[go: up one dir, main page]

CN114371124A - Droplet adhesive force detecting system based on micro-cantilever beam - Google Patents

Droplet adhesive force detecting system based on micro-cantilever beam Download PDF

Info

Publication number
CN114371124A
CN114371124A CN202210040004.7A CN202210040004A CN114371124A CN 114371124 A CN114371124 A CN 114371124A CN 202210040004 A CN202210040004 A CN 202210040004A CN 114371124 A CN114371124 A CN 114371124A
Authority
CN
China
Prior art keywords
micro
cantilever beam
droplet
injector
cantilever
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN202210040004.7A
Other languages
Chinese (zh)
Other versions
CN114371124B (en
Inventor
薛长国
冯贺
周宁鸿
王启明
滕艳华
谢阿田
闵凡飞
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anhui University of Science and Technology
Original Assignee
Anhui University of Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anhui University of Science and Technology filed Critical Anhui University of Science and Technology
Priority to CN202210040004.7A priority Critical patent/CN114371124B/en
Publication of CN114371124A publication Critical patent/CN114371124A/en
Application granted granted Critical
Publication of CN114371124B publication Critical patent/CN114371124B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N19/00Investigating materials by mechanical methods
    • G01N19/04Measuring adhesive force between materials, e.g. of sealing tape, of coating

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention relates to a micro-cantilever beam-based liquid drop adhesion detection system, which specifically comprises a laser, a micro-cantilever beam, a micro-beam clamping table, a micro-liquid drop injector, an injector support, a photoelectric detector, a micro-camera, a camera support, a data acquisition card, a computer and the like, wherein the front end of the micro-cantilever beam is forwards suspended to form a free end, the bottom of the micro-sample injector is provided with an injector hydrophilic liquid hole, the injector hydrophilic liquid hole longitudinally moves under the clamping of the sample injector support so as to control the liquid drop to move up and down on the surface of the micro-cantilever beam, the tip of the micro-cantilever beam is irradiated by a laser beam, the adsorption-desorption process of the liquid drop on the surface of the micro-cantilever beam is detected, the adsorption-desorption mechanical curve of the liquid drop on the solid surface is obtained, and the longitudinal adhesion between the liquid drop and the surface of the micro-cantilever beam can be simply and accurately obtained.

Description

一种基于微悬臂梁的液滴附着力检测系统A droplet adhesion detection system based on microcantilever

技术领域technical field

本发明涉及液滴附着力检测,更具体地说是一种固液界面液滴附着力检测系统。The invention relates to the detection of droplet adhesion, and more particularly to a liquid droplet adhesion detection system at a solid-liquid interface.

背景技术Background technique

固液界面间的粘附作用是影响液相在固体表面动态性能的关键因素,界面附着力的检测在理论研究和实际应用中均受到广泛关注,是疏液表面迈向实际应用的关键突破点。传统的液滴附着力的测量是利用不同强度的气流将基板上的液滴吹落,从而得到能将液滴吹落的最小气流强度,再经过计算得出液滴的附着力大小;在这一测量过程中,部分气流达到基板后首先会改变方向,然后再作用于液滴,因此对测量造成干扰。The adhesion between the solid-liquid interface is a key factor affecting the dynamic performance of the liquid phase on the solid surface. The detection of interfacial adhesion has received extensive attention in both theoretical research and practical applications, and is a key breakthrough point for lyophobic surfaces to move towards practical applications. . The traditional measurement of droplet adhesion is to use airflows of different intensities to blow off the droplets on the substrate, so as to obtain the minimum airflow intensity that can blow the droplets off, and then calculate the size of the droplet adhesion; here During a measurement, part of the airflow that reaches the substrate first changes its direction and then acts on the droplet, thus interfering with the measurement.

在公开号为CN211825620的专利文献中公开了一种液滴附着力测量装置,其是在工作台的台面上放置待测基板和测量组件,测量组件有吸附面且吸附面朝向基板,测量组件可相对基板运动,用于在不同的角度和/或距离吸附基板上的液滴并读取测量组件所受到的吸附力;但这一检测方式是通过磁铁控制滑块驱动测量组件,大尺度的基板吸附液滴的灵敏度不能满足要求,使其检测精度受到极大的限制。In the patent document with publication number CN211825620, a liquid droplet adhesion measurement device is disclosed, which is to place a substrate to be measured and a measurement component on the table top of a workbench. The measurement component has an adsorption surface and the adsorption surface faces the substrate. The measurement component can be Movement relative to the substrate is used to adsorb droplets on the substrate at different angles and/or distances and read the adsorption force of the measurement component; however, this detection method is to drive the measurement component through a magnet controlled slider. Large-scale substrates The sensitivity of the adsorbed droplets cannot meet the requirements, which greatly limits the detection accuracy.

发明内容SUMMARY OF THE INVENTION

本发明是为避免上述现有技术所存在的不足,提供一种基于微悬臂梁的液滴附着力检测系统,以实现对液滴附着力的高灵敏度的检测。In order to avoid the above-mentioned shortcomings of the prior art, the present invention provides a droplet adhesion detection system based on a micro-cantilever beam, so as to realize high-sensitivity detection of the droplet adhesion.

