CN114000202B - Crystalline silicon solar cell variable temperature diffusion furnace - Google Patents

Abstract

The invention discloses a variable-temperature diffusion furnace for a crystalline silicon solar cell, and relates to the technical field of diffusion furnaces. The invention discloses a crystalline silicon solar cell variable-temperature diffusion furnace, which comprises a furnace body, wherein a furnace mouth is formed in the furnace body, a furnace door for closing the furnace mouth is hinged to the furnace body on one side of the furnace mouth, the furnace mouth is arranged in a circular shape, a sealing piece, an auxiliary isolating piece and a locking piece are arranged on the furnace door, the sealing piece comprises a fixed ring formed on the furnace door, the outer side of the fixed ring is connected with a sealing ring with the same shape as the furnace mouth in a sliding manner, and the sealing ring is used for being in sliding connection outside the furnace mouth and sealing the furnace mouth when the furnace door is closed.

Description

Crystalline silicon solar cell variable temperature diffusion furnace

technical field

The invention relates to the technical field of diffusion furnaces, in particular to a temperature-variable diffusion furnace for crystalline silicon solar cells.

Background technique

Diffusion furnace is one of the important process equipment in the pre-process of semiconductor production line. It is used for diffusion, oxidation, annealing, alloying and sintering in industries such as large-scale integrated circuits, discrete devices, power electronics, optoelectronic devices and optical fibers. Its main purpose is to dope semiconductors, that is, to diffuse dopant materials into silicon wafers under high temperature conditions, so as to change and control the type, concentration and distribution of impurities in semiconductors, so as to establish regions with different electrical characteristics.

Although some processes can be doped by ion implantation, thermal diffusion is still the most important and common doping method. The thermal oxidation of silicon is to make the surface of silicon wafer react with oxidant at high temperature to grow a layer of silicon dioxide film. Oxidation methods include dry oxygen oxidation and water vapor oxidation (hydrogen-oxygen synthesis), and the diffusion furnace is an essential equipment for preparing oxide layers with these two oxidation methods. Diffusion furnace is the basic equipment of semiconductor integrated circuit technology, which is interdependent, mutually promoted and developed together with semiconductor technology.

There are two types of diffusion furnaces: vertical diffusion furnace and horizontal diffusion furnace. In the vertical diffusion furnace, the quartz boat is perpendicular to the horizontal plane, which is more conducive to the transfer of silicon wafers by the manipulator, and the consistency of the process parameters within the wafer is better. The horizontal diffusion furnace is a quartz boat parallel to the horizontal plane. One can have 4 or more process furnace tubes. The average area of the furnace tube is smaller, and the process parameters between the plates are better than the vertical diffusion furnace.

At present, the Chinese patent with the publication number CN107604444A discloses a silicon wafer heating diffusion furnace, which includes a furnace body and a plurality of furnace tubes arranged in the furnace body. In the furnace body, the two ends of the furnace tube are set as a furnace mouth and a furnace tail, and the furnace mouth and the furnace tail are provided with a furnace door on the furnace body. The furnace mouth, the furnace tail and the middle part of the furnace tube are respectively provided with heating elements, the furnace pipe is provided with a quartz layer, and the outer surfaces of the furnace mouth and the furnace tail of the furnace pipe are respectively covered with asbestos pads and asbestos rings, and the control cabinet Real-time monitoring and control of the temperature in the furnace body.

Although this silicon wafer heating diffusion furnace can achieve the effect of heat preservation on the furnace mouth and the furnace tail, preventing its heat dissipation from causing the furnace mouth, but when this diffusion furnace is in use, the furnace mouth is not closed well enough due to the existence of the furnace door. It is easy to cause heat dissipation during the production process. At the same time, due to high temperature conditions, silicon wafers are prone to generate harmful gases and leak from the furnace door, which will cause certain damage to the health of operators.

Contents of the invention

The present invention aims at the above technical problems, overcomes the shortcomings of the prior art, and provides a temperature-variable diffusion furnace for crystalline silicon solar cells.

In order to solve the above technical problems, the present invention provides a variable temperature diffusion furnace for crystalline silicon solar cells.

Technical effect: When closing the furnace door of the diffusion furnace, the closing mechanism can be driven by the linkage to simultaneously seal the furnace mouth. On the one hand, it increases the heat insulation when the furnace mouth is closed, avoids heat dissipation, and ensures the temperature in the furnace body. Rapid growth and maintenance of balance, on the other hand, can improve the airtightness of the furnace mouth, so as to prevent the leakage of harmful gases generated by silicon wafers or other components after high temperature in the furnace, so as to ensure the health of operators.

The technical solution further defined in the present invention is: a temperature-variable diffusion furnace for crystalline silicon solar cells, including a furnace body, a furnace mouth is opened on the furnace body, and a furnace door for closing the furnace mouth is hinged on the furnace body on one side of the furnace mouth. The furnace mouth is set in a circular shape, and the furnace door is provided with

The closure includes a fixed ring formed on the furnace door, and a closed ring with the same shape as the furnace mouth is slidably connected to the outside of the fixed ring, which is used to slide and clamp outside the furnace mouth and close the furnace mouth when the furnace door is closed. There is a connecting ring whose shape matches the fixing ring. When the furnace door is closed, the fixing ring is embedded in the connecting ring, and the closing ring is sleeved outside the connecting ring;

Auxiliary spacer, including two spacers arranged symmetrically with respect to the fixed ring and slidingly connected to the furnace door. The spacer is arranged in a semi-circular shape, and its shape fits the closed ring. There is a linkage on the furnace door, including the runner , which is used to drive the two isolation blocks to slide in opposite or opposite directions by rotating, so as to assist in isolating or releasing the closed ring;

The locking piece includes a slot fixed on the furnace body and a connecting block slidingly connected to the furnace door. The connecting block is connected to the connecting piece through a linkage rod. When the runner rotates, the linkage rod drives the connection block to be embedded in the Insert or pull out the caulking groove to realize the locking of the furnace door.

Further, the furnace body is provided with an accommodating groove for accommodating the furnace door, the furnace mouth is located in the middle of the accommodating groove, the closure includes a movable rod, the middle position of the movable rod is hinged on the furnace door, one end of the movable rod is hinged on the side of the closed ring, and the other One end is connected to the furnace door through a fixed spring, and a pressure block is provided at the end of the corresponding movable rod in the receiving tank.

In the variable temperature diffusion furnace for crystalline silicon solar cells mentioned above, the bottom of the fixed ring is provided with a limiting convex ring, and the end of the closed ring is formed with an inner convex ring. The inner convex ring slides between the furnace door and the limiting convex ring. When the furnace door is closed, The top surface of the inner convex ring and the limit convex ring are attached to each other, and the closed ring is made of toughened glass material as a whole, which includes two layers, and a vacuum heat insulation layer is arranged in the middle.

In the temperature-variable diffusion furnace for crystalline silicon solar cells mentioned above, the embedded grooves are arranged at the top and bottom of the inner side of the containing tank, and the furnace door is slidably connected with a movable block, and the movable block and the connecting block are fixed by a linkage rod, and the furnace door A drive gear is provided inside, and a movable rack intermeshing with the drive gear is provided on one side of the movable block for driving the movable block and the linkage rod to slide.

In the above-mentioned variable temperature diffusion furnace for crystalline silicon solar cells, the runner is connected to the furnace door through the rotating shaft, and the rotating shaft penetrates through the furnace door to set, and the driving gear is fixed on the rotating shaft with the coaxial center. The shifter is connected to the furnace door, and the end of the drive block is fixed with the isolation block through the drive rod.

In the variable temperature diffusion furnace for crystalline silicon solar cells mentioned above, a driving rack is integrally formed on the driving block, and the driving rack and the driving gear mesh with each other to drive the sliding of the driving block, and the driving rack and the movable rack are misaligned to drive The block is positioned at the upper and lower sides of the driving gear, and the movable block is positioned at the left and right sides of the driving gear.

In the above-mentioned variable temperature diffusion furnace for crystalline silicon solar cells, an asbestos pad attached to the closed ring is arranged in the isolation block, the furnace door includes an inner layer and an outer layer, and a vacuum is set between the inner layer and the outer layer. Corresponding to the body, there is a window formed by tempered glass, which is used to observe the working conditions in the furnace body.

The beneficial effects of the present invention are:

(1) In the present invention, when closing the furnace door, the operator first closes the furnace door to the receiving groove. At this time, the fixing ring cooperates with the connecting ring, and the fixing ring is embedded in the connecting ring, and continues to close the furnace door. The pressing block pushes the end of the movable rod outward. Since the middle of the movable rod is hinged on the furnace door, the other end of the movable rod can drive the closed ring to slide on the fixed ring, so that the closed ring is sleeved outside the connecting ring to form a seal. Due to the vacuum setting in the middle of the closed ring, the sealing performance of the entire furnace door can be improved, and the auxiliary spacer can realize the merging of two spacers outside the closed ring when the furnace door is closed, so as to contain the entire closed ring and further improve The heat insulation performance and air tightness of the furnace door, and finally with the locking piece, can lock the entire furnace door in the containing groove, so as to realize the firm closure of the furnace door;

(2) In the present invention, a limiting convex ring is provided at the bottom of the fixed ring, and an inner convex ring is formed at the end of the closed ring, so when the closed ring is clamped outside the connecting ring, the top surface of the inner convex ring can abut against the closed convex ring , so as to improve the overall airtightness, the closed ring made of tempered glass material has good airtightness, and the setting of the vacuum insulation layer can also make the whole sealing ring have good heat preservation performance, so as to ensure that the temperature of the entire furnace mouth is not high. Dissipation occurs, and the gas in the furnace is not easy to leak;

(3) In the present invention, after the furnace door is closed, the operator can drive the internal driving gear to rotate by rotating the runner. Since the left and right sides of the driving gear mesh with the movable rack, the movable rack can be driven to slide up and down, thereby Link the movable block and the connecting rod to drive the connecting block at the end of the connecting rod to slide, so that the connecting block is embedded in the slot or pulled out from the slot to achieve the effect of locking the entire furnace door. Similarly, through the active The gear can drive the driving rack on the upper and lower sides of the gear to slide, so as to realize the pulling of the isolation block;

(4) In the present invention, the drive rack can drive the two isolation blocks to fit or separate from each other, and when necessary, the tight fit to the outside of the closed ring can be completed, and the operator only needs to turn the runner to realize the alignment of the furnace door. The locking of the isolation block and the driving of the isolation block are more convenient overall. In addition, there is an asbestos pad attached to the closed ring in the isolation block, which can assist in improving the heat insulation and airtight performance of the closed ring to achieve a better sealing effect. ;

(5) In the present invention, when the furnace door of the diffusion furnace is closed, the closing mechanism is driven by the linkage to simultaneously seal the furnace mouth, on the one hand, the heat insulation when the furnace mouth is closed is increased, and heat dissipation is avoided. Ensure the temperature in the furnace increases rapidly and maintain balance. On the other hand, it can improve the airtightness of the furnace mouth, thereby preventing the leakage of harmful gases generated by silicon wafers or other components after high temperature in the furnace, so as to ensure the health of operators.

Description of drawings

Fig. 1 is the structural diagram of embodiment 1;

Fig. 2 is the connection schematic diagram of embodiment 1;

Fig. 3 is the structural diagram of closed ring and fixed ring in embodiment 1;

Fig. 4 is the connection schematic diagram of closed loop in embodiment 1;

FIG. 5 is a structural diagram of the auxiliary spacer in Embodiment 1. FIG.

Among them: 1. Furnace body; 11. Furnace mouth; 12. Furnace door; 121. Inner layer; 122. Outer layer; 123. Viewing window; 13. Accommodating groove; Convex ring; 22, closed ring; 221, inner convex ring; 23, connecting ring; 24, movable rod; 25, pressure block; 3, auxiliary isolation piece; 31, isolation block; 33. Drive rod; 34. Drive rack; 4. Locking piece; 41. Insert groove; 42. Connecting block; 43. Movable block; 44. Linkage rod; 45. Movable rack; 5. Linkage piece; 51 , runner; 52, rotating shaft; 53, driving gear.

Detailed ways

A temperature-variable diffusion furnace for crystalline silicon solar cells provided in this embodiment has a structure as shown in Figure 1-3, including a furnace body 1, a furnace mouth 11 is opened on the furnace body 1, and the furnace body 1 on the side of the furnace mouth 11 is hinged A furnace door 12 for closing the furnace mouth 11 is provided, the furnace mouth 11 is arranged in a circular shape, and the furnace door 12 is provided with a closing part 2 , an auxiliary insulating part 3 and a locking part 4 .

As shown in Figures 2-4, the closure 2 includes a fixed ring 21 formed on the furnace door 12, and a closed ring 22 with the same shape as the furnace mouth 11 is slidably connected to the outside of the fixed ring 21 for closing the furnace door 12. When the furnace door 12 is closed, the fixed ring 21 is embedded in the connecting ring 23, and The closed ring 22 is sheathed outside the connecting ring 23 .

As shown in Fig. 3-5, the furnace body 1 is provided with an accommodation groove 13 for accommodating the furnace door 12, the furnace mouth 11 is located in the middle of the accommodation groove 13, and the closure 2 includes a movable rod 24, which is hinged at the middle position of the furnace. On the door 12, one end of the movable rod 24 is hinged on the side of the closed ring 22, and the other end is connected to the furnace door 12 by a fixed spring.

As shown in Figure 3-5, the bottom of the fixed ring 21 is provided with a limiting convex ring 211, the end of the closed ring 22 is formed with an inner convex ring 221, and the inner convex ring 221 slides between the furnace door 12 and the limiting convex ring 211. When the door 12 is closed, the top surface of the inner convex ring 221 and the limiting convex ring 211 are attached to each other, and the closed ring 22 is made of toughened glass material as a whole, which includes two layers, and a vacuum insulation layer is arranged in the middle. The spacer 31 is provided with an asbestos mat 311 attached to the closed ring 22. The furnace door 12 includes an inner layer 121 and an outer layer 122. A vacuum is set between the inner layer 121 and the outer layer 122. The furnace door 12 and the furnace body 1 Correspondingly, a window 123 formed of toughened glass is provided for observing the working conditions in the furnace body 1 .

As shown in Figures 3-5, the auxiliary spacer 3 includes two spacers 31 that are arranged symmetrically with respect to the fixed ring 21 and are slidably connected to the furnace door 12. Closed, the furnace door 12 is provided with a linkage 5, including a runner 51, which is used to drive the two isolation blocks 31 to slide in opposite or opposite directions through rotation, so as to assist in isolating or releasing the closed ring 22.

As shown in Figures 3-5, a locking piece 4 is also provided, including a slot 41 fixed on the furnace body 1 and a connecting block 42 slidably connected to the furnace door 12. The connecting block 42 connects with the connecting rod 44 The linkage 5 is connected, and when the runner 51 rotates, the linkage rod 44 drives the connection block 42 to be embedded in the insertion groove 41 or pulled out of the insertion groove 41 to realize the locking of the furnace door 12 .

As shown in Figure 3-5, the embedded groove 41 is located at the top and bottom of the inner surface of the receiving groove 13, and the movable block 43 is slidably connected to the furnace door 12, and the movable block 43 and the connecting block 42 are fixed by a linkage rod 44 , The furnace door 12 is provided with a drive gear 53, and one side of the movable block 43 is provided with a movable rack 45 meshing with the drive gear 53 for driving the movable block 43 and the linkage rod 44 to slide. The rotating wheel 51 is rotatably connected to the furnace door 12 through the rotating shaft 52, the rotating shaft 52 is set through the furnace door 12, the driving gear 53 is coaxially fixed on the rotating shaft 52, the auxiliary spacer 3 includes a driving block 32, and the driving block 32 is slidably connected On the furnace door 12 , the end of the driving block 32 is fixed to the isolation block 31 through the driving rod 33 .

As shown in Figures 3-5, a driving rack 34 is integrally formed on the driving block 32, and the driving rack 34 meshes with the driving gear 53 to drive the driving block 32 to slide, and the driving rack 34 and the movable rack 45 interact with each other. Misaligned, the driving block 32 is located at the upper and lower sides of the driving gear 53 , and the movable block 43 is located at the left and right sides of the driving gear 53 .

When closing the furnace door 12, the operator first closes the furnace door 12 to the receiving groove 13. At this time, the fixing ring 21 cooperates with the connecting ring 23, and the fixing ring 21 is embedded in the connecting ring 23, and continues to close the furnace door 12. The briquetting block 25 on the side pushes the end of the movable rod 24 outward. Since the middle of the movable rod 24 is hinged on the furnace door 12, the other end of the movable rod 24 can drive the closed ring 22 to slide on the fixed ring 21, so that the closed ring 22 It is sleeved outside the connection ring 23 to form a seal. Due to the vacuum setting in the middle of the seal ring 22, the sealing performance of the entire furnace door 12 can be improved, and the auxiliary spacer 3 can realize two pieces of isolation outside the seal ring 22 when the furnace door 12 is closed. Blocks 31 are merged to contain the entire closed ring 22, further improving the heat insulation performance and airtightness of the furnace door 12, and finally with the locking piece 4, the entire furnace door 12 can be locked in the receiving groove 13, thereby A firm closure of the furnace door 12 is achieved.

The present invention can drive the closing mechanism through the linkage 5 to simultaneously seal the furnace mouth 11 when closing the furnace door 12 of the diffusion furnace. The temperature in the furnace body 1 increases rapidly and maintains a balance. On the other hand, it can improve the airtightness of the furnace mouth 11, thereby preventing the leakage of harmful gases generated by silicon wafers or other components after high temperature in the furnace body 1, so as to ensure the safety of operators. In good health.

In addition to the above-mentioned embodiments, the present invention can also have other implementations. All technical solutions formed by equivalent replacement or equivalent transformation fall within the scope of protection required by the present invention.

Claims (3)

1. A variable temperature diffusion furnace for crystalline silicon solar cells, comprising a body of furnace (1), the body of furnace (1) is provided with a furnace mouth (11), and the body of furnace (1) on the side of the furnace mouth (11) is hingedly provided with a furnace body (1). The furnace door (12) for closing the furnace mouth (11) is characterized in that: the furnace mouth (11) is arranged in a circular shape, and the furnace door (12) is provided with The closure (2) comprises a fixed ring (21) formed on the furnace door (12), and a closed ring (22) with the same shape as the furnace mouth (11) is slidably connected to the outside of the fixed ring (21). When the furnace door (12) is closed, it slides and clamps outside the furnace mouth (11) and closes the furnace mouth (11). The furnace mouth (11) is provided with a connecting ring (23) whose shape matches the fixed ring (21). When the door (12) is closed, the fixed ring (21) is embedded in the connecting ring (23), and the closed ring (22) is sleeved outside the connecting ring (23); The auxiliary spacer (3) includes two spacers (31) that are arranged symmetrically about the fixed ring (21) and are slidably connected to the furnace door (12). The ring (22) fits together, and the furnace door (12) is provided with a linkage (5), including a runner (51), which is used to drive the two spacers (31) to slide in opposite or opposite directions through rotation. To assist in isolating or releasing the closed loop (22); The locking piece (4) comprises a slot (41) fixed on the furnace body (1) and a connecting block (42) slidingly connected to the furnace door (12), and the connecting block (42) passes through the linkage rod ( 44) Connected with the linkage (5), when the runner (51) rotates, the linkage rod (44) drives the connection block (42) to be embedded in the slot (41) or pulled out of the slot (41) to realize The locking of the furnace door (12), the bottom of the fixed ring (21) is provided with a limiting convex ring (211), and the end of the closed ring (22) is formed with an inner convex ring (221), and the inner convex ring (221) is on the furnace door. (12) slips between the limiting convex ring (211), when the furnace door (12) is closed, the top surface of the inner convex ring (221) and the limiting convex ring (211) are attached to each other, and the closed ring (22) is integrally formed by Made of toughened glass material, it consists of two layers, the middle position is provided with a vacuum heat insulation layer, and the embedding groove (41) is arranged at the top and bottom positions of the inner side of the containing groove (13), and the furnace door (12) is slidably connected with Movable block (43), is fixed by linkage rod (44) between movable block (43) and connecting block (42), is provided with driving gear (53) in the furnace door (12), and movable block (43) one side is provided with There is a movable rack (45) meshing with the driving gear (53), which is used to drive the movable block (43) and the linkage rod (44) to slide, and the runner (51) is connected to the On the furnace door (12), the rotating shaft (52) penetrates the furnace door (12) and is set, and the driving gear (53) is fixed on the rotating shaft (52) concentrically, and the auxiliary spacer (3) includes a driving block (32), which drives The block (32) is slidingly connected on the furnace door (12), and the end of the drive block (32) is fixed with the spacer block (31) by the drive rod (33), and a drive rack ( 34), the driving rack (34) and the driving gear (53) mesh with each other, and are used to drive the driving block (32) to slide, and the driving rack (34) and the movable rack (45) are misaligned with each other, and the driving block (32) Be located at the upper and lower sides of the driving gear (53), and the movable block (43) is located at the left and right sides of the driving gear (53). 2. The temperature-variable diffusion furnace for crystalline silicon solar cells according to claim 1, characterized in that: the furnace body (1) is provided with an accommodating groove (13) for accommodating the furnace door (12), and the furnace mouth (11) Located in the middle of the receiving tank (13), the closure (2) includes a movable rod (24), the middle position of the movable rod (24) is hinged on the furnace door (12), and one end of the movable rod (24) is hinged on the closed ring (22) On the side, the other end is connected with the furnace door (12) by a fixed spring, and a pressing block (25) is provided at the end of the corresponding movable rod (24) in the accommodation groove (13). 3. The temperature-variable diffusion furnace for crystalline silicon solar cells according to claim 1, characterized in that: an asbestos pad (311) attached to the closed ring (22) is provided in the spacer block (31), and the furnace door ( 12) Including the inner layer (121) and the outer layer (122), the vacuum is set between the inner layer (121) and the outer layer (122), and the corresponding furnace door (12) and the furnace body (1) are provided with tempered glass Window (123) is used to observe the working conditions in the body of furnace (1).

Images