CN114124064B - A kind of photoconductive switch packaging structure - Google Patents
A kind of photoconductive switch packaging structure Download PDFInfo
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- CN114124064B CN114124064B CN202111237510.7A CN202111237510A CN114124064B CN 114124064 B CN114124064 B CN 114124064B CN 202111237510 A CN202111237510 A CN 202111237510A CN 114124064 B CN114124064 B CN 114124064B
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
- H03K17/94—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the way in which the control signals are generated
- H03K17/941—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the way in which the control signals are generated using an optical detector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
- H01R13/02—Contact members
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K5/00—Casings, cabinets or drawers for electric apparatus
- H05K5/02—Details
- H05K5/0217—Mechanical details of casings
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K5/00—Casings, cabinets or drawers for electric apparatus
- H05K5/06—Hermetically-sealed casings
- H05K5/061—Hermetically-sealed casings sealed by a gasket held between a removable cover and a body, e.g. O-ring, packing
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K5/00—Casings, cabinets or drawers for electric apparatus
- H05K5/06—Hermetically-sealed casings
- H05K5/064—Hermetically-sealed casings sealed by potting, e.g. waterproof resin poured in a rigid casing
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Switches Operated By Changes In Physical Conditions (AREA)
Abstract
Description
技术领域Technical field
本发明涉及一种光导开关封装结构。The invention relates to a photoconductive switch packaging structure.
背景技术Background technique
光导开关是一种新型超快速半导体电子器件,是产生高功率超短脉冲的关键器件,通过激光触发对半导体材料电导率进行控制,实现开关的导通和关断。与传统脉冲功率领域中的开关相比,光导开关具有闭合时间快(ps量级)、抖动时间小(ps量级)、开关电感低(亚nH量级),重复频率高、不受电磁干扰、重量轻、体积小等优点,可以在超高的重复频率下以超高的功率容量进行工作。封装结构对于高压开关器件至关重要,可以对器件起到保护作用。但现在光导开关封装结构很难保证在高压大电流工作环境中的稳定性和可靠性。The photoconductive switch is a new type of ultra-fast semiconductor electronic device. It is a key device for generating high-power ultra-short pulses. The conductivity of the semiconductor material is controlled by laser triggering to turn the switch on and off. Compared with switches in the traditional pulse power field, photoconductive switches have fast closing time (ps level), small jitter time (ps level), low switching inductance (sub-nH level), high repetition frequency, and are not subject to electromagnetic interference. , light weight, small size and other advantages, it can work at ultra-high repetition frequency with ultra-high power capacity. The packaging structure is crucial for high-voltage switching devices and can protect the device. However, it is difficult for the current photoconductive switch packaging structure to ensure the stability and reliability in a high-voltage and high-current working environment.
发明内容Contents of the invention
为解决以上技术上的不足,本发明提供了一种光导开关封装结构,对光导开关实现全面的保护,提高了光导开关的使用寿命和整个器件的工作电压。In order to solve the above technical deficiencies, the present invention provides a photoconductive switch packaging structure, which achieves comprehensive protection for the photoconductive switch and improves the service life of the photoconductive switch and the operating voltage of the entire device.
本发明是通过以下措施实现的:The present invention is achieved through the following measures:
一种光导开关封装结构,包括横向的圆柱形且两端开口的导电壳体,所述导电壳体左端开口密封封堵有透光片,导电壳体内中部设置有导电圆环片,所述导电圆环片外圆周面与导电壳体的内圆周面紧密贴合,导电圆环片中心开有通孔,导电壳体的右端开口密封封堵有绝缘圆环片,所述绝缘圆环片中心横向穿有导电棒,所述导电棒左端贯穿通孔且导电棒外表面与通孔的内表面之间留有间隔空隙,所述间隔空隙处设置有光导开关芯片,所述光导开关芯片两个电极分别连接导电圆环片和导电棒,导电棒的右端延伸至绝缘圆环片右侧,导电圆环片与透光片之间、光导开关芯片周围的间隔空隙内以及导电圆环片与绝缘圆环片之间的导电壳体内填充有透明绝缘介质。A photoconductive switch packaging structure, including a transverse cylindrical conductive housing with openings at both ends. The left end opening of the conductive housing is sealed with a light-transmitting sheet, and a conductive annular sheet is provided in the middle of the conductive housing. The outer circumferential surface of the annular ring sheet is in close contact with the inner circumferential surface of the conductive housing. There is a through hole in the center of the conductive annular sheet. The right end opening of the conductive housing is sealed with an insulating annular sheet. The center of the insulating annular sheet is sealed. A conductive rod is pierced transversely. The left end of the conductive rod passes through the through hole and there is a gap between the outer surface of the conductive rod and the inner surface of the through hole. A photoconductive switch chip is provided in the gap. There are two photoconductive switch chips. The electrodes are respectively connected to the conductive annular sheet and the conductive rod. The right end of the conductive rod extends to the right side of the insulating annular sheet. There is a gap between the conductive annular sheet and the light-transmitting sheet, around the photoconductive switch chip, and between the conductive annular sheet and the insulation. The conductive shell between the annular sheets is filled with transparent insulating medium.
上述透光片外侧套有盖帽,所述盖帽边缘扣在导电壳体端部外侧且通过螺纹连接在一起,导电壳体端部中心开有观察窗口,透光片与导电壳体左端开口周围的端面之间设置有密封圈。There is a cap on the outside of the above-mentioned light-transmitting sheet. The edge of the cap is buckled on the outside of the end of the conductive housing and connected together through threads. There is an observation window in the center of the end of the conductive housing. The light-transmitting sheet and the opening around the left end of the conductive housing are A sealing ring is provided between the end faces.
上述绝缘圆环片上开有注入孔,且注入孔内塞入有可拆卸的封堵螺钉,绝缘圆环片右侧的端面上涂有绝缘固化胶层。The above-mentioned insulating ring sheet has an injection hole, and a removable blocking screw is inserted into the injection hole. The end surface on the right side of the insulating ring sheet is coated with an insulating curing glue layer.
上述导电壳体的内圆周面上设置有螺纹,导电圆环片外圆周面和绝缘圆环片外圆周面均与导电壳体的内圆周面通过螺纹连接。The inner circumferential surface of the above-mentioned conductive housing is provided with threads, and the outer circumferential surface of the conductive annular piece and the outer circumferential surface of the insulating annular piece are connected with the inner circumferential surface of the conductive housing through threads.
上述导电壳体左端开口周围的端面上开有圆环形的沟槽,所述密封圈嵌入在沟槽内,且密封圈的厚度大于沟槽的深度。An annular groove is formed on the end surface around the left end opening of the conductive housing. The sealing ring is embedded in the groove, and the thickness of the sealing ring is greater than the depth of the groove.
上述透明绝缘介质采用透明绝缘气体或透明绝缘液体,导电壳体、导电圆环片、导电棒采用纯铜材料,绝缘圆环片采用具有一定强度和良好绝缘性的材料,透光片采用高透光光学玻璃。The above-mentioned transparent insulating medium uses transparent insulating gas or transparent insulating liquid. The conductive shell, conductive ring sheet and conductive rod are made of pure copper material. The insulating ring sheet is made of materials with certain strength and good insulation properties. The light-transmitting sheet is made of highly transparent material. Light optical glass.
优选的,绝缘圆环片采用AlN陶瓷、聚四氟乙烯绝缘材料。Preferably, the insulating annular sheet is made of AlN ceramic or polytetrafluoroethylene insulating materials.
本发明的技术特点及优点:The technical features and advantages of the present invention are as follows:
导电壳体内部可通过可拆卸组合件构成密封空间,光导开关的两个电极分别连接导电圆环片进而连接导电壳体和导电棒直接引出,从而实现光导开关与外部电路的电连接。向密封空间里填充透明绝缘介质,使透明绝缘介质完全包裹住光导开关的四周,提高了光导开关的耐压强度和使用寿命。A sealed space can be formed inside the conductive shell through a detachable assembly. The two electrodes of the photoconductive switch are respectively connected to the conductive ring piece and then connected to the conductive shell and the conductive rod to be directly led out, thereby realizing the electrical connection between the photoconductive switch and the external circuit. The transparent insulating medium is filled into the sealed space so that the transparent insulating medium completely wraps around the photoconductive switch, thereby improving the pressure strength and service life of the photoconductive switch.
