CN112964655B - A test system device and test method for absorption spectrum of a micron-scale sample on a transparent substrate - Google Patents

Abstract

The invention provides a test system device and a test method for an absorption spectrum of a micron-sized sample on a transparent substrate, comprising the following steps: imaging and spectrum sampling are respectively carried out on the transparent substrate, the sample to be measured and the air to obtain the transmitted light intensities of three types of samples, and the absorptivity and the absorbance of the sample to be measured are calculated according to the transmitted light intensities of the three types of samples; the imaging process includes: starting an imaging light source and a detection light source, enabling detection light emitted by the detection light source to sequentially pass through a lens, a small hole and a beam shrinking objective lens to irradiate on a sample to form light spots, enabling imaging light emitted by the imaging light source to irradiate on the surface of the sample to reflect, collecting reflected light through the imaging objective lens, and then sending the reflected light into a photosensitive element to image the light spots, wherein the diameter of the imaged light spots is less than or equal to 4 mu m by adjusting the distance between the lens and the small hole; the spectrum collection process comprises the following steps: and starting a detection light source, and sequentially passing through the lens, the small hole and the beam shrinking objective lens to irradiate the sample surface to generate transmission, wherein the transmission light is sent to the spectrometer for spectrum acquisition through the imaging objective lens.

Description

A test system device and test for the absorption spectrum of micron-scale samples on a transparent substrate method

technical field

The invention belongs to the technical field of spectrum testing, and relates to a test system device and a test method for absorption spectrum, in particular to a test system device and test method for the absorption spectrum of a micron-scale sample on a transparent substrate.

Background technique

In recent years, with the rapid development of micro-nano processing technology, the size of microelectronic devices has been reduced day by day, and the design of fine feature structures on nanomaterials has become a research hotspot in today's micro-nano electronic devices. The characterization of the basic optical properties of nanomaterials and micro-nano structures (such as absorption spectra) is the basis for understanding various physical phenomena of nanomaterials, and it can also characterize the performance of micro-nano devices constructed of nanomaterials.

CN210803269U discloses a kind of in-situ high-pressure absorption spectrometry system, which includes: a light source unit, at least used to provide an incident beam for irradiating a sample to be measured; a beam expanding and collimating unit, at least used for expanding and collimating the incident beam straight to form a parallel light beam; the first microscope objective lens unit is at least used to guide the beam expanded and collimated into the high-pressure chamber of the high-pressure sample holding unit; the high-pressure sample holding unit is at least used to provide the sample to be tested High-voltage measurement environment; the second microscope objective unit is at least used to guide the outgoing light beam emitted by the sample to be measured in the high-pressure chamber of the high-pressure sample holding unit into the spectrum processing unit; the spectrum processing unit is at least used to process the described The outgoing beam is subjected to spectral detection and the obtained spectrum is analyzed and processed.

CN110940640A discloses a strong light absorption spectrum testing system and method, which relates to the technical field of spectrum testing. The system includes a laser generating unit; The passed test uses the atmosphere, and the atmospheric parameters are adjusted; the auxiliary test unit includes two spectroscopic test components, and the two spectroscopic test components are used to measure the power of the laser beam before and after the absorption unit; the attenuation focusing unit, which uses for attenuating the laser beam transmitted by the second spectroscopic testing component, and focusing the attenuated laser beam; the measurement and analysis unit is used for measuring and analyzing the focused laser beam.

Due to the boundary effect of nanomaterials, when the size of the probe beam is larger than the nanomaterial, the edge of the nanomaterial will scatter the beam significantly. The macroscopic measurement method is less affected by the scattering effect, but it is only suitable for samples that are a single material and sensitive to light. When the absorption is sufficient, macroscopic measurement methods are no longer applicable to heterojunction or samples with characteristic structures. However, the beam size of the general micro-area measurement method is larger than the sample size, which cannot avoid the influence of the scattering effect. Therefore, how to obtain accurate absorption spectra of tiny samples or devices with fine structures on transparent substrates is an urgent problem to be solved in the measurement technology of nanostructure absorption spectroscopy.

Contents of the invention

In view of the deficiencies in the prior art, the purpose of the present invention is to provide a test system device and test method for the absorption spectrum of micron-scale samples on a transparent substrate. The test method provided by the present invention is conducive to eliminating the influence of the edge scattering effect of micron-scale samples , compared with existing spectrophotometers that measure absorption spectra, more accurate absorption spectra can be obtained.

For reaching this purpose, the present invention adopts following technical scheme:

In a first aspect, the present invention provides a method for testing the absorption spectrum of a micron-scale sample on a transparent substrate, the test method comprising:

The transparent substrate, the sample to be tested and the air are respectively imaged and collected to obtain the transmitted light intensities of the three types of samples, and the absorptivity and absorbance of the samples to be tested are calculated according to the transmitted light intensities of the three types of samples;

The imaging process includes: turning on the imaging light source and the detection light source, the detection light emitted by the detection light source sequentially passes through the lens, the pinhole and the narrowing objective lens to irradiate the sample to form a spot, and the imaging light emitted by the imaging light source is irradiated to the surface of the sample Reflection occurs, and the reflected light is collected by the imaging objective lens and sent to the photosensitive element to image the spot. By adjusting the distance between the lens and the small hole, the diameter of the imaging spot is ≤4μm, and the spot diameter can be 2.0μm, 2.2μm, 2.4μm, 2.6 μm, 2.8 μm, 3.0 μm, 3.2 μm, 3.4 μm, 3.6 μm, 3.8 μm or 4.0 μm, but not limited to the listed values, other unlisted values within this range are also applicable.

The spectrum acquisition process includes: turning on the detection light source, and the detection light emitted by the detection light source sequentially passes through the lens, pinhole and narrowing objective lens to irradiate the surface of the sample for transmission, and the transmitted light is sent to the spectrometer through the imaging objective lens for spectrum acquisition.

The present invention adopts the transmission absorption spectrum testing method, and can measure the relatively accurate absorption spectrum for the substrate with a certain transmittance, and adjust the aperture of the small aperture and the narrowing objective lens through the cooperation of the lens, the small hole and the narrowing objective lens. The multiple of the lens and the distance between the lens and the pinhole narrow the spot to ≤4μm. For micron-sized samples, the smaller the spot diameter is, the better it is to eliminate the influence of the scattering effect at the edge of the sample. Compared with the existing spectrophotometer for measuring absorption spectra, A more accurate absorption spectrum can be obtained.

As a preferred technical solution of the present invention, the transmitted light intensity of the transparent substrate is denoted as T _sub , the transmitted light intensity of the sample to be tested is denoted as T _sample , the transmitted light intensity of air is denoted as T _air , and the absorptivity of the sample to be measured Denoted as I, the absorbance of the sample to be tested is denoted as A.

Calculate the absorbance I and absorbance A of the sample to be tested through T _sub , T _sample and Tai _air , where the formula for calculating the absorbance I is shown in formula (1):

I=(T _sub -T _sample )/T _air formula (1);

The calculation formula of absorbance A is shown in formula (2):

A=lg[T _air /(T _air -T _sub +T _sample )] Formula (2).

If the transparent substrate has almost no absorption but weak reflection, such as ordinary glass, the outgoing light after passing through the sample can be directly used as the outgoing light after the sample absorbs the incident light, without subtracting the substrate absorption. Absorbance I and absorbance A were calculated using the following formulas:

I=(T _air −T _sample )/T _air ; A=lg(T _air /T _sample ).

As a preferred technical solution of the present invention, the test method further includes: drawing the absorbance spectrum and absorbance spectrum of the sample to be tested at different wavelengths according to the absorbance and absorbance of the sample to be tested.

As a preferred technical solution of the present invention, the detection light source is a broad-spectrum white light source, more preferably a tungsten halogen light source.

In the present invention, the detection light source emits a continuous spectrum within the required wavelength range, which requires sufficient light intensity, uniform energy distribution and stable output. It is preferable to use a wide-spectrum white light source, which can realize the measurement of the absorption spectrum in a wider spectral range, and is applicable to a wider range of samples.

Preferably, the pore diameter is 100-200 μm, such as 100 μm, 110 μm, 120 μm, 130 μm, 140 μm, 150 μm, 160 μm, 170 μm, 180 μm, 190 μm or 200 μm, but not limited to the listed values, the values Other unrecited values within the range also apply.

As a preferred technical solution of the present invention, the magnification of the narrowing objective lens is 50 times or 60 times.

Preferably, the magnification of the imaging objective lens is 20 times.

As a preferred technical solution of the present invention, the sample to be tested includes a transparent substrate and a material to be tested grown on the transparent substrate.

Preferably, the transparent substrate is a sapphire substrate.

As a preferred technical solution of the present invention, during the imaging process, the reflected light collected by the imaging objective lens is reflected again and sent to the photosensitive element, and the photosensitive element transmits the reflected light information to the display device to obtain a spot image.

Preferably, during the spectrum collection process, the transmitted light collected by the imaging objective lens is directly sent to the spectrometer for spectrum collection without being reflected.

In the second aspect, the present invention provides a test system device for the absorption spectrum of a micron-scale sample on a transparent substrate, and the test system device is used to perform the test method described in the first aspect.

The system device includes a detection light source, a lens, a pinhole, a narrowing objective lens, a measuring sample, an imaging objective lens and a spectrometer arranged in sequence along the optical path. The diameter of the beam is reduced to ≤4μm, and the transmitted light after the probe light passes through the sample to be measured is collected by the imaging objective lens and sent to the spectrometer for spectrum acquisition;

The test system device also includes an imaging light source, a photosensitive element and a display device, the imaging light source and the photosensitive light source are used to image the light spot formed by the probe light; the imaging light emitted by the imaging light source is irradiated onto the sample surface Reflection occurs, and the reflected light is collected by the imaging objective lens and then sent to the photosensitive element for imaging and the image is transmitted to the display device.

The present invention builds an imaging system for testing the absorption spectrum of micron-scale samples through the combination of lenses, pinholes, beam-shrinking objective lenses and photosensitive elements, which can realize micro-area operation and reduce the spot to ≤4μm. For micron-scale samples, The smaller the diameter of the spot, the better it is to eliminate the influence of the scattering effect at the edge of the sample. Compared with the existing spectrophotometer for measuring the absorption spectrum, a more accurate absorption spectrum can be obtained.

As a preferred technical solution of the present invention, the test system device further includes a reflective mirror located between the imaging objective lens and the photosensitive element, and the emitted light collected by the imaging objective lens enters the photosensitive element after being reflected by the reflective mirror.

As a preferred technical solution of the present invention, the detection light source is a broad-spectrum white light source, more preferably a tungsten halogen light source.

Preferably, the diameter of the small holes is 100-200 μm.

Preferably, the magnification of the narrowing objective lens is 50 times or 60 times.

Preferably, the magnification of the imaging objective lens is 20 times.

Exemplarily, the present invention provides a method for testing the absorption spectrum of a micron-scale sample on a transparent substrate. The test method specifically includes the following steps:

(1) Install the detection light source, imaging light source, lens, aperture, beam reduction objective, imaging objective, photosensitive element and spectrometer, fix the transparent substrate between the beam reduction objective and imaging objective, turn on the light source, adjust the lens and aperture to confirm whether the optical path is focused on the transparent substrate;

(2) Turn on the imaging light source and the detection light source, the detection light emitted by the detection light source passes through the lens, pinhole and narrowing objective lens in turn and irradiates to the surface of the transparent substrate to form a spot, and the imaging light emitted by the imaging light source is reflected on the surface of the transparent substrate , the reflected light is collected by the imaging objective lens and sent to the photosensitive element to image the spot, and the image is transmitted to the display device. By adjusting the distance between the lens and the small hole, the diameter of the imaging spot is ≤4μm;

(3) The reflector is removed, the imaging light source is turned off, and the detection light source is turned on. The detection light emitted by the detection light source passes through the lens, pinhole and narrowing objective lens in turn and irradiates to the surface of the transparent substrate for transmission. The transmitted light is sent to the spectrometer through the imaging objective lens Perform spectrum acquisition to obtain the transmitted light intensity of the transparent substrate, which is denoted as T _sub ;

(4) Unload the transparent substrate, replace the sample to be tested, repeat steps (1)-(3), obtain the transmitted light intensity of the sample to be tested, and record it as T _sample ; unload the sample to be tested, and repeat steps (1)-(3) (3), obtain the transmitted light intensity of air, be recorded as T _air ;

Calculate the absorbance I and absorbance A of the sample to be tested through T _sub , T _sample and Tai _air , where the formula for calculating the absorbance I is shown in formula (1):

I=(T _sub -T _sample )/T _air formula (1);

The calculation formula of absorbance A is shown in formula (2):

A＝lg[T _air /(T _air -T _sub +T _sample )] formula (2);

(5) According to the absorbance and absorbance of the sample to be tested, the absorbance spectrum and the absorbance spectrum of the sample to be tested at different wavelengths are drawn.

Compared with prior art, the beneficial effect of the present invention is:

The present invention adopts the transmission absorption spectrum testing method, and can measure the relatively accurate absorption spectrum for the substrate with a certain transmittance, and adjust the aperture of the small aperture and the narrowing objective lens through the cooperation of the lens, the small hole and the narrowing objective lens. The multiple of the lens and the spacing between the lens and the pinhole narrow the spot to ≤4μm. For micron-sized samples, the smaller the spot diameter is, the better it is to eliminate the influence of the scattering effect at the edge of the sample. Compared with the existing spectrophotometer for measuring absorption spectra, A more accurate absorption spectrum can be obtained.

Description of drawings

Fig. 1 is a schematic structural diagram of a measurement system device provided in an embodiment of the present invention at the imaging stage;

Fig. 2 is a schematic structural diagram of a measurement system device provided in a specific embodiment of the present invention in the spectrum acquisition stage;

Fig. 3 is the light spot photograph that the application example of the present invention provides;

Fig. 4 is the transmitted light intensity diagram of the transparent substrate, the sample to be tested and the air provided by the application example of the present invention;

Fig. 5 is the absorbance spectrogram and the absorbance spectrogram of the sample to be tested provided by the application example of the present invention;

Among them, 1-detection light source; 2-lens; 3-aperture; 4-beam reduction objective lens; 5-sample to be tested; 6-imaging objective lens; 7-mirror; 8-photosensitive element; spectrometer.

Detailed ways

It should be understood that in the description of the present invention, the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", " The orientations or positional relationships indicated by "vertical", "horizontal", "top", "bottom", "inner" and "outer" are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and Simplified descriptions, rather than indicating or implying that the device or element referred to must have a particular orientation, be constructed and operate in a particular orientation, and thus should not be construed as limiting the invention. In addition, the terms "first", "second", etc. are used for descriptive purposes only, and should not be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, a feature defined as "first", "second", etc. may expressly or implicitly include one or more of that feature. In the description of the present invention, unless otherwise specified, "plurality" means two or more.

It should be noted that, in the description of the present invention, unless otherwise clearly stipulated and limited, the terms "set", "connected" and "connected" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection. Connection, or integral connection; it can be mechanical connection or electrical connection; it can be direct connection or indirect connection through an intermediary, and it can be the internal communication of two components. Those of ordinary skill in the art can understand the specific meanings of the above terms in the present invention based on specific situations.

The technical solutions of the present invention will be further described below in conjunction with the accompanying drawings and through specific implementation methods.

In a specific embodiment, the present invention provides a system device for testing the absorption spectrum of a micron-scale sample on a transparent substrate. The system device is shown in Figure 1 and Figure 2. Light source 1, lens 2, small hole 3, narrowing objective lens 4, sample measuring, imaging objective lens 6 and spectrometer 10, the detection light emitted by detection light source 1 passes through lens 2 and small hole 3 in sequence, and then the beam diameter is reduced by narrowing objective lens 4 Narrowed down to ≤4 μm, the transmitted light formed after the probe light passes through the sample 5 to be tested is collected by the imaging objective lens 6 and sent to the spectrometer 10 for spectrum collection;

The test system device also includes an imaging light source, a photosensitive element 8 and a display device 9. The imaging light source and the photosensitive light source are used to image the spot formed by the probe light; After being collected by the objective lens 6 , it is sent to the photosensitive element 8 for imaging and the image is transmitted to the display device 9 .

The test system device also includes a reflective mirror 7 located between the imaging objective lens 6 and the photosensitive element 8 , and the emitted light collected by the imaging objective lens 6 enters the photosensitive element 8 after being reflected by the reflective mirror 7 .

In this specific embodiment, the detection light source 1 is a broad-spectrum white light source, the diameter of the pinhole 3 is 100-200 μm, the magnification of the narrowing objective lens 4 is 50 times or 60 times, and the magnification factor of the imaging objective lens 6 is 20 times.

In another specific embodiment, the present invention provides a method for testing the absorption spectrum of a micron-scale sample on a transparent substrate. The test method specifically includes the following steps:

(1) As shown in Figure 1, install the detection light source 1, the imaging light source, the lens 2, the pinhole 3, the beam reduction objective lens 4, the imaging objective lens 6, the photosensitive element 8 and the spectrometer 10, and fix the transparent substrate on the beam reduction objective lens 4 Between the imaging objective lens 6, turn on the light source, adjust the distance between the lens 2 and the small hole 3, and confirm whether the optical path is focused on the transparent substrate;

(2) Turn on the imaging light source and the detection light source 1, the detection light emitted by the detection light source 1 sequentially passes through the lens 2, the pinhole 3 and the narrowing objective lens 4 and irradiates to the surface of the transparent substrate to form a spot, and the imaging light emitted by the imaging light source irradiates to the transparent surface The surface of the substrate is reflected, and the reflected light is collected by the imaging objective lens 6 and sent to the photosensitive element 8 to image the spot, and the image is transmitted to the display device 9. By adjusting the distance between the lens 2 and the small hole 3, the diameter of the spot for imaging ≤4μm;

(3) As shown in Figure 2, the reflector 7 is removed, the imaging light source is turned off, the detection light source 1 is turned on, and the detection light emitted by the detection light source 1 sequentially passes through the lens 2, the small hole 3 and the narrowing objective lens 4 to irradiate the transparent substrate The surface is transmitted, and the transmitted light is sent to the spectrometer 10 through the imaging objective lens 6 for spectrum collection, and the transmitted light intensity of the transparent substrate is obtained, which is denoted as T _sub ;

(4) Unload the transparent substrate, replace the sample 5 to be tested, repeat steps (1)-(3), obtain the transmitted light intensity of the sample 5 to be tested, be denoted as T _sample ; unload the sample 5 to be tested, repeat the steps ( 1)-(3), obtain the transmitted light intensity of air, be recorded as T _air ;

Calculate the absorbance I and absorbance A of the sample 5 to be tested by T _sub , T _sample and Tai _air , wherein the calculation formula of the absorbance I is shown in formula (1):

I=(T _sub -T _sample )/T _air formula (1);

The calculation formula of absorbance A is shown in formula (2):

A＝lg[T _air /(T _air -T _sub +T _sample )] formula (2);

(5) According to the absorptivity and absorbance of the sample 5 to be tested, draw the absorbance spectrum and the absorbance spectrum of the sample 5 to be tested at different wavelengths.

Application example

This application example provides a test method for specific materials. Taking the absorption spectrum of a single layer of _MoS2 on a sapphire substrate as an example, the test method specifically includes the following steps:

(1) Install detection light source 1, imaging light source, lens 2, 200 μm pinhole 3, 50 times narrower objective lens 4, 20 times imaging objective lens 6, photosensitive element 8 and spectrometer 10, wherein, detection light source 1 adopts Thorlabs Tungsten halogen lamp source; fix the transparent substrate between the beam reduction objective lens 4 and the imaging objective lens 6, turn on the light source, adjust the distance between the lens 2 and the small hole 3, and confirm whether the optical path is focused on the transparent substrate;

(2) Turn on the imaging light source and the detection light source 1, the detection light emitted by the detection light source 1 sequentially passes through the lens 2, the 200 μm small hole 3 and the narrowing objective lens 4 to irradiate to the surface of the transparent substrate to form a spot, and the imaging light emitted by the imaging light source irradiates Reflected on the surface of the transparent substrate, the reflected light is collected by the imaging objective lens 6 and sent to the photosensitive element 8 to image the spot, and the image is transmitted to the display device 9. By adjusting the distance between the lens 2 and the small hole 3, the imaging The diameter of the spot reaches 4 μm (as shown in Figure 3, the length of the scale in Figure 3 is 10 μm);

(3) The reflector 7 is removed, the imaging light source is turned off, and the detection light source 1 is turned on. The detection light emitted by the detection light source 1 sequentially passes through the lens 2, the small hole 3 and the narrowing objective lens 4 and irradiates to the surface of the transparent substrate for transmission, and the transmitted light The imaging objective lens 6 is sent to the spectrometer 10 for spectrum collection to obtain the transmitted light intensity of the transparent substrate, which is denoted as T _sub ;

(4) Unload the transparent substrate, replace the sample 5 to be tested, repeat steps (1)-(3), obtain the transmitted light intensity of the sample 5 to be tested, be denoted as T _sample ; unload the sample 5 to be tested, repeat the steps ( 1)-(3), obtain the transmitted light intensity of air, be recorded as T _air ;

Calculate the absorbance I and absorbance A of the sample 5 to be tested by T _sub , T _sample and Tai _air , wherein the calculation formula of the absorbance I is shown in formula (1):

I=(T _sub -T _sample )/T _air formula (1);

The calculation formula of absorbance A is shown in formula (2):

A＝lg[T _air /(T _air -T _sub +T _sample )] formula (2);

(5) According to the absorptivity and absorbance of the sample to be tested 5 (calculation results are shown in Figure 4), draw the absorptivity spectrum and the absorbance spectrum of the sample to be tested 5 at different wavelengths (as shown in Figure 5).

The applicant declares that the above description is only a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto, and those skilled in the art should understand that any person skilled in the art should be aware of any disclosures disclosed in the present invention. Within the technical scope, easily conceivable changes or substitutions all fall within the scope of protection and disclosure of the present invention.

Claims (17)

1. The method for testing the absorption spectrum of the micron-sized sample on the transparent substrate is characterized by comprising the following steps of:

imaging and spectrum sampling are respectively carried out on the transparent substrate, the sample to be measured and the air to obtain the transmitted light intensities of three types of samples, and the absorptivity and the absorbance of the sample to be measured are calculated according to the transmitted light intensities of the three types of samples;

the imaging process comprises the following steps: starting an imaging light source and a detection light source, enabling detection light emitted by the detection light source to sequentially pass through a lens, a small hole and a beam shrinking objective lens to irradiate on a sample to form light spots, enabling imaging light emitted by the imaging light source to irradiate on the surface of the sample to be reflected, collecting reflected light through the imaging objective lens, and then sending the collected light into a photosensitive element to image the light spots, wherein the diameter of the imaged light spots is smaller than or equal to 4 mu m by adjusting the distance between the lens and the small hole; the diameter of the small hole is 100-200 mu m; the magnification of the beam shrinking objective lens is 50 times or 60 times;

the spectrum acquisition process comprises the following steps: and starting a detection light source, and sequentially passing through the lens, the small hole and the beam shrinking objective lens to irradiate the sample surface to generate transmission, wherein the transmission light is sent to the spectrometer for spectrum acquisition through the imaging objective lens.

2. The method according to claim 1, wherein the transmitted light intensity of the transparent substrate is denoted as T _sub The transmitted light intensity of the sample to be measured is recorded as T _sample The transmitted light intensity of air is denoted as T _air The absorptivity of the sample to be measured is noted as I,the absorbance of the sample to be measured is marked as A;

through T _sub 、T _sample And T _air Calculating the absorptivity I and absorbance A of the sample to be detected, wherein the calculation formula of the absorptivity I is shown as a formula (1):

I＝(T _sub -T _sample )/T _air formula (1);

the calculation formula of the absorbance A is shown as a formula (2):

A＝lg[T _air /(T _air -T _sub +T _sample )]formula (2).

3. The method of testing according to claim 1, further comprising: and drawing an absorbance spectrogram and an absorbance spectrogram of the sample to be tested under different wavelengths according to the absorbance and the absorbance of the sample to be tested.

4. The method of claim 1, wherein the detection light source is a broad spectrum white light source.

5. The method of claim 4, wherein the detection light source is a halogen tungsten light source.

6. The method of claim 1, wherein the imaging objective has a magnification of 20 times.

7. The method of claim 1, wherein the sample comprises a transparent substrate and a material to be tested grown on the transparent substrate.

8. The method of claim 7, wherein the transparent substrate is a sapphire substrate.

9. The test method according to claim 1, wherein during the imaging process, the reflected light collected by the imaging objective is reflected again and sent to the photosensitive element, and the photosensitive element transmits the reflected light information to the display device to obtain the flare image.

10. The testing method according to claim 1, wherein the transmitted light collected by the imaging objective is sent directly to the spectrometer for spectrum collection without reflection during spectrum collection.

11. A test system device for absorption spectroscopy of a sample on a transparent substrate, wherein the test system device is configured to perform the test method of any one of claims 1-10;

the system device comprises a detection light source, a lens, a small hole, a beam shrinking objective lens, a sample measuring lens, an imaging objective lens and a spectrometer which are sequentially arranged along a light path, wherein detection light emitted by the detection light source sequentially passes through the lens and the small hole and then reduces the beam diameter to be less than or equal to 4 mu m through the beam shrinking objective lens, and transmitted light of the detection light passing through a sample to be measured is collected by the imaging objective lens and sent into the spectrometer for spectrum collection;

the test system device also comprises an imaging light source, a photosensitive element and a display device, wherein the imaging light source and the photosensitive light source are used for imaging light spots formed by the detection light; the imaging light emitted by the imaging light source irradiates the sample testing surface to reflect, and the reflected light is collected by the imaging objective lens, sent into the photosensitive element to image and transmitted to the display device.

12. The test system device of claim 11, further comprising a mirror positioned between the imaging objective and the photosensitive element, wherein the emitted light collected by the imaging objective is reflected by the mirror and enters the photosensitive element.

13. The test system device of claim 11, wherein the detection light source is a broad spectrum white light source.

14. The test system device of claim 13, wherein the detection light source is a halogen tungsten light source.

15. The test system device of claim 11, wherein the aperture has a diameter of 100-200 μm.

16. The test system device of claim 11, wherein the beam reduction objective has a magnification of 50 or 60.

17. The test system device of claim 11, wherein the imaging objective has a magnification of 20 times.