CN113551827A - Dust collection suction monitoring system of laser marking equipment - Google Patents
Dust collection suction monitoring system of laser marking equipment Download PDFInfo
- Publication number
- CN113551827A CN113551827A CN202010324520.3A CN202010324520A CN113551827A CN 113551827 A CN113551827 A CN 113551827A CN 202010324520 A CN202010324520 A CN 202010324520A CN 113551827 A CN113551827 A CN 113551827A
- Authority
- CN
- China
- Prior art keywords
- dust collection
- monitor
- collection box
- monitoring system
- laser marking
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000428 dust Substances 0.000 title claims abstract description 78
- 238000012544 monitoring process Methods 0.000 title claims abstract description 20
- 238000010330 laser marking Methods 0.000 title claims abstract description 15
- 238000012986 modification Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000005856 abnormality Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/362—Laser etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/08—Means for indicating or recording, e.g. for remote indication
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/08—Means for indicating or recording, e.g. for remote indication
- G01L19/12—Alarms or signals
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention discloses a dust collection suction monitoring system of a laser marking device, which comprises a dust collection box and a monitor, wherein the dust collection box is provided with a first dust collection box, a second dust collection box, a third dust collection box and a fourth dust collection box, the inner parts of the first dust collection box, the second dust collection box, the third dust collection box and the fourth dust collection box are respectively connected with a vacuum sensor, the monitor is a pressure monitor, the monitor comprises a first monitor, a second monitor, a third monitor and a fourth monitor, the first dust collection box, the second dust collection box, the third dust collection box and the fourth dust collection box are respectively connected with the first monitor, the second monitor, the third monitor and the fourth monitor, the monitors are connected with a control system, the monitoring system can change the measuring range according to the pressure unit of the dust collection box, has high measuring accuracy and monitors and records the pressure range in real time, the interface of the monitor is convenient to operate and manage, and the monitor can give an alarm to the over-range index alarm device.
Description
Technical Field
The invention belongs to the field of semiconductor laser marking, and particularly relates to a dust collection suction monitoring system of laser marking equipment.
Background
When the laser marking is carried out on the semiconductor memory, a corresponding monitoring system is not arranged on the existing dust collecting pipeline flow monitoring and flow threshold value fluctuation alarm system equipment, the working capacity of a dust collecting part cannot be judged, and the abnormality of the dust collecting capacity can be known only through manual instrument detection after the abnormality of the quality.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provide a dust collection suction monitoring system of laser marking equipment.
The purpose of the invention can be realized by the following technical scheme:
the laser marking equipment dust collection suction monitoring system comprises a dust collection box and a monitor, wherein the dust collection box is provided with a first dust collection box, a second dust collection box, a third dust collection box and a fourth dust collection box, the first dust collection box, the second dust collection box, the third dust collection box and the fourth dust collection box are connected with vacuum sensors respectively, the monitor is a pressure monitor, the monitor comprises a first monitor, a second monitor, a third monitor and a fourth monitor, the first dust collection box, the second dust collection box, the third dust collection box and the vacuum sensors in the fourth dust collection box are connected with the first monitor, the second monitor, the third monitor and the fourth monitor respectively, and the monitor is connected with a control system.
Preferably, the monitoring instrument is connected with the control system through a wire.
Preferably, the dust collection box is provided with a pipe orifice, the dust collection box is connected with the vacuum inductor through a pipe orifice pipeline, and the diameter of the pipe orifice is 10 cm.
Preferably, the monitor is connected with an alarm device, and the alarm device is connected with a control system.
Preferably, the monitor is provided with a display screen.
The invention has the beneficial effects that:
the monitoring system can change the measuring range according to the pressure unit of the dust collection box, the measuring accuracy is high, the pressure range is monitored and recorded in real time, the interface of the monitoring instrument is convenient to operate and manage, and the instrument can give an alarm to the over-range index alarm device.
Drawings
Fig. 1 is a schematic structural diagram of a dust collection and suction monitoring system of a laser marking device.
Detailed Description
The technical scheme of the invention is further described by combining the attached drawings:
the laser marking equipment dust collection suction monitoring system comprises a dust collection box and a monitor, wherein the dust collection box is provided with a first dust collection box, a second dust collection box, a third dust collection box and a fourth dust collection box, the first dust collection box, the second dust collection box, the third dust collection box and the fourth dust collection box are connected with vacuum sensors respectively, the monitor is a pressure monitor, the monitor comprises a first monitor, a second monitor, a third monitor and a fourth monitor, the first dust collection box, the second dust collection box, the third dust collection box and the vacuum sensors in the fourth dust collection box are connected with the first monitor, the second monitor, the third monitor and the fourth monitor respectively, and the monitor is connected with a control system.
In this embodiment, preferably, the monitor is connected to the control system through a wire.
In this embodiment, preferably, the dust box is provided with a nozzle, the dust box is connected to the vacuum sensor through a nozzle pipe, and the diameter of the nozzle is 10 cm.
In this embodiment, preferably, the monitor is connected to an alarm device, and the alarm device is connected to the control system.
In this embodiment, preferably, the monitor is provided with a display screen.
Finally, it should be noted that:
the method may be carried out and its application may be carried out by those skilled in the art with reference to the disclosure herein, and it is expressly intended that all such alternatives and modifications as would be apparent to those skilled in the art are deemed to be included within the invention. While the method and application of the present invention have been described in terms of preferred embodiments, it will be apparent to those of ordinary skill in the art that variations and modifications in the method and application of the invention as described herein may be made and equivalents employed without departing from the spirit and scope of the invention.
Although the present invention has been described in detail with reference to the above embodiments, it should be understood by those skilled in the art that: modifications and equivalents may be made thereto without departing from the spirit and scope of the invention, and the appended claims are intended to cover such modifications and equivalents as fall within the true spirit and scope of the invention.
Claims (5)
1. Laser marking equips collection dirt suction monitoring system, its characterized in that: the dust collection box is provided with a first dust collection box, a second dust collection box, a third dust collection box and a fourth dust collection box, the first dust collection box, the second dust collection box, the third dust collection box and the fourth dust collection box are connected with vacuum inductors respectively, the monitor is a pressure monitor, the monitor comprises a first monitor, a second monitor, a third monitor and a fourth monitor, the first dust collection box, the second dust collection box, the third dust collection box and the vacuum inductors in the fourth dust collection box are connected with the first monitor, the second monitor, the third monitor and the fourth monitor respectively, and the monitors are connected with a control system.
2. The laser marking apparatus dust collection suction monitoring system of claim 1, wherein: the monitor is connected with the control system through a wire.
3. The laser marking apparatus dust collection suction monitoring system of claim 1, wherein: the dust collection box is provided with a pipe orifice, the dust collection box is connected with the vacuum inductor through a pipe orifice pipeline, and the diameter of the pipe orifice is 10 cm.
4. The laser marking apparatus dust collection suction monitoring system of claim 1, wherein: the monitoring instrument is connected with an alarm device, and the alarm device is connected with a control system.
5. The laser marking apparatus dust collection suction monitoring system of claim 1, wherein: the monitor is provided with a display screen.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010324520.3A CN113551827A (en) | 2020-04-23 | 2020-04-23 | Dust collection suction monitoring system of laser marking equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010324520.3A CN113551827A (en) | 2020-04-23 | 2020-04-23 | Dust collection suction monitoring system of laser marking equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113551827A true CN113551827A (en) | 2021-10-26 |
Family
ID=78101054
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010324520.3A Pending CN113551827A (en) | 2020-04-23 | 2020-04-23 | Dust collection suction monitoring system of laser marking equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113551827A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN204912182U (en) * | 2015-08-10 | 2015-12-30 | 佛山市蓝箭电子股份有限公司 | Gas blowing device of laser marking machine |
| CN205905562U (en) * | 2016-07-05 | 2017-01-25 | 宣利峰 | Laser marking machine |
| KR101748719B1 (en) * | 2016-11-04 | 2017-06-19 | 주식회사 에스제이이노테크 | Dust collector built-in laser marking machine |
| CN107378236A (en) * | 2017-07-10 | 2017-11-24 | 北京航天控制仪器研究所 | A kind of cleaning vacuum plant that machining chips are removed for laser precision machining |
| CN212409939U (en) * | 2020-04-23 | 2021-01-26 | 海太半导体（无锡）有限公司 | Dust collection suction monitoring system of laser marking equipment |
-
2020
- 2020-04-23 CN CN202010324520.3A patent/CN113551827A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN204912182U (en) * | 2015-08-10 | 2015-12-30 | 佛山市蓝箭电子股份有限公司 | Gas blowing device of laser marking machine |
| CN205905562U (en) * | 2016-07-05 | 2017-01-25 | 宣利峰 | Laser marking machine |
| KR101748719B1 (en) * | 2016-11-04 | 2017-06-19 | 주식회사 에스제이이노테크 | Dust collector built-in laser marking machine |
| CN107378236A (en) * | 2017-07-10 | 2017-11-24 | 北京航天控制仪器研究所 | A kind of cleaning vacuum plant that machining chips are removed for laser precision machining |
| CN212409939U (en) * | 2020-04-23 | 2021-01-26 | 海太半导体（无锡）有限公司 | Dust collection suction monitoring system of laser marking equipment |
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