附图说明Description of the drawings
图1为本发明的主视结构示意图;Figure 1 is a schematic front view of the structure of the present invention;
图中:1、盖帽;2、透光片;3、密封圈;4、光导开关芯片;5、导电圆环片;6、导电壳体;7、绝缘圆环片;8、封堵螺钉;9、导电棒;10、透明绝缘介质;11、绝缘固化胶层。In the picture: 1. Cap; 2. Transparent sheet; 3. Sealing ring; 4. Photoconductive switch chip; 5. Conductive ring piece; 6. Conductive shell; 7. Insulating ring piece; 8. Blocking screws; 9. Conductive rod; 10. Transparent insulating medium; 11. Insulating cured adhesive layer.
具体实施方式Detailed ways
下面结合附图对本发明做进一步详细的描述:The present invention will be described in further detail below in conjunction with the accompanying drawings:
如图1所示,一种光导开关封装结构,包括横向的圆柱形且两端开口的导电壳体6,所述导电壳体6左端开口密封封堵有透光片2,导电壳体6内中部设置有导电圆环片5,导电圆环片5外圆周面与导电壳体6的内圆周面紧密贴合,导电圆环片5中心开有通孔,导电壳体6的右端开口密封封堵有绝缘圆环片7,所述绝缘圆环片7中心横向穿有导电棒9,导电棒9左端贯穿通孔且导电棒9外表面与通孔的内表面之间留有间隔空隙,所述间隔空隙处设置有光导开关芯片4,所述光导开关芯片4两个电极分别连接导电圆环片5和导电棒9,导电棒9的右端延伸至绝缘圆环片7右侧,导电圆环片5与透光片2之间、光导开关芯片4周围的间隔空隙内以及导电圆环片5与绝缘圆环片7之间的导电壳体6内填充有透明绝缘介质10。光导开关芯片4的同面型电极设计,以及背射激光触发模式,光导开关芯片4的一个电极焊接在导电圆环片5上后与导电壳体6通过螺纹相互结合,且光导开关芯片4的另一个电极与导电棒9焊接,从而可得到两个引出端分别实现电连接。导电圆环片5和导电棒9通过焊接而先后与光导开关芯片4电极的进行焊接。向密封空间里填充透明绝缘介质10,使透明绝缘介质10完全包裹住光导开关的四周,提高了光导开关的使用寿命和整个器件的工作电压。As shown in Figure 1, a photoconductive switch packaging structure includes a transverse cylindrical conductive housing 6 with openings at both ends. The left end opening of the conductive housing 6 is sealed with a light-transmitting sheet 2. Inside the conductive housing 6 There is a conductive annular sheet 5 in the middle. The outer circumferential surface of the conductive annular sheet 5 closely fits the inner circumferential surface of the conductive shell 6. There is a through hole in the center of the conductive annular sheet 5, and the right end opening of the conductive shell 6 is sealed. An insulating annular sheet 7 is blocked, and a conductive rod 9 is transversely pierced through the center of the insulating annular sheet 7. The left end of the conductive rod 9 penetrates through the through hole, and there is a gap between the outer surface of the conductive rod 9 and the inner surface of the through hole, so A photoconductive switch chip 4 is provided at the gap. The two electrodes of the photoconductive switch chip 4 are respectively connected to the conductive annular sheet 5 and the conductive rod 9. The right end of the conductive rod 9 extends to the right side of the insulating annular sheet 7. The conductive annular ring The conductive shell 6 between the sheet 5 and the light-transmitting sheet 2, the space around the photoconductive switch chip 4, and the conductive annular sheet 5 and the insulating annular sheet 7 are filled with transparent insulating medium 10. The photoconductive switch chip 4 has a coplanar electrode design and a back-emission laser triggering mode. One electrode of the photoconductive switch chip 4 is welded to the conductive annular sheet 5 and then combined with the conductive shell 6 through threads, and the photoconductive switch chip 4 The other electrode is welded to the conductive rod 9, so that two lead-out ends can be obtained for electrical connection respectively. The conductive annular sheet 5 and the conductive rod 9 are welded to the electrodes of the photoconductive switch chip 4 successively through welding. The transparent insulating medium 10 is filled into the sealed space so that the transparent insulating medium 10 completely wraps around the photoconductive switch, thereby improving the service life of the photoconductive switch and the working voltage of the entire device.
透光片2外侧套有盖帽1,盖帽1边缘扣在导电壳体6端部外侧且通过螺纹连接在一起,导电壳体6端部中心开有观察窗口,透光片2与导电壳体6左端开口周围的端面之间设置有密封圈3。为了提高密封性,导电壳体6左端开口周围的端面上开有圆环形的沟槽,所述密封圈3嵌入在沟槽内。盖帽1的开设有窗口,可与透光片2结合形成透光密封窗口;盖帽1可与导电壳体6具有外螺纹的一端旋紧,通过透光片2与密封圈3的紧密接触,实现该端口良好的密封效果。透光片2的材料可采用高透光光学玻璃片,并针对不同的激光波长可对玻璃片进行镀膜处理。There is a cap 1 on the outside of the light-transmitting sheet 2. The edge of the cap 1 is buckled on the outside of the end of the conductive housing 6 and connected together through threads. There is an observation window in the center of the end of the conductive housing 6. The light-transmitting sheet 2 and the conductive housing 6 A sealing ring 3 is provided between the end faces around the left end opening. In order to improve the sealing performance, an annular groove is formed on the end surface around the left end opening of the conductive housing 6, and the sealing ring 3 is embedded in the groove. The cap 1 has a window, which can be combined with the light-transmitting sheet 2 to form a light-transmitting sealing window; the cap 1 can be tightened with the end of the conductive housing 6 that has an external thread, and through the close contact between the light-transmitting sheet 2 and the sealing ring 3, The port has good sealing effect. The material of the light-transmitting sheet 2 can be a highly transparent optical glass sheet, and the glass sheet can be coated for different laser wavelengths.
绝缘圆环片7上开有注入孔,且注入孔内塞入有可拆卸的封堵螺钉8,绝缘圆环片7右侧的端面上涂有绝缘固化胶层11。导电壳体6的内圆周面上设置有螺纹,导电圆环片5外圆周面和绝缘圆环片7外圆周面均与导电壳体6的内圆周面通过螺纹连接。导电圆环片5上存在大于光导开关芯片4尺寸的间隔空隙,方便透明绝缘介质10的流通以及导电圆环片5在导电壳体6中的旋入和旋出。绝缘圆环片7的中心通孔处的尺寸与导电棒9底面的尺寸一致,可通过设计相应的螺纹配合或使用密封胶等固化材料将导电棒9和绝缘圆环片7进行相对位置上的固定和密封,从而移动绝缘圆环片7在壳体内的位置来实现对导电棒9位置的控制来实现良好的焊接。绝缘圆环片7还存在长度等于壁厚的螺纹孔,可在此处进行透明绝缘介质10的填入,填充完毕后,可先通过螺丝进行密封,再使用绝缘固化介质在绝缘圆环片7的外表面进行固化。绝缘圆环片7与导电棒9可通过螺纹或密封胶一体成型。The insulating ring piece 7 has an injection hole, and a removable blocking screw 8 is inserted into the injection hole. The end surface on the right side of the insulating ring piece 7 is coated with an insulating curing glue layer 11. The inner circumferential surface of the conductive housing 6 is provided with threads, and the outer circumferential surface of the conductive annular sheet 5 and the outer circumferential surface of the insulating annular sheet 7 are both connected to the inner circumferential surface of the conductive housing 6 through threads. There are gaps on the conductive annular sheet 5 that are larger than the size of the photoconductive switch chip 4 to facilitate the circulation of the transparent insulating medium 10 and the screwing-in and unscrewing of the conductive annular sheet 5 in the conductive housing 6 . The size of the central through hole of the insulating ring plate 7 is consistent with the size of the bottom surface of the conductive rod 9. The conductive rod 9 and the insulating ring plate 7 can be positioned relative to each other by designing corresponding threads or using solidified materials such as sealant. Fixing and sealing, thereby moving the position of the insulating ring piece 7 in the housing to control the position of the conductive rod 9 to achieve good welding. The insulating ring sheet 7 also has a threaded hole with a length equal to the wall thickness, where the transparent insulating medium 10 can be filled. After the filling is completed, it can be sealed with screws first, and then the insulating curing medium is used to seal the insulating ring sheet 7 The outer surface is cured. The insulating ring piece 7 and the conductive rod 9 can be integrally formed through threads or sealant.
盖帽1、导电壳体6、导电圆环片5、导电棒9均采用纯铜材料。其中纯铜又称为紫铜,指含铜量最高的铜,含量为99.5%~99.95%,具有良好的焊接性、可塑性、耐腐蚀性和优异的导电特性等性质。The cap 1, the conductive shell 6, the conductive ring piece 5, and the conductive rod 9 are all made of pure copper materials. Among them, pure copper is also called red copper, which refers to the copper with the highest copper content, ranging from 99.5% to 99.95%. It has good weldability, plasticity, corrosion resistance and excellent conductive properties.
绝缘圆环片7可以采用AlN陶瓷、聚四氟乙烯材料等绝缘材料。其中,透光片2为高透光光学玻璃片,可针对不同激光波长进行镀膜处理。封堵螺钉8可为金属螺丝或塑料螺丝。密封圈3可为氟胶、橡胶、硅胶等材质的密封圈3。绝缘固化胶可以为环氧树脂胶等。透明绝缘介质10可以为透明绝缘气体、透明绝缘液体等透明绝缘材料。透明绝缘气体可采用六氟化硫;绝缘液体可采用氟化液、液体硅胶或绝缘油等。The insulating ring piece 7 can be made of AlN ceramics, polytetrafluoroethylene materials and other insulating materials. Among them, the light-transmitting sheet 2 is a highly transparent optical glass sheet that can be coated for different laser wavelengths. The blocking screws 8 can be metal screws or plastic screws. The sealing ring 3 can be made of fluorine rubber, rubber, silicone or other materials. The insulating curing glue can be epoxy resin glue, etc. The transparent insulating medium 10 may be a transparent insulating material such as a transparent insulating gas or a transparent insulating liquid. Sulfur hexafluoride can be used as the transparent insulating gas; fluorinated liquid, liquid silicone or insulating oil can be used as the insulating liquid.
以上所述仅是本专利的优选实施方式,应当指出,对于本技术领域的普通技术人员来说,在不脱离本专利技术原理的前提下,还可以做出若干改进和替换,这些改进和替换也应视为本专利的保护范围。The above are only the preferred embodiments of this patent. It should be pointed out that those of ordinary skill in the art can also make several improvements and substitutions without departing from the technical principles of this patent. These improvements and substitutions It should also be regarded as the protection scope of this patent.
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CN201984991U (en) * | 2011-04-22 | 2011-09-21 | 常州盛士达传感器有限公司 | Pressure switch |
CN107743031A (en) * | 2017-11-30 | 2018-02-27 | 大连理工大学 | A Laser Triggered Multistage Vacuum Switch |
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US7041413B2 (en) * | 2000-02-02 | 2006-05-09 | Quallion Llc | Bipolar electronics package |
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CN1499687A (en) * | 2002-11-06 | 2004-05-26 | 三菱电机株式会社 | Metallic locking shutter |
CN201417350Y (en) * | 2008-12-17 | 2010-03-03 | 福建福晶科技股份有限公司 | Electro-optical switch with adjustable optical window sheets |
CN201984991U (en) * | 2011-04-22 | 2011-09-21 | 常州盛士达传感器有限公司 | Pressure switch |
CN107743031A (en) * | 2017-11-30 | 2018-02-27 | 大连理工大学 | A Laser Triggered Multistage Vacuum Switch |
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