CN113008529A - Large-caliber optical element measuring system based on ultrafast laser imaging - Google Patents
Large-caliber optical element measuring system based on ultrafast laser imaging Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
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Abstract
The invention discloses a large-aperture optical element measuring system based on ultrafast laser imaging. The invention utilizes the laser to generate the ultra-fast pulse laser with wide spectrum, high coherence, high flatness; mapping frequency domain (spectrum) information of the pulse laser to a linelike space domain in a one-to-one correspondence manner through Fraunhofer diffraction; converting the linear-like light spots into rectangular light spots by a prism imaging or virtual imaging method, thereby realizing large-caliber real-time measurement; finally, laser real-time measurement of amplitude and phase information of the element to be measured is achieved through Fourier dispersion and time lens mapping respectively.
Description
Technical Field
The invention belongs to the field of high-energy laser, ultrafast laser and Fourier optics, and particularly relates to a large-caliber optical element measuring system based on ultrafast laser imaging.
Background
The power and the working time of the laser are obviously improved at present, and the application of high-energy laser is a new breakthrough. In most large high-energy laser devices, a plurality of valuable large-aperture optical elements are integrated into each optical assembly. The high power laser can cause the thermal effect and the electro-optical effect of the optical element, so that the surface of the element is very easy to generate laser damage.
In order to ensure the safe operation of the large-scale high-energy laser system, the large-scale high-energy laser system needs to be detected and tracked at the initial stage of damage and repaired in time before the damage size reaches a threshold value. Therefore, the damage condition of the optical element of the terminal needs to be detected rapidly, widely and with high precision so as to take corresponding repairing measures.
The technology for detecting the large-aperture optical element by adopting the traditional mode is mature at present. The cavity ring-down method is mainly used for measuring the reflectivity of the mirror surface, the detection of the large-aperture optical element is mainly realized by adopting a point scanning mode, the detection speed is low, the real-time monitoring cannot be realized, and the cavity ring-down method can only be used for a reflective optical element with higher reflectivity of a specific wavelength and cannot be used for measuring a transmissive optical element. The technologies mainly adopted for measuring the absorption rate at present are a calorimetry method and a photothermal method, and both the two technologies need to be in a point scanning mode, so that large-size real-time monitoring cannot be realized. The measurement of the mirror surface type is mainly realized by an interferometer or a Hartmann system, and the two methods can realize surface measurement by a beam-shrinking method, but the spatial resolution is low, and the measurement speed is relatively slow. Therefore, the detection parameters of the detection system aiming at the large-aperture optical element are single at present, large-size real-time monitoring cannot be realized, and the safety control of the optical element in a large-scale high-energy laser device is greatly limited.
The detection means of the optical element are point measurement, point scanning or beam-shrinking measurement, the detection speed is slow, and real-time and on-line monitoring cannot be realized. And the monitoring parameters are basically limited to reflectivity, absorptivity and surface type, and the optical element cannot be evaluated more comprehensively from basic physical quantities. The real-time monitoring of the state of the optical element has important significance for the healthy operation of a large-scale high-energy laser device.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and solve the problem that the large-size high-speed measurement of an optical element cannot be realized in the prior art, and provides an ultrafast laser imaging-based large-aperture optical element measuring system, which can realize surface measurement within pulse time when in application, can realize real-time online monitoring because measurement parameters comprise basic physical quantities such as amplitude, phase and the like of the optical element, and is favorable for deep analysis of the whole working process state of the optical element.
The purpose of the invention is realized by the following technical scheme:
a large-aperture optical element measuring system based on ultrafast laser imaging, the large-aperture optical element measuring system comprising: the system comprises a laser, a first diffraction grating, a first light beam adjusting piece, a second diffraction grating, a spectroscope, a dispersion element, a time lens module and a high-speed detection system, wherein the laser is configured to output wide-spectrum ultrafast pulse laser; the first diffraction grating is configured to convert the received broad-spectrum ultrafast pulse laser into a line-like light spot and output the line-like light spot to the first light beam adjusting part; the first light beam adjusting part is configured to convert the received line-like light spots into rectangular light spots and irradiate the rectangular light spots on the optical element to be measured; the second light beam adjusting part and the second diffraction grating are configured to output light spots emitted by the optical element to be detected to the spectroscope; the spectroscope is configured to divide the received light beam into two beams and output the two beams to the dispersion element and the time lens module respectively; the high speed detection system is configured to collect, store and analyze the optical signals output by the dispersive element and the time lens module.
According to a preferred embodiment, the optical element under test is configured to project or reflect the received light spot.
According to a preferred embodiment, the dispersion element is used for realizing Fourier dispersion transformation of light to be measured, and high-speed measurement of the amplitude of the light beam to be measured is realized.
According to a preferred embodiment, the time lens module is adapted to enable high-speed measurement of the laser phase.
According to a preferred embodiment, the first diffraction grating is configured to: mapping frequency domain information of the pulsed laser to a linelike spatial domain under fraunhofer diffraction conditions, the second diffraction grating being configured to: under the condition of Fraunhofer diffraction, the mapping from the line-like space to the frequency domain is realized.
According to a preferred embodiment, the first beam conditioning element is configured to: converting the line-like light spots into rectangular light spots; the second beam adjuster is configured to: the rectangular light spot is converted into a linear light spot.
According to a preferred embodiment, the high-speed detection system comprises a high-speed detector, a high-speed data acquisition card, a computer or an oscilloscope.
According to a preferred embodiment, the laser comprises a fiber optic output or a spatial light output laser.
The main scheme and the further selection schemes can be freely combined to form a plurality of schemes which are all adopted and claimed by the invention; in the invention, the selection (each non-conflict selection) and other selections can be freely combined. The skilled person in the art can understand that there are many combinations, which are all the technical solutions to be protected by the present invention, according to the prior art and the common general knowledge after understanding the scheme of the present invention, and the technical solutions are not exhaustive herein.
The invention has the beneficial effects that:
1. the laser output by the wide spectrum ultrafast laser adopted by the system of the invention has the characteristics of wide spectrum, high coherence, high flatness, ultrafast pulse and the like. The measurement technology related to the system is to realize the measurement of the amplitude and the phase of the mirror surface to be measured by frequency domain and time domain conversion and combining Fourier dispersion conversion and time lens mapping. The system thus exhibits the beneficial effects of high speed, large bore detection. The detection speed is mainly determined by the laser pulse time and the data processing time, and the ultrafast laser pulse is generally fs-ps magnitude, so that the data processing time is mainly used for limiting the measurement speed, and the system has the beneficial effect of real-time measurement in practice. The system realizes large-caliber detection through Fraunhofer diffraction, grating diffraction, virtual imaging and other modes, the measuring range mainly depends on the design of the optical elements, the system abandons the scanning mode, and the system has the beneficial effects of large-caliber real-time measurement.
2. The system can realize the measurement of the amplitude and the phase of the optical element through the Fourier dispersion element and the time lens module, and has the advantages of simultaneously measuring multiple parameters and being beneficial to evaluating and monitoring the state of the optical element. And through the setting of the measuring mode, the optical element can participate in two working modes of static detection and dynamic monitoring, and the optical element evaluation method has the advantages of being more flexible in evaluation mode of the optical element. The system can realize the measurement of the reflective optical element and the transmissive optical element by changing the light path transmission under the condition of not changing the main functional elements and the structural composition, and has the advantages of widening the application of the system.
Drawings
FIG. 1 is a schematic block diagram of a transmission measurement system according to the present invention;
FIG. 2 is a schematic block diagram of a reflection measurement system according to the present invention;
the system comprises a laser 1, a laser 2, a first diffraction grating 3, a first light beam adjusting part 4, a first optical element to be detected 5, a second light beam adjusting part 6, a second diffraction grating 7, a spectroscope 8, a dispersion element 9, a time lens module 10, a high-speed detection system 11 and a second optical element to be detected 11.
Detailed Description
The embodiments of the present invention are described below with reference to specific embodiments, and other advantages and effects of the present invention will be easily understood by those skilled in the art from the disclosure of the present specification. The invention is capable of other and different embodiments and of being practiced or of being carried out in various ways, and its several details are capable of modification in various respects, all without departing from the spirit and scope of the present invention. It is to be noted that the features in the following embodiments and examples may be combined with each other without conflict.
It should be noted that, in order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention are clearly and completely described below, and it is obvious that the described embodiments are some embodiments of the present invention, but not all embodiments.
Thus, the following detailed description of the embodiments of the present invention is not intended to limit the scope of the invention as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate orientations and positional relationships that are conventionally used in the products of the present invention, and are used merely for convenience in describing the present invention and for simplicity in description, but do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and therefore, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.
Furthermore, the terms "horizontal", "vertical", "overhang" and the like do not imply that the components are required to be absolutely horizontal or overhang, but may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.
In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In addition, it should be noted that, in the present invention, if the specific structures, connection relationships, position relationships, power source relationships, and the like are not written in particular, the structures, connection relationships, position relationships, power source relationships, and the like related to the present invention can be known by those skilled in the art without creative work on the basis of the prior art.
FIG. 1 is a schematic block diagram of a transmission measurement system according to the present invention; fig. 2 is a schematic diagram of a principle framework of the reflection type measuring system of the present invention.
Referring to fig. 1 and 2, the invention discloses a large-aperture optical element measuring system based on ultrafast laser imaging. The large-aperture optical element measuring system comprises a laser 1, a first diffraction grating 2, a first light beam adjusting part 3, a first optical element to be measured 4, a second light beam adjusting part 5, a second diffraction grating 6, a spectroscope 7, a dispersion element 8, a time lens module 9, a high-speed detection system 10 and a second optical element to be measured 11.
Preferably, the laser 1 is used to generate a broad spectrum ultrafast laser. The first diffraction grating 2 is used for mapping frequency domain (spectrum) information of the pulse laser to a line-like spatial domain in a one-to-one correspondence manner under the condition of Fraunhofer far-field diffraction, and the second diffraction grating 6 is used for realizing the mapping from the line-like spatial domain to the frequency domain. The first beam adjuster 3 and the second beam adjuster 5 may be a cylindrical prism or a VIPAS, and are used to convert a line-like spot output from the diffraction grating into a rectangular spot, and convert the rectangular spot into a linear spot. The VIPAs, Virtually Imaged Phase Arrays, is a virtual imaging Phase array, is a special Fabry-Perot etalon with three different coatings, has the characteristic of large-angle dispersion, and can be used for manufacturing high-resolution filters and dispersion compensators by utilizing the characteristic of the large-angle dispersion. And combining the virtual imaging phase array and the diffraction grating to realize two-dimensional imaging. The optical element to be measured covers (transmits or reflects) the surface of the optical element to be measured by using a rectangular light spot, and brings out the amplitude and phase information of the optical element to be measured. The beam splitter 7 splits the light beam carrying the amplitude and phase information of the optical element to be measured into two beams. The dispersion element 8 realizes Fourier dispersion transformation of the light to be measured and realizes high-speed measurement of the amplitude of the light beam to be measured. The time lens module 9 is a module which is common in ultrafast optics at present, is similar to a secondary phase factor of a space lens, introduces the secondary phase factor in time, can realize amplification of ultrafast laser waveforms, and realizes measurement of laser phases. The high-speed detection system 10 generally comprises a high-speed detector, a high-speed data acquisition card, and a computer or an oscilloscope, and realizes the functions of high-speed acquisition, storage, analysis and the like of optical signals.
Example 1
Referring to fig. 1, a transmissive large aperture optical element measurement system is shown.
The laser 1 generates ultrafast pulse laser under its normal operation, and the laser includes wide spectrum, high coherence, high flatness, ultrafast pulse, etc.
The laser beam is subjected to Fraunhofer diffraction through the first diffraction grating 2, and frequency domain (spectrum) information of the pulse laser is mapped to a line-like spatial domain in a one-to-one correspondence mode.
And then the linear-like light spots are converted into rectangular light spots through a first cylindrical prism or VIPAS by a cylindrical prism imaging or virtual imaging method.
The light spot irradiates on the first optical element 4 to be measured, transmits through the first optical element 4 to be measured and carries the amplitude and phase information thereof in real time.
The transmitted light spot is converted into a linear light spot through the second light beam adjusting part 5 again, and the linear light spot is finally converted into a point light spot through the second diffraction grating 6.
The light beam carrying the amplitude and phase information of the first optical element 4 to be measured is split into two beams by the beam splitter 7, one beam is used for measuring the amplitude information by the dispersion element 8, and the other beam is used for measuring the phase information by the time lens module 9. Finally, the two beams of light are input to the high-speed detection system 10 to realize the functions of high-speed acquisition, storage, analysis and the like of the optical signals.
Example 2
As shown in fig. 2, a reflective large aperture optical element measurement system is shown.
The laser 1 generates ultrafast pulse laser under its normal operation, and the laser includes wide spectrum, high coherence, high flatness, ultrafast pulse, etc.
The laser beam is subjected to Fraunhofer diffraction by the first diffraction grating 2, and frequency domain (spectrum) information of the pulse laser is mapped to a line-like spatial domain in a one-to-one correspondence manner.
Then the quasi-linear light spot is converted into a rectangular light spot by a cylindrical prism imaging or virtual imaging method through the first light beam adjusting piece 3.
The light spot irradiates on the second optical element to be measured 11, and is reflected on the second optical element to be measured 11, and the amplitude and phase information of the light spot are carried in real time.
The reflected light spot is converted into a linear light spot through the second light beam adjusting part 5 again, and the linear light spot is finally converted into a point light spot through the second diffraction grating 6.
The light beam carrying the amplitude and phase information of the second optical element 11 to be measured is split into two beams by the beam splitter 7, one beam is used for measuring the amplitude information by the dispersion element 8, and the other beam is used for measuring the phase information by the time lens module 9. Finally, the two beams of light are input to the high-speed detection system 10 to realize the functions of high-speed acquisition, storage, analysis and the like of the optical signals.
Example 3
When a system verification experiment is performed for a particular optical element. And attaching a standard plate with standard size to the optical element to be measured, and processing the final signal to obtain that three obvious corresponding peaks appear in the corresponding three shielding lines, and the measured width of the three shielding lines is consistent with the actual width. The ultra-fast laser imaging-based large-aperture optical element measuring system provided by the invention can be applied to real-time monitoring of large-aperture optical elements in high-power laser devices and static measurement of quality evaluation of the large-aperture optical elements.
In embodiments 1, 2 and 3 of the present invention, the laser 1 may be a laser output by an optical fiber, or a laser output by a spatial light, and the output laser has characteristics of broad spectrum, high coherence, and high spectral flatness. Through the diffraction grating, due to Fraunhofer far-field diffraction, frequency domain information of the pulse laser is mapped to a spatial domain in a one-to-one correspondence mode, so that the shape of the output laser pulse light spot is changed from a point to a line-like shape, and the spatial distribution of the line-like shape corresponds to the mapped frequency spectrum information. If the measurement of larger size is realized, the laser spectrum width needs to be further widened. The linear-like light spots can be converted into rectangular light spots through the cylindrical prism or the VIPAS, wherein the linear type of the VIPAS can be uniformly broadened in a virtual imaging mode, and the effect is better. The rectangular light spot irradiates on the optical element to be measured, large-size measurement of the area can be realized, amplitude and phase information in the optical element is carried into the pulse laser, and due to the fact that the laser adopts fs-ps-level ultrafast pulses, ultrafast measurement can be realized. And the dispersion element and the time lens module are mature detection modules in the field of ultrafast lasers, and can respectively realize high-precision measurement of the amplitude and the phase of the ultrafast pulse lasers.
The large-aperture optical element measuring system can realize static measurement and dynamic monitoring on the large-aperture optical element according to different use scene designs. Under the condition of not changing the size of the rectangular light spot, the large-caliber dynamic monitoring is realized through the mirror surface of the rectangular light spot irradiation range, the detection size is mainly limited by the laser spectrum width, the size of the diffraction grating, the size of the prism or the VIPAS, and the detection caliber can be controlled through customizing the units. Under the condition of not changing the size of the rectangular light spot, the scanning can be realized by using the motor to drive the mirror surface to be measured to move, so that the measurement of the optical element with larger size can be realized, but the working mode can not realize dynamic monitoring and can only realize static measurement on the optical element with large diameter.
The foregoing basic embodiments of the invention and their various further alternatives can be freely combined to form multiple embodiments, all of which are contemplated and claimed herein. In the scheme of the invention, each selection example can be combined with any other basic example and selection example at will. Numerous combinations will be known to those skilled in the art.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.
Claims (8)
1. A large-caliber optical element measuring system based on ultrafast laser imaging is characterized by comprising:
a laser (1), a first diffraction grating (2), a first light beam adjusting part (3), a second light beam adjusting part (5), a second diffraction grating (6), a spectroscope (7), a dispersion element (8), a time lens module (9) and a high-speed detection system (10),
the laser (1) is configured to achieve output of a broad-spectrum ultrafast pulsed laser;
the first diffraction grating (2) is configured to convert the received broad-spectrum ultrafast pulse laser into a line-like light spot and output the line-like light spot to the first beam adjusting part (3);
the first light beam adjusting part (3) is configured to convert the received line-like light spots into rectangular light spots and irradiate the rectangular light spots on the optical element to be measured;
the second light beam adjusting part (5) and the second diffraction grating (6) are configured to output light spots emitted by the optical element to be detected to the spectroscope (7);
the spectroscope (7) is configured to divide the received light beam into two beams and output the two beams to the dispersion element (8) and the time lens module (9), respectively;
the high-speed detection system (10) is configured to collect, store and analyze the optical signals output by the dispersive element (8) and the time lens module (9).
2. The ultrafast laser imaging based large-aperture optical element measurement system of claim 1, wherein the optical element under test is configured to project or reflect a received light spot.
3. The ultrafast laser imaging-based large-aperture optical element measurement system according to claim 1, wherein the dispersion element (8) is configured to perform a fourier dispersion transform of the light to be measured, thereby performing a high-speed measurement of the amplitude of the light beam to be measured.
4. The ultrafast laser imaging based large-aperture optical element measurement system according to claim 1, wherein the time lens module (9) is configured to achieve high-speed measurement of laser phase.
5. The ultrafast laser imaging based large-aperture optical element measurement system of claim 1, wherein the first diffraction grating (2) is configured to: under the condition of Fraunhofer diffraction, mapping the frequency domain information of the pulse laser to a space domain of a line-like type,
the second diffraction grating (6) is configured to: under the condition of Fraunhofer diffraction, the mapping from the line-like space to the frequency domain is realized.
6. The ultrafast laser imaging based large-aperture optical element measurement system according to claim 1, wherein the first beam adjuster (3) is configured to: converting the line-like light spots into rectangular light spots;
the second beam conditioning element (5) is configured to: the rectangular light spot is converted into a linear light spot.
7. The ultrafast laser imaging based large-aperture optical element measurement system of claim 1, wherein the high speed probing system (10) comprises a high speed probe, a high speed data acquisition card, a computer or an oscilloscope.
8. The ultrafast laser imaging based large-aperture optical element measurement system according to claim 1, wherein the laser (1) comprises a fiber output or a spatial light output laser.
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| CN113624453A (en) * | 2021-07-30 | 2021-11-09 | 重庆大学 | Large-caliber optical element high-speed detection system based on ultrafast microscopic imaging |
| CN114137736A (en) * | 2021-12-03 | 2022-03-04 | 中国科学院长春光学精密机械与物理研究所 | Large-aperture optical element assembling and adjusting device and method |
| CN114486201A (en) * | 2022-02-11 | 2022-05-13 | 重庆大学 | Reflectivity Measurement System for Large Aperture Optical Components |
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| CN114137736B (en) * | 2021-12-03 | 2022-12-30 | 中国科学院长春光学精密机械与物理研究所 | Large-aperture optical element adjusting device and adjusting method thereof |
| CN114486201A (en) * | 2022-02-11 | 2022-05-13 | 重庆大学 | Reflectivity Measurement System for Large Aperture Optical Components |
| CN114486201B (en) * | 2022-02-11 | 2023-03-10 | 重庆大学 | Reflectance Measurement System for Large Aperture Optical Components |
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