本发明一种基于微悬臂梁的液滴附着力检测系统,其特征是包括:一种基于微悬臂梁的液滴附着力检测系统,其特征是包括:A micro-cantilever-based droplet adhesion detection system of the present invention is characterized by comprising: a micro-cantilever-based droplet adhesion detection system, which is characterized by comprising:

微悬臂梁,其尾部由微梁夹持台夹持,前端呈水平悬伸为自由端;The micro-cantilever beam, its tail is clamped by the micro-beam clamping table, and the front end is horizontally overhanging as a free end;

激光器,发射激光束沿着与微悬臂梁呈45°角的方向从下往上照射在微悬臂梁的自由端,并在所述微悬臂梁的自由端产生反射光束;a laser, which emits a laser beam and irradiates the free end of the micro-cantilever beam from bottom to top along a direction at an angle of 45° with the micro-cantilever beam, and generates a reflected beam at the free end of the micro-cantilever beam;

微量进样器,其利用进样器支架设置在微悬臂梁的自由端的上方,所述进样器支架能够带动微量进样器竖向上下移动,微量进样器的底部为注射器液孔,微量进样器中存放的样液能够由注射器推入注射器液孔并保持为液滴悬挂在所述注射器液孔上;The micro-sampler is arranged above the free end of the micro-cantilever beam by using a sample-injector bracket, the sample-injector bracket can drive the micro-injector to move vertically up and down, and the bottom of the micro-injector is a syringe liquid hole. The sample liquid stored in the injector can be pushed into the liquid hole of the syringe by the syringe and kept as droplets hanging on the liquid hole of the syringe;

显微摄像头,由摄像头支架固定支撑在微悬臂梁的上方,用于拍摄获得所述液滴与微悬臂梁的粘附-脱附过程的图像;a microscopic camera, which is fixed and supported above the microcantilever by the camera bracket, and is used to capture and obtain images of the adhesion-desorption process of the droplet and the microcantilever;

光电探测器,设置在所述反射光的反射回路中,用于接受所述反射光,并由数据采集卡将采集获得的光电探测器的输出信号传输至计算机进行信号处理,实现液滴附着力的检测。The photodetector is arranged in the reflection circuit of the reflected light, and is used to receive the reflected light, and the data acquisition card transmits the collected output signal of the photodetector to the computer for signal processing, so as to realize the droplet adhesion detection.

所述微量进样器液孔中的液滴初始状态下不与微梁接触,激光器发射的激光束经微悬臂梁反射后的光斑与探测器的中心位置重合;The droplet in the liquid hole of the micro-sampler is not in contact with the micro-beam in the initial state, and the light spot of the laser beam emitted by the laser after being reflected by the micro-cantilever beam coincides with the center position of the detector;

首先控制进样器支架使微量进样器向下移动,直至悬挂在注射器液孔中的液滴与微悬臂梁自由端上表面发生接触,微悬臂梁向下发生偏移,光斑位置变化;First, control the injector bracket to move the micro-injector downward until the droplet hanging in the liquid hole of the syringe contacts the upper surface of the free end of the micro-cantilever beam, the micro-cantilever beam shifts downward, and the spot position changes;

再次调整进样器支架,向上拖动液滴,使微梁恢复到平行状态,光斑重新与探测器中心重合;Adjust the injector bracket again, drag the droplet upwards, make the microbeam return to the parallel state, and the light spot coincides with the center of the detector again;

最后控制进样器支架使微量进样器向上移动,液滴带动微悬臂梁自由端产生向上的偏移,直至液滴与微悬臂梁表面脱离;利用数据采集卡采集液滴上移过程中微梁的偏移量。Finally, the injector bracket is controlled to move the micro injector upward, and the drop drives the free end of the micro cantilever to move upward until the drop is separated from the surface of the micro cantilever; The offset of the beam.

所述光电探测器为四象限探测器,光电探测器的感光靶面是以O点为中心点、以R为半径的圆面;光斑是以O′(x0,y0)为中心点、以r为半径的圆面;The photodetector is a four-quadrant detector, and the photosensitive target surface of the photodetector is a circular surface with O point as the center point and R as the radius; the light spot is O'(x 0 , y 0 ) as the center point, A circular face with a radius of r;

以IA、IB、IC和ID一一对应表征由光电探测器检测获得的第Ⅰ、第Ⅱ、第Ⅲ和第Ⅳ象限的电流强度;Characterize the current intensities of the I, II, III and IV quadrants detected by the photodetector with I A , I B , I C and I D in a one-to-one correspondence;

当光斑在光电探测器上的位置改变时,探测器各象限输出电流强度发生变化, 根据光斑产生的光电流变化由如下式(1)计算获得光斑在光敏面上的相对偏移量,并由式(2)计算获得微悬臂梁的弯曲挠度ΔZ:When the position of the light spot on the photodetector changes, the output current intensity of each quadrant of the detector changes. According to the change of the photocurrent generated by the light spot, the relative offset of the light spot on the photosensitive surface is calculated by the following formula (1), and is calculated by Formula (2) calculates the bending deflection ΔZ of the micro-cantilever beam:

Figure RE-GDA0003516740890000021
Figure RE-GDA0003516740890000021

Figure RE-GDA0003516740890000022
Figure RE-GDA0003516740890000022

其中:in:

Kx为探测器在X轴方向上的检测灵敏度;K x is the detection sensitivity of the detector in the X-axis direction;

Ky为探测器在Y轴方向上的检测灵敏度;K y is the detection sensitivity of the detector in the Y-axis direction;

ΔS为光斑中心点相对于感光靶面O的直线偏移量;ΔS is the linear offset of the spot center point relative to the photosensitive target surface O;

l为液滴与微悬臂梁的接触中心点到微悬臂梁固定端的距离;l is the distance from the contact center point of the droplet and the micro-cantilever to the fixed end of the micro-cantilever;

L为激光束经微悬臂梁反射后从微悬臂梁的自由端到光电探测器的感光靶面的距离;L is the distance from the free end of the micro-cantilever beam to the photosensitive target surface of the photodetector after the laser beam is reflected by the micro-cantilever beam;

则,液滴附着力F为:F=kΔZThen, the droplet adhesion force F is: F=kΔZ

其中,k为微悬臂梁的弹簧常数。where k is the spring constant of the microcantilever.

本发明一种基于微悬臂梁的液滴附着力检测系统,其特征也在于:所述微量进样器(4)的注射器液孔为平头,且经过亲水性处理,以增强液滴与液孔间附着力。The micro-cantilever-based droplet adhesion detection system of the present invention is also characterized in that: the syringe liquid hole of the micro-injector (4) is a flat head, and is treated with hydrophilicity to enhance the droplet and liquid Adhesion between pores.

本发明一种基于微悬臂梁的液滴附着力检测系统,其特征也在于:所述微量进样器的容量为10μL,注射器液孔的直径为0.05mm;所述激光器是输出激光波长为632nm-780nm的半导体激光器。The micro-cantilever-based droplet adhesion detection system of the present invention is also characterized in that: the capacity of the micro-injector is 10 μL, the diameter of the liquid hole of the syringe is 0.05 mm; the output laser wavelength of the laser is 632 nm -780nm semiconductor laser.

本发明一种基于微悬臂梁的液滴附着力检测系统,其特征也在于:所述光电探测器(6)为位置敏感传感器PSD。A droplet adhesion detection system based on a micro-cantilever beam of the present invention is also characterized in that: the photodetector (6) is a position-sensitive sensor PSD.

本发明一种基于微悬臂梁的液滴附着力检测系统,其特征也在于:所述微悬臂梁为矩形单梁,梁长度为500μm,宽度为9μm,厚度为1μm。The micro-cantilever beam-based droplet adhesion detection system of the present invention is also characterized in that the micro-cantilever beam is a rectangular single beam, the beam length is 500 μm, the width is 9 μm, and the thickness is 1 μm.

与已有技术相比,本发明有益效果体现在:Compared with the prior art, the beneficial effects of the present invention are reflected in:

1、本发明中将激光照射微悬臂梁自由端,可以实现微纳尺度上表面应力变化过程的精确检测,精确检测到液滴在固体表面附着力的大小,更简单可靠地得出的液滴与基板之间的附着力,响应速度更快,灵敏度更高;1. In the present invention, the laser irradiates the free end of the micro-cantilever beam, which can realize the accurate detection of the surface stress change process on the micro-nano scale, accurately detect the adhesion of the droplet on the solid surface, and obtain the droplet more simply and reliably. The adhesion between the substrate and the substrate, the response speed is faster and the sensitivity is higher;

2、本发明中光路结构简单,容易搭建,通过计算机信息处理并显示测量结果,更直观形象地得出液滴在固体表面上动态脱附曲线;2. The optical path in the present invention has a simple structure and is easy to build. Through computer information processing and display of measurement results, the dynamic desorption curve of droplets on the solid surface can be obtained more intuitively and vividly;

3、针对本发明的具体应用,利用显微摄像头对微悬臂梁进行放大显示,可以对微悬臂梁表面进行修饰,容易得出固体表面不同微观结构与表面液滴附着力的关联,为构筑、调控疏液表面提供指引方向。3. According to the specific application of the present invention, the micro-cantilever beam can be enlarged and displayed by using a micro-camera, the surface of the micro-cantilever beam can be modified, and it is easy to obtain the correlation between the different microstructures of the solid surface and the adhesion of the surface droplets, which is for building, Manipulating the lyophobic surface provides orientation.

附图说明Description of drawings

图1是本发明检测系统结构示意图;Fig. 1 is the structural schematic diagram of the detection system of the present invention;

图2是本发明检测系统中微悬臂梁偏转示意图;Fig. 2 is the deflection schematic diagram of the micro-cantilever beam in the detection system of the present invention;

图3是本发明检测系统中光电探测原理过程图;Fig. 3 is the photoelectric detection principle process diagram in the detection system of the present invention;

图4是本发明检测系统中Lab VIEW数据可视化显示操作页面;Fig. 4 is the LabVIEW data visualization display operation page in the detection system of the present invention;

图5是本发明检测系统中液滴在微悬臂梁表面上的脱附曲线;Fig. 5 is the desorption curve of the droplet on the surface of the micro-cantilever in the detection system of the present invention;

图中标号:1激光器、2微悬臂梁、3微梁夹持台、4微量进样器、5进样器支架、6光电探测器、7显微摄像头、8摄像头支架、9数据采集卡、10计算机。Labels in the figure: 1 laser, 2 micro-cantilever beam, 3 micro-beam clamping table, 4 micro sampler, 5 sampler bracket, 6 photodetector, 7 microscope camera, 8 camera bracket, 9 data acquisition card, 10 Computers.

具体实施方式Detailed ways

下面结合附图对本发明专利进行详细描述,以便技术人员理解The patent of the present invention will be described in detail below in conjunction with the accompanying drawings, so that the skilled person can understand

实施例1Example 1

如图1一种基于微悬臂梁的液滴附着力检测系统,其特征是包括:As shown in Figure 1, a micro-cantilever-based droplet adhesion detection system is characterized in that it includes:

微悬臂梁(2),其尾部由微梁夹持台(3)夹持,前端呈水平悬伸为自由端;a micro-cantilever beam (2), the tail of which is clamped by the micro-beam clamping table (3), and the front end is horizontally cantilevered as a free end;

激光器(1),发射激光束沿着与微悬臂梁(2)呈45°角的方向从下往上照射在微悬臂梁的自由端,并在所述微悬臂梁(2)的自由端产生反射光束;A laser (1) that emits a laser beam along a direction at an angle of 45° to the micro-cantilever beam (2) from bottom to top and irradiates the free end of the micro-cantilever beam (2), and generates a laser beam at the free end of the micro-cantilever beam (2) reflected beam;

微量进样器(4),其利用进样器支架(5)设置在微悬臂梁(2)的自由端的上方,所述进样器支架(5)能够带动微量进样器(4)竖向上下移动,微量进样器(4)的底部为注射器液孔,微量进样器(4)中存放的样液能够由注射器推入注射器液孔并保持为液滴悬挂在所述注射器液孔上;A micro-sampler (4), which is arranged above the free end of the micro-cantilever beam (2) using a sample-injector bracket (5), the sample-injector bracket (5) capable of driving the micro-injector (4) vertically Move down, the bottom of the micro-injector (4) is the liquid hole of the syringe, the sample liquid stored in the micro-injector (4) can be pushed into the liquid hole of the syringe by the syringe and kept as droplets hanging on the liquid hole of the syringe ;

显微摄像头(7),由摄像头支架(8)固定支撑在微悬臂梁(2)的上方,用于拍摄获得所述液滴与微悬臂梁的粘附-脱附过程的图像;a microscopic camera (7), fixed and supported above the micro-cantilever beam (2) by a camera-head bracket (8), for capturing images of the adhesion-desorption process of the droplet and the micro-cantilever beam;

光电探测器(6),设置在所述反射光的反射回路中,用于接受所述反射光,并由数据采集卡(9)将采集获得的光电探测器(6)的输出信号传输至计算机(10) 进行信号处理,实现液滴附着力的检测。A photodetector (6), arranged in the reflection circuit of the reflected light, is used for receiving the reflected light, and the data acquisition card (9) transmits the acquired output signal of the photodetector (6) to the computer (10) Perform signal processing to detect droplet adhesion.

所述微量进样器(4)液孔中的液滴初始状态下不与微梁(2)接触,激光器 (1)发射的激光束经微悬臂梁反射后的光斑与探测器(6)的中心位置重合;The droplets in the liquid holes of the micro-injector (4) are not in contact with the microbeam (2) in the initial state, and the light spot after the laser beam emitted by the laser (1) is reflected by the microcantilever beam and the detector (6). The center position coincides;

首先控制进样器支架(5)使微量进样器(4)向下移动,直至悬挂在注射器液孔中的液滴与微悬臂梁自由端上表面发生接触,微悬臂梁向下发生偏移,光斑位置变化;First, control the injector bracket (5) to move the micro injector (4) downward until the droplet suspended in the liquid hole of the syringe contacts the upper surface of the free end of the micro-cantilever beam, and the micro-cantilever beam is deflected downward , the spot position changes;

再次调整进样器支架(5),向上拖动液滴,使微梁恢复到平行状态,光斑重新与探测器中心重合;Adjust the injector bracket (5) again, drag the droplet upwards to make the microbeam return to a parallel state, and the light spot coincides with the center of the detector again;

最后控制进样器支架(5)使微量进样器(4)向上移动,液滴带动微悬臂梁自由端产生向上的偏移,直至液滴与微悬臂梁表面脱离;利用数据采集卡(9)采集液滴上移过程中微梁的偏移量。Finally, the injector bracket (5) is controlled to move the micro injector (4) upward, and the droplet drives the free end of the micro-cantilever beam to move upward until the droplet is detached from the surface of the micro-cantilever beam; use the data acquisition card (9 ) collect the offset of the microbeam during the upward movement of the droplet.

所述光电探测器(6)为四象限探测器,光电探测器(6)的感光靶面是以O点为中心点、以R为半径的圆面;光斑是以O′(x0,y0)为中心点、以r为半径的圆面;The photodetector (6) is a four-quadrant detector, and the photosensitive target surface of the photodetector (6) is a circular surface with point O as the center point and R as the radius; the light spot is O'(x 0 , y 0 ) as the center point and r as the radius;

以IA、IB、IC和ID一一对应表征由光电探测器(6)检测获得的第Ⅰ、第Ⅱ、第Ⅲ和第Ⅳ象限的电流强度;Characterize the current intensities of the I, II, III and IV quadrants detected by the photodetector (6) in one-to-one correspondence with I A , I B , I C and I D ;

当光斑在光电探测器上的位置改变时,探测器各象限输出电流强度发生变化, 根据光斑产生的光电流变化由如下式(1)计算获得光斑在光敏面上的相对偏移量,并由式(2)计算获得微悬臂梁的弯曲挠度ΔZ:When the position of the light spot on the photodetector changes, the output current intensity of each quadrant of the detector changes. According to the change of the photocurrent generated by the light spot, the relative offset of the light spot on the photosensitive surface is calculated by the following formula (1), and is calculated by Formula (2) calculates the bending deflection ΔZ of the micro-cantilever beam:

