CN114812889B - A large-aperture optical element stress detection device and detection method thereof - Google Patents
A large-aperture optical element stress detection device and detection method thereof Download PDFInfo
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- CN114812889B CN114812889B CN202210485232.5A CN202210485232A CN114812889B CN 114812889 B CN114812889 B CN 114812889B CN 202210485232 A CN202210485232 A CN 202210485232A CN 114812889 B CN114812889 B CN 114812889B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/0047—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes measuring forces due to residual stresses
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Abstract
本发明提供了一种大口径光学应力检测装置及其检测方法，检测光路利用线偏振激光作为输入探测光，通过会聚透镜扩束后，再经过一个分光棱镜和一个大口径准直物镜准直入射大口径待测元件，然后由标准反射镜反射，再次穿过待测元件，经准直镜会聚和分光棱镜反射后再由准直镜准直，最终用偏振相机采集光强信息，通过后端数据处理，实现大口径样品中应力的可视化；与传统检测光路相比，该光路不需要波片，无需转动或移动任何部件，就可以实现大口径应力双折射的实时检测，避免了波片和运动平台引入的误差。该方法不需要借助拼接算法，可以同时得到整面大口径样品的应力分布，而且易于和现有的大口径干涉光路集成。
The present invention provides a large-aperture optical stress detection device and a detection method thereof. The detection optical path uses a linearly polarized laser as the input detection light, which is expanded by a converging lens, then collimated by a beam splitter prism and a large-aperture collimating objective lens to enter a large-aperture component to be tested, then reflected by a standard reflector, passes through the component to be tested again, converged by a collimator and reflected by a beam splitter prism, and then collimated by a collimator. Finally, a polarization camera is used to collect light intensity information, and visualization of stress in a large-aperture sample is realized through back-end data processing. Compared with a traditional detection optical path, the optical path does not require a wave plate, and does not require any components to be rotated or moved, so that real-time detection of large-aperture stress birefringence can be realized, thereby avoiding errors introduced by wave plates and motion platforms. The method does not require the use of a splicing algorithm, can simultaneously obtain the stress distribution of the entire large-aperture sample, and is easy to integrate with an existing large-aperture interference optical path.
Description
Technical Field
The invention belongs to the field of optical detection, and particularly relates to a large-caliber optical stress detection device and a detection method thereof.
Background
The magnitude of residual stress is an important index for evaluating the performance of optical elements, especially for large-caliber elements, when larger internal stress exists, the optical glass is heated, pressed or quenched in the process of adding, and can break by itself. Even if the internal stress is not too large, the surface of the processed optical part is slowly deformed with time due to the existence of the internal stress, and the imaging quality is seriously affected. In addition, due to internal stress, the due isotropy property of the optical glass is destroyed, and due to the non-uniformity of internal stress distribution, the optical uniformity property is reduced, the refractive index distribution is inconsistent, and the wave surface after passing through the optical glass is deformed, so that the image quality is deteriorated.
Birefringence detection of large-caliber optical materials has important application in high-power laser material growth and processing, and is more difficult to avoid the influence of stress in the processing and manufacturing processes. In many important application engineering and scientific research experiments in China, such as high-power large-scale laser experiments, large-caliber optical elements are required, and the quality of the optical elements is an important factor for ensuring the success of the whole experiment, so that in the manufacture of large-caliber optical materials and elements, the accurate determination of stress birefringence and spatial distribution thereof is extremely important.
The existing stress detection device has the defects that the larger the measuring caliber is, the zero-order wave plates with the same caliber are required to be equipped, and the existing measurement means are generally based on the interferometry technology, the sample to be measured is required to be moved in the measurement process, and the large measuring error is inevitably generated when the large-caliber sample is moved, so that the current domestic technology is difficult to realize the stress detection with the caliber of 1m or more.
Disclosure of Invention
The invention aims to provide a large-caliber optical stress detection device and a detection method thereof, which improve the traditional fiber-optic cable type optical path structure, introduce a polarization camera at a receiving end, the method does not need to resort to a splicing algorithm, the stress distribution of the whole large-caliber sample can be obtained at the same time, the light path does not need a wave plate, and the real-time detection of the large-caliber stress birefringence can be realized without rotating or moving any part, so that the errors introduced by the wave plate and the motion platform are avoided.
The technical scheme includes that the large-caliber optical stress detection device comprises a fiber rope type optical path, wherein the fiber rope type optical path comprises a linearly polarized light source, a converging lens, a beam splitting prism, a first collimating lens, a standard reflecting mirror, a second collimating lens and a polarization camera, the linearly polarized light source, the converging lens, the beam splitting prism, the first collimating lens, an element to be detected and the standard reflecting mirror are sequentially arranged on a common first optical axis, the second collimating lens and the polarization camera are sequentially arranged on a common second optical axis, the first optical axis is located on a transmission optical path of the beam splitting prism, and the second optical axis is located on a reflection optical path of the beam splitting prism.
The linearly polarized light source emits laser, the laser is converged by the converging lens, then transmitted by the beam splitting prism, the beam is expanded and collimated by the collimating lens, after passing through the element to be detected, phase delay is generated, the light carrying the stress information of the element to be detected is reflected by the standard reflector and is reflected to the beam splitting prism along the original light path, reflected by the beam splitting prism, and received by the polarization camera after passing through the second collimating lens, the light passes through the element to be detected twice in total, and finally the stress birefringence is twice as large as the actual value.
The detection method of the large-caliber optical stress detection device comprises the following steps of:
step1, a first optical axis light path is firstly built, and a linearly polarized light source, a converging lens, a beam splitting prism, a first collimating lens and a standard reflector are adjusted to be in a coaxial state under the condition that an element to be detected is not added.
And 2, placing an expanded beam collimating lens at a second optical axis, so that the light reflected by the standard reflector is received by the target surface of the polarization camera after being expanded and collimated.
And 3, rotating the polarization camera so that the emergent direction of the linearly polarized light is parallel to a 90-degree unit of the polarization camera. Let the initial linearly polarized light along the y-axis direction, the amplitude is 2a, then the complex amplitude E of the linearly polarized light emitted by the linearly polarized light source is:
E=2a cos ωt
where ω represents angular frequency and t represents time.
Step 4, placing the element to be measured between the first collimating lens and the standard reflecting mirror, wherein after the linearly polarized light passes through the element to be measured, o light and e light can be generated due to the existence of crystal birefringence effectIf the included angle between the fast axis direction of the element to be measured and the incident linearly polarized light is alpha, the linearly polarized light is subjected to birefringence phase difference to beThe complex amplitude E x in the x direction and the complex amplitude E y in the y direction after the element to be measured are respectively:
the complex amplitudes P 0、P45、P90、P135 received by the 0 °, 45 °, 90 °, 135 ° units of the polarization camera are respectively:
The obtained light intensity information I 0、I45、I90、I135 collected by the four polarization units is respectively:
Step 5, light passes through the element to be detected twice and finally irradiates the target surface of the polarization camera, the four polarization units acquire light intensity information I 0、I45、I90、I135 respectively, the above formula is simplified, and the light intensity information I 0、I45、I90、I135 is obtained:
From the light intensity information of the three polarization units, the amplitude 2a, the included angle between the fast axis direction of the element to be measured and the incident linearly polarized light is calculated as alpha and the phase difference
Compared with the prior art, the invention has the remarkable advantages that:
(1) Compared with the traditional detection light path, the light path does not need to consider the adjustment of polarization angles of a polarizer and an analyzer, does not need to add an additional phase delay wave plate (a half wave plate and a quarter wave plate) in the light path, does not need to rotate or move any part, can realize the real-time detection of large-caliber stress birefringence, and avoids errors introduced by the wave plate and a motion platform.
(2) The method is based on four-point equidistant polarized light intensity acquisition, does not need a splicing algorithm, can simultaneously obtain the stress distribution of the whole large-caliber sample, and is easy to integrate with the existing large-caliber interference light path.
(3) The method can theoretically measure the stress of any caliber element, especially the optical element with the caliber of 1m and above.
Drawings
Fig. 1 is a schematic structural diagram of the whole detection device.
Fig. 2 is a schematic diagram of a collimated beam path.
FIG. 3 is a schematic diagram of the target surface structure of the polarization camera.
The figure number mark comprises a linearly polarized light source 1, a converging lens 2, a light splitting prism 3, a beam expanding and collimating lens 4, a component to be tested 5, a standard reflector 6, a beam expanding and collimating lens 7 and a polarization camera 8.
In order to make the above objects, features and advantages of the present invention more comprehensible, the following description of the embodiments accompanied with figures further describes the technical aspects of the present invention.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all embodiments of the invention. All other embodiments, which can be made by one of ordinary skill in the art without creative efforts, are within the scope of the present invention based on the embodiments of the present invention.
It should be noted that all directional indicators (such as up, down, left, right, front, and rear are used in the embodiments of the present invention) are merely for explaining the relative positional relationship, movement conditions, and the like between the components in a certain specific posture (as shown in the drawings), and if the specific posture is changed, the directional indicators are changed accordingly.
