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CN114518218A - Method and device for measuring loss in solid laser cavity - Google Patents

Method and device for measuring loss in solid laser cavity Download PDF

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CN114518218A
CN114518218A CN202210150755.4A CN202210150755A CN114518218A CN 114518218 A CN114518218 A CN 114518218A CN 202210150755 A CN202210150755 A CN 202210150755A CN 114518218 A CN114518218 A CN 114518218A
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waist spot
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CN114518218B (en
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张娜娜
郭永瑞
张彬
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Chongqing University of Post and Telecommunications
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Abstract

本发明公开了一种测量固体激光器腔内损耗的方法及装置,该方法首先根据激光器的注入泵浦功率和对应的激光输出功率绘制激光器的输入‑输出功率曲线,然后通过测量的激光器的激光阈值,结合得到的输入‑输出功率曲线,在高于激光阈值处读取一组注入泵浦功率对应的激光输出功率,计算得到激光器的斜效率,接着在注入泵浦功率处,利用ABCD矩阵计算得到激光晶体处谐振腔模腰斑大小,最后利用计算得到激光器斜效率和激光晶体处谐振腔模腰斑与泵浦激光腰斑的比值的平方值,以实现快速且准确地计算得到激光器的腔内损耗值,该方法可以兼顾单横模、单纵模、多模输出的基频光固体激光器腔内损耗的测量。

Figure 202210150755

The invention discloses a method and device for measuring the loss in the cavity of a solid laser. The method first draws the input-output power curve of the laser according to the injection pump power of the laser and the corresponding laser output power, and then uses the measured laser threshold value of the laser. , combined with the obtained input-output power curve, read a set of laser output power corresponding to the injection pump power above the laser threshold, calculate the slope efficiency of the laser, and then at the injection pump power, use the ABCD matrix to calculate The size of the resonator mode waist spot at the laser crystal, and finally the laser slope efficiency and the square value of the ratio of the resonator mode waist spot at the laser crystal to the pump laser waist spot are calculated to achieve fast and accurate calculation of the laser cavity. This method can take into account the measurement of the loss in the cavity of the fundamental frequency optical solid-state laser with single transverse mode, single longitudinal mode and multi-mode output.

Figure 202210150755

Description

一种测量固体激光器腔内损耗的方法及装置A method and device for measuring the loss in a solid-state laser cavity

技术领域technical field

本发明涉及激光技术领域,具体涉及一种测量固体激光器腔内损耗的方法及装置。The invention relates to the field of laser technology, in particular to a method and a device for measuring the loss in a solid-state laser cavity.

背景技术Background technique

在固体激光器的生产、研发及维护中,激光器的腔内损耗会通过影响激光增益限制激光的输出功率,腔内损耗作为衡量激光器质量的一个重要指标参数,如何准确测量激光器的腔内损耗有助于指导激光谐振腔的优化设计,优化激光器输出性能和使用寿命。In the production, development and maintenance of solid-state lasers, the intra-cavity loss of the laser will limit the output power of the laser by affecting the laser gain. The intra-cavity loss is an important index parameter to measure the quality of the laser. How to accurately measure the intra-cavity loss of the laser will help It is used to guide the optimal design of the laser resonator and optimize the output performance and service life of the laser.

目前测量激光器墙内损耗一般采用Findlay-Clay分析法、速率方程、基于激光功率和弛豫振荡频率的方法、利用非线性损耗测量全固态内腔倍频激光器腔内线性损耗的方法。Findlay-Clay分析法在操作中需要更换几组输出耦合透射率,这种操作难免改变激光器谐振腔的结构,给测量结果带来误差,同时该方法对于已经封装好的激光器无能为力;速率方程在分析过程中采用了多种近似,要求对低增益激光介质的能级跃迁过程必须有一个全面的分析,该种方法难以适用于高增益激光器腔内损耗的测量;基于激光功率和弛豫振荡频率测量腔内损耗方法,必须在单纵模稳定运转状态的场景下应用,否则当激光器存在模式跳变时,虽然激光功率变化不大,但是弛豫振荡频率却会有较大范围的变化,给测量结果带来较大误差,无法对有多个振荡频率的单横模激光器以及多模运转激光器进行腔内损耗的测量;利用非线性损耗测量全固态内腔倍频激光器腔内线性损耗的方法,通过在单频区域内测量倍频晶体的两个工作温度点对应的基波和二次谐波输出功率,然后代入激光器腔内线性损耗表达式中计算激光器的腔内线性损耗值,该种方法无法对多模运转激光器、无腔内倍频过程激光器进行腔内损耗。At present, the Findlay-Clay analysis method, rate equation, method based on laser power and relaxation oscillation frequency, and the method of using nonlinear loss to measure the linear loss in the cavity of an all-solid-state intra-cavity frequency-doubling laser are generally used to measure the loss in the laser wall. The Findlay-Clay analysis method needs to replace several groups of output coupling transmittances during operation. This operation will inevitably change the structure of the laser resonator, which will bring errors to the measurement results. At the same time, this method cannot do anything for the packaged laser; the rate equation is analyzed in the analysis A variety of approximations are used in the process, which requires a comprehensive analysis of the energy level transition process of the low-gain laser medium. This method is difficult to apply to the measurement of the intra-cavity loss of high-gain lasers; measurement based on laser power and relaxation oscillation frequency The intra-cavity loss method must be applied in the scenario of single longitudinal mode stable operation. Otherwise, when the laser has mode hopping, although the laser power does not change much, the relaxation oscillation frequency will change in a large range. As a result, large errors are brought about, and it is impossible to measure the intra-cavity loss of single-transverse-mode lasers with multiple oscillation frequencies and multi-mode operating lasers; the method of measuring the linear loss in the cavity of an all-solid-state intra-cavity frequency-doubling laser by using nonlinear loss, By measuring the fundamental wave and the second harmonic output power corresponding to the two operating temperature points of the frequency-doubling crystal in the single frequency region, and then substituting into the expression of the laser cavity linear loss to calculate the laser cavity linear loss value, this method Intra-cavity loss cannot be performed on multi-mode operating lasers and lasers without intra-cavity frequency doubling.

发明内容SUMMARY OF THE INVENTION

本发明要解决的技术问题为目前测量激光器腔内损耗的方法无法兼顾多种模式下的激光器,因此,本发明提供一种测量固体激光器腔内损耗的方法及装置,以兼顾单横模、单纵模、多模输出的基频光固体激光器腔内损耗的测量。The technical problem to be solved by the present invention is that the current method for measuring the loss in the laser cavity cannot take into account the lasers in multiple modes. Therefore, the present invention provides a method and device for measuring the loss in the cavity of a solid laser, which can take into account the single transverse mode, single Intracavity loss measurement of fundamental frequency optical solid-state lasers with longitudinal mode and multimode output.