Figure RE-GDA0003516740890000051
Figure RE-GDA0003516740890000051

Figure RE-GDA0003516740890000052
Figure RE-GDA0003516740890000052

其中:in:

Kx为探测器在X轴方向上的检测灵敏度;K x is the detection sensitivity of the detector in the X-axis direction;

Ky为探测器在Y轴方向上的检测灵敏度;K y is the detection sensitivity of the detector in the Y-axis direction;

ΔS为光斑中心点相对于感光靶面O的直线偏移量;ΔS is the linear offset of the spot center point relative to the photosensitive target surface O;

l为液滴与微悬臂梁的接触中心点到微悬臂梁固定端的距离;l is the distance from the contact center point of the droplet and the micro-cantilever to the fixed end of the micro-cantilever;

L为激光束经微悬臂梁反射后从微悬臂梁的自由端到光电探测器的感光靶面的距离;L is the distance from the free end of the micro-cantilever beam to the photosensitive target surface of the photodetector after the laser beam is reflected by the micro-cantilever beam;

则,液滴附着力F为:F=kΔZThen, the droplet adhesion force F is: F=kΔZ

其中,k为微悬臂梁的弹簧常数。where k is the spring constant of the microcantilever.

实施例2Example 2

一种基于微悬臂梁的液滴附着力检测系统的使用步骤如下:The use steps of a micro-cantilever-based droplet adhesion detection system are as follows:

利用微量进样器(4)缓慢挤出0.4μL水滴,保持液滴在微量进样器(4) 针头不滴落,光电探测器(6)感光靶面到微悬臂梁(2)自由端的距离为3.7cm,微调进样器支架(5),在水滴与微悬臂梁(2)表面接触后,再向下运动20μm,使水滴与微悬臂梁(2)表面充分接触同时不破坏水滴的表面张力,水滴与微悬臂梁(2)接触的中心点距微悬臂梁(2)固定端的距离为450μm,反向微调进样器支架(5),使微量进样器(4)针头带动水滴缓慢脱离微悬臂梁(2)表面,经过数据采集卡(9)在计算机(10)端的Lab VIEW程序上实时显示微悬臂梁(2) 的偏转位移,当水滴从微悬臂梁(2)表面脱离的瞬间,微悬臂梁(2)的弯曲程度达到一个阈值,通过公式计算得到水滴在微悬臂梁(2)表面的附着力,得到液滴在微悬臂梁表面脱附的力学曲线。Use the microinjector (4) to slowly extrude 0.4 μL of water droplets, keep the droplets from the needle of the microinjector (4) without dripping, and the distance from the photosensitive target surface of the photodetector (6) to the free end of the microcantilever (2) 3.7cm, fine-tune the injector holder (5), after the water droplet contacts the surface of the micro-cantilever (2), then move down 20μm to make the water droplet fully contact the surface of the micro-cantilever (2) without damaging the surface of the water droplet Tension, the distance between the center point of the contact between the water droplet and the micro-cantilever beam (2) and the fixed end of the micro-cantilever beam (2) is 450 μm, and fine-tune the injector bracket (5) in the reverse direction, so that the needle of the micro injector (4) drives the water drop slowly. Detach the surface of the micro-cantilever beam (2), and display the deflection displacement of the micro-cantilever beam (2) in real time on the Lab VIEW program at the computer (10) end through the data acquisition card (9). In an instant, the bending degree of the micro-cantilever beam (2) reaches a threshold value, and the adhesion force of the water droplet on the surface of the micro-cantilever beam (2) is calculated by the formula, and the mechanical curve of the desorption of the droplet on the surface of the micro-cantilever beam is obtained.

本发明是通过具体实施过程进行说明,但这些并非构成对本发明限制,在不脱离本发明精神的情况下,本领域的技术人员对本发明的技术方案进行的各种变更和修改,均应落入本发明的权利要求书确定的保护范围内。The present invention is described through specific implementation processes, but these are not intended to limit the present invention. Without departing from the spirit of the present invention, various changes and modifications made to the technical solutions of the present invention by those skilled in the art shall fall within the scope of the present invention. Within the scope of protection determined by the claims of the present invention.

Claims (7)

