CN112951859A

CN112951859A - Coupling method and probe

Info

Publication number: CN112951859A
Application number: CN202011550941.4A
Authority: CN
Inventors: 顾铁; 金利波; 程丙勋
Original assignee: Yirui Imaging Technology Taicang Co ltd
Current assignee: Yirui Imaging Technology Taicang Co ltd
Priority date: 2020-12-24
Filing date: 2020-12-24
Publication date: 2021-06-11

Abstract

The application provides a coupling method and a detector, which can save the manufacturing cost of the whole detector, reduce the weight of the whole detector, and have simple packaging process and low cost of a flexible film and a scintillator. And the frame thickness of the detector is 1-2mm, so that the detector can meet the application fields of various detectors with high requirements and high technologies, such as mammary gland detection, veterinary detection and the like.

Description

Coupling method and probe

[ technical field ] A method for producing a semiconductor device

The present application relates to the field of screen packaging technologies, and in particular, to a coupling method and a detector.

[ background of the invention ]

In an X-ray flat panel detector, scintillation screen coupling is a very critical core technology in the assembly process of the detector, and the performance of the detector is directly determined by the quality of the scintillation screen coupling. The scintillation screen coupling means that the scintillation screen and the sensor are closely attached together. At present, the coupling technology between the scintillation screen and the photosensitive sensor aiming at CsI (chemical formula of cesium iodide) is mainly divided into an indirect coupling technology and a direct growth coupling technology.

In the large-size CMOS (Complementary Metal Oxide Semiconductor) detector in the prior art, due to technical difficulty or cost reduction, most of the detectors are formed by splicing a plurality of CMOS sensors. When the detector formed by splicing directly grows the coupled scintillation screen, the problems that the scintillation screen is cracked, the image is abnormal, the weather resistance test is abnormal and the like can not be solved due to the splicing seams among the sensors. Therefore, the detector formed by splicing the plurality of CMOS sensors mainly adopts an indirect coupling mode.

The existing indirect coupling technology has two schemes, one is a scheme that the main structure adopts a transparent optical fiber substrate structure for coupling, and the other is a scheme that the main structure adopts a non-transparent substrate inverse buckle coupling. The non-transparent substrate mainly includes a C-based (carbon-based), Al-based (aluminum-based), or organic flexible substrate.

In the structure adopting the non-transparent substrate for coating, the hardness of the coated substrate is slightly larger, the coated substrate is easy to deform, and the gluing effect is poor, so that the image quality of the scintillation screen is poor; a transparent packaging scheme is needed when the CsI is evaporated on the substrate, but the transparent packaging scheme has complex process and high cost, and the scintillator is easily scratched to cause the failure of the scintillation screen; the substrate is larger than the size of the CsI scintillation screen, so that the assembled whole machine cannot achieve a narrow frame within 2 mm.

In the structure adopting the transparent optical fiber guide plate, the optical fiber guide plate has high hardness, the difficulty in attaching the optical fiber guide plate and the sensor is high, and the problems of bubbles and uneven thickness are easily generated in an adhesive layer; the optical fiber guide plate is expensive and has high manufacturing cost; the optical fiber guide plate has absorption of about 30% of light of the scintillator and certain scattering, so that the dosage of X-rays is increased, and the image quality is also influenced.

[ summary of the invention ]

In view of this, embodiments of the present application provide a coupling method and a detector, so as to solve the technical problems in the prior art that a coupling method adopted by a scintillation screen and a sensor causes high manufacturing cost of the scintillation screen, poor yield, and poor image quality.

In a first aspect, an embodiment of the present application provides a coupling method, including the following steps:

disposing a flexible film on a substrate;

disposing a scintillator on a surface of the flexible film remote from the substrate;

packaging the scintillator and the flexible film together;

separating the flexible membrane from the substrate;

attaching the flexible membrane to a sensor.

By the scheme provided by the embodiment, the detector which is narrow in frame, low in cost, low in coupling difficulty, high in performance and high in yield and can be widely applied can be obtained.

In a preferred embodiment, the step of disposing a flexible film on a substrate includes the steps of:

coating a flexible substrate on the substrate;

curing the flexible substrate to form the flexible film.

According to the scheme provided by the embodiment, the flexible film is formed on the substrate by adopting a coating process, the process flow is simple, and the application range is wide.

In a preferred embodiment, the material of the flexible membrane is one or more polymeric materials.

According to the scheme provided by the embodiment, the polymer material has high light transmittance, so that the light transmittance of the flexible film can reach 95% -99%, and the high light transmittance of the flexible film can reduce the X-ray irradiation dose required when X-rays pass through the scintillation screen.

In a preferred embodiment, the scintillator is formed by vapor-plating a layer of scintillation film on the surface of the flexible film remote from the substrate.

Through the scheme that this embodiment provided, adopt the fashioned scintillator of coating by vaporization technology, it contains the CsI purity height, and the precision is high.

In a preferred embodiment, the step of disposing a scintillator on the surface of the flexible film away from the substrate includes the steps of:

arranging a water vapor blocking layer on the surface of the flexible film far away from the substrate;

and arranging a scintillator on the surface of the water vapor barrier layer far away from the substrate.

Through the scheme provided by the embodiment, the adhesive force between the scintillator and the flexible film can be improved.

In a preferred embodiment, the step of packaging the scintillator and the flexible film together includes the steps of:

manufacturing a protective film on the surface of the scintillator far away from the flexible film;

and adhering the part of the protective film, which is not adhered to the scintillator, to the flexible film.

Through the scheme that this embodiment provided, encapsulate the scintillator in the enclosure space that protection film and flexible film formed, prevent that the scintillator from being scratched and prevent that steam from invading the scintillator and lead to the consequence that influences image quality.

In a preferred embodiment, the flexible film is separated from the substrate by a laser lift-off process.

Through the scheme that this embodiment provided for base plate and flexible membrane need not any mechanical external force just can be complete separation, have avoided the flexible membrane to take place the accident of deformation, damage.

In a preferred embodiment, the sensor is bonded to the surface of the flexible film away from the scintillator by an adhesive, and the light transmittance of the adhesive is 95% to 99%.

Through the scheme that this embodiment provided, the flexible membrane can be in the flexibility of the uneven department of height crooked to reach the effect that sensor and flexible membrane laminated completely, reduced the coupling degree of difficulty, improved the production yield, can not influence the quality of image. And the high light transmittance of the adhesive can prevent X-rays from being excessively absorbed in the penetrating process.

In a preferred embodiment, the surface area of the flexible membrane is greater than the surface area of the sensor, the flexible membrane having a plurality of edges protruding above the sensor in a surface extension plane of the flexible membrane;

after the step of adhering the sensor to the flexible membrane of the scintillation screen, further comprising the steps of:

and bending and attaching at least one edge to the periphery of the sensor.

Through the scheme that this embodiment provided for the edge formation of the detector after the shaping reaches 2 mm's narrow frame, thereby makes the detector satisfy various application fields that require technical height such as mammary gland detection, veterinary detection.

In a second aspect, the present application provides a detector, including a scintillator assembly, a flexible film, and a sensor assembly, the flexible film has a first surface and a second surface opposite to each other, the scintillator assembly is packaged on the first surface of the flexible film, and the sensor assembly is attached to the second surface of the flexible film.

Through the scheme that this embodiment provided, scintillator subassembly and sensor module pass through the flexible membrane coupling and are in the same place, because the flexible membrane is to the high transmissivity and the low absorption of X ray to reduce the dose of X ray, improved the performance of detector, and the flexible membrane has advantages such as with low costs, the coupling degree of difficulty is low, makes the detector possess high yield and wide application.

In a preferred embodiment, the scintillator assembly includes a protective film and a scintillator, the scintillator is attached to the first surface of the flexible film, and the protective film covers a surface of the scintillator remote from the flexible film and encapsulates the scintillator.

