[go: up one dir, main page]

CN113503835A - Large-size hollow shaft integrated angle sensor with four uniformly distributed reading heads - Google Patents

Large-size hollow shaft integrated angle sensor with four uniformly distributed reading heads Download PDF

Info

Publication number
CN113503835A
CN113503835A CN202110767377.XA CN202110767377A CN113503835A CN 113503835 A CN113503835 A CN 113503835A CN 202110767377 A CN202110767377 A CN 202110767377A CN 113503835 A CN113503835 A CN 113503835A
Authority
CN
China
Prior art keywords
shaft
ball
dense
reading heads
circular grating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202110767377.XA
Other languages
Chinese (zh)
Inventor
刘喜平
霍国亮
徐玮珩
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jiujiang Precision Measuring Technology Research Institute
Original Assignee
Jiujiang Precision Measuring Technology Research Institute
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jiujiang Precision Measuring Technology Research Institute filed Critical Jiujiang Precision Measuring Technology Research Institute
Priority to CN202110767377.XA priority Critical patent/CN113503835A/en
Publication of CN113503835A publication Critical patent/CN113503835A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/26Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)

Abstract

The utility model provides a four equipartition reading heads jumbo size quill shaft integral type angle sensor, includes the dense pearl axle sleeve, install the dense pearl axle in the dense pearl axle sleeve, the upper end push pedal is installed to the upper end of dense pearl axle, and the circular grating is installed to the upper end of going up the push pedal, 4 reading heads are installed to the outer lane upper end equipartition of dense pearl axle sleeve, radial steel ball is installed through well retainer between the inboard of dense pearl axle sleeve and the dense pearl axle, install down the steel ball through the lower retainer between the lower extreme of dense pearl axle sleeve and the dense pearl axle, install the steel ball through last retainer between the upper end of dense pearl axle sleeve and the upper end push pedal, the transition axle is installed to the lower extreme of dense pearl axle. The invention can filter small axial runout by connecting the transition shaft with the ball-sealing shaft, and can eliminate the radial runout of the circular grating in real time by 4 uniformly distributed reading heads, thereby realizing compensation on the circular grating in both axial and radial directions.

Description

Large-size hollow shaft integrated angle sensor with four uniformly distributed reading heads
Technical Field
The invention belongs to the field of angle sensor testing and application, and relates to a large-size hollow shaft integrated angle sensor with four uniformly distributed reading heads.
Background
Common angle sensors include circular gratings, synchronizers, time gratings, rotary transformers, etc., wherein the circular gratings are widely applied to the fields of precision instruments, precision positioning, high-precision machining, etc. as a precision measuring tool.
According to the cooperation mode angle sensor of circular grating and reading head can divide into two kinds: (1) an integrated angle sensor with a built-in bearing; (2) a split angle sensor without built-in bearings. Most of the most common angle sensors are split, i.e. without built-in bearings.
The integrated angle sensor has the advantages that the position relation between the circular grating and the reading head is fixed by manufacturers when the integrated angle sensor leaves factory, only two external mechanical interfaces are provided, the stator flange of the outermost ring is connected with a user base, the rotor flange of the inner ring is connected with a user spindle, radial and axial runout of the circular grating do not need to be adjusted, the position relation between the reading head and the circular grating does not need to be adjusted, and the integrated angle sensor is convenient and efficient to use; split type angle sensor, when user's in-service use, circle grating and reading head are the components of a whole that can function independently, need user oneself to install circle grating to adjust radial and axial beat, after the beat error adjustment of two directions finishes, readjust the position relation between reading head and the circle grating, mechanical assembly work just calculates to accomplish after whole work is accomplished.
The existing main problems are as follows: 1) for the application occasions with the hollow diameter larger than phi 150mm, the existing integrated angle sensor can not meet the use requirements and can only be realized by selecting a split type angle sensor circular grating, the circular grating has a large optional size range, and the common size range is phi 30 mm-phi 400mm, so that for the hollow application with the diameter of more than phi 150mm, a self-made precision shaft system can be matched with the split type circular grating to form the integrated angle sensor for use; 2) due to manufacturing and installation errors, deviation exists between the actual output precision of the circular grating and the system precision of the circular grating, and the circular grating error mainly has two aspects: (1) intrinsic causes, namely, circular grating systematic errors, including circular grating manufacturing errors and signal processing circuit errors; (2) the external causes, namely, the installation shafting errors include the jitter error of the use shafting and the installation error of the circular grating.
In the using process, errors caused by internal reasons cannot be changed, only errors caused by external reasons can be corrected, and the prior measures for correcting the circular grating errors are as follows: (1) correcting the eccentric error of the circular grating by using a dial indicator under the condition that the external shaft system is fixed; (2) and (3) measuring the reading of the circular grating rotating for one circle by using the autocollimator and the polygon, and correcting the system error of the circular grating by using the measured data. (3) Because the circular grating is installed with an eccentric error, the system error is difficult to eliminate by depending on a single reading head, and the system error caused by radial runout of the grating is often eliminated in real time by using a plurality of reading heads in a high-precision angle measuring system.
Disclosure of Invention
The invention aims to provide a large-size hollow shaft integrated angle sensor with four uniformly distributed reading heads, and aims to solve the problems in the background art; correcting radial errors of the circular grating in real time by adopting 4 uniformly distributed reading heads; meanwhile, the transition shaft is adopted to realize indirect connection with an external main shaft, and small axial runout can be isolated.
The technical scheme includes that the large-size hollow shaft integrated angle sensor with four uniformly distributed reading heads comprises a dense ball shaft sleeve, a dense ball shaft is mounted in the dense ball shaft sleeve, an upper stop push plate is mounted at the upper end of the dense ball shaft, a circular grating is mounted at the upper end of the upper stop push plate, 4 reading heads are uniformly mounted at the upper end of an outer ring of the dense ball shaft sleeve, radial steel balls are mounted between the inner side of the dense ball shaft sleeve and the dense ball shaft through a middle retainer, lower steel balls are mounted between the lower end of the dense ball shaft sleeve and the dense ball shaft through a lower retainer, upper steel balls are mounted between the upper end of the dense ball shaft sleeve and the upper stop push plate through an upper retainer, and a transition shaft is mounted at the lower end of the dense ball shaft.
Furthermore, 4 reading heads are fixedly mounted at the upper end of the outer ring of the dense ball shaft sleeve, and the 4 reading heads are uniformly distributed on the periphery of the circular grating.
Furthermore, the lower end face of the upper stop push plate is fixedly connected with the upper end face of the ball-sealing shaft, the lower end face of the upper stop push plate is in surface contact with the upper steel ball points, and the upper end face of the upper stop push plate is fixedly provided with the circular grating.
Further, the lower end of the ball shaft is connected with the shaft end of the external input shaft through a transition shaft.
Advantageous effects
Compared with the prior art, the invention has the following advantages.
1. The invention is convenient to install and use, can be quickly disassembled and assembled, and is also beneficial to later maintenance;
2. the invention adopts a self-made dense-bead shaft system, combines the advantages of low cost and large optional size range of the circular grating, can reduce the use cost, expands the application range of the integrated angle sensor, and is beneficial to more stable precision of integral output.
Drawings
The present invention will be described in further detail with reference to the accompanying drawings.
FIG. 1 is a cross-sectional view of the present invention;
FIG. 2 is a top view of the structure of the present invention;
FIG. 3 is a schematic diagram of the front three-dimensional structure of the present invention;
FIG. 4 is a schematic representation of the reverse three-dimensional structure of the present invention;
FIG. 5 is a schematic three-dimensional structure of a transition shaft according to the present invention;
FIG. 6 is a schematic three-dimensional structure of a retainer in the present invention;
shown in the figure: 1. the reading head comprises a reading head body, 2 ball-sealing shaft sleeves, 3 lower retainers, 4 ball-sealing shafts, 5 transition shafts, 6 radial steel balls, 7 lower steel balls, 8 upper steel balls, 9 upper retainers, 10 middle retainers, 11 upper stop push plates and 12 circular gratings.
Detailed Description
The invention is further described with reference to the following examples and the accompanying drawings.
As shown in fig. 1-6, a four equipartition reading head jumbo size quill shaft integral type angle sensor, including dense pearl axle sleeve 2, install dense pearl axle 4 in the dense pearl axle sleeve 2, go up the end push pedal 11 is installed to the upper end of dense pearl axle 4, go up the end of end push pedal 11 and install circle grating 12, 4 reading heads 1 are installed to the outer lane upper end equipartition of dense pearl axle sleeve 2, radial steel ball 6 is installed through well retainer 10 between the inboard of dense pearl axle sleeve 2 and the dense pearl axle 4, install down steel ball 7 through lower retainer 3 between the lower extreme of dense pearl axle sleeve 2 and the dense pearl axle 4, install steel ball 8 through upper retainer 9 between the upper end of dense pearl axle sleeve 2 and the last end push pedal 11, transition axle 5 is installed to the lower extreme of dense pearl axle 4.
The upper end of the outer ring of the dense ball shaft sleeve 2 is fixedly provided with 4 reading heads 1, 4, and the reading heads 1 are uniformly distributed around the circular grating 12.
The lower end face of the upper stop push plate 11 is fixedly connected with the upper end face of the ball shaft 4, the lower end face of the upper stop push plate 11 is in surface contact with the upper steel balls 8, and the upper end face of the upper stop push plate 11 is fixedly provided with a circular grating 12.
The lower end of the ball shaft 4 is connected with the main shaft through a transition shaft 5.
The invention takes a dense ball shaft sleeve 2 as a main support, a dense ball shaft 4 is arranged in an inner hole of the dense ball shaft sleeve 2, an upper stop push plate 11 is arranged at the upper end of the dense ball shaft 4, a radial steel ball 6 and a lower steel ball 7 are arranged between the dense ball shaft sleeve 2 and the dense ball shaft 4, an upper steel ball 8 is arranged between the upper end of the dense ball shaft sleeve 2 and the upper stop push plate 11, an upper retainer 9, a middle retainer 10 and a lower retainer 3 are correspondingly arranged at the positions of the upper steel ball 8, the radial steel ball 6 and the lower steel ball 7 to limit the movement track of the steel balls, the dense ball shaft sleeve is formed by the above parts, and the stable precision of the circular grating 12 is ensured for external shafting input.
The circular grating 12 is directly installed at the upper end of the upper thrust plate 11, the eccentricity of the circular grating 12 is calibrated by a dial indicator, so that the output signal of the circular grating 12 is optimal, and the radial run-out error of the circular grating 12 can be reduced due to the omission of an intermediate transfer shaft.
4 reading heads 1 are uniformly distributed at the upper end of the outer ring of the dense-bead shaft sleeve, the radial distance between the reading heads 1 and the circular grating 12 is adjusted to enable grating signals to be strongest, and fixing screws are screwed down to enable 2 reading heads 1 to be in a group with the interval of 180 degrees, and the group is 2.
In order to filter out the small play quantity transmitted by the external shaft along the axial direction, an elastic transition shaft 5 is arranged on the lower end surface of the ball sealing shaft 4, and the transition shaft 5 is directly connected with the shaft end of the external input shaft, so that the ball sealing shaft 4 and the circular grating 12 are isolated to the maximum extent from the influence of the external shaft input interference factors.
When the device is specifically implemented, a dense ball shaft system is firstly installed, 3 groups of through holes on a lower retainer 3 are fully filled with a lower steel ball 7, and then the device is integrally sleeved at the bottom of a dense ball shaft sleeve 2, so that the lower steel ball 7 is in point contact with a thrust surface at the lower part of a dense ball shaft 4; radial steel balls 6 are fully filled in 3 groups of through holes of the middle retainer 10, and then the whole body is sleeved in the shaft diameter of the ball-packing shaft 4; sleeving the whole dense-bead shaft sleeve 2 into the outer side of the radial steel ball 6 from top to bottom, and enabling the lower end face of the dense-bead shaft sleeve 2 to be in point contact with the lower steel ball 7, and enabling the inner cylindrical surface of the dense-bead shaft sleeve 4 to be in point contact with the radial steel ball 6; and (3) filling 2 groups of through holes of the upper retainer 10 with upper steel balls 8, then integrally sleeving the outer circle of the ball-tight shaft 4, enabling the upper steel balls 8 to be in point contact with the upper end surface of the ball-tight shaft sleeve 2, and finally fixing the upper stop push plate 11 on the upper end surface of the ball-tight shaft 4 by using screws.
The ball-sealing shaft 4 and the upper stop push plate 11 form a rotor of a circular grating shaft system, the ball-sealing shaft sleeve 2 is a stator of the circular grating shaft system and supports the whole assembly, the ball-sealing shaft sleeve 2 is used as a reference, and the rotor of the circular grating shaft system is restricted to one degree of freedom and is only allowed to rotate around an axis.
Fixing the circular grating 12 on the upper end face of the upper stop push plate 11 by using a screw, and repeatedly calibrating the eccentricity of the circular grating to +/-0.002 mm by using a dial gauge before the screw is screwed down; then, the radial distances between the 4 reading heads 1 and the circular grating 12 are sequentially adjusted to optimize the signal intensity of the reading heads 1, so that the output accuracy of the circular grating 12 can be ensured to be optimal.
The lower end face of the dense ball shaft 4 is provided with a transition shaft 5, the transition shaft 5 is rigidly connected with an external shaft system, the transition shaft 5 isolates small deformation of the external shaft system, the runout amounts of the dense ball shaft 4 and the upper stop push plate 11 only depend on the runout of the dense ball shaft system, and the stability of the output precision of the circular grating 12 is not influenced by the runout of the external shaft system.
In the engineering implementation process, the outer flange of the dense ball shaft sleeve 2 is connected with a frame or a base of an external shaft system, the lower end face of the dense ball shaft 4 is provided with a transition shaft 5 with tiny elasticity, the transition shaft 5 is connected with the shaft end of the external shaft system, and the tiny change quantity of the external shaft in the axial direction can be filtered while the external shaft angle information is transmitted by means of the characteristics of the transition shaft 5.
Through the 4 uniformly distributed reading heads 1, the radial runout of the circular grating 12 is corrected in real time, and 2 reading heads in the 4 reading heads are divided into 2 groups at intervals of 180 degrees; the incremental signal values of 2 reading heads in one group are added and divided by 2 to obtain a value A1, the incremental signal values of 2 reading heads in the other group are added and divided by 2 to obtain a value A2, and the value A3 is obtained by adding A1 and A2 and dividing by 2 again to obtain a value A3 which is the final required circular grating output value.
The invention effectively filters two external interference factors of axial runout and radial runout, and can ensure the stable output of the circular grating and the self system precision.
The bearing is a nonstandard bearing, is of a large hollow structure, and is also suitable for a blind hole structure.
The angle measuring sensor installed in the invention is a circular grating and is also suitable for axial compensation of a circular induction synchronizer and a rotary transformer.

Claims (4)

1. An integrated angle sensor with four evenly distributed reading heads and a large-size hollow shaft comprises a dense ball shaft sleeve (2, it is characterized in that a ball-sealing shaft (4) is arranged in the ball-sealing shaft sleeve (2), an upper stop push plate (11) is arranged at the upper end of the ball-sealing shaft (4), a circular grating (12) is arranged at the upper end of the upper stop push plate (11), 4 reading heads (1) are uniformly arranged at the upper end of the outer ring of the dense ball shaft sleeve (2), radial steel balls (6) are arranged between the inner side of the dense ball shaft sleeve (2) and the dense ball shaft (4) through a middle retainer (10), a lower steel ball (7) is arranged between the lower end of the ball sealing shaft sleeve (2) and the ball sealing shaft (4) through a lower retainer (3), an upper steel ball (8) is arranged between the upper end of the ball sealing shaft sleeve (2) and the upper stop push plate (11) through an upper retainer (9), and a transition shaft (5) is arranged at the lower end of the ball sealing shaft (4).
2. The angle sensor with four uniformly distributed reading heads and a large-size hollow shaft as one whole as claimed in claim 1, wherein 4 reading heads (1) are fixedly mounted at the upper end of the outer ring of the dense ball shaft sleeve (2), and the 4 reading heads (1) are uniformly distributed around the circular grating (12).
3. The angle sensor with the four uniformly distributed reading heads and the large-size hollow shaft as the whole as the claim 1, wherein the lower end surface of the upper stop push plate (11) is fixedly connected with the upper end surface of the ball-sealing shaft (4), the lower end surface of the upper stop push plate (11) is in surface contact with the point surfaces of the plurality of upper steel balls (8), and the upper end surface of the upper stop push plate (11) is fixedly provided with the circular grating (12).
4. The angle sensor integrated with the four uniformly distributed reading heads, the large-size hollow shaft and the shaft as claimed in claim 1 is characterized in that the lower end of the ball shaft (4) is connected with the shaft end of an external input shaft through a transition shaft (5).
CN202110767377.XA 2021-07-07 2021-07-07 Large-size hollow shaft integrated angle sensor with four uniformly distributed reading heads Pending CN113503835A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110767377.XA CN113503835A (en) 2021-07-07 2021-07-07 Large-size hollow shaft integrated angle sensor with four uniformly distributed reading heads

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202110767377.XA CN113503835A (en) 2021-07-07 2021-07-07 Large-size hollow shaft integrated angle sensor with four uniformly distributed reading heads

Publications (1)

Publication Number Publication Date
CN113503835A true CN113503835A (en) 2021-10-15

Family

ID=78011971

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110767377.XA Pending CN113503835A (en) 2021-07-07 2021-07-07 Large-size hollow shaft integrated angle sensor with four uniformly distributed reading heads

Country Status (1)

Country Link
CN (1) CN113503835A (en)

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040206894A1 (en) * 2003-04-21 2004-10-21 Mitsubishi Denki Kabushiki Kaisha Optical rotary encoder
WO2007097350A1 (en) * 2006-02-21 2007-08-30 Nikon Corporation Position measuring device and position measuring method, mobile body driving system and mobile body driving method, pattern forming device and pattern forming method, exposure device and exposure method, and device manufacturing method
CN101608933A (en) * 2009-07-10 2009-12-23 贵阳新天光电科技有限公司 High-precision angular indexing dynamic measuring spindle system
CN201697610U (en) * 2010-04-09 2011-01-05 九江精密测试技术研究所 Dense ball type precision rotating mechanism for manual portable type coordinate measuring machine
CN202382724U (en) * 2011-12-30 2012-08-15 北京中科恒业中自技术有限公司 Angle measuring instrument
US20120283978A1 (en) * 2009-11-09 2012-11-08 National Institute Of Advanced Industrial Science And Technology Axis run-out measuring method and angle detecting device with self-calibration function having axis run-out measuring function
CN110081837A (en) * 2019-05-20 2019-08-02 中国科学院光电技术研究所 A method of by detecting shafting shaking and eccentric error using angle measurement Circular gratings and reading head
CN111551107A (en) * 2020-05-20 2020-08-18 九江精密测试技术研究所 Circular induction synchronizer for compensating axial movement
CN212158464U (en) * 2020-05-13 2020-12-15 九江精密测试技术研究所 Circular grating compensation device
CN215447793U (en) * 2021-07-07 2022-01-07 九江精密测试技术研究所 Integrated angle sensor suitable for large-size hollow shaft

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040206894A1 (en) * 2003-04-21 2004-10-21 Mitsubishi Denki Kabushiki Kaisha Optical rotary encoder
WO2007097350A1 (en) * 2006-02-21 2007-08-30 Nikon Corporation Position measuring device and position measuring method, mobile body driving system and mobile body driving method, pattern forming device and pattern forming method, exposure device and exposure method, and device manufacturing method
CN101608933A (en) * 2009-07-10 2009-12-23 贵阳新天光电科技有限公司 High-precision angular indexing dynamic measuring spindle system
US20120283978A1 (en) * 2009-11-09 2012-11-08 National Institute Of Advanced Industrial Science And Technology Axis run-out measuring method and angle detecting device with self-calibration function having axis run-out measuring function
CN201697610U (en) * 2010-04-09 2011-01-05 九江精密测试技术研究所 Dense ball type precision rotating mechanism for manual portable type coordinate measuring machine
CN202382724U (en) * 2011-12-30 2012-08-15 北京中科恒业中自技术有限公司 Angle measuring instrument
CN110081837A (en) * 2019-05-20 2019-08-02 中国科学院光电技术研究所 A method of by detecting shafting shaking and eccentric error using angle measurement Circular gratings and reading head
CN212158464U (en) * 2020-05-13 2020-12-15 九江精密测试技术研究所 Circular grating compensation device
CN111551107A (en) * 2020-05-20 2020-08-18 九江精密测试技术研究所 Circular induction synchronizer for compensating axial movement
CN215447793U (en) * 2021-07-07 2022-01-07 九江精密测试技术研究所 Integrated angle sensor suitable for large-size hollow shaft

Similar Documents

Publication Publication Date Title
CN206440228U (en) Adjustable diaphragm type coupler centering detector
CN103148818B (en) A kind of high accuracy gyroscope motor bearing loading method
CN102338165B (en) Reflection type control method for monitoring angular displacement of turnable bearing
CN102658502A (en) Optical indexing system of circular grating of precise shaft system
CN103267480B (en) A kind of single flank engagement measuring apparatus of gear error
CN215447793U (en) Integrated angle sensor suitable for large-size hollow shaft
CN101915562A (en) Calibrating device for tilt angle sensor
CN105312964A (en) Detection method and detection device for rotation precision of precision machine tool spindle
CN106643438A (en) Centering method of driving shaft and driven shaft used for installation of rotation equipment
CN109387177A (en) A kind of contact angle measuring method of nonstandard angular contact ball bearing
CN212158464U (en) Circular grating compensation device
CN201340249Y (en) Radial runout survey meter for dial external spline gear ring
CN118392077B (en) Online measuring instrument and measuring method for angular deviation of tooth surfaces of duplex gear shafts
CN113503835A (en) Large-size hollow shaft integrated angle sensor with four uniformly distributed reading heads
CN214149110U (en) Shaft centering tool
CN109623358B (en) Coaxiality adjusting mechanism for coping with thin short shaft
CN201364158Y (en) Laser line marking instrument
CN111561862B (en) A device for testing and compensating the axial deformation of circular grating
CN212158465U (en) Circular induction synchronizer assembly
CN203488166U (en) Calibration device of borehole clinometer
CN216410096U (en) Multi-angle sensor verification tool
CN201593976U (en) Inner hole detection device
CN213090624U (en) Device for 3D Error Measurement of Multi-axis Machine Tool Spindle Based on Ballbar
CN203375931U (en) Single-side engagement measure apparatus for error of face gear
CN209295877U (en) A kind of measuring device of nonstandard bearing contact angle

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination