CN104807761A - A Spectrometer Design Method for Realizing Micro-area Spectral Measurement - Google Patents

Abstract

The invention discloses a design method of a spectrometer capable of realizing micro-area spectral measurement, which comprises the following steps: (1) imaging a sample to be measured into the plane of the area selection small pore plate by using an imaging system; (2) light rays in the small hole area pass through the small hole and enter the spectral analysis element for spectral analysis and measurement; (3) the light outside the small hole area is reflected by the high-reflection film on the small hole plate and is reflected by a semi-transparent semi-reflector; (4) the reflected light of the half mirror is imaged to the plane of an image recording element (such as a CCD) by an imaging lens; (5) by moving the sample position, different areas to be measured can be imaged into the well for spectroscopic measurements. The invention realizes the selection of the measurement area by utilizing the small hole, and can realize the measurement of the transmission, reflection, absorption and fluorescence spectra of the sample with the size reaching micron or even nanometer level.

Description

A Spectrometer Design Method for Realizing Micro-area Spectral Measurement

technical field

The invention relates to the technical field of spectrum measurement, in particular to a spectrometer design method for realizing micro-region spectrum measurement, which is suitable for detecting transmission, reflection, absorption and fluorescence spectra of micro-nano-scale objects or sample regions.

Background technique

Spectrometers have been widely used by people. Various material properties such as elemental composition and energy band structure can be studied through spectral detection.

For example, Chinese patent application No. 2006800243929 discloses a spectrometer device, which includes a pulsed radiation beam generator for generating a pulsed radiation beam with a predetermined radiation wavelength, an optical fiber with a plurality of cavity modes and each cavity mode has a cavity mode wavelength. a cavity, a dithering device, a photoacoustic chamber located within the optical cavity and containing a sample to be analyzed, and a detector, wherein the dithering device is used to make the radiation wavelength of the pulsed radiation beam and/or the plurality of cavity modes wavelength dithering such that the pulsed radiation beam is coupled quasi-continuously into the optical cavity; a detector for detecting pressure waves generated in the photoacoustic chamber when radiation from the pulsed radiation beam is absorbed by the sample and generating a detection The detector output signal can be used to determine the concentration value of the absorbing material in the sample by processing the detector output signal.

However, the above-mentioned spectrometer has a large spot, generally on the order of millimeters or centimeters. If it is used to measure the spectrum of micro-nano samples, most of the light energy will be irradiated outside the area to be measured, which will cause large errors in the final measurement results, and even make the Unable to measure spectrum. This severely restricts the research on the spectral properties of micro-nano materials.

Contents of the invention

In order to solve the above technical problems, it is indeed necessary to provide a spectrometer capable of measuring and analyzing spectral information in micro-nano samples and small regions within the samples. Desperately need one. The spectrometer can be widely used in materials science, aerospace, medicine, physical science, biological science and other fields.

According to the technical solution of the present invention, a spectrometer design method capable of realizing micro-region spectral measurement is provided, which includes the following steps:

(1) Use the imaging system to image the sample to be measured into the plane of the area selection small hole plate;

(2) The light in the small hole area passes through the small hole and enters the spectral analysis element for spectral analysis and measurement;

(3) The light outside the small hole area is reflected by the high reflective film on the small hole plate and reflected by the half-transparent and half-reflective mirror;

(4) The reflected light of the half mirror is imaged to the image recording element (such as CCD) plane by an imaging lens;

(5) By moving the position of the sample, different areas to be measured can be imaged into the small hole for spectral analysis and measurement.

Wherein, in the step (1), the selection of the measurement area is realized through the area selection small hole plate, and the small hole can be in any shape such as a rectangle, a circle, an ellipse, etc., depending on actual needs. Step (2) performs spectral analysis only on the light in the area of the small hole, and the light outside the area does not enter the spectrum analysis element. Step (3) The light outside the small hole area is reflected by the high reflective film on the small hole plate, and the high reflective film is a high reflective metal film, a dielectric film and other thin film materials that can achieve high reflectivity. The reflected light is reflected by the half-mirror, and the splitting ratio of the half-mirror can be 10:90, 30:70, 50:50 or any other ratio, depending on the actual situation. Step (4) The light outside the small hole area is finally imaged by the imaging lens and recorded and displayed by the image recording element. This step is used to observe and image the surface topography of the sample to be measured, and it is convenient to judge the position of the small hole on the image surface of the object. Position, that is, the position of the area selected by the small hole for measurement. In step (5), the selection and movement of the measurement area is realized by moving the sample, and the sample movement can be realized by using a manual or electric displacement stage.

Compared with the existing traditional spectrometer, the micro-area spectrometer provided by the present invention uses a small-hole plate to select the area to be measured, and complete the measurement of the target micro-nano-scale area and the spectral information of the micro-nano-scale sample. The size of the measurement area can be adjusted by adjusting the magnification of the imaging system or the size of the aperture. Further use of the half-mirror and the image recording element can observe the surface topography of the sample in real time and judge the position of the area to be measured, which is easy to operate and easy to use.

Description of drawings

Fig. 1 is a schematic diagram of a micro-area spectrum measurement system for realizing micro-area spectrum measurement according to the present invention.

Figure 2 is a schematic diagram of the structure of the area selection board.

FIG. 3 is an example of an image recorded by the image recording element 7 .

Fig. 4 is a schematic diagram of a sample imaging system according to the present invention.

Fig. 5 is a schematic diagram of a small orifice plate for selecting a spectral measurement area and a spectral measurement system.

Fig. 6 is a schematic diagram of an image digital recording system.

Detailed ways

The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention. Additionally, the protection scope of the present invention should not be limited only to the following specific structures or components or specific parameters.

According to the first aspect of the present invention, the micro-region spectrometer of the present invention includes an object to be analyzed, an imaging system, a half-transparent mirror, an area selection aperture plate, a spectral analysis element, an imaging lens and an image recording element (such as CCD); the object to be analyzed passes through the imaging system and is imaged on the plane of the small orifice plate in the selected area; the surface of the small orifice plate has high reflectivity, but the central small hole is a light-transmitting part. The light irradiated in the small hole area can enter the spectrum analysis element through the small hole for spectrum analysis. The light reflected by the small hole plate is reflected by the half mirror, and then imaged by the imaging lens to the image recording element, so as to realize the real-time observation and selection of the surface topography of the object to be measured and the range of the area to be measured. As shown in Figure 1.

The second aspect of the present invention provides a method capable of realizing micro-region spectrum measurement. The design method proposed by the invention can realize the spectral measurement and analysis of micro-nano samples. The method includes the following steps:

(1) Use the imaging system to image the sample to be measured into the plane of the area selection small hole plate;

(2) The light in the small hole area passes through the small hole and enters the spectral analysis element for spectral analysis and measurement;

(3) The light outside the small hole area is reflected by the high reflective film on the small hole plate and reflected by the half-transparent and half-reflective mirror;

(4) The reflected light of the half mirror is imaged to the image recording element (such as CCD) plane by an imaging lens;

(5) By moving the position of the sample, different areas to be measured can be imaged into the small hole for spectral analysis and measurement.

Wherein, in the step (1), the selection of the measurement area is realized through the area selection small hole plate, and the small hole can be in any shape such as a rectangle, a circle, an ellipse, etc., depending on actual needs. Step (2) performs spectral analysis only on the light in the area of the small hole, and the light outside the area does not enter the spectrum analysis element. Step (3) The light outside the small hole area is reflected by the high reflective film on the small hole plate, and the high reflective film is a high reflective metal film, a dielectric film and other thin film materials that can achieve high reflectivity. The reflected light is reflected by the half-mirror, and the splitting ratio of the half-mirror can be 10:90, 30:70, 50:50 or any other ratio, depending on the actual situation. Step (4) The light outside the small hole area is finally imaged by the imaging lens and recorded and displayed by the image recording element. This step is used for observing and imaging the surface topography of the sample to be measured, and it is convenient to judge the position of the small hole on the image surface of the object. Position, that is, the position of the area selected by the small hole for measurement. In step (5), the selection and movement of the measurement area is realized by moving the sample, and the sample movement can be realized by using a manual or electric displacement stage.

The present invention will be further described below in conjunction with the accompanying drawings. FIG. 1 is a schematic diagram of a micro-area spectrum measurement system for realizing micro-area spectrum measurement according to the present invention. The accompanying symbols are as follows: object to be measured (sample) 1, imaging system 2, semi-transparent mirror 3, area selection small hole plate 4, spectral analysis element 5, imaging lens 6, image recording element 7, small hole plate reflection Area 8, the small hole in the center of the small hole plate 9, the image of the object to be measured on the surface of the image recording element 10, the image of the small hole on the surface of the image recording element (taking a square small hole as an example) 11. Figure 2 is a schematic diagram of the structure of the area selection board. The central area 9 of the plate is a light-transmitting area, while the outer area 8 of the small hole has a higher reflectivity. FIG. 3 is an example of an image recorded by the image recording element 7, in which the black area 11 is imaged by the small hole in the center of the area selection plate 4 on the image recording element 7, and the remaining part 10 is the topographic image of the sample recorded by the image recording element 7. Fig. 4 is a schematic diagram of the sample imaging system according to the present invention, the sample 1 is imaged to the plane 14 through the lens group 2, and the sample can be illuminated by transmission or reflection. When using transmissive lighting, the light source 12 is turned on, turned off 13, and the light source radiates light 16 to irradiate the sample from below; when using reflective lighting, the light source 13 is turned on, turned off 12, and the light source radiates 16 through the half-transparent mirror 3 Irradiate the sample from above after reflection.

Figure 5 shows the schematic diagram of the selection of the small hole plate and the spectral measurement system in the spectral measurement area. The sample is imaged by the imaging system, and the corresponding light 15 is focused on the plane 4, and the light falling in the small hole area in the plane will pass through the small hole and enter the spectrometer for spectrum analysis. analyze. Light that falls outside the area of the pinhole is reflected.

FIG. 6 is a schematic diagram of an image digital recording system. The light reflected by the area-selective orifice plate 4 is reflected by the half-mirror 3 , and is imaged into the image recording element 7 through the lens 6 .

The present invention is realized by the following scheme: Referring to Fig. 1, first set up an imaging system (or adopt a commercial microscope) 2 to realize the imaging of the sample to be tested, this imaging system can adopt other methods such as transmissive lighting, reflective lighting or diffuse lighting, etc. lighting method. If transmissive lighting is used, the final measured spectrum is the transmitted spectrum; if reflective lighting is used, the final measured spectrum is the reflected spectrum; if diffused lighting is used, the final measured spectrum is the scattered spectrum. Absorption spectra were calculated from 100%-transmission spectra-reflection spectra. The object to be analyzed passes through the imaging system 2 and is imaged in the plane of the area selection small hole plate 4; the surface of the small hole plate has a coating 8 with high reflectivity, but the central small hole 9 has no reflective coating and can transmit light. The light irradiated in the small hole area can enter the spectrum analysis element 5 through the small hole for spectrum analysis. The light reflected by the small hole plate is reflected by the half-mirror 3, and then imaged by the imaging lens 6 to the image recording element 7, so as to realize the real-time observation and selection of the surface topography of the object to be measured and the range of the area to be measured.

Specifically, the surface 8 of the area-selective orifice plate (see Figure 2) can be coated with a metal film or a dielectric film to achieve high reflectivity, and its central light-transmitting hole 9 can be etched using focused ion beams, electron beam exposure, chemical Processed by corrosion and other technological means. Its shape can be selected as shapes such as circle, rectangle, triangle, ellipse. The specific shape can be selected according to the sample or the shape of the area to be measured.

The sample light is reflected by the small hole plate and the half-mirror 3, and the splitting ratio of the half-mirror can be 10:90, 30:70, 50:50 or any other ratio, depending on the actual situation.

The light reflected by the half-mirror passes through the imaging lens 6 and is imaged to the imaging element 7 for display and recording. The effect diagram is shown in FIG. 3 . In the area is the image 10 formed by the object to be measured on the imaging element, and the middle black area 11 is the image formed by the small hole in the center of the small hole plate. Since most of the light passes through the small hole and is rarely reflected, the imaging element The upper surface is black, and the shape is the same as that of the small hole. In this way, the topography of the sample surface can be monitored conveniently in real time, and at the same time, the position of the measured area on the sample surface can be known.

The position of the measured area on the surface of the sample can be selected by adjusting the position of the sample or adjusting the position of the overall imaging system and the spectrometer. It is convenient to realize the analysis and collection of spectral information of multiple areas on the sample surface or multiple samples. Movement of the sample or system can be accomplished by motorized or manual displacement systems or mechanisms.

Further, the present invention provides a method capable of realizing micro-region spectral measurement, which may also specifically include the following steps:

Step (1), set up an imaging system (2 in the accompanying drawing 1) for realizing the imaging of the sample to be tested (1 in the accompanying drawing 1), the imaging system can be composed of a single lens or a combination of multiple lenses; or in order to obtain Higher imaging quality of micro-nano samples, the imaging system can also use commercial microscopes. The imaging system can use other illumination methods such as transillumination, reflective illumination or diffuse illumination. If transmissive illumination is adopted, the light source 12 in the accompanying drawing 4 is lighted, and the light source 13 in the accompanying drawing 4 is turned off simultaneously, and the sample is illuminated by the light source (12 in the accompanying drawing 4) from the transmission direction, and imaged, the final measured The spectrum is the transmission spectrum; if reflective illumination is adopted, the light source 13 of the accompanying drawing 4 is lighted, and the light source 12 of the accompanying drawing 4 is turned off simultaneously, and the illumination light of the light source is reflected through the half-transparent mirror (3 in the accompanying drawing 4), from the direction of the imaging light path The sample is irradiated, and the sample is illuminated and imaged. At this time, the final measured spectrum is the reflection spectrum; if diffuse illumination (not shown in Figure 4) is used, the final measured spectrum is the scattering spectrum. Absorption spectra were calculated from 100%-transmission spectra-reflection spectra.

Step (2), behind the imaging system and in front of the imaging system, place a half mirror (3 in the accompanying drawing 1), whose angle is 45 degrees with the optical axis of the imaging system.

Step (3), place a measurement area selection plate with small holes (4 in Figure 1) on the imaging surface, and the shape of the small holes on the plate can be the shape in Figure 2 or other shapes as required. The area of the hole is transparent, and the other area of the plate is highly reflective. The light passing through the small hole will enter the spectrometer (5 in the accompanying drawing 1) behind to analyze the spectral information.

Step (4), the light reflected by the area selection plate (4 in the accompanying drawing 1) is reflected by the half mirror (3 in the accompanying drawing 1). A lens (6 in the accompanying drawing 1) is placed on the transmission path of the emitted light, and the light reflected by the area selection plate is focused on the plane of the image recording element (7 in the accompanying drawing 1), that is, the image passing area on the plane 4 The reflective film on the selection plate 4 reflects, the half mirror 3 reflects, and the image is imaged on the image recording element by the lens 6 . The final effect seen on the image recording element 7 is shown in Fig. 3 . The black area in the middle is the image of the small hole area on the area selection board, and this area is the area where the spectrum is analyzed [its shape is determined by the shape of the small hole (attachment 2), and the rectangular small hole is used as an example in the figure], the surrounding The bright area is the contour image of the sample, so that the position of the spectral analysis area on the sample can be observed in real time, the position of the measurement area can be adjusted in real time, and the surface morphology of the sample can be observed at the same time.

A system for realizing the method for measuring micro-region spectra includes an imaging system, a component for selecting a spectral measurement area, a component for collecting a spectrum, and a component for recording a digital image of a sample.

As shown in Figure 4, the imaging system is used to image the sample to be tested, and two illumination methods are shown in the figure, transmission illumination and reflection illumination. When using transmissive lighting, the light source 12 is turned on, and the light source 13 is turned off at the same time, and the sample is illuminated and imaged from bottom to top; is illuminated and imaged;

As shown in Figure 5, the spectral measurement area selection and spectrum acquisition components are used to select the area to be measured, and record and analyze the spectral information. The image plane 14 of the module two and the image plane 14 of the module two coincides in the spatial position, then the light falling on the small hole area in the center of the area selection plate 4 will enter the follow-up spectrometer 5 for spectral analysis, and the light outside the small hole will be detected by the area selection plate Highly reflective areas outside the pinhole reflect and are not analyzed by the spectrometer;

As shown in Figure 6, the sample digital image recording component is used to image and record the light reflected by the area selection plate. The light reflected by the area selection plate 4 enters the lens 6 after being reflected by the half-mirror 3, and is imaged into the image recording element 7, finally obtaining an image as shown in accompanying drawing 3, and the central black area is the spectrum by the analyzed area.

The above is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed in the present invention can easily think of changes or Replacement should be covered within the protection scope of the present invention. It will be understood by those of ordinary skill in the art that various changes in form and details may be made without departing from the spirit and scope of the present invention as defined by the appended claims.

Claims (6)

1. A spectrometer design method capable of realizing micro-region spectral measurement, comprising the following steps: (1) Use the imaging system to image the sample to be measured into the plane of the area selection small hole plate; (2) The light in the small hole area passes through the small hole and enters the spectral analysis element for spectral analysis and measurement; (3) The light outside the small hole area is reflected by the high reflective film on the small hole plate and reflected by the half-transparent and half-reflective mirror; (4) The reflected light of the half mirror is imaged to the image recording element (such as CCD) plane by an imaging lens; (5) By moving the position of the sample, different areas to be measured can be imaged into the small hole for spectral analysis and measurement. 2. The spectrometer design method capable of realizing micro-area spectrum measurement according to claim 1 is characterized in that, the selection of the measurement area is realized by the area selection small hole plate described in step (1), and the small hole can be a rectangle , round, oval, etc. in any shape, depending on actual needs. 3. The spectrometer design method capable of realizing micro-area spectral measurement according to claim 1, characterized in that step (2) only performs spectral analysis on the light in the small hole area, and the light outside the area does not enter the spectral analysis element. 4. the spectrometer design method that can realize micro-area spectrum measurement according to claim 1, is characterized in that, the light outside step (3) pinhole area is reflected by the high-reflection film on the small-hole plate, and this high-reflection film is High reflective metal film, dielectric film and other thin film materials that can achieve high reflectivity. The reflected light is reflected by the half-mirror, and the splitting ratio of the half-mirror can be 10:90, 30:70, 50:50 or any other ratio, depending on the actual situation. 5. The spectrometer design method capable of realizing micro-area spectral measurement according to claim 1, characterized in that the light rays outside the pinhole area in step (4) are finally imaged through the imaging lens and recorded and displayed by the image recording element. It is used to observe and image the surface topography of the sample to be tested, and it is convenient to judge the position of the small hole on the image plane of the object, that is, the position of the area selected by the small hole for measurement. 6. A spectrometer design method that can realize micro-area spectrum measurement according to claim 1, characterized in that step (5) realizes the selection and movement of the measurement area by moving the sample, which can be realized by using a manual or electric displacement stage Sample movement.