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CN113421774B - Clamp for manufacturing capacitor from graphene suspension film - Google Patents

Clamp for manufacturing capacitor from graphene suspension film Download PDF

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Publication number
CN113421774B
CN113421774B CN202110688927.9A CN202110688927A CN113421774B CN 113421774 B CN113421774 B CN 113421774B CN 202110688927 A CN202110688927 A CN 202110688927A CN 113421774 B CN113421774 B CN 113421774B
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graphene suspension
suspension film
end cover
groove
capacitor
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CN113421774A (en
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李隆
杨霖
侯成宇
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Harbin University of Science and Technology
Harbin Institute of Technology Shenzhen
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Harbin University of Science and Technology
Harbin Institute of Technology Shenzhen
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00Fixed capacitors; Processes of their manufacture
    • H01G4/002Details
    • H01G4/005Electrodes
    • H01G4/008Selection of materials
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00Fixed capacitors; Processes of their manufacture
    • H01G4/30Stacked capacitors
    • H01G4/306Stacked capacitors made by thin film techniques

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  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Carbon And Carbon Compounds (AREA)

Abstract

一种将石墨烯悬浮膜制成电容的夹具,本发明涉及一种将石墨烯悬浮膜制成电容的夹具,为解决现有的电容两极板间距无法尽可能的小会影响所制作的电容的容值大小;石墨烯悬浮膜和引出线的接触电阻大会影响电容变化时电荷的输出;引出线的厚度会增加电容两极板之间距离,且不能保证两极板平行的问题,上端盖与下端盖固定安装,负极板安装在下端盖内,附着有石墨烯悬浮膜的硅片安装在下端盖的第一凹槽内,且石墨烯悬浮膜一侧朝向第一凹槽的底面,薄片安装在石墨烯悬浮膜与第一凹槽底面之间,正极引出线与石墨烯悬浮膜连接,在硅片和上端盖之间安装有柔性材料,本夹具用于在石墨烯悬浮膜制成电容正极板时对其进行固定,属于夹具领域。

Figure 202110688927

A clamp for making a graphene suspension film into a capacitor, the present invention relates to a clamp for making a graphene suspension film into a capacitor, in order to solve the problem that the distance between the two pole plates of the existing capacitor cannot be as small as possible, which will affect the capacitance of the made capacitor. The size of the capacitance; the contact resistance of the graphene suspension film and the lead wire will affect the output of the charge when the capacitance changes; the thickness of the lead wire will increase the distance between the two pole plates of the capacitor, and the problem that the two pole plates cannot be guaranteed to be parallel, the upper end cap and the lower end cap Fixed installation, the negative plate is installed in the lower end cover, the silicon wafer attached with the graphene suspension film is installed in the first groove of the lower end cover, and the graphene suspension film side faces the bottom surface of the first groove, and the sheet is installed in the graphite Between the graphene suspension film and the bottom surface of the first groove, the positive lead wire is connected to the graphene suspension film, and a flexible material is installed between the silicon wafer and the upper end cap. This fixture is used when the graphene suspension film is made into a capacitor positive plate Fixing it belongs to the field of fixtures.

Figure 202110688927

Description

一种将石墨烯悬浮膜制成电容的夹具A jig for making graphene suspension film into capacitor

技术领域technical field

本发明涉及一种将石墨烯悬浮膜制成电容的夹具,属于夹具领域。The invention relates to a clamp for making a graphene suspension film into a capacitor, and belongs to the field of clamps.

背景技术Background technique

随着石墨烯性能被广大科研工作者发掘,石墨烯的用途越来越多,其中用石墨烯薄膜优异的机械和电气性能制作电容式拾音器成为了其中一个研究热点。As the properties of graphene are explored by the majority of scientific researchers, graphene has more and more uses. Among them, the use of graphene films with excellent mechanical and electrical properties to make capacitive pickups has become one of the research hotspots.

目前石墨烯悬浮膜的制备需要有载体,一般来说载体都是硅片,在硅片上打孔后,在有孔部分制备石墨烯薄膜,形成悬浮膜,如果想利用这样的石墨烯悬浮膜制作成电容式拾音器,需要将带有石墨烯悬浮膜的硅片制作成电容正极板,尤其要设计一个正极板的正极引出线。以及制作一个电容器金属材质的下极板,并且要制作一个绝缘垫片将石墨烯悬浮膜和负极板隔开,目前遇到的难以解决的问题是:At present, the preparation of graphene suspension film requires a carrier. Generally speaking, the carrier is a silicon wafer. After drilling holes on the silicon wafer, a graphene film is prepared in the perforated part to form a suspension film. If you want to use such a graphene suspension film To make a capacitive pickup, it is necessary to make a silicon wafer with a graphene suspension film into a capacitor positive plate, especially to design a positive lead wire of the positive plate. As well as making a capacitor metal lower plate, and making an insulating gasket to separate the graphene suspension film from the negative plate, the difficult problems encountered at present are:

1、石墨烯悬浮膜半径很小,导致电容正极板面积很小,形成的电容容值很小,为了增大电容,目前可以增加石墨烯悬浮膜的直径,或者减小电容两极板之间的距离,但石墨烯悬浮膜的直径不能无限制的增大,所以目前现有的文献中是将电容两极板之间的距离减小至最小,为8微米,电容两极板之间的距离再小就容易因悬浮膜振动导致两极板之间的短路,由于8微米比较小,为了电容两极板不被电场击穿,两极板之间能够承受的直流偏置电压就会比较小,从而直接影响输出的电荷量和所制作的电容的容值大小。1. The radius of the graphene suspension film is very small, resulting in a small area of the positive plate of the capacitor, and the resulting capacitance value is very small. In order to increase the capacitance, the diameter of the graphene suspension film can be increased at present, or the gap between the two electrode plates of the capacitor can be reduced. distance, but the diameter of the graphene suspension film cannot be increased indefinitely, so in the current literature, the distance between the two polar plates of the capacitor is reduced to a minimum, which is 8 microns, and the distance between the two polar plates of the capacitor is smaller. It is easy to cause a short circuit between the two pole plates due to the vibration of the suspended membrane. Since 8 microns is relatively small, in order to prevent the two pole plates of the capacitor from being broken down by the electric field, the DC bias voltage that can withstand between the two pole plates will be relatively small, which directly affects the output. The amount of charge and the capacitance of the capacitor made.

2、石墨烯悬浮膜是电容的正极,悬浮膜和正极引出线的接触电阻非常大,影响电容变化时产生的电荷的输出。2. The graphene suspension film is the positive electrode of the capacitor. The contact resistance between the suspension film and the positive electrode lead-out line is very large, which affects the output of the charge generated when the capacitance changes.

3、用传统方式接正极引出线,正极引出线一般具有一定厚度,会导致电容两极板之间距离过大,且不能保证两极板之间平行。3. Connect the positive lead wire in the traditional way. The positive lead wire generally has a certain thickness, which will cause the distance between the two polar plates of the capacitor to be too large, and the parallel between the two polar plates cannot be guaranteed.

综上所述,存在以下问题:In summary, the following problems exist:

1、现有的电容两极板间距无法尽可能的小会影响所制作的电容的容值大小。1. The distance between the two electrode plates of the existing capacitor cannot be as small as possible, which will affect the capacitance value of the produced capacitor.

2、石墨烯悬浮膜作为电容的正极,石墨烯悬浮膜和正极引出线的接触电阻非常大,在电容变化时会影响电荷的输出。2. The graphene suspension film is used as the positive electrode of the capacitor. The contact resistance between the graphene suspension film and the positive electrode lead wire is very large, which will affect the output of the charge when the capacitance changes.

3、用传统方式接正极引出线,会因为正极引出线有一定的厚度导致电容两极板之间距离过大,且不能保证两极板之间平行。3. Connecting the positive lead wire in the traditional way will cause the distance between the two polar plates of the capacitor to be too large due to the certain thickness of the positive lead wire, and the parallel between the two polar plates cannot be guaranteed.

发明内容SUMMARY OF THE INVENTION

本发明为解决上述问题,进而提供一种将石墨烯悬浮膜制成电容的夹具。In order to solve the above-mentioned problems, the present invention further provides a clamp for making the graphene suspension film into a capacitor.

本发明采取的技术方案是:The technical scheme adopted by the present invention is:

它包括上端盖、下端盖、负极板、薄片和正极引出线,上端盖与下端盖固定安装,负极板安装在下端盖内,上端盖包括板体和凸台,板体下表面的中心位置加工有凸台,板体的中心处加工有第一通孔,下端盖为圆柱体,圆柱体的上表面中心处上加工有第一凹槽,圆柱体的下表面上加工有第二通孔和两个第一正极孔,上端盖的凸台安装在下端盖的第一凹槽内,石墨烯悬浮膜附着在硅片上,附着有石墨烯悬浮膜的硅片安装在下端盖的第一凹槽的内部,且附着有石墨烯悬浮膜的硅片位于上端盖的凸台与第一凹槽的内部底端面之间,硅片附着有石墨烯悬浮膜的一侧朝向下端盖中第一凹槽的底端面上,薄片的上表面上加工有第二凹槽和两个第二正极孔,第二凹槽位于薄片的中心处,两个第二正极孔位于第二凹槽的一侧,薄片固定安装在下端盖的第一凹槽的内部底端面上,且薄片位于石墨烯悬浮膜与第一凹槽的内部底端面之间,薄片的上表面与石墨烯悬浮膜相对设置,薄片的下表面与第一凹槽的内部底端面重合,每根正极引出线的一端均穿过下端盖下表面上的每个第一正极孔与石墨烯悬浮膜固定连接,且每根正极引出线均与石墨烯悬浮膜垂直设置,每根正极引出线的另一端均露出下端盖的下表面10mm,在硅片和上端盖之间安装有柔性材料。It includes an upper end cap, a lower end cap, a negative electrode plate, a thin sheet and a positive electrode lead wire. The upper end cap and the lower end cap are fixedly installed, the negative electrode plate is installed in the lower end cap, and the upper end cap includes a plate body and a boss. The center position of the lower surface of the plate body is processed There is a boss, the center of the plate body is machined with a first through hole, the lower end cover is a cylinder, the center of the upper surface of the cylinder is machined with a first groove, and the lower surface of the cylinder is machined with a second through hole and Two first positive holes, the boss of the upper end cover is installed in the first groove of the lower end cover, the graphene suspension film is attached to the silicon wafer, and the silicon wafer with the graphene suspension film attached is installed in the first concave of the lower end cover. Inside the groove, and the silicon wafer attached with the graphene suspension film is located between the boss of the upper end cover and the inner bottom end face of the first groove, and the side of the silicon wafer with the graphene suspension film attached faces the first concave in the lower end cover. On the bottom end face of the groove, the upper surface of the sheet is machined with a second groove and two second positive electrode holes, the second groove is located at the center of the sheet, and the two second positive electrode holes are located on one side of the second groove, The sheet is fixedly installed on the inner bottom end face of the first groove of the lower end cover, and the sheet is located between the graphene suspension film and the inner bottom end face of the first groove, the upper surface of the sheet is arranged opposite the graphene suspension film, and the sheet is arranged opposite to the graphene suspension film. The lower surface coincides with the inner bottom end face of the first groove, one end of each positive electrode lead wire is fixedly connected with the graphene suspension film through each first positive electrode hole on the lower surface of the lower end cover, and each positive electrode lead wire is Vertically arranged with the graphene suspension film, the other end of each positive lead wire is exposed 10mm from the lower surface of the lower end cap, and a flexible material is installed between the silicon wafer and the upper end cap.

本发明与现有技术相比具有以下效果:Compared with the prior art, the present invention has the following effects:

1、本夹具在下端盖的内部底端面上安装了薄片,薄片增大了介电常数,从而增加了电容的容值,使电容即使出现饱和情况也不会导致两极板短路,有利于所制作的电容式拾音器完成声电转换。1. The clamp is installed with a thin sheet on the inner bottom surface of the lower end cover. The thin sheet increases the dielectric constant, thereby increasing the capacitance of the capacitor, so that even if the capacitor is saturated, it will not cause a short circuit between the two poles, which is beneficial to the production of The condenser pickup completes the sound-electric conversion.

2、本夹具在石墨烯悬浮膜和正极引出线的接触处放置少量的柔性导电胶,保证了石墨烯悬浮膜和正极引出线的良好接触,增大了正极引出线和石墨烯悬浮膜的接触面积,起到减小接触电阻的作用,降低了正极引出线的厚度对电容两极板平行度的影响,由于柔性导电胶是柔性的,能够通过调整夹具上端盖和下端盖之间的螺钉对其挤压控制厚度,能够有效的减小石墨烯悬浮膜和正极引出线的接触电阻,在电容变化时降低了对电荷输出的影响程度,降低正极引出线的厚度对电容两极板平行度的影响。2. This fixture places a small amount of flexible conductive glue at the contact between the graphene suspension film and the positive electrode lead wire, which ensures the good contact between the graphene suspension film and the positive electrode lead wire, and increases the contact between the positive electrode lead wire and the graphene suspension film. It can reduce the contact resistance and reduce the influence of the thickness of the positive lead wire on the parallelism of the capacitor plates. Since the flexible conductive adhesive is flexible, it can be adjusted by adjusting the screws between the upper end cover and the lower end cover of the fixture. Extrusion to control the thickness can effectively reduce the contact resistance between the graphene suspension film and the positive electrode lead wire, reduce the influence on the charge output when the capacitance changes, and reduce the influence of the thickness of the positive electrode lead wire on the parallelism of the two electrode plates of the capacitor.

3、本夹具的下端盖上设置有第一正极孔,薄片上设置有第二正极孔,第一正极孔和第二正极孔中预埋着垂直于石墨烯悬浮膜的正极引出线,正极引出线的一端依次穿过第一正极孔和第二正极孔与薄片的上表面平齐,如此设置,是为了连接上端盖顶着的电容正极板,这样才能保证不会因正极引出线的厚度增加电容两极板之间的距离,本夹具用垂直方式接电容正极板的正极引出线,按需要控制正极引出线的长度,能够减小信号的损失;3. A first positive electrode hole is arranged on the lower end cover of the fixture, a second positive electrode hole is arranged on the sheet, and a positive electrode lead wire perpendicular to the graphene suspension film is pre-buried in the first positive electrode hole and the second positive electrode hole, and the positive electrode leads out. One end of the wire passes through the first positive electrode hole and the second positive electrode hole in turn and is flush with the upper surface of the sheet. This setting is to connect the capacitor positive plate against the upper end cap, so as to ensure that the thickness of the positive lead wire will not increase due to The distance between the two polar plates of the capacitor, the fixture is connected to the positive lead wire of the positive electrode plate of the capacitor in a vertical way, and the length of the positive lead wire is controlled as required, which can reduce the loss of the signal;

4、本夹具通过固定放置石墨烯悬浮膜的硅片,从而固定石墨烯悬浮膜,在石墨烯悬浮膜需要更换时更换放置石墨烯悬浮膜的硅片就可以,本夹具操作简单,易于学习,且可随时更换硅片;4. This fixture fixes the graphene suspension film by fixing the silicon wafer on which the graphene suspension film is placed. When the graphene suspension film needs to be replaced, the silicon wafer on which the graphene suspension film is placed can be replaced. The fixture is simple to operate and easy to learn. And the silicon wafer can be replaced at any time;

附图说明Description of drawings

图1是本夹具的主视图;Fig. 1 is the front view of this fixture;

图2是本夹具的侧视图;Figure 2 is a side view of the fixture;

图3是本夹具的后视图;Fig. 3 is the rear view of this clamp;

图4是本夹具的结构示意图;Fig. 4 is the structural representation of this fixture;

图5是上端盖1的结构示意图;5 is a schematic structural diagram of the upper end cap 1;

图6是下端盖2的前结构示意图;6 is a schematic view of the front structure of the lower end cover 2;

图7是下端盖2的后结构示意图;7 is a schematic diagram of the rear structure of the lower end cover 2;

图8是负极板3的结构示意图;8 is a schematic structural diagram of the negative plate 3;

图9是负极板3的侧视图;9 is a side view of the negative plate 3;

图10是薄片4的主视图;Figure 10 is a front view of the sheet 4;

图11是负极板3的后视图;11 is a rear view of the negative plate 3;

具体实施方式Detailed ways

具体实施方式一:结合图1-图11说明本实施方式,本实施方式所述一种将石墨烯悬浮膜制成电容的夹具,Embodiment 1: This embodiment is described with reference to FIG. 1-FIG. 11 , a fixture for making a graphene suspension film into a capacitor described in this embodiment,

它包括上端盖1、下端盖2、负极板3、薄片4和正极引出线A,上端盖1与下端盖2之间用螺钉固定安装,负极板3安装在下端盖2内,上端盖1包括板体1-1和凸台1-2,板体1-1下表面的中心位置加工有凸台1-2,板体1-1的中心处加工有第一通孔1-1-1,第一通孔1-1-1是为了让石墨烯悬浮膜能接收具有一定声强的声音信号,下端盖2为圆柱体,圆柱体的上表面中心处上加工有第一凹槽2-1,圆柱体的下表面上加工有第二通孔2-2和两个第一正极孔2-3,上端盖1的凸台1-2安装在下端盖2的第一凹槽2-1内,石墨烯悬浮膜7附着在硅片5上,附着有石墨烯悬浮膜7的硅片5安装在下端盖2的第一凹槽2-1的内部,附着有石墨烯悬浮膜7的硅片5位于上端盖1的凸台1-2与第一凹槽2-1的内部底端面之间,附着石墨烯悬浮膜7的硅片5中间有孔,因此形成石墨烯悬浮膜7,且除石墨烯悬浮膜7以外的部分还有附着在硅片5上的石墨烯薄膜,即石墨烯在硅片5上的覆盖面积较大,但只有中间的孔上是石墨烯悬浮膜7,如此设置,才能实现电容正极板的正极引出线A和石墨烯悬浮膜7接触,正极引出线A是不能直接与石墨烯悬浮膜7接触的,如果直接与石墨烯悬浮膜7接触会影响石墨烯悬浮膜7的振动,电容正极板为附着有石墨烯悬浮膜7的硅片5,这样设置有两个好处,一个是在加工的时候能够保证正极引出线A不超出薄片4的上表面,不会增加电容两极板之间的距离,另外一个好处是本夹具的直径是4cm左右,如果像负极板3一样引出,由于正极引出线A较长,对信号有一定的衰减作用,用垂直方式接电容正极板的正极引出线A,可以将正极引出线A长度控制在1cm以内,可以尽可能的减小信号的损失,在安装硅片5时,尽量保证硅片5中间的孔和夹具负极板3的圆形板体3-1同心,硅片5附着有石墨烯悬浮膜7的一侧朝向下端盖2中第一凹槽2-1的底端面上,目的是让正极引出线A接触到石墨烯悬浮膜7,形成电气通路,方便放置正极板的正极引出线A,薄片4上表面上加工有第二凹槽4-1和两个第二正极孔4-2,第二凹槽4-1位于薄片4的中心处,两个第二正极孔4-2位于第二凹槽4-1的一侧,薄片4固定安装在下端盖2的第一凹槽2-1的内部底端面上,且薄片4位于石墨烯悬浮膜7与第一凹槽2-1的内部底端面之间,薄片4的上表面与石墨烯悬浮膜7相对设置,目的是利用薄片4上表面第二凹槽4-1上的第四通孔4-1-2与石墨烯悬浮膜7的间距形成一个通气路径,只有保证石墨烯悬浮膜7上下都通气,夹具中间装夹的石墨烯悬浮膜7才能自由振动,由于为了增加电容容值,目前两极板距离非常小,薄片4可以避免由于石墨烯悬浮膜7振动导致的电容两极板短路;由于薄片4的存在增大了介电常数,从而增加了电容的容值,有利于电容式拾音器完成声电转换,薄片4的下表面与第一凹槽2-1的内部底端面重合,每根正极引出线A的一端均穿过下端盖2下表面上的每个第一正极孔2-3与石墨烯悬浮膜7固定连接,且每根正极引出线A均与石墨烯悬浮膜7垂直设置,将正极引出线A长度控制在1cm以内,可减小信号的损失,每根正极引出线A的另一端均露出下端盖2的下表面10mm,第一正极孔2-3和第二正极孔4-2中预埋着垂直于石墨烯悬浮膜的正极引出线A,正极引出线A的一端依次穿过第一正极孔2-3和第二正极孔4-2与薄片4的上表面平齐,如此设置,是防止每根正极引出线A被薄片4封闭导致绝缘,保证了每根正极引出线A和石墨烯悬浮膜7的良好接触,是为了连接上端盖1顶着的电容正极板,这样才能保证不会因正极引出线A的厚度增加电容两极板之间的距离,本夹具用垂直方式接电容正极板的正极引出线A,可以将正极引出线A长度控制在1cm以内,可减小信号的损失,在硅片5和上端盖1之间安装有柔性材料6,柔性材料6为2mm左右的泡沫材料,夹具除个别位置以外均为非金属结构,如树脂、尼龙、塑料等材料,选择非金属材质目的是不影响用石墨烯悬浮膜7制成的电容的杂散参数。It includes an upper end cover 1, a lower end cover 2, a negative electrode plate 3, a sheet 4 and a positive lead wire A. The upper end cover 1 and the lower end cover 2 are fixedly installed with screws, and the negative electrode plate 3 is installed in the lower end cover 2. The upper end cover 1 includes The plate body 1-1 and the boss 1-2, a boss 1-2 is machined at the center of the lower surface of the plate body 1-1, and a first through hole 1-1-1 is machined at the center of the plate body 1-1, The first through hole 1-1-1 is to allow the graphene suspension film to receive a sound signal with a certain sound intensity, the lower end cap 2 is a cylinder, and a first groove 2-1 is processed on the center of the upper surface of the cylinder. , a second through hole 2-2 and two first positive holes 2-3 are processed on the lower surface of the cylinder, and the boss 1-2 of the upper end cover 1 is installed in the first groove 2-1 of the lower end cover 2 , the graphene suspension film 7 is attached to the silicon wafer 5, the silicon wafer 5 attached with the graphene suspension film 7 is installed in the interior of the first groove 2-1 of the lower end cap 2, and the silicon wafer with the graphene suspension film 7 is attached 5 is located between the boss 1-2 of the upper end cap 1 and the inner bottom end face of the first groove 2-1, and there is a hole in the middle of the silicon wafer 5 to which the graphene suspension film 7 is attached, so that the graphene suspension film 7 is formed, and the The part other than the graphene suspension film 7 also has a graphene film attached to the silicon wafer 5, that is, the graphene covers a larger area on the silicon wafer 5, but only the middle hole is the graphene suspension film 7, so set In order to realize the contact between the positive lead A of the capacitor positive plate and the graphene suspension film 7, the positive lead A cannot directly contact the graphene suspension film 7, if it is directly in contact with the graphene suspension film 7 will affect the graphene suspension film. 7 vibration, the capacitor positive plate is a silicon wafer 5 attached with a graphene suspension film 7, which has two advantages. One is to ensure that the positive lead A does not exceed the upper surface of the sheet 4 during processing, and will not increase Another advantage of the distance between the two polar plates of the capacitor is that the diameter of the fixture is about 4cm. If it is drawn out like the negative plate 3, the positive lead A is long, which has a certain attenuation effect on the signal. Connect the positive electrode of the capacitor in a vertical way. For the positive lead A of the board, the length of the positive lead A can be controlled within 1cm, which can reduce the loss of the signal as much as possible. When installing the silicon wafer 5, try to ensure that the hole in the middle of the silicon wafer 5 and the clamp negative plate 3 The circular plate body 3-1 is concentric, and the side of the silicon wafer 5 attached with the graphene suspension film 7 faces the bottom end surface of the first groove 2-1 in the lower end cover 2, so that the anode lead wire A is in contact with the graphene. The suspension film 7 forms an electrical path, which is convenient for placing the positive lead A of the positive plate. The upper surface of the sheet 4 is machined with a second groove 4-1 and two second positive holes 4-2. The second groove 4-1 At the center of the sheet 4, two second positive holes 4-2 are located on one side of the second groove 4-1, and the sheet 4 is fixedly installed on the inner bottom end surface of the first groove 2-1 of the lower end cover 2, And the sheet 4 is located between the inner bottom end face of the graphene suspension film 7 and the first groove 2-1, and the upper surface of the sheet 4 is set relative to the graphene suspension film 7, and the purpose is to utilize the second groove 4 on the upper surface of the sheet 4. The distance between the fourth through hole 4-1-2 on -1 and the graphene suspension film 7 To form a ventilation path, only by ensuring that the graphene suspension film 7 is ventilated up and down, the graphene suspension film 7 clamped in the middle of the fixture can vibrate freely. Because in order to increase the capacitance value, the distance between the two polar plates is very small at present, and the sheet 4 can avoid the graphite The short circuit of the capacitor two-pole plate caused by the vibration of the alkene suspension film 7; due to the existence of the sheet 4, the dielectric constant is increased, thereby increasing the capacitance value of the capacitor, which is conducive to the completion of the acoustic-electric conversion of the capacitive pickup, and the lower surface of the sheet 4 and the first The inner bottom end face of the groove 2-1 overlaps, and one end of each positive lead wire A is fixedly connected with the graphene suspension film 7 through each first positive electrode hole 2-3 on the lower surface of the lower end cover 2, and each The positive lead wires A are arranged vertically with the graphene suspension film 7, and the length of the positive lead wires A is controlled within 1 cm, which can reduce the loss of the signal, and the other end of each positive lead wire A is exposed to the lower surface of the lower end cap 2 10mm , the first positive electrode hole 2-3 and the second positive electrode hole 4-2 are pre-embedded with a positive electrode lead wire A perpendicular to the graphene suspension film, and one end of the positive electrode lead wire A passes through the first positive electrode hole 2-3 and the first positive electrode hole 2-3 in turn. The second positive electrode hole 4-2 is flush with the upper surface of the sheet 4, and this arrangement prevents each positive electrode lead wire A from being closed by the sheet 4 to cause insulation, and ensures good contact between each positive electrode lead wire A and the graphene suspension film 7 , is to connect the capacitor positive plate on the upper end cover 1, so as to ensure that the distance between the two capacitor plates will not be increased due to the thickness of the positive lead A. This fixture is connected to the positive lead A of the capacitor positive plate in a vertical manner. The length of the positive lead wire A can be controlled within 1cm, which can reduce the loss of the signal. A flexible material 6 is installed between the silicon wafer 5 and the upper end cover 1. The flexible material 6 is a foam material of about 2mm, except for individual positions. They are all non-metallic structures, such as resin, nylon, plastic and other materials. The purpose of selecting non-metallic materials is not to affect the stray parameters of the capacitor made of the graphene suspension film 7.

具体实施方式二:结合图2说明本实施方式,本实施方式所述一种将石墨烯悬浮膜制成电容的夹具,每根正极引出线A与石墨烯悬浮膜7采用柔性导电胶连接,如此设置,保证每根正极引出线A与石墨烯悬浮膜7的良好接触,增大了正极引出线A和石墨烯悬浮膜7的接触面积,起到减小接触电阻的作用,至于少量导电胶的厚度问题,由于是柔性的,完全可以通过调整夹具上端盖1和下端盖2的螺钉挤压其厚度,在完成减小接触电阻的目的后,尽可能的降低对电容两极板平行度的影响,其它与具体实施方式一相同。Specific embodiment 2: This embodiment is described with reference to FIG. 2. A kind of fixture for making a graphene suspension film into a capacitor described in this embodiment, each positive lead A and the graphene suspension film 7 are connected by flexible conductive glue, so Setting, to ensure the good contact between each positive lead wire A and the graphene suspension film 7, increase the contact area of the positive electrode lead wire A and the graphene suspension film 7, play the role of reducing the contact resistance, as for a small amount of conductive glue The thickness problem, because it is flexible, can be adjusted by adjusting the screws of the upper end cover 1 and the lower end cover 2 of the fixture to squeeze its thickness. After the purpose of reducing the contact resistance is completed, the influence on the parallelism of the two polar plates of the capacitor can be reduced as much as possible. Others are the same as the first embodiment.

具体实施方式三:结合图5说明本实施方式,本实施方式所述一种将石墨烯悬浮膜制成电容的夹具,上端盖1为圆形,凸台1-2的直径小于板体1-1的直径,板体1-1的高度小于凸台1-2的高度,如此设置,如果板体1-1仅仅是个盖子,而没有一个凸台1-2,那么从上端盖1的板体1-1到下端盖2的底部均需要填充,填充材料越多,传递到硅片上的压力越不均匀,如此设置,降低了受力不均衡导致硅片碎裂的可能,其它与具体实施方式一或二相同。Embodiment 3: This embodiment will be described with reference to FIG. 5 . In this embodiment, a clamp for making a graphene suspension film into a capacitor, the upper end cover 1 is circular, and the diameter of the boss 1-2 is smaller than that of the plate body 1-2. 1, the height of the plate body 1-1 is less than the height of the boss 1-2, so set, if the plate body 1-1 is only a cover without a boss 1-2, then the plate body of the upper end cover 1 is 1-1 to the bottom of the lower end cap 2 all need to be filled. The more filling materials, the more uneven the pressure transmitted to the silicon wafer. This setting reduces the possibility of the unbalanced force causing the silicon wafer to crack. Others are related to the specific implementation. Method one or two are the same.

具体实施方式四:结合图5说明本实施方式,本实施方式所述一种将石墨烯悬浮膜制成电容的夹具,上端盖1的板体1-1的上表面上加工有多个第一螺纹通孔1-1-2,多个第一螺纹通孔1-1-2环型分布在第一通孔1-1-1的外侧,所述多个第一螺纹通孔1-1-2为四个,第一螺纹通孔1-1-2用来固定上端盖1和下端盖2,使之成为一体,其它与具体实施方式一、二或三相同。Specific Embodiment 4: This embodiment is described with reference to FIG. 5 . In this embodiment, a jig for making a graphene suspension film into a capacitor is machined on the upper surface of the plate body 1-1 of the upper end cover 1. Threaded through holes 1-1-2, a plurality of first threaded through holes 1-1-2 are annularly distributed on the outside of the first through holes 1-1-1, the plurality of first threaded through holes 1-1- 2 is four, and the first threaded through holes 1-1-2 are used to fix the upper end cap 1 and the lower end cap 2 to make them integral, and others are the same as in the first, second or third embodiment.

具体实施方式五:结合图6和图7说明本实施方式,本实施方式所述一种将石墨烯悬浮膜制成电容的夹具,下端盖2的圆柱体的上表面上环型加工有多个第二螺纹通孔2-4,第二螺纹通孔2-4用来固定上端盖1和下端盖2,第二螺纹通孔2-4与第一螺纹通孔1-1-2对应设置,圆柱体的下表面上还加工有多个通气孔2-5,多个通气孔2-5设置的目的是在石墨烯悬浮膜7接收声音信号的另一面形成通气的孔,是为了让石墨烯悬浮膜7在受到声音的冲击后能够自由振动,其它与具体实施方式一、二、三或四相同。Embodiment 5: The present embodiment will be described with reference to FIG. 6 and FIG. 7 . According to the present embodiment, a jig for making a graphene suspension film into a capacitor, the upper surface of the cylinder of the lower end cover 2 is annularly processed with a plurality of The second threaded through hole 2-4, the second threaded through hole 2-4 is used to fix the upper end cap 1 and the lower end cap 2, the second threaded through hole 2-4 is arranged corresponding to the first threaded through hole 1-1-2, A plurality of ventilation holes 2-5 are also processed on the lower surface of the cylinder. The purpose of setting the plurality of ventilation holes 2-5 is to form ventilation holes on the other side of the graphene suspension membrane 7 receiving the sound signal, in order to allow the graphene The suspension membrane 7 can vibrate freely after being impacted by sound, and the others are the same as those in the first, second, third or fourth embodiment.

具体实施方式六:结合图6和图7说明本实施方式,本实施方式所述一种将石墨烯悬浮膜制成电容的夹具,下端盖2上的第二通孔2-2包括圆形通孔2-2-1和长方形通孔2-2-2,圆形通孔2-2-1和长方形通孔2-2-2连通,第二通孔2-2用于安装负极板3,其它与具体实施方式一、二、三、四或五相同。Embodiment 6: This embodiment is described with reference to FIG. 6 and FIG. 7 . In this embodiment, a jig for making a graphene suspension film into a capacitor is described. The second through hole 2-2 on the lower end cover 2 includes a circular through hole. The hole 2-2-1 is connected with the rectangular through hole 2-2-2, the circular through hole 2-2-1 is connected with the rectangular through hole 2-2-2, and the second through hole 2-2 is used to install the negative plate 3. Others are the same as in the specific embodiment one, two, three, four or five.

具体实施方式七:结合图8和图9说明本实施方式,本实施方式所述一种将石墨烯悬浮膜制成电容的夹具,负极板3包括圆形板体3-1和长方形板体3-2,圆形板体3-1的圆周面和长方形板体3-2一端的短边侧面固定连接,长方形板体3-2另一端的上表面上加工有第三通孔3-2-1,第三通孔3-2-1的直径为3mm,目的是为方便电气接线,负极板3的圆形板体3-1镶嵌在下端盖2的第二通孔2-2内,负极板3镶嵌完成后与下端盖2的内部底面保持同一水平面,镶嵌方式可以是镶嵌到第二通孔2-2内用胶粘合固定,安装后对下端盖2的第一凹槽2-1的底端面进行打磨并露出负极板3,负极板3是导电良好的金属平板结构,由于要利用减小电容两极板间距离增大电容容值,所以要保证负极板3的表面粗糙度,尤其是平整度,表面粗糙度要高于微米级,其它与具体实施方式一、二、三、四、五或六相同。Embodiment 7: This embodiment will be described with reference to FIG. 8 and FIG. 9 , a fixture for making a graphene suspension film into a capacitor described in this embodiment, the negative plate 3 includes a circular plate body 3-1 and a rectangular plate body 3 -2, the circumferential surface of the circular plate body 3-1 is fixedly connected to the short side of one end of the rectangular plate body 3-2, and the upper surface of the other end of the rectangular plate body 3-2 is machined with a third through hole 3-2- 1. The diameter of the third through hole 3-2-1 is 3mm. The purpose is to facilitate electrical wiring. The circular plate body 3-1 of the negative plate 3 is embedded in the second through hole 2-2 of the lower end cover 2. After the plate 3 is inlaid, it is kept at the same level as the inner bottom surface of the lower end cover 2. The inlay method can be inlaid into the second through hole 2-2 and fixed with glue. After installation, the first groove 2-1 of the lower end cover 2 is installed. The bottom end surface of the capacitor is polished to expose the negative plate 3. The negative plate 3 is a metal plate structure with good electrical conductivity. Since the distance between the two electrode plates of the capacitor needs to be reduced to increase the capacitance value, the surface roughness of the negative plate 3 must be ensured, especially is the flatness, the surface roughness is higher than the micron level, and the others are the same as the specific embodiments one, two, three, four, five or six.

具体实施方式八:结合图10和图11说明本实施方式,本实施方式所述一种将石墨烯悬浮膜制成电容的夹具,薄片4上第二凹槽4-1包括一个圆形凹槽4-1-1和多个U形凹槽4-1-2,且每个U形凹槽4-1-2的一端均与圆形凹槽4-1-1连通,,每个U形凹槽4-1-2的另一端的底面上均加工有第四通孔4-1-3,每个第四通孔4-1-3均与每个通气孔2-5对应设置,如此设置,是为了让石墨烯悬浮膜7振动的时候,石墨烯悬浮膜7下面有个空气流通,其它与具体实施方式一、二、三、四、五、六或七相同。Embodiment 8: This embodiment is described with reference to FIG. 10 and FIG. 11. In this embodiment, a jig for making a graphene suspension film into a capacitor, the second groove 4-1 on the sheet 4 includes a circular groove 4-1-1 and a plurality of U-shaped grooves 4-1-2, and one end of each U-shaped groove 4-1-2 is communicated with the circular groove 4-1-1, and each U-shaped groove 4-1-2 is connected to the circular groove 4-1-1. Fourth through holes 4-1-3 are processed on the bottom surface of the other end of the groove 4-1-2, and each fourth through hole 4-1-3 is arranged corresponding to each ventilation hole 2-5, so that The setting is to make the graphene suspension film 7 vibrate, and there is an air circulation under the graphene suspension film 7, and the others are the same as the specific embodiment one, two, three, four, five, six or seven.

具体实施方式九:结合图10和图11说明本实施方式,本实施方式所述一种将石墨烯悬浮膜制成电容的夹具,薄片4的厚度为30μm,第二凹槽4-1的深度为20μm,其它与具体实施方式一、二、三、四、五、六、七或八相同。Embodiment 9: This embodiment is described with reference to FIG. 10 and FIG. 11 . In this embodiment, a jig for making a graphene suspension film into a capacitor, the thickness of the sheet 4 is 30 μm, and the depth of the second groove 4-1 is 30 μm. is 20 μm, and the others are the same as those in the specific embodiment one, two, three, four, five, six, seven or eight.

工作原理working principle

本夹具在使用时,将负极板3的圆形板体3-1镶嵌在下端盖2的第二通孔2-2内,安装完成后对下端盖2的第一凹槽2-1的底端面进行打磨并露出负极板3,将薄片4固定安装在下端盖2的第一凹槽2-1的底端面上,薄片4的下表面与下端盖2的第一凹槽2-1的底端面接触,薄片4上的每个第四通孔4-1-3均与每个通气孔2-5对应设置,石墨烯悬浮膜7附着在硅片5上,将附着有石墨烯悬浮膜7的硅片5安装在下端盖2的第一凹槽2-1的内部,且硅片5附着有石墨烯悬浮膜7的一侧朝向下端盖2中第一凹槽2-1的底端面上,薄片4位于石墨烯悬浮膜7与第一凹槽2-1的内部底端面之间,薄片4上的凹槽和孔均与石墨烯悬浮膜7对应设置,将每根正极引出线A的一端穿过下端盖2下表面上的每个第一正极孔2-3和薄片4的每个第二正极孔4-2与石墨烯悬浮膜7通过少量柔性导电胶垂直连接,每根正极引出线A的另一端露出下端盖2的下表面10mm,在硅片5和上端盖1之间安装有柔性材料6,将上端盖1通过螺钉与下端盖2固定安装,上端盖1的凸台1-2安装在下端盖2的第一凹槽2-1内,螺钉依次穿过上端盖1的第一螺纹通孔1-1-2和下端盖2的第二螺纹通孔2-4,完成安装。When the clamp is in use, the circular plate body 3-1 of the negative plate 3 is embedded in the second through hole 2-2 of the lower end cover 2, and after the installation is completed, the bottom of the first groove 2-1 of the lower end cover 2 is installed. The end face is polished and the negative electrode plate 3 is exposed, and the sheet 4 is fixedly installed on the bottom end face of the first groove 2-1 of the lower end cover 2. The lower surface of the sheet 4 is connected to the bottom of the first groove 2-1 of the lower end cover 2. The end faces are in contact, and each fourth through hole 4-1-3 on the sheet 4 is set corresponding to each ventilation hole 2-5, and the graphene suspension film 7 is attached to the silicon wafer 5, and the graphene suspension film 7 will be attached. The silicon wafer 5 is installed in the interior of the first groove 2-1 of the lower end cover 2, and the side of the silicon wafer 5 with the graphene suspension film 7 is attached to the bottom end surface of the first groove 2-1 in the lower end cover 2. , the sheet 4 is located between the graphene suspension film 7 and the inner bottom end face of the first groove 2-1, and the grooves and holes on the sheet 4 are set correspondingly with the graphene suspension film 7, and the One end passes through each first positive electrode hole 2-3 on the lower surface of the lower end cap 2 and each second positive electrode hole 4-2 of the sheet 4 is vertically connected with the graphene suspension film 7 through a small amount of flexible conductive glue, and each positive electrode leads out The other end of the line A is exposed 10mm from the lower surface of the lower end cap 2, a flexible material 6 is installed between the silicon wafer 5 and the upper end cap 1, the upper end cap 1 is fixedly installed with the lower end cap 2 by screws, and the boss 1 of the upper end cap 1 -2 is installed in the first groove 2-1 of the lower end cover 2, and the screws pass through the first threaded through hole 1-1-2 of the upper end cover 1 and the second threaded through hole 2-4 of the lower end cover 2 in sequence, and the completion of Install.

Claims (9)

1. The utility model provides a make anchor clamps of electric capacity with graphite alkene suspension film which characterized in that: the device comprises an upper end cover (1), a lower end cover (2), a negative plate (3), a sheet (4) and a positive lead-out wire (A);
the upper end cover (1) and the lower end cover (2) are fixedly installed, the negative plate (3) is installed in the lower end cover (2), the upper end cover (1) comprises a plate body (1-1) and a boss (1-2), the boss (1-2) is machined in the center of the lower surface of the plate body (1-1), a first through hole (1-1-1) is machined in the center of the plate body (1-1), the lower end cover (2) is a cylinder, a first groove (2-1) is machined in the center of the upper surface of the cylinder, a second through hole (2-2) and two first positive electrode holes (2-3) are machined in the lower surface of the cylinder, the boss (1-2) of the upper end cover (1) is installed in the first groove (2-1) of the lower end cover (2), and the graphene suspension film (7) is attached to a silicon wafer (5), the silicon wafer (5) attached with the graphene suspension film (7) is arranged inside a first groove (2-1) of the lower end cover (2), the silicon wafer (5) attached with the graphene suspension film (7) is positioned between a boss (1-2) of the upper end cover (1) and the inner bottom end face of the first groove (2-1), one side of the silicon wafer (5) attached with the graphene suspension film (7) faces the bottom end face of the first groove (2-1) in the lower end cover (2), a second groove (4-1) and two second positive electrode holes (4-2) are processed on the upper surface of the thin sheet (4), the second groove (4-1) is positioned at the center of the thin sheet (4), the two second positive electrode holes (4-2) are positioned at one side of the second groove (4-1), and the thin sheet (4) is fixedly arranged on the inner bottom end face of the first groove (2-1) of the lower end cover (2), and the sheet (4) is positioned between the graphene suspension film (7) and the inner bottom end face of the first groove (2-1), the upper surface of the sheet (4) is opposite to the graphene suspension film (7), the lower surface of the sheet (4) is superposed with the inner bottom end face of the first groove (2-1), one end of each positive lead wire (A) penetrates through each first positive hole (2-3) on the lower surface of the lower end cover (2) and is fixedly connected with the graphene suspension film (7), each positive lead wire (A) is perpendicular to the graphene suspension film (7), the other end of each positive lead wire (A) is exposed out of the lower surface of the lower end cover (2) by 10mm, and a flexible material (6) is arranged between the silicon wafer (5) and the upper end cover (1).
2. The fixture for manufacturing the capacitor from the graphene suspension film as claimed in claim 1, wherein: each positive lead-out wire (A) is connected with the graphene suspension film (7) by adopting flexible conductive adhesive.
3. The fixture for manufacturing the capacitor from the graphene suspension film as claimed in claim 1, wherein: the upper end cover (1) is circular, the diameter of the boss (1-2) is smaller than that of the plate body (1-1), and the height of the plate body (1-1) is smaller than that of the boss (1-2).
4. The fixture for manufacturing the capacitor from the graphene suspension film as claimed in claim 2, wherein: a plurality of first threaded through holes (1-1-2) are processed on the upper surface of a plate body (1-1) of the upper end cover (1), and the first threaded through holes (1-1-2) are distributed on the outer sides of the first through holes (1-1-1) in an annular mode.
5. The fixture for manufacturing the capacitor from the graphene suspension film as claimed in claim 1, wherein: a plurality of second threaded through holes (2-4) are annularly processed on the upper surface of the cylinder of the lower end cover (2), and a plurality of vent holes (2-5) are processed on the lower surface of the cylinder.
6. The clamp for manufacturing the graphene suspension film into the capacitor according to claim 1, wherein: the second through hole (2-2) on the lower end cover (2) comprises a circular through hole (2-2-1) and a rectangular through hole (2-2-2), and the circular through hole (2-2-1) is communicated with the rectangular through hole (2-2-2).
7. The fixture for manufacturing the capacitor from the graphene suspension film as claimed in claim 1, wherein: the negative plate (3) comprises a circular plate body (3-1) and a rectangular plate body (3-2), the circumferential surface of the circular plate body (3-1) is fixedly connected with the short side face of one end of the rectangular plate body (3-2), a third through hole (3-2-1) is processed on the upper surface of the other end of the rectangular plate body (3-2), and the negative plate (3) is fixedly installed in the second through hole (2-2) of the lower end cover (2).
8. The fixture for manufacturing the capacitor from the graphene suspension film as claimed in claim 1, wherein: the second groove (4-1) on the sheet (4) comprises a circular groove (4-1-1) and a plurality of U-shaped grooves (4-1-2), one end of each U-shaped groove (4-1-2) is communicated with the circular groove (4-1-1), a fourth through hole (4-1-3) is machined in the bottom face of the other end of each U-shaped groove (4-1-2), and each fourth through hole (4-1-3) is arranged corresponding to each vent hole (2-5).
9. The fixture for manufacturing the capacitor from the graphene suspension film as claimed in claim 8, wherein: the thickness of the thin sheet (4) is 30 μm, and the depth of the second groove (4-1) is 20 μm.
CN202110688927.9A 2021-06-21 2021-06-21 Clamp for manufacturing capacitor from graphene suspension film Expired - Fee Related CN113421774B (en)

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CN106060722A (en) * 2016-07-25 2016-10-26 北京塞宾科技有限公司 Graphene vibrating diaphragm, vibrating diaphragm manufacturing method and microphone including vibrating diaphragm
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