CN113804646A - Near-infrared Fourier transform polarization spectrometer - Google Patents
Near-infrared Fourier transform polarization spectrometer Download PDFInfo
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- CN113804646A CN113804646A CN202010540000.6A CN202010540000A CN113804646A CN 113804646 A CN113804646 A CN 113804646A CN 202010540000 A CN202010540000 A CN 202010540000A CN 113804646 A CN113804646 A CN 113804646A
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/359—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using near infrared light
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- G—PHYSICS
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
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- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0224—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using polarising or depolarising elements
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
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- G01J3/0262—Constructional arrangements for removing stray light
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- G—PHYSICS
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/447—Polarisation spectrometry
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Abstract
一种近红外傅里叶变换偏振光谱仪，包括：激光干涉子系统及其探测单元、白光干涉子系统及其探测单元；所述激光干涉子系统及其探测单元包括激光器、分束器、动镜、探测器和传感器；所述白光干涉子系统及其探测单元包括光源、滤波片、斩波器、光阑、偏振器、补偿器、曲面反射镜、聚焦组件和锁相放大器。本发明使用偏振器，进行各向异性特征样品的红外光谱测量。在光路中加入精密针孔，限制光斑尺寸，滤去杂散光，探测光再经聚焦于探测器时可获得高对比度干涉图。
A near-infrared Fourier transform polarization spectrometer, comprising: a laser interference subsystem and its detection unit, a white light interference subsystem and its detection unit; the laser interference subsystem and its detection unit include a laser, a beam splitter, and a moving mirror , a detector and a sensor; the white light interference subsystem and its detection unit include a light source, a filter, a chopper, a diaphragm, a polarizer, a compensator, a curved mirror, a focusing assembly and a lock-in amplifier. The present invention uses a polarizer to perform infrared spectroscopic measurements of anisotropic characteristic samples. A precise pinhole is added to the optical path to limit the spot size, filter out stray light, and obtain a high-contrast interferogram when the probe light is focused on the detector.
Description
Technical Field
The invention relates to the field of near infrared spectra, in particular to a near infrared Fourier transform polarization spectrometer.
Background
Infrared spectroscopy is a powerful tool for determining molecular composition and structure, where the near infrared region is primarily the absorption band produced by frequency doubling and combined frequency absorption of hydrogen-containing group (e.g., 0-H, N-H, C-H) stretching vibrations. At present, a traditional near-infrared Fourier transform spectrometer can realize the detection of a weak signal after a phase-locked amplifier is added, but the intensity of sample radiation is still measured, and samples with the same radiation intensity but different polarization properties cannot be distinguished. For anisotropic characterization samples, the orientation of the vibrating group in space cannot be obtained, and the spatial conformation of the molecules in the sample cannot be inferred.
In addition, for the current near-infrared fourier transform spectrometer, because the white light source emits large-aperture and large-field detection light, and the clear aperture of the beam expanding and focusing element is limited, stray light is easily generated to reduce the contrast ratio of interference fringes.
Disclosure of Invention
It is therefore an objective of the claimed invention to provide a near infrared fourier transform polarization spectrometer that solves at least some of the above problems.
To achieve the above object, as an aspect of the present invention, there is provided a near-infrared fourier transform polarization spectrometer including: the system comprises a laser interference subsystem and a detection unit thereof, and a white light interference subsystem and a detection unit thereof;
the laser interference subsystem and the detection unit thereof comprise a laser, a beam splitter, a movable mirror, a detector and a sensor; the laser generated by the laser is divided into two paths through the beam splitter, one path is reflected laser, the other path is transmitted laser, the position of the movable mirror is adjusted to change the optical path difference of the two beams, the interference pattern of the two laser beams is obtained through the detector, the inclined position information of the movable mirror in the moving process can be obtained, and the position information is transmitted to the sensor, so that the real-time motion feedback adjustment is carried out on the movable mirror, and the plane of the movable mirror is kept vertical to the optical axis;
the white light interference subsystem and the detection unit thereof comprise a light source, a filter, a chopper, a diaphragm, a polarizer, a compensator, a curved surface reflector, a focusing assembly and a lock-in amplifier, wherein the detection light emitted by the light source is filtered into near infrared light through the filter, the light is modulated into high frequency through the chopper, then the light reaches the curved surface reflector through the diaphragm to emit parallel light, the polarization state of the parallel light is changed through the first polarizer and the first compensator, and the adjusted polarized light is transmitted and passed; at the moment, the polarized light is divided into two paths through a beam splitter, wherein one path is reflected light serving as reference light, and the other path is transmitted light serving as detection light; the detection light reaches a sample, interacts with the sample, the spectrum and the polarization state are changed, the reflected light, the transmitted light or the scattered light of the detection light carrying the information of the sample is collected by a subsequent optical system, is expanded by a curved surface reflector and then is converged into one path by a beam splitter and reference light, the position of a movable mirror is adjusted to enable the two paths of light to generate interference, the polarization state of the interference light is adjusted by a second compensator and a second polarizer and enable the adjusted parallel light to transmit and pass, then the light is converged on a focus by the curved surface reflector, and a precise pinhole is arranged at the focused position; the light is then focused by a focusing assembly, at which position a detector is placed; the output interface of the detector is connected with the input signal interface of the phase-locked amplifier, and the frequency output interface of the chopper is connected with the reference signal interface of the phase-locked amplifier; at the moment, the input signal is modulated by the chopper and has the same frequency as the reference signal; and demodulating the obtained signal by the phase-locked amplifier to obtain a white light interference pattern, performing inverse Fourier transform calculation on the white light interference pattern to obtain a near infrared spectrum, and calculating to obtain the structure and the optical property of the anisotropic characteristic sample.
Wherein, the laser in the laser interference subsystem is a helium-neon laser, a carbon dioxide laser, a solid laser or a semiconductor laser.
The laser detector in the laser interference subsystem can reflect the change of the central position of the light spot and is a four-quadrant detector or a CCD detector.
The beam splitter can divide one beam into two beams of light which are perpendicular to each other, and is a dielectric film beam splitter, a metal film beam splitter, a cube beam splitter or a flat plate beam splitter.
Wherein, the light source in the white light interference subsystem is a tungsten lamp, a halogen lamp or a laser-driven white light source, and the wave band comprises a light source of a near infrared part.
And the curved surface reflector in the white light interference subsystem is an off-axis parabolic mirror or a toroidal reflector.
The focusing component in the white light interference subsystem is a single lens or a lens group, or a single curved reflector or a curved reflector group.
The polarizer in the white light interference subsystem is a Wollaston prism polarizer, a Rochon prism polarizer, a Glan Taylor prism polarizer, a Glan laser polarizer, a Glan Thompson prism polarizer or a film polarizer, and can change light into linearly polarized light.
Wherein, the compensator in the white light interference subsystem is a wave plate or a photoelastic phase compensation element, and the compensator can change the polarization state of light.
The detector in the white light interference subsystem is a PbSe detector, a Ge detector, an InSb detector or an InGaAs detector.
Based on the technical scheme, compared with the prior art, the near-infrared Fourier transform polarization spectrometer has at least one of the following beneficial effects:
1. infrared spectroscopic measurements of the anisotropic feature samples were performed using a polarizer. The method is characterized in that polarized light measurement is introduced into a traditional near-infrared Fourier transform spectrometer, near-infrared light interference, Fourier transform and polarized light measurement technologies are combined, and on the basis that the traditional near-infrared Fourier transform spectrometer acquires spectral information of a measured sample, more optical constants (such as thickness, refractive index, extinction coefficient and the like) of the measured sample can be obtained by measuring polarization parameters of probe light.
2. Because the white light source emits large-aperture and large-view-field detection light, the beam expanding and focusing element has limited clear aperture, and stray light is easy to generate to reduce the contrast of interference fringes. The precise pinhole is added in the light path to limit the size of the light spot, the stray light is filtered out, and the high-contrast interference pattern can be obtained when the detection light is focused on the detector.
Drawings
FIG. 1 is a schematic diagram of a reflective near-infrared Fourier transform spectrometer system;
FIG. 2 is a schematic diagram of a transmission near infrared Fourier transform spectrometer system.
Detailed Description
The invention provides a near-infrared Fourier transform polarization spectrometer. The Fourier transform spectrometer comprises at least one laser, at least one filter plate, at least one chopper, at least two polarizers, at least two compensators, at least three curved surface reflecting elements, at least one plane reflecting element, at least one beam splitter, at least one precise pinhole, at least one focusing lens, at least one infrared detector, at least one four-quadrant detector and at least one phase-locked amplifier. The near infrared Fourier transform spectrometer utilizes Michelson interference, a chopper is added to modulate a light source into high frequency, and a weak signal is amplified through a phase-locked amplifier. The Fourier transform spectrometer of the invention uses infrared spectroscopy to measure the structural and optical properties (n, k or dielectric constant) of anisotropic feature samples.
Specifically, the invention discloses a near-infrared Fourier transform polarization spectrometer, which comprises: the system comprises a laser interference subsystem and a detection unit thereof, and a white light interference subsystem and a detection unit thereof;
the laser interference subsystem and the detection unit thereof: the laser generated by the laser is divided into two paths through the beam splitter, one path is reflected laser, the other path is transmitted laser, the position of the movable mirror is adjusted to change the optical path difference of the two beams, interference patterns of the two laser beams are obtained through the four-quadrant detector, the inclined position information of the movable mirror in the moving process can be obtained, the position information is transmitted to the piezoelectric ceramic sensor, the movable mirror is subjected to real-time motion feedback adjustment, the plane of the movable mirror is kept in a vertical state with the optical axis, and the purpose of better white light interference is achieved.
The white light interference subsystem and the detection unit thereof: the detection light emitted by the white light source is filtered into near-infrared light through the filter, the near-infrared light is modulated into high frequency light through the chopper, then the light reaches the curved surface reflector through the aperture diaphragm to emit parallel light, the polarization state of the parallel light is changed through the first polarizer and the first compensator, and the adjusted polarized light is transmitted and passed through; at this time, the polarized light is split into two paths by the beam splitter, one path is reflected light (reference light), and the other path is transmitted light (probe light). The detection light reaches a sample, interacts with the sample, the spectrum and the polarization state are changed, the reflected light, the transmitted light or the scattered light of the detection light carrying the information of the sample is collected by a subsequent optical system, is expanded by a curved surface reflector and then is converged into one path by a beam splitter and reference light, the position of a movable mirror is adjusted to enable the two paths of light to generate interference, the polarization state of the interference light is adjusted by a second compensator and a second polarizer, the adjusted parallel light is transmitted and passed, the light is converged on a focus by the curved surface reflector, a precise pinhole is arranged at the focused position to limit the size of a light spot of a light source, the contrast of interference fringes is improved, and the purpose of continuously adjusting the light spot can be achieved; the light is then focused by a focusing assembly, at which position a detector is placed; the output interface of the detector is connected with the input signal interface of the phase-locked amplifier, and the frequency output interface of the chopper is connected with the reference signal interface of the phase-locked amplifier. At the moment, the input signal is modulated by the chopper and has the same frequency as the reference signal, so that low-frequency noise can be greatly suppressed through the phase-locked amplifier, and the detection signal-to-noise ratio is improved. The phase-locked amplifier demodulates the obtained signal to obtain a white light interference pattern, the white light interference pattern is subjected to inverse Fourier transform calculation to obtain a near infrared spectrum, and the structure and the optical properties (n, k or dielectric constant) of the anisotropic characteristic sample are calculated and obtained.
Optionally, the laser in the laser interference subsystem may be a helium-neon laser, a carbon dioxide laser, a solid laser, a semiconductor laser, or the like.
Optionally, the laser detector in the laser interference subsystem may be a four-quadrant detector, a CCD detector, or the like, which can reflect the change of the center position of the light spot.
Alternatively, the beam splitter may be a dielectric film beam splitter, a metal film beam splitter, a cube beam splitter, a flat plate beam splitter, or the like, which can split one beam of light into two beams of light perpendicular to each other.
Optionally, the light source in the white light interference subsystem may be a light source with a near infrared portion in a waveband, such as a tungsten lamp, a halogen lamp, a laser-driven white light source, and the like.
Optionally, the curved surface reflector in the white light interference subsystem may be an off-axis parabolic mirror, a toroidal mirror, or the like.
Optionally, the focusing component in the white light interference subsystem may be a single lens or a lens group, or a single curved mirror or a curved mirror group, etc.
Optionally, the polarizer in the white light interference subsystem may be a wollaston prism polarizer, a rochon prism polarizer, a glantylor prism polarizer, a glan laser polarizer, a glan thompson prism polarizer, a thin film polarizer, or the like, which can change light into linearly polarized light.
Optionally, the compensator in the white light interference subsystem may be a wave plate, a photoelastic phase compensation element, or the like that can change the polarization state of light.
Optionally, the detector in the white light interference subsystem may be a PbSe detector, a Ge detector, an InSb detector, an InGaAs detector, or the like.
Alternatively, the angle of incidence on the sample may be from 0 to 180 degrees.
In order that the objects, technical solutions and advantages of the present invention will become more apparent, the present invention will be further described in detail with reference to the accompanying drawings in conjunction with the following specific embodiments.
FIG. 1 is a schematic diagram of a reflective near-infrared Fourier transform polarization spectrometer system. Which comprises the following steps: the system comprises a laser interference subsystem and a detection unit thereof, and a white light interference subsystem and a detection unit thereof.
The laser interference subsystem and the detection unit thereof comprise a laser, a plane reflector (movable mirror), a second off-axis parabolic mirror, a beam splitter, a piezoelectric ceramic sensor and a four-quadrant detector, wherein:
firstly, laser generated by a laser is divided into two paths through a beam splitter, one path is reflected laser, the other path is transmitted laser, the reflected laser is reflected by a movable mirror and returns to the beam splitter, the transmitted light is reflected by a second off-axis paraboloid mirror and focused on a sample, and then is reflected by the surface of the sample and returns to the beam splitter along the original path, the two paths of light are converged into one path of light by the beam splitter, the position of the movable mirror is adjusted to change the optical path difference of the two beams, an interference pattern of the two laser beams is obtained through a four-quadrant detector, the inclined position information of the movable mirror in the moving process is obtained, and the position information is transmitted to a piezoelectric ceramic sensor, so that the movable mirror is subjected to real-time motion feedback adjustment, the plane of the movable mirror is kept in a vertical state with the optical axis, and the aim of better white light interference is achieved.
The white light interference subsystem and the detection unit thereof comprise a white light source, a light filter, a chopper, a first off-axis parabolic mirror, a first polarizer, a first compensator (wave plate), a plane mirror (movable mirror), a second off-axis parabolic mirror, a beam splitter, a second compensator, a second polarizer, a third off-axis parabolic mirror, a precise pinhole, a biconvex lens, an InGaAs detector and a lock-in amplifier, wherein:
firstly, probe light emitted by a white light source is filtered into near-infrared light through a filter, the near-infrared light is modulated into high frequency light through a chopper, then the light reaches a first off-axis parabolic mirror through an aperture diaphragm to emit parallel light, the polarization state of the parallel light is changed through a first polarizer and a first compensator, and the adjusted polarized light is transmitted and passed through; at the moment, polarized light is divided into two paths through a beam splitter, one path is reflected light, the other path is transmitted light, the reflected light is reflected by a movable mirror and returns to the beam splitter, the transmitted light is reflected and focused on a sample through a second off-axis paraboloid mirror, after the transmitted light interacts with the sample, the spectrum and the polarization state of the detection light are changed, the light carrying sample information returns to the beam splitter along the original path, the two paths of light are converged into one path of light by the beam splitter, and the position of the movable mirror is adjusted to enable the two paths of light to interfere; the polarization state of the interference light is adjusted through a second compensator and a second polarizer, the adjusted parallel light is transmitted and passes through, then the light is focused on a focus by using a third off-axis parabolic mirror, and a precise pinhole is placed at the focused position; then the light is focused through a biconvex lens, and an InGaAs detector is arranged at the position; the output interface of the InGaAs detector is connected with the input signal interface of the phase-locked amplifier, and the frequency output interface of the chopper is connected with the reference signal interface of the phase-locked amplifier. At the moment, the input signal is modulated by the chopper and has the same frequency as the reference signal, so that low-frequency noise can be greatly suppressed through the phase-locked amplifier, and the detection signal-to-noise ratio is improved. The phase-locked amplifier demodulates the obtained signal to obtain a white light interference pattern, the white light interference pattern is subjected to inverse Fourier transform calculation to obtain a near infrared spectrum, and the structure and the optical properties (n, k or dielectric constant) of the anisotropic characteristic sample are calculated and obtained.
The second embodiment:
fig. 2 is a schematic diagram of a transmission type near infrared fourier transform spectrometer system. Which comprises the following steps: the system comprises a laser interference subsystem and a detection unit thereof, and a white light interference subsystem and a detection unit thereof.
The laser interference subsystem and the detection unit thereof comprise a laser, a first beam splitter, a second off-axis parabolic mirror, a third off-axis parabolic mirror, a second beam splitter, a plane reflector (movable mirror), a piezoelectric ceramic sensor and a four-quadrant detector, wherein:
firstly, laser generated by a laser is divided into two paths through a beam splitter, wherein one path of transmitted light directly transmits a second beam splitter through a second off-axis parabolic mirror and a third off-axis parabolic mirror, the other path of reflected light is reflected on the plane of a movable mirror through the second beam splitter and then passes through the second beam splitter after being reflected, the two paths of light are converged into one path of light, the position of the movable mirror is adjusted to change the optical path difference of the two beams of light, interference patterns of the two laser beams are obtained through a four-quadrant detector, the inclined position information of the movable mirror in the moving process is obtained, the position information is transmitted to a piezoelectric ceramic sensor, and therefore real-time motion feedback adjustment is carried out on the movable mirror, the plane of the movable mirror is kept in a vertical state with the optical axis, and the purpose of better white light interference is achieved.
The white light interference subsystem and the detection unit thereof comprise a white light source, a light filter, a chopper, a first off-axis parabolic mirror, a first polarizer, a first compensator (wave plate), a first beam splitter, a second off-axis parabolic mirror, a third off-axis parabolic mirror, a second beam splitter, a plane mirror (movable mirror), a second compensator, a second polarizer, a fourth off-axis parabolic mirror, a precise pinhole, a double convex lens, an InGaAs detector and a phase-locked amplifier, wherein:
firstly, probe light emitted by a white light source is filtered into near-infrared light through a filter, the near-infrared light is modulated into high frequency light through a chopper, then the light reaches a first off-axis parabolic mirror through an aperture diaphragm to emit parallel light, the polarization state of the parallel light is changed through a first polarizer and a first compensator, and the adjusted polarized light is transmitted and passed through; one path of transmission light directly transmits the second beam splitter through the second off-axis parabolic mirror, the sample and the third off-axis parabolic mirror, and the spectrum and the polarization state of the detection light are changed after the transmission light interacts with the sample. The other path of reflected light is reflected by the second beam splitter on the plane of the movable mirror and then reflected by the second beam splitter, the two paths of light are converged into one path of light, and the position of the movable mirror is adjusted to enable the two paths of light to generate interference; the polarization state of the interference light is adjusted through a second compensator and a second polarizer, the adjusted parallel light is transmitted and passes through, then the light is focused on a focus by utilizing a fourth off-axis parabolic mirror, and a precise pinhole is placed at the focused position; then the light is focused through a biconvex lens, and an InGaAs detector is arranged at the position; the output interface of the InGaAs detector is connected with the input signal interface of the phase-locked amplifier, the frequency output interface of the chopper is connected with the reference signal interface of the phase-locked amplifier, and at the moment, the input signal is modulated by the chopper and has the same frequency with the reference signal, so that low-frequency noise can be greatly inhibited by the phase-locked amplifier, and the detection signal-to-noise ratio is improved. The phase-locked amplifier demodulates the obtained signal to obtain a white light interference pattern, the white light interference pattern is subjected to inverse Fourier transform calculation to obtain a near infrared spectrum, and the structure and the optical properties (n, k or dielectric constant) of the anisotropic characteristic sample are calculated and obtained.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are only exemplary embodiments of the present invention and are not intended to limit the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
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| CN116008189A (en) * | 2022-12-05 | 2023-04-25 | 中北大学 | An ultra-broadband spectral ellipsometric structure based on Fourier spectroscopy and grating spectroscopy |
| CN120253760A (en) * | 2025-06-06 | 2025-07-04 | 华侨大学 | Solution concentration measuring instrument and method based on white light interference and compensation plate rotation method |
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| 陈华;陆亦怀;高闽光;魏秀丽;徐亮;张天舒;王君;: "基于单片机的高精度迈克尔逊干涉仪动镜调速系统设计", 大气与环境光学学报, no. 05, pages 366 - 369 * |
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| CN114754541A (en) * | 2022-04-27 | 2022-07-15 | Tcl家用电器（合肥）有限公司 | Freshness retaining container, refrigerator and freshness retaining method |
| CN116008189A (en) * | 2022-12-05 | 2023-04-25 | 中北大学 | An ultra-broadband spectral ellipsometric structure based on Fourier spectroscopy and grating spectroscopy |
| CN120253760A (en) * | 2025-06-06 | 2025-07-04 | 华侨大学 | Solution concentration measuring instrument and method based on white light interference and compensation plate rotation method |
| CN120253760B (en) * | 2025-06-06 | 2025-08-29 | 华侨大学 | Solution concentration measuring instrument and method based on white light interference and compensation plate rotation method |
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