本发明通过下述技术方案实现:The present invention is achieved through the following technical solutions:

一种测量固体激光器腔内损耗的方法,包括:A method for measuring loss in a solid-state laser cavity, comprising:

获取被测激光器的注入泵浦功率和对应的激光输出功率,并基于所述注入泵浦功率和所述激光输出功率绘制输入-输出功率曲线;Obtain the injection pump power and the corresponding laser output power of the laser under test, and draw an input-output power curve based on the injection pump power and the laser output power;

读取被测激光器的激光阈值,并在所述输入-输出功率曲线上高于激光阈值处选取一组注入泵浦功率和激光输出功率,计算激光斜效率;Read the laser threshold value of the tested laser, and select a group of injection pump power and laser output power at the input-output power curve higher than the laser threshold value, and calculate the laser slope efficiency;

获取泵浦激光腰斑,并在注入泵浦功率处,通过谐振腔矩阵计算激光晶体处谐振腔膜光斑;其中,所述泵浦激光腰斑指泵浦激光在激光晶体处的腰斑大小;Obtain the pump laser waist spot, and calculate the resonator film spot at the laser crystal through the resonator matrix at the injected pump power; wherein, the pump laser waist spot refers to the pump laser waist spot size at the laser crystal;

调用激光器腔内损耗计算公式对所述激光器斜效率、泵浦激光腰斑和激光晶体处谐振腔模腰斑进行计算,得到激光器的腔内损耗值。The laser cavity loss calculation formula is called to calculate the laser oblique efficiency, the pump laser waist spot and the resonant cavity mode waist spot at the laser crystal, and the laser cavity loss value is obtained.

进一步地,所述获取被测激光器的注入泵浦功率和对应的激光输出功率,包括:Further, obtaining the injection pump power and the corresponding laser output power of the laser under test includes:

通过向被测激光器中注入泵浦激光功率,被测激光器中的功率计基于所述注入泵浦激光功率计算得到对应的激光输出功率。By injecting pump laser power into the laser under test, the power meter in the laser under test calculates the corresponding laser output power based on the injected pump laser power.

进一步地,所述读取被测激光器的激光阈值,并在所述输入-输出功率曲线上高于激光阈值处选取一组注入泵浦功率和激光输出功率,计算激光斜效率,包括:Further, the laser threshold value of the laser under test is read, and a group of injection pump power and laser output power are selected on the input-output power curve higher than the laser threshold value, and the laser slope efficiency is calculated, including:

调用激光斜效率计算公式对选取的注入泵浦功率、输出功率和激光阈值进行计算,得到激光斜效率;Call the calculation formula of laser slope efficiency to calculate the selected injection pump power, output power and laser threshold to obtain the laser slope efficiency;

其中,所述激光斜效率计算公式具体为:Wherein, the calculation formula of the laser oblique efficiency is specifically:

Figure BDA0003510375050000031
Figure BDA0003510375050000031

式中,ηs表示激光斜效率,Pout表示选取的输出功率,Pin表示选取的输入功率,Pth表示激光阈值。In the formula, η s represents the laser slope efficiency, P out represents the selected output power, P in represents the selected input power, and P th represents the laser threshold.

进一步地,所述调用激光器腔内损耗计算公式对所述激光器斜效率、泵浦激光腰斑和激光晶体处谐振腔模腰斑进行计算,得到激光器的腔内损耗值,包括:Further, the invoking laser cavity loss calculation formula is used to calculate the laser oblique efficiency, the pump laser waist spot and the resonant cavity mode waist spot at the laser crystal to obtain the laser cavity loss value, including:

基于泵浦激光腰斑和激光晶体处谐振腔模腰斑,计算激光晶体处谐振腔模腰斑与泵浦激光腰斑比值的平方值;Based on the pump laser waist spot and the cavity mode waist spot at the laser crystal, calculate the square value of the ratio of the resonator cavity mode waist spot at the laser crystal to the pump laser waist spot;

调用激光器腔内损耗计算公式对所述激光器斜效率、所述激光晶体处谐振腔模腰斑与泵浦激光腰斑比值的平方值进行计算,得到激光器的腔内损耗值。Call the laser cavity loss calculation formula to calculate the laser oblique efficiency and the square value of the ratio of the resonant cavity mode waist spot at the laser crystal to the pump laser waist spot to obtain the laser cavity loss value.

进一步地,所述激光器腔内损耗计算公式具体为:Further, the calculation formula of the laser cavity loss is specifically:

Figure BDA0003510375050000032
Figure BDA0003510375050000032

式中,δ表示激光器腔内损耗;ηa表示增益介质对泵浦激光的吸收效率,ηa=1-exp(-αl),其中,α表示被测激光器中增益介质对泵浦激光的吸收系数,l表示增益介质的径向长度;ηs表示激光斜效率;νl表示输出激光频率,νp表示泵浦激光频率,T表示被测激光器中的输出耦合镜的透射率;β表示激光晶体处谐振腔模腰斑与泵浦激光腰斑比值的平方值,

Figure BDA0003510375050000033
其中,ωl表示激光晶体处谐振腔模腰斑的大小,ωp表示泵浦激光腰斑的大小。In the formula, δ represents the laser cavity loss; η a represents the absorption efficiency of the pump laser by the gain medium, η a =1-exp(-αl), where α represents the absorption of the pump laser by the gain medium in the measured laser coefficient, l represents the radial length of the gain medium; η s represents the laser slope efficiency; ν l represents the output laser frequency, ν p represents the pump laser frequency, T represents the transmittance of the output coupling mirror in the laser under test; β represents the laser The square value of the ratio of the resonator cavity mode waist spot to the pump laser waist spot at the crystal,
Figure BDA0003510375050000033
Among them, ω l represents the size of the cavity mode waist spot at the laser crystal, and ω p represents the size of the pump laser waist spot.

进一步地,所述被测激光器包括泵浦激光源、耦合系统、功率计、由输入耦合镜、第一高反镜、第二高反镜和输出耦合镜形成的激光谐振腔,所述激光谐振腔依次设置有激光晶体和光学单向器;Further, the laser under test includes a pump laser source, a coupling system, a power meter, a laser resonant cavity formed by an input coupling mirror, a first high-reflection mirror, a second high-reflection mirror and an output coupling mirror. The cavity is sequentially provided with a laser crystal and an optical unidirectional device;

泵浦激光源发射激光,经耦合系统耦合后传输给输入耦合镜,输入耦合镜将接收到的激光经激光晶体和光学单向器发送给第一高反镜,第一高反镜将接收到的激光反射给第二高反镜,第二高反镜将接收到的激光传输给输出耦合镜,输出耦合镜将接收到的激光发送给输入耦合镜;功率计9用于测量输出耦合镜6输出激光时的输出功率。The pump laser source emits laser light, which is coupled by the coupling system and then transmitted to the input coupling mirror. The laser reflected by the second high-reflection mirror, the second high-reflection mirror transmits the received laser light to the output coupling mirror, and the output coupling mirror sends the received laser light to the input coupling mirror; the power meter 9 is used to measure the output coupling mirror 6 The output power when outputting the laser.

进一步地,所述泵浦激光源采用光纤耦合激光二极管,所述输入耦合镜采用凹透镜,所述第一高反镜采用凸透镜,所述第二高反镜和所述输出耦合镜平凹透镜。Further, the pump laser source adopts a fiber-coupled laser diode, the input coupling mirror adopts a concave lens, the first high-reflection mirror adopts a convex lens, the second high-reflection mirror and the output coupling mirror plano-concave lens.

