and then bonding by using a high-temperature hot-pressing technology;

(5) selecting a metal plate with the diameter of 8-12 mm and the thickness of 0.1-0.3 mm, downwards grinding the center of the metal plate, and then laser drilling a through hole with the diameter of 0.1-0.5 mm at the position of the center of a circle to obtain a cavity layer (106); the non-ground part of the cavity layer (106) is bonded with the other surface of the vibration substrate layer (103) by a precise dispenser by using single-component conductive glue; and externally connecting a lead on the cavity layer (106);

(6) selecting a piezoelectric material with the diameter of 8 mm-12 mm, the thickness of 0.1 mm-0.3 mm and the diameter of a small hole in the middle of 0.2 mm-1 mm as a second vibration layer (108); after the second vibration layer (108) is communicated with the through holes on the surface of the cavity layer (106), the second vibration layer (108) is bonded with the cavity layer (106) by using single-component epoxy resin glue;

(7) selecting an insulating material with the side length of 10 mm-20 mm, and performing laser drilling on a through hole with the diameter of 0.5 mm-2 mm at the center position to obtain a shell body layer (112); the edge of the housing layer (112) is aligned with the edge of the vibrating substrate layer (103) and then bonded thereto.

10. A method of manufacturing a piezoelectric-driven gas micropump having a double vibrating layer according to claim 9, wherein: the length of the inflow layer (100) is 15mm, and the thickness of the inflow layer is 1 mm; the length of the vibration substrate layer (103) is 15mm, and the thickness is 0.5 mm; the diameter of the first vibration layer (102) is 10mm, and the thickness is 0.2 mm; the diameter of the cavity layer (106) is 10mm, the thickness is 0.1mm, and the diameter of the surface through hole is 0.2 mm; the diameter of the second vibration layer (108) is 10mm, the thickness is 0.2mm, and the diameter of the surface through hole is 0.5 mm; the side length of the shell body layer (112) is 15mm, and the diameter of the surface through hole is 1 mm; the inner diameter of the O-shaped sealing ring (110) is 10 mm; the metal plate is one or a combination of more of stainless steel, copper, silver, aluminum and aluminum alloy; the piezoelectric material is one or a combination of more of aluminum nitride, doped aluminum nitride, zinc oxide, lithium nickelate and lead zirconate titanate; the material of the outer shell layer (112) is one or more of glass, silicon carbide, silicon nitride or ceramic.

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