Through the scheme that this embodiment provided, adopt the protection film to encapsulate the scintillator in the enclosure space that protection film and flexible film formed, prevent that the scintillator from being scratched and prevent that steam from invading the scintillation and lead to the consequence that influences image quality.

In a preferred embodiment, the protective film has a protective film middle part, a protective film connecting part and a protective film side, the protective film connecting part connects the protective film middle part and the protective film side, the flexible film has a flexible film middle part and a plurality of flexible film edges, and the plurality of flexible film edges are respectively connected to the periphery of the flexible film middle part;

the scintillator is attached to the middle of the flexible film, the middle of the protective film is attached to the surface, away from the flexible film, of the scintillator, the connecting part of the protective film is attached to the periphery of the scintillator, and the side edge of the protective film is attached to the edge of the flexible film;

the surface area of the protective film is larger than that of the flexible film, and the surface area of the flexible film is larger than that of the scintillator.

Through the scheme that this embodiment provided, closely laminating is in the same place between protection film and the scintillator, between protection film and the flexible membrane for each position of detector does not have the bubble and thickness is even.

In a preferred embodiment, the scintillator assembly further has a moisture barrier layer disposed between the protective film and the scintillator.

In a preferred embodiment, the surface area of the flexible membrane is greater than the surface area of the sensor assembly, the sensor assembly fits in the middle of the flexible membrane, the edges of the flexible membrane protrude above the sensor assembly in the plane of extension of the flexible membrane, and at least one of the edges of the flexible membrane can be bent and fit to the perimeter of the sensor assembly.

In a preferred embodiment, the sensor assembly includes a sensor attached to the second surface of the flexible membrane and a support layer attached to a surface of the sensor remote from the flexible membrane.

Through the scheme that this embodiment provided, utilize the supporting layer to provide intensity for the sensor and support, do benefit to the steady operation of sensor.

In a preferred embodiment, the number of the sensors is plural, and a plurality of the sensors are attached to the second surface of the flexible film in a tiled manner.

Through the scheme that this embodiment provided, utilize the ductility of flexible film, can tile a plurality of sensors or multiple type sensor on same flexible film and can not increase the coupling degree of difficulty in the manufacturing process for the detector can be applied to in the more extensive scene.

In a preferred embodiment, a drop height is formed between two adjacent sensors, and the part of the second surface of the flexible membrane corresponding to the drop height is adapted to bend and deform along the drop height.

Through the scheme that this embodiment provided, utilize the pliability of flexible membrane and bend at drop department adaptability for not unidimensional, not equidimensional sensor homoenergetic can the compatible coupling on the flexible membrane, reaches the effect that sensor and flexible membrane laminated completely, has reduced the coupling degree of difficulty, has improved the production yield, can not influence the performance and the image quality of whole detector.

In a preferred embodiment, the abutting face of each sensor abutting on the second surface of the flexible film is flush in the extending direction of the flexible film.

Through the scheme provided by the embodiment, the thickness of each position of the flexible film is uniform, and the thickness of the X-ray penetrating the flexible film is the same, so that the quality of the image finally obtained by the detector is ensured.

In a preferred embodiment, the sensor assembly and the flexible membrane are bonded by an adhesive, and the light transmittance of the adhesive is 95% to 99%.

Through the scheme provided by the embodiment, the high light transmittance of the adhesive can prevent X-rays from being excessively absorbed in the penetrating process.

The coupling method and the detector disclosed by the embodiment of the application can save the manufacturing cost of the whole detector, reduce the weight of the whole detector, and have simple packaging process and low cost of the flexible body. And the frame thickness of the detector is 1-2mm, so that the detector can meet the application fields of various detectors with high requirements and high technologies, such as mammary gland detection, veterinary detection and the like.

[ description of the drawings ]

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.