1.一种基于微悬臂梁的液滴附着力检测系统,其特征是包括:1. a droplet adhesion detection system based on micro-cantilever is characterized in that comprising: 微悬臂梁(2),其尾部由微梁夹持台(3)夹持,前端呈水平悬伸为自由端;a micro-cantilever beam (2), the tail of which is clamped by the micro-beam clamping table (3), and the front end is horizontally cantilevered as a free end; 激光器(1),发射激光束沿着与微悬臂梁(2)呈45°角的方向从下往上照射在微悬臂梁的自由端,并在所述微悬臂梁(2)的自由端产生反射光束;A laser (1) that emits a laser beam along a direction at an angle of 45° to the micro-cantilever beam (2) from bottom to top and irradiates the free end of the micro-cantilever beam (2), and generates a laser beam at the free end of the micro-cantilever beam (2) reflected beam; 微量进样器(4),其利用进样器支架(5)设置在微悬臂梁(2)的自由端的上方,所述进样器支架(5)能够带动微量进样器(4)竖向上下移动,微量进样器(4)的底部为注射器液孔,微量进样器(4)中存放的样液能够由注射器推入注射器液孔并保持为液滴悬挂在所述注射器液孔上;A micro-sampler (4), which is arranged above the free end of the micro-cantilever beam (2) using a sample-injector bracket (5), the sample-injector bracket (5) capable of driving the micro-injector (4) vertically Move down, the bottom of the micro-injector (4) is the liquid hole of the syringe, the sample liquid stored in the micro-injector (4) can be pushed into the liquid hole of the syringe by the syringe and kept as droplets hanging on the liquid hole of the syringe ; 显微摄像头(7),由摄像头支架(8)固定支撑在微悬臂梁(2)的上方,用于拍摄获得所述液滴与微悬臂梁的粘附-脱附过程的图像;a microscopic camera (7), fixed and supported above the micro-cantilever beam (2) by a camera-head bracket (8), for capturing images of the adhesion-desorption process of the droplet and the micro-cantilever beam; 光电探测器(6),设置在所述反射光的反射回路中,用于接受所述反射光,并由数据采集卡(9)将采集获得的光电探测器(6)的输出信号传输至计算机(10)进行信号处理,实现液滴附着力的检测。A photodetector (6), arranged in the reflection circuit of the reflected light, is used for receiving the reflected light, and the data acquisition card (9) transmits the acquired output signal of the photodetector (6) to the computer (10) Perform signal processing to realize the detection of droplet adhesion. 2.根据权利要求1所述的基于微悬臂梁的液滴附着力检测系统,其特征是:2. The droplet adhesion detection system based on micro-cantilever beam according to claim 1, is characterized in that: 所述微量进样器(4)液孔中的液滴初始状态下不与微梁(2)接触,激光器(1)发射的激光束经微悬臂梁反射后的光斑与探测器(6)的中心位置重合;The droplets in the liquid holes of the micro-injector (4) are not in contact with the microbeam (2) in the initial state, and the light spot after the laser beam emitted by the laser (1) is reflected by the microcantilever beam and the detector (6). The center position coincides; 首先控制进样器支架(5)使微量进样器(4)向下移动,直至悬挂在注射器液孔中的液滴与微悬臂梁自由端上表面发生接触,微悬臂梁向下发生偏移,光斑位置变化;First, control the injector bracket (5) to move the micro injector (4) downward until the droplet suspended in the liquid hole of the syringe contacts the upper surface of the free end of the micro-cantilever beam, and the micro-cantilever beam is deflected downward , the spot position changes; 再次调整进样器支架(5),向上拖动液滴,使微梁恢复到平行状态,光斑重新与探测器中心重合;Adjust the injector bracket (5) again, drag the droplet upwards to make the microbeam return to a parallel state, and the light spot coincides with the center of the detector again; 最后控制进样器支架(5)使微量进样器(4)向上移动,液滴带动微悬臂梁自由端产生向上的偏移,直至液滴与微悬臂梁表面脱离;利用数据采集卡(9)采集液滴上移过程中微梁的偏移量。Finally, the injector bracket (5) is controlled to move the micro injector (4) upward, and the droplet drives the free end of the micro-cantilever beam to move upward until the droplet is detached from the surface of the micro-cantilever beam; use the data acquisition card (9 ) collect the offset of the microbeam during the upward movement of the droplet. 3.根据权利要求1所述的基于微悬臂梁的液滴附着力检测系统,其特征是:3. The droplet adhesion detection system based on micro-cantilever beam according to claim 1, is characterized in that: 所述光电探测器(6)为四象限探测器,光电探测器(6)的感光靶面是以O点为中心点、以R为半径的圆面;光斑是以O′(x0,y0)为中心点、以r为半径的圆面;The photodetector (6) is a four-quadrant detector, and the photosensitive target surface of the photodetector (6) is a circular surface with point O as the center point and R as the radius; the light spot is O'(x 0 , y 0 ) as the center point and r as the radius; 以IA、IB、IC和ID一一对应表征由光电探测器(6)检测获得的第Ⅰ、第Ⅱ、第Ⅲ和第Ⅳ象限的电流强度;Characterize the current intensities of the I, II, III and IV quadrants detected by the photodetector (6) in one-to-one correspondence with I A , I B , I C and I D ; 当光斑在光电探测器上的位置改变时,探测器各象限输出电流强度发生变化,根据光斑产生的光电流变化由如下式(1)计算获得光斑在光敏面上的相对偏移量,并由式(2)计算获得微悬臂梁的弯曲挠度ΔZ:When the position of the light spot on the photodetector changes, the output current intensity of each quadrant of the detector changes. According to the photocurrent change generated by the light spot, the relative offset of the light spot on the photosensitive surface is calculated by the following formula (1). Formula (2) calculates the bending deflection ΔZ of the micro-cantilever beam:
Figure FDA0003469799010000021
Figure FDA0003469799010000021
Figure FDA0003469799010000022
Figure FDA0003469799010000022
其中:in: Kx为探测器在X轴方向上的检测灵敏度;K x is the detection sensitivity of the detector in the X-axis direction; Ky为探测器在Y轴方向上的检测灵敏度;K y is the detection sensitivity of the detector in the Y-axis direction; ΔS为光斑中心点相对于感光靶面O的直线偏移量;ΔS is the linear offset of the spot center point relative to the photosensitive target surface O; l为液滴与微悬臂梁的接触中心点到微悬臂梁固定端的距离;l is the distance from the contact center point of the droplet and the micro-cantilever to the fixed end of the micro-cantilever; L为激光束经微悬臂梁反射后从微悬臂梁的自由端到光电探测器的感光靶面的距离;L is the distance from the free end of the micro-cantilever beam to the photosensitive target surface of the photodetector after the laser beam is reflected by the micro-cantilever beam; 则,液滴附着力F为:F=kΔZThen, the droplet adhesion force F is: F=kΔZ 其中,k为微悬臂梁的弹簧常数。where k is the spring constant of the microcantilever.
4.根据权利要求1所述的基于微悬臂梁的液滴附着力检测系统,其特征是:所述微量进样器(4)的注射器液孔为平头,且经过亲水性处理,以增强液滴与液孔间附着力。4. The micro-cantilever-based droplet adhesion detection system according to claim 1, wherein the syringe liquid hole of the micro-sampler (4) is a flat head, and is treated with hydrophilicity to enhance the Adhesion between the droplet and the liquid hole. 5.根据权利要求1所述的基于微悬臂梁的液滴附着力检测系统,其特征是:所述微量进样器的容量为10μL,注射器液孔的直径为0.05mm;所述激光器是输出激光波长为632nm-780nm的半导体激光器。5. The micro-cantilever-based droplet adhesion detection system according to claim 1, characterized in that: the capacity of the micro-injector is 10 μL, and the diameter of the liquid hole of the syringe is 0.05 mm; the laser is an output A semiconductor laser with a laser wavelength of 632nm-780nm. 6.根据权利要求1所述的基于微悬臂梁的液滴附着力检测系统,其特征是:所述光电探测器(6)为位置敏感传感器PSD。6. The micro-cantilever-based droplet adhesion detection system according to claim 1, wherein the photodetector (6) is a position sensitive sensor PSD. 7.根据权利要求1所述的基于微悬臂梁的液滴附着力检测系统,其特征是:所述微悬臂梁为矩形单梁,梁长度为500μm,宽度为9μm,厚度为1μm。7 . The droplet adhesion detection system based on the micro-cantilever beam according to claim 1 , wherein the micro-cantilever beam is a rectangular single beam, the beam length is 500 μm, the width is 9 μm, and the thickness is 1 μm. 8 .
CN202210040004.7A 2022-01-14 2022-01-14 Drop adhesive force detecting system based on micro-cantilever beam Active CN114371124B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210040004.7A CN114371124B (en) 2022-01-14 2022-01-14 Drop adhesive force detecting system based on micro-cantilever beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210040004.7A CN114371124B (en) 2022-01-14 2022-01-14 Drop adhesive force detecting system based on micro-cantilever beam

Publications (2)

Publication Number Publication Date
CN114371124A true CN114371124A (en) 2022-04-19
CN114371124B CN114371124B (en) 2024-01-12

Family

ID=81144953

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202210040004.7A Active CN114371124B (en) 2022-01-14 2022-01-14 Drop adhesive force detecting system based on micro-cantilever beam

Country Status (1)

Country Link
CN (1) CN114371124B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115046921A (en) * 2022-08-11 2022-09-13 四川至臻光电有限公司 Testing method and testing device for representing film adhesion of plastic optical element
CN115791645A (en) * 2022-12-24 2023-03-14 安徽理工大学 Novel metabolic disease detection method

Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6289717B1 (en) * 1999-03-30 2001-09-18 U. T. Battelle, Llc Micromechanical antibody sensor
US6309600B1 (en) * 1997-08-28 2001-10-30 Biotrove, Inc. Apparatus for droplet microchemistry
US20090145231A1 (en) * 2005-09-28 2009-06-11 Japan Science And Technology Agency Shear measuring method and its device
CN101865807A (en) * 2010-04-15 2010-10-20 上海梭伦信息科技有限公司 Apparatus and method for testing solid-liquid dynamic and static contact angles by actual liquid droplet method
CN204346923U (en) * 2015-01-22 2015-05-20 安徽理工大学 Based on the micro-cantilever sensing and detecting system of reaction tank outerplanar mirror reflection
CN107300524A (en) * 2016-04-15 2017-10-27 财团法人工业技术研究院 Method for detecting antifouling capacity of material surface and detection device
CN107966403A (en) * 2017-11-23 2018-04-27 中国工程物理研究院化工材料研究所 A kind of apparatus and method for testing the micro- adhesion of non-infiltration solid-liquid interface
CN109269978A (en) * 2018-11-16 2019-01-25 西南科技大学 Measure the measuring device and measuring method of adhesion strength between solid liquid interface under electric field
CN110108625A (en) * 2019-05-11 2019-08-09 金华职业技术学院 A kind of adherency force test method based on micro- tweezer
CN110455655A (en) * 2019-08-23 2019-11-15 水利部杭州机械设计研究所 A kind of hot-spraying coating high pass amount detecting device and test method
CN110715603A (en) * 2019-11-12 2020-01-21 大连理工大学 System and method for simultaneously measuring five-degree-of-freedom errors of machine tool workbench
CN111122434A (en) * 2020-01-02 2020-05-08 河北科技大学 A high-precision test system for biomimetic high-adhesion superhydrophobic material-droplet adhesion
CN111693737A (en) * 2020-06-18 2020-09-22 中国科学院力学研究所 Method for manufacturing nanofiber probe tip for sample surface topography measurement
CN112444213A (en) * 2020-11-12 2021-03-05 大连理工大学 Method for improving precision of semiconductor laser micro-angle measurement system
CN113702281A (en) * 2021-08-25 2021-11-26 重庆齿轮箱有限责任公司 Solid-liquid interface adhesion force testing method and system

Patent Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6309600B1 (en) * 1997-08-28 2001-10-30 Biotrove, Inc. Apparatus for droplet microchemistry
US6289717B1 (en) * 1999-03-30 2001-09-18 U. T. Battelle, Llc Micromechanical antibody sensor
US20090145231A1 (en) * 2005-09-28 2009-06-11 Japan Science And Technology Agency Shear measuring method and its device
CN101865807A (en) * 2010-04-15 2010-10-20 上海梭伦信息科技有限公司 Apparatus and method for testing solid-liquid dynamic and static contact angles by actual liquid droplet method
CN204346923U (en) * 2015-01-22 2015-05-20 安徽理工大学 Based on the micro-cantilever sensing and detecting system of reaction tank outerplanar mirror reflection
CN107300524A (en) * 2016-04-15 2017-10-27 财团法人工业技术研究院 Method for detecting antifouling capacity of material surface and detection device
CN107966403A (en) * 2017-11-23 2018-04-27 中国工程物理研究院化工材料研究所 A kind of apparatus and method for testing the micro- adhesion of non-infiltration solid-liquid interface
CN109269978A (en) * 2018-11-16 2019-01-25 西南科技大学 Measure the measuring device and measuring method of adhesion strength between solid liquid interface under electric field
CN110108625A (en) * 2019-05-11 2019-08-09 金华职业技术学院 A kind of adherency force test method based on micro- tweezer
CN110455655A (en) * 2019-08-23 2019-11-15 水利部杭州机械设计研究所 A kind of hot-spraying coating high pass amount detecting device and test method
CN110715603A (en) * 2019-11-12 2020-01-21 大连理工大学 System and method for simultaneously measuring five-degree-of-freedom errors of machine tool workbench
CN111122434A (en) * 2020-01-02 2020-05-08 河北科技大学 A high-precision test system for biomimetic high-adhesion superhydrophobic material-droplet adhesion
CN111693737A (en) * 2020-06-18 2020-09-22 中国科学院力学研究所 Method for manufacturing nanofiber probe tip for sample surface topography measurement
CN112444213A (en) * 2020-11-12 2021-03-05 大连理工大学 Method for improving precision of semiconductor laser micro-angle measurement system
CN113702281A (en) * 2021-08-25 2021-11-26 重庆齿轮箱有限责任公司 Solid-liquid interface adhesion force testing method and system

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
牛晓燕: "微悬臂梁阵列传感系统设计与实现", 《中国优秀硕士学位论文全文数据库信息技术辑》, no. 12, pages 140 - 387 *
薛长国: "基于微悬臂梁技术对固液界面间横向摩擦力的检测", 《实验力学》, vol. 36, no. 6, pages 1 - 7 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115046921A (en) * 2022-08-11 2022-09-13 四川至臻光电有限公司 Testing method and testing device for representing film adhesion of plastic optical element
CN115791645A (en) * 2022-12-24 2023-03-14 安徽理工大学 Novel metabolic disease detection method

Also Published As

Publication number Publication date
CN114371124B (en) 2024-01-12

Similar Documents

Publication Publication Date Title
CN114371124A (en) Droplet adhesive force detecting system based on micro-cantilever beam
CN102788888B (en) Probe inserting device of scanning probe microscope and method thereof
CN100541204C (en) A measuring device and measuring method for the velocity distribution of a microfluidic channel
CN103562732A (en) Scanning probe microscope with compact scanner
CN109269976B (en) Measuring device and measuring method for measuring friction force between solid-liquid interfaces in electric field
JP5514582B2 (en) Liquid suction device
JPH0776696B2 (en) Atomic force microscope
WO2004066378A1 (en) Probe device with optical length-measuring device and method of inspecting probe
CN104101739B (en) A kind of magnetic tweezers
CN101886997B (en) Impact tester of single soldered ball
CN202735128U (en) Probe-type liquid level sampling and detecting system
CN106501219A (en) A kind of Portable, multiple parameter surface plasma resonance biochemical analyzer
CN100458431C (en) Method and devices of biochemical detection by using micro semi girder
JP2001188035A (en) Scan probe microscope
CN108426633A (en) A kind of vibration measuring method and vibration detecting device based on ligh trap
CN106680089A (en) Flexible hinge micro-component tensile testing device with clamping centering guide functions
CN204346386U (en) Based on the micro-cantilever sensing device of the adjustable flat mirror reflects of reaction tank leaning angle
CN209432679U (en) Measuring device for measuring the adhesion force between solid-liquid interface under electric field
CN108760485A (en) A kind of equipment for the detection of micro-nano-scale substance physical characteristic
CN204346889U (en) Based on the micro-cantilever sensing device of the adjustable flat mirror reflects of reaction tank camber angle
CN204346923U (en) Based on the micro-cantilever sensing and detecting system of reaction tank outerplanar mirror reflection
CN110108636A (en) A kind of cell adherence force measuring method
CN206192413U (en) Gas flow gradient detector based on micro -cantilever array
CN214408558U (en) Liquid viscosity measuring device based on linear laser-detector array
JP4528799B2 (en) Total reflection X-ray fluorescence analyzer

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant