CN114280575B - Laser radar optical chip based on micro-ring optical switch network - Google Patents
Laser radar optical chip based on micro-ring optical switch networkInfo
- Publication number
- CN114280575B CN114280575B CN202011031563.9A CN202011031563A CN114280575B CN 114280575 B CN114280575 B CN 114280575B CN 202011031563 A CN202011031563 A CN 202011031563A CN 114280575 B CN114280575 B CN 114280575B
- Authority
- CN
- China
- Prior art keywords
- optical
- optical switch
- ring
- micro
- array
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Variable-Direction Aerials And Aerial Arrays (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
本申请涉及的激光雷达光学芯片支持多种工作模式，其可以根据需求，形成多光路系统，例如，在该激光雷达光学芯片包含两个输入/输出耦合器以及两组光学天线阵列时，得到的是双光路系统，该双光路系统全部作为发射端，可以实现视场拼接，增大激光雷达视场范围；该双光路系统也全部作为接收端，可以实现接收面积翻倍，接收能力更强；该双光路系统还可以一套作为发射端一套作为接收端，可以大大简化系统复杂度，使激光雷达小型化。
The lidar optical chip involved in this application supports multiple operating modes and can form a multi-optical-path system according to requirements. For example, when the lidar optical chip includes two input/output couplers and two sets of optical antenna arrays, a dual-optical-path system is obtained. The entire dual-optical-path system is used as a transmitter, which can realize field-of-view stitching and increase the lidar's field of view. The entire dual-optical-path system is also used as a receiver, which can double the receiving area and enhance the receiving capability. The dual-optical-path system can also be configured with one set as a transmitter and the other as a receiver, which can greatly simplify the system complexity and enable the miniaturization of the lidar.
Description
Technical Field
The embodiment of the invention relates to the technical field of radars, in particular to a photonic integrated chip based on a micro-ring optical switch network.
Background
With the development of autopilot and remote sensing technology, lidar has received more and more attention, and its basic architecture is similar to that of microwave radar, except that each device is a laser-based optical device. Although there are many kinds of lidars on the market, most of the lidars are based on mechanical rotation and MEMS structures, and have mechanical components, which are prone to aging, and thus cannot be used normally for autopilot and related fields.
In view of the above, it is important to develop an all-solid-state lidar. Many groups are internationally developing all-solid-state lidar based on optical phased array, but the lidar of the architecture has many problems, such as that a large-scale optical phased array, such as 512 channels or larger, is required for long-distance detection, which is very difficult for a control circuit, and the optical loss on a chip is increased along with the gradual increase of the scale of the optical phased array, which is contradictory for long-distance detection. Therefore, few researchers have proposed all-solid-state lidar based on the optical switch form, that is, the light emitted or received by the optical antennas at different positions can realize the angle deflection through the lens, the working principle of the laser radar in the form is simple, but if quasi-continuous scanning needs to be realized, a large-scale optical antenna array is also required, and the front end is cascaded with a plurality of optical switches. In addition, the working mode of the conventional laser radar chip is single, and a single chip can only be used for transmitting or receiving, so that the laser radar system is more complex and has higher cost. There is a need to propose a new architecture optical switching network chip that needs to be compact, simple to control, and support multiple modes of operation.
Disclosure of Invention
The invention provides a laser radar optical chip based on a micro-ring optical switch network. The laser radar optical chip is based on the micro-ring optical switch array, is more compact in structure, simpler to control and smaller in optical loss on a chip compared with the laser radar of the optical phased array architecture, and is a more practical all-solid-state laser radar scheme. The laser radar optical chip based on the micro-ring optical switch network provided by the invention has various working modes, and is more comprehensive in function and more flexible in application.
In a first aspect, the present invention provides a lidar optical chip comprising at least one input/output coupler, a micro-ring optical switch array and at least one optical antenna array;
the input/output coupler is used for coupling light emitted by a laser to a chip of the laser radar or coupling light on the chip to a detector;
The micro-ring optical switch array forms an optical switch network for switching light on the chip from the input waveguide to the optical antenna array.
In one embodiment, the optical antenna array includes M antennas distributed in parallel, where the M antennas are divided into N optical antenna groups, and the N optical antenna groups work to complete field-of-view stitching in a second direction, where the second direction is along an antenna direction.
In one embodiment, the antenna widths, grating periods, duty cycles in the optical antenna groups are the same or different.
In one embodiment, the micro-ring optical switch array comprises a two-dimensional micro-ring optical switch array and at least one-dimensional micro-ring optical switch array, the number of the one-dimensional micro-ring optical switch arrays corresponds to the number of the input/output couplers and the number of the optical antenna arrays,
Each input/output coupler inputs the emitted light into the two-dimensional micro-ring optical switch array through one-dimensional micro-ring optical switch array, and transmits the emitted light to the corresponding optical antenna array through the two-dimensional micro-ring optical switch array.
In one embodiment, the input/output coupler, the one-dimensional micro-ring optical switch array, the two-dimensional micro-ring optical switch array and the optical antenna array are all connected through waveguides, the position where the waveguides in the two-dimensional micro-ring optical switch array cross is realized through a same-layer crisscross waveguide structure or a double-layer waveguide, and light among different layers of waveguides is coupled with each other through evanescent waves.
In one embodiment, the crisscross waveguide structure adopts a double-layer waveguide, a first waveguide layer of the double-layer waveguide is located on a top silicon layer of the SOI substrate, a second waveguide layer of the double-layer waveguide is located above the first waveguide layer, a spacer layer is arranged between the second waveguide layer and the first waveguide layer, and the first waveguide layer and the second waveguide layer mutually transfer light beams in the waveguide through a group of opposite and vertically overlapped trapezoid template converters;
The refractive index of the first waveguide layer and the refractive index of the second waveguide layer are both greater than the refractive index of the spacer layer.
In one embodiment, the first waveguide layer and the second waveguide layer are TE mode single mode waveguides, and are ridge waveguides or stripe waveguides.
In one embodiment, the input/output coupler is an end face coupler or a grating coupler, and the micro-ring optical switch is a thermo-optical type optical switch or an electro-optical type optical switch.
In one embodiment, each optical switch in the array of micro-ring optical switches has an independent control electrode;
Each optical switch in the one-dimensional micro-ring optical switch array has an independent control electrode, and each row or each column of optical switches in the two-dimensional micro-ring optical switch array shares one control electrode.
In one embodiment, the optical antenna array is a grating type optical antenna, wherein a grating of the grating type optical antenna is a second-order diffraction grating, and a grating period and a duty cycle of the grating type optical antenna are matched with the working wavelength.
In one embodiment, in the optical antenna array, the distance between the optical antennas is set according to parameters of a lens above the chip, and the optical antennas are arranged at equal intervals or non-equal intervals.
In one embodiment, the optical antenna array is connected to the output of the two-dimensional optical switch array by a curved waveguide, or is directly connected to the output of the two-dimensional optical switch array.
In one embodiment, a protective layer is coated on all devices of the laser radar optical chip, wherein the refractive index of the material of the protective layer is lower than that of the materials of the first layer of waveguide and the second layer of waveguide.
In one embodiment, the device further comprises lenses, wherein the lenses and the optical antenna arrays are the same in number and are single lenses or a lens group, the lenses are located right above the optical antenna arrays, the optical antenna arrays are located on focal planes of the lenses, and the lenses are used for collimating emitted light beams and achieving angle deflection.
In another aspect of the present invention, a laser radar scanning method is provided, which is applied to the laser radar optical chip, and includes:
The method comprises the steps of switching emitted light to a certain optical antenna in a certain optical antenna array through a micro-ring optical switch array, and realizing the first direction deflection of emitted light beams by matching with an external lens, wherein the certain optical antenna array comprises M antennas which are distributed in parallel, and the M antennas are divided into N groups;
the emitted light is changed in wavelength, the second direction deflection is completed by emitting from a single optical antenna, and the two-dimensional scanning range is realized by changing the wavelength and switching different optical antennas.
The invention provides a laser radar optical chip which supports multiple working modes, and can form a multi-optical-path system according to requirements, for example, when the laser radar optical chip comprises two input/output couplers and two groups of optical antenna arrays, a double-optical-path system is obtained, all the double-optical-path system is used as a transmitting end, field stitching can be realized, the field of view range of the laser radar is enlarged, all the double-optical-path system is used as a receiving end, double receiving area can be realized, receiving capability is higher, and a set of double-optical-path system can be used as a transmitting end and a set of double-optical-path system can be used as a receiving end, so that system complexity can be greatly simplified, and the laser radar is miniaturized.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions of the prior art, the drawings that are needed in the embodiments or the description of the prior art will be briefly described below, it will be obvious that the drawings in the following description are some embodiments of the present invention, and that other drawings can be obtained according to these drawings without inventive effort to a person skilled in the art.
Fig. 1 is a schematic structural diagram of a lidar optical chip based on a micro-ring optical switch network according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a single micro-ring optical switch of a laser radar optical chip based on a micro-ring optical switch network according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of a one-dimensional micro-ring optical switch array of a laser radar optical chip based on a micro-ring optical switch network according to an embodiment of the present invention;
FIG. 4 is a schematic structural diagram of a two-dimensional micro-ring optical switch array of a laser radar optical chip based on a micro-ring optical switch network according to an embodiment of the present invention;
FIG. 5 is a schematic structural diagram of a micro-ring optical switch network laser radar optical chip for adjusting the distance between optical antennas by bending waveguides according to an embodiment of the present invention;
FIG. 6 is a schematic diagram of a laser radar optical chip with a single lens based micro-ring optical switch network according to an embodiment of the present invention;
FIG. 7 is a schematic diagram of a laser radar optical chip with two lenses based on a micro-ring optical switch network according to an embodiment of the present invention;
FIG. 8 is a schematic diagram of a total emission operation mode of a lidar optical chip according to an embodiment of the present invention;
FIG. 9 is a schematic view of a longitudinal field of view stitching of a lidar optical chip according to an embodiment of the present invention;
FIG. 10 is a schematic diagram of a full receiving operation mode of a lidar optical chip according to an embodiment of the present invention;
Fig. 11 is a schematic diagram showing a transmitting and receiving operation mode of a lidar optical chip according to an embodiment of the present invention.
11-Input/output coupler 12-input/output coupler 21-one-dimensional micro-ring optical switch array 22-one-dimensional micro-ring optical switch array 3-two-dimensional micro-ring optical switch array 41-optical antenna array 42-optical antenna array 5-curved waveguide 6-lens 71-emitted light beam 72-received light beam
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments of the present invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Fig. 1 is a schematic structural diagram of a lidar optical chip according to an embodiment of the present invention, and as shown in fig. 1, the lidar optical chip mainly includes at least one input/output coupler 11 or 12, an input/output coupler micro-ring optical switch array, and at least one optical antenna array (2 optical antenna arrays are taken as an example in the figure, and are respectively a one-dimensional micro-ring optical switch array optical antenna array 41 and an optical antenna array 42). Typically, the optical antenna array corresponds to the number of input/output couplers.
The laser radar optical chip provided by the embodiment supports multiple working modes, a multi-optical-path system can be formed according to requirements, each optical system can work independently, for example, when the laser radar optical chip comprises two input/output couplers and two groups of optical antenna arrays, a double-optical-path system is obtained, all the double-optical-path system is used as a transmitting end, field splicing can be realized, the field range of the laser radar is enlarged, all the double-optical-path system is used as a receiving end, double receiving area can be doubled, receiving capability is higher, and one set of double-optical-path system can be used as a receiving end, system complexity can be greatly simplified, and the laser radar is miniaturized.
Optionally, in other embodiments, when the lidar optical chip includes three input/output couplers and three optical antenna arrays, three optical systems are obtained, in order to cover a larger field of view range, a field of view range corresponding to 120 degrees may be set for the optical antenna arrays of each optical system, and similarly, when the lidar optical chip includes four input/output couplers and four optical antenna arrays, four paths of systems are obtained, in order to cover a larger field of view range, a field of view range corresponding to 90 degrees may be set for the optical antenna arrays of each optical system. It should be understood that when the input/output coupler and the optical antenna array are other numbers, the principle is similar to 2,3 or 4, and will not be described here again. Furthermore, it will be appreciated that in lidar scanning, not all situations require scanning of a 360 degree field of view, and that in order to meet different needs, the individual optical antenna arrays may be unevenly positioned, e.g., portions of the antenna's field of view may overlap, portions of the optical antenna arrays may be interleaved, etc.
Optionally, each optical switch in the micro-ring optical switch array has an independent control electrode or if the micro-ring optical switch array includes a one-dimensional micro-ring optical switch array and a two-dimensional micro-ring optical switch array, each optical switch in the one-dimensional micro-ring optical switch array has an independent control electrode, and each row or each column of optical switches in the two-dimensional micro-ring optical switch array shares one control electrode.
Optionally, the micro-ring optical switch array includes a two-dimensional micro-ring optical switch array 3 and at least one-dimensional micro-ring optical switch array, the number of the one-dimensional micro-ring optical switch arrays corresponds to the number of the input/output couplers and the number of the optical antenna arrays, and each of the input/output couplers inputs the emission light into the two-dimensional micro-ring optical switch array through one of the one-dimensional micro-ring optical switch arrays and transmits the emission light to the corresponding optical antenna array through the two-dimensional micro-ring optical switch array. When a plurality of micro-ring optical switches are connected in parallel, the one-dimensional optical switch array is formed, and the structure of the one-dimensional optical switch array is shown in fig. 3. The input waveguide is a row waveguide, a plurality of micro-rings are arranged on one side of the waveguide side by side, independent output waveguides are arranged on one side of each micro-ring, and each micro-ring is independently controlled to switch input light from the row waveguide to a specific column waveguide. Further, when a plurality of column waveguides are arranged in parallel, and a plurality of micro-ring optical switches are disposed on one side of each column waveguide, a two-dimensional micro-ring optical switch array 3 can be formed, as shown in fig. 4. Each micro-ring optical switch is provided with two output waveguides which are output in an S shape and are staggered by a certain distance in the same row of micro-ring optical switches in each row of waveguides to form a plurality of groups of output waveguides. The scale of the two-dimensional micro-ring optical switch array 3 can be expanded according to specific requirements, and only the number of the column waveguides and the optical switches arranged on each column waveguide needs to be increased. The one-dimensional optical switch array and the two-dimensional micro-ring optical switch array jointly form a micro-ring optical switch network of the laser radar optical chip, and the micro-ring optical switch network is used for switching light on the chip from an input waveguide to a specific optical antenna.
In one embodiment, the optical antenna array comprises M parallel optical antennas, wherein the value of M is determined by the number of output ends of the optical switch network, the M antennas are divided into N optical antenna groups, each group comprises M/N antennas, and each optical antenna group is independent from the other. Alternatively, the respective optical antenna groups may be the same structure or may be different structures.
For example, the antenna width, grating period, duty cycle, etc. in each optical antenna group may be the same or different. The two antennas output from the same micro-ring in the optical antenna array 41 and the optical antenna array 42 are independent, the structures of the two antennas can be the same or different, and the antenna spacing in the two groups of optical antenna arrays can be the same or different.
In addition, the optical antenna array may be directly connected to the two-dimensional optical switching network 3 or may be indirectly connected to the two-dimensional optical switching network 3 through a curved waveguide 5, as in the second embodiment of the invention shown in fig. 5, the output end of the two-dimensional optical switching network 3 is connected to both the optical antenna array 41 and the optical antenna array 42 through curved waveguides. The spacing between the optical antennas can be adjusted by bending the waveguides, and can be equal or unequal.
When the laser radar optical chip comprises two input/output couplers and two groups of optical antenna arrays, two sets of optical path systems can be formed, wherein the input/output coupler 11, the one-dimensional micro-ring optical switch array 21, the two-dimensional micro-ring optical switch array 3 and the optical antenna array 41 form a set of complete optical path system, the input/output coupler 12, the one-dimensional micro-ring optical switch array 22, the two-dimensional micro-ring optical switch array 3 and the optical antenna array 42 also form a set of complete optical path system, the two sets of optical path systems share the two-dimensional micro-ring optical switch array 3, and the light transmission directions in the waveguide are opposite.
In one embodiment, when the chip is used for transmitting, the input/output coupler 11 is used for coupling the light emitted by a laser onto the laser radar optical chip or coupling the light received by the chip into a detector, the one-dimensional micro-ring optical switch array 21 is used for switching the input light from a traveling waveguide to a fixed column waveguide and transmitting the input light into the two-dimensional micro-ring optical switch array 3, the two-dimensional micro-ring optical switch array 3 is used for switching the light input from the one-dimensional micro-ring optical switch array 21 to a specific traveling waveguide and outputting the light into the optical antenna array 41, and the optical antenna array 41 is used for transmitting the light into a space. The optical path system consisting of the input/output coupler 12, the one-dimensional micro-ring optical switch array 22, the two-dimensional micro-ring optical switch array 3 and the optical antenna array 42 works in the same principle.
In one embodiment, the input/output coupler, the one-dimensional micro-ring optical switch array, the two-dimensional micro-ring optical switch array and the optical antenna array are all connected through waveguides, the position where the waveguides in the two-dimensional micro-ring optical switch array cross is realized through a same-layer crisscross waveguide structure or a double-layer waveguide, and light among different layers of waveguides is coupled with each other through evanescent waves. The cross waveguide structure adopts a double-layer waveguide, a first waveguide layer of the double-layer waveguide is positioned on a top silicon layer of an SOI substrate, a second waveguide layer of the double-layer waveguide is positioned above the first waveguide layer, a spacing layer is arranged between the second waveguide layer and the first waveguide layer, the first waveguide layer and the second waveguide layer mutually transfer light beams in the waveguide through a group of opposite and vertically overlapped trapezoid template converters, and refractive indexes of the first waveguide layer and the second waveguide layer are both larger than that of the spacing layer. The first waveguide layer and the second waveguide layer are TE mode single-mode waveguides and are ridge waveguides or bar waveguides. The structure can flexibly realize the switching of the light waves in the light path. Crosstalk is prevented.
In one embodiment, when the chip is used for reception, the optical path is reversed, and the signal light is input from the optical antenna, finally switched to the input/output coupler through the optical switching network and finally detected by the detector. The basic component of the laser radar optical chip based on the micro-ring optical switch network is a micro-ring optical switch, the specific structure of the micro-ring optical switch is shown in fig. 2, two sides of one micro-ring waveguide are respectively provided with one waveguide, when the micro-ring does not resonate with the working wavelength, input light cannot be transmitted into the other waveguide through the micro-ring, and when the refractive index of the micro-ring is adjusted to resonate, the input light can be transmitted into the other waveguide through the micro-ring. The invention is not limited to the materials of the devices on the chip, and typically the device materials may be silicon, silicon dioxide, silicon nitride, polysilicon, etc.
In one embodiment, the micro-ring optical switch network-based laser radar optical chip comprises lenses in addition to the on-chip devices, the number of the lenses is the same as that of the optical antenna arrays, the laser radar optical chip can comprise one or a group of lenses, as in the third embodiment of the invention shown in fig. 6, a lens 6 is arranged above the chip, the lens 6 matched with the optical antenna arrays can be a single lens or a lens group, and is located right above the optical antennas and covers the whole optical antenna arrays, and the optical antenna arrays are located on focal planes of the lenses. The distance between the antennas in the on-chip optical antenna array 41 and the optical antenna array 42 is set according to the parameters of the lens above the chip, and may be equidistant, gaussian distribution or other forms.
Further, since the lidar optical on-chip devices are not symmetrical, the optical antenna array 41 and the optical antenna array 42 are not identical for the lens 6, which tends to affect the performance of the chip. In order to more flexibly and fully exert the advantages of the laser radar optical chip based on the micro-ring optical switch network, a small lens can be arranged above the optical antenna array 41 and the optical antenna array 42 respectively, parameters of the lens are matched with parameters of the optical antenna array below, and the laser radar optical chip can be freely arranged according to specific requirements, namely, in the optical antenna array, the distance between the optical antennas is arranged according to the parameters of the lens above the chip, and the optical antennas are arranged at equal intervals or at unequal intervals. Fig. 7 shows a laser radar optical chip with two lenses based on micro-ring optical switch network according to a fourth embodiment of the present invention.
In addition, the fourth embodiment of the invention provides a plurality of operation modes including all transmitting, all receiving and one-to-one.
Specifically, the total emission is that two optical path systems on the chip are used to emit the light beam 71 outwards, and the input end of the chip is connected with the laser, as shown in fig. 8. Specifically, input light is switched to optical antennas with the same structure in different groups in the optical antenna array through an optical switch network, and transverse deflection of an emission light beam is realized by matching with an external lens 6, wherein the transverse direction refers to the direction perpendicular to the optical antenna array, after the input light is changed in wavelength and emitted from a single optical antenna, as shown in fig. 9, the first antenna realizes a view field of 0- 1 degrees, and further longitudinal deflection of the emission light beam can be realized by switching to other optical antennas with different structures in the same group through the optical switch network, namely, theta 1 -theta 2 degrees until all the optical antennas in the same group work once, and if 4 antennas exist in one optical antenna, namely, the view field corresponding to the last antenna is theta 3 -theta 4 degrees, the longitudinal deflection of 0-theta 4 degrees is completed in the whole range of the single optical antenna array, and the longitudinal direction refers to the direction along the optical antenna array.
Further, when the chip works in all emission modes, the input/output coupler, the micro-ring optical switch network and the optical antenna array are used in a combined mode to achieve a longitudinal field of view of 0-theta degrees, wherein the value of theta can be positive or negative depending on the emission direction of the optical antenna for light beams with working wavelengths, the input/output coupler, the micro-ring optical switch network and the optical antenna array are used in a combined mode to achieve a longitudinal field of view of-theta degrees to 0-degrees, two optical path systems can work simultaneously or can work in a time-sharing mode, and the total longitudinal field of view of the laser radar optical chip is expanded to be-theta degrees to-theta degrees.
The full receive mode is to use both on-chip optical path systems to receive the beam 72, as shown in fig. 10. The input end of the chip is connected with a detector, wherein the input/output coupler 11, the micro-ring optical switch network and the optical antenna array 41 are used in a combined mode, the optical signals reflected by the target are received from the optical antenna array 41 on the chip and finally transmitted to the input/output coupler 21 and detected by the detector connected with the input/output coupler, the input/output coupler 12, the micro-ring optical switch network and the optical antenna array 42 are used in a combined mode, the optical signals reflected by the target are received from the optical antenna array on the chip and finally transmitted to the input/output coupler 12 and detected by the detector connected with the input/output coupler, and the two optical path systems are used for receiving at the same time, the receiving caliber is doubled, and double reflected signals can be detected.
The one-to-one mode is to use two sets of optical path systems on the chip, one set for transmitting the light beam 71 and one set for receiving the light beam 72, as shown in fig. 11. The optical path system adopted by the transmission and the reception can be reciprocal, wherein when the input/output coupler 11 is connected with a laser and the input/output coupler 12 is connected with a detector, the input/output coupler 11, the micro-ring optical switch network and the optical antenna array 41 are used in combination, the laser is transmitted into a space and scans a target object, the input/output coupler 12, the micro-ring optical switch network and the optical antenna array 42 are used in combination, and the optical signal 72 reflected by the target object is finally transmitted to the detector for detection, and the two optical path systems work simultaneously.
The invention provides a laser radar optical chip, which comprises two input/output couplers 11 and 12, two one-dimensional micro-ring optical switch arrays 21 and 22, a two-dimensional micro-ring optical switch array 3 and two groups of optical antenna arrays 41 and 42, wherein two sets of optical path systems on the chip are mutually independent and do not influence each other. The laser radar optical chip based on the micro-ring optical switch network supports various working modes, and comprises a double-optical-path system which is all used as a transmitting end, so that field splicing can be realized, the field range of the laser radar is enlarged, the double-optical-path system is all used as a receiving end, the receiving area can be doubled, the receiving capability is stronger, a set of double-optical-path system is used as a transmitting end and a set of double-optical-path system is used as a receiving end, the complexity of the system can be greatly simplified, and the laser radar is miniaturized.
Optionally, a protective layer is covered on all devices of the laser radar optical chip, and the refractive index of the material of the protective layer is lower than that of the materials of the first layer of waveguide and the second layer of waveguide.
Based on the same inventive concept, the embodiment of the application also provides a laser radar scanning method which is applied to the laser radar optical chip, and the method comprises the steps of switching emitted light to a certain optical antenna in a certain optical antenna array through a micro-ring optical switch array and realizing first direction deflection of the emitted light beam by matching with an external lens, wherein the certain optical antenna array comprises M antennas which are distributed in parallel and are divided into N groups, changing the wavelength of the emitted light, completing second direction deflection by emitting the emitted light from a single optical antenna, and realizing a two-dimensional scanning range by changing the wavelength and switching different optical antennas.
The scanning method is a two-dimensional scanning process realized by each single optical system of the laser radar optical chip. When the laser radar optical chip comprises two or more optical systems, each optical system can independently realize the two-dimensional scanning process. Each optical system can be operated in a time-sharing manner according to a system control signal.
In one embodiment, the scanning method further comprises receiving the reflected echo through an external lens in combination with the optical antenna, changing the wavelength and switching different optical antennas so that the reflected echo is reversely transmitted from the optical antenna to the input coupler along the original transmitting light path and finally detected by the detector.
It should be noted that the above embodiments are merely for illustrating the technical solution of the present invention and not for limiting the same, and although the present invention has been described in detail with reference to the above embodiments, it should be understood by those skilled in the art that the technical solution described in the above embodiments may be modified or some or all of the technical features may be equivalently replaced, and these modifications or substitutions do not make the essence of the corresponding technical solution deviate from the scope of the technical solution of the embodiments of the present invention.