一种测量固体激光器腔内损耗的装置,包括:A device for measuring the loss in a solid-state laser cavity, comprising:

输入-输出功率曲线绘制模块,用于获取被测激光器的注入泵浦功率和对应的激光输出功率,并基于所述注入泵浦功率和所述激光输出功率绘制输入-输出功率曲线;an input-output power curve drawing module, used to obtain the injection pump power and the corresponding laser output power of the laser under test, and draw an input-output power curve based on the injection pump power and the laser output power;

激光斜效率计算模块,用于读取被测激光器的激光阈值,并在所述输入-输出功率曲线上高于激光阈值处选取一组注入泵浦功率和激光输出功率,计算激光斜效率;a laser slope efficiency calculation module, used to read the laser threshold value of the laser under test, and select a group of injected pump power and laser output power at the input-output power curve higher than the laser threshold value to calculate the laser slope efficiency;

腔内损耗值计算参数获取模块,用于获取泵浦激光腰斑,并在注入泵浦功率处,通过谐振腔矩阵计算激光晶体处谐振腔膜光斑;其中,所述泵浦激光腰斑指泵浦激光在激光晶体处的腰斑大小;The parameter acquisition module for calculating the loss value in the cavity is used to obtain the pump laser waist spot, and at the injected pump power, the resonator film spot at the laser crystal is calculated through the resonator matrix; wherein, the pump laser waist spot refers to the pump The size of the waist spot of the Pu laser at the laser crystal;

腔内损耗值计算模块,调用激光器腔内损耗计算公式对所述激光器斜效率、泵浦激光腰斑和激光晶体处谐振腔模腰斑进行计算,得到激光器的腔内损耗值。The intra-cavity loss value calculation module calls the laser intra-cavity loss calculation formula to calculate the laser slant efficiency, the pump laser waist spot and the resonant cavity mode waist spot at the laser crystal, and obtains the laser's intra-cavity loss value.

进一步地,所述腔内损耗值计算模块包括:Further, the in-cavity loss value calculation module includes:

腔内损耗值第一计算单元,用于计算基于泵浦激光腰斑和激光晶体处谐振腔模腰斑,计算激光晶体处谐振腔模腰斑与泵浦激光腰斑比值的平方值;The first calculation unit of the intra-cavity loss value is used to calculate the square value of the ratio of the resonant cavity mode waist spot at the laser crystal to the pump laser waist spot based on the pump laser waist spot and the resonant cavity mode waist spot at the laser crystal;

腔内损耗值第二计算单元,用于调用激光器腔内损耗计算公式对所述激光器斜效率、所述激光晶体处谐振腔模腰斑与泵浦激光腰斑比值的平方值进行计算,得到激光器的腔内损耗值。The second calculation unit for the intra-cavity loss value is used to call the laser intra-cavity loss calculation formula to calculate the laser slope efficiency, the square value of the ratio of the resonant cavity mode waist spot at the laser crystal to the pump laser waist spot, and obtain the laser The cavity loss value.

进一步地,所述激光器腔内损耗计算公式具体为:Further, the calculation formula of the laser cavity loss is specifically:

Figure BDA0003510375050000051
Figure BDA0003510375050000051

式中,δ表示激光器腔内损耗;ηa表示增益介质对泵浦激光的吸收效率,ηa=1-exp(-αl),其中,α表示被测激光器中增益介质对泵浦激光的吸收系数,l表示增益介质的径向长度;ηs表示激光斜效率;vl表示输出激光频率,vp表示泵浦激光频率,T表示被测激光器中的输出耦合镜的透射率;β表示激光晶体处谐振腔模腰斑与泵浦激光腰斑比值的平方值,

Figure BDA0003510375050000052
其中,ωl表示激光晶体处谐振腔模腰斑的大小,ωp表示泵浦激光腰斑的大小。In the formula, δ represents the laser cavity loss; η a represents the absorption efficiency of the pump laser by the gain medium, η a =1-exp(-αl), where α represents the absorption of the pump laser by the gain medium in the measured laser coefficient, l represents the radial length of the gain medium; η s represents the laser slope efficiency; v l represents the output laser frequency, v p represents the pump laser frequency, T represents the transmittance of the output coupling mirror in the laser under test; β represents the laser The square value of the ratio of the resonator cavity mode waist spot to the pump laser waist spot at the crystal,
Figure BDA0003510375050000052
Among them, ω l represents the size of the cavity mode waist spot at the laser crystal, and ω p represents the size of the pump laser waist spot.

本发明提供了一种测量固体激光器腔内损耗的方法及装置,首先根据激光器的注入泵浦功率和对应的激光输出功率绘制激光器的输入-输出功率曲线,然后通过测量的激光器的激光阈值,结合得到的输入-输出功率曲线,在高于激光阈值处读取一组注入泵浦功率对应的激光输出功率,计算得到激光器的斜效率,接着在注入泵浦功率处,利用ABCD矩阵计算得到激光晶体处谐振腔模腰斑大小,最后利用计算得到激光器斜效率和激光晶体处谐振腔模腰斑与泵浦激光腰斑的比值的平方值,以实现快速且准确地计算得到激光器的腔内损耗值,该方法可以兼顾单横模、单纵模、多模输出的基频光固体激光器腔内损耗的测量。The invention provides a method and a device for measuring the loss in a solid-state laser cavity. First, the input-output power curve of the laser is drawn according to the injection pump power of the laser and the corresponding laser output power, and then the measured laser threshold value of the laser is combined with The obtained input-output power curve, read a set of laser output power corresponding to the injection pump power above the laser threshold, calculate the slope efficiency of the laser, and then use the ABCD matrix to calculate the laser crystal at the injection pump power. The size of the mode waist spot of the resonator at the laser crystal is calculated, and finally the laser slant efficiency and the square value of the ratio of the resonator mode waist spot to the pump laser waist spot at the laser crystal are calculated to realize the fast and accurate calculation of the intra-cavity loss value of the laser. , the method can take into account the measurement of the loss in the cavity of the fundamental frequency optical solid-state laser with single transverse mode, single longitudinal mode and multi-mode output.

附图说明Description of drawings

此处所说明的附图用来提供对本发明实施例的进一步理解,构成本申请的一部分,并不构成对本发明实施例的限定。在附图中:The accompanying drawings described herein are used to provide further understanding of the embodiments of the present invention, and constitute a part of the present application, and do not constitute limitations to the embodiments of the present invention. In the attached image:

图1为本发明一种测量固体激光器腔内损耗的方法的流程图。FIG. 1 is a flowchart of a method for measuring the loss in a solid-state laser cavity according to the present invention.

图2为本发明图1中步骤S40的一具体流程图。FIG. 2 is a specific flowchart of step S40 in FIG. 1 of the present invention.

图3为本发明一具体实施例中被测激光器的原理示意图。FIG. 3 is a schematic diagram of the principle of the laser under test in a specific embodiment of the present invention.

图4为本发明一具体实施例中输入-输出功率曲线图。FIG. 4 is an input-output power curve diagram in a specific embodiment of the present invention.

图5为本发明一种测量固体激光器腔内损耗的装置的示意图。FIG. 5 is a schematic diagram of a device for measuring the loss in a solid-state laser cavity according to the present invention.

具体实施方式Detailed ways

为使本发明的目的、技术方案和优点更加清楚明白,下面结合实施例和附图,对本发明作进一步的详细说明,本发明的示意性实施方式及其说明仅用于解释本发明,并不作为对本发明的限定。In order to make the purpose, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the embodiments and the accompanying drawings. as a limitation of the present invention.

