CN108760485A - A kind of equipment for the detection of micro-nano-scale substance physical characteristic - Google Patents

Abstract

The invention discloses a device for detecting the physical characteristics of micro-nano scale substances, including a support frame, a high-precision positioning platform and a focusing device. The support frame is composed of an upper support plate and a lower support plate, and the high-precision positioning platform has three freedoms. degree of nano-precision translation stage and a micron-precision translation stage with two degrees of freedom. The micron-precision translation stage and the nano-precision translation stage are arranged above the upper support plate in sequence from bottom to top. The nano-precision translation stage is equipped with a sample stage. The top of the support plate is provided with a triangular mounting plate through the connecting rod, and the triangular mounting plate is provided with a probe lifting motor and a probe holder, and the probe holder holds a probe; the focusing device includes a microscope lens barrel, a focusing motor , CCD video sensor and objective lens. The objective lens and CCD video sensor are installed on the microscope lens barrel. tower.

Description

A device for detecting the physical properties of substances at the micro-nano scale

technical field

The present invention relates to a kind of equipment dedicated to the physical properties of micro-nanoscale substances, in particular to a physical device for micro-nanoscale particles (such as polymer particles) and micro-nanoscale living biological materials (cells, proteins, DNA, etc.) Devices for feature detection.

Background technique

Cancer is currently diagnosed as the second leading cause of death in the world. In 2012, there were 14.1 million cancer patients worldwide, and it is estimated that by 2035, this number will reach 24 million. It is very urgent to improve the means of understanding the status and development of cancer task. In 2007, Subra Suresh of the Harvard-MIT Department of Health Science and Technology summarized the current status of cancer cell research and pointed out that the mechanical properties of cancer cells are significantly different from normal cells. In the past few years, single-cell biology research has been The exploration of the nanomechanical and electrophysiological properties of individual cells was performed. However, most of the studies to date are empirical and lack mechanistic understanding, thus their impact on cancer therapy is limited. Therefore, it is urgent and important to develop high-precision single-cell mechanical property detection technology to reveal the development and cause of cancer cells.

At the same time, an in-depth study of the physical properties of matter at the micro-nano scale is conducive to revealing the nature and change process of matter, and has a significant role in promoting the development of the field of materials and biology.

Contents of the invention

The purpose of the present invention is to overcome the deficiencies in the prior art and provide a device for detecting the physical characteristics of micro-nanoscale substances, which mainly involves real-time observation of micro-nanoscale substances and determining the relative relationship between micro-nanoscale substances and probes. Functional realization of positional relationship, high-precision nanoscale physical parameter detection, high-precision probe positioning, high-precision probe force and displacement application.

The purpose of the present invention is achieved through the following technical solutions:

A device for detecting the physical properties of substances at the micro-nano scale, including a support frame, a high-precision positioning platform and a focusing device, the support frame is composed of an upper support plate and a lower support plate, and the high-precision positioning platform is composed of a three-freedom degree of nano-precision translation stage and a micron-precision translation stage with two degrees of freedom. There is a sample stage on the top, and the center of the upper support plate, the micron-precision translation stage and the nano-precision translation stage are correspondingly provided with through holes for providing observation space for the microscope, and the top of the upper support plate is also provided with a connecting rod A triangular mounting plate, the triangular mounting plate is provided with a probe lifting motor and a probe holder, and the probe holder is driven by the probe lifting motor, and the probe holder holds a probe. The needle can be a MEMS force probe or a very fine conductive probe or other physical parameter probe; the focusing device includes a microscope lens barrel, a focus motor, a CCD video sensor and an objective lens, and the objective lens and the CCD video sensor are installed in the microscope lens barrel On the top, the microscope lens barrel is installed on the focus motor, on the lower support plate is installed a coarse adjustment translation platform with two degrees of freedom, and the focus motor is installed on the coarse adjustment translation platform.

Compared with the prior art, the beneficial effects brought by the technical solution of the present invention are:

1. By effectively combining the high-magnification optical microscope and the probe device with the nano-scale and micron-scale translation stages with high precision, the real-time observation, positioning, needle alignment and detection of micro-nano scale substances can be realized at a low cost.

2. Using the combination of hollow nanometer displacement stage and micrometer displacement stage, it provides observation and moving space for high magnification inverted lens barrel optical microscope, avoids mutual interference with the movement of the probe part, and solves the problem that the working space of high magnification microscope is too small To achieve low-cost, fast, and easy-to-operate high-precision detection of physical properties of micro-nano-scale substances, and to promote the research and development of physical properties of micro-nano-scale substances.

3. The high-precision measurement characteristics of MEMS can be used to realize the possibility of measuring the mechanical and electrical characteristics of cancer cells.

Description of drawings

Fig. 1 is the three-dimensional structure schematic diagram of the present invention;

Fig. 2 is a schematic diagram of the front view structure of the present invention.

Reference signs: 1. Probe lifting motor, 2. Probe holder, 3. Probe, 4. Sample stage, 5. Objective lens, 6. Nano-precision translation stage, 7. Micron-precision translation stage, 8. Upper Support plate, 9, lower support plate, 10, connecting rod, 11, triangular mounting plate, 12, microscope lens barrel, 13, CCD video sensor, 14, focusing motor, 15, coarse adjustment displacement stage.

Detailed ways

In order to further understand the invention content, characteristics and effects of the present invention, the following examples are given, and detailed descriptions are as follows in conjunction with the accompanying drawings:

Please refer to Fig. 1 and Fig. 2, a kind of equipment for the detection of the physical characteristics of micro-nano scale material, high-precision probe 3, described high-precision probe 3 is installed on the probe holder 2 by bolt, the probe The holder 2 is connected to the movable part of the probe lifting motor 1 by bolts to realize the lifting of the probe. The probe lifting motor 1 is installed on the upper support plate 8 through the connecting rod 10 and the triangular mounting plate 11; the sample stage 4 The movable part of the nano-precision translation stage 6 with three degrees of freedom of X, Y, and Z is connected together by bolts, and the nano-precision translation stage 6 is stacked on the micron-precision translation stage 7 with two degrees of freedom of X and Y. The moving part is connected to each other by bolts, and the frame of the micron-precision displacement stage 7 is fixed on the upper support plate 8 by bolts; the high-magnification objective lens 5 and the CCD video sensor 13 are installed on the microscope barrel 12, and the microscope barrel 12 passes The lens barrel fixture is installed on the focusing motor 14, and the focusing motor 14 is installed on the manual coarse adjustment translation platform 15 with two degrees of freedom of X and Y through the mounting plate, and the coarse adjustment translation platform 15 is installed on the lower support plate 9 through bolt connection.

Specifically, in this embodiment, the upper support plate 8 , the micron precision translation stage 7 and the nanometer precision translation stage 6 are respectively provided with through holes for providing observation space for the microscope.

The working principle of the present invention is as follows:

First determine the position of the needle tip of the probe 3 in the microscope imaging, use the microscope focus motor 14 to focus the objective lens 5 at a distance near the probe tip, and use the coarse adjustment stage 15 to adjust the position of the microscope so that the needle tip of the probe 3 is within the imaging range. Cooperate with the probe lifting motor 1 and the coarse adjustment stage 15 and use the CCD video sensor 13 to judge whether the probe tip is successfully focused, and record the position data of the probe lifting motor 1 and focus motor 14 and the position of the probe tip on the display at this time . Utilize the probe lifting motor 1 to drive the probe up so as not to damage the probe when placing the sample, and then put the slide glass or petri dish on which the sample is placed on the sample stage 4 . The objective lens 5 magnifies the sample through a high-magnification objective lens to realize clear observation of the outline of the micro-nano scale material, adjust the microscope focus motor 14 to move up and down, and use the image generated by the CCD video sensor 13 to determine whether to focus on the micro-nano scale material.

The sample is moved by a micron-precision displacement stage 7, and the target substance is searched for by a CCD video sensor 13. The target substance is roughly moved below the probe tip through the micron-precision translation stage 7, and then the nano-precision translation stage 6 is used to adjust the precise position in the horizontal direction, so that the needle tip of the probe 3 is directly aligned with the center of the target substance.

The probe lifting motor 1 is lowered so that it just touches the target substance, and whether the contact is successful is determined by detecting the change of the electrical signal of the MEMS probe 3 and the image of the CCD video sensor 13 . Then, the high-precision Z-direction feed motion of the nano-precision displacement stage 6 is used to realize the pressing of the probe 3 into the substance. Record the Z-direction feed distance of the nano-precision displacement stage 6 and the physical parameter values calculated from the electrical signal values of the MEMS probe 3 . If a MEMS force sensing probe is used, the Young’s modulus and relaxation time of the material can be calculated by using the displacement and force curves through the Hertz contact model, and the stiffness and viscoelastic coefficient of the micro-nano scale material can be calculated, or the conductive probe can be used to detect electrical properties of matter, etc.

In summary, the present invention can accurately, conveniently and efficiently measure the physical properties of micro-nano-scale substances.

The present invention is not limited to the embodiments described above. The above description of the specific embodiments is intended to describe and illustrate the technical solution of the present invention, and the above specific embodiments are only illustrative and not restrictive. Without departing from the gist of the present invention and the scope of protection of the claims, those skilled in the art can also make many specific changes under the inspiration of the present invention, and these all belong to the protection scope of the present invention.

Claims (2)

1. A kind of equipment that is used for the physical property detection of micro-nano scale substance, is characterized in that, comprises support frame, high-precision positioning platform and focusing device, is characterized in that, described support frame is made up of upper support plate and lower support plate, The high-precision positioning platform is composed of a nano-precision translation platform with three degrees of freedom and a micron-precision translation platform with two degrees of freedom. The micron-precision translation platform and the nano-precision translation platform are sequentially arranged on the upper support from bottom to top Above the plate, the nano-precision displacement stage is provided with a sample stage, and the center of the upper support plate, the micron-precision displacement stage and the nano-precision displacement stage are all correspondingly provided with through holes for providing observation space for the microscope. The top of the upper support plate is also provided with a triangular mounting plate through a connecting rod, and the triangular mounting plate is provided with a probe lifting motor and a probe holder, and the probe holder is driven by the probe lifting motor. The probe is clamped on the needle holder; the focusing device includes a microscope lens barrel, a focusing motor, a CCD video sensor and an objective lens, and the objective lens and the CCD video sensor are installed on the microscope lens barrel, and the microscope lens barrel is installed on As for the focus motor, a coarse adjustment translation platform with two degrees of freedom is installed on the lower support plate, and the focus motor is installed on the coarse adjustment translation platform. 2. A device for detecting physical properties of micro-nanoscale substances according to claim 1, wherein the probe is a MEMS force probe or a conductive probe.