CN112987077B - Low-energy ion beam detection and ion beam current strong self-balancing interlocking control system - Google Patents

Abstract

The invention relates to a low-energy ion beam detection and ion beam current intensity self-balancing interlocking control system. The system comprises: an ion beam detection unit configured to detect the ion beam current intensity signal; a data acquisition and interlocking unit, configured as Perform data analysis and self-balancing judgment on the collected ion beam current intensity signals to realize the interlocking of the interlocking equipment and the adjustment of the ion beam current intensity, so that the nuclear pore membrane production terminal can reach the current intensity conditions of normal production; the data display storage unit is configured In order to obtain the signal of the data acquisition and interlocking unit, the data and status information of the nuclear pore membrane production terminal are stored and displayed. The invention can realize low-energy current intensity detection, solve the problem of inaccurate current intensity detection during nuclear pore membrane production, realize self-balancing adjustment of beam current intensity, and cooperate to realize other production linkages.

Description

Low-energy ion beam detection and ion beam current strong self-balancing interlocking control system

technical field

The invention relates to a low-energy ion beam detection and ion beam current intensity self-balancing chain control system for a nuclear pore membrane production terminal, and relates to the field of low-current intensity heavy ion beam detection.

Background technique

Nuclear pore membrane is the most precise microporous filtration membrane in the world. It is a porous plastic film with densely packed pores, each of which has the same shape and size. There are many specifications of nuclear pore membranes, with a thickness ranging from 5 microns to 60 microns, a pore size range of 0.2 microns to 15 microns, and a pore density range of 1-10 per square centimeter to the 9th power. Nuclear pore membranes are usually punched with heavy ions provided by high-energy accelerators. Heavy ion punching is the most critical part of the nuclear pore membrane production process, so ion beam irradiation is a very important production step in the production of nuclear pore membranes. The ion beam detection is an important step of ion beam irradiation. The current intensity of the ion beam can be accurately detected, and nuclear pore membranes of different specifications can be produced according to the current intensity.

Since the ion beam produced by nuclear pore film irradiation is very low, the intercepted ion beam detector cannot be used (the detection principle of the intercepted ion beam detector is that the ion beam must hit it in order to detect the current intensity, so It will block the irradiated ion beam and cannot be produced), which will affect the normal production of nuclear pore membranes. For example, the Faraday used in the current terminal is a conventional ion beam detection method, because it is a part of the interceptor detector. It will affect the on-line production of nuclear pore membranes. Currently, non-intercepting detectors can detect ion beams with such a low current intensity are very few. The existing simple non-intercepting detectors can detect the current intensity of mA and above. In most cases, there is no corresponding chain alarm device. When the ion beam current is too large or too low, there is no automatic lowering or raising control mechanism, and only manual adjustment can be performed, which is time-consuming and labor-intensive, and the production efficiency is low.

SUMMARY OF THE INVENTION

In view of the above problems, the purpose of the present invention is to provide a low-energy ion beam detection and ion beam current strong self-balance chain control system at the nuclear pore membrane production terminal, which can realize the detection of low-energy current and the strong self-balance control of ion beam current. .

In order to achieve the above object, the present invention adopts the following technical solutions: a low-energy ion beam detection and ion beam current strong self-balancing interlocking control system, the system includes:

The ion beam detection unit is configured to detect the ion beam current intensity signal;

The data acquisition and interlocking unit is configured to perform data analysis and self-balance judgment on the collected ion beam current intensity signal, realize the interlocking of the interlocking equipment and the ion beam current intensity adjustment, so that the nuclear pore membrane production terminal can reach the normal production current intensity condition;

The data display storage unit is configured to acquire the signal of the data acquisition and interlocking unit, and to store and display the data and status information of the nuclear pore membrane production terminal.

Further, the ion beam detection unit includes a front-end detector, a low noise amplifier and a lock-in amplifier;

The front-end detector is nested on the ion beam pipe, and is configured to detect the ion beam current intensity signal in the beam pipe;

The low noise amplifier is configured to amplify the collected ion beam current intensity signal;

The lock-in amplifier is configured to lock a certain fixed frequency signal and discard other frequency signals.

Further, the number of the low-noise amplifiers is three, and the ion beam current intensity signal is amplified in three stages through the three low-noise amplifiers.

Further, the data acquisition and interlocking unit includes an FPGA-based controller, an analog signal acquisition daughter card and an interlocking relay;

The FPGA-based controller collects the output signal of the lock-in amplifier through the analog signal collection daughter card;

The FPGA-based controller is provided with an output optical port, and the output optical ports are connected to the controlled device to control the signal after photoelectric conversion through optical fiber communication;

The FPGA-based controller also performs interlocking control on the interlocked equipment through the interlocking relay, and outputs an alarm signal.

Further, the FPGA-based controller is provided with an ion beam current intensity self-balancing module, and the ion beam current intensity self-balancing module compares the collected ion beam current intensity data with the set threshold value, according to the set threshold value. Depending on the threshold conditions, the interlocking conditions or the correction conditions can be activated respectively to realize the interlocking of the interlocked equipment and the adjustment of the ion beam current intensity, and determine whether the nuclear pore membrane production terminal meets the production conditions according to the preset conditions, and if it meets the production conditions, start the process Normal production, if it does not conform, a new round of comparison will be performed.

Further, the interlocking condition includes an alarm when the current is too high or too low. When the interlocking condition is met, a signal is sent to the interlocking relay to control the interlocked equipment to act.

Further, the correction conditions include the increase or decrease of the correction power supply, and when the correction conditions are satisfied, a signal is sent to adjust the output value of the correction power supply to increase or decrease the ion beam current intensity.

Further, the data display storage unit includes a switch, a server and a computer client;

The switch is connected to the FPGA-based controller through a network port, and is configured to send data to the server and the computer client;

The server is provided with a database, which is configured to store data for easy analysis and historical query;

The computer client is configured to display the low-energy beam detection and interlocking and the status information of the controlled equipment in real time.

The present invention has the following advantages due to taking the above technical solutions:

1. The present invention can realize the detection of low-energy flow intensity, solve the problem of inaccurate flow intensity detection during nuclear pore membrane production, and cooperate with other production linkages;

2. The present invention uses a non-intercepting detector to detect low-energy flow intensity, and then uses a low-noise amplifier to amplify the signal, and then uses a lock-in amplifier to lock the frequency of the ion beam to be detected to filter out noise, and through FPGA-based control The device collects data, performs chain alarm, and displays the alarm on the interface of the computer client;

3. The present invention has the functions of ion beam current intensity signal detection, self-feedback signal alarm and ion beam current intensity self-feedback function, and through the ion beam current intensity self-balance control mechanism, according to the current intensity signal detected by the detector, combined with the relevant The power supply automatically adjusts the intensity of the ion beam to achieve the balance of the intensity of an ion beam required for production;

In conclusion, the present invention can be widely used in the production of nuclear pore membranes at the terminal of nuclear pore membrane production.

Description of drawings

Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are for the purpose of illustrating preferred embodiments only and are not to be considered limiting of the invention. The same reference numerals are used for the same parts throughout the drawings. In the attached image:

1 is a schematic diagram of a low-energy ion beam detection and ion beam current strong self-balancing interlocking control system according to an embodiment of the present invention;

2 is a schematic structural diagram of an ion beam detection unit according to an embodiment of the present invention;

Fig. 3 is the data acquisition and the structural schematic diagram of the interlocking unit of the embodiment of the present invention;

FIG. 4 is a schematic diagram of a data processing flow of an ion beam current strong self-balancing module according to an embodiment of the present invention.

Detailed ways

Exemplary embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the present invention are shown in the drawings, it should be understood that the present invention may be embodied in various forms and should not be limited by the embodiments set forth herein. Rather, these embodiments are provided so that the present invention will be more thoroughly understood, and will fully convey the scope of the present invention to those skilled in the art.

It is to be understood that the terminology used herein is for the purpose of describing particular example embodiments only and is not intended to be limiting. As used herein, the singular forms "a," "an," and "the" can also be intended to include the plural forms unless the context clearly dictates otherwise. The terms "comprising", "comprising", "containing" and "having" are inclusive and thus indicate the presence of stated features, steps, operations, elements and/or components, but do not preclude the presence or addition of one or Various other features, steps, operations, elements, components, and/or combinations thereof. Method steps, procedures, and operations described herein are not to be construed as requiring that they be performed in the particular order described or illustrated, unless an order of performance is explicitly indicated. It should also be understood that additional or alternative steps may be used.

Although the terms first, second, third, etc. may be used herein to describe various elements, components, regions, layers and/or sections, these elements, components, regions, layers and/or sections should not be restricted by these terms. These terms may only be used to distinguish one element, component, region, layer or section from another region, layer or section. Terms such as "first," "second," and other numerical terms when used herein do not imply a sequence or order unless clearly indicated by the context. Thus, a first element, component, region, layer or section discussed below could be termed a second element, component, region, layer or section without departing from the teachings of example embodiments.

For ease of description, spatially relative terms may be used herein to describe the relationship of one element or feature to another element or feature as shown in the figures, such as "inner", "outer", "inner" ", "outside", "below", "above", etc. This spatially relative term is intended to include different orientations of the device in use or operation other than the orientation depicted in the figures.

As shown in FIG. 1, the nuclear pore membrane production terminal low-energy ion beam detection and ion beam current strong self-balancing interlocking control system provided by the embodiment of the present invention includes an ion beam detection unit 1, a data acquisition and interlocking unit 2, and a data display storage unit 3.

The ion beam detection unit 1 is configured to detect the ion beam current intensity signal.

The data acquisition and interlocking unit 2 is configured to perform data analysis and self-balancing judgment on the collected ion beam current intensity signal, realize the interlocking of the interlocking equipment and the ion beam current intensity adjustment, and finally achieve the current intensity condition of normal production.

The data display storage unit 3 is configured to acquire the signal of the data acquisition and interlocking unit 2, and to store and display the data and status information of the nuclear pore membrane production terminal.

In some embodiments of the present invention, as shown in FIG. 2 , the ion beam detection unit 1 includes a front-end detector 11 , a low noise amplifier 12 and a lock-in amplifier 13 .

The front-end detector 11 is embedded in the ion beam pipeline 14 and is used to detect the ion beam current intensity signal in the beam pipeline 14, and the ion beam current intensity signal is a weak current intensity signal, and is converted into a weak voltage signal.

The low noise amplifier 12 is used for amplifying the collected weak voltage.

Since the signal detected by the front-end detector 11 is too weak, a low-noise amplifier 12 is provided. In this embodiment, three low-noise amplifiers 12-1 to 12-3 are used to amplify the signal of the front-end detector 11, and the low-noise amplifier is used for three-stage amplification to reach the value that the lock-in amplifier 13 can normally collect. It should be noted that the noise of the low-noise amplifier must be small enough, otherwise the normal signal will be overwhelmed. The amplification factor of the low-noise amplifier 12 in this embodiment is 40-60db, which is taken as an example.

The lock-in amplifier 13 is used to lock a certain fixed frequency signal, and other frequency signals are regarded as noise signals and discarded. When the ion beam current intensity signal is frequency locked in the lock-in amplifier 13, the output terminal of the lock-in amplifier 13 Perform analog signal output.

Although the signal is amplified by the low-noise amplifier 12, the amplified signal is always mixed with noise due to the electromagnetic interference of the environment in which the site is located. Therefore, this embodiment is provided with a lock-in amplifier 13, such as the ion beam to be detected. The frequency is 10Mhz, and the signal passing through the lock-in amplifier is set to 10Mhz, the signals of other frequencies are filtered out, and the noise signal will be greatly reduced.

In some embodiments of the present invention, as shown in FIG. 3 , the data acquisition and interlocking unit 2 includes an FPGA-based controller 21 , an analog signal acquisition daughter card 22 and an interlocking relay 23 ;

The FPGA-based controller 21 has data acquisition and control functions. The FPGA-based controller 21 collects the output signal of the lock-in amplifier 13 through the analog signal acquisition daughter card 22. The specific acquisition channel can be set according to the actual situation. This embodiment The analog signal acquisition daughter card 22 has four channels, which can simultaneously acquire four channels of analog signals, for example.

The FPGA-based controller 21 is provided with two output optical ports, each of which is connected to the network controller end of the controlled device through optical fiber communication to control the controlled device by converting the signal through photoelectric conversion.

The FPGA-based controller 21 also performs interlocking control on the interlocked equipment through the interlocking relay 23, and outputs an alarm signal. In this embodiment, the FPGA-based controller 21 is connected to the six-channel interlocking relay 23, and can simultaneously perform interlocking control and output alarm signals for six types of different devices. Among them, the chain alarm principle of the chain relay 23 is to use the high and low level signal triggering method. When the signal collected by the FPGA-based controller 21 exceeds the set threshold, it will send a high or low level signal to the chain relay. 23. Trigger the interlocking relay 23 to close, and then connect the corresponding interlocked equipment to make an action response. Wherein, the interlocked device may be an alarm light, a valve, a motion control motor or a power supply, etc., which is not limited here.

As shown in FIG. 4 , the FPGA-based controller 21 is provided with an ion beam current intensity self-balancing module, and the ion beam current intensity self-balancing module compares the collected ion beam current intensity data with the set threshold value. Different threshold conditions can activate different linkage conditions or correction conditions. The purpose of setting the interlocking condition is to display the alarm or control the equipment, such as opening or closing the interlocked equipment. ;The setting of the correction condition is to start the numerical correction of the correction power supply. For example, when the correction condition is the increase or decrease value of the correction power supply, the ion beam current intensity can be increased or decreased by adjusting the output value of the correction power supply. According to the preset conditions, it is determined whether the nuclear pore membrane production terminal meets the production conditions. If the production conditions are met, normal production will be started, and if it is not, a new round of comparison will be performed.

In some embodiments of the present invention, the data display storage unit 3 includes a switch 31, a server 32 and a computer client 33;

The FPGA-based controller 21 is connected to the switch 31 through a network port, and the switch 31 is used to send data to the server 32 and the computer client 33;

A database 321 is provided in the server 32, and the database 321 is used to store data for analysis and historical query.

The computer client 33 is used for real-time display of low-energy beam detection and interlocking and status information of controlled equipment, such as alarm information display, etc., for example.

In summary, the present invention detects the ion beam information through the non-intercepting detector at the front end. Because the ion beam during the production of nuclear pore membrane is very low, a low noise amplifier is added at the back end to amplify the signal, and then a lock-in amplifier is used. The frequency is locked, and then the FPGA-based controller is used for data acquisition and analysis to perform interlocking and data correction, and finally realize the self-balancing function of the ion beam current in the production of nuclear pore membranes.

It should be noted that the flowcharts and block diagrams in the accompanying drawings illustrate the architecture, functionality, and operation of possible implementations of systems, methods and computer program products according to various embodiments of the present application. Each block in the flowchart or block diagrams may represent a module, segment, or portion of code, which contains one or more executable instructions for implementing the specified logical function(s).

Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention rather than to limit them. Although the present invention has been described in detail with reference to the above embodiments, those of ordinary skill in the art should understand that: the present invention can still be Modifications or equivalent replacements are made to the specific embodiments of the present invention, and any modifications or equivalent replacements that do not depart from the spirit and scope of the present invention shall be included within the protection scope of the claims of the present invention. The above contents are only specific embodiments of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art who is familiar with the technical scope disclosed in the present application can easily think of changes or replacements, which should cover within the scope of protection of this application. Therefore, the protection scope of the present application should be the protection scope of the claims.

Claims (3)

1. The utility model provides a low energy ion beam is surveyed and chain control system of strong self-balancing of ion beam which characterized in that, this system includes:

an ion beam detection unit configured to detect an ion beam intensity signal, the ion beam detection unit including a front end detector, a low noise amplifier, and a lock-in amplifier; the front-end detector is nested on the ion beam pipeline and is configured to detect an ion beam current intensity signal in the ion beam pipeline; the low-noise amplifier is configured to amplify the acquired ion beam intensity signal; the phase-locked amplifier is configured to lock a certain fixed frequency signal and discard other frequency signals;

the data acquisition and linkage unit is configured to perform data analysis and judgment on the acquired ion beam current intensity signal, realize linkage of the linked equipment and adjustment of the ion beam current intensity and enable the nuclear track membrane production terminal to achieve the ion beam current intensity condition of normal production; the data acquisition and interlocking unit comprises an FPGA-based controller, an analog signal acquisition daughter card and an interlocking relay; the controller based on the FPGA acquires the output signal of the ion beam detection unit through the analog signal acquisition sub card; the FPGA-based controller is provided with output optical ports, and the output optical ports are used for connecting signals to controlled equipment to control the controlled equipment after photoelectric conversion through optical fiber communication; the FPGA-based controller also carries out interlocking control on the interlocked equipment through the interlocking relay and outputs an alarm signal; an ion beam current intensity self-balancing module is arranged in the FPGA-based controller, compares an acquired ion beam current intensity signal with a set threshold value, can respectively start a linkage condition or a correction condition according to different set threshold value conditions, realizes linkage of a linked device and adjustment of ion beam current intensity, judges whether a nucleopore membrane production terminal meets production conditions according to preset conditions, starts normal production if the nucleopore membrane production terminal meets the production conditions, and performs a new round of comparison if the nucleopore membrane production terminal does not meet the production conditions; the correction condition comprises the rising or the falling of a correction power supply, and when the correction condition is met, a signal is sent to adjust the output value of the correction power supply to realize the rising or the falling of the ion beam intensity;

the data display and storage unit is configured to acquire the data acquisition and linkage unit signals and store and display data and state information of the nuclear track membrane production terminal, and the data display and storage unit comprises a switch, a server and a computer client; the switch is connected with the FPGA-based controller through a network port and is configured to send data to the server and the computer client; a database is arranged in the server and is configured to store data for analysis and historical query; the computer client is configured to display the low energy ion beam detection or linkage process and the state information of the controlled equipment in real time.

2. The system of claim 1, wherein the number of the low-energy ion beam detection and ion beam intensity self-balancing interlock control system is three, and the ion beam intensity signal is amplified in three stages by the three low-noise amplifiers.

3. The system of claim 1, wherein the linkage condition comprises an alarm when the ion beam current is too high or too low, and when the linkage condition is satisfied, a signal is sent to the linkage relay to control the interlocked equipment to act.

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