实施例1Example 1

如图1所示,本发明提供一种测量固体激光器腔内损耗的方法,包括:As shown in FIG. 1 , the present invention provides a method for measuring the loss in a solid-state laser cavity, including:

S10:获取被测激光器的注入泵浦功率Pin和对应的激光输出功率Pout,并基于注入泵浦功率Pin和激光输出功率Pout绘制输入-输出功率曲线。S10: Obtain the injection pump power P in and the corresponding laser output power P out of the laser under test, and draw an input-output power curve based on the injection pump power P in and the laser output power P out .

具体地,通过向被测激光器中注入泵浦激光功率Pin,被测激光器中的功率计基于注入泵浦激光功率计算得到对应的激光输出功率PoutSpecifically, by injecting the pump laser power P in into the laser under test, the power meter in the laser under test calculates the corresponding laser output power P out based on the injected pump laser power.

如图3所示,本实施例中的被测激光器包括泵浦激光源1、耦合系统2、功率计9、由输入耦合镜3、第一高反镜4、第二高反镜5和输出耦合镜6形成的激光谐振腔,激光谐振腔依次设置有激光晶体7和光学单向器8。As shown in FIG. 3, the laser under test in this embodiment includes a pump laser source 1, a coupling system 2, a power meter 9, an input coupling mirror 3, a first high-reflection mirror 4, a second high-reflection mirror 5 and an output The laser resonator formed by the coupling mirror 6 is provided with a laser crystal 7 and an optical unidirectional device 8 in sequence.

具体地,泵浦激光源1发射激光,经耦合系统2耦合后传输给输入耦合镜3,输入耦合镜3将接收到的光经激光晶体7和光学单向器8发送给第一高反镜4,第一高反镜4将接收到的光反射给第二高反镜5,第二高反镜5将接收到的光传输给输出耦合镜6,输出耦合镜6将接收到的光发送给输入耦合镜3。功率计9用于测量输出耦合镜6输出激光时的激光输出功率,以方便后续绘制激光器输入-输出功率曲线。Specifically, the pump laser source 1 emits laser light, which is coupled by the coupling system 2 and then transmitted to the input coupling mirror 3, and the input coupling mirror 3 sends the received light to the first high-reflection mirror through the laser crystal 7 and the optical unidirectional device 8 4. The first high-reflection mirror 4 reflects the received light to the second high-reflection mirror 5, the second high-reflection mirror 5 transmits the received light to the output coupling mirror 6, and the output coupling mirror 6 sends the received light to the input coupling mirror 3. The power meter 9 is used to measure the laser output power when the output coupling mirror 6 outputs laser light, so as to facilitate the subsequent drawing of the laser input-output power curve.

进一步地,泵浦激光源1采用光纤耦合激光二极管,输入耦合镜3采用凹透镜,第一高反镜4采用凸透镜,第二高反镜5和输出耦合镜6平凹透镜。Further, the pump laser source 1 adopts a fiber-coupled laser diode, the input coupling mirror 3 adopts a concave lens, the first high reflection mirror 4 adopts a convex lens, and the second high reflection mirror 5 and the output coupling mirror 6 adopt a plano-concave lens.

S20:读取被测激光器的激光阈值Pth,并在输入-输出功率曲线上高于激光阈值Pth处选取一组注入泵浦功率Pin和激光输出功率,计算激光斜效率。S20: Read the laser threshold P th of the laser under test, and select a group of injection pump power P in and laser output power at the input-output power curve higher than the laser threshold P th , and calculate the laser slope efficiency.

具体地,读取被测激光器的激光阈值,并在输入-输出功率曲线上高于激光阈值处选取一组注入泵浦功率和激光输出功率,调用激光斜效率计算公式对选取的注入泵浦功率、输出功率和激光阈值进行计算,得到激光斜效率。Specifically, read the laser threshold of the laser under test, select a set of injection pump power and laser output power at the input-output power curve higher than the laser threshold, and call the laser slope efficiency calculation formula for the selected injection pump power. , output power and laser threshold are calculated to obtain the laser slope efficiency.

其中,激光斜效率计算公式具体为:Among them, the calculation formula of laser oblique efficiency is as follows:

Figure BDA0003510375050000071
Figure BDA0003510375050000071

式中,ηs表示激光斜效率,Pout表示选取的输出功率,Pin表示选取的输入功率,Pth表示激光阈值。In the formula, η s represents the laser slope efficiency, P out represents the selected output power, P in represents the selected input power, and P th represents the laser threshold.

S30:获取泵浦激光腰斑,并在注入泵浦功率处,通过谐振腔矩阵计算激光晶体处谐振腔膜光斑;其中,泵浦激光腰斑指泵浦激光在激光晶体处的腰斑大小。S30: Obtain the pump laser waist spot, and calculate the resonator film spot at the laser crystal through the resonator matrix at the injected pump power; the pump laser waist spot refers to the pump laser waist spot size at the laser crystal.

具体地,获取泵浦激光腰斑,并在注入泵浦功率处,通过谐振腔ABCD矩阵计算激光晶体处谐振腔膜光斑。Specifically, the pump laser waist spot is obtained, and at the injected pump power, the resonator film spot at the laser crystal is calculated through the resonator ABCD matrix.

S40:调用激光器腔内损耗计算公式对激光器斜效率、泵浦激光腰斑和激光晶体处谐振腔模腰斑进行计算,得到激光器的腔内损耗值。S40: Call the laser cavity loss calculation formula to calculate the laser oblique efficiency, the pump laser waist spot and the resonator cavity mode waist spot at the laser crystal, and obtain the laser cavity loss value.

进一步地,如图2所示,步骤S40,调用激光器腔内损耗计算公式对激光器斜效率、泵浦激光腰斑和激光晶体处谐振腔模腰斑进行计算,得到激光器的腔内损耗值,具体包括如下步骤:Further, as shown in FIG. 2, in step S40, the calculation formula of the laser cavity loss is called to calculate the laser slant efficiency, the pump laser waist spot and the resonant cavity mode waist spot at the laser crystal, and the laser cavity loss value is obtained. It includes the following steps:

S41:基于泵浦激光腰斑和激光晶体处谐振腔模腰斑,计算激光晶体处谐振腔模腰斑与泵浦激光腰斑比值的平方值。S41: Based on the pump laser waist spot and the resonator cavity mode waist spot at the laser crystal, calculate the square value of the ratio of the resonator cavity mode waist spot at the laser crystal to the pump laser waist spot.

S42:调用激光器腔内损耗计算公式对激光器斜效率、激光晶体处谐振腔模腰斑与泵浦激光腰斑比值的平方值进行计算,得到激光器的腔内损耗值。S42: Call the laser cavity loss calculation formula to calculate the laser oblique efficiency and the square value of the ratio of the resonator cavity mode waist spot at the laser crystal to the pump laser waist spot to obtain the laser cavity loss value.

具体地,激光器腔内损耗计算公式具体为:Specifically, the calculation formula of the laser cavity loss is as follows:

Figure BDA0003510375050000081
Figure BDA0003510375050000081

式中,δ表示激光器腔内损耗。ηa表示增益介质对泵浦激光的吸收效率,ηa=1-exp(-αl),其中,α表示被测激光器中增益介质对泵浦激光的吸收系数,l表示增益介质的径向长度。ηs表示激光斜效率。νl表示输出激光频率,νp表示泵浦激光频率,T表示被测激光器中的输出耦合镜的透射率。β表示激光晶体处谐振腔模腰斑与泵浦激光腰斑比值的平方值,

Figure BDA0003510375050000082
其中,ωl表示激光晶体处谐振腔模腰斑的大小,ωp表示泵浦激光腰斑的大小。In the formula, δ represents the laser cavity loss. η a represents the absorption efficiency of the gain medium to the pump laser, η a =1-exp(-αl), where α represents the absorption coefficient of the gain medium to the pump laser in the measured laser, and l represents the radial length of the gain medium . η s represents the laser slope efficiency. ν l is the output laser frequency, ν p is the pump laser frequency, and T is the transmittance of the output coupling mirror in the laser under test. β represents the square value of the ratio of the mode waist spot of the resonator cavity to the pump laser waist spot at the laser crystal,
Figure BDA0003510375050000082
Among them, ω l represents the size of the cavity mode waist spot at the laser crystal, and ω p represents the size of the pump laser waist spot.

为便于理解,通过如下举例进行说明:For ease of understanding, the following examples are used to illustrate:

被测激光器为四镜环形腔结构的全固态连续1064nm连续波激光器,输入耦合镜3采用曲率半径为1500mm的凹透镜,该凹透镜上镀有透光率大于99.5%、的888nm高透膜和反光率大于99.7%的1064nm高反膜;第一高反镜4采用曲率半径为1500mm的凸透镜,该凸透镜上镀有反光率大于99.7%的1064nm高反膜;第二高反镜5采用曲率半径为-100mm的平凹透镜,该平凹透镜上镀有反光率大于99.7%的1064nm高反膜;输出耦合镜6采用曲率半径为-100mm的平凹透镜,该平凹透镜上镀有透过率为20%的1064nm透光膜。The tested laser is an all-solid-state continuous 1064nm continuous wave laser with a four-mirror ring cavity structure. The input coupling mirror 3 adopts a concave lens with a curvature radius of 1500mm. The 1064nm high-reflection film is greater than 99.7%; the first high-reflection mirror 4 adopts a convex lens with a curvature radius of 1500mm, and the convex lens is coated with a 1064nm high-reflection film with a reflectivity greater than 99.7%; the second high-reflection mirror 5 adopts a curvature radius of - 100mm plano-concave lens, which is coated with a 1064nm high-reflection film with a reflectivity greater than 99.7%; the output coupling mirror 6 adopts a plano-concave lens with a curvature radius of -100mm, and the plano-concave lens is coated with 1064nm with a transmittance of 20%. Translucent film.

泵浦源1采用888nm的光纤耦合激光二极管,耦合光纤的纤芯直径为400μm,数值孔径为0.22;泵浦源1发射的激光经耦合系统2聚焦于激光晶体7中心处的腰斑为0.570mm;激光晶体7是由一块3mm未掺杂端盖,及20mm以0.8at.%掺Nd的复合YVO4/Nd:YVO4(S1,S2:AR888nm;1064nm),该激光晶体的后端切了一个1.5°的小角度,以保证激光稳定的偏振性。The pump source 1 adopts an 888nm fiber-coupled laser diode. The core diameter of the coupled fiber is 400μm and the numerical aperture is 0.22; ; The laser crystal 7 is composed of a 3mm undoped end cap and a 20mm composite YVO 4 /Nd:YVO 4 (S1, S2: AR 888nm; 1064nm ) doped with Nd at 0.8at.%. The back end of the laser crystal is cut A small angle of 1.5° is set to ensure the stable polarization of the laser.

为消除空间烧孔效应以及为达到激光的单向传播,激光谐振腔中使用了一个由8mm长的铽镓石榴石TGG晶体和半波片组成的光学单向器8。输入耦合镜3到激光晶体7中心的光程为10mm,激光晶体7中心到高反镜4的光程为120mm,高反镜4到高反镜5的光程为128mm,高反镜5和输出耦合镜6之间的光程为96mm,输出耦合镜6到输入的耦合镜3之间的光程为125mm。In order to eliminate the spatial hole burning effect and achieve the unidirectional propagation of the laser light, an optical unidirectional device 8 composed of an 8 mm long terbium gallium garnet TGG crystal and a half-wave plate is used in the laser resonator. The optical path from the input coupling mirror 3 to the center of the laser crystal 7 is 10mm, the optical path from the center of the laser crystal 7 to the high-reflection mirror 4 is 120mm, the optical path from the high-reflection mirror 4 to the high-reflection mirror 5 is 128mm, the high-reflection mirror 5 and The optical path between the output coupling mirrors 6 is 96 mm, and the optical path between the output coupling mirror 6 and the input coupling mirror 3 is 125 mm.

在注入808nm激光泵浦功率为58W时,激光晶体的等效热透镜焦距为137mm,利用谐振腔内ABCD矩阵计算得到激光晶体处谐振腔模ωl=0.347mm。根据增益介质对激光的吸收效率计算公式:ηa=1-exp(-αl),α=1.07/cm,l=20mm,计算得到该激光器晶体的吸收效率,同时根据泵浦激光源发射的激光和输出激光波段可计算得到:

Figure BDA0003510375050000091
通过升降888nm泵浦激光源的注入泵浦功率,用功率计9测量1064nm输出激光的激光输出功率,作出该激光器的输入-输出功率曲线,如图4所示。从图4读取激光阈值Pth=32.33W,在高于激光阈值处选取一组注入泵浦功率Pin=58W和对应的激光输出功率Pout=13.35W,根据公式
Figure BDA0003510375050000092
计算得到激光器实际的激光斜效率
Figure BDA0003510375050000093
When the 808nm laser pump power is 58W, the focal length of the equivalent thermal lens of the laser crystal is 137mm, and the resonator mode ω l =0.347mm at the laser crystal is calculated by using the ABCD matrix in the resonator. According to the calculation formula of the absorption efficiency of the gain medium to the laser: η a = 1-exp(-αl), α = 1.07/cm, l = 20mm, the absorption efficiency of the laser crystal is calculated, and according to the laser light emitted by the pump laser source and the output laser band can be calculated as:
Figure BDA0003510375050000091
By raising and lowering the injection pump power of the 888nm pump laser source, measuring the laser output power of the 1064nm output laser with a power meter 9, the input-output power curve of the laser is drawn, as shown in Figure 4. Read the laser threshold value P th =32.33W from FIG. 4 , select a set of injection pump power P in =58W and corresponding laser output power P out =13.35W above the laser threshold, according to the formula
Figure BDA0003510375050000092
Calculate the actual laser slope efficiency of the laser
Figure BDA0003510375050000093

将激光器的实际参数ηa=1-exp(-107*0.02),

Figure BDA0003510375050000094
Figure BDA0003510375050000095
激光器的输出耦合镜透射率T=20%,代入激光器腔内损耗计算公式
Figure BDA0003510375050000101
中进行计算,得到激光器的腔内损耗δ=5.28%。The actual parameter of the laser η a =1-exp(-107*0.02),
Figure BDA0003510375050000094
Figure BDA0003510375050000095
The transmittance of the output coupling mirror of the laser is T=20%, which is substituted into the calculation formula of the loss in the laser cavity
Figure BDA0003510375050000101
Calculation is carried out in , and the intracavity loss δ=5.28% of the laser is obtained.

需要说明的是,上述实施例中的数值仅为举例说明,并不用于限定本实施例的保护范围。It should be noted that the numerical values in the above embodiments are only for illustration, and are not intended to limit the protection scope of the present embodiments.