FIG. 1 is a schematic structural diagram of a detector provided in embodiment 1 of the present application;

FIG. 2 is a schematic structural diagram of a scintillator assembly and a flexible film in the detector provided in example 1 of the present application;

FIG. 3 is a schematic structural diagram of a sensor assembly and a flexible membrane in the detector provided in embodiment 1 of the present application;

FIG. 4 is a schematic structural diagram of a probe provided in embodiment 1 of the present application, in which a plurality of sensors are attached to a flexible film;

fig. 5 is a schematic structural diagram illustrating that when a plurality of sensors are attached to a flexible film in the detector provided in embodiment 1 of the present application, there is a drop height between the sensors;

FIG. 6 is a schematic view of a structure in which a plurality of sensors are flush with each other when the sensors are attached to a flexible film in the detector provided in example 1 of the present application;

FIG. 7 is a schematic structural diagram of the protective film, the scintillator and the flexible film at various positions in the detector provided in example 1 of the present application;

FIG. 8 is a process flow diagram of a coupling method for fabricating a detector provided in example 2 of the present application;

fig. 9 is a flowchart illustrating a Step100 in the coupling method for manufacturing a detector according to embodiment 2 of the present application;

fig. 10 is a schematic structural diagram of a coupling method for manufacturing a detector according to embodiment 2 of the present application when Step100 is performed;

fig. 11 is a flowchart illustrating a Step200 of the coupling method for manufacturing a detector according to embodiment 2 of the present application;

fig. 12 is a schematic structural diagram of Step200 executed in the coupling method for manufacturing a detector according to embodiment 2 of the present application;

fig. 13 is a flowchart illustrating a Step300 of the coupling method for manufacturing a detector according to embodiment 2 of the present application;

fig. 14 is a schematic structural diagram of the coupling method for manufacturing a detector according to embodiment 2 of the present application when Step300 is executed;

fig. 15 is a schematic structural diagram of the coupling method for manufacturing a detector according to embodiment 2 of the present application when Step400 is executed;

fig. 16 is a schematic structural diagram of the coupling method for manufacturing a detector according to embodiment 2 of the present application when Step500 is executed;

fig. 17 is a schematic structural diagram of the coupling method for manufacturing a detector according to embodiment 2 of the present application when Step600 is executed.

Reference numerals:

1-a substrate; 2-a flexible film; 21-a first surface; 22-a second surface; 23-flexible film middle; 24-flexible film edge; 3-a water vapor barrier layer; 4-a scintillator; 41-scintillator perimeter; 5-protective film; 51-protective film middle; 52-protective film connection; 53-protective film side; 6-a sensor; 7-a support layer; 8-fall; 100-a scintillator assembly; 200-a sensor assembly.

[ detailed description ] embodiments

For better understanding of the technical solutions of the present application, the following detailed descriptions of the embodiments of the present application are provided with reference to the accompanying drawings.

It should be understood that the embodiments described are only a few embodiments of the present application, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

The terminology used in the embodiments of the present application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. As used in the examples of this application and the appended claims, the singular forms "a", "an", and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise.

It should be understood that the term "and/or" as used herein is merely one type of association that describes an associated object, meaning that three relationships may exist, e.g., a and/or B may mean: a exists alone, A and B exist simultaneously, and B exists alone. In addition, the character "/" herein generally indicates that the former and latter related objects are in an "or" relationship.

Example 1

Referring to fig. 1 to 7, the embodiment 1 of the present application discloses a detector, which includes a scintillator assembly 100, a flexible film 2, and a sensor assembly 200, wherein the flexible film 2 has a first surface 21 and a second surface 22 opposite to each other, the scintillator assembly 100 is encapsulated on the first surface 21 of the flexible film 2, and the sensor assembly 200 is attached to the second surface 22 of the flexible film 2. The scintillator assembly 100 and the sensor assembly 200 are coupled together by the flexible membrane 2, and unlike the prior art in which a hard medium such as a fiber guide plate is used, the flexible membrane 2 can be adapted to various application requirements by taking advantage of its flexibility, and it is easier to couple the scintillator assembly 100 and the sensor assembly 200 together. The scintillator assembly 100 and the sensor assembly 200 are coupled together through the flexible film 2, and the flexible film 2 has high transmittance and low absorption of the X-rays, so that the dosage of the X-rays is reduced, the performance of the detector is improved, and the flexible film 2 has the advantages of low cost, low coupling difficulty and the like, so that the detector has high yield and wide application. The sensor assembly 200 is bonded with the flexible membrane 2 through an adhesive, and the light transmittance of the adhesive is 95% -99%. The high light transmittance of the adhesive can prevent the X-ray from being excessively absorbed in the penetrating process.

Referring to fig. 1 and 2, the scintillator assembly 100 includes a protective film 5 and a scintillator 4, the scintillator 4 is attached to the first surface 21 of the flexible film 2, and the protective film 5 covers a surface of the scintillator 4 away from the flexible film 2 and encapsulates the scintillator 4. That is, the protective film 5 and the flexible film 2 are two members having flexibility and ductility to wrap the scintillator 4 in the middle to realize encapsulation, so that the scintillator 4 is not invaded by the external environment in operation. The detector of embodiment 1 adopts the protective film 5 to encapsulate the scintillator 4 in the closed space formed by the protective film 5 and the flexible film 2, so that the scintillator 4 can be prevented from being scratched and the effect of affecting the image quality caused by the intrusion of water vapor into the scintillator 4 can be prevented. Further, scintillator subassembly 100 still has steam barrier layer 3, and steam barrier layer 3 sets up between protection film 5 and scintillator 4, can improve the adhesive force between scintillator 4 and the flexible membrane 2.

Referring to fig. 1 and 3, the sensor assembly 200 includes a sensor 6 and a support layer 7, the sensor 6 is attached to the second surface 22 of the flexible membrane 2, and the support layer 7 is attached to the surface of the sensor 6 away from the flexible membrane 2. Because the sensor 6 is a core component of the detector, a stable working environment is required, so that the sensor 6 must be prevented from moving after being coupled with the flexible membrane 2, and because the flexible property of the flexible membrane 2 makes the sensor 6 attached to the flexible membrane inevitably move, the supporting layer 7 is required to provide strength support for the sensor 6, which is beneficial to the stable work of the sensor 6. Further, referring to fig. 4, the number of the sensors 6 may be plural, and a plurality of the sensors 6 are attached to the second surface 22 of the flexible film 2 in a tiled manner. In some specific application scenarios, different types and sizes of sensors 6 are required, and the number of the sensors 6 attached to the flexible film 2 is plural, so that the flexibility of the flexible film 2 can meet the application requirements of attaching different sensors 6. In the detector of this embodiment 1, by using the ductility of the flexible film 2, a plurality of sensors 6 or a plurality of types of sensors 6 may be tiled on the same flexible film 2 without increasing the coupling difficulty in the manufacturing process, so that the detector may be applied to a wider range of scenes. In an application scenario, a drop 8 is formed between two adjacent sensors 6, as shown in fig. 5, a portion of the second surface 22 of the flexible film 2 corresponding to the drop 8 is adapted to the drop 8 to undergo bending deformation, so that the flexible film 2 and each sensor 6 can be tightly attached to each other, and no bubble is generated between the flexible film 2 and each sensor 6 to affect penetration of X-rays. In the detector of this embodiment 1, utilize the pliability of flexible membrane 2 and bend at drop 8 adaptability for not unidimensional, not sensor 6 homoenergetic of equidimension can couple compatibly on flexible membrane 2, reaches the effect that sensor 6 and flexible membrane 2 laminated completely, has reduced the coupling degree of difficulty, has improved the production yield, can not influence the performance and the image quality of whole detector. In another application scenario, the attaching surface of each sensor 6 attached to the second surface 22 of the flexible film 2 is flush with the extending direction of the flexible film 2, as shown in fig. 6, in order to make the distance traveled by the X-ray at each position of the flexible film 2 substantially the same when the X-ray penetrates through the flexible film 2, that is, the thickness of the flexible film 2 at each position is substantially the same, when the sensor assembly 200 is manufactured, the attaching surface of each sensor 6 is flush with each other to form a complete plane, preferably when the sensor 6 is attached to the second surface 22 of the flexible film 2, so that the thickness of the flexible film 2 at each position is uniform, and the thickness penetrated by the X-ray when the X-ray penetrates through the flexible film 2 is the same, thereby ensuring the image quality finally obtained by the detector.

Referring to fig. 7, the protective film 5 has a protective film middle portion 51, a protective film connecting portion 52 and a protective film side 53, the protective film connecting portion 52 connects the protective film middle portion 51 and the protective film side 53, the flexible film 2 has a flexible film middle portion 23 and a plurality of flexible film edges 24, the plurality of flexible film edges 24 are respectively connected to the outer circumference of the flexible film middle portion 23; the scintillator 4 is attached to the middle part 23 of the flexible film, the middle part of the protective film 5 is attached to the surface, far away from the flexible film 2, of the scintillator 4, the connecting part of the protective film 5 is attached to the periphery 41 of the scintillator 4, and the side edge 53 of the protective film is attached to the edge 24 of the flexible film; the surface area of the protective film 5 is larger than the surface area of the flexible film 2, and the surface area of the flexible film 2 is larger than the surface area of the scintillator 4. As can be seen from fig. 7, the contour of the scintillator 4 is adaptively designed according to the actual application scenario, for example, in an application scenario in which the cross-sectional contour of the scintillator 4 is a trapezoid, the protective film middle portion 51 and the protective film connecting portion 52 of the protective film 5 have the shape of the upper side and the waist of the trapezoid, so as to be tightly wrapped outside the scintillator 4, and the remaining protective film side edge 53 of the non-wrapped scintillator 4 is bonded to the flexible film edge 24 that is not bonded to the scintillator 4, so as to realize the encapsulation. Therefore, the protective film 5 and the scintillator 4 and the protective film 5 and the flexible film 2 are tightly attached together, so that each part of the detector has no bubbles and is uniform in thickness. Further, with reference to fig. 1 and 7, the surface area of the flexible membrane 2 is greater than the surface area of the sensor assembly 200, the sensor assembly 200 is attached to the flexible membrane central portion 23, the flexible membrane edges 24 protrude from the sensor assembly 200 in the plane of extension of the flexible membrane 2, and at least one of the flexible membrane edges 24 can be bent and attached to the perimeter of the sensor assembly 200. Generally speaking, the flexible membrane edge 24 is bent to be attached to the periphery of the sensor 6 of the sensor assembly 200, it is only necessary to form a narrow frame and reinforce the coupling between the flexible membrane 2 and the sensor 6 at the side, and the edge of the formed detector forms a narrow frame up to 2mm, so that the detector can meet various application fields with high requirements and technologies, such as breast detection and veterinary detection.

The detector of the embodiment 1 has the advantages of simple manufacturing process flow and low production cost, and the narrow frame in the new city can meet the application occasions with high technical requirements.

Example 2

The embodiment 2 of the application discloses a coupling method applied to manufacturing an X-ray detector, the coupling method is used for coupling a scintillation screen in the detector and a sensor 6 together, and is different from a process flow adopted in the prior art, and a light-transmitting component made of a flexible material is adopted in the process flow of the coupling method of the embodiment 2 to solve the technical problems of high manufacturing cost, poor yield and poor image quality of the scintillation screen in the prior art.

Referring to fig. 8, the coupling method of the present embodiment 2 includes the following steps:

step 100: a flexible film 2 is provided on a substrate 1.

Step 200: a scintillator 4 is arranged on the surface of the flexible film 2 remote from the substrate 1.

Step 300: the scintillator 4 and the flexible film 2 are encapsulated together.

Step 400: the flexible film 2 is separated from the substrate 1.

Step 500: the flexible membrane 2 is attached to the sensor 6.

Step 600: the flexible membrane edge 24 of the at least one flexible membrane 2 is bent and glued around the sensor 6.

