CN113161482B - Integrated Inductor - Google Patents
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- CN113161482B CN113161482B CN202010015031.XA CN202010015031A CN113161482B CN 113161482 B CN113161482 B CN 113161482B CN 202010015031 A CN202010015031 A CN 202010015031A CN 113161482 B CN113161482 B CN 113161482B
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Abstract
本公开涉及集成电感。一种集成电感包含第一绕组及第二绕组，且具有第一端点、第二端点及一节点。第一绕组以该第一端点及该节点为两端点，且包含第一线圈及第二线圈，该第一线圈及该第二线圈不重叠。第二绕组以该第二端点及该节点为两端点，且包含第三线圈及第四线圈，该第三线圈及该第四线圈不重叠。该第一线圈与该第三线圈具有重叠的范围，且该第二线圈与该第四线圈具有重叠的范围。该第一线圈被该第三线圈包围，且该第四线圈被该第二线圈包围。
The present disclosure relates to an integrated inductor. An integrated inductor includes a first winding and a second winding, and has a first endpoint, a second endpoint and a node. The first winding has the first endpoint and the node as two endpoints, and includes a first coil and a second coil, and the first coil and the second coil do not overlap. The second winding has the second endpoint and the node as two endpoints, and includes a third coil and a fourth coil, and the third coil and the fourth coil do not overlap. The first coil and the third coil have an overlapping range, and the second coil and the fourth coil have an overlapping range. The first coil is surrounded by the third coil, and the fourth coil is surrounded by the second coil.
Description
Technical Field
The present invention relates to integrated inductors, and more particularly to an integrated inductor with high symmetry.
Background
The inductor is a main element of the transformer, and the inductor and the transformer are important elements for realizing the functions of single-ended to differential signal conversion, signal coupling, impedance matching and the like in the radio frequency integrated circuit. As integrated circuits have evolved into System on Chip (SoC), integrated inductors (INTEGRATED INDUCTOR) have been increasingly used in place of conventional discrete components in rf integrated circuits. The layout of the integrated inductor greatly affects the characteristics of the integrated inductor (such as the inductance value and quality factor (Q)), so designing an integrated inductor with high symmetry is an important issue.
Disclosure of Invention
In view of the shortcomings of the prior art, an object of the present invention is to provide an integrated inductor.
The invention discloses an integrated inductor. The integrated inductor comprises a first winding and a second winding, and is provided with a first endpoint, a second endpoint and a node. The first winding takes the first end point and the node as two end points and comprises a first coil and a second coil, and the first coil and the second coil are not overlapped. The second winding takes the second end point and the node as two end points and comprises a third coil and a fourth coil, and the third coil and the fourth coil are not overlapped. The first coil and the third coil have overlapping ranges, and the second coil and the fourth coil have overlapping ranges. The integrated inductor is substantially symmetrical to an axis of symmetry, the axis of symmetry does not overlap the first coil, the second coil, the third coil and the fourth coil, and the first terminal and the second terminal are located on different sides of the axis of symmetry.
The invention further discloses an integrated inductor. The integrated inductor comprises a first winding and a second winding, and is provided with a first endpoint, a second endpoint and a node. The first winding takes the first end point and the node as two end points and comprises a first coil and a second coil, and the first coil and the second coil are not overlapped. The second winding takes the second end point and the node as two end points and comprises a third coil and a fourth coil, and the third coil and the fourth coil are not overlapped. The first coil and the third coil have overlapping ranges, and the second coil and the fourth coil have overlapping ranges. The first coil is surrounded by the third coil, and the fourth coil is surrounded by the second coil.
Compared with the prior art, the integrated inductor has excellent symmetry, and therefore has better component characteristics and performance.
The features, implementation and effects of the present invention are described in detail below with reference to the drawings.
Drawings
FIGS. 1A-1C illustrate an integrated inductor structure according to an embodiment of the present invention;
FIGS. 2A-2B are two windings of the integrated inductor of FIG. 1;
FIG. 3 is a schematic diagram of an integrated inductor according to an embodiment of the present invention;
Fig. 4 is a schematic diagram of an integrated inductor according to another embodiment of the present invention;
FIG. 5 is a graph showing the relationship between the inductance value and the frequency of two sub-inductors of the integrated inductor according to the present invention;
FIGS. 6A-6C illustrate the structure of an integrated inductor according to another embodiment of the present invention, and
Fig. 7A-7C illustrate the structure of an integrated inductor according to another embodiment of the present invention.
Detailed Description
The technical language of the following description refers to the conventional terms in the art, and as the description proceeds, a part of the terms are described or defined, and the explanation of the part of the terms is based on the description or definition of the description.
The disclosure of the present invention includes an integrated inductor. Since some of the components included in the integrated inductor of the present invention may be known components alone, the details of the known components will be omitted without affecting the full disclosure and operability of the device.
Fig. 1A-1C illustrate the structure of an integrated inductor according to an embodiment of the present invention. The integrated inductor 100 is implemented in a first conductor layer and a second conductor layer in a semiconductor structure. In some embodiments, the first conductor layer may be one of an ultra-thick metal (UTM-THICK METAL, UTM) layer and a re-routing layer (re-distribution layer, RDL), while the second conductor layer is the other of UTM and RDL. Fig. 1A shows a complete structure of the integrated inductor 100, fig. 1B shows a layout of the integrated inductor 100 on the first conductor layer, and fig. 1C shows a layout of the integrated inductor 100 on the second conductor layer. In addition to the crossover 145 and 195, the line segment or trace (trace) of the integrated inductor 100 is located on the first conductor layer. The crossover line segments 145 and 195 connect the line segments of the first conductor layer through a penetrating structure, which may be a via (via) or a via array (via array).
As shown in fig. 1A, the integrated inductor 100 has a highly symmetrical structure. More specifically, the integrated inductor 100 is substantially symmetrical to the horizontal symmetry axis R1H and the vertical symmetry axis R1V (the horizontal symmetry axis R1H and the vertical symmetry axis R1V are substantially perpendicular to each other). Terminal 111 and terminal 161 are two terminals of integrated inductor 100, and reference numeral 102 represents a node of integrated inductor 100. After the signal (i.e., current) enters the integrated inductor 100 from the terminal 111, it flows through the integrated inductor 100 in the order of the outer ring (i.e., most of the dark gray line segment) on the right side of the vertical symmetry axis R1V, the inner ring (dark gray line segment) on the left side of the vertical symmetry axis R1V, the crossover line segment 145, the dark gray line segment between the crossover line segment 145 and the node 102, the outer ring (i.e., most of the light gray line segment) on the left side of the vertical symmetry axis R1V, the crossover line segment 195, the inner ring (light gray line segment) on the right side of the vertical symmetry axis R1V, a small light gray line segment on the left side of the vertical symmetry axis R1V, and the exit from the integrated inductor 100 from the terminal 161. In other words, the current direction 151 of the right half of the integrated inductor 100 is different from the current direction 152 of the left half of the integrated inductor 100 (one is clockwise and the other is anticlockwise), so that the magnetic field generated by the integrated inductor 100 is less divergent, and thus other components are prevented from being affected, or the integrated inductor 100 is prevented from being affected by external magnetic fields.
The integrated inductor 100 may be considered to be comprised of two windings (windings), winding 110 (fig. 2A) and winding 160 (fig. 2B). The winding 110 includes the dark gray trace and crossover segment 145 of fig. 1A, while the winding 160 includes the light gray trace and crossover segment 195 of fig. 1A. Terminal 111 and node 102 are the two terminals of winding 110, while terminal 161 and node 102 are the two terminals of winding 160. In other words, windings 110 and 160 are connected through node 102. In some embodiments, the length of the trace between node 102 and endpoint 111 is substantially equal to the length of the trace between node 102 and endpoint 161, in other words, the total length of the trace of winding 110 is substantially equal to the total length of the trace of winding 160. After passing through all of one of windings 110 and 160, the current entering integrated inductor 100 flows into the other via node 102 and then through all of the other. As shown in fig. 2A and 2B, because the windings 110 and 160 are substantially equal in length along the first conductor layer and the second conductor layer (i.e., the crossover segments 145 and 195 are substantially equal in length), the windings 110 and 160 are electrically symmetrical.
Winding 110 includes coil (coil) 120 and coil 130. The coil 120 and the coil 130 are connected through the crossing structure 140, and the coil 120 and the coil 130 do not overlap. The current direction of coil 120 is opposite to the current direction of coil 130 (one clockwise and the other counter-clockwise). The winding 110 is symmetrical about a horizontal axis of symmetry R1H but asymmetrical about a vertical axis of symmetry R1V. The horizontal symmetry axis R1H overlaps the coils 120 and 130, but the vertical symmetry axis R1V does not overlap the coils 120 and 130.
The winding 160 includes a coil 170 and a coil 180. The coil 170 and the coil 180 are connected through the crossing structure 190, and the coil 170 and the coil 180 are not overlapped. The current direction of coil 170 is opposite to the current direction of coil 180. The current direction of coil 170 is the same as the current direction of coil 120, and the current direction of coil 180 is the same as the current direction of coil 130. The windings 160 are symmetrical about a horizontal axis of symmetry R1H, but asymmetrical about a vertical axis of symmetry R1V. The horizontal symmetry axis R1H overlaps the coils 170 and 180, but the vertical symmetry axis R1V does not overlap the coils 170 and 180.
As shown in fig. 2A and 2B, the coil 120 and the coil 180 are substantially equal in size (i.e., the line segments or traces of the two are substantially equal in length), and the coil 130 and the coil 170 are substantially equal in size (i.e., the line segments or traces of the two are substantially equal in length).
Referring to fig. 1A, 2A and 2B, the coil 120 and the coil 170 have overlapping ranges and the coil 170 surrounds the coil 120, and the coil 130 and the coil 180 have overlapping ranges and the coil 130 surrounds the coil 180. In other words, the area encompassed by coil 120 (e.g., about the area of dashed box 125) overlaps the area encompassed by coil 170 (e.g., about the area of dashed box 175). Similarly, the area surrounded by the coil 130 overlaps the area surrounded by the coil 180. The coil 120, the coil 130, the coil 170 and the coil 180 are all of a single turn (turn) structure, so that the integrated inductor 100 is of a left-right (relative to the vertical symmetry axis R1V) two-turn structure.
As shown in fig. 1A, the terminal 111, the terminal 161 and the node 102 are located on the same side of the integrated inductor 100 (i.e. below the horizontal symmetry axis R1H), and the coil 120 is located between the terminal 111 and the terminal 161. Furthermore, the end points 111 and 161 are located on different sides of the vertical symmetry axis R1V.
The through structure on terminal 161 is for signal (i.e., current) feed-in (feed-in) or feed-out (feed-out). In other embodiments, a through structure may be implemented on the terminal 111 to improve the electrical symmetry of the windings 110 and 160. As shown in fig. 3, the terminal 111 is connected to the extension line 112 through the through structure, the terminal 161 is connected to the extension line 162 through the through structure, and the current is fed into or out of the integrated inductor 100 through the extension line 112 and the extension line 162. The extension line segment 112 and the extension line segment 162 are located on different sides of the vertical symmetry axis R1V. Referring to fig. 2B and 3, the extension segment 162 intersects the coil 170.
Fig. 4 is a structure of an integrated inductor according to an embodiment of the present invention. Fig. 4 shows a complete structure of the integrated inductor 200, and the integrated inductor 200 is implemented in the first conductor layer and the second conductor layer. In addition to the crossover segment 222, the crossover segment 245, and the crossover segment 295, the segments or traces of the integrated inductor 200 are all located on the first conductor layer.
As shown in fig. 4, the integrated inductor 200 is substantially symmetrical to a horizontal symmetry axis R2H and a vertical symmetry axis R2V (the horizontal symmetry axis R2H and the vertical symmetry axis R2V are substantially perpendicular to each other). The terminal 211 and the terminal 261 are two terminals of the integrated inductor 200, and the reference numeral 202 represents a node of the integrated inductor 200. The integrated inductor 200 is similar to the integrated inductor 100, except that two windings of the integrated inductor 200 are connected through a crossover segment 222 and the node 202 is located on the crossover segment 222. Other features of the integrated inductor 200 can be known by those skilled in the art from fig. 2A-2B and related descriptions, and thus are not described in detail. In some embodiments, terminal 261 may extend downward to facilitate signal feed-in or feed-out, in which case, crossover segment 222 intersects a segment directly connecting terminal 261, i.e., crossover segment 222 intersects one of the windings (the windings represented by the light gray segments) of integrated inductor 200.
When integrated inductor 100 and integrated inductor 200 are applied to single-ended signals (single-ENDED SIGNAL), signals are not fed in or out from nodes 102 and 202. When the integrated inductor 100 and the integrated inductor 200 are applied to the differential signal (DIFFERENTIAL SIGNAL), the nodes 102 and 202 serve as center taps (CENTER TAP) of the integrated inductor 100 and the integrated inductor 200, respectively, which are coupled to or receive the common mode voltage of the differential signal. When the integrated inductor 100 and the integrated inductor 200 are applied to differential signals, the winding 110 forms one sub-inductor of the integrated inductor 100, and the winding 160 forms the other sub-inductor of the integrated inductor 100. Similarly, the integrated inductor 200 includes two sub-inductors. Since the integrated inductor 100 and the integrated inductor 200 have excellent symmetry in structure, the two sub-inductors of the integrated inductor 100 and the integrated inductor 200 are electrically extremely matched. Fig. 5 shows the relationship between the inductance value and the frequency of two sub-inductors, and the inductance values of the two sub-inductors are almost equal in the frequency range of less than 30 GHz. In other words, the two sub-inductances of the integrated inductance of the present invention are quite matched.
Fig. 6A-6C illustrate the structure of an integrated inductor according to another embodiment of the present invention. Fig. 6A shows a complete structure of the integrated inductor 600, the integrated inductor 600 is implemented in a first conductor layer and a second conductor layer in a semiconductor structure, and most of the line segments or traces of the integrated inductor 600 are located in the first conductor layer.
As shown in fig. 6A, the integrated inductor 600 is a highly symmetrical structure. More specifically, the integrated inductor 600 is substantially symmetrical to the horizontal symmetry axis R6H and the vertical symmetry axis R6V (the horizontal symmetry axis R6H and the vertical symmetry axis R6V are substantially perpendicular to each other). The terminals 611 and 661 are two terminals of the integrated inductor 600, and the reference numeral 602 represents a node of the integrated inductor 600. After entering the integrated inductor 600 through the terminal 611, the signal (i.e., current) flows through the complete winding 610 (as shown in fig. 6B), through the node 602, then through the complete winding 660 (as shown in fig. 6C), and finally exits the integrated inductor 600 through the terminal 661. Those skilled in the art can know the detailed current path of the integrated inductor 600 from the above description about the integrated inductor 100, and therefore the detailed description is omitted. In other words, the current direction 651 of the right half of the integrated inductor 600 is different from the current direction 652 of the left half of the integrated inductor 600 (one is clockwise and the other is counterclockwise).
The integrated inductor 600 may be considered to be comprised of two windings, winding 610 (fig. 6B) and winding 660 (fig. 6C). End 611 and node 602 are the two ends of winding 610, while end 661 and node 602 are the two ends of winding 660. In other words, windings 610 and 660 are connected through node 602. In some embodiments, the length of the trace between node 602 and endpoint 611 is substantially equal to the length of the trace between node 602 and endpoint 661, in other words, the total length of the trace of winding 610 is substantially equal to the total length of the trace of winding 660. As shown in fig. 6B and 6C, the windings 610 and 660 are electrically symmetrical because the traces on the first conductor layer are substantially equal in length and the traces on the second conductor layer are substantially equal in length.
Winding 610 includes coil 620 and coil 630. Coil 620 and coil 630 are connected by cross structure 640, and coil 620 and coil 630 do not overlap. The direction of the current of coil 620 is opposite to the direction of the current of coil 630. Winding 610 is symmetrical about a horizontal axis of symmetry R6H, but asymmetrical about a vertical axis of symmetry R6V. The horizontal symmetry axis R6H overlaps the coils 620 and 630, but the vertical symmetry axis R6V does not overlap the coils 620 and 630.
Winding 660 includes a coil 670 and a coil 680. Coil 670 and coil 680 are connected by crossover structure 690, and coil 670 and coil 680 do not overlap. The current direction of coil 670 is opposite to the current direction of coil 680. The current direction of coil 670 is the same as the current direction of coil 620, and the current direction of coil 680 is the same as the current direction of coil 630. The windings 660 are symmetrical about a horizontal axis of symmetry R6H, but asymmetrical about a vertical axis of symmetry R6V. The horizontal symmetry axis R6H overlaps with the coils 670 and 680, but the vertical symmetry axis R6V does not overlap with the coils 670 and 680.
Referring to fig. 6A, 6B and 6C, coil 620 and coil 670 have overlapping ranges and coil 670 surrounds coil 620, and coil 630 and coil 680 have overlapping ranges and coil 630 surrounds coil 680. In other words, the area encompassed by coil 620 (e.g., about the area of dashed box 625) overlaps the area encompassed by coil 670 (e.g., about the area of dashed box 675). Similarly, the area encompassed by coil 630 overlaps the area encompassed by coil 680. The coil 620, the coil 630, the coil 670 and the coil 680 are all of a two-turn structure, so that the integrated inductor 600 is of a four-turn structure on the left and right (relative to the vertical symmetry axis R6V). In other embodiments, the coils 620, 630, 670, 680 may be four, six, eight, etc. even number of turns, and those skilled in the art will recognize the implementation variations based on the disclosure above, so further description of the embodiments is omitted.
Referring to fig. 6A, 6B and 6C, the coil 630 includes a first sub-coil (i.e., an outer ring, which is formed by a line segment outside the dashed frame 635) and a second sub-coil (i.e., an inner ring, which is formed by a line segment inside the dashed frame 635), the coil 680 includes a third sub-coil (i.e., an outer ring, which is formed by a line segment outside the dashed frame 685) and a fourth sub-coil (i.e., an inner ring, which is formed by a line segment inside the dashed frame 685), and the first sub-coil, the second sub-coil, the third sub-coil and the fourth sub-coil are sequentially arranged from outside to inside. In other words, the outer race of the coil 680 is surrounded by the inner race of the coil 630. Similarly, the outer turns of coil 620 are surrounded by the inner turns of coil 670.
As shown in fig. 6B and 6C, the outer and inner turns of coil 620 are substantially equal in size to the outer and inner turns of coil 680, respectively, and the outer and inner turns of coil 630 are substantially equal in size to the outer and inner turns of coil 670, respectively.
As shown in fig. 6A, the end 611, the end 661, and the node 602 are located on the same side of the integrated inductor 600 (i.e., below the horizontal symmetry axis R6H), and the node 602 is located between the end 611 and the end 661. Furthermore, the ends 611 and 661 are located on different sides of the vertical symmetry axis R6V.
The through structure on the terminal 661 is for the feeding or discharging of signals (i.e. currents). In other embodiments, a through structure may be implemented on the end 611 to improve the electrical symmetry of the windings 610 and 660. For details of implementation, refer to fig. 3 and the related description.
Fig. 7A-7C illustrate the structure of an integrated inductor according to another embodiment of the present invention. Fig. 7A shows a complete structure of the integrated inductor 700, the integrated inductor 700 is implemented in a first conductor layer and a second conductor layer in a semiconductor structure, and most of the line segments or traces of the integrated inductor 700 are located in the first conductor layer.
As shown in fig. 7A, the integrated inductor 700 is a highly symmetrical structure. More specifically, the integrated inductor 700 is substantially symmetrical to the horizontal symmetry axis R7H and the vertical symmetry axis R7V (the horizontal symmetry axis R7H and the vertical symmetry axis R7V are substantially perpendicular to each other). The terminals 711 and 761 are two terminals of the integrated inductor 700, and the reference numeral 702 represents one node of the integrated inductor 700. After entering the integrated inductor 700 at the terminal 711, the signal (i.e., current) flows through the complete winding 710 (as shown in fig. 7B), passes through the node 702, then flows through the complete winding 760 (as shown in fig. 7C), and finally leaves the integrated inductor 700 at the terminal 761. Those skilled in the art can know the detailed current path of the integrated inductor 700 from the above description about the integrated inductor 100, and therefore the detailed description is omitted. In other words, the current direction 751 of the right half of the integrated inductor 700 is different from the current direction 752 of the left half of the integrated inductor 700 (one being clockwise and the other being counter-clockwise).
The integrated inductor 700 may be considered to be comprised of two windings, winding 710 (fig. 7B) and winding 760 (fig. 7C). Terminal 711 and node 702 are the two terminals of winding 710, and terminal 761 and node 702 are the two terminals of winding 760. In other words, windings 710 and 760 are connected through node 702. In some embodiments, the length of the trace between node 702 and terminal 711 is substantially equal to the length of the trace between node 702 and terminal 761, in other words, the total length of the trace of winding 710 is substantially equal to the total length of the trace of winding 760. As shown in fig. 7B and 7C, the windings 710 and 760 are electrically symmetrical because the traces on the first conductor layer are substantially equal in length and the traces on the second conductor layer are substantially equal in length.
Winding 710 includes coil 720 and coil 730. The coil 720 and the coil 730 are connected through the cross structure 740, and the coil 720 and the coil 730 do not overlap. The current direction of coil 720 is opposite to the current direction of coil 730. The windings 710 are symmetrical about a horizontal axis of symmetry R7H, but asymmetrical about a vertical axis of symmetry R7V. The horizontal symmetry axis R7H overlaps the coils 720 and 730, but the vertical symmetry axis R7V does not overlap the coils 720 and 730.
Winding 760 includes coil 770 and coil 780. Coil 770 and coil 780 are connected by cross structure 790, and coil 770 and coil 780 do not overlap. The current direction of coil 770 is opposite to the current direction of coil 780. The current direction of coil 770 is the same as the current direction of coil 720, and the current direction of coil 780 is the same as the current direction of coil 730. The winding 760 is symmetrical about the horizontal axis of symmetry R7H, but asymmetrical about the vertical axis of symmetry R7V. The horizontal symmetry axis R7H overlaps the coil 770 and the coil 780, but the vertical symmetry axis R7V does not overlap the coil 770 and the coil 780.
Referring to fig. 7A, 7B and 7C, the coil 720 and the coil 770 have overlapping ranges and the coil 770 surrounds the coil 720, and the coil 730 and the coil 780 have overlapping ranges and the coil 730 surrounds the coil 780. In other words, the area encompassed by coil 720 (e.g., about the area of dashed box 725) overlaps with the area encompassed by coil 770 (e.g., about the area of dashed box 775). Similarly, the area encompassed by coil 730 overlaps the area encompassed by coil 780. Coil 720, coil 730, coil 770, and coil 780 are all two-turn structures such that integrated inductor 700 is four turns each left and right (relative to vertical symmetry axis R7V). In other embodiments, the coils 720, 730, 770, 780 may each be four, six, eight, etc. even turns, and those skilled in the art will appreciate the implementation variations based on the disclosure above, so further embodiments will not be described.
Referring to fig. 7A, 7B and 7C, the coil 730 includes a first sub-coil (i.e., an outer ring, which is formed by a line segment outside the dashed frame 735) and a second sub-coil (i.e., an inner ring, which is formed by a line segment inside the dashed frame 735), the coil 780 includes a third sub-coil (i.e., an outer ring, which is formed by a line segment outside the dashed frame 785) and a fourth sub-coil (i.e., an inner ring, which is formed by a line segment inside the dashed frame 785), and the first sub-coil, the third sub-coil, the second sub-coil and the fourth sub-coil are sequentially arranged from outside to inside. In other words, the sub-coils of coil 730 are staggered (interleaved) with the sub-coils of coil 780. Similarly, the sub-coils of coil 720 are staggered with respect to the sub-coils of coil 770.
As shown in fig. 7B and 7C, the outer and inner rings of coil 720 are substantially equal in size to the outer and inner rings of coil 780, respectively, and the outer and inner rings of coil 730 are substantially equal in size to the outer and inner rings of coil 770, respectively.
As shown in fig. 7A, the terminal 711, the terminal 761 and the node 702 are located on the same side of the integrated inductor 700 (i.e. below the horizontal symmetry axis R7H), and the node 702 is located between the terminal 711 and the terminal 761. Furthermore, the terminal 711 and the terminal 761 are located on different sides of the vertical symmetry axis R7V.
The through structure on the terminal 761 is for signal (i.e., current) feed-in or feed-out. In other embodiments, a through structure may be implemented on the terminal 711 to improve the electrical symmetry of the windings 710 and 760. For details of implementation, refer to fig. 3 and the related description.
Although the coil of the foregoing embodiment is exemplified by a quadrilateral, the present invention is not limited thereto, and the coils may be other polygons or circles.
Since those skilled in the art can understand the implementation details and variations of the present method according to the disclosure of the present apparatus, repeated descriptions are omitted herein to avoid redundancy without affecting the disclosure requirements and the implementation of the method. It should be noted that the shapes, sizes, proportions and the like of the elements in the foregoing drawings are merely illustrative, and are used by those skilled in the art to understand the present invention, and are not intended to limit the present invention.
Although the embodiments of the present invention have been described above, the present invention is not limited thereto, and those skilled in the art can make various changes to the technical features of the present invention according to the explicit or implicit disclosure of the present invention, and all such changes may be made within the scope of the present invention, that is, the scope of the present invention should be determined by the claims of the present invention.
Symbol description
100. 200, 600, 700 Integrated inductor
145. 195, 222, 245, 295 Crossover line segments
111. 161, 211, 261, 611, 661, 711, 761 End points
102. 202, 602, 702 Node
151. 152, 651, 652, 751, 752 Current direction
110. 160, 610, 660, 710, 760 Windings
120. 130, 170, 180, 620, 630, 670, 680, 720, 730, 770, 780 Coil
140. 190, 640, 690, 740, 790 Cross structure
125. 175, 625, 675, 635, 685, 725, 775, 735, 785 Dashed boxes
112. 162 Extension line segment
R1H, R2H, R6H, R H horizontal symmetry axis
R1V, R2V, R6V, R V vertical symmetry axis
Claims (6)
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| CN202010015031.XA CN113161482B (en) | 2020-01-07 | 2020-01-07 | Integrated Inductor |
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| CN202010015031.XA CN113161482B (en) | 2020-01-07 | 2020-01-07 | Integrated Inductor |
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| CN113161482A CN113161482A (en) | 2021-07-23 |
| CN113161482B true CN113161482B (en) | 2024-12-10 |
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Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107731793A (en) * | 2017-09-14 | 2018-02-23 | 建荣半导体（深圳）有限公司 | The 8-shaped induction structure and semiconductor structure integrated on a kind of semiconductor chip |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20120244802A1 (en) * | 2011-03-24 | 2012-09-27 | Lei Feng | On chip inductor |
| TWI591800B (en) * | 2015-10-06 | 2017-07-11 | 瑞昱半導體股份有限公司 | Integrated inductor structure and integrated transformer structure |
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| CN107731793A (en) * | 2017-09-14 | 2018-02-23 | 建荣半导体（深圳）有限公司 | The 8-shaped induction structure and semiconductor structure integrated on a kind of semiconductor chip |
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