CN215338349U - Three-axis gyroscope - Google Patents

Abstract

The present invention provides a three-axis gyroscope comprising: a first driving frame capable of performing a resonant motion along a Y-axis; a second driving frame parallel to and spaced apart from the first driving frame by a predetermined distance, and capable of performing a resonant motion in a direction opposite to the first driving frame along the Y-axis; an X/Y gyro structure connected between the first driving frame and the second driving frame; the Z gyroscope structure is connected between the first driving frame and the second driving frame and positioned on one side of the X/Y gyroscope structure; the X/Y gyroscope structure and the Z gyroscope structure are mutually independent, and the X/Y gyroscope structure and the Z gyroscope structure are driven by the first driving frame and the second driving frame together. Compared with the prior art, the three-axis gyroscope has the advantages of reasonable and compact structure and high integration level. When the angular velocities in different directions are induced, the X/Y gyroscope structure and the Z gyroscope structure are independent from each other and do not influence each other due to the Coriolis effect, so that the orthogonal error can be reduced, and the detection precision is improved.

Description

Three-axis gyroscope

[ technical field ] A method for producing a semiconductor device

The utility model relates to the technical field of micro mechanical systems, in particular to a three-axis gyroscope.

[ background of the utility model ]

The gyroscope is a sensor for measuring angular rate, is one of core devices of the inertial technology, and plays an important role in the fields of modern industrial control, aerospace, national defense and military, consumer electronics and the like.

The development of a spinning top can be roughly divided into three stages:

the first stage is a traditional mechanical rotor gyro which has high precision and plays an irreplaceable role on military strategic weapons such as nuclear submarines, intercontinental strategic missiles and the like, but has larger volume, complex manufacturing process, high price, long period and unsuitability for batch production; the second stage is an optical detection gyroscope which mainly comprises a laser gyroscope and a fiber-optic gyroscope and mainly utilizes the Sagnac effect, and the optical detection gyroscope has the advantages of no rotating part, higher precision, important function in navigation and aerospace, larger volume, higher cost and difficult integration; the third stage is a micromechanical gyroscope which is developed in the 90 s of the 20 th century, the research of which is started later, but the micromechanical gyroscope is developed rapidly by virtue of the unique advantages of small volume, low power consumption, light weight, batch production, low price, strong overload resistance and integration, is suitable for civil fields of aircraft navigation, automobile manufacturing, digital electronics, industrial instruments and the like and modern national defense and military fields of unmanned aerial vehicles, tactical missiles, intelligent bombs, military aiming systems and the like, has wide application prospect and is more and more concerned by people.

With the increasing demand of the consumer market, the requirements on the size and the performance of a Micro-Electro-Mechanical System (MEMS) gyroscope are higher, the gyroscope is changed from a single-axis gyroscope to a three-axis gyroscope, the early three-axis gyroscope consists of three independent single-axis gyroscopes, and an independent driving structure is required to be included, so the overall structure size is large. In the current consumer-grade application, the gyroscope is generally a single-chip three-axis gyroscope and is characterized in that the driving is shared, and an X/Y/Z gyroscope mass block is reasonably arranged, but the three-axis gyroscope also has the problems of larger size, low integration level and large quadrature error.

Referring to the chinese invention patent CN108225295A, which discloses a three-axis gyroscope with tuning fork driving effect, the three-axis gyroscope structure disclosed in this patent designs a steering structure ingeniously, the left and right mass blocks are used for detecting the Y/Z axis angular rate, the central mass block is used for detecting the X axis angular rate, but obviously its integration level is not high, and the common mass block of the Y/Z mass blocks is easy to generate coupling; continuing to refer to the chinese invention patent CN110926445A, it discloses a three-axis MEMS gyroscope, the micro gyroscope structure disclosed in this patent is a shared drive, and its innovation point is that the design of the X/Y gyroscope structure is novel, and the X/Y gyroscope interacts and is arranged in the middle of the driving frame and is supported by the central anchor point, the Z-axis gyroscopes are distributed on both sides of the X/Y gyroscope and are connected to the middle gyroscope structure. The integrated structure is novel and reasonable in design and high in integration level, but the Z-axis gyroscope is not directly decoupled, and the problems of low sensitivity and large quadrature error can be faced.

Therefore, a new technical solution is needed to solve the problems of low integration level and large quadrature error of the three-axis gyroscope in the prior art.

[ Utility model ] content

One of the objectives of the present invention is to provide a three-axis gyroscope with high integration and small quadrature error.

According to one aspect of the utility model, there is provided a three-axis gyroscope comprising: a first driving frame capable of performing a resonant motion along a Y-axis; a second driving frame parallel to and spaced apart from the first driving frame by a predetermined distance, and capable of performing a resonant motion in a direction opposite to the first driving frame along the Y-axis; an X/Y gyro structure connected between the first driving frame and the second driving frame; the Z gyroscope structure is connected between the first driving frame and the second driving frame and positioned on one side of the X/Y gyroscope structure; the X/Y gyroscope structure and the Z gyroscope structure are mutually independent, and the X/Y gyroscope structure and the Z gyroscope structure are driven by the first driving frame and the second driving frame together.

Compared with the prior art, the X/Y gyroscope structure and the Z gyroscope structure of the three-axis gyroscope are driven by the same two driving frames, and the X/Y gyroscope structure and the Z gyroscope structure are independent from each other. When the angular velocities in different directions are induced, the X/Y gyroscope structure and the Z gyroscope structure are independent from each other and do not influence each other due to the Coriolis effect, so that the orthogonal error can be reduced, and the detection precision is improved.

[ description of the drawings ]

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without inventive exercise. Wherein:

FIG. 1 is a schematic diagram of the overall structure of a three-axis gyroscope in one embodiment of the present invention;

FIG. 2 is a schematic structural diagram of the X/Y gyroscope structure shown in FIG. 1 according to the present invention;

FIG. 3 is a schematic structural diagram of the X/Y center-coupled beam structure shown in FIG. 1 according to the present invention;

FIG. 4 is a schematic structural diagram of the Z-gyroscope structure shown in FIG. 1 in accordance with the present invention;

FIG. 5 is a schematic diagram of the tri-axis gyroscope of FIG. 1 in a driven state according to the present invention;

FIG. 6 is a schematic diagram of the three-axis gyroscope of FIG. 1 during X-axis detection according to the present invention;

FIG. 7 is a schematic diagram of the three-axis gyroscope of FIG. 1 during Y-axis detection according to the present invention;

FIG. 8 is a schematic view of the three-axis gyroscope of FIG. 1 during Z-axis detection according to the present invention;

FIG. 9 is an enlarged schematic view of the drive frame region shown in FIG. 1;

FIG. 10 is an enlarged schematic view of the area of the stringer shown in FIG. 1;

fig. 11 is an enlarged schematic view of the Z mass region shown in fig. 1.

Wherein, 1 a-the upper drive frame (or first drive frame); 1 b-lower drive frame (or second drive frame); 2a-X upper mass (or first mass); 2b-X lower mass (or second mass); 2c-Y left mass (or third mass); 2d-Y right mass (or fourth mass); 2e-Z upper mass (or first Z mass); a 2f-Z lower mass (or second Z mass); 2 g-upper detection frame (or first Z detection frame); 2 h-lower detection frame (or second Z detection frame);

3a.1-3 a.16-drive electrodes; 3b.1-3 b.8-driving a feedback electrode; 3c.1 and 3c.2-X axis detection electrodes; 3d.1 and 3d.2-Y axis detection electrodes; 3 e.1-a first Z-axis detection electrode, 3 e.2-a second Z-axis detection electrode;

4a.1-4 a.8-driving the frame support beam; 4 b.1-a first X/Y drive coupling beam, 4 b.2-a second X/Y drive coupling beam; 4b.3 — first Z drive coupling beam 4 b.3; 4 b.4-second Z drive coupling beam; 4 c.1-4 c.4-X mass block support beams; 4 d.1-4 d.4-Y mass block support beams; 4 e.1-4 e.4-oblique beam; 4f.1 and 4f.2-X mass coupling beams (or X/Y mass coupling beams); 4g.1 and 4g.2-Y mass block coupling beams (or X/Y mass block coupling beams); 4h-X/Y center coupling mechanism; 4i-X/Y center coupling beam; 4 i.1-cross coupling center beam 4 i.1; 4i.2 — first coupled folded beam; 4i.3 — second coupling fold; 4 i.4-L-shaped intermediate support beams; 4 j.1-4 j.8-Z detecting frame support beam; 4 k.1-4 k.8-Z detection frame coupling beam; 4 L.1-4 L.4-a first Z mass coupling beam; 4 L.5-4 L.8-a second Z mass coupling beam; 4m.1 and 4m.2-T levers;

5a.1-5 a.6-driving a frame support beam anchor point; 5 b.1-5 b.4-X mass block anchor points; 5 c.1-5 c.4-Y mass block anchor points; 5 d.1-5 d.4-X/Y center coupling beam anchor points; 5 e.1-5 e.5-Z detecting a framework support beam anchor point; 5 f.1-5 f.6-Z detection frame coupling beam anchor point.

[ detailed description ] embodiments

In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.

Reference herein to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic may be included in at least one implementation of the utility model. The appearances of the phrase "in one embodiment" in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. Unless otherwise specified, the terms connected, and connected as used herein mean electrically connected, directly or indirectly.

In the description of the present invention, it is to be understood that the terms "upper", "lower", "left", "right", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are only for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.

In the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," "secured," "coupled," and the like are to be construed broadly; for example, the connection can be fixed, detachable or integrated; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other suitable relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

Aiming at the problems in the prior art, the utility model provides a three-axis gyroscope. Fig. 1 is a schematic diagram of a three-axis gyroscope according to an embodiment of the present invention.

The three-axis gyroscope shown in fig. 1 includes a first drive frame 1a, a second drive frame 1b, an X/Y gyro structure, and a Z gyro structure. The first driving frame 1a can perform a resonant motion along the Y-axis. The second driving frame 1b is parallel to and spaced apart from the first driving frame 1a by a predetermined distance, and is capable of performing a resonant motion along the Y-axis in the opposite direction to the first driving frame 1 a. The X/Y gyro structure is connected between the first driving frame 1a and the second driving frame 1b, and is capable of sensing an X-axis angular velocity and a Y-axis angular velocity. The Z gyro structure is connected between the first driving frame 1a and the second driving frame 1b and located at one side of the X/Y gyro structure, and can sense a Z-axis angular velocity. The X/Y gyroscope structure and the Z gyroscope structure are independent of each other and are not directly connected with each other, and the X/Y gyroscope structure and the Z gyroscope structure are driven by the first driving frame 1a and the second driving frame 1b together. The three-axis gyroscope is reasonable and compact in structure and high in integration level. When the angular velocities in different directions are induced, the X/Y gyroscope structure and the Z gyroscope structure are independent from each other and do not influence each other due to the Coriolis effect, so that the orthogonal error can be reduced, and the detection precision is improved.