本发明提供的一种测量固体激光器腔内损耗的方法,首先根据激光器的注入泵浦功率和对应的激光输出功率绘制激光器的输入-输出功率曲线,然后通过测量的激光器的激光阈值,结合得到的输入-输出功率曲线,在高于激光阈值处读取一组注入泵浦功率对应的激光输出功率,计算得到激光器的斜效率,接着在注入泵浦功率处,利用ABCD矩阵计算得到激光晶体处谐振腔模腰斑大小,最后利用计算得到激光器斜效率和激光晶体处谐振腔模腰斑与泵浦激光腰斑的比值的平方值,以实现快速且准确地计算得到激光器的腔内损耗值,该方法可以兼顾单横模、单纵模、多模输出的基频光固体激光器腔内损耗的测量。The invention provides a method for measuring the loss in the cavity of a solid-state laser. First, draw the input-output power curve of the laser according to the injection pump power of the laser and the corresponding laser output power, and then combine the obtained laser threshold with the measured laser threshold. Input-output power curve, read a set of laser output power corresponding to the injection pump power above the laser threshold, calculate the slope efficiency of the laser, and then use the ABCD matrix to calculate the resonance at the laser crystal at the injection pump power The size of the cavity mode waist spot is finally calculated to obtain the laser oblique efficiency and the square value of the ratio of the resonant cavity mode waist spot at the laser crystal to the pump laser waist spot, so as to quickly and accurately calculate the cavity loss value of the laser. The method can take into account the measurement of the intra-cavity loss of the fundamental frequency optical solid-state laser with single transverse mode, single longitudinal mode and multi-mode output.

实施例2Example 2

如图5所示,本实施例提供一种与实施例1中一种测量固体激光器腔内损耗的方法一一对应的一种测量固体激光器腔内损耗的装置,包括输入-输出功率曲线绘制模块10、激光斜效率计算模块20、腔内损耗值计算参数获取模块30和腔内损耗值计算模块40。各功能模块详细说明如下:As shown in FIG. 5 , this embodiment provides a device for measuring the loss in the cavity of a solid-state laser, which corresponds one-to-one with the method for measuring the loss in the cavity of a solid-state laser in Embodiment 1, including an input-output power curve drawing module 10. The laser oblique efficiency calculation module 20 , the intracavity loss value calculation parameter acquisition module 30 and the intracavity loss value calculation module 40 . The detailed description of each functional module is as follows:

输入-输出功率曲线绘制模块10,用于输入-输出功率曲线绘制模块,用于获取被测激光器的注入泵浦功率和对应的激光输出功率,并基于注入泵浦功率和激光输出功率绘制输入-输出功率曲线。The input-output power curve drawing module 10 is used for the input-output power curve drawing module, which is used to obtain the injection pump power and the corresponding laser output power of the laser under test, and draw the input- output power curve.

激光斜效率计算模块20,用于读取被测激光器的激光阈值,并在输入-输出功率曲线上高于激光阈值处选取一组注入泵浦功率和激光输出功率,计算激光斜效率。The laser slope efficiency calculation module 20 is used to read the laser threshold value of the laser under test, and select a group of injected pump power and laser output power at the input-output power curve higher than the laser threshold value to calculate the laser slope efficiency.

腔内损耗值计算参数获取模块30,用于获取泵浦激光腰斑,并在注入泵浦功率处,通过谐振腔矩阵计算激光晶体处谐振腔膜光斑。其中,泵浦激光腰斑指泵浦激光在激光晶体处的腰斑大小。The parameter obtaining module 30 for calculating the loss value in the cavity is used to obtain the pump laser waist spot, and at the injected pump power, calculate the resonator film spot at the laser crystal through the resonator matrix. The pump laser waist spot refers to the waist spot size of the pump laser at the laser crystal.

腔内损耗值计算模块40,调用激光器腔内损耗计算公式对激光器斜效率、泵浦激光腰斑和激光晶体处谐振腔模腰斑进行计算,得到激光器的腔内损耗值。The intra-cavity loss value calculation module 40 invokes the laser intra-cavity loss calculation formula to calculate the laser slant efficiency, the pump laser waist spot and the resonator cavity mode waist spot at the laser crystal to obtain the laser's intra-cavity loss value.

进一步地,腔内损耗值计算模块包括腔内损耗值第一计算单元和腔内损耗值第二计算单元。Further, the intra-cavity loss value calculation module includes a first intra-cavity loss value calculation unit and a second intra-cavity loss value calculation unit.

腔内损耗值第一计算单元,用于计算基于泵浦激光腰斑和激光晶体处谐振腔模腰斑,计算激光晶体处谐振腔模腰斑与泵浦激光腰斑比值的平方值。The first calculation unit for the intra-cavity loss value is used to calculate the square value of the ratio of the cavity mode waist spot at the laser crystal to the pump laser waist spot based on the pump laser waist spot and the resonator cavity mode waist spot at the laser crystal.

腔内损耗值第二计算单元,用于调用激光器腔内损耗计算公式对激光器斜效率、激光晶体处谐振腔模腰斑与泵浦激光腰斑比值的平方值进行计算,得到激光器的腔内损耗值。The second calculation unit of the intra-cavity loss value is used to call the laser intra-cavity loss calculation formula to calculate the laser slant efficiency, the square value of the ratio of the resonant cavity mode waist spot at the laser crystal to the pump laser waist spot, and obtain the intra-cavity loss of the laser. value.

进一步地,激光器腔内损耗计算公式具体为:Further, the formula for calculating the loss in the laser cavity is as follows:

Figure BDA0003510375050000111
Figure BDA0003510375050000111

式中,δ表示激光器腔内损耗。ηa表示增益介质对泵浦激光的吸收效率,ηa=1-exp(-αl),其中,α表示被测激光器中增益介质对泵浦激光的吸收系数,l表示增益介质的径向长度。ηs表示激光斜效率。vl表示输出激光频率,vp表示泵浦激光频率,T表示被测激光器中的输出耦合镜的透射率。β表示激光晶体处谐振腔模腰斑与泵浦激光腰斑比值的平方值,

Figure BDA0003510375050000112
其中,ωl表示激光晶体处谐振腔模腰斑的大小,ωp表示泵浦激光腰斑的大小。In the formula, δ represents the laser cavity loss. η a represents the absorption efficiency of the gain medium to the pump laser, η a =1-exp(-αl), where α represents the absorption coefficient of the gain medium to the pump laser in the measured laser, and l represents the radial length of the gain medium . η s represents the laser slope efficiency. v l is the output laser frequency, v p is the pump laser frequency, and T is the transmittance of the output coupling mirror in the laser under test. β represents the square value of the ratio of the mode waist spot of the resonator cavity to the pump laser waist spot at the laser crystal,
Figure BDA0003510375050000112
Among them, ω l represents the size of the cavity mode waist spot at the laser crystal, and ω p represents the size of the pump laser waist spot.

关于一种测量固体激光器腔内损耗的装置的具体限定可以参见上文中对于一种测量固体激光器腔内损耗的方法的限定,在此不再赘述。For the specific definition of a device for measuring the loss in the cavity of a solid-state laser, please refer to the definition of a method for measuring the loss in the cavity of a solid-state laser, which will not be repeated here.

