[go: up one dir, main page]

CN114354379B - Testing device for high-temperature creep age forming of alloy sheet - Google Patents

Testing device for high-temperature creep age forming of alloy sheet Download PDF

Info

Publication number
CN114354379B
CN114354379B CN202210010419.XA CN202210010419A CN114354379B CN 114354379 B CN114354379 B CN 114354379B CN 202210010419 A CN202210010419 A CN 202210010419A CN 114354379 B CN114354379 B CN 114354379B
Authority
CN
China
Prior art keywords
alloy sheet
creep
positioning block
temperature creep
age forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202210010419.XA
Other languages
Chinese (zh)
Other versions
CN114354379A (en
Inventor
唐丁丁
熊炜
李铭
李细锋
陈军
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Jiao Tong University
Original Assignee
Shanghai Jiao Tong University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Jiao Tong University filed Critical Shanghai Jiao Tong University
Priority to CN202210010419.XA priority Critical patent/CN114354379B/en
Publication of CN114354379A publication Critical patent/CN114354379A/en
Application granted granted Critical
Publication of CN114354379B publication Critical patent/CN114354379B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)

Abstract

本发明涉及一种用于合金薄板高温蠕变时效成形的测试装置,包括底座、两个定位模块和施力模块,所述底座的中央为蠕变平台,合金薄板设置在蠕变平台上,在蠕变平台的两端设有凹槽,定位模块可滑动位于两个凹槽内并且分别夹持合金薄板的两端,所述施力模块包括楔块和两个滑块,每个滑块的一侧抵靠另一滑块、另一侧抵靠定位模块,以及底面贴合合金薄板上表面,所述楔块用于插入两个滑块之间。与现有技术相比,本发明总体尺寸较小,操作方便,制造成本低,可用于小尺寸试样的测试以进行蠕变时效成形工艺下的板料性能测试。

The invention relates to a testing device for high-temperature creep aging forming of alloy thin plates, which includes a base, two positioning modules and a force application module. The center of the base is a creep platform, and the alloy thin plate is arranged on the creep platform. Grooves are provided at both ends of the creep platform. The positioning module can slide in the two grooves and clamp the two ends of the alloy thin plate respectively. The force application module includes a wedge and two sliders. Each slider has One side is against the other slider, the other side is against the positioning module, and the bottom surface is attached to the upper surface of the alloy sheet. The wedge is used to be inserted between the two sliders. Compared with the existing technology, the present invention has smaller overall size, easy operation and low manufacturing cost, and can be used for testing small-sized samples to perform sheet material performance testing under the creep aging forming process.

Description

一种用于合金薄板高温蠕变时效成形的测试装置A testing device for high-temperature creep aging forming of alloy sheets

技术领域Technical field

本发明涉及一种合金薄板加工领域,尤其是涉及一种用于合金薄板高温蠕变时效成形的测试装置。The invention relates to the field of alloy thin plate processing, and in particular to a testing device for high-temperature creep aging forming of alloy thin plates.

背景技术Background technique

蠕变时效成形技术是利用金属的蠕变特性,将成形与时效热处理同步进行的一种成形方法。蠕变时效成形技是实现大型蒙皮和壁板件成形的有效方法。为了提高成形的精度和效果,对合金薄板进行板高温蠕变时效成形过程的力学性能研究测试是非常重要的。现有技术中,通常是直接采用常规的蠕变时效成形工装进行研究测试,现有的工装结构一般较为复杂,测试中需要反复进行装载以及卸载,操作难度大且效率低下。Creep aging forming technology is a forming method that utilizes the creep characteristics of metal to simultaneously perform forming and aging heat treatment. Creep aging forming technology is an effective method to achieve the forming of large skin and wall panel parts. In order to improve the precision and effect of forming, it is very important to research and test the mechanical properties of alloy thin plates during the high-temperature creep aging forming process. In the existing technology, conventional creep aging forming tooling is usually directly used for research and testing. The structure of the existing tooling is generally relatively complex and requires repeated loading and unloading during testing, making the operation difficult and inefficient.

发明内容Contents of the invention

本发明的目的就是为了克服上述现有技术存在的缺陷而提供一种用于合金薄板高温蠕变时效成形的测试装置。The purpose of the present invention is to provide a testing device for high-temperature creep aging forming of alloy thin plates in order to overcome the above-mentioned defects in the prior art.

本发明的目的可以通过以下技术方案来实现:The object of the present invention can be achieved through the following technical solutions:

一种用于合金薄板高温蠕变时效成形的测试装置,包括底座、两个定位模块和施力模块,所述底座的中央为蠕变平台,合金薄板设置在蠕变平台上,在蠕变平台的两端设有凹槽,定位模块可滑动位于两个凹槽内并且分别夹持合金薄板的两端,所述施力模块包括楔块和两个滑块,每个滑块的一侧抵靠另一滑块、另一侧抵靠定位模块,以及底面贴合合金薄板上表面,所述楔块用于插入两个滑块之间。A testing device for high-temperature creep aging forming of alloy thin plates, including a base, two positioning modules and a force application module. The center of the base is a creep platform, and the alloy thin plates are set on the creep platform. There are grooves at both ends. The positioning module can slide in the two grooves and clamp the two ends of the alloy sheet respectively. The force application module includes a wedge and two sliders. One side of each slider is against The wedge block is inserted between the two slide blocks with the other slide block, the other side against the positioning module, and the bottom surface against the upper surface of the alloy sheet.

进一步地,所述定位模块包括上定位块、下定位块和固定杆,所述下定位块位于凹槽内,所述合金薄板的一端被夹持在上定位块和下定位块之间,所述固定杆依次穿过上定位块和合金薄板后连接下定位块。Further, the positioning module includes an upper positioning block, a lower positioning block and a fixed rod. The lower positioning block is located in the groove, and one end of the alloy thin plate is clamped between the upper positioning block and the lower positioning block. The fixed rod passes through the upper positioning block and the alloy thin plate in sequence and then connects to the lower positioning block.

进一步地,其特征在于,所述下定位块位于凹槽内后的顶面高度和蠕变平台齐平。Further, it is characterized in that the height of the top surface of the lower positioning block after it is located in the groove is flush with the creep platform.

进一步地,其特征在于,所述两个滑块间形成V型槽用于接触楔块。Further, it is characterized in that a V-shaped groove is formed between the two slide blocks for contacting the wedge block.

进一步地,其特征在于,所述V型槽的角度为至多20度。Further, it is characterized in that the angle of the V-shaped groove is at most 20 degrees.

进一步地,其特征在于,还包括顶板,所述底座的四周设有立柱用于连接顶板。Further, it is characterized in that it also includes a top plate, and columns are provided around the base for connecting the top plate.

进一步地,其特征在于,所述顶板上设有第一通孔,用于穿过楔块。Further, it is characterized in that a first through hole is provided on the top plate for passing through the wedge.

与现有技术相比,本发明具有以下有益效果:Compared with the prior art, the present invention has the following beneficial effects:

本发明通过底座、定位模块和施力模块的模块化设计实现了合金薄板的横向定位和拉伸蠕变,所有的结构都是较为规则的几何形状零件且相互之间有一定配合,总体尺寸较小,操作方便,制造成本低,可以用于小尺寸试样的测试以进行蠕变时效成形工艺下的板料性能测试。The present invention realizes the lateral positioning and tensile creep of the alloy sheet through the modular design of the base, positioning module and force application module. All structures are relatively regular geometric parts and have certain coordination with each other, and the overall size is relatively large. It is small, easy to operate, and has low manufacturing cost. It can be used to test small-sized samples to test the performance of sheet metal under the creep aging forming process.

附图说明Description of the drawings

图1为本发明的立体结构示意图。Figure 1 is a schematic three-dimensional structural diagram of the present invention.

图2为本发明底座的结构示意图。Figure 2 is a schematic structural diagram of the base of the present invention.

图3为本发明定位模块的结构示意图。Figure 3 is a schematic structural diagram of the positioning module of the present invention.

图4为本发明施力模块的结构示意图。Figure 4 is a schematic structural diagram of the force application module of the present invention.

图5为本发明的剖视结构示意图。Figure 5 is a schematic cross-sectional structural diagram of the present invention.

附图标记:1、底座,11、蠕变平台,12、凹槽,13、立柱,2、定位模块,21、上定位块,22、下定位块,23、固定杆,3、施力模块,31、滑块,32、楔块,4、合金薄板,5、顶板,51、第一通孔,52、第二通孔。Reference signs: 1. Base, 11. Creep platform, 12. Groove, 13. Column, 2. Positioning module, 21. Upper positioning block, 22. Lower positioning block, 23. Fixed rod, 3. Force application module , 31. Slider, 32. Wedge, 4. Alloy sheet, 5. Top plate, 51. First through hole, 52. Second through hole.

具体实施方式Detailed ways

下面结合附图和具体实施例对本发明进行详细说明。本实施例以本发明技术方案为前提进行实施,给出了详细的实施方式和具体的操作过程,但本发明的保护范围不限于下述的实施例。The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments. This embodiment is implemented based on the technical solution of the present invention and provides detailed implementation modes and specific operating procedures. However, the protection scope of the present invention is not limited to the following embodiments.

如图1所示,本实施例提供了一种用于合金薄板高温蠕变时效成形的测试装置,包括底座1、两个定位模块2和施力模块3,两个定位模块2安装在底座1的两侧,施力模块3安装在底座1上。待测试的合金薄板4被夹持在施力模块3和底座1之间,并且两端通过定位模块2固定。As shown in Figure 1, this embodiment provides a test device for high-temperature creep aging forming of alloy thin plates, including a base 1, two positioning modules 2 and a force application module 3. The two positioning modules 2 are installed on the base 1 On both sides of the machine, the force module 3 is installed on the base 1. The alloy sheet 4 to be tested is clamped between the force application module 3 and the base 1 , and both ends are fixed by the positioning module 2 .

如图2所示,底座1为长方体主体结构,在四角设计四个突出的立柱13并在顶部留出螺纹孔,底座1的上方通过紧固螺栓固定有一个顶板5。在底座1的中央设有一个上凸的蠕变平台11,在蠕变平台11的两端分为为两个凹槽12。定位模块2用于滑动设置在凹槽12内,定位模块2和凹槽12设置合理间隙配合以确保定位块可以自由滑动。顶板5上设有第一通孔51和第二通孔52,分别用于穿过施力模块3的楔块和定位模块2的固定杆。As shown in Figure 2, the base 1 has a rectangular main structure. Four protruding columns 13 are designed at the four corners and threaded holes are left at the top. A top plate 5 is fixed above the base 1 through fastening bolts. A convex creep platform 11 is provided in the center of the base 1 , and the creep platform 11 is divided into two grooves 12 at both ends. The positioning module 2 is used to be slidably arranged in the groove 12. The positioning module 2 and the groove 12 are provided with a reasonable clearance to ensure that the positioning block can slide freely. The top plate 5 is provided with a first through hole 51 and a second through hole 52 for passing through the wedge of the force applying module 3 and the fixing rod of the positioning module 2 respectively.

如图3所示,定位模块2包括上定位块21、下定位块22和固定杆(图中未示出)。上定位块21和下定位块22均为长方体结构,周边做圆角处理。在上定位块21、下定位块22中均设有通孔,合金薄板4的两端也设有通孔。固定杆依次穿过上定位块21和合金薄板4的通孔后连接下定位块22,实现合金薄板4的两端固定。下定位块22设置在凹槽12内,下定位块22位于凹槽12内后的顶面高度和蠕变平台11齐平,确保整个合金薄板4保持平整。As shown in Figure 3, the positioning module 2 includes an upper positioning block 21, a lower positioning block 22 and a fixed rod (not shown in the figure). Both the upper positioning block 21 and the lower positioning block 22 have a rectangular parallelepiped structure with rounded corners. Through holes are provided in the upper positioning block 21 and the lower positioning block 22 , and through holes are also provided at both ends of the alloy thin plate 4 . The fixing rod passes through the upper positioning block 21 and the through hole of the alloy thin plate 4 in sequence and then connects to the lower positioning block 22 to achieve fixation of both ends of the alloy thin plate 4 . The lower positioning block 22 is arranged in the groove 12, and the height of the top surface of the lower positioning block 22 after being located in the groove 12 is flush with the creep platform 11, ensuring that the entire alloy sheet 4 remains flat.

如图4所示,施力模块3包括两个滑块31和楔块32。每个滑块31的一侧抵靠另一滑块31,另一侧抵靠定位模块2。每个滑块31的底面贴合合金薄板4上表面,楔块32用于插入两个滑块31之间。两个滑块31的靠拢处形成V型槽用于接触楔块32,V型槽的角度一般不少过20度。楔块32与滑块31之间为倾斜面接触,楔块32的倾斜面与竖直y轴的倾角一般为5度~10度。楔块32可以有多个不同尺寸的,尺寸具体可以根据实验需求的变形量选取,改变楔块32的尺寸可以改变板料的变形量。As shown in FIG. 4 , the force application module 3 includes two slide blocks 31 and wedge blocks 32 . One side of each slider 31 abuts the other slider 31 , and the other side abuts the positioning module 2 . The bottom surface of each slider 31 is in contact with the upper surface of the alloy sheet 4 , and the wedge 32 is used to be inserted between the two sliders 31 . A V-shaped groove is formed between the two slide blocks 31 for contacting the wedge 32. The angle of the V-shaped groove is generally not more than 20 degrees. The wedge 32 and the sliding block 31 are in inclined surface contact, and the inclination angle between the inclined surface of the wedge 32 and the vertical y-axis is generally 5 to 10 degrees. The wedges 32 can have multiple different sizes, and the size can be selected according to the deformation required by the experiment. Changing the size of the wedges 32 can change the deformation of the sheet material.

如图5所示,本实施例的使用过程如下:As shown in Figure 5, the usage process of this embodiment is as follows:

首先利用上定位块21、下定位块22与固定杆将合金薄板4的两端固定住,放入底座1两侧对应的凹槽12中,此时合金薄板4的中央位于蠕变平台11上。然后在对应的位置放入两个滑块31,其中底座1四个方位的立柱其长度略大于上定位块21的宽度,以便滑块31可以获得良好定位。此后拧紧紧固螺栓将顶座和底座1固定,拧紧至无法手动拧紧停止。将楔块32穿过顶板5的第一通孔51嵌入两个滑块31的间隙中,使用外置的压力机将楔块32的底部向合金薄板4的表面下压,在楔块32向下运动过程中,滑块31受到向两侧的推力,带动定位模块向两侧滑动,给合金薄板4施加朝向两端的拉力使之发生定量的弹性变形,最后再将整个夹具放入真空加热炉中保温保压进行蠕变时效处理。First, use the upper positioning block 21, the lower positioning block 22 and the fixing rod to fix the two ends of the alloy sheet 4, and put it into the corresponding grooves 12 on both sides of the base 1. At this time, the center of the alloy sheet 4 is located on the creep platform 11 . Then put two slide blocks 31 in the corresponding positions, in which the length of the four directional pillars of the base 1 is slightly larger than the width of the upper positioning block 21, so that the slide blocks 31 can be well positioned. After that, tighten the fastening bolts to fix the top base and base 1 until it cannot be tightened manually. Insert the wedge 32 through the first through hole 51 of the top plate 5 into the gap between the two sliders 31. Use an external press to press the bottom of the wedge 32 down toward the surface of the alloy sheet 4. When the wedge 32 moves toward During the downward movement, the slider 31 is pushed to both sides, driving the positioning module to slide to both sides, exerting a pulling force toward both ends of the alloy sheet 4 to cause it to undergo quantitative elastic deformation, and finally the entire fixture is placed in the vacuum heating furnace. Creep aging treatment is carried out with medium-temperature and pressure-insulation.

综上,本实施例结构简单,整个测试装置采用的都是较为规则的几何形状零件且相互之间有一定配合,总体尺寸较小,操作方便,制造成本低,可以直接制造小尺寸试样以进行蠕变时效成形工艺下的板料性能测试。In summary, the structure of this embodiment is simple. The entire testing device uses parts with relatively regular geometric shapes and certain coordination with each other. The overall size is small, easy to operate, and the manufacturing cost is low. Small-sized samples can be directly manufactured to Carry out sheet metal performance testing under creep aging forming process.

以上详细描述了本发明的较佳具体实施例。应当理解,本领域的普通技术人员无需创造性劳动就可以根据本发明的构思作出诸多修改和变化。因此,凡本技术领域中技术人员依本发明的构思在现有技术的基础上通过逻辑分析、推理或者有限的实验可以得到的技术方案,皆应在由权利要求书所确定的保护范围内。The preferred embodiments of the present invention are described in detail above. It should be understood that those skilled in the art can make many modifications and changes based on the concept of the present invention without creative efforts. Therefore, any technical solutions that can be obtained by those skilled in the art through logical analysis, reasoning or limited experiments based on the concept of the present invention and on the basis of the prior art should be within the scope of protection determined by the claims.

Claims (7)

1. The utility model provides a testing arrangement for alloy sheet high temperature creep age forming, its characterized in that includes base (1), two positioning module (2) and application of force module (3), the center of base (1) is creep platform (11), and alloy sheet (4) set up on creep platform (11), are equipped with recess (12) at the both ends of creep platform (11), and positioning module (2) slidable are located two recess (12) and respectively centre gripping alloy sheet (4) both ends, application of force module (3) include voussoir (32) and two slider (31), and one side of every slider (31) is supported against another slider (31), opposite side is supported against positioning module (2) to and bottom surface laminating alloy sheet (4) upper surface, voussoir (32) are used for inserting between two slider (31).
2. The testing device for high-temperature creep age forming of an alloy sheet according to claim 1, wherein the positioning module (2) comprises an upper positioning block (21), a lower positioning block (22) and a fixing rod, the lower positioning block (22) is located in the groove (12), one end of the alloy sheet (4) is clamped between the upper positioning block (21) and the lower positioning block (22), and the fixing rod sequentially penetrates through the upper positioning block (21) and the alloy sheet (4) and then is connected with the lower positioning block (22).
3. A test device for high temperature creep age forming of alloy sheet according to claim 2, wherein the top surface height of the lower positioning block (22) after being positioned in the groove (12) is flush with the creep plateau (11).
4. A test device for high temperature creep age forming of alloy sheet according to claim 1, wherein a V-shaped groove is formed between the two sliders (31) for contacting the wedge (32).
5. The test device for high temperature creep-age forming of alloy sheet according to claim 4, wherein the angle of the V-groove is at most 20 degrees.
6. The testing device for high-temperature creep age forming of alloy sheets according to claim 1, further comprising a top plate (5), wherein the periphery of the base (1) is provided with upright posts (13) for connecting the top plate (5).
7. A testing device for high temperature creep age forming of alloy sheet according to claim 6, characterized in that the top plate (5) is provided with a first through hole (51) for passing through the wedge (32).
CN202210010419.XA 2022-01-06 2022-01-06 Testing device for high-temperature creep age forming of alloy sheet Active CN114354379B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210010419.XA CN114354379B (en) 2022-01-06 2022-01-06 Testing device for high-temperature creep age forming of alloy sheet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210010419.XA CN114354379B (en) 2022-01-06 2022-01-06 Testing device for high-temperature creep age forming of alloy sheet

Publications (2)

Publication Number Publication Date
CN114354379A CN114354379A (en) 2022-04-15
CN114354379B true CN114354379B (en) 2023-12-12

Family

ID=81107137

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202210010419.XA Active CN114354379B (en) 2022-01-06 2022-01-06 Testing device for high-temperature creep age forming of alloy sheet

Country Status (1)

Country Link
CN (1) CN114354379B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115747463B (en) * 2022-11-16 2024-06-18 中航沈飞民用飞机有限责任公司 Large-curvature sheet skin combined type flexible heat treatment charging basket

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03204418A (en) * 1990-01-05 1991-09-06 Shiro Sawa Fluid friction transmitting force restricting apparatus
CN101811160A (en) * 2010-05-07 2010-08-25 上海交通大学 Metal sheet pre-stretching mold
CN103480861A (en) * 2013-08-30 2014-01-01 南京梅山冶金发展有限公司 Turning machining method for end faces of large-sized thin plate disc parts
CN105689549A (en) * 2016-03-11 2016-06-22 上海航天精密机械研究所 Bending and clamping integrated die for creeping, ageing and correcting process and using method
KR20190000560A (en) * 2017-06-23 2019-01-03 충남대학교산학협력단 Creep Tester
CN110644802A (en) * 2019-08-30 2020-01-03 广东工业大学 Self-locking anchoring shape memory alloy prestress reinforcing device
CN112413033A (en) * 2020-11-19 2021-02-26 吉林大学 A friction and aeroelastic assisted helical shape memory alloy wire wedge-shaped self-monitoring damper
CN214749368U (en) * 2021-03-21 2021-11-16 西南林业大学 Tensile Creep Test Fixtures

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03204418A (en) * 1990-01-05 1991-09-06 Shiro Sawa Fluid friction transmitting force restricting apparatus
CN101811160A (en) * 2010-05-07 2010-08-25 上海交通大学 Metal sheet pre-stretching mold
CN103480861A (en) * 2013-08-30 2014-01-01 南京梅山冶金发展有限公司 Turning machining method for end faces of large-sized thin plate disc parts
CN105689549A (en) * 2016-03-11 2016-06-22 上海航天精密机械研究所 Bending and clamping integrated die for creeping, ageing and correcting process and using method
KR20190000560A (en) * 2017-06-23 2019-01-03 충남대학교산학협력단 Creep Tester
CN110644802A (en) * 2019-08-30 2020-01-03 广东工业大学 Self-locking anchoring shape memory alloy prestress reinforcing device
CN112413033A (en) * 2020-11-19 2021-02-26 吉林大学 A friction and aeroelastic assisted helical shape memory alloy wire wedge-shaped self-monitoring damper
CN214749368U (en) * 2021-03-21 2021-11-16 西南林业大学 Tensile Creep Test Fixtures

Also Published As

Publication number Publication date
CN114354379A (en) 2022-04-15

Similar Documents

Publication Publication Date Title
CN107727489B (en) A clamping and fixing device for compressing metal sheets
CN202533335U (en) Multi-head creep testing device for miniature samples
CN114354379B (en) Testing device for high-temperature creep age forming of alloy sheet
CN107063853B (en) A Fixture for Shear Performance Test of V-notch Beam Specimen
CN103267672B (en) Bending prevention system and method for tension compression circulation and loading experiment of double-shaft sheet
CN108110297B (en) Fixed part and assembly device for fuel cell assembly
CN205958356U (en) Sheet metal sample draws presses and fatigue test anchor clamps
CN108398328A (en) Cruciform specimen biaxial tension test device
CN112059508A (en) A small jig for nanosecond laser welding for metal foil lap joints
CN206066278U (en) A kind of general acupuncture of rectangular cell detects fixture
CN102506628A (en) Detection device for lateral position and end surface of gas exhaust manifold
CN208334103U (en) Electric cylinder fatigue tester
CN207066861U (en) A kind of fixture for v-notch beam sample testing shear performance
CN211505005U (en) Tensile compression test frock
CN209341969U (en) A fast detection fixture for bent pipes
CN203287242U (en) Bending prevention system for double-shaft sheet material tension and compression cyclic loading experiment
CN109142042B (en) Combined and easy-to-assemble mechanical properties test fixture
CN117074192A (en) Fuel cell plate performance testing device and method
CN110658475A (en) Cell aging method and clamping device for cell aging
CN221826645U (en) Mould intensity detection equipment
CN215033172U (en) Test probe bending device
CN221755815U (en) A positioning device for compensating for product size differences
CN221649498U (en) A self-inspection fixture for heat dissipation module
CN214193428U (en) Coating clamp for high-fundamental-frequency wafer
CN219347999U (en) Environmental chamber temperature measuring rack

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant