CN113514478A - A detection device and its alignment method and detection method - Google Patents
A detection device and its alignment method and detection method Download PDFInfo
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- CN113514478A CN113514478A CN202010276626.0A CN202010276626A CN113514478A CN 113514478 A CN113514478 A CN 113514478A CN 202010276626 A CN202010276626 A CN 202010276626A CN 113514478 A CN113514478 A CN 113514478A
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Abstract
本申请提供一种光学设备的对准方法，该检测设备包括光源和探测装置，探测装置包括第一探测器和镜头，该对准方法包括：通过光源向待测对象发射检测光，检测光在待测对象表面形成检测光斑，使检测光斑经待测对象表面形成第一信号光；第一探测器的感光面经镜头在待测对象表面形成第一探测区，使第一探测装置收集不同位置关系下的第一探测区的第一信号光；根据第一信号光获取不同位置关系下的第一信号光的光强度；获取第一信号光具有最大光强度时的位置关系作为对准位置，其中，位置关系为检测光斑与第一探测区的相对位置；将第一探测区与检测光斑的位置关系调整为对准位置。通过以上设置，可快速、准确获取对准位置，提高光学设备检测精度。
The present application provides an alignment method for an optical device, the detection device includes a light source and a detection device, the detection device includes a first detector and a lens, and the alignment method includes: emitting detection light to an object to be measured through a light source, and the detection light is A detection light spot is formed on the surface of the object to be tested, so that the detection light spot forms a first signal light through the surface of the object to be tested; the photosensitive surface of the first detector forms a first detection area on the surface of the object to be tested through the lens, so that the first detection device collects different positions The first signal light in the first detection area under the relationship; the light intensity of the first signal light under different positional relationships is obtained according to the first signal light; the positional relationship when the first signal light has the maximum light intensity is obtained as the alignment position, Wherein, the positional relationship is the relative position of the detection light spot and the first detection area; the positional relationship between the first detection area and the detection light spot is adjusted to the alignment position. Through the above settings, the alignment position can be obtained quickly and accurately, and the detection accuracy of the optical device can be improved.
Description
Technical Field
The present invention relates to the field of optical detection technology, and more particularly, to a detection apparatus, an alignment method thereof, and a detection method thereof.
Background
At present, with the development of technology, the requirement for industrial detection is higher and higher. Wafer defect detection is a method for detecting whether defects such as grooves, particles, scratches and the like exist in a wafer and detecting the positions of the defects in the wafer.
The light scattering technology is an optical wafer defect detection method widely adopted at present, the basic principle of the method is that scattered light of defects is used as signal light, the size of the defects is judged through collected light intensity, and particles smaller than imaging resolution (such as dozens of nanometers) can be measured by the method. In the prior art, point light sources are mainly used for point scanning detection, but the main problem is that the detection speed is slow; the scanning area is increased by adopting line scanning, so that the scanning times can be reduced, and the detection speed is accelerated. In the line scanning technology, in order to improve the detection accuracy, the detector needs to receive the strongest signal light, and the signal received by the detector needs to be more uniform.
Disclosure of Invention
In view of the above, the present invention provides a detection apparatus and a light spot alignment method, i.e., a detection method, to improve accuracy of optical detection, where the optical apparatus includes a light source and a detection device, the detection device includes a first detector and a lens, and the alignment method includes:
an alignment method of an optical apparatus including a light source and a detection device including a first detector and a lens, the alignment method comprising:
emitting detection light to an object to be detected through the light source, wherein the detection light forms a detection light spot on the surface of the object to be detected, and the detection light spot forms first signal light through the surface of the object to be detected; a light sensing surface of the first detector forms a first detection area on the surface of the object to be detected through the lens, so that the first detector collects the first signal light of the first detection area under different position relations;
acquiring the light intensity of the first signal light under different position relations according to the first signal light;
acquiring a position relation when the first signal light has the maximum light intensity as an alignment position, wherein the position relation is a relative position of the detection light spot and the first detection area;
and adjusting the position relation between the first detection area and the detection light spot to be the alignment position.
In one embodiment, the positional relationship comprises: the relative position of the detection light spot and the first detection area along a first direction; the size of the detection light spot along the first direction is larger than the size of the first detection region along the first direction.
In one embodiment, the detection light spot is linear, and the first direction is an extending direction of the detection light spot.
In one embodiment, the positional relationship further comprises: the relative position of the detection light spot and the first detection region along a second direction, wherein the second direction is not parallel to the first direction; the size of the detection light spot along the second direction is larger than the size of the first detection area along the second direction.
In one embodiment, the first detector is a non-time-delay linear array detector, or the first detector is a TDI detector and the TDI detector is set in a linear array mode.
In one embodiment, the collecting the first signal light of the first detection region in different positional relationships by the detection device includes: adjusting the relative position relationship between the detection light spot and the first detection area; collecting the first signal light of the first detection region by the detection device after adjusting the relative positional relationship of the detection light spot and the first detection region each time.
In one embodiment, the first detection device further comprises an adjustment mechanism, and the adjusting the relative position relationship between the detection light spot and the first detection region comprises: the positions of the light source and the lens are relatively fixed, and the relative position between the first detector and the lens is adjusted through the adjusting mechanism.
In one embodiment, the detection apparatus further includes a second detector, a photosensitive surface of the second detector forms a second view field region on the surface of the object to be detected through the lens, and a size of the second detection region at least in a third direction is larger than that of the first detection region;
before the first detector collects the first signal light of the first detection region, the alignment method further includes:
causing the second detector to collect second signal light of the second detection region through the lens;
acquiring image information of the object to be detected in the second detection area according to the second signal light, and acquiring position information of the center of the detection light spot according to the image information;
and carrying out first adjustment processing on the relative positions of the detection light spot and the second detection area according to the image information, and at least reducing the distance between the center of the detection light spot and the center of the second detection area along the third direction.
In one embodiment, the size of the second detection zone is larger than the size of the light spot in either direction.
In one embodiment, the detection light spot is linear; before performing a first adjustment process on the relative positions of the detection light spot and the second detection region according to the image information, the method further includes: and carrying out second adjustment processing on the detection light spot according to the image information to enable the extension direction of the detection light spot to be in a preset direction.
In one embodiment, the object surface of the second detection region has a characteristic pattern, and the characteristic pattern has a characteristic direction; the second adjustment processing includes: and adjusting the extending direction of the detection light spot according to the characteristic direction.
In one embodiment, the first adjustment process includes: acquiring position information of the center of the detection light spot and the center of the second detection area according to the image information; and adjusting one or more combinations of the light source, the lens and the second detector according to the position information of the center of the detection light spot and the center of the second detection area, so as to reduce the distance between the center of the second detection area and the center of the detection light spot.
In one embodiment, the obtaining the position information of the center of the detection light spot according to the image information includes: acquiring contour information of the detection light spot image according to the image information; and acquiring the position information of the center of the detection light spot according to the profile information.
In one embodiment, the second detector is an area array detector, or a TDI detector is used and the TDI detector is arranged in an area array mode.
In one embodiment, before the second detector collects the second signal light of the second detection region, the light spot alignment method further includes: and enabling the surface of the object to be detected to be positioned at the focal plane of the detection device.
In one embodiment, the optical apparatus comprises a plurality of said detection devices; the alignment method further includes: according to the alignment method described in any one of the above, the positional relationship between the first detection region and the detection spot of each of the detection devices is adjusted to the alignment position.
The invention also provides a detection method of the optical equipment, which comprises the following steps: adjusting the positional relationship to an alignment position by the alignment method of any one of the above; and after the position relation is adjusted to the alignment position, detecting the object to be detected through the detection device to obtain the detection information of the object to be detected.
The present invention further provides a detection method of an optical device, comprising: the device comprises a light source, a first light source and a second light source, wherein the light source is used for emitting detection light to an object to be detected, the detection light forms a detection light spot on the surface of the object to be detected, and the detection light spot forms first signal light through the surface of the object to be detected; the detection device comprises a first detector and a lens, wherein a light sensing surface of the first detector is configured to form a first detection area on the surface of the object to be detected through the lens, and the first detector is configured to detect first signal light of the first detection area through the lens; control means for causing the detection means to collect the first signal light of the first detection region in different positional relationships; the processing system is used for acquiring the light intensity of the first signal light under different position relations according to the first signal light; acquiring a position relation when the first signal light has the maximum light intensity as a light spot alignment position, wherein the position relation is a relative position of the detection light spot and the first detection area; adjusting the position relation between the first detection area and the detection light spot to the alignment position; the control device is further configured to adjust a positional relationship between the first detection region and the detection light spot to the alignment position.
Compared with the prior art, the technical scheme provided by the invention has the following advantages: the relative position of the first detection area and the detection light spot can be quickly and accurately adjusted to the alignment position according to the light intensity of the first signal light, and the method has the characteristics of simplicity, convenience and high efficiency; in addition, before or during the detection of the object to be detected, the relative position between the first detection area of the detection device and the detection light spot is adjusted to be an alignment position, so that the light intensity of the first signal light of the first detection area collected by the first detector is maximized, and the detection precision can be improved.
Furthermore, the size of the detection light spot along the first direction is larger than the size of the first detection area along the first direction, the detection result is sensitive to whether the light spot is aligned with the field area of the first detector, and the alignment precision is high.
Drawings
FIG. 1 is a flow chart of an alignment method of an optical device in an embodiment of the present application;
FIG. 2 is a schematic diagram of an optical system according to an embodiment of the present application;
FIG. 3 is a schematic view of a light source according to an embodiment of the present application;
FIG. 4 is a schematic structural diagram of a detecting device according to an embodiment of the present disclosure;
fig. 5 is a flowchart of an alignment method of an optical apparatus in an embodiment of the present application.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are illustrative and intended to be illustrative of the invention and are not to be construed as limiting the invention.
The terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
The embodiment of the invention provides an alignment method of optical equipment, the optical equipment comprises a light source and a detection device, and the detection device comprises: a first detector and a lens, the alignment method comprising:
emitting detection light to an object to be measured by the light source; the detection light forms a detection light spot on the surface of the object to be detected, so that the detection light spot forms first signal light through the surface of the object to be detected; a light sensing surface of the first detector forms a first detection area on the surface of the object to be detected through the lens, so that the first detector collects first signal light of the first detection area under different position relations; acquiring the light intensity of the first signal light under different position relations according to the first signal light; acquiring a position relation when the first signal light has the maximum light intensity as an alignment position, wherein the position relation is a relative position of the detection light spot and the first detection area; and adjusting the position relation between the first detection area and the detection light spot to be the alignment position.
In the alignment method provided by the technical scheme of the invention, the relative position of the first detection area and the detection light spot can be quickly and accurately adjusted to the alignment position according to the light intensity of the first signal light, and the alignment method has the characteristics of simplicity, convenience and high efficiency; in addition, before or during the detection of the object to be detected, the relative position between the first detection area of the detection device and the detection light spot is adjusted to be an alignment position, so that the light intensity of the first signal light of the first detection area collected by the first detector is maximized, and the detection precision can be improved.
The optical apparatus and the alignment method thereof according to the embodiments of the present application will be described in detail with reference to the accompanying drawings 1 to 4:
the embodiment of the present invention provides an alignment method for an optical device, the optical device includes a light source 110 and a detection apparatus 120, the detection apparatus 120 includes: a first detector 121 and a lens 122.
As shown in fig. 2, the light source 110 includes a light emitter 111, a beam shaping assembly 112, and optical elements 113 and 114; the detection light emitted by the light emitter 111 is expanded and shaped by the beam shaping component 112, reflected by the optical element 113 and converged by the optical element 114, and then is irradiated to the surface of the object 130 to be detected, so that a detection light spot is formed.
As shown in fig. 2 and 3, the detecting device 120 includes a first detector 121 and a lens 122; the lens 122 is used for collecting first signal light on the surface of the object 130 to be measured; the first detector 121 is configured to detect the first signal light collected by the lens 122. In this embodiment, the first detector 121 is a linear array detector, specifically, the first detector 122 is a non-delay linear array detector, or the first detector 122 is a TDI detector and the TDI detector is set in a linear array mode.
In this embodiment, the first detector is a line detector. In other embodiments, the first detector may be a surface detector or a point detector.
In addition, the object to be measured in the embodiment of the present invention may be a wafer with a pattern on the surface, or may also be a non-pattern wafer or a substrate in a display device, and the present invention is not limited thereto.
Step S101: emitting detection light to an object to be measured by the light source; the detection light forms a detection light spot on the surface of the object to be detected, so that the detection light spot forms first signal light through the surface of the object to be detected.
In this embodiment, the light source 110 emits detection light to the object 130 to be measured, where the detection light may be linearly polarized light or circularly polarized light, and the detection light irradiates the surface of the object 130 to be measured to form a detection spot.
In this embodiment, the detection light spot is linear, and the extension direction of the detection light spot is a first direction; the detection light spot forms first signal light after being reflected, scattered or diffracted by the surface of the object to be detected, and the first signal light comprises one or more of reflected light, scattered light or diffracted light of the surface of the object to be detected. In other embodiments, the detection spot may also be a surface spot, such as a circular spot, an elliptical spot, or a rectangular spot.
In this embodiment, the detecting device 120 further includes a second detector, a photosensitive surface of the second detector forms a second detecting region on the surface of the object to be detected through the lens 122, and a size of the second detecting region at least in the third direction is larger than that of the first detecting region.
In this embodiment, the second detector is an area array detector, or a TDI detector is used and set to an area array mode; the detection light spot is linear.
Step S102: and carrying out first adjustment processing, and replacing the second detector with the first detector after the first adjustment processing.
Referring to fig. 5, the step S102 is described in detail below, and the alignment method further includes:
step S1021: causing the second detector to collect the second signal light of the second detection region through the lens 122; and acquiring image information of the object to be detected in the second detection area according to the second signal light.
In this embodiment, in any direction, the size of the second detection region is larger than the size of the detection light spot, the second detector collects the second signal light of the second detection region through the lens 122, and the second detector can collect all the second signal light generated by the detection light spot in the field of view of the second detector; and acquiring image information of the object to be detected in the second detection area according to the second signal light, wherein the image information is the image information of the detection light spot.
In this embodiment, before the second detector collects the second signal light of the second detection region, the light spot alignment method further includes: the surface of the object 130 to be measured is located at the focal plane of the probing apparatus 120. Specifically, the surface of the object 130 to be measured is located at the focal plane of the lens 122, so that the second signal light on the surface of the object 130 to be measured is clearly imaged on the photosensitive surface of the second detector through the lens 122.
Step S1022: and acquiring the position information of the center of the detection light spot according to the image information.
In this embodiment, the acquiring the position information of the center of the detection spot according to the image information includes: and acquiring the contour information of the detection light spot image according to the image information, and acquiring the position information of the center of the detection light spot according to the contour information.
Step S1023: and carrying out second adjustment processing on the detection light spot according to the image information to enable the extension direction of the detection light spot to be in a preset direction.
It should be noted that, in this embodiment, before performing the first adjustment on the positions of the detection spot and the second detection region according to the image information, the alignment method further includes: and carrying out second adjustment processing on the detection light spot according to the image information. In other embodiments, the step of the second adjustment process may not be included.
In this embodiment, the object surface to be measured of the second detection region has a feature pattern, the feature pattern has a feature direction, and the second adjustment process includes: and adjusting the extending direction of the detection light spot according to the characteristic direction to enable the extending direction of the detection light spot to be in a preset direction.
In this embodiment, the detection light spot is used to scan the surface of the object to be detected, so as to perform full detection on the surface of the object to be detected. The preset direction is perpendicular to the direction of scanning the object to be detected by the detection light spot. Specifically, in this embodiment, the object to be measured is a wafer, and the preset direction is along a radius direction of a surface of the wafer.
Step S1024: and carrying out first adjustment processing on the relative positions of the detection light spot and the second detection area according to the image information, and at least reducing the distance between the center of the detection light spot and the center of the second detection area along the third direction.
In this embodiment, the first adjusting includes: acquiring position information of the center of the detection light spot and the center of the second detection area according to the image information; and adjusting one or more components of the light source, the lens and the second detector according to the position information of the center of the detection light spot and the center of the second detection area, so as to reduce the distance between the center of the second detection area and the center of the detection light spot.
Step S1025: and after the first adjustment processing, replacing the second detector with the first detector.
The first adjustment processing enables the center of the detection light spot to coincide with the center of the field of view of the detection device as much as possible, so that the detection light spot can be positioned in the field of view of the first detector after the second detector is replaced with the first detector.
In the process of replacing the second detector with the first detector, the lens is not replaced, and the position of the first detector can be determined through the position of the lens, so that the center of the first detection area of the first detector is coincided with the center of the second detection area.
In this embodiment, as shown in fig. 4, the lens 122 and the detector 121 are connected to the mount, respectively, the lens 122 is not replaced, only the second detector is replaced with the first detector, and after replacement, the first detection region of the first detector coincides with the center of the second detection region.
In other embodiments, the positions of the lens and the second detector may be determined by a mounting stage, in which case the lens and the detector are respectively connected to the mounting stage, or the lens and the detector are fixedly connected to the mounting stage, and the lens may be replaced after the first adjustment process.
Step S103: and a light sensing surface of the first detector forms a first detection area on the surface of the object to be detected through the lens, so that the first detector collects first signal light of the first detection area under different position relations.
It should be noted that the first detection region is a region of the surface of the object to be detected that can be detected by the first detector through the lens.
In this embodiment, the photosensitive surface of the first detector 121 forms a first detection region on the surface of the object 130 to be detected through the lens 122, and the size of the first detection region along the first direction is smaller than the size of the detection light spot along the first direction; the first detector 121 collects the first signal light of the first detection region in different positional relationships, which accordingly includes: the relative position of the detection spot and the first detection region along a first direction.
In this embodiment, a dimension of the first detection region along the second direction is smaller than a dimension of the detection spot along the second direction, and the second direction is not parallel to the first direction. Correspondingly, the position relationship further includes: the relative position of the detection spot and the first detection region along a second direction. It should be noted that, when the size of the detection light spot along the first direction is larger than the size of the first detection region along the first direction, the detection result is sensitive to whether the light spot and the field of view region of the first detector are aligned, and whether the alignment is determined by using the light intensity signal detected by the first detector, so that the accuracy is high. Similarly, when the size of the detection light spot along the second direction is larger than the size of the first detection area along the second direction, the detection result is sensitive to whether the light spot is aligned with the field of view area of the first detector, and whether the light spot is aligned is determined by using the light intensity signal detected by the first detector, so that the accuracy is high.
Specifically, in this embodiment, a size of the first detection region in any direction is smaller than a size of the detection light spot.
The step of causing the first detector to collect the first signal light of the first detection region in different positional relationships includes: adjusting the relative position relationship between the detection light spot and the first detection area; collecting the first signal light of the first detection region by the detection device after adjusting the relative positional relationship of the detection light spot and the first detection region each time.
Referring to fig. 4, in this embodiment, the detecting device 120 further includes an adjusting mechanism 123, where the adjusting mechanism 123 is configured to adjust a relative position between the first detector 121 and the lens 122, and further adjust a relative position between the first detection area on the surface of the object 130 to be detected and the detection light spot of the first detector 121.
In this embodiment, the adjusting the relative position relationship between the detection light spot and the first detection region includes: the positions of the light source 110 and the lens 122 are relatively fixed, the relative position between the first detector 121 and the lens 122 is adjusted by the adjusting mechanism 123, and the relative position between the first detection region and the detection light spot along the first direction and/or the relative position between the first detection region and the detection light spot along the second direction are/is changed.
Step S104: and acquiring the light intensity of the first signal light under different position relations according to the first signal light.
The light intensity of the first signal light is the total light intensity of the first signal light obtained by the first detector at different positions.
Step S105: and acquiring a position relation when the first signal light has the maximum light intensity as an alignment position, wherein the position relation is a relative position of the detection light spot and the first detection area.
The adjusting mechanism 123 needs to be adjusted repeatedly for multiple times to adjust the relative positions of the detection light spot and the first detection region, and the position relationship when the first signal light has the maximum light intensity is obtained as the alignment position.
Step S106: and adjusting the position relation between the first detection area and the detection light spot to be the alignment position.
The position relationship between the first detection region and the detection light spot is adjusted to the alignment position, and at this time, the first signal light of the first detection region collected by the first detector 121 is strongest, which is beneficial to improving the accuracy of the detection result of the first detector 121.
In addition, an embodiment of the present invention further provides a detection method for an optical device, including:
s201: adjusting the positional relationship to an alignment position by the alignment method as described above; specifically, the relative position relationship between the first detection region and the detection light spot is adjusted to an alignment position.
S202: and after the position relation is adjusted to the alignment position, detecting the object to be detected through the detection device to obtain the detection information of the object to be detected.
After the relative position relationship between the first detection region and the detection light spot is adjusted to the alignment position, the intensity of the first signal light detected by the detection device is maximum, and the accuracy of the detection result obtained by the optical equipment is high.
In this embodiment, the optical apparatus comprises a plurality of the detecting devices; the alignment method further includes: and adjusting the position relation between the first detection area of each detection device and the detection light spot to the alignment position. At this time, the first signal lights of the first detection regions collected by the plurality of detection devices are all strongest, which is beneficial to improving the accuracy of the detection result of the detection device.
In addition, an embodiment of the present invention further provides a detection apparatus, please refer to fig. 2 again, where the detection apparatus includes: a light source 110, configured to emit detection light to an object to be detected, where the detection light forms a detection light spot on a surface of the object to be detected, and the detection light spot forms a first signal light through the surface of the object to be detected; a detection device 120 including a first detector and a lens, a light-sensitive surface of the first detector being configured to form a first detection region on the surface of the object to be detected through the lens, the first detector being configured to detect the signal light of the first detection region through the lens; a control device 130 for making the detection device collect the first signal light of the first detection area under different position relations; the processing system 140 is configured to obtain light intensities of the first signal light in different positional relationships according to the first signal light; acquiring a position relation when the first signal light has the maximum light intensity as a light spot alignment position, wherein the position relation is a relative position of the detection light spot and the first detection area; adjusting the position relation between the first detection area and the detection light spot to the alignment position; the control device is further configured to adjust a positional relationship between the first detection region and the detection light spot to the alignment position.
While the present invention has been described with reference to specific examples, which are intended to be illustrative only and not to be limiting of the invention, it will be apparent to those of ordinary skill in the art that changes, additions or deletions may be made to the disclosed embodiments without departing from the spirit and scope of the invention.
Claims (18)
1. An alignment method of an optical apparatus including a light source and a detection device including a first detector and a lens, the alignment method comprising:
emitting detection light to an object to be detected through the light source, wherein the detection light forms a detection light spot on the surface of the object to be detected, and the detection light spot forms first signal light through the surface of the object to be detected; a light sensing surface of the first detector forms a first detection area on the surface of the object to be detected through the lens, so that the first detector collects the first signal light of the first detection area under different position relations;
acquiring the light intensity of the first signal light under different position relations according to the first signal light;
acquiring a position relation when the first signal light has the maximum light intensity as an alignment position, wherein the position relation is a relative position of the detection light spot and the first detection area;
and adjusting the position relation between the first detection area and the detection light spot to be the alignment position.
2. The alignment method according to claim 1, wherein the positional relationship includes: the relative position of the detection light spot and the first detection area along a first direction;
the size of the detection light spot along the first direction is larger than the size of the first detection region along the first direction.
3. The alignment method according to claim 2, wherein the detection spot is a line shape, and the first direction is an extending direction of the detection spot.
4. The alignment method according to claim 2, wherein the positional relationship further includes: the relative position of the detection light spot and the first detection region along a second direction, wherein the second direction is not parallel to the first direction; the size of the detection light spot along the second direction is larger than the size of the first detection area along the second direction.
5. The alignment method of claim 1, wherein the first detector is a non-time-delay line detector, or wherein the first detector is a TDI detector and the TDI detector is arranged in a line array pattern.
6. The alignment method according to claim 1, wherein the collecting the first signal light of the first detection region in different positional relationships by the detection means includes:
adjusting the relative position relationship between the detection light spot and the first detection area; collecting the first signal light of the first detection region by the detection device after adjusting the relative positional relationship of the detection light spot and the first detection region each time.
7. The alignment method according to claim 6, wherein the first detection device further comprises an adjustment mechanism, and the adjusting of the relative positional relationship of the detection spot and the first detection region comprises:
the positions of the light source and the lens are relatively fixed, and the relative position between the first detector and the lens is adjusted through the adjusting mechanism.
8. The alignment method according to claim 1, wherein the detecting device further comprises a second detector, a light-sensitive surface of the second detector forms a second field of view on the surface of the object through the lens, and the second detection area has a larger size than the first detection area at least in a third direction;
before the first detector collects the first signal light of the first detection region, the alignment method further includes:
causing the second detector to collect second signal light of the second detection region through the lens;
acquiring image information of the object to be detected in the second detection area according to the second signal light; acquiring position information of the center of the detection light spot according to the image information;
performing first adjustment processing on the relative positions of the detection light spot and the second detection area according to the image information, and at least reducing the distance between the center of the detection light spot and the center of the second detection area along the third direction;
and replacing the second detector with the first detector after the first adjustment process.
9. An alignment method as claimed in claim 8, wherein the size of the second detection zone is larger than the size of the detection spot in either direction.
10. The alignment method according to claim 8, wherein the detection light spot is in a line shape; before performing a first adjustment process on the relative positions of the detection light spot and the second detection region according to the image information, the method further includes:
and carrying out second adjustment processing on the detection light spot according to the image information to enable the extension direction of the detection light spot to be in a preset direction.
11. The alignment method according to claim 10, wherein the object surface to be measured of the second detection region has a characteristic pattern having a characteristic direction; the second adjustment processing includes:
and adjusting the extending direction of the detection light spot according to the characteristic direction.
12. The alignment method according to claim 9, wherein the first adjustment process includes:
acquiring position information of the center of the detection light spot and the center of the second detection area according to the image information;
and adjusting one or more combinations of the light source, the lens and the second detector according to the position information of the center of the detection light spot and the center of the second detection area, so as to reduce the distance between the center of the second detection area and the center of the detection light spot.
13. The alignment method according to claim 12, wherein the acquiring the position information of the center of the detection spot from the image information includes: acquiring contour information of the detection light spot image according to the image information; and acquiring the position information of the center of the detection light spot according to the profile information.
14. The alignment method of claim 8, wherein the second detector is an area array detector, or a TDI detector and the TDI detector is juxtaposed in an area array mode.
15. The alignment method according to claim 1, wherein before the second detector collects the second signal light of the second detection region, the optical spot alignment method further comprises: and enabling the surface of the object to be detected to be positioned at the focal plane of the detection device.
16. The alignment method according to claim 1, wherein the optical apparatus includes a plurality of the detection devices;
the alignment method further includes: the alignment method according to any one of claims 1 to 15, wherein a positional relationship between the first detection region and the detection spot of each of the detection devices is adjusted to the alignment position.
17. A method of detecting an optical device, comprising:
adjusting the positional relationship to an alignment position by the alignment method according to any one of claims 1 to 15;
and after the position relation is adjusted to the alignment position, detecting the object to be detected through the detection device to obtain the detection information of the object to be detected.
18. A detection apparatus, comprising:
the device comprises a light source, a first light source and a second light source, wherein the light source is used for emitting detection light to an object to be detected, the detection light forms a detection light spot on the surface of the object to be detected, and the detection light spot forms first signal light through the surface of the object to be detected;
the detection device comprises a first detector and a lens, wherein a light sensing surface of the first detector is configured to form a first detection area on the surface of the object to be detected through the lens, and the first detector is configured to detect first signal light of the first detection area through the lens;
control means for causing the detection means to collect the first signal light of the first detection region in different positional relationships;
the processing system is used for acquiring the light intensity of the first signal light under different position relations according to the first signal light; acquiring a position relation when the first signal light has the maximum light intensity as an alignment position, wherein the position relation is a relative position of the detection light spot and the first detection area; adjusting the position relation between the first detection area and the detection light spot to the alignment position; the control device is further configured to adjust a positional relationship between the first detection region and the detection light spot to the alignment position.
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