Furthermore, descriptions such as those referred to as "first," "second," and the like, are provided for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implying an order of magnitude of the indicated technical features in the present disclosure. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.
In addition, the technical solutions of the embodiments of the present invention may be combined with each other, but it is necessary to base that the technical solutions can be implemented by those skilled in the art, and when the technical solutions are contradictory or cannot be implemented, the combination of the technical solutions should be considered to be absent, and not included in the scope of protection claimed in the present invention.
Referring to fig. 1-3, the large-caliber optical stress detection device of the invention comprises a linearly polarized light source 1, a converging lens 2, a beam splitting prism 3, a first collimating lens 4, a standard reflecting mirror 6, a second collimating lens 7 and a polarization camera 8, wherein the linearly polarized light source 1, the converging lens 2, the beam splitting prism 3, the first collimating lens 4, an element to be detected 5 and the standard reflecting mirror 6 are sequentially arranged on a common first optical axis, and the second collimating lens 7 and the polarization camera 8 are sequentially arranged on a common second optical axis.
In this embodiment, the linearly polarized light source 1 emits laser, after being converged by the converging lens 2, the laser is transmitted by the beam splitting prism 3, the beam is expanded and collimated by the collimating lens 4, after passing through the element 5 to be measured, phase delay is generated, the light carrying the stress information of the element 5 to be measured is reflected by the standard reflector 6 along the original light path to be reflected to the beam splitting prism 3, reflected by the beam splitting prism 3, received by the polarization camera 8 after passing through the second collimating lens 7, the light passes through the element 5 to be measured twice in total, and finally the stress birefringence is twice as high as the actual value.
The linearly polarized light source 1 generates linearly polarized laser light including o light and e light, and no zero-order wave plate is required to be additionally added in the optical path to change the phase.
The four polarization units of the target surface of the polarization camera 8 are integrated, and the four polarization units are respectively 0 degrees, 45 degrees, 90 degrees and 135 degrees, so that an additional optical filter or an analyzer is not required to be added before the polarization camera 8 when light is collected, the structure of the whole system is simplified, a certain device is not required to be manually rotated by the whole system, and the problem that materials must be rotated when the stress of materials is detected by the traditional quarter wave plate method is solved.
The o light and the e light are overlapped at the target surface of the polarization camera, the light intensity information is received by each polarization unit (0 DEG, 45 DEG, 90 DEG and 135 DEG) of the polarization camera, the measurement of the stress of the element to be measured is converted into the measurement of the intensity of the light received by each polarization unit, and the stress of the large-caliber optical element is intuitively reflected through the light intensity information.
The detection method of the large-caliber optical stress detection device comprises the following steps of:
Step 1, a first optical axis light path is firstly built, and a linearly polarized light source 1, a converging lens 2, a beam splitting prism 3, a first collimating lens 4 and a standard reflecting mirror 6 are adjusted to be in a coaxial state under the condition that no element to be detected is added.
And 2, placing a beam expansion collimating lens 7 at a second optical axis, so that the light reflected by the standard reflector 6 is received by the target surface of the polarization camera after beam expansion collimation.
Step 3, rotating the polarization camera 8 to enable the emergent direction of the linearly polarized light to be parallel to a 90-degree unit of the polarization camera, and setting the initial linearly polarized light to be along the y-axis direction, wherein the amplitude is 2a, and the complex amplitude E of the linearly polarized light emitted by the linearly polarized light source 1 is as follows:
E=2a cos ωt
where ω represents angular frequency and t represents time.
Step 4, placing the element 5 to be measured between the first collimating lens 4 and the standard reflecting mirror 6, wherein after the linearly polarized light passes through the element 5 to be measured, o light and e light can be generated due to the existence of crystal birefringence effectAssuming that the angle between the fast axis direction of the element 5 to be measured and the incident linearly polarized light is alpha, the linearly polarized light undergoes birefringence phase difference to beThe complex amplitude E x in the x direction and the complex amplitude E y in the y direction after the element 5 to be measured are respectively:
The complex amplitudes P 0、P45、P90、P135 received by the 0 °, 45 °, 90 °, 135 ° units of the polarization camera 8 are respectively:
according to the formula, the light intensity information I 0、I45、I90、I135 respectively collected in the four polarization directions can be obtained:
step 5, light passes through the element 5 to be detected twice, finally irradiates on the target surface of the polarization camera 8, and the four polarization units acquire light intensity information I 0、I45、I90、I135 respectively, so that the above formula is simplified, and the light intensity information I 0、I45、I90、I135 is obtained:
from the light intensity information of three units, the amplitude 2a, the angle alpha between the fast axis direction of the element 5 to be measured and the incident linear polarized light and the phase difference are obtained
It should be noted that the test light in the optical path passes through the device to be tested twice, so that the obtained stress is twice as large as the actual stress.
Claims (5)
1. The large-caliber optical stress detection device is characterized by comprising a linearly polarized light source (1), a converging lens (2), a beam splitting prism (3), a first collimating lens (4), a standard reflecting mirror (6), a second collimating lens (7) and a polarization camera (8), wherein the linearly polarized light source (1), the converging lens (2), the beam splitting prism (3), the first collimating lens (4), an element to be detected (5) and the standard reflecting mirror (6) are sequentially arranged on a first optical axis, the second collimating lens (7) and the polarization camera (8) are sequentially arranged on a second optical axis, the first optical axis is positioned on a transmission optical path of the beam splitting prism (3), and the second optical axis is positioned on a reflection optical path of the beam splitting prism (3);
The linearly polarized light source (1) emits laser, after being converged by the converging lens (2), the laser is transmitted by the beam splitting prism (3), the beam is expanded and collimated by the first collimating lens (4), after passing through the element (5) to be detected, phase delay is generated, the light carrying the stress information of the element (5) to be detected is reflected by the standard reflecting mirror (6) to be reflected to the beam splitting prism (3) along the original light path, is reflected by the beam splitting prism (3), is received by the polarization camera (8) after passing through the second collimating lens (7), the light passes through the element (5) to be detected twice in total, and finally the solved stress birefringence size is twice the actual value.
2. The large-caliber optical stress detection device according to claim 1, wherein the linearly polarized light source (1) generates linearly polarized laser light comprising o light and e light.
3. The large-caliber optical stress detection device according to claim 1, wherein the target surface of the polarization camera (8) is integrated with four polarization units of 0 degrees, 45 degrees, 90 degrees and 135 degrees.
4. A detection method of a large-caliber optical stress detection device according to any one of claims 1 to 3, characterized by comprising the steps of:
Firstly, a first optical axis light path is built, and under the condition that an element to be detected is not added, a linearly polarized light source (1), a converging lens (2), a beam splitting prism (3), a first collimating lens (4) and a standard reflecting mirror (6) are adjusted to be in a coaxial state;
Step 2, a second collimating lens (7) is placed at a second optical axis, so that light rays reflected by the standard reflecting mirror (6) are received by a target surface of a polarization camera (8) after beam expansion and collimation;
Step 3, rotating the polarization camera (8) to enable the emergent direction of the linearly polarized light to be parallel to a 90-degree unit of the polarization camera (8), and setting the initial linearly polarized light to be along the y-axis direction and the amplitude to be 2a, wherein the complex amplitude E of the linearly polarized light emitted by the linearly polarized light source (1) is as follows:
E=2a cosωt
wherein ω represents angular frequency and t represents time;
Step 4, the element to be measured (5) is arranged between the first collimating lens (4) and the standard reflecting mirror (6), and after the linearly polarized light passes through the element to be measured (5), o light and e light can generate due to the existence of crystal birefringence effect The phase difference between the fast axis direction of the element (5) to be measured and the incident linear polarized light is alpha, the linear polarized light is subjected to birefringence phase difference to beAfter the element (5) to be measured, the complex amplitude E x in the x direction and the complex amplitude E y in the y direction are respectively:
the complex amplitudes P 0、P45、P90、P135 received by the 0 °, 45 °, 90 °, 135 ° units of the polarization camera (8) are respectively:
The obtained light intensity information I 0、I45、I90、I135 collected by the four polarization units is respectively:
Step 5, light passes through the element (5) to be detected twice, finally irradiates on the target surface of the polarization camera (8), and the four polarization units acquire light intensity information I 0、I45、I90、I135 respectively, so that the above is simplified, and the light intensity information I 0、I45、I90、I135 is obtained:
from the light intensity information of the three polarization units, the amplitude 2a, the angle alpha between the fast axis direction of the element (5) to be measured and the incident linear polarized light and the phase difference are obtained
5. The method for detecting a large-caliber optical stress detecting device according to claim 4, wherein the optical element having a caliber of 1m or more can be detected.
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| CN115265868B (en) * | 2022-09-29 | 2022-12-16 | 江苏延陵玻璃有限公司 | Heterogeneous vacuum glass surface stress detection device |
| CN116007908B (en) * | 2023-03-27 | 2023-06-02 | 中国工程物理研究院激光聚变研究中心 | Device and method for measuring high-transmittance and high-reflectance and non-uniformity of large-caliber flat plate element |
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