By the coupling method described in the above steps 100 to 600 of this embodiment 2, a detector with a narrow frame, low cost, low coupling difficulty, high performance, high yield, and wide application can be obtained.

Referring to fig. 9 and 10, in Step100, the substrate 1 having hardness is spread and unfolded so that another member is provided on the flexible film 2, and the substrate 1 of the present embodiment 2 is made of glass. The process of setting the flexible film 2 is divided into the following two steps:

step 101: a flexible substrate is coated on the substrate 1.

Step 102: the flexible substrate is cured to form the flexible membrane 2.

Firstly, coating the raw material of the flexible film 2 on the substrate 1 to form a film layer, and then forming the flexible film 2 through curing molding. The thickness of the flexible film 2 thus produced may be determined according to the actual requirements of the application, and the thickness range is generally 2 to 30 μm, for example, in the application requiring higher light transmittance between the scintillator 4 and the sensor 6, the thickness of the flexible film 2 may be closer to 2 μm, and in the application requiring a stronger flexible film 2 between the scintillator 4 and the sensor 6, the thickness of the flexible film 2 may be closer to 30 μm. The flexible film 2 is formed on the substrate 1 by adopting a coating process, so that the process flow is simple and the application range is wide. In the coupling method of this embodiment 2, the coating process may employ one of a painting method, a spraying method, or an electrophoretic coating method. The raw material of the flexible film 2 may be one or more polymer materials, such as polyimide, polycarbonate, polyethylene terephthalate or polyethylene naphthalate, which have high light transmittance, and polyimide is preferred as the material of the flexible film 2, so that the light transmittance of the flexible film 2 can reach 95% to 99%, and the high light transmittance of the flexible film 2 can reduce the required X-ray irradiation dose when X-rays pass through the scintillation screen. In addition, since the flexible film 2 with high light transmittance is adopted in the embodiment 2, compared with the prior art adopting the optical fiber guide plate structure, the whole machine cost of the detector is reduced by 30%, and the dosage of the detector using the X-rays (i.e. the X-ray irradiation dosage) is reduced by 30%, so that the sensitivity and the performance of the detector can be improved.

Referring to fig. 11, in Step200, the flexible film 2 formed on the substrate 1 according to Step100 is used as a flexible substrate for disposing the scintillator 4, and a CsI film layer having a smaller surface area than the flexible film 2 is formed as the scintillator 4 which absorbs X-rays and emits light after being molded. The scintillator 4 formed by the vapor deposition process has high purity and high precision of the CsI content.

Referring to fig. 12, in order to increase the strength between the flexible film 2 and the scintillator 4, Step200 further includes the steps of:

step 201: a moisture barrier layer 3 is provided on the surface of the flexible film 2 remote from the substrate 1.

Step 202: a scintillator 4 is arranged on the surface of the moisture barrier layer 3 remote from the substrate 1.

A water vapor blocking layer 3 is firstly vapor-plated on the flexible film 2, then the CsI is vapor-plated on the water vapor blocking layer 3 through a vapor deposition process, and the adhesive force between the scintillator 4 and the flexible film 2 is improved through the water vapor blocking layer 3. The Vapor barrier layer 3 is generally formed by depositing a layer of metal nitride or oxide such as silicon nitride or silicon oxide or aluminum oxide by Chemical Vapor Deposition (CVD). The vapor barrier layer 3 may also be deposited by Atomic Layer Deposition (ALD). The thickness of the water vapor barrier layer 3 is between 10nm and 5000nm, and is generally set to 1000 nm.

Referring to fig. 13 and 14, in Step300, in order to strengthen the coupling strength between the scintillator 4 and the flexible film 2 while protecting the scintillator 4, the process of providing the protective film 5 is divided into the following two steps.

Step 301: manufacturing a protective film 5 on the surface of the scintillator 4 far away from the flexible film 2;

step 302: the portion of the protective film 5 not bonded to the scintillator 4 is bonded to the flexible film 2.

