CN113203405A - Three-axis gyroscope - Google Patents
Three-axis gyroscope Download PDFInfo
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- CN113203405A CN113203405A CN202110565198.8A CN202110565198A CN113203405A CN 113203405 A CN113203405 A CN 113203405A CN 202110565198 A CN202110565198 A CN 202110565198A CN 113203405 A CN113203405 A CN 113203405A
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- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5691—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially three-dimensional vibrators, e.g. wine glass-type vibrators
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Abstract
本发明提供一种三轴陀螺仪，其包括：第一驱动框架，其能够沿X轴进行谐振运动；第二驱动框架，其与第一驱动框架平行且间隔预定距离，其能够沿X轴进行与第一驱动框架反向的谐振运动；耦接于第一驱动框架和第二驱动框架之间的X/Y陀螺结构；耦接于第一驱动框架和第二驱动框架之间且位于所述X/Y陀螺结构一侧的Z陀螺结构；其中，所述X/Y陀螺结构与所述Z陀螺结构相互独立，所述X/Y陀螺结构和Z陀螺结构均是由所述第一驱动框架和第二驱动框架共同驱动。所述三轴陀螺仪结构整体合理紧凑，集成度高，还可以减小正交误差，提高检测精度。
The present invention provides a three-axis gyroscope, comprising: a first driving frame capable of resonant motion along the X-axis; a second driving frame, parallel to the first driving frame and spaced apart by a predetermined distance, capable of performing resonant motion along the X-axis Resonant motion opposite to the first drive frame; X/Y gyro structure coupled between the first drive frame and the second drive frame; coupled between the first drive frame and the second drive frame and located in the The Z gyro structure on one side of the X/Y gyro structure; wherein, the X/Y gyro structure and the Z gyro structure are independent of each other, and both the X/Y gyro structure and the Z gyro structure are driven by the first driving frame Drive together with the second drive frame. The structure of the three-axis gyroscope is reasonable and compact as a whole, and the integration is high, and the quadrature error can also be reduced, and the detection accuracy can be improved.
Description
[ technical field ] A method for producing a semiconductor device
The invention relates to the technical field of micro mechanical systems, in particular to a three-axis gyroscope.
[ background of the invention ]
The gyroscope is a sensor for measuring angular rate, is one of core devices of the inertial technology, and plays an important role in the fields of modern industrial control, aerospace, national defense and military, consumer electronics and the like.
The development of a spinning top can be roughly divided into three stages:
the first stage is a traditional mechanical rotor gyro which has high precision and plays an irreplaceable role on military strategic weapons such as nuclear submarines, intercontinental strategic missiles and the like, but has larger volume, complex manufacturing process, high price, long period and unsuitability for batch production; the second stage is an optical detection gyroscope which mainly comprises a laser gyroscope and a fiber-optic gyroscope and mainly utilizes the Sagnac effect, and the optical detection gyroscope has the advantages of no rotating part, higher precision, important function in navigation and aerospace, larger volume, higher cost and difficult integration; the third stage is a micromechanical gyroscope which is developed in the 90 s of the 20 th century, the research of which is started later, but the micromechanical gyroscope is developed rapidly by virtue of the unique advantages of small volume, low power consumption, light weight, batch production, low price, strong overload resistance and integration, is suitable for civil fields of aircraft navigation, automobile manufacturing, digital electronics, industrial instruments and the like and modern national defense and military fields of unmanned aerial vehicles, tactical missiles, intelligent bombs, military aiming systems and the like, has wide application prospect and is more and more concerned by people.
With the increasing demand of the consumer market, the requirements on the size and the performance of a Micro-Electro-Mechanical System (MEMS) gyroscope are higher, the gyroscope is changed from a single-axis gyroscope to a three-axis gyroscope, the early three-axis gyroscope consists of three independent single-axis gyroscopes, and an independent driving structure is required to be included, so the overall structure size is large. In the current consumer-grade application, the gyroscope is generally a single-chip three-axis gyroscope and is characterized in that the driving is shared, and an X/Y/Z gyroscope mass block is reasonably arranged, but the three-axis gyroscope also has the problems of larger size, low integration level and large quadrature error.
Referring to the chinese invention patent CN108225295A, which discloses a three-axis gyroscope with tuning fork driving effect, the three-axis gyroscope structure disclosed in this patent designs a steering structure ingeniously, the left and right mass blocks are used for detecting the Y/Z axis angular rate, the central mass block is used for detecting the X axis angular rate, but obviously its integration level is not high, and the common mass block of the Y/Z mass blocks is easy to generate coupling; continuing to refer to the chinese invention patent CN110926445A, it discloses a three-axis MEMS gyroscope, the micro gyroscope structure disclosed in this patent is a shared drive, and its innovation point is that the design of the X/Y gyroscope structure is novel, and the X/Y gyroscope interacts and is arranged in the middle of the driving frame and is supported by the central anchor point, the Z-axis gyroscopes are distributed on both sides of the X/Y gyroscope and are connected to the middle gyroscope structure. The integrated structure is novel and reasonable in design and high in integration level, but the Z-axis gyroscope is not directly decoupled, and the problems of low sensitivity and large quadrature error can be faced.
Therefore, a new technical solution is needed to solve the problems of low integration level and large quadrature error of the three-axis gyroscope in the prior art.
[ summary of the invention ]
One of the objectives of the present invention is to provide a three-axis gyroscope with high integration and small quadrature error.
According to one aspect of the invention, there is provided a three-axis gyroscope comprising: a first drive frame capable of resonant motion along an X-axis; a second driving frame parallel to and spaced apart from the first driving frame by a predetermined distance, and capable of performing a resonant motion in a direction opposite to the first driving frame along the X-axis; an X/Y gyro structure connected between the first driving frame and the second driving frame; the Z gyroscope structure is connected between the first driving frame and the second driving frame and positioned on one side of the X/Y gyroscope structure; the X/Y gyroscope structure and the Z gyroscope structure are mutually independent, and the X/Y gyroscope structure and the Z gyroscope structure are driven by the first driving frame and the second driving frame together.
Compared with the prior art, the X/Y gyroscope structure and the Z gyroscope structure of the three-axis gyroscope are driven by the same two driving frames, and the X/Y gyroscope structure and the Z gyroscope structure are independent from each other. When the angular velocities in different directions are induced, the X/Y gyroscope structure and the Z gyroscope structure are independent from each other and do not influence each other due to the Coriolis effect, so that the orthogonal error can be reduced, and the detection precision is improved.
[ description of the drawings ]
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without inventive exercise. Wherein:
FIG. 1 is a schematic diagram of the overall structure of a three-axis gyroscope in one embodiment of the present invention;
FIG. 2 is a schematic structural view of the Z-center coupled beam 4i shown in FIG. 1 according to the present invention;
FIG. 3 is a schematic diagram of the tri-axis gyroscope of FIG. 1 in a driven state according to the present invention;
FIG. 4 is a schematic diagram of the three-axis gyroscope of FIG. 1 during X-axis detection according to the present invention;
FIG. 5 is a schematic diagram of the three-axis gyroscope of FIG. 1 during Y-axis detection according to the present invention;
FIG. 6 is a schematic view of the three-axis gyroscope of FIG. 1 during Z-axis detection according to the present invention;
FIG. 7 is an enlarged schematic view of the first drive frame region shown in FIG. 1;
FIG. 8 is an enlarged schematic view of the X/Y center-coupled beam region shown in FIG. 1;
fig. 9 is an enlarged schematic view of the Z mass region shown in fig. 1.
Wherein, 1 a-the upper drive frame (or first drive frame); 1 b-lower drive frame (or second drive frame);
2 a-upper mass Y (or first mass); 2 b-lower mass Y (or second mass); 2 c-left mass X (or third mass); 2 d-right mass X (or fourth mass); 2 e-upper mass Z (or first Z mass); 2 f-lower mass Z (or second Z mass); 2 g-upper detection frame (or first Z detection frame); 2 h-lower detection frame (or second Z detection frame);
3a.1-3 a.12-a first drive electrode; 3a.13-3 a.24-second drive electrodes; 3b.1 and 3b.2 — first drive feedback electrode; 3b.3 and 3 b.4-second drive feedback electrode; 3 c.1-a first Y-axis detection electrode, 3 c.2-a second Y-axis detection electrode; 3 d.1-a first X-axis detection electrode, 3 d.2-a second X-axis detection electrode; 3 e.1-3 e.16-a first Z-axis detection electrode, 3 e.17-3 e.32-a second Z-axis detection electrode;
4a.1 and 4 a.2-first drive frame support beam, 4a.3 and 4 a.4-second drive frame support beam; 4 b.1-a first X/Y drive coupling beam, 4 b.2-a second X/Y drive coupling beam; 4c.1 first Z-drive coupling beam, 4 c.2-second Z-drive coupling beam; 4 d.1-a first X/Y steering beam, 4 d.2-a second X/Y steering beam, 4 d.3-a third X/Y steering beam and 4 d.4-a fourth X/Y steering beam; 4 e.1-a first X/Y connecting beam, 4 e.2-a second X/Y connecting beam, 4 e.3-a third X/Y connecting beam, 4 e.4-a fourth X/Y connecting beam; 4f-X/YZ center coupling beam; 4 j.1-4 j.4-first Z connecting beam, 4 j.5-4 j.8-second Z connecting beam; 4h.1 and 4 h.2-sensing frame coupling beams; 4i-Z center coupling beam;
5a.1 and 5 a.2-first drive frame anchor, 5a.3 and 5 a.4-second drive frame anchor; 5 b.1-a first X/Y steering beam anchor point, 5 b.2-a second X/Y steering beam anchor point, 5 b.3-a third X/Y steering beam anchor point and 5 b.4-a fourth X/Y steering beam anchor point; 5 c.1-a first detection frame coupling beam anchor point, and 5 c.2-a second detection frame coupling beam anchor point; and 5d-Z center coupling beam anchor points.
[ detailed description ] embodiments
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
Reference herein to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic may be included in at least one implementation of the invention. The appearances of the phrase "in one embodiment" in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. Unless otherwise specified, the terms connected, and connected as used herein mean electrically connected, directly or indirectly.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "left", "right", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are only for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
In the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," "secured," "coupled," and the like are to be construed broadly; for example, the connection can be fixed, detachable or integrated; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other suitable relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
Aiming at the problems in the prior art, the invention provides a three-axis gyroscope. Fig. 1 is a schematic diagram of a three-axis gyroscope according to an embodiment of the present invention.
The three-axis gyroscope shown in fig. 1 includes a first drive frame 1a, a second drive frame 1b, an X/Y gyro structure, and a Z gyro structure. The first driving frame 1a can perform a resonant motion along the X-axis. The second driving frame 1b is parallel to and spaced apart from the first driving frame 1a by a predetermined distance, and is capable of performing a resonant motion along the X-axis in the opposite direction to the first driving frame 1 a. The X/Y gyro structure is connected between the first driving frame 1a and the second driving frame 1b, and is capable of sensing an X-axis angular velocity and a Y-axis angular velocity. The Z gyro structure is connected between the first driving frame 1a and the second driving frame 1b and located at one side of the X/Y gyro structure, and can sense a Z-axis angular velocity. The X/Y gyroscope structure and the Z gyroscope structure are independent of each other and are not directly connected with each other, and the X/Y gyroscope structure and the Z gyroscope structure are driven by the first driving frame 1a and the second driving frame 1b together. The three-axis gyroscope is reasonable and compact in structure and high in integration level. When the angular velocities in different directions are induced, the X/Y gyroscope structure and the Z gyroscope structure are independent from each other and do not influence each other due to the Coriolis effect, so that the orthogonal error can be reduced, and the detection precision is improved.
To better explain the structure of the three-axis gyroscope according to the present invention, a three-dimensional rectangular coordinate system may be established, and in the embodiment shown in fig. 1, in the plane where the base of the three-axis gyroscope is located, the direction parallel to the first driving frame 1a and the second driving frame 1b is taken as the X axis, the direction perpendicular to the first driving frame 1a and the second driving frame 1b is taken as the Y axis, the X axis and the Y axis are taken as coordinate axes to determine the Z axis, and the three-dimensional rectangular coordinate system established by the X axis, the Y axis and the Z axis is represented in fig. 1.
As shown in fig. 1, 7-9, the tri-axis gyroscope further comprises: first drive frame anchors 5a.1 and 5 a.2; first drive frame support beams 4a.1 and 4a.2 connected between the first drive frame anchor points 5a.1, 5a.2 and the first drive frame 1 a; second drive frame anchors 5a.3 and 5 a.4; second drive frame support beams 4a.3 and 4a.4 connected between second drive frame anchor points 5a.3 and 5a.4 and second drive frame 1 b; first drive electrodes 3a.1-3a.12 and first drive feedback electrodes 3b.1 and 3b.2 disposed within the first drive frame 1 a; second drive electrodes 3a.13-3a.24 and second drive feedback electrodes 3b.3 and 3b.4 arranged in a second drive frame 1 b.
The first drive electrodes 3a.1-3a.12, the first drive feedback electrodes 3b.1 and 3b.2, the second drive electrodes 3a.13-3a.24 and the second drive feedback electrodes 3b.3 and 3b.4 are fixedly arranged on a substrate (not shown), the first drive frame 1a is connected with first drive frame anchors 5a.1 and 5a.2 through first drive frame support beams 4a.1 and 4a.2, the first drive frame 1a and the first drive frame support beams 4a.1 and 4a.2 are suspended above the substrate, the second drive frame 1b is connected with second drive frame anchors 5a.3 and 5a.4 through second drive frame support beams 4a.3 and 4a.4, and the second drive frame 1b and the second drive frame support beams 4a.3 and 4a.4 are suspended above the substrate. The driving frames 1a and 1b and the driving frame support beams 4a.1-4a.4 are of the same thickness and are of a suspension structure, and the anchor points 5a.1-5a.4 are of a non-suspension structure and are directly connected with the substrate to play a supporting role.
In the particular embodiment shown in fig. 1 and 7-9, the first drive frame 1a and the second drive frame 1b are identical in construction and are symmetrically arranged about the X-axis (or distributed symmetrically up and down). The first driving frame 1a is connected with first driving frame anchor points 5a.1 and 5a.2 through first driving frame support beams 4a.1 and 4a.2 respectively, first driving electrodes 3a.1-3a.12 are sequentially arranged in the first driving frame 1a along an X-axis direction (or a left-right direction), and first driving feedback electrodes 3b.1 and 3b.2 are arranged between two adjacent first driving electrodes 3a.6 and 3a.7 in the first driving frame 1a along the X-axis direction. The second driving frame 1b is connected with second driving frame anchor points 5a.3 and 5a.4 through second driving frame support beams 4a.3 and 4a.4 respectively, the second driving electrodes 3a.13-3a.24 are sequentially arranged in the second driving frame 1b along the X-axis direction (or the left-right direction), and the second driving feedback electrodes 3b.3 and 3b.4 are arranged between two adjacent second driving electrodes 3a.18 and 3a.19 in the second driving frame 1b along the X-axis direction. The driving frame support beams 4a.1-4a.4 are all in the same U-shaped structure, the opening direction of the driving frame support beams is parallel to the Y axis, the driving frame support beams 4a.1 and 4a.3 are symmetrically distributed about the X axis, and the driving frame support beams 4a.2 and 4a.4 are symmetrically distributed about the X axis; the drive frame anchors 5a.1 and 5a.3 are symmetrically distributed about the X-axis and the drive frame anchors 5a.2 and 5a.4 are symmetrically distributed about the X-axis.
As shown in fig. 3, the first drive frame 1a is driven in a resonant motion along the X-axis by applying a drive voltage across the first drive electrodes 3a.1-3 a.12; the second drive frame 1b is driven in a resonant movement along the X-axis in the opposite direction to the first drive frame 1a by applying a drive voltage over the second drive electrodes 3a.13-3 a.24. Fig. 3 shows by way of example only one direction of movement of the first drive frame 1a and the second drive frame 1b along the X-axis. For a detailed scheme of applying a driving voltage to the driving electrode to drive the driving frame to perform a resonant motion along the X-axis, reference may be made to the related art, and details thereof will not be provided herein.
In one embodiment, the X/Y gyroscope structure comprises: the device comprises a first X/Y driving coupling beam 4b.1, a second X/Y driving coupling beam 4b.2, a first mass block 2a, a second mass block 2b, a third mass block 2c, a fourth mass block 2d, four steering beam anchor points 5 b.1-5 b.4 and four steering beams 4 d.1-4 d.4. The first mass block 2a, the second mass block 2b, the third mass block 2c and the fourth mass block 2d are respectively arranged at four positions, namely the upper position, the lower position, the left position and the right position of a central point A of the X/Y gyroscope structure, the first mass block 2a is arranged adjacent to the third mass block 2c and the fourth mass block 2d, the second mass block 2b is arranged adjacent to the third mass block 2c and the fourth mass block 2d, the first mass block 2a is connected with the first driving frame 1a through the first X/Y driving coupling beam 4b.1, and the second mass block 2b is connected with the second driving frame 2b through the second X/Y driving coupling beam 4 b.2. Each steering beam 5 b.1-5 b.4 is connected with a corresponding steering beam anchor point 4 d.1-4 d.4, and two adjacent mass blocks are connected through a corresponding steering beam. Wherein, when the first driving frame 1a performs a resonant motion along the X-axis and the second driving frame 1b performs a resonant motion along the X-axis in the opposite direction to the first driving frame 1a, the first driving frame 1a drives the first mass block 2a to perform resonant motion along the X axis through the first X/Y driving coupling beam 4b.1, the second driving frame 1b drives the second mass block 2b to perform resonant motion along the X axis in the opposite direction of the first mass block 2a through the second X/Y driving coupling beam 4b.2, the first mass block 2a and the second mass block 2b drive the third mass block 2c to perform resonant motion along the Y axis through the corresponding steering beams (e.g., steering beams 4d.1 and 4d.3), the fourth mass 2d is in turn driven by corresponding steering beams (e.g. steering beams 4d.2 and 4d.4) into a resonant movement along the Y-axis, opposite to the third mass 2 c. A certain number of damping holes can be arranged on the mass blocks 2 a-2 d of the X/Y gyroscope structure and used for reducing damping and improving the quality factor and the sensitivity of the gyroscope.
In one embodiment, the X/Y gyroscope structure further comprises: an X/Y center coupling beam 4f located at a center point A of the X/Y gyroscope structure; four X/Y connecting beams 4 e.1-4 e.4 respectively connected to the inner sides of the corresponding mass blocks, wherein each connecting beam is connected to the X/Y central coupling beam 4 f; a first Y-axis detection electrode 3c.1 disposed below the first mass block 2 a; a second Y-axis detection electrode 3c.2 disposed below the second mass block 2 b; a first X-axis detection electrode 3d.1 disposed below the third mass block 2 c; a second X-axis detection electrode 3d.2 arranged below the fourth mass block 2 d. When the input of the Y-axis angular velocity is sensed, the first mass block 2a and the second mass block 2b move reversely along the Z-axis direction, the first Y-axis detection electrode 3c.1 detects the distance change with the first mass block 2a, the second Y-axis detection electrode 3c.2 detects the distance change with the second mass block 2b, specifically, the capacitance of the first Y-axis detection electrode 3c.1 and the capacitance of the second Y-axis detection electrode 3c.2 which are sensitive to the Y-axis angular velocity are increased and decreased, the capacitance change caused by the Y-axis angular velocity is obtained by difference of the first Y-axis detection electrode 3c.1 and the second Y-axis detection electrode 3c.2, and the input Y-axis angular velocity is further obtained; when the input of the X-axis angular velocity is sensed, the third mass block 2c and the fourth mass block 2d are caused to move reversely along the Z-axis direction, the first X-axis detection electrode 3d.1 detects the distance change with the third mass block 2c, the second X-axis detection electrode 3d.2 detects the distance change with the fourth mass block 2d, specifically, the capacitance of the first X-axis detection electrode 3d.1 and the capacitance of the second X-axis detection electrode 3d.2 which are sensitive to the X-axis angular velocity are increased and decreased, the difference between the two capacitance changes caused by the X-axis angular velocity are obtained, and the input X-axis angular velocity is further obtained.
In the particular embodiment shown in fig. 1, the first and second X/Y drive coupling beams 4b.1 and 4b.2 are structurally identical and symmetrical about the X axis; the four mass blocks 2 a-2 d in the X/Y gyroscope structure have the same structure and respectively comprise a rectangular part and an isosceles trapezoid part; the four mass blocks 2 a-2 d are integrally symmetrical about the X axis and the Y axis; the four steering beams 4 d.1-4 d.4 are integrally symmetrical about the X axis and the Y axis; the four steering beam anchor points 5 b.1-5 b.4 are integrally symmetrical about the X axis and the Y axis; the X-axis detection electrodes 3d.1 and 3d.2, the Y-axis detection electrodes 3c.1 and 3c.2 and the steering beam anchor points 5 b.1-5 b.4 are fixedly arranged on the substrate; four mass blocks 2 a-2 d, four steering beams 4 d.1-4 d.4, X/Y driving coupling beams 4b.1 and 4b.2, an X/Y central coupling beam 4f and four X/Y connecting beams 4 e.1-4 e.4 of the X/Y gyroscope structure are suspended above the substrate. Four steering beams 4 d.1-4 d.4 are respectively positioned at four corners of a graph formed by four mass blocks 2 a-2 d in the X/Y gyroscope structure; the four steering beam anchor points 5 b.1-5 b.4 are respectively positioned at four corners of a graph formed by four mass blocks 2 a-2 d of the X/Y gyroscope structure; the four steering beams 4 d.1-4 d.4 are respectively connected with the four steering beam anchor points 5 b.1-5 b.4 in a one-to-one corresponding manner; two adjacent masses are connected by a corresponding one of the steering beams, for example, the X/Y steering beam 4d.1 connects the third mass 2c and the first mass 2a, the X/Y steering beam 4d.2 connects the first mass 2a and the fourth mass 2d, the X/Y steering beam 4d.3 connects the fourth mass 2d and the second mass 2b, and the X/Y steering beam 4d.4 connects the second mass 2b and the third mass 2 c.
In the specific embodiment shown in fig. 1, each steering beam 4 d.1-4 d.4 is a pentagon formed by a square with one corner removed, in each pentagon, one corner is connected with a corresponding steering beam block anchor point, and the other two corners adjacent to the corner are respectively connected with two corresponding adjacent mass blocks in the X/Y gyroscope structure. The X/Y central coupling beam 4f is of a concentric circle structure, and the center of the circle is the central point A of the X/Y gyroscope structure; the four X/Y connecting beams 4 e.1-4 e.4 are identical in structure, the four X/Y connecting beams 4 e.1-4 e.4 are symmetrical with respect to the X axis and the Y axis, and each X/Y connecting beam 4 e.1-4 e.4 comprises a plurality of hollow straight beam parts with the lengths gradually reduced from outside to inside and a connecting part for connecting the hollow straight beams; wherein the X/Y connection beams 4e.1 and 4e.2 located on the upper and lower sides of the X/Y center coupling beam 4f are placed in parallel with the X axis (or in the left-right direction, and the X/Y connection beams 4e.3 and 4e.4 located on the left and right sides of the X/Y center coupling beam 4f are placed in parallel with the Y axis (or in the up-down direction).
As shown in fig. 1, 7-9, the Z-gyro structure includes:
a first Z drive coupling beam 4c.1 and a second Z drive coupling beam 4 c.2;
a first Z detection frame 2g connected to the first driving frame 1a through a first Z driving coupling beam 4c.1, defining a first Z space therein;
a first Z mass block 2e which is positioned in the first Z space and connected with the first Z detection frame 2g through first Z connecting beams 4 j.1-4 j.4;
a second Z detection frame 2h connected to the second driving frame 1b through a second Z driving coupling beam 4c.2, defining a second Z space therein;
the second Z mass block 2f is positioned in the second Z space and is connected with the second Z detection frame 2h through second Z connecting beams 4 j.5-4 j.8;
when the first driving frame 1a performs resonant motion along the X axis and the second driving frame 1b performs resonant motion along the X axis in the direction opposite to the first driving frame 1a, the first driving frame 1a drives the first Z mass block 2e to perform resonant motion along the X axis through the first Z driving coupling beam 4c.1, the first Z detecting frame 2g and the first Z connecting beams 4 j.1-4 j.4, and the second driving frame 1b drives the second Z mass block 2f to perform resonant motion along the X axis in the direction opposite to the first Z mass block 2e through the second Z driving coupling beam 4c.2, the second Z detecting frame 2h and the second Z connecting beams 4 j.5-4 j.8.
In the particular embodiment shown in fig. 1, 7-9, the first and second Z drive coupling beams 4c.1 and 4c.2 are identical in structure and symmetrical about the X axis; the first Z detection frame 2g and the second Z detection frame 2h are identical in structure and symmetrical about the X axis; the first Z mass 2e and the second Z mass 2f are structurally identical and symmetrical about the X axis; the first Z-shaped connecting beams 4 j.1-4 j.4 and the second Z-shaped connecting beams 4 j.5-4 j.8 are identical in overall structure and symmetrical about an X axis. The number of the first Z connecting beams 4 j.1-4 j.4 is four, wherein two first Z connecting beams 4j.1 and 4j.2 are respectively located at the left end and the right end of the top of the first Z mass block 2e, the other two first Z connecting beams 4j.3 and 4j.4 are respectively located at the left end and the right end of the bottom of the first Z mass block 2e, and the first Z connecting beams 4 j.1-4 j.4 are placed in parallel to the X-axis direction (or placed along the left-right direction); the number of the second Z connecting beams 4 j.5-4 j.8 is four, wherein two second Z connecting beams 4j.5 and 4j.6 are respectively located at the left and right ends of the top of the second Z mass block 2f, the other two second Z connecting beams 4j.7 and 4j.8 are respectively located at the left and right ends of the bottom of the second Z mass block 2f, and the second Z connecting beams 4 j.5-4 j.8 are placed in parallel to the X-axis direction (or placed along the left and right direction). The first Z mass block 2e and the second Z mass block 2f can be provided with a certain number of damping holes for reducing damping and improving the sensitivity of the Z-axis gyroscope.
As shown in fig. 1, 2, 7-9, the Z-gyro structure further includes:
detecting frame coupling beam anchor points 5c.1, 5 c.2;
a sensing frame coupling beam 4h.1, 4h.2 connected to the sensing frame coupling beam anchor point 5c.1, 5c.2, connected between the first Z sensing frame 2g and the second Z sensing frame 2 h;
a Z-center coupling beam anchor point 5 d;
a Z center coupling beam 4i connected with the Z center coupling beam anchor point 5d, located at the center point B of the Z gyro structure, and connected between the first Z detection frame 2g and the second Z detection frame 2 h;
the sensing frame coupling beams 4h.1, 4h.2 and the Z center coupling beam 4i are arranged to urge the first Z sensing frame 2g and the second Z sensing frame 2h to move in opposite directions along the X axis.
In the specific embodiment shown in fig. 1, 7-9, there are two detection frame coupling beams 4h.1, 4h.2, two detection frame coupling beam anchors 5c.1, 5c.2, two detection frame coupling beams 4h.1, 4h.2 are distributed in bilateral symmetry, two detection frame coupling beams 4h.1, 4h.2 are respectively connected to one detection frame coupling beam anchor, and one end of each of the two detection frame coupling beams 4h.1, 4h.2 is respectively connected to the left and right ends of the bottom of the first Z detection frame 2 g; the other ends of the two detection frame coupling beams 4h.1 and 4h.2 are respectively connected with the left end and the right end of the top of the second Z detection frame 2 h. The two detection frame coupling beams 4h.1 and 4h.2 are both of an E-shaped structure, and the opening directions of the two detection frame coupling beams are opposite, wherein the E-shaped structure comprises three parallel parts arranged in parallel and a connecting part for connecting the three parallel parts, the three parallel parts are respectively called an upper parallel part, a middle parallel part and a lower parallel part, and the upper parallel parts of the detection frame coupling beams 4h.1 and 4h.2 are connected with the bottom of the first Z detection frame 2 g; the middle parallel parts of the detection frame coupling beams 4h.1 and 4h.2 are connected with the detection frame coupling beam anchor points 5c.1 and 5 c.2; the lower parallel portions of the sensing frame coupling beams 4h.1, 4h.2 are connected to the top of the second Z sensing frame 2 h.
Fig. 2 is a schematic structural diagram of the Z-center coupling beam 4i shown in fig. 1 according to the present invention. As can be seen from fig. 1 and 2, the Z-center coupling beam 4i includes a first structural portion connected to the first Z detection frame 2g and a second structural portion connected to the second Z detection frame 2h, and the first structural portion and the second structural portion of the Z-center coupling beam 4i are symmetrical (or distributed symmetrically up and down) with respect to the X-axis, and the Z-center coupling beam 4i includes four coupling elastic beams 210, four coupling intermediate connection beams 220, four coupling support beams 230, a first coupling end connection beam 240, and a second coupling end connection beam 250.
One end of the first coupling end connecting beam 240 is connected to the first Z detection frame 2g, and the other end is connected to the middle of one coupling elastic beam 210; one end of the second coupling end connection beam 250 is connected to the second Z detection frame 2h, and the other end is connected to the middle of the other coupling elastic beam 210; the four coupling elastic beams 210 and the four coupling intermediate connecting beams 220 are sequentially and alternately connected end to form a closed loop; each of the coupling support beams 230 has one end connected to the Z-center coupling beam anchor point 5d and the other end connected to the middle of a corresponding one of the coupling intermediate connection beams 220.
The partial structure of the Z-center coupling beam 4i on the X-axis side close to the first Z-detection frame 2g is referred to as a first structural portion, and the partial structure of the ZZ-center coupling beam 4i on the X-axis side close to the second Z-detection frame 2h is referred to as a second structural portion.
In the embodiment shown in fig. 1 and 2, the coupling elastic beam 210 has a U-shaped structure, and the opening direction of each U-shaped structure deviates from the Z-center coupling beam anchor point 5 d; the first coupling end connection beam 240 is connected to the bottom of one U-shaped structure; the second coupling end connection beam 250 is connected to the bottom of the other U-shaped structure; each coupling middle connecting beam 220 is of an L-shaped structure, and the opening direction of the L-shaped structure faces to the Z-center coupling beam anchor point 5 d; each coupling support beam 230 has one end connected to the Z-center coupling beam anchor point 5d and the other end connected to the corner points of the L-shaped structure, so that the four coupling support beams 230 form diagonal lines in the closed loop.
As shown in fig. 1, 7-9, the Z-gyro structure further includes:
first Z-axis detection electrodes 3 e.1-3 e.16 arranged in the first Z mass block 2 e;
second Z-axis detection electrodes 3 e.17-3 e.32 arranged in the second Z mass block 2 f;
when the input of the Z-axis angular velocity is sensed, the first Z mass block 2e and the second Z mass block 2f move reversely along the Y-axis direction, the first Z-axis detection electrodes detect the distance change between 3 e.1-3 e.16 and the first Z mass block 2e, and the second Z-axis detection electrodes 3 e.17-3 e.32 detect the distance change between the second Z mass block 2 f. Specifically, the capacitance of the first Z-axis detection electrode 3 e.1-3 e.16 and the capacitance of the second Z-axis detection electrode 3 e.17-3 e.32 after sensing the Z-axis angular velocity are increased and decreased, and the capacitance change caused by the Z-axis angular velocity is obtained by difference between the first Z-axis detection electrode and the second Z-axis detection electrode, so that the input Z-axis angular velocity is obtained.
The Z-axis detection electrodes 3 e.1-3 e.32, the Z-center coupling beam anchor points 5d and the detection frame coupling beam anchor points 5c.1 and 5c.2 are arranged on a substrate, a first Z driving coupling beam 4c.1, a second Z driving coupling beam 4c.2, a first Z detection frame 2g, a second Z detection frame 2h, a first Z mass block 2e, a second Z mass block 2f, detection frame coupling beams 4h.1 and 4h.2 and the Z-center coupling beam 4i are arranged above the substrate in a suspended mode.
The detection principle of the three-axis gyroscope shown in fig. 1 of the present invention is described below.
First, X/Y axis gyroscope detection principle
Fig. 3 is a schematic diagram illustrating a driving state of the three-axis gyroscope shown in fig. 1 according to the present invention. The first driving frame 1a and the second driving frame 1b on the upper side and the lower side are enabled to generate reverse resonant motion along the X-axis direction by applying driving voltage, and the X/Y gyroscope structure can be driven to move. The specific process is that the first driving frame 1a and the second driving frame 1b drive the first mass block 2a and the second mass block 2b to generate reverse resonant motion in the left-right direction along the X-axis direction through the X/Y driving coupling beams 4b.1 and 4b.2, and the first mass block 2a and the second mass block 2b drive the third mass block 2c and the fourth mass block 2d to generate reverse resonant motion in the up-down direction along the Y-axis through the X/Y steering beams 4 d.1-4 d.4 arranged on the periphery.
Fig. 4 is a schematic diagram of the three-axis gyroscope of fig. 1 during X-axis detection according to the present invention. When the angular velocity of the X axis is input, the Coriolis effect can generate Coriolis force to drive the third mass block 2c and the fourth mass block 2d to move in an out-of-plane reverse direction along the Z axis direction, X axis detection electrodes 3d.1 and 3d.2 arranged below the third mass block 2c and the fourth mass block 2d are sensitive to the change of the distance, further, self capacitances of the X axis detection electrodes 3d.1 and 3d.2 can be changed accordingly, and the angular velocity of the X axis can be obtained through the change of the detection capacitance.
Please refer to fig. 5, which is a schematic diagram of the three-axis gyroscope of fig. 1 for Y-axis detection. When the Y-axis angular rate is input, the Coriolis effect can generate Coriolis force to drive the first mass block 2a and the second mass block 2b to move in an out-of-plane reverse direction along the Z-axis direction, Y-axis detection electrodes 3c.1 and 3c.2 arranged below the first mass block 2a and the second mass block 2b are sensitive to the change of the distance, the self capacitance of the Y-axis detection electrodes 3c.1 and 3c.2 can be changed accordingly, and the size of the Y-axis angular rate can be obtained through the change of the detection capacitance.
Two-axis and Z-axis gyroscope detection principle
As shown in fig. 3, the first driving frame 1a and the second driving frame 1b on the upper and lower sides are driven to perform reverse resonant motion along the X-axis direction by applying a driving voltage, so as to drive the Z-gyroscope structure to move. The specific process is that the first driving frame 1a and the second driving frame 1b drive the first Z detection frame 2g and the second Z detection frame 2h to generate reverse resonant motion in the left-right direction along the X-axis direction through the Z driving coupling beams 4c.1 and 4c.2, the first Z mass block 2e and the second Z mass block 2f are respectively arranged inside the first Z detection frame 2g and the second Z detection frame 2h, and the first Z detection frame 2g and the second Z detection frame 2h can drive the first Z mass block 2e and the second Z mass block 2f to generate reverse resonant motion in the left-right direction along the X-axis direction.
Please refer to fig. 6, which is a schematic diagram of the three-axis gyroscope of fig. 1 for Z-axis detection. When the Z-axis angular rate is input, the Coriolis effect can generate Coriolis force to drive the first Z mass block 2e and the second Z mass block 2f to move reversely along the Y-axis direction, Z detection electrodes 3 e.1-3 e.16 and 3 e.17-3 e.32 respectively arranged in the first Z mass block 2e and the second Z mass block 2f sense that the distance changes, further, the capacitance of the Z detection electrodes 3 e.1-3 e.16 and 3 e.17-3 e.32 can change along with the change, and the Z-axis angular rate can be obtained through the change of the detection capacitance.
In summary, in the three-axis gyroscope according to the present invention, when the upper driving frame 1a and the lower driving frame 1b drive the mass blocks 2a to 2f to move, the displacement of the mass blocks 2a to 2f in the sensitive direction is negligible, and the angular rate signal detection is not affected. When the gyroscope is sensitive to different direction angular rates, the corresponding mass blocks move due to the Coriolis effect without influencing other mass blocks, so that the triaxial gyroscope designed by the invention can reduce orthogonal errors and improve the detection precision.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example" or "some examples" or the like are intended to mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples described in this specification can be combined and combined by one skilled in the art.
While embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and not to be construed as limiting the present invention, and that changes, modifications and variations may be made therein by those of ordinary skill in the art within the scope of the present invention.
Claims (15)
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