To better explain the structure of the three-axis gyroscope according to the present invention, a three-dimensional rectangular coordinate system may be established, in the embodiment shown in fig. 1, in the plane of the base of the three-axis gyroscope, the direction parallel to the first driving frame 1a and the second driving frame 1b is taken as the X axis, the direction perpendicular to the first driving frame 1a and the second driving frame 1b is taken as the Y axis, the X axis and the Y axis are taken as coordinate axes to determine the Z axis, the central point a of the X/Y gyroscope structure is taken as the origin of coordinates, and the three-dimensional rectangular coordinate system established by the X axis, the Y axis and the Z axis is represented in fig. 1, wherein the X axis is along the left-right direction, and the Y axis is along the up-down direction.

As shown in fig. 1 and 9, the three-axis gyroscope further includes: first drive frame support beam anchor points 5a.1, 5a.2 and 5 a.5; first drive frame support beams 4a.1, 4a.2, 4a.5 and 4a.6 connected between the first drive frame support beam anchor points 5a.1, 5a.2, 5a.5 and the first drive frame 1 a; second drive frame support beam anchor points 5a.3, 5a.4 and 5 a.6; second drive frame support beams 4a.3, 4a.4, 4a.7 and 4a.8 connected between second drive frame support beam anchor points 5a.3, 5a.4, 5a.6 and the second drive frame 1 b; first driving electrodes 3a.1-3a.8 and first driving feedback electrodes 3b.1-3b.4 arranged at two sides of the first driving frame 1 a; second driving electrodes 3a.9-3a.16 and second driving feedback electrodes 3b.5-3b.8 disposed at both sides of the second driving frame 1 b.

The first driving electrodes 3a.1-3a.8, the first driving feedback electrodes 3b.1-3b.4, the second driving electrodes 3a.9-3a.16 and the second driving feedback electrodes 3b.5-3b.8 are fixedly arranged on a substrate (not shown), the first driving frame 1a is connected with the first driving frame support beam anchors 5a.1, 5a.2 and 5a.5 through the first driving frame support beams 4a.1, 4a.2, 4a.5 and 4a.6, and the first driving frame 1a and the first driving frame support beams 4a.1, 4a.2, 4a.5 and 4a.6 are suspended above the substrate; the second drive frame 1b is connected with second drive frame support beam anchor points 5a.3, 5a.4 and 5a.6 by second drive frame support beams 4a.3, 4a.4, 4a.7 and 4a.8, the second drive frame 1b and the second drive frame support beams 4a.3, 4a.4, 4a.7, 4a.8 being suspended above the substrate. The driving frames 1a and 1b and the driving frame support beams 4a.1-4a.8 are of the same thickness and are of a suspension structure, and the anchor points 5a.1-5a.8 are of a non-suspension structure and are directly connected with the substrate to play a supporting role.

In the embodiment shown in fig. 1 and 9, the first driving frame 1a and the second driving frame 1b are identical in structure, are symmetrically arranged (or are distributed symmetrically up and down) with respect to the X axis, and the first driving frame 1a and the second driving frame 1b are placed parallel to the X axis.

In the specific embodiment shown in fig. 1 and 9, the number of the first drive electrodes 3a.1-3a.8 is 8, wherein four first drive electrodes 3a.1, 3a.3, 3a.5 and 3a.7 are located on the upper side (or top side) of the first drive frame 1a and are in turn placed parallel to the X-axis, and another four first drive electrodes 3a.2, 3a.4, 3a.6 and 3a.8 are located on the lower side (or bottom side) of the first drive frame 1a and are in turn placed parallel to the X-axis, the first drive electrodes located on the upper and lower sides of the first drive frame 1a are opposed in pairs, e.g., the first drive electrodes 3a.1 and 3a.2 located on the upper and lower sides of the first drive frame 1a are opposed, the first drive electrodes 3a.3 and 3a.4 are opposed, the first drive electrodes 3a.5 and 3a.6 are opposed, and the first drive electrodes 3a.7 and 3a.8 are opposed. The number of the second driving electrodes 3a.9-3a.16 is 8, wherein four second driving electrodes 3a.9, 3a.11, 3a.13 and 3a.15 are located at the lower side (or bottom side) of the second driving frame 1b and are sequentially placed parallel to the X-axis, and the other four second driving electrodes 3a.10, 3a.12, 3a.14 and 3a.16 are located at the upper side (or top side) of the second driving frame 1b and are sequentially placed parallel to the X-axis, the second driving electrodes located at the upper side and lower side of the second driving frame 1b are opposite to each other, for example, the second driving electrodes 3a.9 and 3a.10 located at the upper side and lower side of the second driving frame 1b are opposite, the second driving electrodes 3a.11 and 3a.12 are opposite, the second driving electrodes 3a.13 and 3a.14 are opposite, and the second driving electrodes 3a.15 and 3a.16 are opposite to each other.

It should be noted that in other embodiments, the number of the first driving electrodes may be 2, 4, 6 or more; the second drive electrodes may be an even number of 2, 4, 6 or more. That is, the number of the first driving electrodes may be 2m, wherein m first driving electrodes are located at an upper side of the first driving frame 1a and are sequentially placed parallel to the X axis, and the other m first driving electrodes are located at a lower side of the first driving frame 1a and are sequentially placed parallel to the X axis, the first driving electrodes located at the upper side and the lower side of the first driving frame 1a are opposite to each other two by two; the number of the second driving electrodes may be 2m, wherein m second driving electrodes are located on the upper side of the second driving frame 1b and are sequentially placed in parallel to the X axis, and in addition, m second driving electrodes are located on the lower side of the second driving frame 1b and are sequentially placed in parallel to the X axis, the second driving electrodes located on the upper side and the lower side of the second driving frame 1b are opposite to each other, and m is a natural number greater than or equal to 1.

In the specific embodiment shown in fig. 1 and 9, the number of the first driving feedback electrodes 3b.1-3b.4 is 4, wherein two first driving feedback electrodes 3b.1 and 3b.3 are located on the upper side (or top side) of the first driving frame 1a and are sequentially placed parallel to the X-axis, and the other two first driving feedback electrodes 3b.2 and 3b.4 are located on the lower side (or bottom side) of the first driving frame 1a and are sequentially placed parallel to the X-axis, and the first driving feedback electrodes located on the upper side and the lower side of the first driving frame 1a are opposite to each other, for example, the first driving feedback electrodes 3b.1 and 3b.2 located on the upper side and the lower side of the first driving frame 1a are opposite to each other, and the first driving feedback electrodes 3b.3 and 3b.4 are opposite to each other. The number of the second driving feedback electrodes 3b.5 to 3b.8 is 4, wherein two second driving feedback electrodes 3b.5 and 3b.7 are located on the upper side (or top side) of the second driving frame 1b and are sequentially placed parallel to the X axis, and the other two second driving feedback electrodes 3b.6 and 3b.8 are located on the lower side (or bottom side) of the second driving frame 1b and are sequentially placed parallel to the X axis, the second driving feedback electrodes located on the upper side and the lower side of the second driving frame 1b are opposite to each other, for example, the second driving feedback electrodes 3b.5 and 3b.6 located on the upper side and the lower side of the second driving frame 1b are opposite to each other, and the second driving feedback electrodes 3b.7 and 3b.8 are opposite to each other.

It should be noted that in other embodiments, the number of the first driving feedback electrodes may be an even number of 2, 6 or more; the second drive feedback electrodes may be an even number of 2, 6 or more. That is, the number of the first driving feedback electrodes may be 2n, where n first driving feedback electrodes are located on the upper side of the first driving frame 1a and sequentially placed parallel to the X axis, and the other n first driving feedback electrodes are located on the lower side of the first driving frame 1a and sequentially placed parallel to the X axis, and the first driving feedback electrodes located on the upper side and the lower side of the first driving frame are opposite to each other two by two; the number of the second driving feedback electrodes is 2n, wherein n second driving feedback electrodes are positioned on the upper side of the second driving frame 1b and are sequentially placed in parallel with the X axis, in addition, n second driving feedback electrodes are positioned on the lower side of the second driving frame 1b and are sequentially placed in parallel with the X axis, the two paths of the second driving feedback electrodes positioned on the upper side and the lower side of the second driving frame are opposite, and n is a natural number which is more than or equal to 1.

In the embodiment shown in fig. 1 and 9, the first driving frame 1a has a T-shaped structure including a crossbar portion and a stem portion connected to a middle portion of the crossbar; 8 first driving electrodes 3a.1-3a.8 are distributed on the upper side and the lower side of the middle part of the transverse rod part of the first driving frame 1 a; the 4 first driving feedback electrodes 3b.1-3b.4 are distributed on the upper and lower sides of the two ends of the beam part of the first driving frame 1 a. The second driving frame 1b is of a T-shaped structure, and the T-shaped structure comprises a transverse rod part and a vertical rod part connected with the middle part of the transverse rod; 8 second driving electrodes 3a.9-3a.16 are distributed on the upper side and the lower side of the middle part of the transverse rod part of the second driving frame 1 b; 4 second driving feedback electrodes 3b.5 to 3b.8 are distributed on the upper and lower sides of both ends of the beam portion of the second driving frame 1 b.

In the specific embodiment shown in fig. 1 and 9, the number of first drive frame support beam anchor points 5a.1, 5a.2, 5a.5 is three, wherein two first drive frame support beam anchor points 5a.1, 5a.2 are located at both ends of the cross bar portion of the first drive frame 1a, respectively, and the other first drive frame support beam anchor point 5a.5 is located near the vertical bar portion of the first drive frame 1 a; four first driving frame supporting beams 4a.1, 4a.2, 4a.5 and 4a.6 are provided, wherein two first driving frame supporting beams 4a.1 and 4a.2 are respectively positioned at two ends of the cross rod part of the first driving frame 1 a; the other two first driving frame support beams 4a.5 and 4a.6 are respectively positioned at the left side and the right side of the vertical rod part of the first driving frame 1 a; the two first driving frame support beam anchor points 5a.1 and 5a.2 are respectively connected with two ends of the transverse rod part of the first driving frame 1a through the two first driving frame support beams 4a.1 and 4a.2, and the other first driving frame support beam anchor point 5a.5 is connected with the vertical rod part of the first driving frame 1a through the other two first driving frame support beams 4a.5 and 4 a.6. Three second drive frame support beam anchor points 5a.3, 5a.4 and 5a.6 are provided, wherein two second drive frame support beam anchor points 5a.3 and 5a.4 are respectively positioned at two ends of the cross rod part of the second drive frame 1b, and the other second drive frame support beam anchor point 5a.6 is positioned near the vertical rod part of the second drive frame 1 b; four second driving frame supporting beams 4a.3, 4a.4, 4a.7 and 4a.8 are arranged, wherein two second driving frame supporting beams 4a.3 and 4a.4 are respectively positioned at two ends of the cross rod part of the second driving frame 1 b; the other two second driving frame support beams 4a.7 and 4a.8 are respectively positioned at the left side and the right side of the vertical rod part of the second driving frame 1 b; two second driving frame support beam anchor points 5a.3 and 5a.4 are respectively connected with two ends of the transverse rod part of the second driving frame 1b through two second driving frame support beams 4a.3 and 4a.4, and the other second driving frame support beam anchor point 5a.6 is connected with the vertical rod part of the second driving frame 1b through the other two second driving frame support beams 4a.7 and 4 a.8.

It should be noted that, in another embodiment, the first driving frame support beam anchor points 5a.5 may be two (the first driving frame support beam anchor points 5a.5 shown in fig. 1 may be regarded as two first driving frame support beam anchor points of an integral structure), and the two first driving frame support beam anchor points 5a.5 are respectively connected with the vertical rod part of the first driving frame 1a through another two first driving frame support beams 4a.5 and 4 a.6; the second drive frame support beam anchor points 5a.6 may be two (the second drive frame support beam anchor points 5a.6 shown in fig. 1 may be regarded as two second drive frame support beam anchor points of an integral structure), and the two second drive frame support beam anchor points 5a.6 are respectively connected with the vertical rod part of the second drive frame 1b through another two second drive frame support beams 4a.7 and 4 a.8.

In the specific embodiment shown in fig. 1 and 9, the first drive frame support beam 4a.1, 4a.2, 4a.5, 4a.6 and the second drive frame support beam 4a.3, 4a.4, 4a.7, 4a.8 are each a U-shaped beam with an opening direction parallel to the X-axis; a first containing area and a second containing area are respectively formed at two ends of a cross rod part of the first driving frame 1a, and two first driving frame support beams 4a.1 and 4a.2 are respectively placed in the first containing area and the second containing area; a third accommodating area and a fourth accommodating area are formed at two ends of the cross rod part of the second driving frame 1b respectively, and two second driving frame support beams 4a.3 and 4a.4 are placed in the third accommodating area and the fourth accommodating area respectively. Wherein the first drive frame support beams 4a.1, 4a.2, 4a.5, 4a.6 and the second drive frame support beams 4a.3, 4a.4, 4a.7, 4a.8 are symmetrically distributed about the X-axis; the first drive frame support beam anchor points 5a.1, 5a.2, 5a.5 and the second drive frame support beam anchor points 5a.3, 5a.4, 5a.6 are symmetrically distributed about the X-axis; the first drive electrodes 3a.1-3a.8 and the second drive electrodes 3a.9-3a.16 are symmetrically distributed around the X axis; the first drive feedback electrodes 3b.1 to 3b.4 and the second drive feedback electrodes 3b.5 to 3b.8 are symmetrically distributed about the X axis.

As shown in fig. 5, the first driving frame 1a is driven to perform a resonant motion along the Y-axis by applying a driving voltage to the first driving electrodes 3a.1-3 a.8; the second drive frame 1b is driven in a resonant movement along the Y-axis in the opposite direction to the first drive frame 1a by applying a drive voltage over the second drive electrodes 3a.9-3 a.16. Fig. 5 shows by way of example only one direction of movement of the first drive frame 1a and the second drive frame 1b along the Y-axis. For a detailed scheme of applying a driving voltage to the driving electrode to drive the driving frame to perform a resonant motion along the Y-axis, reference may be made to the related art, and details thereof will not be provided herein.

In the embodiment shown in fig. 1, 2 and 10, the X/Y gyroscope structure comprises: the mass block comprises a first X/Y driving coupling beam 4b.1, a second X/Y driving coupling beam 4b.2, a first mass block 2a, a second mass block 2b, a third mass block 2c, a fourth mass block 2d, four oblique beams 4 e.1-4 e.4, eight mass block supporting beams 4 c.1-4 c.4 and 4 d.1-4 d.4 and eight mass block anchor points 5 b.1-5 b.4 and 5 c.1-5 c.4. The first mass block 2a, the second mass block 2b, the third mass block 2c and the fourth mass block 2d are respectively arranged at four positions, namely the upper position, the lower position, the left position and the right position, of a central point A of the X/Y gyroscope structure, the first mass block 2a is arranged adjacent to the third mass block 2c and the fourth mass block 2d, the second mass block 2b is arranged adjacent to the third mass block 2c and the fourth mass block 2d, the first mass block 2a is connected with the first driving frame 1a through the first X/Y driving coupling beam 4b.1, and the second mass block 2b is connected with the second driving frame 2b through the second X/Y driving coupling beam 4 b.2. The mass block anchor points 5 b.1-5 b.4 and 5 c.1-5 c.4 are positioned at the outer sides of the four mass blocks 2 a-2 d of the X/Y gyroscope structure; the mass block support beams 4 c.1-4 c.4 and 4 d.1-4 d.4 are positioned at the outer sides of four mass blocks 2 a-2 d of the X/Y gyroscope structure, and each mass block of the X/Y gyroscope structure is connected with a mass block anchor point at the outer side of the mass block support beam through the mass block support beam at the outer side of the mass block support beam; the four oblique beams 4 e.1-4 e.4 are respectively located between every two adjacent mass blocks in the X/Y gyroscope structure, and every two adjacent mass blocks in the X/Y gyroscope structure are connected through the oblique beams located between the two adjacent mass blocks. Wherein, when the first driving frame 1a performs a resonant motion along the Y-axis and the second driving frame 1b performs a resonant motion along the Y-axis in the opposite direction to the first driving frame 1a, the first driving frame 1a drives the first mass block 2a to perform resonant motion along the Y axis through the first X/Y driving coupling beam 4b.1, the second driving frame 1b drives the second mass block 2b to perform resonant motion along the Y axis in the direction opposite to the first mass block 2a through the second X/Y driving coupling beam 4b.2, the first mass block 2a and the second mass block 2b drive the third mass block 2c to perform resonant motion along the X axis through the corresponding oblique beams (e.g., oblique beams 4e.1 and 4e.3), the fourth mass 2d is in turn brought into a resonant movement along the X axis, opposite to the third mass 2c, by means of corresponding oblique beams (for example, oblique beams 4e.2 and 4 e.4).

Referring to fig. 5, when the first driving frame 1a drives the first mass block 2a to approach the central point a of the X/Y gyroscope structure along the Y axis through the first X/Y driving coupling beam 4b.1, and the second driving frame 1b drives the second mass block 2b to approach the central point a of the X/Y gyroscope structure along the Y axis through the second X/Y driving coupling beam 4b.2, the first mass block 1a and the second mass block 1b drive the third mass block 2c and the fourth mass block 2d to approach the central point a of the X/Y gyroscope structure along the X axis through the corresponding oblique beams 4 e.1-4 e.4; when the first driving frame 1a drives the first mass block 2a to be far away from the central point A of the X/Y gyroscope structure along the Y axis through the first X/Y driving coupling beam 4b.1, and the second driving frame 1b drives the second mass block 2b to be far away from the central point A of the X/Y gyroscope structure along the Y axis through the second X/Y driving coupling beam 4b.2, the first mass block 2a and the second mass block 2b further drive the third mass block 2c and the fourth mass block 2d to be far away from the central point A of the X/Y gyroscope structure along the X axis through the corresponding oblique beams 4 e.1-4 e.4.

In one embodiment, the X/Y gyroscope structure further comprises: an X/Y center coupling beam structure (not identified) located at a center point A of the X/Y gyroscope structure; four X/Y mass block coupling beams 4f.1 and 4f.2, 4g.1 and 4g.2 respectively connected to the inner sides of the corresponding mass blocks, wherein each X/Y mass block coupling beam is connected to the X/Y central coupling beam structure; a first X-axis detection electrode 3c.1 disposed below the first mass block 2 a; a second X-axis detection electrode 3c.2 disposed below the second mass block 2 b; a first Y-axis detection electrode 3d.1 disposed below the third mass block 2 c; a second Y-axis detection electrode 3d.2 arranged below the fourth mass block 2 d. When the input of the X-axis angular velocity is sensed, the first mass block 2a and the second mass block 2b can move reversely along the Z-axis direction, the first X-axis detection electrode 3c.1 detects the distance change with the first mass block 2a, the second X-axis detection electrode 3c.2 detects the distance change with the second mass block 2b, specifically, the capacitance of the first X-axis detection electrode 3c.1 and the capacitance of the second X-axis detection electrode 3c.2 which are sensitive to the X-axis angular velocity are increased and decreased, the difference between the two capacitance changes caused by the X-axis angular velocity, and the input X-axis angular velocity is obtained. When the input of the Y-axis angular velocity is sensed, the third mass block 2c and the fourth mass block 2d are caused to move reversely along the Z-axis direction, the first Y-axis detection electrode 3d.1 detects the distance change between the third mass block 2c, the second Y-axis detection electrode 3d.2 detects the distance change between the fourth mass block 2d, specifically, the capacitance of the first Y-axis detection electrode 3d.1 and the capacitance of the second Y-axis detection electrode 3d.2 which are sensitive to the Y-axis angular velocity are increased and decreased, the difference between the two capacitances is used for obtaining the capacitance change caused by the Y-axis angular velocity, and further the input Y-axis angular velocity is obtained.

In the embodiment shown in fig. 1, 2 and 10, each of the four oblique beams 4 e.1-4 e.4 is a U-shaped beam, one end of which is connected to a corresponding one of the two adjacent masses and the other end of which is connected to a corresponding other one of the two adjacent masses, and the opening of the U-shaped beam is directed to the center point a of the X/Y gyroscope structure. For example, the oblique beam 4e.1 is located between the first mass block 2a and the third mass block 2c, one end of the oblique beam is connected with the first mass block 2a, the other end of the oblique beam is connected with the third mass block 2c, and the opening of the oblique beam 4e.1 points to the central point a of the X/Y gyroscope structure; the oblique beam 4e.2 is positioned between the first mass block 2a and the fourth mass block 2d, one end of the oblique beam is connected with the first mass block 2a, the other end of the oblique beam is connected with the fourth mass block 2d, and the opening of the oblique beam 4e.2 points to the central point A of the X/Y gyroscope structure; the oblique beam 4e.3 is positioned between the second mass block 2b and the third mass block 2c, one end of the oblique beam is connected with the second mass block 2b, the other end of the oblique beam is connected with the third mass block 2c, and the opening of the oblique beam 4e.3 points to the central point A of the X/Y gyroscope structure; between the second mass 2b and the fourth mass 2d, a diagonal beam 4e.4 is located, which is connected to the second mass 2b at one end and to the fourth mass 2d at the other end, and the opening of the diagonal beam 4e.4 is directed towards the centre point a of the X/Y gyroscope structure. A certain number of damping holes can be arranged on the mass blocks 2 a-2 d of the X/Y gyroscope structure and used for reducing damping and improving the quality factor and the sensitivity of the gyroscope.

In the specific embodiment shown in fig. 1, 2 and 10, the four X/Y mass coupling beams 4f.1 and 4f.2, 4g.1 and 4g.2 have the same structure, and the four X/Y mass coupling beams 4f.1 and 4f.2, 4g.1 and 4g.2 are symmetrical with respect to the X axis and the Y axis as a whole, and each of the X/Y mass coupling beams 4f.1 and 4f.2, 4g.1 and 4g.2 includes a plurality of hollow straight beam portions with lengths gradually decreasing from outside to inside and a connecting portion for connecting the hollow straight beams; the X/Y mass block coupling beams 4f.1 and 4f.2 positioned on the upper side and the lower side of the X/Y central coupling beam structure are placed in parallel to the X axis (or placed along the left-right direction), and the X/Y mass block coupling beams 4g.1 and 4g.2 positioned on the left side and the right side of the X/Y central coupling beam structure are placed in parallel to the Y axis (or placed along the up-down direction).

In the specific embodiment shown in fig. 1, 2 and 10, 8 mass anchor points 5 b.1-5 b.4 and 5 c.1-5 c.4 are provided, each two mass anchor points corresponding to and located outside one mass in the X/Y gyroscope structure, wherein the mass anchor points 5b.1 and 5b.2 are located outside the first mass 2a, the mass anchor points 5b.3 and 5b.4 are located outside the second mass 2b, the mass anchor points 5c.1 and 5c.3 are located outside the third mass 2c, and the mass anchor points 5c.2 and 5c.4 are located outside the fourth mass 2 d; 8 mass block supporting beams 4 c.1-4 c.4 and 4 d.1-4 d.4 are arranged, each two mass block supporting beams correspond to one mass block in the X/Y gyro structure and are positioned on the outer side of the mass block, wherein the mass block supporting beams 4c.1 and 4c.2 are positioned on the outer side of the first mass block 2a, the mass block supporting beams 4c.3 and 4c.4 are positioned on the outer side of the second mass block 2b, the mass block supporting beams 4d.1 and 4d.3 are positioned on the outer side of the third mass block 2c, and the mass block supporting beams 4d.2 and 4d.4 are positioned on the outer side of the fourth mass block 2 d; each mass block in the X/Y gyroscope structure is respectively connected with two mass block anchor points on the outer side of the mass block through two mass block supporting beams on the outer side of the mass block, wherein a first mass block 2a is respectively connected with the mass block anchor points 5b.1 and 5b.2 through the mass block supporting beams 4c.1 and 4c.2, a second mass block 2b is respectively connected with the mass block anchor points 5b.3 and 5b.4 through the mass block supporting beams 4c.3 and 4c.4, a third mass block 2c is respectively connected with the mass block anchor points 5c.1 and 5c.3 through the mass block supporting beams 4d.1 and 4d.3, and a fourth mass block 2d is respectively connected with the mass block anchor points 5c.2 and 5c.4 through the mass block supporting beams 4d.2 and 4 d.4.

Two mass block supporting beams 4c.1 and 4c.2 outside the first mass block 2a are respectively positioned at the left end and the right end of the first X/Y driving coupling beam 4 b.1; two mass block anchor points 5b.1 and 5b.2 at the outer side of the first mass block 2a are respectively positioned at the left end and the right end of the first X/Y driving coupling beam 4 b.1; two mass block supporting beams 4c.3 and 4c.4 outside the second mass block 2b are respectively positioned at the left end and the right end of the second X/Y driving coupling beam 4 b.2; two mass block anchor points 5b.3 and 5b.4 at the outer side of the second mass block 2b are respectively positioned at the left end and the right end of a second X/Y driving coupling beam 4 b.2; two mass block support beams 4d.1 and 4d.3 outside the third mass block 2c are respectively positioned at the upper end and the lower end outside the third mass block 2 c; two mass block anchor points 5c.1 and 5c.3 on the outer side of the third mass block 2c are respectively positioned at the upper end and the lower end of the outer side of the third mass block 2 c; two mass block support beams 4d.2 and 4d.4 on the outer side of the fourth mass block 2d are respectively positioned at the upper end and the lower end of the outer side of the fourth mass block 2 d; two mass block anchor points 5c.2 and 5c.4 on the outer side of the fourth mass block 2d are respectively positioned at the upper end and the lower end of the outer side of the fourth mass block 2 d; the two mass block supporting beams 4c.1 and 4c.2 outside the first mass block 2a and the two mass block supporting beams 4c.3 and 4c.4 outside the second mass block 2b are U-shaped beams, and the opening direction of the U-shaped beams is parallel to the X axis; the two mass support beams 4d.1, 4d.3 outside the third mass 2c and the two mass support beams 4d.2, 4d.4 outside the fourth mass 2d are folded beams, the opening direction (or folding direction) of which is parallel to the Y-axis.

In the particular embodiment shown in fig. 1 and 2, the first and second X/Y drive coupling beams 4b.1 and 4b.2 are structurally identical and symmetrical about the X axis; the four mass blocks 2 a-2 d in the X/Y gyroscope structure have the same structure and respectively comprise a rectangular part and an isosceles trapezoid part; the four mass blocks 2 a-2 d are integrally symmetrical about the X axis and the Y axis; the four oblique beams 4 e.1-4 e.4 are symmetrical with respect to the X axis and the Y axis as a whole; the two mass support beams 4c.1, 4c.2 outside the first mass 2a and the two mass support beams 4c.3, 4c.4 outside the second mass 2b are entirely symmetrical about the X-axis and the Y-axis; the two mass anchor points 5b.1, 5b.2 outside the first mass 2a and the two mass anchor points 5b.3, 5b.4 outside the second mass 2b are entirely symmetrical about the X-axis and the Y-axis; the two mass block support beams 4d.1, 4d.3 outside the third mass block 2c and the two mass block support beams 4d.2, 4d.4 outside the fourth mass block 2d are symmetrical with respect to the X-axis and the Y-axis as a whole; the two mass anchor points 5c.1, 5c.3 outside the third mass 2c are symmetrical to the two mass anchor points 5c.2, 5c.4 outside the fourth mass 2d overall about the X-axis and the Y-axis. The mass block comprises Y-axis detection electrodes 3d.1 and 3d.2, X-axis detection electrodes 3c.1 and 3c.2, mass block anchor points 5 b.1-5 b.4 and 5 c.1-5 c.4, wherein the mass block anchor points are fixedly arranged on a substrate; four mass blocks 2 a-2 d of the X/Y gyroscope structure, oblique beams 4 e.1-4 e.4, X/Y driving coupling beams 4b.1 and 4b.2, X/Y mass block coupling beams 4f.1 and 4f.2, 4g.1 and 4g.2, and mass block support beams 4 c.1-4 c.4 and 4 d.1-4 d.4 are suspended above the substrate.

In the embodiment shown in fig. 1 and 3, the X/Y center-coupled beam structure includes:

an X/Y center coupling mechanism 4h, wherein an X/Y space is defined in the X/Y center coupling mechanism;

an X/Y center coupling beam 4i located within the X/Y space;

the X/Y central coupling beam anchor points are 5 d.1-5 d.4 and are positioned in the X/Y space;

the X/Y central coupling mechanism 4h is connected with X/Y central coupling beam anchor points 5 d.1-5 d.4 through an X/Y central coupling beam 4i, and the X/Y central coupling mechanism 4h is connected with four mass blocks 2 a-2 d of the X/Y gyroscope structure through the four X/Y mass block coupling beams 4f.1 and 4f.2, 4g.1 and 4g.2 respectively.

In the particular embodiment shown in fig. 1 and 3, the X/Y central coupled beams 4i comprise a cross-shaped coupled central beam 4i.1, a first coupled folded beam 4i.2 and a second coupled folded beam 4i.3, wherein the intersection of the cross-shaped coupled central beam 4i.1 is located at the centre point a of the X/Y gyro structure. The number of the X/Y central coupling beam anchor points 5 d.1-5 d.4 is four, and the X/Y central coupling beam anchor points are respectively positioned in four areas divided by the cross-shaped coupling central beam 4i.1, wherein a first X/Y central coupling beam anchor point 5d.1 is positioned in the upper left area of the cross-shaped coupling central beam 4i.1, a second X/Y central coupling beam anchor point 5d.2 is positioned in the upper right area of the cross-shaped coupling central beam 4i.1, a third X/Y central coupling beam anchor point 5d.3 is positioned in the lower left area of the cross-shaped coupling central beam 4i.1, and a fourth X/Y central coupling beam anchor point 5d.4 is positioned in the lower right area of the cross-shaped coupling central beam 4 i.1; the first coupling folding beam 4i.2 is connected between a first X/Y center coupling beam anchor point 5d.1 and a third X/Y center coupling beam anchor point 5d.3, the midpoint of the first coupling folding beam 4i.2 is connected with one end of the cross rod part of the cross coupling center beam 4i.1, and the first coupling folding beam 4i.2 is symmetrical (or symmetrical about the X axis) with respect to the cross rod part of the cross coupling center beam 4 i.1; the second coupling folding beam 4i.3 is connected between the second X/Y central coupling beam anchor point 5d.2 and the fourth X/Y central coupling beam anchor point 5d.4, the midpoint of the second coupling folding beam 4i.3 is connected with the other end of the crossbar portion of the cross-shaped coupling central beam 4i.1, and the second coupling folding beam 4i.3 is symmetrical (or symmetrical about the X-axis) with respect to the crossbar portion of the cross-shaped coupling central beam 4 i.1; one end and the other end of the vertical rod part of the cross-shaped coupling central beam 4i.1 are respectively connected with the X/Y central coupling mechanism 4 h. The X/Y central coupling beam 4i further comprises four L-shaped middle supporting beams 4i.4 which are respectively positioned in four areas divided by the cross-shaped coupling central beam 4i.1, one end of each L-shaped middle supporting beam 4i.4 is connected with the cross rod part of the cross-shaped coupling central beam 4i.1 in the area where the L-shaped middle supporting beam is positioned, the other end of each L-shaped middle supporting beam is connected with the vertical rod part of the cross-shaped coupling central beam 4i.1 in the area where the L-shaped middle supporting beam is positioned, the opening direction of each L-shaped middle supporting beam faces to the central point A of the X/Y gyroscope structure, and the four L-shaped middle supporting beams 4i.4 are sequentially connected end to form a field-shaped structure with the cross-shaped coupling central beam 4i.1 at the central point A of the X/Y gyroscope structure.

In the specific embodiment shown in fig. 1 and 3, the first coupled folded beam 4i.2 comprises a first zigzag-shaped elastic beam and a third zigzag-shaped elastic beam, wherein one end of the first zigzag-shaped elastic beam is connected with the first X/Y center coupled beam anchor point 5d.1, the other end of the first zigzag-shaped elastic beam is connected with the other end of the third zigzag-shaped elastic beam, and one end of the third zigzag-shaped elastic beam is connected with the third X/Y center coupled beam anchor point 5 d.3; one end of a cross rod part of the cross coupling center beam 4i.1 is connected with the other end of the first zigzag elastic beam and the other end of the third zigzag elastic beam, and the first zigzag elastic beam and the third zigzag elastic beam are symmetrical with respect to the cross rod part of the cross coupling center beam 4i.1 (or symmetrical with respect to the X-axis). The second coupling folding beam 4i.3 comprises a second zigzag elastic beam and a fourth zigzag elastic beam, wherein one end of the second zigzag elastic beam is connected with a second X/Y center coupling beam anchor point 5d.2, the other end of the second zigzag elastic beam is connected with the other end of the fourth zigzag elastic beam, and one end of the fourth zigzag elastic beam is connected with a fourth X/Y center coupling beam anchor point 5 d.4; the other end of the beam part of the cross coupling center beam 4i.1 is connected with the other end of the second zigzag elastic beam and the other end of the fourth zigzag elastic beam, and the second zigzag elastic beam and the fourth zigzag elastic beam are symmetrical with respect to the beam part of the cross coupling center beam 4i.1 (or symmetrical with respect to the X-axis). The X/Y center coupling mechanism 4h is a diamond structure with an X/Y space defined inside, and four corners of the diamond structure are respectively connected with four X/Y mass block coupling beams 4f.1 and 4f.2, and 4g.1 and 4 g.2.

In the specific embodiment shown in fig. 1 and 3, the X/Y center coupling mechanism 4h is symmetrical in its entirety about the X axis and the Y axis; the cross-shaped coupling central beam 4i.1 is symmetrical about an X axis and a Y axis; the first coupling fold 4i.2 and the second coupling fold 4i.3 are entirely symmetrical about the X-axis and the Y-axis; the four X/Y center coupling beam anchor points 5 d.1-5 d.4 are integrally symmetrical about the X axis and the Y axis.

As shown in fig. 1, 4 and 11, the Z gyro structure includes:

a first Z drive coupling beam 4b.3 and a second Z drive coupling beam 4 b.4;

a first Z detection frame 2g connected to the first drive frame 1a by a first Z drive coupling beam 4b.3, defining a first Z space therein;

the first Z mass block 2e is positioned in the first Z space and is connected with the first Z detection frame 2g through first Z mass block coupling beams 4 L.1-4 L.4;

a second Z detection frame 2h connected to the second driving frame 1b through a second Z driving coupling beam 4b.4, in which a second Z space is defined;

the second Z mass block 2f is positioned in the second Z space and is connected with the second Z detection frame 2h through second Z mass block coupling beams 4 L.5-4 L.8;

when the first driving frame 1a performs resonant motion along the Y axis and the second driving frame 1b performs resonant motion along the Y axis in the direction opposite to the first driving frame 1a, the first driving frame 1a drives the first Z mass block 2e to perform resonant motion along the Y axis through the first Z driving coupling beam 4b.3, the first Z detection frame 2g and the first Z mass block coupling beams 4 L.1-4 L.4, and the second driving frame 1b drives the second Z mass block 2f to perform resonant motion along the Y axis in the direction opposite to the first Z mass block 2e through the second Z driving coupling beam 4b.4, the second Z detection frame 2h and the second Z mass block coupling beams 4 L.5-4 L.8. Referring to fig. 5, when the first driving frame 1a drives the first Z mass block 2e to approach the second Z detecting frame 2h along the Y axis through the first Z driving coupling beam 4b.3, the first Z detecting frame 2g, and the first Z mass block coupling beams 4 L.1-4 L.4, the second driving frame 1b drives the second Z mass block 2f to approach the first Z detecting frame 2g along the Y axis through the second Z driving coupling beam 4b.4, the second Z detecting frame 2h, and the second Z mass block coupling beams 4 L.5-4 L.8; when the first driving frame 1a drives the first Z mass block 2e to be far away from the second Z detecting frame 2h along the Y axis through the first Z driving coupling beam 4b.3, the first Z detecting frame 2g and the first Z mass block coupling beams 4 L.1-4 L.4, the second driving frame 1b drives the second Z mass block 2f to be far away from the first Z detecting frame 2g along the Y axis through the second Z driving coupling beam 4b.4, the second Z detecting frame 2h and the second Z mass block coupling beams 4 L.5-4 L.8.

In the particular embodiment shown in fig. 1, 4 and 11, the first and second Z drive coupling beams 4b.3, 4b.4 are identical in structure and symmetrical about the X axis; the first Z detection frame 2g and the second Z detection frame 2h are identical in structure and symmetrical about the X axis; the first Z mass 2e and the second Z mass 2f are structurally identical and symmetrical about the X axis; the first Z mass coupling beams 4 L.1-4 L.4 and the second Z mass coupling beams 4 L.5-4 L.8 have the same overall structure and are symmetrical about the X axis. The number of the first Z mass block coupling beams 4 L.1-4 L.4 is four, wherein two first Z mass block coupling beams 4L.1 and 4L.3 are respectively located at the upper end and the lower end of the left side of the first Z mass block 2e, the other two first Z mass block coupling beams 4L.2 and 4L.4 are respectively located at the upper end and the lower end of the right side of the first Z mass block 2e, the first Z mass block coupling beams 4 L.1-4 L.4 are U-shaped beams, and the first Z mass block coupling beams L.1-4 L.4 are placed in parallel to the Y-axis direction (or placed along the up-down direction); the number of the second Z mass block coupling beams 4 L.5-4 L.8 is four, wherein two second Z mass block coupling beams 4L.5 and 4L.7 are respectively located at the upper end and the lower end of the left side of the second Z mass block 2f, the other two second Z mass block coupling beams 4L.6 and 4L.8 are respectively located at the upper end and the lower end of the right side of the second Z mass block 2f, the second Z mass block coupling beams 4 L.5-4 L.8 are both U-shaped beams, and the second Z mass block coupling beams 4 L.5-4 L.8 are placed in parallel to the Y axis direction (or placed along the up-down direction). The first Z mass block 2e and the second Z mass block 2f can be provided with a certain number of damping holes for reducing damping and improving the sensitivity of the Z-axis gyroscope.

As shown in fig. 1, 4 and 11, the Z-gyro structure further includes:

a first Z-axis detection electrode 3e.1 disposed within the first Z mass 2 e;

a second Z-axis detection electrode 3e.2 disposed within the second Z mass 2 f;

when the input of the Z-axis angular velocity is sensed, the first Z mass block 2e and the second Z mass block 2f can move reversely along the X-axis direction, the first Z-axis detection electrode detects the distance change between the 3e.1 and the first Z mass block 2e, the second Z-axis detection electrode 3e.2 detects the distance change between the 3e.2 and the second Z mass block 2f, specifically, the capacitance of the first Z-axis detection electrode 3e.1 and the capacitance of the second Z-axis detection electrode 3e.2 which are sensitive to the Z-axis angular velocity are increased and decreased, the difference between the two capacitance changes caused by the Z-axis angular velocity are obtained, and the input Z-axis angular velocity is obtained.

In the embodiment shown in fig. 1 and 4, the Z-gyro structure further includes:

z detection frame support beam anchor points 5 e.1-5 e.5 located outside the first Z detection frame 2g and the second Z detection frame 2 h;

z-detection frame support beams 4 j.1-4 j.8 located outside the first Z-detection frame 2g and the second Z-detection frame 2h, the Z-detection frame support beams 4 j.1-4 j.4 located outside the first Z-detection frame 2g being connected between the first Z-detection frame 2g and the Z-detection frame support beam anchors 5 e.1-5 e.3 located outside the first Z-detection frame 2 g; the Z-detection frame support beams 4 j.5-4 j.8 located outside the second Z-detection frame 2h are connected between the second Z-detection frame 2h and the Z-detection frame support beam anchor points 5 e.3-5 e.5 located outside the second Z-detection frame 2 h;

z detection frame coupling beam anchor points 5 f.1-5 f.6 are positioned on the outer sides of the first Z detection frame 2g and the second Z detection frame 2 h;

z detection frame coupling beams 4 k.1-4 k.8 located at the outer sides of the first Z detection frame 2g and the second Z detection frame 2h, and Z detection frame coupling beams 4 k.1-4 k.4 located at the outer side of the first Z detection frame 2g are connected between the first Z detection frame 2g and Z detection frame coupling beam anchor points 5 f.1-5 f.4 located at the outer side of the first Z detection frame 2 g; z detection frame coupling beams 4 k.5-4 k.8 located on the outer side of the second Z detection frame 2h are connected between the second Z detection frame 2h and Z detection frame coupling beam anchor points 5 f.3-5 f.6 located on the outer side of the second Z detection frame 2 h.

For example, Z-detection frame support beam anchor points 5 e.1-5 e.5 are located on the upper and lower sides of the first Z-detection frame 2g and the second Z-detection frame 2 h; z detection frame support beams 4 j.1-4 j.8 are positioned at the upper and lower sides of the first Z detection frame 2g and the second Z detection frame 2h, and the Z detection frame support beams 4 j.1-4 j.4 positioned at the upper and lower sides of the first Z detection frame 2g are connected between the first Z detection frame 2g and the Z detection frame support beam anchor points 5 e.1-5 e.3 positioned at the upper and lower sides of the first Z detection frame 2 g; the Z detection frame support beams 4 j.5-4 j.8 positioned at the upper and lower sides of the second Z detection frame 2h are connected between the second Z detection frame 2h and the Z detection frame support beam anchor points 5 e.3-5 e.5 positioned at the upper and lower sides of the second Z detection frame 2 h; z detection frame coupling beam anchor points 5 f.1-5 f.6 are located at the corners of the first Z detection frame 2g and the second Z detection frame 2 h; z detection frame coupling beams 4 k.1-4 k.8 are located at the corners of the first Z detection frame 2g and the second Z detection frame 2h, and Z detection frame coupling beams 4 k.1-4 k.4 located at the corners of the first Z detection frame 2g are connected between the first Z detection frame 2g and Z detection frame coupling beam anchor points 5 f.1-5 f.4 located at the corners of the first Z detection frame 2 g; z detection frame coupling beams 4 k.5-4 k.8 located at the corners of the second Z detection frame 2h are connected between the second Z detection frame 2h and Z detection frame coupling beam anchor points 5 f.3-5 f.6 located at the corners of the second Z detection frame 2 h.

In the embodiment shown in fig. 1 and 4, there are five Z-detection frame support beam anchors 5e.1 to 5e.5, wherein the first Z-detection frame support beam anchor 5e.1 and the second Z-detection frame support beam anchor 5e.2 are located on the upper side of the first Z-detection frame 2g, the third Z-detection frame support beam anchor 5e.3 is located between the first Z-detection frame 2g and the second Z-detection frame 2h, and the fourth Z-detection frame support beam anchor 5e.4 and the fifth Z-detection frame support beam anchor 5e.5 are located on the lower side of the second Z-detection frame 2 h. 8Z-detection frame support beams 4 j.1-4 j.8, wherein a first Z-detection frame support beam 4j.1 and a second Z-detection frame support beam 4j.2 are positioned on the upper side of the first Z-detection frame 2 g; a third Z detection frame support beam 4j.3 and a fourth Z detection frame support beam 4j.4 are located on the underside of the first Z detection frame 2 g; a fifth Z-detection frame support beam 4j.5 and a sixth Z-detection frame support beam 4j.6 are located on the upper side of the second Z-detection frame 2 h; the seventh Z-detection frame support beam 4j.7 and the eighth Z-detection frame support beam 4j.8 are located on the lower side of the second Z-detection frame 2 h. Wherein the first Z detection frame support beam 4j.1 and the second Z detection frame support beam 4j.2 located on the upper side of the first Z detection frame 2g are connected to the upper side of the first Z detection frame 2g via a first Z detection frame support beam anchor point 5e.1 and a second Z detection frame support beam anchor point 5e.2, respectively; a third Z-test frame support beam 4j.3 and a fourth Z-test frame support beam 4j.4 located on the underside of the first Z-test frame 2g are connected to the underside of the first test frame 2g via a third Z-test frame support beam anchor point 5e.3 located between the first Z-test frame 2g and the second Z-test frame 2 h; a fifth Z inspection frame support beam 4j.5 and a sixth Z inspection frame support beam 4j.6 located at the upper side of the second inspection frame 2h are connected to the upper side of the second inspection frame 2h via a third Z inspection frame support beam anchor point 5e.3 located between the first Z inspection frame 2g and the second Z inspection frame 2 h; a seventh Z inspection frame support beam 4j.7 and an eighth Z inspection frame support beam 4j.8 located on the lower side of the second Z inspection frame 2g are connected to the lower side of the second Z inspection frame 2h via a fourth Z inspection frame support beam anchor point 5e.4 and a fifth Z inspection frame support beam anchor point 5e.5, respectively.

In the embodiment shown in fig. 1 and 4, the first Z detection frame support beam anchor point 5e.1 and the second Z detection frame support beam anchor point 5e.2 located on the upper side of the first Z detection frame 2g are located on the left and right sides of the first Z driving coupling beam 4b.3, respectively, the fourth Z detection frame support beam anchor point 5e.4 and the fifth Z detection frame support beam anchor point 5e.5 located on the lower side of the second Z detection frame 2h are located on the left and right sides of the second Z driving coupling beam 4b.4, respectively, and the five Z detection frame support beam anchor points 5e.1 to 5e.5 are symmetrical with respect to the X axis as a whole. A first Z detection frame support beam 4j.1 and a second Z detection frame support beam 4j.2 positioned on the upper side of the first Z detection frame 2g are positioned on the left and right sides of the first Z drive coupling beam 4b.3, respectively; third and fourth Z-detection frame support beams 4j.3 and 4j.4 on the lower side of the first Z-detection frame 2g are respectively located on the left and right sides of a third Z-detection frame support beam anchor point 5 e.3; fifth Z-detection frame support beams 4j.5 and sixth Z-detection frame support beams 4j.6 located on the upper side of the second Z-detection frame 2h are located on the left and right sides of the third Z-detection frame support beam anchor point 5e.3, respectively; seventh and eighth Z-detection frame support beams 4j.7 and 4j.8 located on the lower side of the second Z-detection frame 2h are respectively located on the left and right sides of the second Z-drive coupling beam 4 b.4. The Z detection frame support beams 4 j.1-4 j.8 are all U-shaped beams, and the opening direction of each U-shaped beam is parallel to the X axis (or the U-shaped beams are arranged parallel to the X axis); the Z-detection frame support beams 4 j.1-4 j.8 are distributed symmetrically with respect to the X-axis as a whole.

In the specific embodiment shown in fig. 1 and 4, six Z-detection frame coupling beam anchor points 5f.1 to 5f.6 are provided, wherein the first Z-detection frame coupling beam anchor point 5f.1 and the second Z-detection frame coupling beam anchor point 5f.2 are respectively located at the left corner and the right corner of the upper side of the first Z-detection frame 2 g; a third Z detection frame coupling beam anchor point 5f.3 and a fourth Z detection frame coupling beam anchor point 5f.4 are located between the first Z detection frame 2g and the second Z detection frame 2h and are respectively close to the left corner and the right corner of the first Z detection frame 2g and the second Z detection frame 2 h; fifth Z detection frame coupling beam anchor point 5f.5 and sixth Z detection frame coupling beam anchor point 5f.6 are located at the left and right corners of the underside of the second Z detection frame 2h, respectively. The number of the Z detection frame coupling beams 4k.1 to 4K.8 is eight, wherein the first Z detection frame coupling beam 4k.1 to the fourth Z detection frame coupling beam 4K.4 are respectively located at four corners of the first Z detection frame 2g, and the fifth Z detection frame coupling beam 4K.5 to the eighth Z detection frame coupling beam 4K.8 are respectively located at four corners of the second Z detection frame 2 h. Each Z-detection frame coupling beam includes two U-shaped beams connected in sequence, one of the U-shaped beams is parallel to one side of the corner where the U-shaped beam is located, and the other U-shaped beam is parallel to the other side of the corner where the U-shaped beam is located, for example, the Z-detection frame coupling beam 4k.1 is located at the left corner of the upper side of the first Z-detection frame 2g, one U-shaped beam thereof is parallel to the upper side of the left corner, and the other U-shaped beam is parallel to the left side of the left corner.

In the embodiment shown in fig. 1 and 4, the Z gyro structure further includes a first T-shaped lever 4m.1 and a second first T-shaped lever 4m.2, and the first T-shaped lever 4m.1 and the second first T-shaped lever 4m.1 are located between the first Z detection frame 2g and the second Z detection frame 2h and are respectively adjacent to the left corner and the right corner of the first Z detection frame 2g and the second Z detection frame 2 h. The first T-shaped lever 4m.1 includes a cross bar part and a vertical bar part, both ends of the cross bar part are respectively connected with a third Z detection frame coupling beam 4K.3 located at the left corner of the lower side of the first Z detection frame 2g and a fifth Z detection frame coupling beam 4K.5 located at the left corner of the upper side of the second Z detection frame 2h, and the vertical bar part is connected with a third Z detection frame coupling beam anchor point 5 f.3; the second T-shaped lever 4m.2 includes a cross bar portion and a vertical bar portion, both ends of the cross bar portion are connected to the fourth Z detection frame coupling beam 4K.4 located at the lower right corner of the first Z detection frame 2g and the fifth Z detection frame coupling beam 4K.5 located at the upper right corner of the second Z detection frame 2h, respectively, and the vertical bar portion thereof is connected to the fourth Z detection frame coupling beam anchor point 5 f.4. Wherein the first and second T-shaped levers 4m.1 and 4m.2 are provided to urge the first and second Z- sensing frames 2g and 2h to move in the opposite directions along the X-axis. Further, a first Z detection frame coupling beam 4k.1 located at a left corner of an upper side of the first Z detection frame 2g is connected to a left corner of the upper side of the first Z detection frame 2g via a first Z detection frame coupling beam anchor point 5 f.1; a second Z detection frame coupling beam 4K.2 positioned at the right corner of the upper side of the first Z detection frame 2g is connected with the right corner of the upper side of the first Z detection frame 2g through a second Z detection frame coupling beam anchor point 5 f.2; a seventh Z detection frame coupling beam 4K.7 located at the left corner of the lower side of the second Z detection frame 2h is connected to the left corner of the lower side of the second Z detection frame 2h via a fifth Z detection frame coupling beam anchor point 5 f.5; an eighth Z sensing frame coupling beam anchor point 4K.8 located at the right corner of the lower side of the second Z sensing frame 2h is connected to the right corner of the lower side of the second Z sensing frame 2h through a sixth Z sensing frame coupling beam anchor point 5 f.6. The Z detection frame coupling beam anchor points 5 f.1-5 f.6 are integrally symmetrical about the X axis; the Z detection frame coupling beams 4 K.1-4 K.8 are wholly symmetrical about the X axis.

The detection principle of the three-axis gyroscope shown in fig. 1 of the present invention is described below.

First, X/Y axis gyroscope detection principle

Fig. 5 is a schematic diagram illustrating a driving state of the three-axis gyroscope shown in fig. 1 according to the present invention. The first driving frame 1a and the second driving frame 1b on the upper side and the lower side are enabled to generate reverse resonant motion along the Y-axis direction by applying driving voltage, and the X/Y gyroscope structure can be driven to move. The specific process is that the first driving frame 1a and the second driving frame 1b drive the first mass block 2a and the second mass block 2b to generate a vertical reverse resonant motion along the Y axis direction through the X/Y driving coupling beams 4b.1 and 4b.2, and the first mass block 2a and the second mass block 2b drive the third mass block 2c and the fourth mass block 2d to generate a horizontal reverse resonant motion along the X axis through the oblique beams 4e.1 to 4e.4 arranged between the mass blocks, so that the motion of the four mass blocks 2a to 2d in the X/Y gyroscope structure is similar to a heart and integrally moves outwards or inwards.

Please refer to fig. 6, which is a schematic diagram of the three-axis gyroscope of fig. 1 for X-axis detection. When the angular velocity of the X axis is input, the Coriolis effect can generate Coriolis force to drive the first mass block 2a and the second mass block 2b to move in an out-of-plane reverse direction along the Z axis direction, X axis detection electrodes 3c.1 and 3c.2 arranged below the first mass block 2a and the second mass block 2b are sensitive to the change of the distance, further, self capacitances of the X axis detection electrodes 3c.1 and 3c.2 can be changed along with the change of the self capacitances, and the angular velocity of the X axis can be obtained through the change of the detection capacitances.

Fig. 7 is a schematic diagram of the three-axis gyroscope of fig. 1 for Y-axis detection according to the present invention. When the Y-axis angular rate is input, the Coriolis effect can generate Coriolis force to drive the third mass block 2c and the fourth mass block 2d to move in an out-of-plane reverse direction along the Z-axis direction, Y-axis detection electrodes 3d.1 and 3d.2 arranged below the third mass block 2c and the fourth mass block 2d are sensitive to the change of the distance, the self capacitance of the X-axis detection electrodes 3d.1 and 3d.2 can be changed accordingly, and the X-axis angular rate can be obtained through the change of the detection capacitance.

Two-axis and Z-axis gyroscope detection principle

As shown in fig. 5, the first driving frame 1a and the second driving frame 1b on the upper and lower sides generate reverse resonant motion along the Y-axis direction by applying the driving voltage, so as to drive the Z-gyroscope structure to move. The specific process is that the first driving frame 1a and the second driving frame 1b drive the first Z detection frame 2g and the second Z detection frame 2h to generate vertical reverse resonant motion along the Y-axis direction through the Z driving coupling beams 4b.3 and 4b.4, the first Z mass block 2e and the second Z mass block 2f are respectively arranged in the first Z detection frame 2g and the second Z detection frame 2h, and the first Z detection frame 2g and the second Z detection frame 2h can drive the first Z mass block 2e and the second Z mass block 2f to generate vertical reverse resonant motion along the Y-axis direction.