所属领域的技术人员可以清楚地了解到,为了描述的方便和简洁,仅以上述各功能单元、模块的划分进行举例说明,实际应用中,可以根据需要而将上述功能分配由不同的功能单元、模块完成,即将所述装置的内部结构划分成不同的功能单元或模块,以完成以上描述的全部或者部分功能。Those skilled in the art can clearly understand that, for the convenience and simplicity of description, only the division of the above-mentioned functional units and modules is used as an example for illustration. In practical applications, the above-mentioned functions can be allocated to different functional units, Module completion, that is, dividing the internal structure of the device into different functional units or modules to complete all or part of the functions described above.

以上的具体实施方式,对本发明的目的、技术方案和有益效果进行了进一步详细说明,所应理解的是,以上仅为本发明的具体实施方式而已,并不用于限定本发明的保护范围,凡在本发明的精神和原则之内,所做的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。The above specific embodiments further describe the purpose, technical solutions and beneficial effects of the present invention in detail. It should be understood that the above are only specific embodiments of the present invention, and are not intended to limit the protection scope of the present invention. Within the spirit and principle of the present invention, any modifications, equivalent replacements, improvements, etc. made should be included within the protection scope of the present invention.

Claims (10)

1.一种测量固体激光器腔内损耗的方法,其特征在于,包括:1. a method for measuring the loss in a solid-state laser cavity, is characterized in that, comprising: 获取被测激光器的注入泵浦功率和对应的激光输出功率,并基于所述注入泵浦功率和所述激光输出功率绘制输入-输出功率曲线;Obtain the injection pump power and the corresponding laser output power of the laser under test, and draw an input-output power curve based on the injection pump power and the laser output power; 读取被测激光器的激光阈值,并在所述输入-输出功率曲线上高于激光阈值处选取一组注入泵浦功率和激光输出功率,计算激光斜效率;Read the laser threshold value of the tested laser, and select a group of injection pump power and laser output power at the input-output power curve higher than the laser threshold value, and calculate the laser slope efficiency; 获取泵浦激光腰斑,并在注入泵浦功率处,通过谐振腔矩阵计算激光晶体处谐振腔膜光斑;其中,所述泵浦激光腰斑指泵浦激光在激光晶体处的腰斑大小;Obtain the pump laser waist spot, and calculate the resonator film spot at the laser crystal through the resonator matrix at the injected pump power; wherein, the pump laser waist spot refers to the pump laser waist spot size at the laser crystal; 调用激光器腔内损耗计算公式对所述激光器斜效率、泵浦激光腰斑和激光晶体处谐振腔模腰斑进行计算,得到激光器的腔内损耗值。The laser cavity loss calculation formula is called to calculate the laser oblique efficiency, the pump laser waist spot and the resonant cavity mode waist spot at the laser crystal, and the laser cavity loss value is obtained. 2.根据权利要求1所述的一种测量固体激光器腔内损耗的方法,其特征在于,所述获取被测激光器的注入泵浦功率和对应的激光输出功率,包括:2. a kind of method for measuring the loss in the cavity of solid-state laser according to claim 1, is characterized in that, described obtaining the injection pump power and corresponding laser output power of the laser under test, comprising: 通过向被测激光器中注入泵浦激光功率,被测激光器中的功率计基于所述注入泵浦激光功率计算得到对应的激光输出功率。By injecting pump laser power into the laser under test, the power meter in the laser under test calculates the corresponding laser output power based on the injected pump laser power. 3.根据权利要求1所述的一种测量固体激光器腔内损耗的方法,其特征在于,所述读取被测激光器的激光阈值,并在所述输入-输出功率曲线上高于激光阈值处选取一组注入泵浦功率和激光输出功率,计算激光斜效率,包括:3. The method for measuring the loss in the cavity of a solid-state laser according to claim 1, wherein the laser threshold value of the laser to be read is read, and the input-output power curve is higher than the laser threshold value. Select a set of injection pump power and laser output power to calculate the laser slope efficiency, including: 调用激光斜效率计算公式对选取的注入泵浦功率、输出功率和激光阈值进行计算,得到激光斜效率;Call the calculation formula of laser slope efficiency to calculate the selected injection pump power, output power and laser threshold to obtain the laser slope efficiency; 其中,所述激光斜效率计算公式具体为:Wherein, the calculation formula of the laser oblique efficiency is specifically:
Figure FDA0003510375040000011
Figure FDA0003510375040000011
式中,ηs表示激光斜效率,Pout表示选取的输出功率,Pin表示选取的输入功率,Pth表示激光阈值。In the formula, η s represents the laser slope efficiency, P out represents the selected output power, P in represents the selected input power, and P th represents the laser threshold.
4.根据权利要求1所述的一种测量固体激光器腔内损耗的方法,其特征在于,所述调用激光器腔内损耗计算公式对所述激光器斜效率、泵浦激光腰斑和激光晶体处谐振腔模腰斑进行计算,得到激光器的腔内损耗值,包括:4. a kind of method for measuring the loss in the cavity of solid-state laser according to claim 1, is characterized in that, described calling the calculation formula of the loss in the cavity of the laser to resonate at the laser oblique efficiency, pump laser waist spot and laser crystal place The cavity mode waist spot is calculated to obtain the cavity loss value of the laser, including: 基于泵浦激光腰斑和激光晶体处谐振腔模腰斑,计算激光晶体处谐振腔模腰斑与泵浦激光腰斑比值的平方值;Based on the pump laser waist spot and the cavity mode waist spot at the laser crystal, calculate the square value of the ratio of the resonator cavity mode waist spot at the laser crystal to the pump laser waist spot; 调用激光器腔内损耗计算公式对所述激光器斜效率、所述激光晶体处谐振腔模腰斑与泵浦激光腰斑比值的平方值进行计算,得到激光器的腔内损耗值。Call the laser cavity loss calculation formula to calculate the laser oblique efficiency and the square value of the ratio of the resonant cavity mode waist spot at the laser crystal to the pump laser waist spot to obtain the laser cavity loss value. 5.根据权利要求4所述的一种测量固体激光器腔内损耗的方法,其特征在于,所述激光器腔内损耗计算公式具体为:5. The method for measuring the loss in a solid-state laser cavity according to claim 4, wherein the calculation formula for the loss in the laser cavity is specifically:
Figure FDA0003510375040000021
Figure FDA0003510375040000021
式中,δ表示激光器腔内损耗;ηa表示增益介质对泵浦激光的吸收效率,ηa=1-exp(-αl),其中,α表示被测激光器中增益介质对泵浦激光的吸收系数,l表示增益介质的径向长度;ηs表示激光斜效率;vl表示输出激光频率,vp表示泵浦激光频率,T表示被测激光器中的输出耦合镜的透射率;β表示激光晶体处谐振腔模腰斑与泵浦激光腰斑比值的平方值,
Figure FDA0003510375040000022
其中,ωl表示激光晶体处谐振腔模腰斑的大小,ωp表示泵浦激光腰斑的大小。
In the formula, δ represents the laser cavity loss; η a represents the absorption efficiency of the pump laser by the gain medium, η a =1-exp(-αl), where α represents the absorption of the pump laser by the gain medium in the measured laser coefficient, l represents the radial length of the gain medium; η s represents the laser slope efficiency; v l represents the output laser frequency, v p represents the pump laser frequency, T represents the transmittance of the output coupling mirror in the laser under test; β represents the laser The square value of the ratio of the resonator cavity mode waist spot to the pump laser waist spot at the crystal,
Figure FDA0003510375040000022
Among them, ω l represents the size of the cavity mode waist spot at the laser crystal, and ω p represents the size of the pump laser waist spot.
6.根据权利要求1所述的一种测量固体激光器腔内损耗的方法,所述被测激光器包括泵浦激光源(1)、耦合系统(2)、功率计(9)、由输入耦合镜(3)、第一高反镜(4)、第二高反镜(5)和输出耦合镜(6)形成的激光谐振腔,所述激光谐振腔依次设置有激光晶体(7)和光学单向器(8);6. A method for measuring the intracavity loss of a solid-state laser according to claim 1, wherein the laser under test comprises a pump laser source (1), a coupling system (2), a power meter (9), a (3) a laser resonant cavity formed by a first high-reflection mirror (4), a second high-reflection mirror (5) and an output coupling mirror (6), the laser resonator is sequentially provided with a laser crystal (7) and an optical unit direction device (8); 泵浦激光源(1)发射激光,经耦合系统(2)耦合后传输给输入耦合镜(3),输入耦合镜(3)将接收到的激光经激光晶体(7)和光学单向器(8)发送给第一高反镜(4),第一高反镜(4)将接收到的激光反射给第二高反镜(5),第二高反镜(5)将接收到的激光传输给输出耦合镜(6),输出耦合镜(6)将接收到的激光发送给输入耦合镜(3);功率计9用于测量输出耦合镜6输出激光时的输出功率。The pump laser source (1) emits laser light, which is coupled by a coupling system (2) and then transmitted to an input coupling mirror (3), and the input coupling mirror (3) sends the received laser light through a laser crystal (7) and an optical unidirectional device ( 8) Send to the first high-reflection mirror (4), the first high-reflection mirror (4) reflects the received laser light to the second high-reflection mirror (5), and the second high-reflection mirror (5) reflects the received laser light It is transmitted to the output coupling mirror (6), and the output coupling mirror (6) sends the received laser light to the input coupling mirror (3); the power meter 9 is used to measure the output power when the output coupling mirror 6 outputs the laser light. 7.根据权利要求6所述的一种测量固体激光器腔内损耗的方法,其特征在于,7. The method for measuring the loss in a solid-state laser cavity according to claim 6, characterized in that, 所述泵浦激光源(1)采用光纤耦合激光二极管,所述输入耦合镜(3)采用凹透镜,所述第一高反镜(4)采用凸透镜,所述第二高反镜(5)和所述输出耦合镜(6)平凹透镜。The pump laser source (1) adopts a fiber-coupled laser diode, the input coupling mirror (3) adopts a concave lens, the first high-reflection mirror (4) adopts a convex lens, and the second high-reflection mirror (5) and The output coupling mirror (6) is a plano-concave lens. 8.一种测量固体激光器腔内损耗的装置,其特征在于,包括:8. A device for measuring the loss in a solid-state laser cavity, comprising: 输入-输出功率曲线绘制模块,用于获取被测激光器的注入泵浦功率和对应的激光输出功率,并基于所述注入泵浦功率和所述激光输出功率绘制输入-输出功率曲线;an input-output power curve drawing module, used to obtain the injection pump power and the corresponding laser output power of the laser under test, and draw an input-output power curve based on the injection pump power and the laser output power; 激光斜效率计算模块,用于读取被测激光器的激光阈值,并在所述输入-输出功率曲线上高于激光阈值处选取一组注入泵浦功率和激光输出功率,计算激光斜效率;a laser slope efficiency calculation module, used to read the laser threshold value of the laser under test, and select a group of injected pump power and laser output power at the input-output power curve higher than the laser threshold value to calculate the laser slope efficiency; 腔内损耗值计算参数获取模块,用于获取泵浦激光腰斑,并在注入泵浦功率处,通过谐振腔矩阵计算激光晶体处谐振腔膜光斑;其中,所述泵浦激光腰斑指泵浦激光在激光晶体处的腰斑大小;The parameter acquisition module for calculating the loss value in the cavity is used to obtain the pump laser waist spot, and at the injected pump power, the resonator film spot at the laser crystal is calculated through the resonator matrix; wherein, the pump laser waist spot refers to the pump The size of the waist spot of the Pu laser at the laser crystal; 腔内损耗值计算模块,调用激光器腔内损耗计算公式对所述激光器斜效率、泵浦激光腰斑和激光晶体处谐振腔模腰斑进行计算,得到激光器的腔内损耗值。The intra-cavity loss value calculation module calls the laser intra-cavity loss calculation formula to calculate the laser slant efficiency, the pump laser waist spot and the resonant cavity mode waist spot at the laser crystal, and obtains the laser's intra-cavity loss value. 9.根据权利要求8所述的一种测量固体激光器腔内损耗的装置,其特征在于,所述腔内损耗值计算模块包括:9. The device for measuring the intra-cavity loss of a solid-state laser according to claim 8, wherein the intra-cavity loss value calculation module comprises: 腔内损耗值第一计算单元,用于计算基于泵浦激光腰斑和激光晶体处谐振腔模腰斑,计算激光晶体处谐振腔模腰斑与泵浦激光腰斑比值的平方值;The first calculation unit of the intra-cavity loss value is used to calculate the square value of the ratio of the resonant cavity mode waist spot at the laser crystal to the pump laser waist spot based on the pump laser waist spot and the resonant cavity mode waist spot at the laser crystal; 腔内损耗值第二计算单元,用于调用激光器腔内损耗计算公式对所述激光器斜效率、所述激光晶体处谐振腔模腰斑与泵浦激光腰斑比值的平方值进行计算,得到激光器的腔内损耗值。The second calculation unit for the intra-cavity loss value is used to call the laser intra-cavity loss calculation formula to calculate the laser slope efficiency, the square value of the ratio of the resonant cavity mode waist spot at the laser crystal to the pump laser waist spot, and obtain the laser The cavity loss value. 10.根据权利要求9所述的一种测量固体激光器腔内损耗的装置,其特征在于,所述激光器腔内损耗计算公式具体为:10. The device for measuring the loss in a solid-state laser cavity according to claim 9, wherein the calculation formula of the loss in the laser cavity is specifically:
Figure FDA0003510375040000041
Figure FDA0003510375040000041
式中,δ表示激光器腔内损耗;ηa表示增益介质对泵浦激光的吸收效率,ηa=1-exp(-αl),其中,α表示被测激光器中增益介质对泵浦激光的吸收系数,l表示增益介质的径向长度;ηs表示激光斜效率;νl表示输出激光频率,νp表示泵浦激光频率,T表示被测激光器中的输出耦合镜的透射率;β表示激光晶体处谐振腔模腰斑与泵浦激光腰斑比值的平方值,
Figure FDA0003510375040000042
其中,ωl表示激光晶体处谐振腔模腰斑的大小,ωp表示泵浦激光腰斑的大小。
In the formula, δ represents the laser cavity loss; η a represents the absorption efficiency of the pump laser by the gain medium, η a =1-exp(-αl), where α represents the absorption of the pump laser by the gain medium in the measured laser coefficient, l represents the radial length of the gain medium; η s represents the laser slope efficiency; ν l represents the output laser frequency, ν p represents the pump laser frequency, T represents the transmittance of the output coupling mirror in the laser under test; β represents the laser The square value of the ratio of the resonator cavity mode waist spot to the pump laser waist spot at the crystal,
Figure FDA0003510375040000042
Among them, ω l represents the size of the cavity mode waist spot at the laser crystal, and ω p represents the size of the pump laser waist spot.
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