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CN113713975B - A four-electrode electrostatic spray printing device and film preparation method - Google Patents

A four-electrode electrostatic spray printing device and film preparation method Download PDF

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CN113713975B
CN113713975B CN202110866502.2A CN202110866502A CN113713975B CN 113713975 B CN113713975 B CN 113713975B CN 202110866502 A CN202110866502 A CN 202110866502A CN 113713975 B CN113713975 B CN 113713975B
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electrode
printing device
needle
electrostatic spray
syringe
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CN113713975A (en
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常凯
于博洋
赵新彦
邓巍巍
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Southern University of Science and Technology
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B5/00Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
    • B05B5/025Discharge apparatus, e.g. electrostatic spray guns
    • B05B5/053Arrangements for supplying power, e.g. charging power
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B5/00Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
    • B05B5/025Discharge apparatus, e.g. electrostatic spray guns
    • B05B5/053Arrangements for supplying power, e.g. charging power
    • B05B5/0533Electrodes specially adapted therefor; Arrangements of electrodes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00Processes for applying liquids or other fluent materials
    • B05D1/02Processes for applying liquids or other fluent materials performed by spraying
    • B05D1/04Processes for applying liquids or other fluent materials performed by spraying involving the use of an electrostatic field

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Abstract

本发明公开一种四电极静电喷雾打印装置及薄膜制备方法,其中,打印装置包括主动供液系统、外加高压系统以及三维移动平台,所述外加高压系统包括高压电源以及与所述高压电源电连接的四电极结构,四电极结构包括固定架,设置在固定架中间的针头,以及设置在固定架四端的四个电极柱;主动供液系统包括与针头连通的注射器,以及与注射器连通的注射泵。本发明基于所述打印装置,通过外加电场的干扰对雾斑的形状进行调控,将圆形的雾斑压缩为长条形的雾斑,增大了单位面积内的液滴密度,减小由于库仑力造成的液滴分散而形成的孔洞,能够优化薄膜形貌,通过这种方法制备的光电薄膜能有效提高光电器件性能。

Figure 202110866502

The invention discloses a four-electrode electrostatic spray printing device and a film preparation method, wherein the printing device includes an active liquid supply system, an externally applied high-voltage system and a three-dimensional mobile platform, and the externally applied high-voltage system includes a high-voltage power supply and is electrically connected to the high-voltage power supply The four-electrode structure includes a fixed frame, a needle set in the middle of the fixed frame, and four electrode columns set at four ends of the fixed frame; the active liquid supply system includes a syringe connected with the needle and a syringe pump connected with the syringe . Based on the printing device, the invention regulates the shape of the fog spot through the interference of the external electric field, compresses the circular fog spot into a long fog spot, increases the droplet density per unit area, and reduces the The pores formed by the dispersion of droplets caused by Coulomb force can optimize the morphology of the film, and the photovoltaic thin film prepared by this method can effectively improve the performance of photovoltaic devices.

Figure 202110866502

Description

一种四电极静电喷雾打印装置及薄膜制备方法A four-electrode electrostatic spray printing device and film preparation method

技术领域technical field

本发明涉及光电器件技术领域,尤其涉及一种四电极静电喷雾打印装置及薄膜制备方法。The invention relates to the technical field of optoelectronic devices, in particular to a four-electrode electrostatic spray printing device and a film preparation method.

背景技术Background technique

为了适应工业化生产需要,开发适合连续制备大面积光电功能薄膜的生产工艺是光电器件领域的关键挑战之一。其中,喷涂技术作为基于液滴的非接触方法,因为其具有实现共形沉积的潜力,对基底曲率和粗糙度的兼容性好,引起越来越多的关注。In order to meet the needs of industrial production, it is one of the key challenges in the field of optoelectronic devices to develop a production process suitable for the continuous preparation of large-area optoelectronic functional thin films. Among them, spraying technology, as a droplet-based non-contact method, has attracted increasing attention due to its potential to achieve conformal deposition and good compatibility with substrate curvature and roughness.

喷涂方法生产高性能光电器件功能薄膜所面临的最具挑战性的问题是咖啡环效应和针头缺陷。对于静电喷雾法,在外加电场的作用下液滴由于库伦力而相互排斥,这导致沉积到基底上的液滴之间间距较大,而在液滴连接形成薄膜的过程中,由于液滴蒸发时间较短,难以等待到新的液滴落到其附近,因此薄膜中存在很多的针头缺陷,这是目前静电喷雾法制备高质量光电器件面临的主要难题之一。The most challenging problems faced by spray-coating methods to produce functional thin films for high-performance optoelectronic devices are the coffee ring effect and pinhead defects. For the electrostatic spray method, the droplets repel each other due to the Coulomb force under the action of an applied electric field, which leads to a large distance between the droplets deposited on the substrate, and during the process of droplet connection to form a thin film, due to the droplet evaporation The time is short, and it is difficult to wait for new droplets to fall near it, so there are many pinhead defects in the film, which is one of the main difficulties in the preparation of high-quality optoelectronic devices by the electrostatic spray method.

因此,现有技术还有待改进和发展。Therefore, the existing technology still needs to be improved and developed.

发明内容SUMMARY OF THE INVENTION

鉴于上述现有技术的不足,本发明的目的在于提供一种四电极静电喷雾打印装置及薄膜制备方法,旨在解决现有静电喷雾法制备薄膜过程中存在针头缺陷以及咖啡环效应的问题。In view of the above-mentioned deficiencies of the prior art, the purpose of the present invention is to provide a four-electrode electrostatic spray printing device and a film preparation method, aiming to solve the problems of needle defects and coffee ring effect in the process of preparing the film by the existing electrostatic spray method.

本发明为了实现上述目的,采用了以下方案:In order to achieve the above object, the present invention adopts the following scheme:

一种四电极静电喷雾打印装置,其中,包括主动供液系统、外加高压系统以及三维移动平台,所述外加高压系统包括高压电源以及与所述高压电源电连接的四电极结构,所述四电极结构包括固定架,设置在所述十字型固定架中间的针头,以及设置在所述固定架四端的四个电极柱;所述主动供液系统包括与所述针头连通的注射器,以及与所述注射器连通的注射泵;所述三维移动平台用于使针头和放置制备薄膜的基板之间产生相对运动。A four-electrode electrostatic spray printing device, which includes an active liquid supply system, an external high-voltage system and a three-dimensional moving platform, the external high-voltage system includes a high-voltage power supply and a four-electrode structure electrically connected to the high-voltage power supply, the four-electrode The structure includes a fixing frame, a needle arranged in the middle of the cross-shaped fixing frame, and four electrode columns arranged at four ends of the fixing frame; the active liquid supply system includes a syringe connected with the needle, and a syringe connected with the needle. A syringe pump connected with a syringe; the three-dimensional moving platform is used to generate relative motion between the needle and the substrate on which the thin film is placed.

所述的四电极静电喷雾打印装置,其中,所述固定架为十字型固定架。In the four-electrode electrostatic spray printing device, the fixing frame is a cross-shaped fixing frame.

所述的四电极静电喷雾打印装置,其中,所述十字型固定架包括相互垂直的第一支架和第二支架,所述针头设置在所述第一支架和第二支架的垂直交叉部位,所述第一支架上设置有以所述垂直交叉部位为对称点两个第一电极,所述第二支架上设置有以所述垂直交叉部位为对称点的两个第二电极。The four-electrode electrostatic spray printing device, wherein the cross-shaped fixing frame includes a first frame and a second frame that are perpendicular to each other, and the needle head is arranged at the vertical intersection of the first frame and the second frame, so The first support is provided with two first electrodes with the vertical intersection as a symmetrical point, and the second support is provided with two second electrodes with the vertical intersection as a symmetrical point.

所述的四电极静电喷雾打印装置,其中,所述两个第一电极与所述针头的水平距离为5-30mm;所述两个第二电极与所述针头的水平距离为5-30mm。In the four-electrode electrostatic spray printing device, the horizontal distance between the two first electrodes and the needle is 5-30 mm; the horizontal distance between the two second electrodes and the needle is 5-30 mm.

所述的四电极静电喷雾打印装置,其中,所述高压电源的高压接线连接所述两个第一电极,所述高压电源的两根接地接线分别连接基板和两个第二电极上。In the four-electrode electrostatic spray printing device, the high-voltage wiring of the high-voltage power supply is connected to the two first electrodes, and the two ground wirings of the high-voltage power supply are respectively connected to the substrate and the two second electrodes.

所述的四电极静电喷雾打印装置,其中,所述第一电极和所述第二电极均为圆柱状。In the four-electrode electrostatic spray printing device, the first electrode and the second electrode are both cylindrical.

所述的四电极静电喷雾打印装置,其中,所述三维移动平台包括用于固定注射泵且可在Z轴方向移动的固定柱,以及位于所述针头下方的可在X轴和Y轴方向移动的基板。The four-electrode electrostatic spray printing device, wherein the three-dimensional mobile platform includes a fixed column for fixing the syringe pump and movable in the Z-axis direction, and a fixed column located under the needle that can move in the X-axis and Y-axis directions substrate.

一种四电极静电喷雾打印装置的薄膜制备方法,其中,包括步骤:A method for preparing a film of a four-electrode electrostatic spray printing device, comprising the steps of:

将配置好的打印溶液存储于注射器中,并将所述注射器与针头进行连通;storing the configured printing solution in a syringe, and connecting the syringe with the needle;

将注射泵设定流量并打开所述注射泵,通过所述注射泵将所述注射器中的打印溶液推出;Set the flow rate of the syringe pump and turn on the syringe pump, and push out the printing solution in the syringe through the syringe pump;

开启高压电源,升高电压直至观察到针头下方出现长条形雾斑;Turn on the high-voltage power supply and increase the voltage until a long fog spot is observed under the needle;

将基片放置在基板上,设置所述基板的移动速度,使所述三维移动平台按预定路线运动,完成薄膜打印。The substrate is placed on the substrate, the moving speed of the substrate is set, and the three-dimensional moving platform is moved according to a predetermined route to complete the film printing.

所述基于四电极静电喷雾打印装置的薄膜制备方法,其中,所述基板的移动速度为0.01mm/s-10mm/s。In the method for preparing a thin film based on a four-electrode electrostatic spray printing device, the moving speed of the substrate is 0.01 mm/s-10 mm/s.

所述基于四电极静电喷雾打印装置的薄膜制备方法,其中,所述长条形雾斑的长宽比为2:1-10:1。In the method for preparing a thin film based on a four-electrode electrostatic spray printing device, the aspect ratio of the elongated fog spot is 2:1-10:1.

有益效果:与现有技术相比,本发明提供的基于四电极静电喷雾装置的薄膜制备方法,通过所述外加高压系统在针头的附近外加电场约束带电液滴的飞行轨迹,将圆形雾斑压缩为长条形雾斑,雾斑的长宽比由1:1增大到8:1甚至更大。在长宽比较大的雾斑下,液滴之间的平均间距减小,在液滴相同蒸发时间的条件下由于液滴的密度大大增加,这导致液滴之间的融合概率提高,从而减少了薄膜的针头缺陷。同时通过调控基板运动路径,可以控制沉积薄膜的厚度和质量,与普通静电喷雾相比,有效提高光电器件性能。Beneficial effects: Compared with the prior art, the film preparation method based on the four-electrode electrostatic spray device provided by the present invention constrains the flight trajectory of the charged droplets by applying an electric field near the needle by the externally applied high-voltage system, and the circular fog spot is formed. It is compressed into a long strip of fog, and the aspect ratio of the fog is increased from 1:1 to 8:1 or even larger. Under the fog spot with large aspect ratio, the average spacing between droplets decreases. Under the condition of the same evaporation time of droplets, the density of droplets increases greatly, which leads to an increase in the probability of fusion between droplets, thereby reducing the needle defect of the film. At the same time, by regulating the movement path of the substrate, the thickness and quality of the deposited film can be controlled, which can effectively improve the performance of optoelectronic devices compared with ordinary electrostatic spraying.

