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CN111561862B - A device for testing and compensating the axial deformation of circular grating - Google Patents

A device for testing and compensating the axial deformation of circular grating Download PDF

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Publication number
CN111561862B
CN111561862B CN202010402410.4A CN202010402410A CN111561862B CN 111561862 B CN111561862 B CN 111561862B CN 202010402410 A CN202010402410 A CN 202010402410A CN 111561862 B CN111561862 B CN 111561862B
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China
Prior art keywords
shaft
grating
tested
bearing seat
measured
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CN202010402410.4A
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CN111561862A (en
Inventor
刘喜平
刘学强
董恒
江训协
曾悠兵
徐玮珩
肖小刚
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Jiujiang Precision Measuring Technology Research Institute
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Jiujiang Precision Measuring Technology Research Institute
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/30Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/042Calibration or calibration artifacts

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Devices, Machine Parts, Or Other Structures Thereof (AREA)

Abstract

The circular grating axial deformation testing and compensating device comprises a tested bearing seat arranged in a base, a tested shaft is arranged in the tested bearing seat, a tested bearing is fixedly arranged between the tested bearing seat and the tested shaft through a tested shaft bearing cover and a tested shaft nut, one end of the tested shaft is connected with a handle, the other end of the tested shaft is connected with a transition shaft, the transition shaft is connected with one end of a grating shaft through an elastic shaft, the grating shaft is sleeved with a grating bearing seat, the grating shaft and the grating bearing seat are fixedly provided with a grating bearing through a grating shaft bearing cover and a grating shaft nut, the other end of the grating shaft is connected with a grating seat, a circular grating is sleeved on the grating seat, the outer side of the circular grating is provided with a reading head seat and a reading head which are arranged on the end face of the grating bearing seat, and 6 gaskets are uniformly distributed between the base and the tested bearing seat. When the output precision of the circular grating is tested, the gasket is arranged between the tested bearing seat and the base so as to simulate the variation of the tested shaft system along the axial direction due to the influence of temperature.

Description

Circular grating axial deformation testing and compensating device
Technical Field
The invention relates to a device for testing and compensating axial deformation of a circular grating.
Background
The common angle sensor comprises a circular grating, a circular induction synchronizer, a time grating, a rotary transformer and the like, wherein the circular grating is used as a precise measuring tool and has wide application in the fields of precise instruments, coordinate measurement, precise positioning, high-precision precise machining and the like. The method mainly comprises the steps of (1) reducing the eccentric error of the circular grating by using a dial indicator as much as possible under the condition that a measured shaft system is certain, and (2) measuring the reading of the circular grating rotated by a circle of the measured shaft by using an autocollimator and a polygon, and correcting the system error existing in the shaft system by using measured data. However, the method is only suitable for the condition that the ambient temperature of the measured shaft system is constant and the system error output of the measured shaft system is stable. For example, in the development process of the inertial navigation test equipment, the incubator and the inner frame are fixed frequently, and the working table surface for installing the inertial navigation is positioned in the incubator, so that the temperature of the incubator is raised and lowered to deform the frame fixed with the incubator, further the tested shaft is driven to deform axially, and finally the circular grating moves axially and radially, so that the output precision of the circular grating under the working condition is unstable and inaccurate.
Disclosure of Invention
The invention aims to provide a device for testing and compensating axial deformation of a circular grating so as to solve the problems in the background technology.
The technical scheme adopted for achieving the purpose is that the circular grating axial deformation testing and compensating device comprises a tested bearing seat arranged in a base, a tested shaft is arranged in the tested bearing seat, a tested bearing is fixedly arranged between the tested bearing seat and the tested shaft through a tested shaft bearing cover and a tested shaft nut, one end of the tested shaft is connected with a handle, the other end of the tested shaft is connected with a transition shaft, the transition shaft is connected with one end of the grating shaft through an elastic shaft, a grating bearing seat fixed on the base is sleeved on the grating shaft, a grating bearing is fixedly arranged between the grating shaft and the grating bearing seat through a grating shaft bearing cover and the grating shaft nut, a grating seat is connected with the other end of the grating shaft, a circular grating is sleeved on the grating seat, a reading head seat and a reading head arranged on the end face of the grating bearing seat are arranged on the outer side of the circular grating, and 6 gaskets are uniformly distributed between the base and the tested bearing seat.
The elastic shaft comprises a grating shaft connecting end, groove structures are symmetrically connected to two sides of the grating shaft connecting end, the groove structures are connected with transition shaft connecting lugs, and the elastic shaft is a coupler which is deformable in the axial direction and can transmit the rotation angle of a measured shaft in the circumferential tangential direction.
In the invention, the 6 gaskets are 6 equal-height gaskets arranged between the bearing seat and the base to be tested and are used for simulating the variation of the axial extension or shortening of the shaft to be tested.
Advantageous effects
Compared with the prior art, the invention has the following advantages.
1. According to the invention, before the circular grating is formally installed on the equipment, the deformation of the measured shaft along the axial direction can be simulated, interference factors can be truly output to a part connected with the measured shaft, and the output precision of the circular grating assembly can be timely verified;
2. According to the invention, a transition shaft and an elastic shaft are added between the tested shaft and the grating shaft, and the axial interference from the tested shaft is filtered by utilizing the characteristics of the elastic shaft;
3. The invention adds a set of independent precise shafting for the circular grating, further isolates the interference factors from the tested shaft, and can ensure the output precision of the circular grating by only improving the rotation precision of the circular grating shafting and the installation precision of the circular grating.
Drawings
FIG. 1 is a schematic view of a three-dimensional cross-sectional structure of a front end of the present invention;
FIG. 2 is a schematic view of a three-dimensional cross-sectional structure of a rear end of the present invention;
FIG. 3 is a front end three-dimensional view of the present invention;
FIG. 4 is a back end three-dimensional view of the present invention;
FIG. 5 is a three-dimensional view of the elastic shaft of the present invention;
FIG. 6 is a three-dimensional view of a base in the present invention;
The device is characterized by comprising a gasket 1, a base 2, a handle 3, a measured shaft 4, a measured shaft bearing cover 5, a measured bearing seat 6, a measured bearing 7, a measured shaft nut 8, a transitional shaft 9, a transitional shaft 10, an elastic shaft 11, a grating shaft 12, a grating bearing 13, a grating bearing seat 14, a reading head 15, a reading head 16, a round grating 17, a grating seat 18, a grating shaft nut 19, a grating shaft bearing cover 101, a grating shaft connecting end 102, a groove structure 103 and a transitional shaft connecting lug.
Detailed Description
The invention is further described with reference to the following detailed drawings in order to make the technical means, the creation characteristics, the achievement of the purpose and the effect of the implementation of the invention easy to understand.
The device for testing and compensating the axial deformation of the circular grating comprises a tested bearing seat 6 arranged in a base 2, wherein a tested shaft 4 is arranged in the tested bearing seat 6, a tested bearing 7 is fixedly arranged between the tested bearing seat 6 and the tested shaft 4 through a tested shaft bearing cover 5 and a tested shaft nut 8, one end of the tested shaft 4 is connected with a handle 3, the other end of the tested shaft 4 is connected with a transition shaft 9, the transition shaft 9 is connected with one end of a grating shaft 11 through an elastic shaft 10, a grating bearing seat 13 is sleeved on the grating shaft 11, a grating bearing 12 is fixedly arranged between the grating shaft 11 and the grating bearing seat 13 through a grating shaft bearing cover 19 and a grating shaft nut 18, the other end of the grating shaft 11 is connected with a grating seat 17, a circular grating 16 is sleeved on the grating seat 17, a reading head 14 is arranged on one side of the reading head 14, and 6 gaskets 1 are uniformly distributed between the base 2 and the tested bearing seat 6.
The elastic shaft 10 comprises a grating shaft connecting end 101, groove structures 102 are symmetrically connected to two sides of the grating shaft connecting end 101, the groove structures 102 are connected with transition shaft connecting lugs 103, and the elastic shaft 10 is a coupler which is deformable in the axial direction and can transfer the rotation angle of a measured shaft in the circumferential tangential direction.
The 6 gaskets 1 are 6 equal-height gaskets arranged between the bearing seat 6 to be tested and the base 2 and are used for simulating the variation of the axial extension or shortening of the shaft to be tested.
In the simulation of the actual working condition, the deformation of the measured shaft in the axial direction is 0.05-0.2 mm due to temperature change, the deformation is transmitted to the transition shaft, and the elastic shaft is arranged between the transition shaft and the grating shaft to isolate the deformation transmitted by the measured shaft in the axial direction so as to prevent the deformation from affecting the precision of the circular grating. And an independent precise circular grating shaft system is added for the circular grating assembly, so that the rotation precision of the circular grating shaft system and the installation precision of the circular grating are improved, and the output precision of the circular grating can be improved and stabilized.
In the method, when the gasket 1 is specifically manufactured, 4 groups of gaskets 1 are firstly manufactured, each group of gaskets 1 is 6 gaskets with equal thickness, the thicknesses of the 4 groups of gaskets 1 are respectively 0.05mm,0.1mm,0.15mm and 0.2mm, when the output precision of a round grating is tested, the 4 groups of gaskets 1 are sequentially arranged between a tested bearing seat 6 and a base 2so as to simulate the change amount of a tested shaft system along the axial direction due to the influence of temperature, a pair of precise tested bearings 7 are arranged in the tested bearing seat 6, the tested shaft 4 is arranged in the tested bearing 7, the tested bearing 7 is axially fixed by a tested shaft bearing cover 5 and a tested shaft nut 8 respectively, a handle 3 is arranged at the left end of the tested shaft 4 so as to conveniently rotate the tested shaft 4, a transition shaft 9 is arranged at the right end of the tested shaft 4 so as to transfer all information of the tested shaft 4 to a grating shaft 11, in order to filter the axial direction of the tested shaft 4, an elastic shaft 10 is arranged between the transition shaft 9 and the grating shaft 11 so as to simulate the change amount of the tested shaft, the grating bearing seat 10 is conveniently arranged in the middle of the transition shaft so as to protect the grating shaft 11, the grating bearing seat 11 is arranged at the right end of the grating seat 12, the grating bearing seat 16 is prevented from being interfered by the grating bearing seat 12, and the grating head 13 is arranged at the right end of the grating bearing seat 12, the grating bearing seat 16 is fixedly arranged at the right end of the grating bearing seat 16, and the grating bearing seat 16 is fixedly arranged at the position of the optimal position of the grating bearing seat 16, and the grating bearing seat is prevented from being interfered by the grating bearing seat 16, and the grating head 13 is fixedly arranged at the position of the end 13, and the optimal position is the position is fixed by the grating seat 17, and the grating bearing seat is 13 is fixedly arranged at the end 13, and the position has the best, and the best position has the grating bearing seat is used for the grating seat 1.
In the concrete use of the invention, the base 2 is fixed on the ground, a group of gaskets 1 and a tested bearing seat 6 are sequentially arranged at the left end of the base 2, a pair of tested bearings 7 are arranged in the tested bearing seat 6, the inner ring of the tested bearings 7 is inserted into the tested shaft 4 and axially locks the inner ring of the tested bearings 7 by two tested shaft nuts 8, the tested shaft bearing cover 5 and the tested bearing seat 6 are fixed and compress the outer ring of the tested bearings 7, the handle 3 is arranged at the left end of the tested shaft 4, the transition shaft 9 is arranged at the right end of the tested shaft 4, and the rotary motion of the tested shaft 4 is transmitted rightward.
The right end of the base 2 is fixed with a grating bearing seat 13, a pair of precise grating bearings 12 are arranged in inner holes of the grating bearing seat 13, the inner holes of the grating bearings 12 are inserted into a grating shaft 11, the grating shaft 11 is axially locked by a grating shaft nut 18, the ring of the grating bearings 12 is fixed on the tight grating shaft 11, and then a grating shaft bearing cover 19 is fixed with the grating bearing seat 13 and compresses the outer ring of the grating bearings 12 to prevent the grating bearings 12 from axially moving.
The method comprises the steps of fixing a grating seat 17 at the shaft end of a grating shaft 11, fixing a round grating 16 on the outer circle of the grating seat 17, continuously calibrating radial runout of the grating seat 17 to be within +/-0.001 mm by using a dial indicator in the installation process, and recalibrating the radial runout and the end runout of the round grating 16 on the basis of the radial runout and the end runout of the round grating 16, and adjusting the runout of the round grating 16 to be minimum according to the use requirement.
The end face of the grating bearing seat 13 is provided with a reading head seat 14 and a reading head 15, the height of the reading head seat 14 is firstly processed in place according to the requirement in the installation process, then the reading head 15 and the reading head seat 14 are fixed, and the position of the reading head seat 14 is continuously adjusted in the radial direction and the tangential direction of the circular grating 16, so that the relative position of the reading head 15 and the circular grating 16 is optimal, and meanwhile, the output signal of the reading head 15 is optimal.
An elastic shaft 10 is arranged between the transition shaft 9 and the grating shaft 11, two independent shaft systems are connected, and the axial variation of the measured shaft 4 can be filtered while the angle information of the measured shaft 4 is transmitted by the characteristics of the elastic shaft 10.
Because of the condition limitation, only 4 axial change test states can be simulated discretely, in the actual use process, the axial change is continuous, not 4 independent states, and it can be expected that even if the axial change is continuous, the circular grating component with the elastic shaft and the independent shaft system can filter the axial change within +/-0.2 mm, so as to finish the stable output of the circular grating signal.
The grating bearing 12 used in the present invention is a standard bearing and is equally applicable to the replacement of a standard bearing with a dense ball bearing.
The angular sensing device in the present invention is a circular grating, and a circular sensing synchronizer is also suitable for such applications.
The invention simulates the deformation of the measured shaft 4 along the axial direction in the actual working condition by adjusting the thickness of each group of gaskets 1, so that the deformation is transmitted along the axial direction, a set of independent precise shafting is added for the circular grating 16 in order to stabilize the output precision of the circular grating 16, the circular grating 16 is arranged on the grating shaft 11 through the grating seat 17, in addition, the deformation transmitted along the axial direction of the measured shaft 4 is isolated through the elastic shaft 10, the grating shaft 11 only receives the angle information from the measured shaft 4, and the output precision of the grating is stabilized by the grating shafting precision.

Claims (1)

1.一种圆光栅轴向变形量测试和补偿装置,包括安装在基座(2)内的被测轴承座(6),其特征在于,所述被测轴承座(6)内安装有被测轴(4),被测轴承座(6)与被测轴(4)之间经被测轴轴承盖(5)和被测轴螺母(8)固定安装有被测轴承(7),所述被测轴(4)的一端连接有手柄(3),被测轴(4)的另一端连接过渡轴(9),过渡轴(9)经弹性轴(10)与光栅轴(11)的一端连接,所述光栅轴(11)上套装有固定在基座(2)上的光栅轴承座(13),光栅轴(11)与光栅轴承座(13)之间经光栅轴轴承盖(19)和光栅轴螺母(18)固定安装有光栅轴承(12),所述光栅轴(11)的另一端连接有光栅座(17),光栅座(17)上套装有圆光栅(16),圆光栅(16)外侧设有安装在光栅轴承座(13)端面上的读数头座(14)和读数头(15);所述基座(2)与被测轴承座(6)之间均布有6个垫片(1);所述弹性轴(10)包括光栅轴连接端(101),光栅轴连接端(101)的两侧对称连接有沟槽结构(102),沟槽结构(102)连接过渡轴连接耳(103);所述弹性轴(10)是一种轴向可变形的,并且圆周切向可传递被测轴旋转角度的联轴器;所述的6个垫片(1)是安装在被测轴承座(6)和基座(2)之间的6个等高垫片,用来模拟被测轴沿轴向伸长或缩短的变化量。1. A circular grating axial deformation testing and compensation device, comprising a measured bearing seat (6) installed in a base (2), characterized in that a measured shaft (4) is installed in the measured bearing seat (6), a measured bearing (7) is fixedly installed between the measured bearing seat (6) and the measured shaft (4) via a measured shaft bearing cover (5) and a measured shaft nut (8), one end of the measured shaft (4) is connected to a handle (3), the other end of the measured shaft (4) is connected to a transition shaft (9), the transition shaft (9) is connected to one end of a grating shaft (11) via an elastic shaft (10), a grating bearing seat (13) fixed on the base (2) is sleeved on the grating shaft (11), a grating bearing (12) is fixedly installed between the grating shaft (11) and the grating bearing seat (13) via a grating shaft bearing cover (19) and a grating shaft nut (18), the grating shaft (11) The other end is connected to a grating seat (17), a circular grating (16) is mounted on the grating seat (17), and a reading head seat (14) and a reading head (15) are arranged on the outer side of the circular grating (16) and are mounted on the end surface of the grating bearing seat (13); six gaskets (1) are evenly distributed between the base (2) and the measured bearing seat (6); the elastic shaft (10) includes a grating shaft connecting end (101), and groove structures (102) are symmetrically connected on both sides of the grating shaft connecting end (101), and the groove structures (102) are connected to the transition shaft connecting ears (103); the elastic shaft (10) is an axially deformable coupling that can transmit the rotation angle of the measured shaft in the circumferential tangential direction; the six gaskets (1) are six equal-height gaskets installed between the measured bearing seat (6) and the base (2), and are used to simulate the change in the axial extension or shortening of the measured shaft.
CN202010402410.4A 2020-05-13 2020-05-13 A device for testing and compensating the axial deformation of circular grating Active CN111561862B (en)

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CN112556874A (en) * 2020-12-29 2021-03-26 广东精铟海洋工程股份有限公司 Assembly method of fiber bragg grating distributed sensing device for measuring bearing temperature

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106563975A (en) * 2016-07-08 2017-04-19 环球工业机械(东莞)有限公司 High-locating-precision measuring device of rotary workbench
CN212158464U (en) * 2020-05-13 2020-12-15 九江精密测试技术研究所 Circular grating compensation device

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4028246A1 (en) * 1990-09-06 1992-03-19 Edgar Beier Contactless measurement arrangement for torque and/or rotation angle - measures rotation angle between rotatable bodies transferred via transmission system to two further bodies
TWI529371B (en) * 2011-09-08 2016-04-11 Wen Fung Liu Fiber grating rotary angle meter
CN102658502A (en) * 2012-05-23 2012-09-12 北京理工大学 Optical indexing system of circular grating of precise shaft system
CN105628487B (en) * 2015-12-23 2018-08-10 吉林大学 Combined load pattern power electric heating coupling material performance in-situ test instrument and method
CN106153224B (en) * 2016-06-28 2018-12-18 大连理工大学 A kind of fiber grating distributed devices and method measuring bearing ring temperature and strain
CN110514234A (en) * 2018-05-21 2019-11-29 中国科学院深圳先进技术研究院 A mounting fixture for a circular grating
CN109282986A (en) * 2018-11-14 2019-01-29 北京工业大学 Plastic gear transmission error test bench
CN109506560A (en) * 2018-12-12 2019-03-22 上海卫星装备研究所 Round induction synchrometer dynamic testing angle precision caliberating device and its scaling method
CN109969427B (en) * 2019-04-11 2021-04-30 北京工业大学 Load simulation platform with deformation compensation function

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106563975A (en) * 2016-07-08 2017-04-19 环球工业机械(东莞)有限公司 High-locating-precision measuring device of rotary workbench
CN212158464U (en) * 2020-05-13 2020-12-15 九江精密测试技术研究所 Circular grating compensation device

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