CN114911136A - Mask plate pre-alignment system and method and screen-stretching equipment - Google Patents

Abstract

The embodiment of the invention discloses a mask plate pre-alignment system and a method and a mesh opening device, wherein the mask plate pre-alignment system comprises a pre-alignment module, a transmission module and an offset detection module; the offset detection module is used for detecting the offset of the mask plate after the mask plate is flattened by the pre-alignment module; the pre-alignment module is used for adjusting the position of the mask plate according to the rotation offset so as to compensate the rotation offset; the transmission module is also used for adjusting the position of the mask plate according to the distance offset so as to compensate the distance offset. According to the technical scheme of the invention, the offset detection module detects the offset of the mask after the mask is flattened, so that the influence of the mask wrinkles and other conditions on the detection of the offset of the mask can be avoided, and the accuracy of the detection of the offset of the mask is ensured. The mask plate pre-alignment system can not only realize the compensation of the rotary offset, but also realize the compensation of the distance offset in the set direction, thereby improving the pre-alignment precision of the mask plate.

Description

Reticle pre-alignment system and method, and netting equipment

technical field

Embodiments of the present invention relate to the technical field of semiconductor process equipment, and in particular, to a reticle pre-alignment system and method, and a net stretching device.

Background technique

In semiconductor processing equipment, the reticle pre-alignment system is one of the important systems.

In the reticle pre-alignment system, the transfer manipulator transfers the metal film to the handover position of the jaws of the web-stretching equipment, and the jaws transfer it to the workpiece table. Before the metal film is transported by the gripper, a pre-alignment device is required to compensate the metal film to ensure the alignment accuracy of the pre-alignment system.

Typically, after the reticle has been pre-aligned by a reticle pre-alignment system, the reticle is transferred to the stage of the screen-stretching apparatus. However, most of the existing pre-alignment systems are difficult to ensure the pre-alignment accuracy of the reticle, resulting in poor screen-stretching accuracy.

SUMMARY OF THE INVENTION

The present invention provides a reticle pre-alignment system and method, and a screen-stretching device, so as to improve the pre-alignment accuracy of the pre-alignment system and further improve the web-stretching accuracy.

In a first aspect, an embodiment of the present invention provides a reticle pre-alignment system, including: a pre-alignment module, a transmission module, and an offset detection module; the offset detection module is respectively connected to the pre-alignment module and the transmission module ; the transfer module is used to transfer the reticle from the pre-alignment module to the table;

The offset detection module is used to detect the offset of the reticle after the reticle is flattened by the pre-alignment module. The offset includes at least the rotation offset of the reticle relative to the reference plane and the distance in the set direction. offset, and send the rotation offset to the pre-alignment module and the distance offset to the transmission module;

The pre-alignment module is used to adjust the position of the reticle according to the rotation offset to compensate for the rotation offset;

The transfer module is also used to adjust the position of the reticle according to the distance offset to compensate for the distance offset.

Optionally, the pre-alignment module includes a support plate, the set surface of the support plate is divided into a center placement area and an edge adsorption area, and the edge adsorption areas are located at least on opposite sides of the center placement area;

The edge suction area includes a suction structure, and the suction structure is used for suctioning the reticle to flatten the reticle on the set surface.

Optionally, the adsorption structure includes an adsorption joint and an adsorption body including a plurality of first adsorption holes, and the adsorption body is arranged on a setting surface of the support plate;

The support plate includes an air channel, and the adsorption joint is communicated with the first adsorption hole through the air channel in the support plate.

Optionally, the diameter of the first adsorption holes is 2-20 microns, and the first adsorption holes are uniformly distributed in the edge adsorption area.

Optionally, in the edge adsorption area, the support plate is provided with a plurality of second adsorption holes, the adsorption structure includes a second adsorption hole and an adsorption joint, and the adsorption joint is communicated with the second adsorption hole;

Optionally, the diameter of the second adsorption hole is greater than 15 microns;

Optionally, the second adsorption holes are evenly arranged.

Optionally, the pre-alignment module further includes a first control unit and a drive unit, the first control unit is electrically connected to the offset detection module and the drive unit respectively, and the drive unit is connected to the support plate;

The first control unit is used for sending a first control signal to the driving unit according to the rotation offset, so that the driving unit drives the supporting plate to rotate to adjust the position of the reticle.

Optionally, the transmission module includes a second control unit and a grasping unit, the second control unit is electrically connected to the offset detection module and the grasping unit respectively, and the second control unit sends the second control unit to the grasping unit according to the distance offset. A control signal to make the grasping unit adjust the position of the reticle in the set direction after grasping the reticle.

Optionally, the set direction is a direction perpendicular to the direction in which the pre-alignment module points to the workbench.

In a second aspect, an embodiment of the present invention also provides a reticle pre-alignment method, including:

After the reticle is flattened by the pre-alignment module, the offset detection module detects the offset of the reticle, and the offset at least includes the rotational offset of the reticle relative to the reference plane and the set direction of the reference plane and send the rotation offset to the pre-alignment module and the distance offset to the transfer module;

The pre-alignment module adjusts the position of the reticle according to the rotation offset to compensate for the rotation offset;

The transfer module adjusts the position of the reticle according to the distance offset to compensate for the distance offset.

Optionally, after the reticle is flattened by the pre-alignment module and before the offset detection module detects the offset of the reticle, the method further includes:

The transfer module clamps the reticle and places it on the set surface of the support plate of the pre-alignment module;

The adsorption structure adsorbs the reticle to flatten the reticle on the set surface;

The transfer module releases the reticle.

Optionally, before the transfer module adjusts the position of the reticle according to the distance offset to compensate for the distance offset, the method further includes:

The transfer module clamps the reticle;

The adsorption structure stops the adsorption of the reticle.

Optionally, the pre-alignment module further includes a first control unit and a driving unit; the pre-alignment module adjusts the position of the reticle according to the rotational offset to compensate for the rotational offset, including:

The first control unit sends a first control signal to the drive unit according to the rotation offset, so that the drive unit drives the support plate to rotate to adjust the position of the reticle.

Optionally, the transfer module includes a second control unit and a grasping unit; the transfer module adjusts the position of the reticle according to the distance offset to compensate for the distance offset, including:

The second control unit sends a second control signal to the grabbing unit according to the distance offset, so that the grabbing unit adjusts the position of the reticle in the set direction after grabbing the reticle.

Optionally, after the transmission module adjusts the position of the reticle according to the distance offset to compensate for the distance offset, the method further includes:

The transfer module places the reticle on the set surface of the support plate, the adsorption structure adsorbs the reticle, and the transfer module releases the reticle;

The offset detection module detects whether the rotation offset and distance offset meet the set requirements. When the rotation offset does not meet the set requirements, it returns to execute the pre-alignment module to adjust the position of the reticle according to the rotation offset. In order to compensate the rotation offset and its subsequent steps; when the distance offset does not meet the set requirements, return to execute the transfer module to adjust the position of the reticle according to the distance offset to compensate for the distance offset and Next steps.

In a third aspect, an embodiment of the present invention further provides a net stretching device, including the reticle pre-alignment system provided in the first aspect.

Embodiments of the present invention provide a reticle pre-alignment system and method, and a netting device, wherein the reticle pre-alignment system includes a pre-alignment module, a transfer module, and an offset detection module; the offset detection module is used for the reticle After the pre-alignment module is flattened, the offset of the reticle is detected, and the offset includes at least the rotational offset of the reticle relative to the reference plane and the distance offset in the set direction; the pre-alignment module uses The position of the reticle is adjusted according to the rotation offset to compensate for the rotation offset; the transmission module is also used to adjust the position of the reticle according to the distance offset to compensate for the distance offset. In this embodiment, the offset detection module detects the offset of the reticle after the reticle is flattened, which can avoid the influence on the offset detection of the reticle due to reticle wrinkles and other conditions, and ensure the reticle offset. Accuracy of offset detection. In addition, the reticle pre-alignment system can not only compensate for the rotational offset, but also compensate for the distance offset in the set direction, thereby improving the accuracy of the reticle pre-alignment, thereby improving the accuracy of the screen. .

Description of drawings

1 is a schematic structural diagram of a reticle pre-alignment system provided by an embodiment of the present invention;

2 is a schematic structural diagram of a pre-alignment module provided by an embodiment of the present invention;

Fig. 3 is the bottom view of Fig. 2;

Fig. 4 is a partial enlarged view of Fig. 2;

5 is a flowchart of a reticle pre-alignment method provided by an embodiment of the present invention;

FIG. 6 is a flowchart of another reticle pre-alignment method provided by an embodiment of the present invention.

Detailed ways

An embodiment of the present invention provides a reticle pre-alignment system. The reticle pre-alignment system of this embodiment can be used to compensate the offset of the reticle before transferring the reticle to the screen-stretching device to improve the screen-stretching precision. Correspondingly, the present invention also provides a method for pre-aligning a reticle by using the reticle pre-alignment system. The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention, but not to limit the present invention. In addition, it should be noted that, for the convenience of description, the drawings only show some but not all structures related to the present invention.

1 is a schematic structural diagram of a reticle pre-alignment system provided by an embodiment of the present invention. Referring to FIG. 1 , the reticle pre-alignment system includes: a pre-alignment module 110 , a transmission module 120 , and an offset detection module 130 The offset detection module 130 is respectively connected with the pre-alignment module 110 and the transfer module 120; the transfer module 120 is used to transfer the reticle 200 from the pre-alignment module 110 to the workbench 140; After the reticle 200 is flattened by the pre-alignment module 110, the offset of the reticle is detected, and the offset at least includes the rotation offset of the reticle 200 relative to the reference plane and the distance offset in the set direction, and The rotation offset is sent to the pre-alignment module 110 and the distance offset is sent to the transmission module 120; the pre-alignment module 110 is used to adjust the position of the reticle according to the rotation offset to compensate for the rotation offset ; The transmission module 120 is also used to adjust the position of the reticle according to the distance offset to compensate for the distance offset.

Referring to FIG. 1 , optionally, the reticle pre-alignment system further includes a plate library 150 and a transfer robot 160 . Reticle 150 may be used to store reticles. The plate library 150 may include a plurality of reticle placement positions, for example, the reticle placement positions may be trays, and the reticle may be placed on the reticle placement positions. The transfer robot 160 may be used to remove the reticle from the reticle 150 and transfer to the pre-alignment module 110 . Optionally, the transfer robot 160 is located between the pre-alignment module 110 and the plate library 150 .

During the transmission process of the reticle, there will inevitably be a positional offset. In this embodiment, the reticle pre-alignment system further includes an offset detection module 130, a pre-alignment module 110 and a transfer module 120. After the reticle is flattened on the surface of the pre-alignment module 110, the offset detection module 130 detects an offset of the reticle, the offset of the reticle including at least a rotation offset and a distance offset in a set direction. In this embodiment, the offset detection module 130 detects the offset of the reticle and performs the detection after the reticle is flattened, which can avoid the influence on the offset detection of the reticle due to the wrinkles of the reticle and the like, and ensure the accuracy of the reticle. Accuracy of offset detection. The offset detection module 130 may be an optical detection device, or other devices that can detect the offset including the rotation offset of the reticle relative to the reference plane and the distance offset in the set direction. .

The offset detection module 130 sends the detected rotation offset to the pre-alignment module 110. After receiving the rotation offset, the pre-alignment module 110 adjusts the position of the reticle according to the rotation offset. , which is to rotate the reticle in the opposite direction to the rotation offset. Exemplarily, the rotation offset is 15 degrees clockwise relative to the reference plane, and the position of the reticle is adjusted according to the rotation offset. , the reticle can be adjusted to rotate counterclockwise, eg, 15 degrees counterclockwise, to compensate for the rotation offset. The offset detection module 130 also sends the detected distance offset to the transmission module 120. After the pre-alignment module 110 compensates the rotation offset, the transmission module 120 adjusts the distance offset according to the distance offset in the set direction. The position of the reticle is adjusted to compensate for the distance offset in the set direction. Exemplarily, when the distance offset of the reticle in the set direction is 0.3 mm, the reticle can be adjusted to move 0.3 mm in the opposite direction to the set direction, thereby compensating for the distance offset in the set direction. The reticle pre-alignment system of this embodiment can realize the compensation for the rotational offset and the distance offset of the reticle. After compensating for the offset of the reticle, the transfer module 120 can transfer the reticle to the worktable 140 , and the worktable 140 can belong to a net-stretching device, which is also beneficial to improve the net-stretching precision.

The reticle pre-alignment system provided in this embodiment includes a pre-alignment module, a transfer module, and an offset detection module; the offset detection module is used to detect the offset of the reticle after the reticle is flattened by the pre-alignment module. Offset, the offset includes at least the rotation offset of the reticle relative to the reference plane and the distance offset in the set direction; the pre-alignment module is used to adjust the position of the reticle according to the rotation offset to align the The rotation offset is used to compensate; the transfer module is also used to adjust the position of the reticle according to the distance offset to compensate for the distance offset. In this embodiment, the offset detection module detects the offset of the reticle after the reticle is flattened, which can avoid the influence on the offset detection of the reticle due to reticle wrinkles and other conditions, and ensure the reticle offset. Accuracy of offset detection. In addition, the reticle pre-alignment system can not only compensate for the rotational offset, but also compensate for the distance offset in the set direction, thereby improving the accuracy of the reticle pre-alignment, thereby improving the accuracy of the screen. .

Continuing to refer to FIG. 1 , on the basis of the above technical solution, optionally, the setting direction x is a direction perpendicular to the direction in which the pre-alignment module 110 points to the worktable 140 .

The worktable 140 is located on the side of the pre-alignment module 110 away from the board library. Specifically, in the conventional pre-alignment system, the transfer module 120 only moves in the direction y in which the pre-alignment module 110 points to the worktable 140 or the direction y in which the worktable 140 points to the pre-alignment module 110, so as to realize the pre-alignment of the reticle. The transfer between the module 110 and the worktable 140, correspondingly, when the reticle is offset in the direction in which the pre-alignment module 110 points to the worktable 140 or the direction in which the worktable 140 points to the pre-alignment module 110, it can be transmitted by Module 120 compensates; the offset in a direction perpendicular to the direction in which pre-alignment module 110 points to table 140 is ignored. In this embodiment, the setting direction x is set as a direction perpendicular to the direction in which the pre-alignment module 110 points to the worktable 140, and the transfer module 120 can move in a direction perpendicular to the direction in which the pre-alignment module 110 points to the worktable 140. When the reticle is offset in a direction perpendicular to the direction in which the pre-alignment module 110 points to the worktable 140, the reticle can be adjusted by the transfer module 120 in time, thereby improving the precision of the pre-alignment.

FIG. 2 is a schematic structural diagram of a pre-alignment module provided by an embodiment of the present invention. Referring to FIG. 2, optionally, the pre-alignment module 110 includes a support plate 111, and the setting surface of the support plate 111 is divided into a center placement area 1111 and an edge The adsorption area 1112, the edge adsorption area 1112 is located at least on opposite sides of the center placement area 1111;

The edge adsorption area 1112 includes an adsorption structure, and the adsorption structure is used to adsorb the reticle to flatten the reticle on the set surface.

Referring to FIG. 2 , FIG. 2 exemplarily shows a situation where the edge adsorption areas 1112 are located on opposite sides of the center placement area 1111 . Specifically, the set surface of the support plate 111 is the surface of the support plate 111 for placing the reticle. The edge adsorption area 1112 is arranged on the adsorption structure, and the adsorption structure can be used to adsorb the reticle. Optionally, the offset detection module 130 detects the offset of the reticle (including the rotation offset Rz and the distance offset). Before, the reticle is adsorbed by the adsorption structure, so that after the reticle is placed on the set surface of the support plate 111, the edge of the reticle is adsorbed by the adsorption structure of the edge adsorption area 1112, so that the edge of the reticle is flattened by force , to prevent the reticle from wrinkling, thereby ensuring the accuracy of the offset detection module 130 detecting the offset of the reticle.

It should be noted that, in other optional embodiments of the present invention, the edge adsorption area 1112 can also surround the center placement area 1111, so that after the reticle is placed on the set surface of the support plate 111, each edge of the reticle can be affected by The adsorption force of the adsorption structure is more flat.

FIG. 3 is a bottom view of FIG. 2 . Referring to FIG. 2 and FIG. 3 , optionally, the adsorption structure includes an adsorption joint 114 and an adsorption body 113 including a plurality of first adsorption holes. The adsorption body 113 is set at the setting of the support plate 111 surface;

The support plate 111 includes an air channel, and the adsorption joint 114 communicates with the first adsorption hole through the air channel in the support plate 111 .

Optionally, the adsorption body 113 may be a ceramic sheet, and the ceramic sheet may be adhered to the set surface of the support plate 111 . An air passage is provided in the support plate 111 , and the adsorption joint 114 communicates with the first adsorption hole of the adsorption body 113 through the air passage, and then air is extracted through the adsorption joint 114 to realize the adsorption of the reticle by the adsorption structure.

On the basis of the above technical solution, optionally, the diameter of the first adsorption holes is 2-20 microns, and the first adsorption holes are uniformly distributed in the edge adsorption zone 1112 .

Specifically, the diameter of the first adsorption hole is small and the steps are dense, and the thickness of the support plate 111 is relatively thick, so it is difficult to realize the process of directly forming the first adsorption hole on the support plate 111 . In this embodiment, the adsorption body 113 including a plurality of first adsorption holes is a structure externally attached to the support plate 111 , which is relatively easier to implement in the process than directly opening the holes on the support plate 111 . In addition, the first adsorption holes are evenly distributed in the edge adsorption area 1112, so that the edges of the reticle are uniformly stressed, thereby ensuring that the reticle can be stretched to be more flat under the adsorption of the adsorption structure. Optionally, the adsorption joint 114 is disposed on the surface opposite to the setting surface.

In other optional embodiments of the present invention, in the edge adsorption area, the support plate is provided with a plurality of second adsorption holes, the adsorption structure includes second adsorption holes and adsorption joints, and the adsorption joints communicate with the second adsorption holes; optional , the diameter of the second adsorption hole is greater than 15 microns.

Specifically, a via hole can be directly opened on the support plate as the second adsorption hole. Compared with the adsorption body attached to the support plate, when the second adsorption hole is directly opened on the support plate, the diameter of the second adsorption hole needs to be larger than the above-mentioned The diameter of the first adsorption hole in the embodiment makes the process easier to realize. The pre-alignment module structure of this embodiment does not require an external adsorption body of the adsorption structure, which is beneficial to saving costs.

Optionally, the second adsorption holes are evenly arranged, so that the edges of the reticle are evenly stressed, thereby ensuring that the reticle can be stretched to be more flat under the adsorption of the adsorption structure. Optionally, the edge adsorption area includes at least one row of second adsorption holes, wherein the row direction of the arrangement of the second adsorption holes may be parallel to the extension direction of the long side of the rectangle formed by the edge adsorption area.

On the basis of the above embodiments, optionally, the pre-alignment module further includes a first control unit and a drive unit, the first control unit is electrically connected to the offset detection module and the drive unit, respectively, and the drive unit is connected to the support plate ;

The first control unit is used for sending a first control signal to the driving unit according to the rotation offset, so that the driving unit drives the supporting plate to rotate to adjust the position of the reticle.

Specifically, the driving unit can be used to drive the support plate to rotate, and the reticle is placed on the support plate. Therefore, the rotation of the support plate can drive the reticle to rotate, thereby realizing compensation for the rotational offset of the reticle. After receiving the rotation offset detected by the offset detection module, the first control unit can generate a first control signal corresponding to the compensation amount of the rotation offset, and the drive unit drives the support according to the first control signal The plate rotates to drive the reticle to rotate, thereby compensating for the rotational offset of the reticle. Optionally, the first control unit may include a single-chip microcomputer.

On the basis of the above embodiments, optionally, the transmission module includes a second control unit and a grasping unit, the second control unit is electrically connected to the offset detection module and the grasping unit, respectively, and the second control unit is offset according to the distance. The shift amount sends a second control signal to the grasping unit, so that the grasping unit adjusts the position of the reticle in the set direction after grasping the reticle.

Optionally, the grasping unit is a gripper. Specifically, the grasping unit can be used to grip the reticle and adjust the position of the reticle in the set direction. After the second control unit receives the distance offset detected by the offset detection module, it can generate a second control signal corresponding to the compensation amount of the distance offset, and the driving unit clips the distance according to the second control signal. The reticle is moved in the set direction, compensating for the rotational offset of the reticle. Optionally, the second control unit may include a single-chip microcomputer.

FIG. 4 is a partial enlarged view of FIG. 2 . 2-4, optionally, the pre-alignment module further includes a support frame 115, a first partition 04, a second partition 05, a motor mover 06, a mover mounting frame 07, a motor stator 08, and a stator mounting Rack 09, sensor bracket 10, limit sensor 11, sensor block 12, first mounting plate 13, universal ball 14, friction plate 15, second mounting plate 16, slewing bearing 17, oil filler 18, grating ruler mounting plate 19. Mechanical limit mounting plate 20 , mechanical limit buffer 21 , mechanical limit baffle 22 , read head mounting bracket 23 , read head 24 , grating ruler 25 , balance block 26 .

Specifically, the support frame 115 is supported as the main body of the pre-alignment module, the slewing bearing 17 is mounted on the support frame 115, the outer ring of the slewing bearing 17 is fixed to the support frame 115, and the inner ring of the slewing bearing 17 can rotate around the rotation center. The second mounting plate 16 is connected to the inner ring of the slewing bearing 17, the support plate 111 is connected to the second mounting plate 16, the support plate 111 is used to carry the reticle, and the edge adsorption area 1112 plays a role in fixing the position of the reticle. The support plate 111 rotates together. The stator mounting frame 09 is installed on the support frame 115, the motor stator 08 and the sensor bracket 10 are installed on the stator mounting frame 09, the second partition plate 05 is installed on the motor stator 08, the limit sensor 11 is installed on the sensor bracket 10, the motor The stator 08 is fixed relative to the support frame 115 and provides thrust to the motor mover 06 , the two limit sensors 11 realize the electrical limit switch of the positive and negative positions of the linear motion of the motor mover, and the second partition 05 is opposite to the motor stator 08 Play the role of magnetic isolation. The first partition 04 and the mover mounting frame 07 are fixed on the support plate 111, the motor mover 06 and the sensor block 12 are fixed on the mover mounting frame 07, the first partition 04, the motor mover 06, and the mover are installed The frame 07 and the sensor block 12 rotate together with the support plate 111; the motor mover 06 is driven to move by the magnetic field force of the motor stator 08, the motor mover 06 and the motor stator 08 are not in contact, and the two can be arbitrarily in the X and Y directions Relatively moving, finally the motor mover 06 drives the support plate 111 to rotate around the center of the slewing bearing 17 .

The grating ruler 25 is pasted on the grating ruler mounting plate 19, and the grating ruler mounting plate 19 is fixed on the support plate 111 and rotates together with the support plate 111; the read head 24 is mounted on the read head mounting bracket 23, and the read head mounting bracket 23 is fixed on the first On the mounting plate 13, the first mounting plate 13 is fixed on the supporting frame 115, so that the reading head 24 is fixed; because the 19 grating scale moves relative to the reading head 24, the reading head 24 can measure the movement of the 19 grating scale. The displacement amount is fed back to the first control unit (not shown in the figure), and the first control unit calculates the rotational displacement amount of the movement of the support plate 111 with the reticle.

The mechanical limit buffer 21 is installed on the mechanical installation plate 20 , the mechanical installation plate 20 is fixed on the support frame 115 , the mechanical limit baffle 22 is fixed on the support plate 111 and rotates together with the support plate 111 , the mechanical limit buffer 21 The rotation of the support plate 111 is limited within a certain range by the mechanical limit baffle 22 .

The universal ball 14 is installed on the first mounting plate 13, the friction plate 15 is fixed on the support plate 111, and the universal ball 14 plays an auxiliary supporting role for the support plate 111; the balance block 26 is installed on the support plate 111, so that the support plate The center of mass on 111 is balanced to the center of rotation; the oiling nozzle 18 is installed on the support frame 115, and the slewing bearing 17 can be filled with grease.

The suction joint 114 is connected to the gas path of the edge suction area 1112 to provide vacuum suction for the edge suction area 1112 , so that the edge suction area 1112 fixes the reticle on the support plate 111 .

Wherein, the drive unit in the above embodiment may include a motor mover 06 and a motor stator 08 .

Embodiments of the present invention further provide a net-stretching device, where the net-stretching device includes the reticle pre-alignment system provided by any of the above embodiments of the present invention.

Embodiments of the present invention further provide a reticle pre-alignment method, which can be applied to the reticle pre-alignment system of any of the foregoing embodiments. 5 is a flowchart of a method for pre-aligning a reticle provided by an embodiment of the present invention. Referring to FIG. 5 , the method for pre-aligning a reticle includes:

Step 210, after the reticle is flattened by the pre-alignment module, the offset detection module detects the offset of the reticle, and the offset at least includes the rotational offset of the reticle relative to the reference plane and the setting on the reference plane. Determine the distance offset in the direction, and send the rotation offset to the pre-alignment module and the distance offset to the transmission module;

Step 220, the pre-alignment module adjusts the position of the reticle according to the rotation offset to compensate for the rotation offset;

Step 230: The transmission module adjusts the position of the reticle according to the distance offset to compensate for the distance offset.

In the reticle pre-alignment method provided by this embodiment, after the reticle is flattened by the pre-alignment module, the offset detection module detects the offset of the reticle, and sends the rotational offset to the pre-alignment module and The distance offset is sent to the transfer module; the pre-alignment module adjusts the position of the reticle according to the rotation offset to compensate for the rotation offset; the transfer module adjusts the position of the reticle according to the distance offset to adjust the distance offset to compensate. In this embodiment, the detection module detects the offset of the reticle after the reticle is flattened, which can avoid the influence on the offset detection of the reticle due to the wrinkles of the reticle, and ensure the offset of the reticle. detection accuracy. In addition, the reticle pre-alignment system can not only compensate for the rotational offset, but also compensate for the distance offset in the set direction, thereby improving the accuracy of the reticle pre-alignment, thereby improving the accuracy of the screen. .

FIG. 6 is a flowchart of another reticle pre-alignment method provided by an embodiment of the present invention. Referring to FIG. 6 , optionally, the reticle pre-alignment method includes:

Step 310, the transfer robot places the reticle on the set surface of the support plate.

Specifically, the transfer manipulator is used to take the reticle from the plate library and place it on the support plate. The transfer robot is used to transfer reticles between the library and the pre-alignment module.

Step 320 , the transfer module clamps the reticle and places it on the set surface of the support plate of the pre-alignment module after tensioning.

The transfer module is used to transfer the reticle between the pre-alignment module and the stage. After the reticle is placed on the support plate by the transfer manipulator, the reticle may be wrinkled. The transfer module clamps the reticle and places it on the reticle again to ensure that the wrinkle is reduced or disappeared when it is placed again.

Step 330, the adsorption structure adsorbs the reticle to flatten the reticle on the set surface.

The suction structure vacuum suctions the reticle so that the reticle can be flattened.

Step 340, the transfer module releases the reticle.

After the reticle is flattened, the transfer module releases the reticle, and the reticle can remain in a flattened state due to the adsorption effect of the adsorption structure, so that when the offset detection module detects the offset of the reticle in the subsequent steps, the detection accuracy can be improved.

Step 350: After the reticle is flattened by the pre-alignment module, the offset detection module detects the offset of the reticle, and the offset at least includes the rotational offset of the reticle relative to the reference plane and the setting on the reference plane. The distance offset in the direction is determined, and the rotation offset is sent to the pre-alignment module and the distance offset is sent to the transfer module.

Step 360: The pre-alignment module adjusts the position of the reticle according to the rotation offset to compensate for the rotation offset.

Optionally, the pre-alignment module further includes a first control unit and a drive unit; this step 360 includes:

The first control unit sends a first control signal to the drive unit according to the rotation offset, so that the drive unit drives the support plate to rotate to adjust the position of the reticle.

Step 370, the transfer module clamps the reticle.

Step 380, the adsorption structure stops the adsorption of the reticle.

Step 390: The transmission module adjusts the position of the reticle according to the distance offset to compensate for the distance offset.

Optionally, the transmission module includes a second control unit and a grabbing unit; this step 390 includes:

The second control unit sends a second control signal to the grabbing unit according to the distance offset, so that the grabbing unit adjusts the position of the reticle in the set direction after grabbing the reticle.

Optionally, after step 390, it further includes:

Step 410, the transfer module places the reticle on the set surface of the support plate, the adsorption structure adsorbs the reticle, and the transfer module releases the reticle;

Step 420, the offset detection module detects whether the rotation offset and the distance offset meet the set requirements;

When the rotation offset does not meet the set requirement, return to step 360 and its subsequent steps; when the distance offset does not meet the set requirement, return to step 390 and its subsequent steps.

When both the rotation offset and the distance offset meet the set requirements, the reticle can be clamped by the transfer module, and the reticle can be released by the adsorption structure. The transfer module can transfer the pre-aligned reticle to the worktable, thereby improving the The accuracy of the net.

The reticle pre-alignment method of this embodiment ensures that the reticle can be flattened on the set surface of the support plate by setting the adsorption structure to adsorb the reticle, thereby ensuring the detection accuracy of the offset by the offset detection module . At the same time, the transfer module can compensate the distance offset in the set direction for the reticle, which improves the pre-alignment precision, which is beneficial to improve the net-stretching precision.

Note that the above are only preferred embodiments of the present invention and applied technical principles. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and various obvious changes, readjustments and substitutions can be made by those skilled in the art without departing from the protection scope of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments, and can also include more other equivalent embodiments without departing from the concept of the present invention. The scope is determined by the scope of the appended claims.

Claims (15)

1. A reticle pre-alignment system, comprising: the device comprises a pre-alignment module, a transmission module and an offset detection module; the offset detection module is respectively connected with the pre-alignment module and the transmission module; the transfer module is used for transferring the mask plate from the prealignment module to a workbench;

the offset detection module is used for detecting the offset of the mask plate after the mask plate is flattened by the pre-alignment module, wherein the offset at least comprises the rotation offset of the mask plate relative to a reference plane and the distance offset in a set direction, and the rotation offset is sent to the pre-alignment module and the distance offset is sent to the transmission module;

the pre-alignment module is used for adjusting the position of the mask plate according to the rotary offset so as to compensate the rotary offset;

the transmission module is also used for adjusting the position of the mask plate according to the distance offset so as to compensate the distance offset.

2. The reticle pre-alignment system of claim 1,

the pre-alignment module comprises a support plate, the setting surface of the support plate is divided into a central placing area and edge adsorption areas, and the edge adsorption areas are at least positioned at two opposite sides of the central placing area;

the edge adsorption area comprises an adsorption structure, and the adsorption structure is used for adsorbing the mask plate so that the mask plate can be flattened on the set surface.

3. The reticle prealignment system of claim 2, wherein the adsorption structure comprises an adsorption joint and an adsorption body comprising a plurality of first adsorption holes, the adsorption body being disposed on a setting surface of the support plate;

the support plate comprises an air passage, and the adsorption joint is communicated with the first adsorption hole through the air passage in the support plate.

4. The reticle pre-alignment system of claim 3, wherein the first adsorption holes have a pore size of 2-20 microns and are uniformly distributed in the edge adsorption zone.

5. The mask blank prealignment system according to claim 2, wherein a plurality of second adsorption holes are formed in the support plate in the edge adsorption area, the adsorption structure comprises the second adsorption holes and adsorption joints, and the adsorption joints are communicated with the second adsorption holes;

preferably, the diameter of the second adsorption hole is larger than 15 microns;

preferably, the second adsorption holes are uniformly arranged.

6. The reticle prealignment system of claim 2, wherein the prealignment module further comprises a first control unit and a drive unit, the first control unit being electrically connected to the offset detection module and the drive unit, respectively, the drive unit being connected to the support plate;

the first control unit is used for sending a first control signal to the driving unit according to the rotation offset so that the driving unit drives the supporting plate to rotate to adjust the position of the mask.

7. The mask pre-alignment system according to claim 1, wherein the transfer module comprises a second control unit and a grabbing unit, the second control unit is electrically connected with the offset detection module and the grabbing unit respectively, and the second control unit sends a second control signal to the grabbing unit according to the distance offset, so that the grabbing unit adjusts the position of the mask in the set direction after grabbing the mask.

8. The reticle prealignment system of claim 1, wherein the set direction is a direction perpendicular to a direction in which the prealignment module points toward the stage.

9. A method for pre-aligning a mask, comprising:

after the mask plate is flattened by the pre-alignment module, an offset detection module detects the offset of the mask plate, wherein the offset at least comprises the rotation offset of the mask plate relative to a reference plane and the distance offset in the set direction of the reference plane, and the rotation offset is sent to the pre-alignment module and the distance offset is sent to a transmission module;

the pre-alignment module adjusts the position of the mask plate according to the rotation offset so as to compensate the rotation offset;

and the transmission module adjusts the position of the mask plate according to the distance offset so as to compensate the distance offset.

10. The reticle pre-alignment method of claim 9, wherein after the reticle is flattened in the pre-alignment module and before the offset detection module detects the offset of the reticle, the method further comprises:

the conveying module clamps the mask plate and places the mask plate on a set surface of a supporting plate of the pre-alignment module after tensioning;

the adsorption structure adsorbs the mask plate so as to flatten the mask plate on the set surface;

the transfer module releases the reticle.

11. The reticle pre-alignment method of claim 9, further comprising, before the transfer module adjusts the position of the reticle according to the distance offset to compensate for the distance offset:

the transmission module clamps the mask;

and stopping the adsorption of the adsorption structure on the mask.

12. The reticle pre-alignment method of claim 10, wherein the pre-alignment module further comprises a first control unit and a drive unit; the pre-alignment module adjusts the position of the mask plate according to the rotation offset to compensate the rotation offset, and the pre-alignment module comprises:

the first control unit sends a first control signal to the driving unit according to the rotation offset, so that the driving unit drives the supporting plate to rotate to adjust the position of the mask.

13. The reticle pre-alignment method according to any one of claims 9 to 11, wherein the transfer module comprises a second control unit and a gripper unit; the transmission module adjusts the position of the mask plate according to the distance offset to compensate the distance offset, and the method comprises the following steps:

and the second control unit sends a second control signal to the grabbing unit according to the distance offset, so that the grabbing unit can adjust the position of the mask plate in the set direction after grabbing the mask plate.

14. The reticle pre-alignment method of claim 10, further comprising, after the transfer module adjusts the position of the reticle according to the distance offset to compensate for the distance offset:

the transmission module places the mask on a set surface of the supporting plate, the adsorption structure adsorbs the mask, and the transmission module releases the mask;

the offset detection module detects whether the rotation offset and the distance offset meet set requirements, and when the rotation offset does not meet the set requirements, the pre-alignment module is returned to execute to adjust the position of the mask plate according to the rotation offset so as to compensate the rotation offset and carry out subsequent steps; and when the distance offset does not meet the set requirement, returning to the execution and transmission module to adjust the position of the mask plate according to the distance offset so as to compensate the distance offset and carry out the subsequent steps.

15. A screening apparatus comprising the reticle pre-alignment system of any one of claims 1 to 8.

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