附图说明Description of drawings

图1是本发明提供的一种四电极静电喷雾打印装置的结构示意图。FIG. 1 is a schematic structural diagram of a four-electrode electrostatic spray printing device provided by the present invention.

图2为图1四电极静电喷雾打印装置中四电极结构的放大示意图。FIG. 2 is an enlarged schematic diagram of a four-electrode structure in the four-electrode electrostatic spray printing device of FIG. 1 .

图3为本发明一种基于四电极静电喷雾打印装置的薄膜制备方法的流程图。FIG. 3 is a flow chart of a method for preparing a thin film based on a four-electrode electrostatic spray printing device of the present invention.

图4为实施例1-3中采用本发明制备有机太阳能电池器件的结构和所使用的有机光电材料分子结构式。FIG. 4 shows the structure of the organic solar cell device prepared by the present invention and the molecular structure formula of the organic optoelectronic material used in Examples 1-3.

图5为ES(普通静电喷雾)和QES(四电极静电喷雾)打印的雾斑形状和薄膜形貌对比图。Figure 5 is a comparison chart of the fog spot shape and film morphology printed by ES (ordinary electrostatic spray) and QES (four-electrode electrostatic spray).

图6为实施例1中ITO基底上ES和QES制备活性层器件的电流-电压曲线。FIG. 6 is the current-voltage curve of the active layer device prepared by ES and QES on the ITO substrate in Example 1. FIG.

图7为实施例2中PET柔性基底上ES和QES制备活性层器件的电流-电压曲线。7 is the current-voltage curve of the active layer device prepared by ES and QES on the PET flexible substrate in Example 2. FIG.

图8为实施例3中分别用ES或者QES同时制备活性层和界面层的器件的电流-电压曲线。FIG. 8 is the current-voltage curve of the device in Example 3 in which the active layer and the interface layer are simultaneously prepared with ES or QES, respectively.

具体实施方式Detailed ways

为了使本发明的目的、技术方案及优点更加清楚明白,以下结合附图及实施例,对本发明进行进一步详细说明。应当理解,此处所描述的具体实施例仅仅用以解释本发明,并不用于限定本发明。In order to make the objectives, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention, but not to limit the present invention.

请参照图1和图2,本发明提供了一种四电极静电喷雾打印装置,如图所示,其包括主动供液系统、外加高压系统以及三维移动平台,所述外加高压系统包括高压电源以及与所述高压电源电连接的四电极结构10,所述四电极结构10包括十字型固定架11,设置在所述十字型固定架中间的针头12,以及设置在所述十字型固定架11四端的四个电极柱13;所述主动供液系统包括与所述针头12连通的注射器21,以及与所述注射器21连通的注射泵22;所述三维移动平台包括用于固定注射泵22且可在Z轴方向移动的固定柱31,以及位于所述针头12下方的可在X轴和Y轴方向移动的基板32。Please refer to FIG. 1 and FIG. 2 , the present invention provides a four-electrode electrostatic spray printing device. As shown in the figures, it includes an active liquid supply system, an external high-voltage system and a three-dimensional moving platform. The external high-voltage system includes a high-voltage power supply and a three-dimensional moving platform. A four-electrode structure 10 electrically connected to the high-voltage power supply, the four-electrode structure 10 includes a cross-shaped fixing frame 11 , a needle 12 arranged in the middle of the cross-shaped fixing frame, and four electrodes arranged in the cross-shaped fixing frame 11 . The four electrode columns 13 at the end; the active liquid supply system includes a syringe 21 communicated with the needle 12, and a syringe pump 22 communicated with the syringe 21; the three-dimensional mobile platform includes a syringe pump 22 for fixing and can A fixed column 31 that moves in the Z-axis direction, and a base plate 32 that is positioned below the needle 12 and can move in the X-axis and Y-axis directions.

本实施例中,如图2所示,所述十字型固定架11包括相互垂直的第一支架111和第二支架112,所述针头12设置在所述第一支架111和第二支架112的垂直交叉部位113,所述第一支架111上设置有以所述垂直交叉部位113为对称点两个第一电极131,所述第二支架112上设置有以所述垂直交叉部位113为对称点的两个第二电极132。本实施例中,所述垂直交叉部位113上还设置有插孔114,所述插孔114用于安装所述注射器21,从而使得所述注射器21与所述针头12连通。In this embodiment, as shown in FIG. 2 , the cross-shaped fixing frame 11 includes a first frame 111 and a second frame 112 that are perpendicular to each other, and the needle 12 is disposed between the first frame 111 and the second frame 112 . The vertical intersection portion 113, the first support 111 is provided with two first electrodes 131 with the vertical intersection portion 113 as the symmetrical point, and the second support 112 is provided with the vertical intersection portion 113 as the symmetrical point of the two second electrodes 132 . In this embodiment, an insertion hole 114 is further provided on the vertical intersection part 113 , and the insertion hole 114 is used to install the syringe 21 , so that the syringe 21 is communicated with the needle 12 .

在本实施例中,通过开启高压电源,通过设置在所述十字型固定架11四端的四个电极柱在所述针头的附近产生电场,从而可约束从针头流出的带电液滴的飞行轨迹,将圆形雾斑压缩为长条形雾斑,雾斑的长宽比由1:1增大到8:1甚至更大。在长宽比较大的雾斑下,液滴之间的平均间距减小,在液滴相同蒸发时间的条件下由于液滴的密度大大增加,这导致液滴之间的融合概率提高,从而减少了薄膜的针头缺陷。同时通过调控基板运动路径,可以控制沉积薄膜的厚度和质量,与普通静电喷雾相比,有效提高光电器件性能。In this embodiment, by turning on the high-voltage power supply, the four electrode columns arranged at the four ends of the cross-shaped fixing frame 11 generate an electric field near the needle, so as to constrain the flying trajectory of the charged droplets flowing out from the needle, The circular fog spot is compressed into a long strip, and the aspect ratio of the fog spot is increased from 1:1 to 8:1 or even larger. Under the fog spot with large aspect ratio, the average spacing between droplets decreases. Under the condition of the same evaporation time of droplets, the density of droplets increases greatly, which leads to an increase in the probability of fusion between droplets, thereby reducing the needle defect of the film. At the same time, by regulating the movement path of the substrate, the thickness and quality of the deposited film can be controlled, which can effectively improve the performance of optoelectronic devices compared with ordinary electrostatic spraying.

在一些实施方式中,所述两个第一电极与所述针头的水平距离为5-30mm;所述两个第二电极与所述针头的水平距离为5-30mm。作为举例,所述两个第一电极与所述针头的水平距离均为20mm,所述两个第二电极与所述针头的水平距离也均为20mm。如图2所示,所述高压电源的高压接线连接所述两个第一电极,所述高压电源的两根接地接线分别连接基板和两个第二电极上。具体来讲,所述高压电源的高压接线为一根火线,连接在所述两个第一电极上,预先通过金属导线连接,因此在接火线时,只需要连接其中一个电极即可;所述高压电源接地地线为两根,一根用来连接基板(可移动三维平台),另一根用来连接两个第二电极;改变雾斑长宽比原理:静电喷雾产生的液滴带正电,在电场作用下被基板(接地)吸引收集,而四电极装置下,一对连接正高压的第一电极起到压缩电场的作用,约束液滴的飞行轨迹,而另一对接地的第二电极,起到拉伸电场的作用,吸引液滴,横向压缩,纵向拉伸,所以雾斑的形状由圆形转变为椭圆形。In some embodiments, the horizontal distance between the two first electrodes and the needle is 5-30 mm; the horizontal distance between the two second electrodes and the needle is 5-30 mm. As an example, the horizontal distance between the two first electrodes and the needle is 20 mm, and the horizontal distance between the two second electrodes and the needle is also 20 mm. As shown in FIG. 2 , the high-voltage wires of the high-voltage power source are connected to the two first electrodes, and the two ground wires of the high-voltage power source are respectively connected to the substrate and the two second electrodes. Specifically, the high-voltage wiring of the high-voltage power supply is a live wire, which is connected to the two first electrodes and connected by metal wires in advance. Therefore, when connecting the live wire, only one of the electrodes needs to be connected; the There are two ground wires for the high-voltage power supply, one is used to connect the substrate (movable three-dimensional platform), and the other is used to connect the two second electrodes; the principle of changing the aspect ratio of the fog spot: the droplets generated by the electrostatic spray are positive Electricity is attracted and collected by the substrate (grounded) under the action of the electric field, while in the four-electrode device, a pair of first electrodes connected to a positive high voltage act as a compressed electric field to constrain the flight trajectory of the droplet, while the other pair of grounded first electrodes act as a compressive electric field. The two electrodes play the role of a tensile electric field, attracting droplets, compressing laterally, and stretching vertically, so the shape of the fog spot changes from a circle to an ellipse.

在一些实施方式中,所述第一电极和所述第二电极均为圆柱状,且所述第一电极和第二电极均为金属电极。In some embodiments, both the first electrode and the second electrode are cylindrical, and both the first electrode and the second electrode are metal electrodes.

在一些实施方式中,还提供一种基于四电极静电喷雾打印装置的薄膜制备方法,如图3所示,包括步骤:In some embodiments, a method for preparing a thin film based on a four-electrode electrostatic spray printing device is also provided, as shown in FIG. 3 , comprising the steps of:

S10、将配置好的打印溶液存储于注射器中,并将所述注射器与针头进行连通;S10, storing the configured printing solution in a syringe, and connecting the syringe with the needle;

S20、将注射泵设定流量并打开所述注射泵,通过所述注射泵将所述注射器中的打印溶液推出;S20, setting the flow rate of the syringe pump and turning on the syringe pump, and pushing out the printing solution in the syringe through the syringe pump;

S30、开启高压电源,升高电压直至观察到针头下方出现长条形雾斑;S30. Turn on the high-voltage power supply, and increase the voltage until a long-shaped fog spot is observed under the needle;

S40、将基片放置在基板上,设置所述基板的移动速度,使所述三维移动平台按预定路线运动,完成薄膜打印。S40 , placing the substrate on the substrate, setting the moving speed of the substrate, and making the three-dimensional moving platform move according to a predetermined route to complete the film printing.

本实施例通过设置在所述十字型固定架四端的四个电极柱在所述针头的附近产生电场,从而可约束从针头流出的带电液滴的飞行轨迹,将圆形雾斑压缩为长条形雾斑,雾斑的长宽比由1:1增大到8:1甚至更大。在长宽比较大的雾斑下,液滴之间的平均间距减小,在液滴相同蒸发时间的条件下由于液滴的密度大大增加,这导致液滴之间的融合概率提高,从而减少了薄膜的针头缺陷。同时通过调控基板运动路径,可以控制沉积薄膜的厚度和质量,与普通静电喷雾相比,有效提高光电器件性能。In this embodiment, an electric field is generated near the needle through the four electrode columns arranged at the four ends of the cross-shaped fixing frame, so that the flying trajectory of the charged droplets flowing out from the needle can be restrained, and the circular fog spot can be compressed into a long strip Shape fog spot, the aspect ratio of fog spot increases from 1:1 to 8:1 or even larger. Under the fog spot with large aspect ratio, the average spacing between droplets decreases. Under the condition of the same evaporation time of droplets, the density of droplets increases greatly, which leads to an increase in the probability of fusion between droplets, thereby reducing the needle defect of the film. At the same time, by regulating the movement path of the substrate, the thickness and quality of the deposited film can be controlled, which can effectively improve the performance of optoelectronic devices compared with ordinary electrostatic spraying.

在一些实施方式中,所述基板的移动速度为0.01mm/s-10mm/s,但不限于此。In some embodiments, the moving speed of the substrate is 0.01 mm/s-10 mm/s, but not limited thereto.

在一些实施方式中,所述长条形雾斑的长宽比为2:1-10:1,但不限于此。作为举例,所述长条形雾斑的长宽比可以为2:1、4:1、6:1、7:1、8:1、10:1等。In some embodiments, the aspect ratio of the long-shaped fog spot is 2:1-10:1, but not limited thereto. As an example, the aspect ratio of the long-shaped fog spot may be 2:1, 4:1, 6:1, 7:1, 8:1, 10:1, and the like.

在一些实施方式中,所述高压电源的电压为0-10kV,但不限于此。In some embodiments, the voltage of the high-voltage power supply is 0-10 kV, but not limited thereto.

下面通过具体实施例对本发明一种基于四电极静电喷雾打印装置的薄膜制备方法做进一步的解释说明:A film preparation method based on a four-electrode electrostatic spray printing device of the present invention will be further explained below through specific examples:

实施例1Example 1

在清洗干净的ITO玻璃衬底上制备有机光电薄膜,ITO玻璃衬底依次被洗涤剂、去离子水、丙酮、异丙醇超声清洗15分钟,然后在80℃下烘干至少1小时,接着plasma处理1min。在室温下对PEDOT:PSS进行旋涂,旋涂参数为3000rpm 30s。随后基片放在热板上150℃退火15分钟。接着将基片放入手套箱中对有机光电溶液进行喷雾。有机光电材料溶液由电子给体材料与电子受体材溶于氯仿和氯苯(体积比7:3)混合溶剂制备而成,其中电子给体材料为PM6,电子受体材料为N3或Y6BO,给体和受体材料的分子式如图4所示。使用的有机光电材料溶液浓度:2.2mg/ml;基板移动速度为0.2mm/s,注射泵的流量设置为:20μL/min。为了和普通的静电喷雾装置制备薄膜效果进行对比,分别用普通静电喷雾(ES)和基于四电极静电喷雾装置(QES)制备了两种薄膜,并用白光干涉仪(厂家Zeta)进行光学形貌观察。如图5所示,其中ES的雾斑为圆形雾斑,而QES的雾斑为长宽比为8:1的长条形雾斑。雾斑形状的差异影响液滴之间的平均间距以及液滴融合概率,反应在光学形貌图上ES制备的薄膜上存在很多针孔缺陷,而QES制备的薄膜上由于液滴密度较大没有明显的针孔缺陷。Organic photoelectric thin films were prepared on cleaned ITO glass substrates. The ITO glass substrates were ultrasonically cleaned with detergent, deionized water, acetone, and isopropanol for 15 minutes, and then dried at 80 °C for at least 1 hour. Process 1min. PEDOT:PSS was spin-coated at room temperature with a spin-coating parameter of 3000 rpm for 30 s. The substrates were then placed on a hot plate and annealed at 150°C for 15 minutes. The substrate was then placed in a glove box to spray the organic optoelectronic solution. The organic optoelectronic material solution is prepared by dissolving the electron donor material and the electron acceptor material in a mixed solvent of chloroform and chlorobenzene (volume ratio 7:3), wherein the electron donor material is PM6, and the electron acceptor material is N3 or Y6BO, The molecular formulas of the donor and acceptor materials are shown in Figure 4. The concentration of the organic optoelectronic material solution used: 2.2 mg/ml; the moving speed of the substrate is 0.2 mm/s, and the flow rate of the syringe pump is set to: 20 μL/min. In order to compare the effect of the thin films prepared by the common electrostatic spray device, two kinds of thin films were prepared by ordinary electrostatic spray (ES) and four-electrode electrostatic spray device (QES), respectively, and the optical morphology was observed with a white light interferometer (manufacturer Zeta). . As shown in Figure 5, the fog spot of ES is a circular fog spot, while the fog spot of QES is a long-striped fog spot with an aspect ratio of 8:1. The difference in the shape of the fog spot affects the average spacing between droplets and the probability of droplet fusion, which reflects that there are many pinhole defects on the ES-prepared film on the optical topography, while the QES-prepared film has no defects due to the high droplet density. Obvious pinhole defects.

有机光电薄膜喷雾制备完毕后,将基片放在热板上100℃前退火10分钟,前退火完毕后,在有机光电薄膜上旋涂PDINO溶液,浓度为1mg/ml,旋涂参数为3000rpm 30s。然后转移到真空蒸镀仪器中蒸镀Ag电极,蒸镀时真空度6×10-4Pa,Ag纯度为99.99%,蒸镀速率

Figure BDA0003187496570000072
制备好的器件的有效面积(阴极和阳极重叠部分)为0.0425cm2,真空蒸镀的各层厚度是用石英晶振厚度监测仪来进行检测的。测量时是在太阳光模拟器产生的AM1.5G的光照下(100mW/cm2)进行的。电流密度-电压曲线是用Keithley2400进行测量的。器件未进行封装,所有测试均在手套箱内完成的,器件性能测试结果如表1和图6所示。器件性能测试完毕后,对不同器件的外量子效率(EQE)进行测试。After the spray preparation of the organic optoelectronic thin film was completed, the substrate was placed on a hot plate at 100 °C for 10 minutes before annealing. After the pre-annealing, the PDINO solution was spin-coated on the organic optoelectronic thin film with a concentration of 1 mg/ml and a spin coating parameter of 3000 rpm for 30 s. . Then it was transferred to a vacuum evaporation apparatus to evaporate Ag electrodes. During evaporation, the vacuum degree was 6×10 -4 Pa, the Ag purity was 99.99%, and the evaporation rate was 99.99%.
Figure BDA0003187496570000072
The effective area of the prepared device (the overlapping part of the cathode and the anode) was 0.0425 cm 2 , and the thickness of each layer of vacuum evaporation was detected by a quartz crystal thickness monitor. The measurement was performed under the illumination of AM1.5G (100 mW/cm 2 ) generated by a solar simulator. Current density-voltage curves were measured with a Keithley 2400. The device was not packaged, and all tests were completed in a glove box. The device performance test results are shown in Table 1 and Figure 6. After the device performance test is completed, the external quantum efficiency (EQE) of different devices is tested.

上述器件结构为玻璃衬底/ITO/PEDOT:PSS(40nm)/PM6:N3(120nm)/PDINO(10nm)/Ag(100nm)。The above device structure is glass substrate/ITO/PEDOT:PSS(40nm)/PM6:N3(120nm)/PDINO(10nm)/Ag(100nm).

该实施例对比了在相同结构器件中,本发明和普通静电喷雾装置所制备的PM6:N3有机光伏电池的性能差异。相较于ES制备的薄膜,QES制备的薄膜更加致密均匀,在此基础上制备出的有机光伏电池具有更高的光电转换效率。从器件性能表中可以看出,QES制备的器件短路电流密度和填充都有明显的提升,短路电流密度的提升归因于针孔缺陷的减少使得激子复合减少,而填充因子的提高归因于更高的界面接触改善了电荷传输。This example compares the performance difference between the PM6:N3 organic photovoltaic cells prepared by the present invention and a common electrostatic spray device in the same structural device. Compared with the thin film prepared by ES, the thin film prepared by QES is more dense and uniform, and the organic photovoltaic cell prepared on this basis has higher photoelectric conversion efficiency. It can be seen from the device performance table that the short-circuit current density and filling of the QES-prepared devices have significantly improved. The improvement of short-circuit current density is attributed to the reduction of pinhole defects and the reduction of exciton recombination, and the improvement of filling factor is due to Charge transport is improved at higher interfacial contacts.

表1.ITO衬底上ES和QES制备的PM6:N3有机太阳能电池器件性能参数Table 1. Device performance parameters of PM6:N3 organic solar cells fabricated by ES and QES on ITO substrates

Figure BDA0003187496570000071
Figure BDA0003187496570000071

Figure BDA0003187496570000081
Figure BDA0003187496570000081

实施例2Example 2

在清洗干净的柔性基底PET上制备有机光电薄膜,PET衬底依次被洗涤剂、去离子水、丙酮、异丙醇超声清洗15分钟,然后在80℃烘干至少1小时,接着plasma处理1min。在室温下对PH1000进行旋涂,旋涂参数为2000rpm 30s。随后基片放在热板上80℃退火15分钟。随后在PH1000上对PEDOT:PSS进行旋涂,旋涂参数为3000rpm 30s。随后基片放在热板上100℃退火15分钟。接着将基片放入手套箱中对有机光电溶液进行喷雾。有机光电材料溶液由电子给体材料与电子受体材溶于氯仿和氯苯(体积比7:3)混合溶剂制备而成,其中电子给体材料为PM6,电子受体材料为N3或Y6BO,给体和受体材料的分子式如图4所示。使用的有机光电材料溶液浓度:2.2mg/ml;基板移动速度为0.2mm/s,注射泵的流量设置为:20μL/min。有机光电薄膜喷雾制备完毕后,将基片放在热板上100℃前退火10分钟,前退火完毕后,在有机光电薄膜上旋涂PDINO溶液,浓度为1mg/ml,旋涂参数为3000rpm 30s。然后转移到真空蒸镀仪器中蒸镀Ag电极,蒸镀时真空度6×10-4Pa,Ag纯度为99.99%,蒸镀速率

Figure BDA0003187496570000082
制备好的器件的有效面积(阴极和阳极重叠部分)为0.0425cm2,真空蒸镀的各层厚度是用石英晶振厚度监测仪来进行检测的。测量时是在太阳光模拟器产生的AM1.5G的光照下(100mW/cm2)进行的。电流密度-电压曲线是用Keithley2400进行测量的。器件未进行封装,所有测试均在手套箱内完成的,器件性能测试结果如表2和图7所示。Organic optoelectronic films were prepared on the cleaned flexible substrate PET. The PET substrate was ultrasonically cleaned with detergent, deionized water, acetone, and isopropanol for 15 minutes in turn, then dried at 80 °C for at least 1 hour, and then plasma treated for 1 minute. The PH1000 was spin-coated at room temperature with a spin-coating parameter of 2000 rpm for 30 s. The substrates were then placed on a hot plate and annealed at 80°C for 15 minutes. PEDOT:PSS was subsequently spin-coated on PH1000 with spin-coating parameters of 3000 rpm for 30 s. The substrates were then placed on a hot plate and annealed at 100°C for 15 minutes. The substrate was then placed in a glove box to spray the organic optoelectronic solution. The organic optoelectronic material solution is prepared by dissolving the electron donor material and the electron acceptor material in a mixed solvent of chloroform and chlorobenzene (volume ratio 7:3), wherein the electron donor material is PM6, and the electron acceptor material is N3 or Y6BO, The molecular formulas of the donor and acceptor materials are shown in Figure 4. The concentration of the organic optoelectronic material solution used: 2.2 mg/ml; the moving speed of the substrate is 0.2 mm/s, and the flow rate of the syringe pump is set to: 20 μL/min. After the spray preparation of the organic optoelectronic thin film was completed, the substrate was placed on a hot plate at 100 °C for 10 minutes before annealing. After the pre-annealing, the PDINO solution was spin-coated on the organic optoelectronic thin film with a concentration of 1 mg/ml and a spin coating parameter of 3000 rpm for 30 s. . Then it was transferred to a vacuum evaporation apparatus to evaporate Ag electrodes. During evaporation, the vacuum degree was 6×10 -4 Pa, the Ag purity was 99.99%, and the evaporation rate was 99.99%.
Figure BDA0003187496570000082
The effective area of the prepared device (the overlapping part of the cathode and the anode) was 0.0425 cm 2 , and the thickness of each layer of vacuum evaporation was detected by a quartz crystal thickness monitor. The measurement was performed under the illumination of AM1.5G (100 mW/cm 2 ) generated by a solar simulator. Current density-voltage curves were measured with a Keithley 2400. The device was not packaged, and all tests were completed in a glove box. The device performance test results are shown in Table 2 and Figure 7.

上述器件结构为PET/PH1000(80nm)/PEDOT:PSS(40nm)/PM6:N3(120nm)/PDINO(10nm)/Ag(100nm)。The above device structure is PET/PH1000(80nm)/PEDOT:PSS(40nm)/PM6:N3(120nm)/PDINO(10nm)/Ag(100nm).

该实施例对比了在柔性衬底PET上,本发明和普通静电喷雾装置所制备的PM6:N3有机光电薄膜的光电性能的差异。如表2所示通过器件结果可以看出,在柔性衬底PET上QES制备的器件由于活性层形貌的改善引起器件短路密度、填充因子和光电转换效率的提升。This example compares the difference in optoelectronic properties of the PM6:N3 organic optoelectronic thin film prepared by the present invention and an ordinary electrostatic spray device on a flexible substrate PET. As shown in Table 2, it can be seen from the device results that the device prepared by QES on the flexible substrate PET leads to the improvement of the short-circuit density, fill factor and photoelectric conversion efficiency of the device due to the improvement of the morphology of the active layer.

表2.PET衬底上ES和QES制备的PM6:N3有机太阳能电器件性能参数Table 2. Performance parameters of PM6:N3 organic solar electrical devices prepared by ES and QES on PET substrates

Figure BDA0003187496570000091
Figure BDA0003187496570000091

实施例3Example 3

在清洗干净的ITO玻璃衬底上制备有机光电薄膜,ITO玻璃衬底依次被洗涤剂、去离子水、丙酮、异丙醇超声清洗15分钟,然后在80℃下烘干至少1小时,接着plasma处理1min。在室温下对PEDOT:PSS进行旋涂,旋涂参数为3000rpm 30s。随后基片放在热板上150℃退火15分钟。接着将基片放入手套箱中对有机光电溶液进行喷雾。有机光电材料溶液由电子给体材料与电子受体材溶于氯仿和氯苯(体积比7:3)混合溶剂制备而成,其中电子给体材料为PM6,电子受体材料为N3或Y6BO,给体和受体材料的分子式如图4所示。使用的有机光电材料溶液浓度:2.2mg/ml;基板移动速度为0.2mm/s,注射泵的流量设置为:20μL/min。Organic photoelectric thin films were prepared on cleaned ITO glass substrates. The ITO glass substrates were ultrasonically cleaned with detergent, deionized water, acetone, and isopropanol for 15 minutes, and then dried at 80 °C for at least 1 hour. Process 1min. PEDOT:PSS was spin-coated at room temperature with a spin-coating parameter of 3000 rpm for 30 s. The substrates were then placed on a hot plate and annealed at 150°C for 15 minutes. The substrate was then placed in a glove box to spray the organic optoelectronic solution. The organic optoelectronic material solution is prepared by dissolving the electron donor material and the electron acceptor material in a mixed solvent of chloroform and chlorobenzene (volume ratio 7:3), wherein the electron donor material is PM6, and the electron acceptor material is N3 or Y6BO, The molecular formulas of the donor and acceptor materials are shown in Figure 4. The concentration of the organic optoelectronic material solution used: 2.2 mg/ml; the moving speed of the substrate is 0.2 mm/s, and the flow rate of the syringe pump is set to: 20 μL/min.

有机光电薄膜喷雾制备完毕后,将基片放在热板上100℃前退火10分钟,前退火完毕后,在有机光电薄膜上分别用ES和QES装置制备PDINO薄膜,浓度为1mg/ml,针头距离基板距离为2cm,流量为8μL/min,基板移动速度为0.3mm/s。然后转移到真空蒸镀仪器中蒸镀Ag电极,蒸镀时真空度6×10-4Pa,Ag纯度为99.99%,蒸镀速率

Figure BDA0003187496570000093
制备好的器件的有效面积(阴极和阳极重叠部分)为0.0425cm2,真空蒸镀的各层厚度是用石英晶振厚度监测仪来进行检测的。测量时是在太阳光模拟器产生的AM1.5G的光照下(100mW/cm2)进行的。电流密度-电压曲线是用Keithley2400进行测量的。After the spray preparation of the organic optoelectronic thin film was completed, the substrate was placed on a hot plate at 100 °C for 10 minutes before annealing. After the pre-annealing, PDINO thin films were prepared on the organic optoelectronic thin film with ES and QES devices respectively, with a concentration of 1 mg/ml and a needle tip. The distance from the substrate was 2 cm, the flow rate was 8 μL/min, and the substrate moving speed was 0.3 mm/s. Then it was transferred to a vacuum evaporation apparatus to evaporate Ag electrodes. During evaporation, the vacuum degree was 6×10 -4 Pa, the Ag purity was 99.99%, and the evaporation rate was 99.99%.
Figure BDA0003187496570000093
The effective area of the prepared device (the overlapping part of the cathode and the anode) was 0.0425 cm 2 , and the thickness of each layer of vacuum evaporation was detected by a quartz crystal thickness monitor. The measurement was performed under the illumination of AM1.5G (100 mW/cm 2 ) generated by a solar simulator. Current density-voltage curves were measured with a Keithley 2400.

该实施例对比了在ITO衬底上,分别以本发明和普通静电喷雾装置依次制备活性层和界面层有机光电薄膜的光电性能的差异。如表3和图8所示通过器件结果可以看出,QES制备界面层PDINO的器件相较ES器件,在器件光电转换效率上同样有明显的提升。This example compares the difference in optoelectronic properties of the organic optoelectronic thin films of the present invention and the conventional electrostatic spraying device prepared in turn on the ITO substrate for the active layer and the interface layer. As shown in Table 3 and Figure 8, it can be seen from the device results that the device with the interface layer PDINO prepared by QES also has a significant improvement in the photoelectric conversion efficiency of the device compared with the ES device.

表3.ES和QES制备有机太阳能器件PDINO界面层性能参数Table 3. Performance parameters of PDINO interface layer of organic solar devices fabricated by ES and QES

Figure BDA0003187496570000092
Figure BDA0003187496570000092

Figure BDA0003187496570000101
Figure BDA0003187496570000101

通过上述实施例可以证明,本发明中的四电极静电喷雾打印装置适用于制备各种有机光电功能薄膜,通过对比普通静电喷雾制备的薄膜都明显地改善了形貌,从而提升器件性能。The above examples can prove that the four-electrode electrostatic spray printing device in the present invention is suitable for preparing various organic optoelectronic functional thin films, and the morphology of the thin films prepared by ordinary electrostatic spray is obviously improved, thereby improving the device performance.

此外,应当理解,虽然本说明书按照实施方式加以描述,但并非每个实施方式仅包含一个独立的技术方案,说明书的这种叙述方式仅仅是为清楚起见,本领域技术人员应当将说明书作为一个整体,各实施例中的技术方案也可以经适当组合,形成本领域技术人员可以理解的其他实施方式。In addition, it should be understood that although this specification is described in terms of embodiments, not each embodiment only includes an independent technical solution, and this description in the specification is only for the sake of clarity, and those skilled in the art should take the specification as a whole , the technical solutions in each embodiment can also be appropriately combined to form other implementations that can be understood by those skilled in the art.

Claims (9)

1.一种四电极静电喷雾打印装置,其特征在于,包括主动供液系统、外加高压系统以及三维移动平台,所述外加高压系统包括高压电源以及与所述高压电源电连接的四电极结构,所述四电极结构包括十字型固定架,设置在所述十字型固定架中间的针头,以及设置在所述固定架四端的四个电极柱;所述主动供液系统包括与所述针头连通的注射器,以及与所述注射器连通的注射泵;所述三维移动平台用于使针头和放置制备薄膜的基板之间产生相对运动。1. a four-electrode electrostatic spray printing device, is characterized in that, comprises active liquid supply system, external high-voltage system and three-dimensional mobile platform, and described external high-voltage system comprises high-voltage power supply and the four-electrode structure electrically connected with described high-voltage power supply, The four-electrode structure includes a cross-shaped fixing frame, a needle head arranged in the middle of the cross-shaped fixing frame, and four electrode columns arranged at four ends of the fixing frame; the active liquid supply system includes a connection with the needle head. a syringe, and a syringe pump communicated with the syringe; the three-dimensional moving platform is used to generate relative motion between the needle and the substrate on which the thin film is placed. 2.根据权利要求1所述的四电极静电喷雾打印装置,其特征在于,所述十字型固定架包括相互垂直的第一支架和第二支架,所述针头设置在所述第一支架和第二支架的垂直交叉部位,所述第一支架上设置有以所述垂直交叉部位为对称点两个第一电极,所述第二支架上设置有以所述垂直交叉部位为对称点的两个第二电极。2 . The four-electrode electrostatic spray printing device according to claim 1 , wherein the cross-shaped fixing frame comprises a first frame and a second frame that are perpendicular to each other, and the needle is arranged on the first frame and the second frame. 3 . The vertical intersection of the two supports. The first support is provided with two first electrodes with the vertical intersection as a symmetrical point, and the second support is provided with two vertical intersections as a symmetrical point. second electrode. 3.根据权利要求2所述的四电极静电喷雾打印装置,其特征在于,所述两个第一电极与所述针头的水平距离为5-30mm;所述两个第二电极与所述针头的水平距离为5-30mm。3 . The four-electrode electrostatic spray printing device according to claim 2 , wherein the horizontal distance between the two first electrodes and the needle is 5-30 mm; the two second electrodes and the needle are 5-30 mm. 4 . The horizontal distance is 5-30mm. 4.根据权利要求2所述的四电极静电喷雾打印装置,其特征在于,所述高压电源的高压接线连接所述两个第一电极,所述高压电源的两根接地接线分别连接基板和两个第二电极上。4 . The four-electrode electrostatic spray printing device according to claim 2 , wherein the high-voltage wiring of the high-voltage power supply is connected to the two first electrodes, and the two grounding wirings of the high-voltage power supply are respectively connected to the substrate and the two electrodes. 5 . on the second electrode. 5.根据权利要求2所述的四电极静电喷雾打印装置,其特征在于,所述第一电极和所述第二电极均为圆柱状。5 . The four-electrode electrostatic spray printing device according to claim 2 , wherein the first electrode and the second electrode are both cylindrical. 6 . 6.根据权利要求1所述的四电极静电喷雾打印装置,其特征在于,所述三维移动平台包括用于固定注射泵且可在Z轴方向移动的固定柱,以及位于所述针头下方的可在X轴和Y轴方向移动的基板。6 . The four-electrode electrostatic spray printing device according to claim 1 , wherein the three-dimensional moving platform comprises a fixed column for fixing the syringe pump and movable in the Z-axis direction, and a movable column located under the needle. 7 . A substrate that moves in the X-axis and Y-axis directions. 7.一种基于权利要求1-6任一所述四电极静电喷雾打印装置的薄膜制备方法,其特征在于,包括步骤:7. A method for preparing a thin film based on the four-electrode electrostatic spray printing device described in any one of claims 1-6, characterized in that, comprising the steps of: 将配置好的打印溶液存储于注射器中,并将所述注射器与针头进行连通;storing the configured printing solution in a syringe, and connecting the syringe with the needle; 将注射泵设定流量并打开所述注射泵,通过所述注射泵将所述注射器中的打印溶液推出;Set the flow rate of the syringe pump and turn on the syringe pump, and push out the printing solution in the syringe through the syringe pump; 开启高压电源,升高电压直至观察到针头下方出现长条形雾斑;Turn on the high-voltage power supply and increase the voltage until a long fog spot is observed under the needle; 将基片放置在基板上,设置所述基板的移动速度,使所述三维移动平台按预定路线运动,完成薄膜打印。The substrate is placed on the substrate, the moving speed of the substrate is set, and the three-dimensional moving platform is moved according to a predetermined route to complete the film printing. 8.根据权利要求7所述四电极静电喷雾打印装置的薄膜制备方法,其特征在于,所述基板的移动速度为0.01mm/s-10mm/s。8 . The method for preparing a thin film of a four-electrode electrostatic spray printing device according to claim 7 , wherein the moving speed of the substrate is 0.01 mm/s-10 mm/s. 9 . 9.根据权利要求7所述四电极静电喷雾打印装置的薄膜制备方法,其特征在于,所述长条形雾斑的长宽比为2:1-10:1。9 . The method for preparing a thin film of a four-electrode electrostatic spray printing device according to claim 7 , wherein the length-width ratio of the elongated fog spot is 2:1-10:1. 10 .
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