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CN113552072B - Optical sensor based on total reflection enhancement mechanism - Google Patents

Optical sensor based on total reflection enhancement mechanism Download PDF

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CN113552072B
CN113552072B CN202110398466.1A CN202110398466A CN113552072B CN 113552072 B CN113552072 B CN 113552072B CN 202110398466 A CN202110398466 A CN 202110398466A CN 113552072 B CN113552072 B CN 113552072B
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关春颖
王影
吕博
李一铖
刘荣玉
李玉祥
朱正
史金辉
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Harbin Engineering University
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    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
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    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
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Abstract

The invention discloses an optical sensor based on a total reflection enhancement mechanism, which comprises a substrate, a double-layer super-structure surface and a medium spacing layer, wherein the super-structure surface is a metal nano-structure body, the two metal nano-structure bodies are respectively positioned on the upper surfaces of two opposite planes of the medium spacing layer, the two metal nano-structure bodies can rotate relatively, and the medium spacing layer is arranged above the substrate; when the circularly polarized light is incident from the substrate direction, the incident angle is larger than the critical angle and is not 0 degrees and not 90 degrees, the incident angle is the included angle between the incident light direction and the substrate vertical direction, and the circularly polarized light is totally reflected on the interface between the double-layer super-structure surface and the air. The invention has simple structure and greatly reduces the processing difficulty; the change of the characteristics such as the refractive index, the concentration, the chiral characteristic and the like of the external environment can be judged by utilizing the change of the resonant frequency of the external chiral response and the circular dichroism amplitude, and the method can be expanded to the fields of online optical detection, biological sensing and the like.

Description

一种基于全反射增强机制的光学传感器An Optical Sensor Based on Total Reflection Enhancement Mechanism

技术领域technical field

本发明属于光学传感器领域,涉及一种基于全反射增强机制的光学传感器,主要用于外部环境的折射率、浓度、手性特征等传感测量。The invention belongs to the field of optical sensors, and relates to an optical sensor based on a total reflection enhancement mechanism, which is mainly used for sensing and measuring the refractive index, concentration and chiral characteristics of the external environment.

背景技术Background technique

传感器是一种检测装置,能感受到被测量的信息,并能将感受到的信息按一定规律变换成为电信号或其他所需形式的信息输出,以满足信息的传输、处理、存储、显示、记录和控制等要求。光学传感器依据光学原理进行测量,它有许多优点如非接触和非破坏性测量、几乎不受干扰、高速传输以及可遥测、遥控等。A sensor is a detection device that can sense the measured information and convert the sensed information into electrical signals or other required forms of information output according to certain rules to meet the requirements of information transmission, processing, storage, display, recording and control requirements. Optical sensors measure based on optical principles. It has many advantages such as non-contact and non-destructive measurement, almost no interference, high-speed transmission, and telemetry and remote control.

超构材料是一种由特征尺寸远小于工作波长的结构单元所组成的人工材料,拥有天然材料所不具备的超常物理性质。光学超构材料是超构材料的重要分支之一,拥有可以自由设计的电磁特性,在全息摄影,超衍射极限分辨率,极化转换等具有特殊功能器件的应用方面有着巨大的潜力。Metamaterials are artificial materials composed of structural units whose characteristic size is much smaller than the working wavelength, and possess extraordinary physical properties that natural materials do not possess. Optical metamaterials are one of the important branches of metamaterials. They have freely designable electromagnetic properties and have great potential in the application of devices with special functions such as holography, super-diffraction limit resolution, and polarization conversion.

手性材料能够控制圆极化电磁波,但是自然手性材料中电场和磁场之间的交叉耦合效率很弱,而手性超构材料能够提高交叉耦合的效率,同时能够极大的提高材料的偏振控制特性,例如圆二向色性和旋光性等。主动式的光学手性超构材料能够应用于新型光学传感器、调制器和光开光等。圆二向色性是指超构材料对于左旋圆偏振光和右旋圆偏振光吸收特性不同而导致它们的透过率不同的特性。该特性可被用于测定分子的不对称结构等。Chiral materials can control circularly polarized electromagnetic waves, but the cross-coupling efficiency between electric and magnetic fields in natural chiral materials is very weak, while chiral metamaterials can improve the cross-coupling efficiency and greatly improve the polarization of materials Control properties such as circular dichroism and optical rotation. Active optical chiral metamaterials can be applied to new optical sensors, modulators, and optical switches. Circular dichroism refers to the characteristic that metamaterials have different absorption properties for left-handed circularly polarized light and right-handed circularly polarized light, resulting in different transmittances. This characteristic can be used to determine the asymmetric structure of the molecule, etc.

发明内容Contents of the invention

针对上述现有技术,本发明要解决的技术问题是提供一种结构简单,方便制造的新型的基于全反射增强机制的光学传感器。In view of the above prior art, the technical problem to be solved by the present invention is to provide a novel optical sensor based on a total reflection enhancement mechanism with a simple structure and convenient manufacture.

为解决上述技术问题,本发明的一种基于全反射增强机制的光学传感器,包括基底、双层超构表面和介质间隔层,超构表面为金属纳米结构体,两个金属纳米结构体分别位于介质间隔层相对的两个平面的上表面,两个金属纳米结构体可相对旋转,介质间隔层设置在基底上方;当圆偏振光从基底方向入射,入射角大于临界角且入射角非0°且非90°,入射角为入射光方向和基底垂直方向的夹角,圆偏振光将在双层超构表面与空气间的界面发生全反射。In order to solve the above-mentioned technical problems, an optical sensor based on a total reflection enhancement mechanism of the present invention includes a substrate, a double-layer metasurface and a dielectric spacer layer. The metasurface is a metal nanostructure, and the two metal nanostructures are respectively located at On the upper surfaces of the two planes opposite to the dielectric spacer layer, the two metal nanostructures can be rotated relative to each other, and the dielectric spacer layer is arranged above the substrate; when circularly polarized light is incident from the direction of the substrate, the incident angle is greater than the critical angle and the incident angle is not 0° And not 90°, the incident angle is the angle between the incident light direction and the vertical direction of the substrate, and the circularly polarized light will be totally reflected at the interface between the double-layer metasurface and air.

本发明还包括:The present invention also includes:

1.通过调节两个金属纳米结构体之间的旋转角度和间隔距离可改变传感器的耦合强度。1. The coupling strength of the sensor can be changed by adjusting the rotation angle and separation distance between the two metal nanostructures.

2.光学传感器利用外致手性响应的谐振频率或圆二向色性幅值的改变判断折射率、浓度、手性特征的变化。2. The optical sensor uses the resonant frequency of the externally induced chiral response or the change of the circular dichroic amplitude to judge the change of the refractive index, concentration, and chiral characteristics.

3.介质间隔层材质为二氧化硅、氟化镁或者氧化锌。3. The material of the dielectric spacer layer is silicon dioxide, magnesium fluoride or zinc oxide.

4.基底材质为石英玻璃或氮化硅。4. The base material is quartz glass or silicon nitride.

本发明的有益效果:本发明是一种利用全反射增强机制对外部环境的变化进行传感测量的新型光学传感器。由于简单的利用全反射产生的倏逝波对空气界面环境变化的敏感性进行传感,外致手性响应的谐振频率和圆二向色性幅值的改变均可判断外部环境折射率、浓度、手性特征等特性的变化。这种基于全反射增强机制的新型光学传感器能够轻松的通过调整入射圆偏振光的入射角度和方位角,优化系统性能获取最佳的外致手性响应增强效果。由于这种基于全反射增强机制的新型光学传感器可以通过简单的调整改变系统性能参数,结构简单,方便制造,可拓展到在线光学检测、生物传感等领域。Beneficial effects of the present invention: the present invention is a novel optical sensor that utilizes a total reflection enhancement mechanism to sense and measure changes in the external environment. Due to the simple use of the evanescent wave generated by total reflection to sense the sensitivity of the air interface environment change, the resonant frequency of the externally induced chiral response and the change of the circular dichroic amplitude can determine the external environment refractive index, concentration , chiral characteristics and other characteristics of the changes. This new type of optical sensor based on the total reflection enhancement mechanism can easily adjust the incident angle and azimuth angle of the incident circularly polarized light to optimize the system performance and obtain the best externally induced chiral response enhancement effect. Because this new type of optical sensor based on the enhanced total reflection mechanism can change the system performance parameters through simple adjustments, it has a simple structure and is easy to manufacture. It can be extended to online optical detection, biosensing and other fields.

本发明结构简单,大大降低了加工的难度;利用外致手性响应的谐振频率和圆二向色性幅值的改变均可判断外部环境折射率、浓度、手性特征等特性的变化,可拓展到在线光学检测、生物传感等领域。可以简单的改变介质间隔层的厚度调整金属纳米结构的层间耦合强度。The invention has a simple structure and greatly reduces the difficulty of processing; the change of the resonant frequency of the externally induced chiral response and the amplitude of the circular dichroism can be used to judge the changes in the characteristics of the external environment such as refractive index, concentration, and chiral characteristics, and can Expand to online optical detection, biosensing and other fields. The interlayer coupling strength of the metal nanostructure can be adjusted simply by changing the thickness of the dielectric spacer layer.

附图说明Description of drawings

图1(a)是新型光学传感器的单元几何结构;Figure 1(a) is the cell geometry of the novel optical sensor;

图1(b)是新型光学传感器的单元几何结构的主视图;Figure 1(b) is the front view of the cell geometry of the novel optical sensor;

图1(c)是新型光学传感器的单元几何结构的俯视图;Figure 1(c) is a top view of the cell geometry of the novel optical sensor;

图2是圆偏振光入射示意图;Fig. 2 is a schematic diagram of circularly polarized light incidence;

图3是新型光学传感器的仿真反射图谱;Figure 3 is the simulated reflection spectrum of the new optical sensor;

图4是新型光学传感器的圆二向色性图谱;Figure 4 is the circular dichroism spectrum of the novel optical sensor;

图5是在传感器上覆盖介质层的示意图;Fig. 5 is a schematic diagram of covering the dielectric layer on the sensor;

图6是测量不同介质层的折射率的仿真结果图。Fig. 6 is a graph of simulation results of measuring the refractive index of different medium layers.

具体实施方式Detailed ways

下面结合附图对本发明做进一步说明。The present invention will be further described below in conjunction with the accompanying drawings.

本发明的基于全反射增强机制的新型光学传感器,可利用其强的外致圆二向色性开展传感应用,这种新型光学传感器由基底、双层超构表面和介质间隔层构成。双层超构表面由周期分布的两个金属纳米结构构成,两个金属纳米结构分别位于介质间隔层的上下两侧,并且二者之间存在旋转角,形成旋转结构体。当圆偏振光从基底方向以非0°且非90°方位角入射,且入射角度大于临界角时,圆偏振光将在双层超构表面与空气间的界面发生全反射,无透射信号,此时产生非常强的反射圆二向色性,利用圆二向色性幅值的变化,可探测外部环境的改变。The novel optical sensor based on the total reflection enhancement mechanism of the present invention can utilize its strong externally induced circular dichroism for sensing applications, and the novel optical sensor is composed of a substrate, a double-layer metasurface and a dielectric spacer layer. The double-layer metasurface is composed of two metal nanostructures distributed periodically. The two metal nanostructures are respectively located on the upper and lower sides of the dielectric spacer layer, and there is a rotation angle between them to form a rotating structure. When the circularly polarized light is incident from the substrate direction at an azimuth angle other than 0° and not 90°, and the incident angle is larger than the critical angle, the circularly polarized light will be totally reflected at the interface between the double-layer metasurface and air, and there will be no transmission signal. At this time, a very strong reflective circular dichroism is generated, and the change of the external environment can be detected by using the change of the amplitude of the circular dichroism.

全反射增强机制是指在双层超构表面与空气界面发生的全反射,在大角度入射的情况下该光学传感器无透射信号,从而形成全反射增强机制的手性响应。The total reflection enhancement mechanism refers to the total reflection that occurs at the interface between the double-layer metasurface and the air, and the optical sensor has no transmission signal in the case of a large angle of incidence, thus forming a chiral response of the total reflection enhancement mechanism.

双层超构表面,由两个金属纳米结构构成,且二者之间存在结构旋转角,可以通过调节上下两个金属纳米结构之间的旋转角度和间隔距离来改变传感器的耦合强度。The double-layer metasurface is composed of two metal nanostructures, and there is a structural rotation angle between them. The coupling strength of the sensor can be changed by adjusting the rotation angle and spacing distance between the upper and lower two metal nanostructures.

介质间隔层主要是承载金属纳米结构,其厚度的变化可以调整金属纳米结构的层间耦合强度,其材料可以为二氧化硅、氟化镁、氧化锌等介质。The dielectric spacer layer mainly carries the metal nanostructure, and its thickness can adjust the interlayer coupling strength of the metal nanostructure. Its material can be silicon dioxide, magnesium fluoride, zinc oxide and other media.

基底用于支撑整体结构,其材料可选用石英玻璃、氮化硅等材料。The substrate is used to support the overall structure, and its material can be selected from materials such as quartz glass and silicon nitride.

入射圆偏振光以非0°或者非90°方位角入射,是指入射圆偏振光的方向不能与两个金属纳米结构方向重合,此时由双层超构表面与入射波矢构成的系统不能与其自身镜像重合,因此系统表现出强的外致手性响应。The incident circularly polarized light is incident at a non-0° or non-90° azimuth angle, which means that the direction of the incident circularly polarized light cannot coincide with the direction of the two metal nanostructures. At this time, the system composed of the double-layer metasurface and the incident wave vector cannot coincides with its own mirror image, so the system exhibits a strong externally induced chiral response.

外致手性光学响应依赖于入射圆偏振光的入射角度和方位角,优化系统性能可获取最佳的外致手性响应增强效果。调整入射圆偏振光的入射角度和方位角,优化系统性能可获取最佳的外致手性响应增强效果。The exogenous chiral optical response depends on the incident angle and azimuth of the incident circularly polarized light. Optimizing system performance can obtain the best exogenous chiral response enhancement effect. Adjusting the incident angle and azimuth of the incident circularly polarized light and optimizing the system performance can obtain the best externally induced chiral response enhancement effect.

利用全反射产生的倏逝波将对空气界面环境变化的敏感性进行传感。Sensitivity to environmental changes at the air interface will be sensed using evanescent waves generated by total reflection.

利用外致手性响应的谐振频率和圆二向色性幅值的改变均可判断外部环境折射率、浓度、手性特征等特性的变化,该传感器可拓展到在线光学检测、生物传感等领域。Changes in the resonant frequency and circular dichroism amplitude of the externally induced chiral response can be used to determine changes in the refractive index, concentration, and chiral characteristics of the external environment. The sensor can be extended to online optical detection, biosensing, etc. field.

由于这种新型光学传感器是亚波长结构,因而在实际应用中结构的厚度可以忽略不计。Since this novel optical sensor is a subwavelength structure, the thickness of the structure is negligible in practical applications.

结合图1(a)、图1(b)和图1(c),图1(a)为该传感器的单元几何结构,图1(b)为该单元几何结构的主视图,图1(c)为该单元几何结构的俯视图。其中1为两个金属纳米结构构成的旋转结构体,其中一个金属纳米结构位于介质2顶部,另一个位于介质2的底部,采用金作为金属纳米结构的材料。Au纳米结构的长度设为240nm,宽度设为50nm,厚度设为30nm,两个纳米结构的旋转角度为90°,两个金属纳米结构的间隔距离为150nm。2为介质层,采用MgF2为介质层,介质层的长度和宽度设为300nm,厚度设为180nm。介质层的作用主要是承载金属纳米结构,固定金属纳米结构。3为结构的基底,采用玻璃作为基底,玻璃基底的长度和宽度设为300nm,介质层与基底构成一个立方体,基底相当于结构的基座。使入射光从基底方向入射,且入射光方向与传感器垂直方向的夹角为70°,如图2所示,我们可以观察到,光发生全反射,且入射光为右旋偏振光,反射光为左旋偏振光。利用CST进行仿真,仿真得到的反射图谱如图3所示,其中R++表示右旋极化波的反射系数,R+-表示圆交叉极化反射系数,R-+表示圆交叉极化反射系数,R--表示左旋圆极化反射系数。观察图3可以发现,左旋极化波和右旋极化波的反射曲线始终重合。圆交叉极化反射曲线出现两个明显的谐振峰,两个谐振峰分别出现在221THz和341THz处。为了更加直观的研究材料的圆二向色性,我们根据圆二向色性的计算公式ΔR=R-+-R+-,得到此材料的圆二向色性图谱如图4所示。观察图4可以发现,圆二向色性有两个明显极值。在221THz处,圆二向色性达到负的0.5498。在341THz处,圆二向色性的值为0.4301。说明在这两个频率处,结构的偏振转换效果最好。Combining Fig. 1(a), Fig. 1(b) and Fig. 1(c), Fig. 1(a) is the unit geometry structure of the sensor, Fig. 1(b) is the front view of the unit geometry structure, Fig. 1(c ) is the top view of the geometric structure of the unit. 1 is a rotating structure composed of two metal nanostructures, one of which is located at the top of the medium 2, and the other is located at the bottom of the medium 2, and gold is used as the material of the metal nanostructure. The length of the Au nanostructure is set to 240nm, the width is set to 50nm, and the thickness is set to 30nm, the rotation angle of the two nanostructures is 90°, and the distance between the two metal nanostructures is 150nm. 2 is a dielectric layer, using MgF 2 as the dielectric layer, the length and width of the dielectric layer are set to 300nm, and the thickness is set to 180nm. The role of the dielectric layer is mainly to carry the metal nanostructure and fix the metal nanostructure. 3 is the substrate of the structure, using glass as the substrate, the length and width of the glass substrate are set to 300nm, the dielectric layer and the substrate form a cube, and the substrate is equivalent to the base of the structure. Make the incident light incident from the direction of the substrate, and the angle between the incident light direction and the vertical direction of the sensor is 70°, as shown in Figure 2, we can observe that the light is totally reflected, and the incident light is right-handed polarized light, and the reflected light for left-handed polarized light. Using CST for simulation, the simulated reflection spectrum is shown in Figure 3, where R ++ represents the reflection coefficient of right-handed polarized waves, R +- represents the circular cross-polarization reflection coefficient, and R- + represents the circular cross-polarization reflection Coefficient, R -- represents the left-handed circular polarization reflection coefficient. Observing Figure 3, it can be found that the reflection curves of left-handed polarized waves and right-handed polarized waves always coincide. There are two obvious resonance peaks in the circular cross-polarization reflection curve, and the two resonance peaks appear at 221THz and 341THz respectively. In order to study the circular dichroism of the material more intuitively, we obtained the circular dichroism spectrum of this material according to the calculation formula of circular dichroism ΔR=R -+ -R +- , as shown in Figure 4. Observing Figure 4, it can be found that there are two obvious extreme values of circular dichroism. At 221 THz, the circular dichroism reaches negative 0.5498. At 341 THz, the circular dichroism has a value of 0.4301. It shows that at these two frequencies, the polarization conversion effect of the structure is the best.

观察图5,我们在传感器单元结构上增加被分析介质层4,通过仿真不同折射率的介质层,我们得到图6所示的仿真结果。由图6我们可以看出,具有不同折射率的介质层的圆二向色性曲线的幅值的极大值是不同的,圆二向色性取极值处的频率值点也是不同的。因此我们可以通过检测谐振频率的变化和圆二向色性幅值的变化,测量介质的折射率。Looking at Figure 5, we add the analyzed medium layer 4 to the sensor unit structure, and by simulating medium layers with different refractive indices, we get the simulation results shown in Figure 6. From Fig. 6, we can see that the maximum value of the amplitude of the circular dichroism curve of the medium layer with different refractive index is different, and the frequency value point at the extreme value of the circular dichroism is also different. Therefore, we can measure the refractive index of the medium by detecting the change of resonant frequency and the change of circular dichroism amplitude.

Claims (5)

1.一种基于全反射增强机制的光学传感器,其特征在于:包括基底、双层超构表面和介质间隔层,超构表面包括两个互相垂直的金属纳米结构体,第一金属纳米结构体位于介质间隔层的顶部,第二金属纳米结构体位于介质间隔层的底部,介质间隔层设置在基底上方;当圆偏振光从基底方向入射,入射角大于临界角且入射角非0°且非90°,入射角为入射光方向和基底垂直方向的夹角,圆偏振光将在双层超构表面与空气间的界面发生全反射;第一金属纳米结构体、第二金属纳米结构体高度间隔距离为150nm;第一金属纳米结构体、第二金属纳米结构体均为长条形;长度均为240nm,宽度均为50nm,厚度均为30nm;介质间隔层长度和宽度为300nm,厚度为180nm;基底的长度和宽度为300nm。1. An optical sensor based on a total reflection enhancement mechanism, characterized in that: comprise a substrate, a double-layer metasurface and a medium spacer layer, the metasurface includes two metal nanostructures perpendicular to each other, the first metal nanostructure Located on the top of the medium spacer layer, the second metal nanostructure is located at the bottom of the medium spacer layer, and the medium spacer layer is arranged above the substrate; when circularly polarized light is incident from the direction of the substrate, the incident angle is greater than the critical angle and the incident angle is not 0° and not 90°, the incident angle is the angle between the direction of the incident light and the vertical direction of the substrate, the circularly polarized light will be totally reflected at the interface between the double-layer metasurface and the air; the height of the first metal nanostructure and the second metal nanostructure The separation distance is 150nm; the first metal nanostructure and the second metal nanostructure are elongated; the length is 240nm, the width is 50nm, and the thickness is 30nm; the length and width of the dielectric spacer layer are 300nm, and the thickness is 180 nm; the length and width of the substrate are 300 nm. 2.根据权利要求1所述的一种基于全反射增强机制的光学传感器,其特征在于:通过调节两个金属纳米结构体之间的旋转角度和间隔距离可改变传感器的耦合强度。2 . An optical sensor based on a total reflection enhancement mechanism according to claim 1 , wherein the coupling strength of the sensor can be changed by adjusting the rotation angle and separation distance between two metal nanostructures. 3.根据权利要求1或2所述的一种基于全反射增强机制的光学传感器,其特征在于:所述光学传感器利用外致手性响应的谐振频率或圆二向色性幅值的改变判断折射率、浓度、手性特征的变化。3. An optical sensor based on a total reflection enhancement mechanism according to claim 1 or 2, characterized in that: the optical sensor uses the resonant frequency of the externally induced chiral response or the change of the circular dichroic amplitude to judge Changes in refractive index, concentration, chiral character. 4.根据权利要求1或2所述的一种基于全反射增强机制的光学传感器,其特征在于:介质间隔层材质为二氧化硅、氟化镁或者氧化锌。4. An optical sensor based on a total reflection enhancement mechanism according to claim 1 or 2, wherein the material of the dielectric spacer layer is silicon dioxide, magnesium fluoride or zinc oxide. 5.根据权利要求1或2所述的一种基于全反射增强机制的光学传感器,其特征在于:基底材质为石英玻璃或氮化硅。5. An optical sensor based on a total reflection enhancement mechanism according to claim 1 or 2, characterized in that: the base material is quartz glass or silicon nitride.
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