CN114370522A - Flow rate adjustment valve and control method thereof - Google Patents
Flow rate adjustment valve and control method thereof Download PDFInfo
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- CN114370522A CN114370522A CN202011094999.2A CN202011094999A CN114370522A CN 114370522 A CN114370522 A CN 114370522A CN 202011094999 A CN202011094999 A CN 202011094999A CN 114370522 A CN114370522 A CN 114370522A
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- 238000000034 method Methods 0.000 title claims abstract description 27
- 230000001105 regulatory effect Effects 0.000 claims abstract description 95
- 230000001276 controlling effect Effects 0.000 claims abstract description 6
- 230000006835 compression Effects 0.000 claims description 3
- 238000007906 compression Methods 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 11
- 239000002737 fuel gas Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 229920001971 elastomer Polymers 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000008236 heating water Substances 0.000 description 2
- 238000002485 combustion reaction Methods 0.000 description 1
- 239000000806 elastomer Substances 0.000 description 1
- 238000005485 electric heating Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
- F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
- F16K31/047—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor characterised by mechanical means between the motor and the valve, e.g. lost motion means reducing backlash, clutches, brakes or return means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
- F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
- F16K31/046—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor with electric means, e.g. electric switches, to control the motor or to control a clutch between the valve and the motor
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/44—Mechanical actuating means
- F16K31/50—Mechanical actuating means with screw-spindle or internally threaded actuating means
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Abstract
Description
技术领域technical field
本发明涉及一种流量调整阀及其控制方法,特别涉及一种提升控制精准度的流量调整阀及其控制方法。The invention relates to a flow regulating valve and a control method thereof, in particular to a flow regulating valve and a control method thereof for improving control accuracy.
背景技术Background technique
一般的热水器可分为电加热的热水器及利用燃料气加热的热水器。其中燃料气加热的热水器系藉由燃料气体燃烧时产生的热能,以提高热水的温度,因此,进气方式的控制与结构,即决定热水加热上升的过程与加热的效率。传统的热水器系将冷水加热后,系通过使用者调整冷热水源,藉以达到适合使用的热水温度,目前市面上许多的热水器设计,系提供了恒温控制功能,以使得热水水温保持一定。General water heaters can be divided into electric heating water heaters and water heaters heated by fuel gas. The fuel gas heating water heater uses the heat energy generated by the combustion of the fuel gas to increase the temperature of the hot water. Therefore, the control and structure of the air intake method determine the heating and rising process of the hot water and the heating efficiency. After the traditional water heater heats cold water, the user adjusts the hot and cold water source to achieve a suitable hot water temperature. At present, many water heater designs on the market provide a constant temperature control function to keep the hot water temperature constant.
习知热水器恒温装置主要利用温度控制电路方式,藉以直接地控制流量调整阀,来进行对瓦斯流量的控制。然而,习知在整体的结构设计上系较繁杂,且各零件间有制造公差,使得流量调整阀在控制时往往产生”无效步”的状况。举例来说,使用者要控制步进马达走100步,但因为无效步的状况,步进马达实际上只走了90步,进而导致进气量不准确的缺点。The conventional water heater thermostat mainly uses a temperature control circuit to directly control the flow regulating valve to control the gas flow. However, the conventional one is complicated in overall structural design, and there are manufacturing tolerances among various parts, so that the flow regulating valve often produces "invalid steps" during control. For example, the user wants to control the stepper motor to take 100 steps, but because of the invalid step condition, the stepper motor actually only takes 90 steps, which leads to the disadvantage of inaccurate air intake.
发明内容SUMMARY OF THE INVENTION
本发明在于提供一种流量调整阀及其控制方法,藉以提升流量调整阀的控制精准度。The present invention provides a flow regulating valve and a control method thereof, so as to improve the control accuracy of the flow regulating valve.
本发明所要解决的技术问题是通过如下技术方案实现的:The technical problem to be solved by the present invention is achieved through the following technical solutions:
本发明的一实施例所揭露的流量调整阀的控制方法,适于控制一流量调整阀。流量调整阀的控制方法包含下列步骤。输送一第一电压给流量调整阀的一驱动马达,以令驱动马达带动流量调整阀的一螺帽件相对流量调整阀的一螺杆件转动而消除螺帽件与螺杆件的齿隙。输送大于第一电压的一第二电压给流量调整阀的驱动马达,以令驱动马达带动流量调整阀的螺帽件沿同一方向相对流量调整阀的螺杆件转动而带动螺杆件沿其轴向相对螺帽件移动。The control method of a flow regulating valve disclosed in an embodiment of the present invention is suitable for controlling a flow regulating valve. The control method of the flow regulating valve includes the following steps. A first voltage is supplied to a driving motor of the flow regulating valve, so that the driving motor drives a nut member of the flow regulating valve to rotate relative to a screw member of the flow regulating valve to eliminate the backlash between the nut member and the screw member. A second voltage greater than the first voltage is supplied to the drive motor of the flow regulating valve, so that the driving motor drives the nut member of the flow regulating valve to rotate relative to the screw member of the flow regulating valve in the same direction and drives the screw member to be opposite along its axial direction. The nut piece moves.
本发明的另一实施例所揭露的流量调整阀包含一壳体、一螺帽件、一螺杆件、一阀塞及一复位件。螺帽件可转动地位于壳体内。螺杆件包含相连的一螺纹段及一组合段。螺纹段螺合于螺帽件。组合段位于壳体之外。阀塞包含一挠性体及一塞体。挠性体装设于螺杆件的组合段。塞体固定于挠性体远离螺杆件的一侧。复位件位于壳体之外,且复位件的一端抵靠于壳体,以及复位件的另一端抵靠于阀塞的挠性体。Another embodiment of the present invention discloses a flow regulating valve comprising a casing, a nut member, a screw member, a valve plug and a reset member. The nut member is rotatably located within the housing. The screw element includes a connected thread segment and a combined segment. The threaded section is screwed to the nut member. The combined segment is located outside the shell. The valve plug includes a flexible body and a plug body. The flexible body is installed on the combination section of the screw member. The plug body is fixed on the side of the flexible body away from the screw member. The reset piece is located outside the housing, one end of the reset piece abuts against the housing, and the other end of the reset piece abuts against the flexible body of the valve plug.
换句话说,本发明提供一种流量调整阀的控制方法,适于控制一流量调整阀,包含:In other words, the present invention provides a method for controlling a flow regulating valve, suitable for controlling a flow regulating valve, comprising:
输送一第一电压给该流量调整阀的一驱动马达,以令该驱动马达带动该流量调整阀的一螺帽件相对该流量调整阀的一螺杆件转动而消除该螺帽件与该螺杆件的齿隙;以及A first voltage is supplied to a driving motor of the flow regulating valve, so that the driving motor drives a nut member of the flow regulating valve to rotate relative to a screw member of the flow regulating valve to eliminate the nut member and the screw member the backlash; and
输送大于该第一电压的一第二电压给该流量调整阀的该驱动马达,以令该驱动马达带动该流量调整阀的该螺帽件沿同一方向相对该流量调整阀的该螺杆件转动而带动该螺杆件沿其轴向相对该螺帽件移动。A second voltage greater than the first voltage is supplied to the driving motor of the flow regulating valve, so that the driving motor drives the nut member of the flow regulating valve to rotate relative to the screw member of the flow regulating valve in the same direction to rotate. The screw member is driven to move relative to the nut member along its axial direction.
优选地,于输送该第二电压给该流量调整阀的该驱动马达的步骤后,更包含:Preferably, after the step of delivering the second voltage to the driving motor of the flow regulating valve, further comprising:
停止供电给该流量调整阀的该驱动马达,以解除该驱动马达对该螺帽件的控制。The drive motor that supplies power to the flow regulating valve is stopped to release the control of the nut member by the drive motor.
优选地,于停止供电给该流量调整阀的该驱动马达的步骤后,更包含:Preferably, after the step of stopping power supply to the driving motor of the flow regulating valve, it further comprises:
通过该流量调整阀的一复位件带动该流量调整阀的该螺杆件沿其轴向相对该螺帽件复位而用以令该螺杆件上的一阀塞封闭一阀门。A reset member of the flow regulating valve drives the screw member of the flow regulating valve to reset relative to the nut member along its axial direction, so as to make a valve plug on the screw member close a valve.
优选地,当该驱动马达于该第一电压下,该螺帽件令该螺杆件沿该螺杆件的轴向位移的推力小于该复位件的阻力。Preferably, when the driving motor is at the first voltage, the thrust force of the nut member to displace the screw member along the axial direction of the screw member is smaller than the resistance of the reset member.
优选地,当该驱动马达于该第二电压下,该螺帽件令该螺杆件沿该螺杆件的轴向位移的推力大于该复位件的阻力。Preferably, when the driving motor is under the second voltage, the thrust force of the nut member to displace the screw member along the axial direction of the screw member is greater than the resistance of the reset member.
本发明还提供一种流量调整阀,包含:The present invention also provides a flow regulating valve, comprising:
一壳体;a shell;
一螺帽件,可转动地位于该壳体内;a nut member rotatably located in the housing;
一螺杆件,包含相连的一螺纹段及一组合段,该螺纹段螺合于该螺帽件,该组合段位于该壳体之外;a screw member, comprising a connected thread segment and a combination segment, the thread segment is screwed to the nut member, and the combination segment is located outside the housing;
一阀塞,包含一挠性体及一塞体,该挠性体装设于该螺杆件的该组合段,该塞体固定于该挠性体远离该螺杆件的一侧;a valve plug, comprising a flexible body and a plug body, the flexible body is mounted on the assembly section of the screw member, and the plug body is fixed on a side of the flexible body away from the screw member;
一复位件,位于该壳体之外,且该复位件的一端抵靠于该壳体,以及该复位件的另一端抵靠于该阀塞的该挠性体。A reset piece is located outside the casing, one end of the reset piece abuts against the housing, and the other end of the reset piece abuts against the flexible body of the valve plug.
优选地,该复位件为压缩弹簧。Preferably, the reset member is a compression spring.
优选地,流量调整阀更包含一磁性件,固定于该螺帽件,并用以与一线圈搭配而共同构成一驱动马达。Preferably, the flow regulating valve further includes a magnetic member fixed to the nut member and used for cooperating with a coil to form a driving motor.
根据上述实施例的流量调整阀及其控制方法,先输送一第一电压(如2~3伏特)给流量调整阀的驱动马达(如步进马达)的线圈(图中未示出),以令驱动马达带动流量调整阀的螺帽件沿方向相对流量调整阀的螺杆件转动而消除螺帽件与螺杆件的齿隙。再输送大于第一电压的一第二电压(如24伏特)给流量调整阀的驱动马达,以令驱动马达带动流量调整阀的螺帽件沿同一方向相对流量调整阀的螺杆件转动而带动螺杆件沿方向相对螺帽件移动。如此一来,可以在每次控制流量调整阀前先消除流量调整阀的无效步,进而提升流量调整阀的控制精准度,如由原本的10步误差缩小至2~3步误差。According to the flow regulating valve and the control method thereof of the above-mentioned embodiments, a first voltage (such as 2-3 volts) is firstly supplied to the coil (not shown in the figure) of the driving motor (such as a stepping motor) of the flow regulating valve, so as to The driving motor drives the nut member of the flow regulating valve to rotate relative to the screw member of the flow regulating valve in the direction to eliminate the backlash between the nut member and the screw member. Then send a second voltage (such as 24 volts) greater than the first voltage to the driving motor of the flow regulating valve, so that the driving motor drives the nut member of the flow regulating valve to rotate relative to the screw member of the flow regulating valve in the same direction to drive the screw The piece moves in the direction relative to the nut piece. In this way, the invalid steps of the flow adjustment valve can be eliminated before each control of the flow adjustment valve, thereby improving the control accuracy of the flow adjustment valve, such as reducing the original 10-step error to 2-3 steps.
以上关于本发明内容的说明及以下实施方式的说明系用以示范与解释本发明的原理,并且为本发明的保护范围提供更进一步的解释。The above description of the content of the present invention and the description of the following embodiments are used to demonstrate and explain the principle of the present invention, and provide further explanation for the protection scope of the present invention.
附图说明Description of drawings
图1为根据本发明第一实施例所述的流量调整阀的立体示意图;FIG. 1 is a three-dimensional schematic diagram of the flow regulating valve according to the first embodiment of the present invention;
图2为图1的流量调整阀的剖面示意图;FIG. 2 is a schematic cross-sectional view of the flow regulating valve of FIG. 1;
图3为图2的局部放大示意图;Fig. 3 is the partial enlarged schematic diagram of Fig. 2;
图4至图9为图1的流体调整阀的控制方法。4 to 9 illustrate a control method of the fluid regulating valve of FIG. 1 .
【附图标记说明】[Description of reference numerals]
10...流量调整阀10...Flow regulating valve
20...基座20...Pedestal
30...板件30...plate
32...阀门32...Valve
100...壳体100...shell
110...外壳件110...Housing parts
111...底板111... Bottom plate
112...环形侧板112...Circular side plate
120...第一组装座120...The first assembly seat
130...第二组装座130...Second assembly seat
140...弹性件140...Elastomer
200...螺帽件200...nut parts
210...导槽210...Guide groove
211...第一侧面211...First side
212...第二侧面212...Second side
250...轴承250...Bearing
300...螺杆件300...Screw parts
310...螺纹段310...Threaded segment
311...导块311...guide block
3111...第一侧面3111...First side
3121...第二侧面3121...Second side
320...组合段320...Combination segment
350...磁性件350...Magnetic
400...阀塞400... valve plug
410...挠性体410...Flexible body
420...塞体420...plug body
500...复位件500...Reset pieces
a1、a2、b、c...方向a1, a2, b, c... directions
G1~G3...间隙G1~G3...gap
具体实施方式Detailed ways
请参阅图1至图3。图1为根据本发明第一实施例所述的流量调整阀的立体示意图。图2为图1的流量调整阀的剖面示意图。图3为图2的局部放大示意图。See Figures 1 through 3. FIG. 1 is a schematic perspective view of a flow regulating valve according to a first embodiment of the present invention. FIG. 2 is a schematic cross-sectional view of the flow rate adjustment valve of FIG. 1 . FIG. 3 is a partial enlarged schematic view of FIG. 2 .
本实施例的流量调整阀10固定于一基座20,并用以塞住一板件30的阀门32,或是让板件30的阀门32打开。The
流量调整阀10包含一壳体100、一螺帽件200、一螺杆件300、一阀塞400及一复位件500。The
壳体100例如包含一外壳件110、一第一组装座120、一第二组装座130及一弹性件140。外壳件110包含一底板111及一环形侧板112。环形侧板112连接于底板111的周缘,以令底板111与环形侧板112共同围绕出容置空间及对应容置空间的开口。第一组装座120安装于外壳件110的开口处,第二组装座130可活动地位于外壳件110的容置空间内。弹性件140夹设于外壳件110的底板111与第二组装座130。The
螺帽件200可转动地位于外壳件110内,并例如通过二轴承250分别装设于第一组装座120与第二组装座130,以减少螺帽件200相对外壳件110转动的转动阻力。The
螺杆件300包含相连的一螺纹段310及一组合段320。螺纹段310螺合于螺帽件200。组合段320位于外壳件110之外。螺帽件200固定有一磁性件350,磁性件350如永久磁铁并与线圈(图中未示出)搭配而构成一驱动马达,如步进马达。当磁性件350受线圈(图中未示出)激磁时,磁性件350会带动螺帽件200沿方向a1的同向或反向相对壳体100的外壳件110转动,进而通过螺帽件200带动螺杆件300沿方向b的同向或反向相对壳体100的外壳件110平移。The
阀塞400包含一挠性体410及一塞体420。挠性体410例如由橡胶制成,并装设于螺杆件300的组合段320。塞体420例如由金属制成,并固定于挠性体410远离螺杆件300的一侧。The
复位件500例如为压缩弹簧。复位件500位于壳体100的容置空间外,且复位件500的一端抵靠于壳体100,以及复位件500的另一端抵靠于阀塞400的挠性体410。当磁性件350对应的线圈断电时,磁性件350不再受到激磁的影响而可自行相对壳体100转动。此时,可通过复位件500的弹性来带动螺杆件300沿方向c复位。The restoring
如图3所示,螺帽件200具有螺纹状的一导槽210。导槽210具有相对靠近阀塞400的一第一侧面211及相对远离阀塞400的一第二侧面212。螺杆件300的螺纹段310具有螺纹状的一导块311。导块311具有相对靠近阀塞400的一第一侧面3111及相对远离阀塞400的一第二侧面3121。当阀塞400受复位件500的弹力作用下,螺杆件300的导块311的第一侧面3111会抵靠于导槽210的第一侧面211而消除导块311的第一侧面3111与导槽210的第一侧面211间的间隙。不过螺杆件300的导块311的第二侧面3112会与导槽210的第二侧面212分离而产生一间隙G1。As shown in FIG. 3 , the
接着进行流量调整阀10的控制方法的说明。请参阅图4至图9。图4至图9为图1的流体调整阀的控制方法。流量调整阀10的控制方法适于控制一流量调整阀10,且步骤流程分成下列两种。Next, the control method of the flow
第一种为初始状态,如图2与图3所示,流量调整阀10处于没有无效步的状态,导块311的第一侧面3111与导槽210的第一侧面211间无间隙。如图4与图5所示,输送足以带动螺杆件300沿方向b移动的电压给流量调整阀10的驱动马达(如步进马达)的线圈(图中未示出),以令驱动马达带动流量调整阀10的螺帽件200相对流量调整阀10的螺杆件300转动而带动螺杆件300沿其轴向(如方向b)相对螺帽件200移动。此电压值例如为24伏特(V)。The first is the initial state. As shown in FIGS. 2 and 3 , the
接着,如图6与图7所示,对流量调整阀10的驱动马达(如步进马达)的线圈断电,则复位件500的弹力会带动螺杆件300沿方向c复位,并令阀塞400封闭板件30的阀门32。当阀塞400封闭板件30的阀门32,由于螺帽件200处于惯性运动状态下,故仍会继续沿方向a2相对螺杆件300转动而导致导块311的第一侧面3111与导槽210的第一侧面211间产生间隙G2。此外,阀塞400的挠性体410与螺杆件300的组合段320间亦会产生间隙G3。间隙G2与间隙G3皆是无效步的原因。Next, as shown in FIG. 6 and FIG. 7 , the coil of the driving motor (such as the stepping motor) of the
接着,第二种为待修正状态,如图6与图7所示,流量调整阀10处于存在无效步的状态,导块311的第一侧面3111与导槽210的第一侧面211间有间隙G2,以及阀塞400的挠性体410与螺杆件300的组合段320间有间隙G3。Next, the second state is to be corrected. As shown in FIG. 6 and FIG. 7 , the
如图8所示,先输送一第一电压(如2~3伏特)给流量调整阀10的驱动马达(如步进马达)的线圈(图中未示出),以令驱动马达带动流量调整阀10的螺帽件200沿方向a1相对流量调整阀10的螺杆件300转动而消除螺帽件200与螺杆件300的齿隙。As shown in FIG. 8 , a first voltage (such as 2-3 volts) is firstly supplied to the coil (not shown in the figure) of the driving motor (such as a stepping motor) of the
接着,如图9所示,再输送大于第一电压的一第二电压(如24伏特)给流量调整阀10的驱动马达,以令驱动马达带动流量调整阀10的螺帽件200沿同一方向a1相对流量调整阀10的螺杆件300转动而带动螺杆件300沿方向b相对螺帽件200移动。Next, as shown in FIG. 9 , a second voltage (eg, 24 volts) greater than the first voltage is supplied to the driving motor of the
在本实施例中,第一电压例如为2~3伏特,但并不以此为限。在其他实施例中,第一电压也可以为其他电压值,只要当驱动马达于第一电压下,螺帽件200令螺杆件300沿螺杆件300的轴向位移的推力小于复位件500的阻力即可。此外,在本实施例中,第二电压例如为24伏特,但并不以此为限。在其他实施例中,第二电压也可以为其他电压值,只要当驱动马达于第二电压下,螺帽件200令螺杆件300沿螺杆件300的轴向位移的推力大于复位件500的阻力。In this embodiment, the first voltage is, for example, 2-3 volts, but not limited thereto. In other embodiments, the first voltage can also be other voltage values, as long as the driving force of the
根据上述实施例的流量调整阀及其控制方法,先输送一第一电压(如2~3伏特)给流量调整阀的驱动马达(如步进马达)的线圈(图中未示出),以令驱动马达带动流量调整阀的螺帽件沿方向相对流量调整阀的螺杆件转动而消除螺帽件与螺杆件的齿隙。再输送大于第一电压的一第二电压(如24伏特)给流量调整阀的驱动马达,以令驱动马达带动流量调整阀的螺帽件沿同一方向相对流量调整阀的螺杆件转动而带动螺杆件沿方向相对螺帽件移动。如此一来,可以在每次控制流量调整阀前先消除流量调整阀的无效步,进而提升流量调整阀的控制精准度,如由原本的10步误差缩小至2~3步误差。According to the flow regulating valve and the control method thereof of the above-mentioned embodiments, a first voltage (such as 2-3 volts) is firstly supplied to the coil (not shown in the figure) of the driving motor (such as a stepping motor) of the flow regulating valve, so as to The driving motor drives the nut member of the flow regulating valve to rotate relative to the screw member of the flow regulating valve in the direction to eliminate the backlash between the nut member and the screw member. Then send a second voltage (such as 24 volts) greater than the first voltage to the driving motor of the flow regulating valve, so that the driving motor drives the nut member of the flow regulating valve to rotate relative to the screw member of the flow regulating valve in the same direction to drive the screw The piece moves in the direction relative to the nut piece. In this way, the invalid steps of the flow adjustment valve can be eliminated before each control of the flow adjustment valve, thereby improving the control accuracy of the flow adjustment valve, such as reducing the original 10-step error to 2-3 steps.
Claims (8)
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CN1062785A (en) * | 1990-11-19 | 1992-07-15 | 三菱材料株式会社 | Valve and solenoid valve by the low-force operation |
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TW200823619A (en) * | 2006-11-17 | 2008-06-01 | Tsai-Cheng Li | Motion stage controlled by wire twisting |
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