Please refer to fig. 8, which is a schematic diagram of the three-axis gyroscope of fig. 1 for Z-axis detection. When the Z-axis angular rate is input, the Coriolis effect can generate Coriolis force to drive the first Z mass block 2e and the second Z mass block 2f to move reversely along the X-axis direction, Z detection electrodes 3e.1 and 3e.2 respectively arranged in the first Z mass block 2e and the second Z mass block 2f are sensitive to the change of the distance, further the capacitance of the Z detection electrodes 3e.1 and 3e.2 can change along with the change, and the Z-axis angular rate can be obtained through the change of the detection capacitance.

In summary, in the three-axis gyroscope according to the present invention, when the upper driving frame 1a and the lower driving frame 1b drive the mass blocks 2a to 2f to move, the displacement of the mass blocks 2a to 2f in the sensitive direction is negligible, and the angular rate signal detection is not affected. When the gyroscope is sensitive to different direction angular rates, the corresponding mass blocks move due to the Coriolis effect without influencing other mass blocks, so that the triaxial gyroscope designed by the utility model can reduce orthogonal errors and improve the detection precision.

In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example" or "some examples" or the like are intended to mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples described in this specification can be combined and combined by one skilled in the art.

While embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and not to be construed as limiting the present invention, and that changes, modifications and variations may be made therein by those of ordinary skill in the art within the scope of the present invention.

Claims (16)

1. A three-axis gyroscope, comprising:

a first driving frame capable of performing a resonant motion along a Y-axis;

a second driving frame parallel to and spaced apart from the first driving frame by a predetermined distance, and capable of performing a resonant motion in a direction opposite to the first driving frame along the Y-axis;

an X/Y gyro structure connected between the first driving frame and the second driving frame;

the Z gyroscope structure is connected between the first driving frame and the second driving frame and positioned on one side of the X/Y gyroscope structure;

the X/Y gyroscope structure and the Z gyroscope structure are mutually independent, and the X/Y gyroscope structure and the Z gyroscope structure are driven by the first driving frame and the second driving frame together.

2. The tri-axial gyroscope of claim 1, further comprising:

a first drive frame support beam anchor point;

a first drive frame support beam connected between the first drive frame support beam anchor point and a first drive frame;

a second drive frame support beam anchor point;

a second drive frame support beam connected between the second drive frame support beam anchor point and a second drive frame;

first drive electrodes arranged on two sides of the first drive frame;

first driving feedback electrodes arranged at two sides of the first driving frame;

second drive electrodes arranged on two sides of the second drive frame;

second driving feedback electrodes arranged on two sides of the second driving frame;

driving the first driving frame to perform a resonant motion along the Y-axis by applying a driving voltage on the first driving electrode;

the second driving frame is driven to perform a resonant motion along the Y-axis in an opposite direction to the first driving frame by applying a driving voltage to the second driving electrode.

3. The tri-axial gyroscope of claim 2,

the first driving frame is connected with the first driving frame supporting beam through a first driving frame supporting beam in an anchor point mode, the first driving frame and the first driving frame supporting beam are suspended above the substrate, the second driving frame is connected with the second driving frame supporting beam through a second driving frame supporting beam in an anchor point mode, and the second driving frame supporting beam are suspended above the substrate in an anchor point mode;

the X axis and the Y axis are mutually vertical;

the X axis is along the left-right direction, and the Y axis is along the up-down direction;

the two sides of the first driving frame are the upper side and the lower side of the first driving frame;

the two sides of the second driving frame are the upper side and the lower side of the second driving frame.

4. The three-axis gyroscope of claim 1, wherein the X/Y gyroscope structure comprises:

the first X/Y driving coupling beam and the second X/Y driving coupling beam;

the first mass block, the second mass block, the third mass block and the fourth mass block are respectively arranged at the upper, lower, left and right positions of the central point A of the X/Y gyroscope structure, the first mass block, the third mass block and the fourth mass block are adjacently arranged, the second mass block, the third mass block and the fourth mass block are adjacently arranged, the first mass block is connected with the first driving frame through the first X/Y driving coupling beam, and the second mass block is connected with the second driving frame through the second X/Y driving coupling beam;

mass block anchor points located outside the four mass blocks of the X/Y gyroscope structure;

the mass block supporting beams are positioned on the outer sides of the four mass blocks of the X/Y gyroscope structure, and each mass block of the X/Y gyroscope structure is connected with the mass block anchor point on the outer side of the X/Y gyroscope structure through the mass block supporting beam on the outer side of the X/Y gyroscope structure;

the four oblique beams are respectively positioned between every two adjacent mass blocks in the X/Y gyroscope structure, and every two adjacent mass blocks in the X/Y gyroscope structure are connected through the oblique beams positioned between the two adjacent mass blocks;

wherein, when the first driving frame carries out resonant motion along the Y axis and the second driving frame carries out resonant motion along the Y axis in the direction opposite to that of the first driving frame, the first driving frame drives the first mass block to carry out resonant motion along the Y axis through the first X/Y driving coupling beam, the second driving frame drives the second mass block to carry out resonant motion along the Y axis in the direction opposite to that of the first mass block through the second X/Y driving coupling beam, the first mass block and the second mass block further drive the third mass block to carry out resonant motion along the X axis through the corresponding oblique beams, and the fourth mass block is further driven to carry out resonant motion along the X axis in the direction opposite to that of the third mass block through the corresponding oblique beams,

the X-axis and the Y-axis are perpendicular to each other and define a plane in which the X/Y gyroscope structure lies, and the Z-axis is perpendicular to the plane defined by the X-axis and the Y-axis.

5. The tri-axial gyroscope of claim 4, wherein the X/Y gyroscope structure further comprises:

an X/Y center coupling beam structure located at the center point A of the X/Y gyro structure,

and the four X/Y mass block coupling beams are respectively connected to the inner sides of the corresponding mass blocks, and each X/Y mass block coupling beam is connected to the X/Y central coupling beam structure.

6. The tri-axial gyroscope of claim 5, wherein the X/Y gyroscope structure further comprises:

a first X-axis detection electrode disposed below the first mass block;

a second X-axis detection electrode disposed below the second mass block;

a first Y-axis detection electrode disposed below the third mass block;

a second Y-axis detection electrode disposed below the fourth mass block;

when the input of the X-axis angular velocity is sensed, the first mass block and the second mass block move reversely along the Z-axis direction, the first X-axis detection electrode detects the change of the distance from the first mass block, the second X-axis detection electrode detects the change of the distance from the second mass block, the capacitance of the first X-axis detection electrode and the capacitance of the second X-axis detection electrode are increased and decreased, the difference between the first X-axis detection electrode and the second X-axis detection electrode obtains the capacitance change caused by the X-axis angular velocity, and further the input X-axis angular velocity is obtained; when the input of the Y-axis angular velocity is sensed, the third mass block and the fourth mass block are caused to move reversely along the Z-axis direction, the distance between the first Y-axis detection electrode and the third mass block is changed, the distance between the second Y-axis detection electrode and the fourth mass block is changed, the capacitance of the first Y-axis detection electrode and the capacitance of the second Y-axis detection electrode are increased and decreased, the difference between the first Y-axis detection electrode and the second Y-axis detection electrode is obtained to obtain the capacitance change caused by the Y-axis angular velocity, and then the input Y-axis angular velocity is obtained.

7. The tri-axial gyroscope of claim 5,

the oblique beam is a U-shaped beam, one end of the oblique beam is connected with one of the two adjacent mass blocks correspondingly, the other end of the oblique beam is connected with the other one of the two adjacent mass blocks correspondingly, and an opening of the U-shaped beam points to a central point A of the X/Y gyroscope structure;

each X/Y mass block coupling beam comprises a plurality of hollow straight beam parts with the lengths gradually reduced from outside to inside and a connecting part for connecting the hollow straight beams.

8. The tri-axial gyroscope of claim 4,

the four mass blocks in the X/Y gyroscope structure comprise a rectangular part and an isosceles trapezoid part,

the four mass blocks are integrally symmetrical about an X axis and a Y axis;

the four oblique beams are integrally symmetrical about an X axis and a Y axis;

a mass block of the X/Y gyroscope structure can be provided with a certain number of damping holes for reducing damping and improving the quality factor and sensitivity of the gyroscope.

9. The tri-axial gyroscope of claim 5, wherein the X/Y center-coupled beam structure comprises:

the X/Y center coupling mechanism is internally defined with an X/Y space;

an X/Y center coupling beam located within the X/Y space;

an X/Y center coupling beam anchor point located within the X/Y space;

the X/Y center coupling mechanism is connected with the X/Y center coupling beam anchor point through the X/Y center coupling beam, and the X/Y center coupling mechanism is connected with the four mass blocks of the X/Y gyroscope structure through the four connecting beams.

10. The tri-axial gyroscope of claim 9,

the X/Y center coupling beam comprises a cross-shaped coupling center beam, a first coupling folding beam and a second coupling folding beam, wherein the cross point of the cross-shaped coupling center beam is positioned at the center point A of the X/Y gyroscope structure,

the X/Y central coupling beam anchor points are four and are respectively positioned in four areas divided by the cross-shaped coupling central beam, wherein a first X/Y central coupling beam anchor point is positioned in the upper left area of the cross-shaped coupling central beam, a second X/Y central coupling beam anchor point is positioned in the upper right area of the cross-shaped coupling central beam, a third X/Y central coupling beam anchor point is positioned in the lower left area of the cross-shaped coupling central beam, and a fourth X/Y central coupling beam anchor point is positioned in the lower right area of the cross-shaped coupling central beam;

the first coupling folding beam is connected between the first X/Y center coupling beam anchor point and the third X/Y center coupling beam anchor point, the middle point of the first coupling folding beam is connected with one end of the cross rod part of the cross coupling center beam, and the first coupling folding beam is symmetrical about the cross rod part of the cross coupling center beam;

the second coupling folding beam is connected between the second X/Y center coupling beam anchor point and the fourth X/Y center coupling beam anchor point, the middle point of the second coupling folding beam is connected with the other end of the cross rod part of the cross coupling center beam, and the second coupling folding beam is symmetrical about the cross rod part of the cross coupling center beam;

one end and the other end of the vertical rod part of the cross-shaped coupling center beam are respectively connected with the X/Y center coupling mechanism.

11. The tri-axial gyroscope of claim 10,

the X/Y center coupling beam also comprises four L-shaped middle supporting beams which are respectively positioned in four areas divided by the cross-shaped coupling center beam, one end of each L-shaped middle supporting beam is connected with the cross rod part of the cross-shaped coupling center beam in the area where the L-shaped middle supporting beam is positioned, the other end of each L-shaped middle supporting beam is connected with the vertical rod part of the cross-shaped coupling center beam in the area where the L-shaped middle supporting beam is positioned, and the opening direction of each L-shaped middle supporting beam faces to the central point A of the X/Y gyroscope structure;

the X/Y center coupling mechanism is a diamond structure with an X/Y space defined inside, and four corners of the diamond structure are respectively connected with the four X/Y mass block coupling beams;

the first coupling folding beam comprises a first zigzag elastic beam and a third zigzag elastic beam, wherein one end of the first zigzag elastic beam is connected with the first X/Y central coupling beam anchor point, the other end of the first zigzag elastic beam is connected with the other end of the third zigzag elastic beam, and one end of the third zigzag elastic beam is connected with the third X/Y central coupling beam anchor point; one end of a cross rod part of the cross coupling center beam is connected with the other end of the first zigzag elastic beam and the other end of the third zigzag elastic beam, and the first zigzag elastic beam and the third zigzag elastic beam are symmetrical relative to the cross rod part of the cross coupling center beam;

the second coupling folding beam comprises a second zigzag elastic beam and a fourth zigzag elastic beam, wherein one end of the second zigzag elastic beam is connected with the second X/Y central coupling beam anchor point, the other end of the second zigzag elastic beam is connected with the other end of the fourth zigzag elastic beam, and one end of the fourth zigzag elastic beam is connected with the fourth X/Y central coupling beam anchor point; the other end of the cross-shaped coupling center beam is connected with the other end of the second inverted-V-shaped elastic beam and the other end of the fourth inverted-V-shaped elastic beam, and the second inverted-V-shaped elastic beam and the fourth inverted-V-shaped elastic beam are symmetrical relative to the cross rod part of the cross-shaped coupling center beam.

12. The tri-axial gyroscope of claim 1, wherein the Z-gyroscope structure comprises:

a first Z drive coupling beam and a second Z drive coupling beam;

the first Z detection frame is connected with the first driving frame through a first Z driving coupling beam, and a first Z space is defined in the first Z detection frame;

the first Z mass block is positioned in the first Z space and is connected with the first Z detection frame through the first Z mass block coupling beam;

the second Z detection frame is connected with the second driving frame through a second Z driving coupling beam, and a second Z space is defined in the second Z detection frame;

the second Z mass block is positioned in the second Z space and is connected with the second Z detection frame through a second Z mass block coupling beam;

when the first driving frame carries out resonant motion along the Y axis and the second driving frame carries out resonant motion opposite to the first driving frame along the Y axis, the first driving frame drives the first Z mass block to carry out resonant motion along the Y axis through the first Z driving coupling beam, the first Z detection frame and the first Z mass block coupling beam, and the second driving frame drives the second Z mass block to carry out resonant motion opposite to the first Z mass block along the Y axis through the second Z driving coupling beam, the second Z detection frame and the second Z mass block coupling beam.

13. The tri-axial gyroscope of claim 12, wherein the Z-gyroscope structure further comprises:

a Z-test frame support beam anchor point located outside the first and second Z-test frames;

a Z-sense frame support beam positioned outside the first Z-sense frame and the second Z-sense frame, wherein the Z-sense frame support beam positioned outside the first Z-sense frame is connected between the first Z-sense frame and the Z-sense frame support beam anchor point positioned outside the first Z-sense frame; the Z-test frame support beam located outside the second Z-test frame is connected between the second Z-test frame and the Z-test frame support beam anchor point located outside the second Z-test frame;

a Z detection frame coupling beam anchor point located outside the first Z detection frame and the second Z detection frame;

the Z detection frame coupling beam is positioned on the outer sides of the first Z detection frame and the second Z detection frame, and the Z detection frame coupling beam positioned on the outer side of the first Z detection frame is connected between the first Z detection frame and a Z detection frame coupling beam anchor point positioned on the outer side of the first Z detection frame; the Z detection frame coupling beam positioned on the outer side of the second Z detection frame is connected between the second Z detection frame and the Z detection frame coupling beam anchor point positioned on the outer side of the second Z detection frame;

the Z detection frame support beam anchor points are positioned at the upper side and the lower side of the first Z detection frame and the second Z detection frame;

the Z detection frame supporting beams are positioned on the upper side and the lower side of the first Z detection frame and the second Z detection frame, wherein the Z detection frame supporting beams positioned on the upper side and the lower side of the first Z detection frame are connected between the first Z detection frame and the Z detection frame supporting beam anchor points positioned on the upper side and the lower side of the first Z detection frame; the Z detection frame supporting beams positioned on the upper side and the lower side of the second Z detection frame are connected between the second Z detection frame and the Z detection frame supporting beam anchor points positioned on the upper side and the lower side of the second Z detection frame;

the Z detection frame coupling beam anchor points are positioned at the corners of the first Z detection frame and the second Z detection frame;

the Z detection frame coupling beam is positioned at the corner of the first Z detection frame and the corner of the second Z detection frame, and the Z detection frame coupling beam positioned at the corner of the first Z detection frame is connected between the first Z detection frame and the Z detection frame coupling beam anchor point positioned at the corner of the first Z detection frame; and the Z detection frame coupling beam positioned at the corner of the second Z detection frame is connected between the second Z detection frame and the Z detection frame coupling beam anchor point positioned at the corner of the second Z detection frame.

14. The tri-axial gyroscope of claim 13,

the number of the Z detection frame support beam anchor points is five, wherein a first Z detection frame support beam anchor point and a second Z detection frame support beam anchor point are positioned on the upper side of the first Z detection frame, a third Z detection frame support beam anchor point is positioned between the first Z detection frame and the second Z detection frame, and a fourth Z detection frame support beam anchor point and a fifth Z detection frame support beam anchor point are positioned on the lower side of the second Z detection frame;

the number of the Z detection frame supporting beams is 8, wherein a first Z detection frame supporting beam and a second Z detection frame supporting beam are positioned on the upper side of the first Z detection frame; a third Z detection frame support beam and a fourth Z detection frame support beam are positioned at the lower side of the first Z detection frame; the fifth Z detection frame supporting beam and the sixth Z detection frame supporting beam are positioned on the upper side of the second Z detection frame; the seventh Z detection frame support beam and the eighth Z detection frame support beam are positioned at the lower side of the second Z detection frame;

the first Z detection frame support beam and the second Z detection frame support beam are respectively connected with the upper side of the first Z detection frame through the first Z detection frame support beam anchor point and the second Z detection frame support beam anchor point; the third Z detection frame support beam and the fourth Z detection frame support beam are connected with the lower side of the first Z detection frame through the third Z detection frame support beam anchor point; the fifth Z detection frame supporting beam and the sixth Z detection frame supporting beam are connected with the upper side of the second Z detection frame through a third Z detection frame supporting beam anchor point; the seventh Z detection frame support beam and the eighth Z detection frame support beam are respectively connected with the lower side of the second Z detection frame through the fourth Z detection frame support beam anchor point and the fifth Z detection frame support beam anchor point;

the first Z detection frame support beam anchor point and the second Z detection frame support beam anchor point which are positioned on the upper side of the first Z detection frame are respectively positioned on the left side and the right side of the first Z driving coupling beam, and the fourth Z detection frame support beam anchor point and the fifth Z detection frame support beam anchor point which are positioned on the lower side of the second Z detection frame are respectively positioned on the left side and the right side of the second Z driving coupling beam;

the first Z detection frame supporting beam and the second Z detection frame supporting beam which are positioned on the upper side of the first Z detection frame are respectively positioned on the left side and the right side of the first Z driving coupling beam; the third Z detection frame support beam and the fourth Z detection frame support beam which are positioned on the lower side of the first Z detection frame are respectively positioned on the left side and the right side of the third Z detection frame support beam anchor point; the fifth Z detection frame supporting beam and the sixth Z detection frame supporting beam which are positioned on the upper side of the second Z detection frame are respectively positioned on the left side and the right side of the third Z detection frame supporting beam anchor point; the seventh Z detection frame supporting beam and the eighth Z detection frame supporting beam which are positioned on the lower side of the second Z detection frame are respectively positioned on the left side and the right side of the second Z driving coupling beam;

the Z detection frame supporting beam is a U-shaped beam, and the opening direction of the U-shaped beam is parallel to the X axis;

the number of the Z detection frame coupling beam anchor points is six, wherein a first Z detection frame coupling beam anchor point and a second Z detection frame coupling beam anchor point are respectively positioned at the left corner and the right corner of the upper side of the first Z detection frame; a third Z detection frame coupling beam anchor point and a fourth Z detection frame coupling beam anchor point are positioned between the first Z detection frame and the second Z detection frame and are respectively close to the left corner and the right corner of the first Z detection frame and the second Z detection frame; a fifth Z detection frame coupling beam anchor point and a sixth Z detection frame coupling beam anchor point are respectively positioned at the left corner and the right corner of the lower side of the second Z detection frame;

the number of the Z detection frame coupling beams is eight, wherein a first Z detection frame coupling beam to a fourth Z detection frame coupling beam are respectively positioned at four corners of the first Z detection frame, and a fifth Z detection frame coupling beam to an eighth Z detection frame coupling beam are respectively positioned at four corners of the second Z detection frame;

each Z detection frame coupling beam comprises two U-shaped beams which are sequentially connected, one U-shaped beam is parallel to one side of the corner where the U-shaped beam is located, and the other U-shaped beam is parallel to the other side of the corner where the U-shaped beam is located.

15. The tri-axial gyroscope of claim 14,

the Z gyro structure further comprises a first T-shaped lever and a second first T-shaped lever, the first T-shaped lever and the second first T-shaped lever are positioned between the first Z detection frame and the second Z detection frame and respectively close to the left corner and the right corner of the first Z detection frame and the second Z detection frame,

the first T-shaped lever comprises a transverse rod part and a vertical rod part, two ends of the transverse rod part are respectively connected with a third Z detection frame coupling beam positioned at the left corner of the lower side of the first Z detection frame and a fifth Z detection frame coupling beam positioned at the left corner of the upper side of the second Z detection frame, and the vertical rod part of the first T-shaped lever is connected with the anchor point of the third Z detection frame coupling beam;

the second T-shaped lever comprises a transverse rod part and a vertical rod part, two ends of the transverse rod part are respectively connected with a fourth Z detection frame coupling beam positioned at the lower right corner of the first Z detection frame and a fifth Z detection frame coupling beam positioned at the upper right corner of the second Z detection frame, the vertical rod part is connected with the anchor point of the fourth Z detection frame coupling beam,

the first T-shaped lever and the second T-shaped lever are arranged to enable the first Z detection frame and the second Z detection frame to move reversely along the X axis.

16. The tri-axial gyroscope of claim 12, wherein the Z-gyroscope structure further comprises:

a first Z-axis detection electrode disposed within the first Z mass block;

a second Z-axis detection electrode disposed within the second Z mass block;

when the input of the Z-axis angular velocity is sensed, the first Z mass block and the second Z mass block move reversely along the X-axis direction, the first Z-axis detection electrode detects the change of the distance from the first Z mass block, the second Z-axis detection electrode detects the change of the distance from the second Z mass block, the capacitance of the first Z-axis detection electrode and the capacitance of the second Z-axis detection electrode are increased and decreased, the capacitance change caused by the Z-axis angular velocity is obtained through difference of the first Z-axis detection electrode and the second Z-axis detection electrode, and the input Z-axis angular velocity is obtained;

the first Z mass block and the second Z mass block can be provided with a certain number of damping holes for reducing damping and improving the sensitivity of the Z-axis gyroscope.

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