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CN114122153B - Integrated packaging structure based on photoconductive switch and laser device - Google Patents

Integrated packaging structure based on photoconductive switch and laser device Download PDF

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Publication number
CN114122153B
CN114122153B CN202111233937.XA CN202111233937A CN114122153B CN 114122153 B CN114122153 B CN 114122153B CN 202111233937 A CN202111233937 A CN 202111233937A CN 114122153 B CN114122153 B CN 114122153B
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photoconductive switch
packaging structure
lower shell
laser device
structure based
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CN114122153A (en
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肖龙飞
沙慧茹
李阳凡
徐现刚
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Shandong University
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Shandong University
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/50Encapsulations or containers
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03KPULSE TECHNIQUE
    • H03K17/00Electronic switching or gating, i.e. not by contact-making and –breaking
    • H03K17/51Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the components used
    • H03K17/78Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the components used using opto-electronic devices, i.e. light-emitting and photoelectric devices electrically- or optically-coupled
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/10Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices being sensitive to infrared radiation, visible or ultraviolet radiation, and having no potential barriers, e.g. photoresistors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/60Arrangements for cooling, heating, ventilating or compensating for temperature fluctuations

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  • Lasers (AREA)

Abstract

本发明涉及一种基于光导开关与激光器件的一体化封装结构,包括相互契合的上下壳体,下壳体底部设置有两个导电柱,导电柱上端穿入下壳体内部,下端延伸至下壳体外,分别与光导开关的两个电极连接,上壳体内设置有可容纳激光二极管的密闭空间,上壳体顶部开有通孔用于引出电极。本发明的有益效果是:该封装结构由光导开关封装结构及激光二极管封装结构契合而成,能够准确定位激光二极管照射位置,并且方便更换激光二极管。同时能够使光导开关远离封装内壁,并且表面与绝缘冷却液充分接触,能够充分的冷却,避免光导开关放电打火发生损坏,提高了光导开关的耐压能力。

The present invention relates to an integrated packaging structure based on a photoconductive switch and a laser device, comprising an upper and lower shell body that fit each other, two conductive columns are arranged at the bottom of the lower shell body, the upper ends of the conductive columns penetrate into the interior of the lower shell body, and the lower ends extend to the outside of the lower shell body, respectively connected to the two electrodes of the photoconductive switch, a closed space that can accommodate a laser diode is arranged in the upper shell body, and a through hole is opened at the top of the upper shell body for leading out the electrode. The beneficial effect of the present invention is that the packaging structure is formed by the matching of the photoconductive switch packaging structure and the laser diode packaging structure, and can accurately locate the irradiation position of the laser diode, and facilitate the replacement of the laser diode. At the same time, the photoconductive switch can be kept away from the inner wall of the package, and the surface is in full contact with the insulating coolant, which can be fully cooled, thereby avoiding the photoconductive switch from being damaged by discharge and sparking, and improving the pressure resistance of the photoconductive switch.

Description

基于光导开关与激光器件的一体化封装结构Integrated packaging structure based on photoconductive switch and laser device

技术领域Technical Field

本发明涉及一种基于光导开关与激光器件的一体化封装结构,属于半导体器件技术领域。The invention relates to an integrated packaging structure based on a photoconductive switch and a laser device, belonging to the technical field of semiconductor devices.

背景技术Background Art

光导开关是集激光技术与半导体技术于一体的新型快速光电器件,基于半导体材料的光电效应,通过光的触发改变光生载流子数目,使半导体材料的电导率发生变化,从而使开关在纳秒(ns)甚至皮秒(ps)内完成通断。光导开关具有结构简单、抖动时间小、响应速度极快、重复频率高等优点,可以在高压高功率下工作。Photoconductive switches are new fast optoelectronic devices that integrate laser technology and semiconductor technology. Based on the photoelectric effect of semiconductor materials, the number of photogenerated carriers is changed by light triggering, causing the conductivity of semiconductor materials to change, so that the switch can be turned on and off within nanoseconds (ns) or even picoseconds (ps). Photoconductive switches have the advantages of simple structure, small jitter time, extremely fast response speed, high repetition frequency, etc., and can work under high voltage and high power.

封装结构对于光导开关器件至关重要,目前器件模块化仍是重点,激光器件入射位置难以准确固定,并且大功率光导开关的工作电压很高,容易发生表面击穿放电,导致器件损坏也是一个问题。The packaging structure is crucial for photoconductive switching devices. Currently, device modularization is still the focus. The incident position of the laser device is difficult to accurately fix, and the operating voltage of high-power photoconductive switches is very high, which makes surface breakdown discharge prone to occur, leading to device damage, which is also a problem.

发明内容Summary of the invention

为解决以上技术上的不足,本发明提供了一种基于光导开关与激光器件的一体化封装结构,该封装结构由光导开关封装结构及激光二极管封装结构契合而成,能够准确定位激光二极管照射位置,并且方便更换光导开关及激光器件。同时能够使光导开关远离封装内壁,并且表面与绝缘冷却液充分接触,能够充分的冷却,避免光导开关放电打火发生损坏,提高了光导开关的耐压能力。In order to solve the above technical deficiencies, the present invention provides an integrated packaging structure based on a photoconductive switch and a laser device. The packaging structure is formed by combining a photoconductive switch packaging structure and a laser diode packaging structure, which can accurately locate the irradiation position of the laser diode and facilitate the replacement of the photoconductive switch and the laser device. At the same time, the photoconductive switch can be kept away from the inner wall of the package, and the surface is in full contact with the insulating coolant, which can be fully cooled, avoiding the photoconductive switch from being damaged by discharge and sparking, and improving the pressure resistance of the photoconductive switch.

本发明是通过以下措施实现的:The present invention is achieved by the following measures:

一种基于光导开关与激光器件的一体化封装结构,包括绝缘的下壳体,所述下壳体上方可拆卸连接有绝缘的上壳体,下壳体顶部设置有上开口,上壳体底部设置有下开口,所述下开口与上开口之间封堵有透光玻璃,下壳体内设置有可容纳光导开关的密闭空间,且该密闭空间内填充有绝缘冷却液,下壳体底部设置有两个导电柱,所述导电柱上端穿入下壳体内部,导电柱下端延伸至下壳体底部外下方,两个导电柱分别与光导开关的两个电极连接,上壳体内设置有可容纳激光二极管的密闭空间,上壳体顶部开有用于引出电极的通孔。An integrated packaging structure based on a photoconductive switch and a laser device comprises an insulating lower shell, an insulating upper shell is detachably connected to the top of the lower shell, an upper opening is arranged on the top of the lower shell, a lower opening is arranged on the bottom of the upper shell, a light-transmitting glass is blocked between the lower opening and the upper opening, a closed space for accommodating the photoconductive switch is arranged in the lower shell, and the closed space is filled with insulating coolant, two conductive columns are arranged at the bottom of the lower shell, the upper ends of the conductive columns penetrate into the interior of the lower shell, and the lower ends of the conductive columns extend to the outside and below the bottom of the lower shell, the two conductive columns are respectively connected to the two electrodes of the photoconductive switch, a closed space for accommodating a laser diode is arranged in the upper shell, and a through hole for leading out the electrode is opened at the top of the upper shell.

上述下壳体的上端面内侧边缘表面开有围绕下开口一周的卡槽,所述透光玻璃边缘嵌入在卡槽内,透光玻璃上表面与下壳体的上端面外侧边缘表面平齐。The inner edge surface of the upper end surface of the lower shell is provided with a slot surrounding the lower opening, the edge of the light-transmitting glass is embedded in the slot, and the upper surface of the light-transmitting glass is flush with the outer edge surface of the upper end surface of the lower shell.

上述上壳体的下端面开有若干竖直向上延伸的定位孔,所述下壳体的上端面设置有若干竖直向上的定位圆柱,所述定位圆柱与定位孔插接配合。The lower end surface of the upper shell is provided with a plurality of positioning holes extending vertically upward, and the upper end surface of the lower shell is provided with a plurality of positioning cylinders extending vertically upward, and the positioning cylinders are plug-fitted with the positioning holes.

上述下壳体的侧壁上开有注入孔,所述注入孔内可拆卸塞入有封堵螺钉。An injection hole is provided on the side wall of the lower shell, and a plugging screw is detachably inserted into the injection hole.

上述上壳体、下壳体均采用绝缘材料,绝缘冷却液采用绝缘油或氟化液。The upper shell and the lower shell are both made of insulating materials, and the insulating coolant is insulating oil or fluorinated liquid.

优选的,上壳体、下壳体均采用陶瓷材料。Preferably, both the upper shell and the lower shell are made of ceramic material.

本发明的有益效果是:本发明的封装结构由光导开关封装结构及激光二极管封装结构契合而成,能够准确定位激光二极管照射位置,并且方便更换光导开关及激光器件。并且可以避免沿面击穿;密封空间内充满绝缘冷却液,并且绝缘冷却液能够完全包裹光导开关,使光导开关表面与绝缘冷却液充分接触,能够对光导开关进行充分的冷却,避免光导开关放电打火发生损坏,提高了光导开关的耐压能力。The beneficial effects of the present invention are as follows: the packaging structure of the present invention is formed by combining the packaging structure of the photoconductive switch and the packaging structure of the laser diode, which can accurately locate the irradiation position of the laser diode and facilitate the replacement of the photoconductive switch and the laser device. It can also avoid surface breakdown; the sealed space is filled with insulating coolant, and the insulating coolant can completely wrap the photoconductive switch, so that the surface of the photoconductive switch is in full contact with the insulating coolant, which can fully cool the photoconductive switch, avoid the photoconductive switch from being damaged by discharge and sparking, and improve the pressure resistance of the photoconductive switch.

附图说明BRIEF DESCRIPTION OF THE DRAWINGS

图1为本发明主视结构示意图。FIG1 is a schematic diagram of the main structure of the present invention.

图2为本发明侧面结构示意图。FIG. 2 is a schematic diagram of the side structure of the present invention.

图中:1、定位圆柱;2、透光玻璃;3、下壳体;5、导电柱;6、注入孔;7、定位孔;8、上壳体;9、通孔。In the figure: 1. positioning cylinder; 2. light-transmitting glass; 3. lower shell; 5. conductive column; 6. injection hole; 7. positioning hole; 8. upper shell; 9. through hole.

具体实施方式DETAILED DESCRIPTION

下面结合附图对本发明做进一步详细的描述:The present invention is further described in detail below in conjunction with the accompanying drawings:

如图1、2所示,一种基于光导开关与激光器件的一体化封装结构,包括绝缘的下壳体3,下壳体3上方可拆卸连接有绝缘的上壳体8。为了方便定位准确,上壳体8的下端面开有若干竖直向上延伸的定位孔7,下壳体3的上端面设置有若干竖直向上的定位圆柱1,定位圆柱1与定位孔7插接配合。上壳体8放在下壳体3时,定位圆柱1插入定位孔7内。下壳体3顶部设置有上开口,上壳体8底部设置有下开口,下开口与上开口之间封堵有透光玻璃2,下壳体3内设置有可容纳光导开关的密闭空间,且该密闭空间内填充有绝缘冷却液,下壳体3底部设置有两个导电柱5,导电柱5上端穿入下壳体3内部,导电柱5下端延伸至下壳体3底部外下方,两个导电柱5分别与光导开关的两个电极连接,上壳体8内设置有可容纳激光二极管的密闭空间,上壳体8顶部开有通孔9,用于引出电极。光导开关封装结构与激光二极管封装结构相互独立,通过光导开关封装结构外壳上的定位圆柱1及激光二极管封装结构外壳上的定位孔7契合成整体封装结构。能够准确定位激光二极管照射位置,并且方便更换光导开关及激光器件。下壳体3的侧壁上开有注入孔6,注入孔6内可拆卸塞入有封堵螺钉。当注入孔6打开后灌入绝缘冷却液,然后塞入封堵螺钉堵住注入孔6。As shown in Fig. 1 and Fig. 2, an integrated packaging structure based on a photoconductive switch and a laser device includes an insulating lower shell 3, and an insulating upper shell 8 is detachably connected to the upper part of the lower shell 3. In order to facilitate accurate positioning, a plurality of positioning holes 7 extending vertically upward are provided on the lower end surface of the upper shell 8, and a plurality of positioning cylinders 1 extending vertically upward are provided on the upper end surface of the lower shell 3, and the positioning cylinders 1 are plugged into the positioning holes 7. When the upper shell 8 is placed on the lower shell 3, the positioning cylinders 1 are inserted into the positioning holes 7. An upper opening is provided at the top of the lower shell 3, and a lower opening is provided at the bottom of the upper shell 8. A light-transmitting glass 2 is sealed between the lower opening and the upper opening. A closed space for accommodating a photoconductive switch is provided in the lower shell 3, and the closed space is filled with insulating coolant. Two conductive columns 5 are provided at the bottom of the lower shell 3. The upper ends of the conductive columns 5 penetrate into the lower shell 3, and the lower ends of the conductive columns 5 extend to the lower outside of the bottom of the lower shell 3. The two conductive columns 5 are respectively connected to the two electrodes of the photoconductive switch. A closed space for accommodating a laser diode is provided in the upper shell 8. A through hole 9 is provided at the top of the upper shell 8 for leading out the electrode. The photoconductive switch packaging structure and the laser diode packaging structure are independent of each other, and are matched into an integral packaging structure through the positioning cylinder 1 on the outer shell of the photoconductive switch packaging structure and the positioning hole 7 on the outer shell of the laser diode packaging structure. The irradiation position of the laser diode can be accurately positioned, and the photoconductive switch and the laser device can be easily replaced. An injection hole 6 is provided on the side wall of the lower shell 3, and a plugging screw can be removably inserted into the injection hole 6. When the injection hole 6 is opened, the insulating coolant is poured in, and then the plugging screw is inserted to block the injection hole 6.

下壳体3的上端面内侧边缘表面开有围绕下开口一周的卡槽,所述透光玻璃2边缘嵌入在卡槽内,透光玻璃2上表面与下壳体3的上端面外侧边缘表面平齐。形成透光窗口,密封光学玻璃板达到密闭状态。上壳体8、下壳体3均采用陶瓷材料,绝缘冷却液采用绝缘油或氟化液。The inner edge surface of the upper end face of the lower shell 3 is provided with a slot surrounding the lower opening, and the edge of the light-transmitting glass 2 is embedded in the slot, and the upper surface of the light-transmitting glass 2 is flush with the outer edge surface of the upper end face of the lower shell 3. A light-transmitting window is formed, and the optical glass plate is sealed to achieve a sealed state. The upper shell 8 and the lower shell 3 are both made of ceramic material, and the insulating coolant is insulating oil or fluorinated liquid.

本发明提供的封装结构由光导开关封装结构及激光二极管封装结构契合而成,能够准确定位激光二极管照射位置,并且方便更换光导开关及激光器件。同时能够使光导开关远离封装内壁,并且表面与绝缘冷却液充分接触,能够充分的冷却,避免光导开关放电打火发生损坏,提高了光导开关的耐压能力。The packaging structure provided by the present invention is formed by combining the photoconductive switch packaging structure and the laser diode packaging structure, which can accurately locate the irradiation position of the laser diode and facilitate the replacement of the photoconductive switch and the laser device. At the same time, the photoconductive switch can be kept away from the inner wall of the packaging, and the surface is fully in contact with the insulating coolant, which can be fully cooled, avoiding the photoconductive switch from being damaged by discharge and sparking, and improving the pressure resistance of the photoconductive switch.

以上所述仅是本专利的优选实施方式,应当指出,对于本技术领域的普通技术人员来说,在不脱离本专利技术原理的前提下,还可以做出若干改进和替换,这些改进和替换也应视为本专利的保护范围。The above is only a preferred implementation of this patent. It should be pointed out that for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principles of this patent. These improvements and substitutions should also be regarded as the scope of protection of this patent.

Claims (5)

1. An integrated packaging structure based on photoconductive switch and laser device, its characterized in that: including insulating inferior valve, inferior valve top can be dismantled and be connected with insulating last casing, inferior valve top is provided with the upper shed, and it is provided with the lower shed to go up the casing bottom, the shutoff has light-transmitting glass between lower shed and the upper shed, is provided with the airtight space that can hold photoconductive switch in the inferior valve, and this airtight space intussuseption is filled with insulating coolant liquid, inferior valve bottom is provided with two conductive posts, the conductive post upper end penetrates inside inferior valve, and conductive post lower extreme extends to inferior valve bottom outside below, and two conductive posts are connected with photoconductive switch's two electrodes respectively, are provided with the airtight space that can hold laser diode in the superior valve, and the last casing top is opened there is the through-hole that is used for drawing forth the electrode.
2. The integrated packaging structure based on photoconductive switch and laser device according to claim 1, wherein: the inner side edge surface of the upper end face of the lower shell is provided with a clamping groove surrounding the periphery of the lower opening, the edge of the light-transmitting glass is embedded in the clamping groove, and the upper surface of the light-transmitting glass is flush with the outer side edge surface of the upper end face of the lower shell.
3. The integrated packaging structure based on photoconductive switch and laser device according to claim 1, wherein: the lower end face of the upper shell is provided with a plurality of positioning holes extending vertically upwards, the upper end face of the lower shell is provided with a plurality of positioning cylinders extending vertically upwards, and the positioning cylinders are in plug-in fit with the positioning holes.
4. The integrated packaging structure based on photoconductive switch and laser device according to claim 1, wherein: an injection hole is formed in the side wall of the lower shell, and a plugging screw is detachably plugged into the injection hole.
5. The integrated packaging structure based on photoconductive switch and laser device according to claim 1, wherein: the upper shell and the lower shell are made of insulating materials, and the insulating cooling liquid is insulating oil or fluoridized liquid.
CN202111233937.XA 2021-10-22 2021-10-22 Integrated packaging structure based on photoconductive switch and laser device Active CN114122153B (en)

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CN103779782A (en) * 2014-01-08 2014-05-07 中国工程物理研究院应用电子学研究所 High average power diode pumping laser module and preparation method thereof

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JP6509617B2 (en) * 2015-04-15 2019-05-08 株式会社小糸製作所 Vehicle lamp
CN107565376A (en) * 2017-10-13 2018-01-09 西安炬光科技股份有限公司 A kind of heat sink insulated type capsulation structure for semiconductor laser and folded battle array
CN211150566U (en) * 2019-11-07 2020-07-31 长春半导体有限公司西安分公司 Photodiode with replaceable pins

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102243932A (en) * 2010-05-11 2011-11-16 三星电机株式会社 Optical pointing module having lighting function and electronic apparatus
CN103779782A (en) * 2014-01-08 2014-05-07 中国工程物理研究院应用电子学研究所 High average power diode pumping laser module and preparation method thereof

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