Claims (14)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011031563.9A CN114280575B (en) | 2020-09-27 | 2020-09-27 | Laser radar optical chip based on micro-ring optical switch network |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011031563.9A CN114280575B (en) | 2020-09-27 | 2020-09-27 | Laser radar optical chip based on micro-ring optical switch network |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114280575A CN114280575A (en) | 2022-04-05 |
| CN114280575B true CN114280575B (en) | 2025-11-11 |
Family
ID=80867653
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011031563.9A Active CN114280575B (en) | 2020-09-27 | 2020-09-27 | Laser radar optical chip based on micro-ring optical switch network |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114280575B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117289398B (en) * | 2023-11-24 | 2024-01-30 | 中国科学院长春光学精密机械与物理研究所 | A focal plane switch array beam scanning system based on microring resonator switches |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108761439A (en) * | 2018-05-07 | 2018-11-06 | 上海交通大学 | Integrated multi-beam optical phased array delay network based on wavelength-division multiplex |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103308988B (en) * | 2013-04-28 | 2015-04-29 | 浙江大学 | 4*4 nonblocking optical switching network based on five microring resonators |
| US9261754B2 (en) * | 2013-12-13 | 2016-02-16 | Telefonaktiebolaget L M Ericsson (Publ) | Parallel and WDM silicon photonics integration in information and communications technology systems |
| CN104317005A (en) * | 2014-10-27 | 2015-01-28 | 中国科学院半导体研究所 | Wavelength choice photoswitch based on tunable micro-ring resonators |
| EP3555681B1 (en) * | 2016-12-16 | 2021-04-14 | The Charles Stark Draper Laboratory, Inc. | Optical switch network |
| US11428811B2 (en) * | 2017-11-14 | 2022-08-30 | The Charles Stark Draper Laboratory, Inc. | Foveal patterned optical switches for MEMS LiDAR beam steering unit |
| CN108459448A (en) * | 2018-03-29 | 2018-08-28 | 中国科学院西安光学精密机械研究所 | Two-dimensional light beam scanning method based on optical phased array and optical phased array |
| CN109444903B (en) * | 2018-10-18 | 2022-11-25 | 华北水利水电大学 | An optical phased array laser radar device |
| CN109991582B (en) * | 2019-03-13 | 2023-11-03 | 上海交通大学 | Silicon-based hybrid integrated lidar chip system |
| CN110109083B (en) * | 2019-05-05 | 2023-06-27 | 上海交通大学 | 3D Scanning LiDAR Based on 1D Optical Phased Array |
-
2020
- 2020-09-27 CN CN202011031563.9A patent/CN114280575B/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108761439A (en) * | 2018-05-07 | 2018-11-06 | 上海交通大学 | Integrated multi-beam optical phased array delay network based on wavelength-division multiplex |
Also Published As
| Publication number | Publication date |
|---|---|
| CN114280575A (en) | 2022-04-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US11874362B2 (en) | Integrated two-dimensional multi-beam lidar transmitter based on butler matrix | |
| EP3555682B1 (en) | All-solid state opticaltransmit/receive terminal | |
| US10775506B2 (en) | Imaging system | |
| US20220283308A1 (en) | Optical components for imaging | |
| US10466423B2 (en) | Partitioned optical switch | |
| CN114325636B (en) | Laser radar chip, laser radar and laser detection method thereof | |
| CN110955042B (en) | A symmetric beam scanning system and its working method | |
| US12019268B2 (en) | Serpentine optical phased array with dispersion matched waveguides | |
| CN115166771B (en) | Receiving-transmitting integrated optical phased array multi-line laser radar and chip | |
| CN112673273B (en) | lidar device | |
| JP2024522314A (en) | Microlens Array and LIDAR Optical Switch Array | |
| CN117289398B (en) | A focal plane switch array beam scanning system based on microring resonator switches | |
| CN113608305B (en) | Beam controller and beam control method | |
| CN112946929A (en) | One-dimensional optical phased array based on apodization modulation | |
| CN117406527A (en) | Integrated optical switch type optical scanner | |
| CN111740786B (en) | Integrated optical waveguide beam forming device | |
| CN114280575B (en) | Laser radar optical chip based on micro-ring optical switch network | |
| CN116449558A (en) | All-solid-state light beam two-dimensional scanner | |
| CN114217293B (en) | Optical multi-beamforming network chip and network | |
| CN117170156B (en) | Optical phased array chip, system and calibration method containing reverse coupler | |
| CN120214748A (en) | Phased array lidar chip and lidar | |
| CN119596615B (en) | Line-column scanning type silicon-based focal plane array transmitting device | |
| CN119881840A (en) | High-power silicon nitride focal plane array laser radar transmitter with wavelength scanning function | |
| CN116381646A (en) | Optical waveguide phased array laser radar based on lead zirconate titanate and silicon nitride mixed material | |
| CN115657218B (en) | Lens-assisted all-solid-state beam scanning system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |