CN114877552B - Micro throttling cooler and its application method, infrared detector - Google Patents
Micro throttling cooler and its application method, infrared detector Download PDFInfo
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- CN114877552B CN114877552B CN202210254106.9A CN202210254106A CN114877552B CN 114877552 B CN114877552 B CN 114877552B CN 202210254106 A CN202210254106 A CN 202210254106A CN 114877552 B CN114877552 B CN 114877552B
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- refrigeration
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B7/00—Compression machines, plants or systems, with cascade operation, i.e. with two or more circuits, the heat from the condenser of one circuit being absorbed by the evaporator of the next circuit
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B41/00—Fluid-circulation arrangements
- F25B41/30—Expansion means; Dispositions thereof
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B41/00—Fluid-circulation arrangements
- F25B41/40—Fluid line arrangements
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
- G01J5/061—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity by controlling the temperature of the apparatus or parts thereof, e.g. using cooling means or thermostats
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
- Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Devices That Are Associated With Refrigeration Equipment (AREA)
Abstract
The invention relates to a miniature throttling refrigerator which comprises a refrigerating plate, wherein a plurality of stages of refrigerating modules are formed in the refrigerating plate, and the refrigerating modules at all stages are sequentially distributed along the thickness direction of the refrigerating plate. And further relates to an application method of the throttling refrigerator and an infrared detector provided with the throttling refrigerator. In the invention, the micro throttling refrigerator adopts the multi-stage refrigeration modules distributed in a level way, and the upper stage refrigeration module can cool the lower stage refrigeration module, so that the working medium throttling refrigeration effect of each stage of refrigeration modules behind the first stage refrigeration module can be realized at a lower conversion temperature, such as working media of hydrogen, neon, helium and the like, the application range of the working medium can be effectively widened, and the refrigeration temperature below 70K is realized on the ultra-micro refrigerator.
Description
Technical Field
The invention belongs to the technical field of throttling refrigerators, and particularly relates to a micro throttling refrigerator, an application method thereof and an infrared detector provided with the micro throttling refrigerator.
Background
The ultra-miniature throttling refrigerator (MMR) has the characteristics of novel process, small size, low vibration, no magnetism and the like, is invented by Little teaching of Stanford university in the United states in the period of 20 th century 70, and is successfully applied to electronic technology and superconducting technology, such as the university of California for cooling optical detectors of 500×500 array charge coupled devices by using MMR, the university of Tokyo in Japan for cooling sample coolers of differential light diffractometers by using MMR, and in addition, has more applications in microelectronics science and solid state science, such as measurement of properties of small samples, electron and optical microscopy and the like.
Under the room temperature condition, the single-stage ultra-miniature throttling refrigerator can only adopt fluid with throttling conversion temperature higher than room temperature, and for fluid with throttling conversion temperature lower than room temperature, such as neon, hydrogen, helium and other fluids, the single-stage throttling refrigerator cannot generate throttling refrigeration effect, so that the lowest refrigeration temperature of throttling refrigeration is limited.
Disclosure of Invention
The invention relates to a micro throttling refrigerator, an application method thereof and an infrared detector provided with the micro throttling refrigerator, which at least can solve part of defects in the prior art.
The invention relates to a miniature throttling refrigerator which comprises a refrigerating plate, wherein multistage refrigerating modules are formed in the refrigerating plate, and the refrigerating modules at all stages are sequentially distributed along the thickness direction of the refrigerating plate.
As one of the embodiments, each stage of the refrigeration modules includes a high-pressure fluid passage and a low-pressure fluid passage which are layered in the plate thickness direction of the refrigeration plate and are communicated through the throttle expansion unit, and in the adjacent two stages of the refrigeration modules, the low-pressure fluid passage of the upper stage of the refrigeration module is adjacent to the high-pressure fluid passage of the lower stage of the refrigeration module.
As one embodiment, the refrigeration plate includes a plurality of stacked refrigeration unit plates, and each of the high-pressure fluid passages and each of the low-pressure fluid passages are distributed over each of the refrigeration unit plates.
As one embodiment, the high-pressure fluid channel and the low-pressure fluid channel of each stage of the refrigeration module are respectively formed on two adjacent refrigeration unit boards.
As one embodiment, the high-pressure fluid channel and the low-pressure fluid channel of each stage of refrigeration module are respectively formed on two side plate surfaces of the same refrigeration unit plate, and the fluid channels between two adjacent refrigeration unit plates are not in series flow.
As one embodiment, each of the refrigeration unit plates is a glass plate, and the high-pressure fluid channel and the low-pressure fluid channel are micro-channels etched on the corresponding plate body by photolithography.
As one embodiment, the air inlet of the next-stage refrigeration module is arranged corresponding to the middle part of the low-pressure fluid channel of the previous-stage refrigeration module, wherein the working medium flowing directions of the low-pressure fluid channel and the high-pressure fluid channels on two sides are opposite.
As one embodiment, the high pressure fluid channel comprises a plurality of high pressure runner segments that are serpentine distributed and connected in sequence, each high pressure runner segment employing a serpentine runner.
The invention also relates to an application method of the micro throttling refrigerator, which comprises the following steps:
The throttling refrigerator adopts a two-stage refrigeration module, wherein,
The first-stage refrigeration module adopts a first refrigeration working medium, wherein the first refrigeration working medium is argon or nitrogen, the second-stage refrigeration module adopts a second refrigeration working medium, and the second refrigeration working medium is neon or hydrogen;
Or alternatively
The throttling refrigerator adopts a three-stage refrigeration module, wherein,
The first-stage refrigerating module adopts a first refrigerating working medium, wherein the first refrigerating working medium is argon or nitrogen, the second-stage refrigerating module adopts a second refrigerating working medium, the second refrigerating working medium is neon or hydrogen, the third-stage refrigerating module adopts a third refrigerating working medium, and the third refrigerating working medium is helium.
The invention also relates to an infrared detector provided with the micro throttling refrigerator.
The invention has at least the following beneficial effects:
In the invention, the micro throttling refrigerator adopts the multi-stage refrigeration modules distributed in a level way, and the upper stage refrigeration module can cool the lower stage refrigeration module, so that the working medium throttling refrigeration effect of each stage of refrigeration modules behind the first stage refrigeration module can be realized at a lower conversion temperature, such as working media of hydrogen, neon, helium and the like, the application range of the working medium can be effectively widened, and the refrigeration temperature below 70K is realized on the ultra-micro refrigerator.
Drawings
In order to more clearly illustrate the embodiments of the invention or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic structural diagram of a micro throttling refrigerator according to an embodiment of the present invention;
FIG. 2 is a schematic view of the structure of the primary high side cell plate of FIG. 1;
FIG. 3 is a schematic view of the primary low pressure side cell plate of FIG. 1;
Fig. 4 is a schematic structural view of the secondary high-voltage side cell plate of fig. 1;
Fig. 5 is a schematic structural view of the secondary low pressure side cell plate of fig. 1.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely, and it is apparent that the described embodiments are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Example 1
As shown in fig. 1, an embodiment of the present invention provides a micro throttle refrigerator, which includes a refrigeration plate, wherein a plurality of stages of refrigeration modules are formed in the refrigeration plate, and the refrigeration modules at each stage are sequentially arranged along the thickness direction of the refrigeration plate.
The miniature throttling refrigerator adopts the multi-stage refrigeration modules distributed in a level way, and the upper stage refrigeration module can cool the lower stage refrigeration module, so that the working medium throttling refrigeration effect of each stage of refrigeration module behind the first stage refrigeration module can be realized at a lower conversion temperature, such as working mediums of hydrogen, neon, helium and the like, the application range of the working medium can be effectively widened, and meanwhile, the refrigeration temperature below 70K is realized on the miniature refrigerator.
Preferably, each stage of the refrigeration modules includes a high-pressure fluid passage 21 and a low-pressure fluid passage 22 which are arranged in layers in the plate thickness direction of the refrigeration plate and communicate through the throttle expansion unit, and in the adjacent two stages of the refrigeration modules, the low-pressure fluid passage 22 of the upper stage of the refrigeration module is adjacent to the high-pressure fluid passage 21 of the lower stage of the refrigeration module.
The high-pressure fluid passage 21 and the low-pressure fluid passage 22 are micro-channels. In order to facilitate the processing of the high-pressure fluid channel 21 and the low-pressure fluid channel 22, preferably, the refrigeration plate includes a plurality of refrigeration unit plates, each high-pressure fluid channel 21 and each low-pressure fluid channel 22 are distributed on each refrigeration unit plate, after the corresponding fluid channel is processed on the corresponding refrigeration unit plate, each refrigeration unit plate is overlapped and connected to form the refrigeration plate, and specifically, each refrigeration unit plate can be sealed and combined together in a bonding manner.
The above-mentioned throttle expansion unit includes a throttle element 231 and an expansion chamber 232, the inlet end of the throttle element 231 is connected to the outlet end of the high-pressure fluid passage 21, the outlet end of the throttle element 231 is communicated with the expansion chamber 232, and the outlet end of the expansion chamber 232 is connected to the inlet end of the low-pressure fluid passage 22. The throttling element 231 may be provided with a plurality of channels side by side, preventing one of the channels from being blocked to affect the normal operation of the refrigerator.
In one embodiment, as shown in fig. 1-5, the high pressure fluid passage 21 and the low pressure fluid passage 22 of each stage refrigeration module are formed on two adjacent refrigeration unit boards, respectively. For convenience of description, in the present embodiment, the refrigeration unit plate provided with the high-pressure fluid passage 21 is defined as a high-pressure side unit plate, and the refrigeration unit plate provided with the low-pressure fluid passage 22 is defined as a low-pressure side unit plate. Wherein, further, the high-pressure side unit board of first-stage refrigeration module is last to coincide has the apron.
Taking a two-stage refrigeration module as an example, correspondingly, as shown in fig. 1-5, the refrigeration plate comprises 5 plate bodies, namely a cover plate 11, a first-stage high-pressure side unit plate 12, a first-stage low-pressure side unit plate 13, a second-stage high-pressure side unit plate 14 and a second-stage low-pressure side unit plate 15. Preferably, the air inlet of the primary refrigeration module is perforated and extended from the cover plate 11 to the primary high-pressure side unit plate 12, the air outlet of the primary refrigeration module can be arranged on the side wall of the primary low-pressure side unit plate 13, the air inlet of the secondary refrigeration module is perforated and extended from the secondary low-pressure side unit plate 15 to the secondary high-pressure side unit plate 14, and the air outlet of the secondary refrigeration module can be arranged on the side wall or the plate surface of the secondary low-pressure side unit plate 15.
Optionally, the thicknesses of the high-pressure side unit plate and the low-pressure side unit plate are within the range of 0.1-0.3 mm, and a certain distance is formed between the high-pressure fluid channel 21 and the low-pressure fluid channel 22 of the same level and between the high-pressure fluid channel 21 and the low-pressure fluid channel 22 of the adjacent level, so that the heat leakage loss of the refrigerator can be reduced.
With the above arrangement of the throttle expansion units, it is preferable that in each stage of the refrigeration module, the throttle member 231 is in communication with the high-pressure fluid passage 21 and both are formed on the same refrigeration unit plate, the expansion chamber 232 extends from one of the refrigeration unit plates to the other refrigeration unit plate and both ends are in communication with the throttle member 231 and the low-pressure fluid passage 22, respectively. That is, the above-mentioned throttle member 231 is formed on the high-pressure side cell plate, and the expansion chamber 232 extends from the high-pressure side cell plate to the low-pressure side cell plate.
In other embodiments, the high-pressure fluid channel 21 and the low-pressure fluid channel 22 of each stage of the refrigeration module are respectively formed on two side plate surfaces of the same refrigeration unit plate, and the fluid channels between two adjacent refrigeration unit plates are not in series flow. Preferably, the high-pressure side plate surface of the first-stage refrigeration module and the low-pressure side plate surface of the last-stage refrigeration module are respectively overlapped with cover plates. Taking a two-stage refrigeration module as an example, the refrigeration plate comprises 4 plate bodies, namely an upper cover plate, a one-stage refrigeration unit plate, a two-stage refrigeration unit plate and a lower cover plate in sequence. The air inlet of the first-stage refrigeration module is preferably perforated by the upper cover plate and extends to the first-stage refrigeration unit plate, the air outlet of the first-stage refrigeration module can be arranged on the side wall of the first-stage refrigeration unit plate, the air inlet of the second-stage refrigeration module is perforated by the lower cover plate and extends to the second-stage refrigeration unit plate, and the air outlet of the second-stage refrigeration module can be arranged on the side wall of the second-stage refrigeration unit plate.
A heat-conducting membrane can be clamped between two adjacent refrigerating unit plates so that fluid channels between the two adjacent refrigerating unit plates are not in series flow, the heat-conducting membrane is preferably a metal membrane, the compression resistance is guaranteed, the heat exchange efficiency is good, and metal can be grown on the refrigerating unit plates in a sputtering or thermal evaporation mode to form the heat-conducting membrane. In another scheme, the low-pressure fluid channel 22 of the upper stage refrigeration module and the high-pressure fluid channel 21 of the lower stage refrigeration module are arranged in a staggered manner, so that the purpose of preventing the fluid channels between two adjacent refrigeration unit plates from being in series flow can be achieved.
Preferably, each refrigeration unit plate is a glass plate, and the heat conduction coefficient of the glass plate is smaller, so that the radial heat conduction and leakage loss of the refrigerator can be effectively reduced, and the cover plate can also be a glass plate. Further preferably, the high-pressure fluid channel 21, the low-pressure fluid channel 22 and the throttling element 231 can be formed by photoetching, and particularly for a glass plate type refrigeration unit plate, the processing and forming are easy, and the processing quality of the micro throttling refrigerator/ultra micro throttling refrigerator can be ensured.
Preferably, as shown in fig. 2-5, the high-pressure fluid channel 21 is arranged in a serpentine manner, and the low-pressure fluid channel 22 is also preferably arranged in a serpentine manner, so that the heat exchange area and the heat exchange efficiency can be improved, wherein the channel cross-sectional area of the low-pressure fluid channel 22 is larger than that of the high-pressure fluid channel 21. Preferably, rib columns are provided in the low pressure fluid passage 22 to improve heat exchange efficiency.
Preferably, as shown in fig. 2 and 4, the high pressure fluid channel 21 comprises a plurality of high pressure runner segments, which are serpentine distributed and connected in sequence, each employing a serpentine runner. Based on the scheme, the heat exchange area of the high-pressure fluid channel 21 can be remarkably increased, the refrigerating effect and efficiency are improved, and the volume of the refrigerator can be further reduced under the condition of meeting the refrigerating requirement, so that the refrigerator is convenient to integrate into an infrared detector.
Further preferably, as shown in fig. 2-5, in the same-stage refrigeration module, the high-pressure fluid channel 21 is opposite to the low-pressure fluid channel 22, and the high-pressure fluid channel 21 is located directly above or directly below the low-pressure fluid channel 22, for example, the low-temperature working medium in the low-pressure fluid channel 22 can pre-cool the high-temperature working medium in the high-pressure fluid channel 21, and the flowing direction of the working medium in the high-pressure fluid channel 21 is opposite to the flowing direction of the working medium in the low-pressure fluid channel 22 (i.e. a countercurrent heat exchange effect is formed), so that the refrigeration efficiency and effect can be effectively improved.
Further, as shown in fig. 3 and 4, the air inlet of the next-stage refrigeration module is arranged corresponding to the middle part of the low-pressure fluid channel 22 of the previous-stage refrigeration module, and the previous-stage low-pressure fluid channel 22 can rapidly cool the next-stage high-pressure fluid channel 21, so that the working medium of the next-stage refrigeration module is rapidly cooled to the conversion temperature thereof.
In this embodiment, the multi-stage refrigeration module is adopted, the low-pressure fluid channel 22 in the peer-stage refrigeration module can cool the high-pressure fluid channel 21, and the low-pressure fluid channel 22 of the upper-stage refrigeration module can cool the high-pressure fluid channel 21 of the lower-stage refrigeration module, so that the working medium throttling refrigeration effect of each stage of refrigeration module after the first-stage refrigeration module is easy to realize, the refrigeration efficiency is obviously improved, the refrigeration temperature range of the throttling refrigerator and the working medium application range can be effectively widened, for example, the refrigeration temperature can reach below the liquid nitrogen temperature.
In one embodiment, as shown in fig. 3 and fig. 4, the high-pressure fluid channel 21 of the next-stage refrigeration module and the low-pressure fluid channel 22 of the previous-stage refrigeration module only have partial area overlapping heat exchange, for example, the air inlet of the high-pressure fluid channel 21 of the next-stage refrigeration module is opposite to the middle part of the low-pressure fluid channel 22 of the previous-stage refrigeration module, on one hand, the working medium flowing direction of the high-pressure fluid channel 21 of the next-stage refrigeration module is opposite to the working medium flowing direction of the low-pressure fluid channel 22, so that the countercurrent heat exchange effect can be achieved, and on the other hand, the low-pressure fluid channel 22 of the previous-stage refrigeration module can better meet the cooling requirements of the high-pressure fluid channel 21 of the next-stage refrigeration module and the high-pressure fluid channel 21 of the next-stage refrigeration module, wherein the high-pressure fluid channel 21 of the next-stage refrigeration module can be cooled rapidly.
The embodiment of the invention also provides an application method of the micro throttling refrigerator, which comprises the following steps:
The throttling refrigerator adopts a two-stage refrigeration module, wherein,
The first-stage refrigeration module adopts a first refrigeration working medium, wherein the first refrigeration working medium is argon or nitrogen, the second-stage refrigeration module adopts a second refrigeration working medium, and the second refrigeration working medium is neon or hydrogen;
Or alternatively
The throttling refrigerator adopts a three-stage refrigeration module, wherein,
The first-stage refrigerating module adopts a first refrigerating working medium, wherein the first refrigerating working medium is argon or nitrogen, the second-stage refrigerating module adopts a second refrigerating working medium, the second refrigerating working medium is neon or hydrogen, the third-stage refrigerating module adopts a third refrigerating working medium, and the third refrigerating working medium is helium.
Therefore, the micro throttling refrigerator provided by the embodiment can adopt working media with the highest conversion temperature lower than normal temperature, and has wider application range.
Example two
The embodiment of the invention provides an infrared detector, which is provided with the micro throttling refrigerator provided by the first embodiment.
The arrangement of the micro throttle refrigerator in the detector is conventional in the art, and will not be described here.
The foregoing description of the preferred embodiments of the invention is not intended to be limiting, but rather is intended to cover all modifications, equivalents, alternatives, and improvements that fall within the spirit and scope of the invention.
Claims (5)
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| CN115468332B (en) * | 2022-08-26 | 2024-10-01 | 武汉高芯科技有限公司 | Throttling refrigerator and throttling refrigeration infrared detector |
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| CN110486976A (en) * | 2019-08-29 | 2019-11-22 | 上海理工大学 | Two-stage lamination microchannel throttling refrigerator |
| CN113465211A (en) * | 2021-05-31 | 2021-10-01 | 武汉高芯科技有限公司 | Linear Stirling-chip-level throttling composite refrigerator capable of rapidly refrigerating |
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| JP2016180556A (en) * | 2015-03-24 | 2016-10-13 | 東芝キヤリア株式会社 | Throttle device and refrigeration cycle device using the same |
| CN108800641A (en) * | 2018-06-08 | 2018-11-13 | 上海理工大学 | Backheat choke block, component, zigzag microchannel throttling refrigerator and refrigerating plant |
| CN110486978B (en) * | 2019-08-29 | 2021-08-24 | 上海理工大学 | Array cylindrical group type multistage laminated microchannel throttling heat exchange refrigerator |
| CN110486973B (en) * | 2019-08-29 | 2021-08-24 | 上海理工大学 | Multi-stage precooling microchannel throttling heat exchange refrigerator with intermediate inlet |
| CN113028669B (en) * | 2021-02-10 | 2022-06-03 | 西安交通大学 | Microchannel throttling refrigerator |
| CN114147516A (en) * | 2021-12-02 | 2022-03-08 | 大连理工大学 | Cascade type refrigeration and freezing clamping device |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110486976A (en) * | 2019-08-29 | 2019-11-22 | 上海理工大学 | Two-stage lamination microchannel throttling refrigerator |
| CN113465211A (en) * | 2021-05-31 | 2021-10-01 | 武汉高芯科技有限公司 | Linear Stirling-chip-level throttling composite refrigerator capable of rapidly refrigerating |
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