Through making one deck protection film 5 on the CsI rete at scintillator 4, the surface of flexible membrane 2 is kept away from at scintillator 4 to protection film 5 laminating, the surface area of protection film 5 is done than the surface area on CsI rete is bigger, thereby protection film 5 does not laminate around scintillator 4 with protection film side 53 part that scintillator 4 laminated and the tiling laminating is at flexible membrane 2 around its convex scintillator 4, play the effect of encapsulating scintillator 4 in the enclosure space that protection film 5 and flexible membrane 2 formed, prevent that scintillator 4 from being scratched and prevent that steam from invading scintillator 4 and leading to the consequence that influences image quality.

Referring to fig. 15, in Step400, since the substrate 1 is only for providing support and flattening for fabricating the scintillator 4 on the flexible film 2, the substrate 1 cannot be used in the actual use of the detector, and therefore the flexible film 2 needs to be separated from the substrate 1 before coupling the scintillator 4 with the sensor 6. In the coupling method of this embodiment 2, the substrate 1 is separated from the flexible film 2 by a Laser Lift-off Process (LLO), so that the substrate 1 and the flexible film 2 can be completely separated without any external mechanical force, and the occurrence of deformation and damage to the flexible film 2 is avoided. After separation, the flexible film 2 is still in an unfolded flat shape due to being already stretched and flattened by the substrate 1 in the previous manufacturing process, and due to the flexible characteristic of the flexible film 2, the flexible film can adapt to sensors 6 or sensor combinations in various forms, for example, two sensors 6 which are smoothly spliced can be directly attached to the flexible film 2, and for example, if the two sensors 6 are different in size, due to the limitation of the internal structure of a detector in the splicing process, the two sensors 6 can be attached to the flexible film 2 in a rugged manner, and at the moment, the flexible film 2 can be bent in a rugged manner, so that the effect of completely attaching the sensors 6 to the flexible film 2 is achieved, the coupling difficulty is reduced, the production yield is improved, and the quality of images cannot be influenced.

Referring to fig. 16, in Step500, the sensor 6 or the sensor assembly is spliced on the support layer 7, and the spliced sensor 6 or the sensor assembly is adhered to the surface of the flexible film 2 away from the scintillator 4 by using an adhesive, so as to complete the coupling of the scintillator 4 and the sensor 6. In the direction through the centre axis of the scintillator 4, the surface area of the sensor 6 or the sensor combination is smaller than the surface area of the scintillator 4, and the projection of the sensor 6 or the sensor combination is completely covered by the projection of the scintillator 4. The light transmittance of the adhesive bonding the sensor 6 to the flexible membrane 2 is 95% -99%, and the high light transmittance of the adhesive can prevent the X-rays from being excessively absorbed in the penetrating process.

Referring to fig. 17, in Step600, on the extension plane of the flexible film 2, since the surface area of the flexible film 2 of the present embodiment 2 is larger than that of the sensor 6, the flexible film 2 has a plurality of flexible film edges 24 protruding the sensor 6 on the surface extension plane of the flexible film 2. The edges 24 of the flexible membranes are bent towards the sensor 6 along the arrow direction, so that a narrow frame reaching 2mm is formed around the formed detector, and the detector can meet various application fields with high requirements and high technologies, such as mammary gland detection, veterinary detection and the like.

The detector disclosed by the embodiment of the application can save the manufacturing cost of the whole detector, reduce the weight of the whole detector, and has simple packaging process and low cost of the flexible film and the scintillator. And the frame thickness of the detector is 1-2mm, so that the detector can meet the application fields of various detectors with high requirements and high technologies, such as mammary gland detection, veterinary detection and the like.

The above description is only exemplary of the present application and should not be taken as limiting the present application, as any modification, equivalent replacement, or improvement made within the spirit and principle of the present application should be included in the scope of protection of the present application.

Claims

1. a coupling method, is characterized in that, comprises the following steps:

A flexible film is arranged on the substrate;

disposing a scintillator on the surface of the flexible film away from the substrate;

encapsulating the scintillator and the flexible membrane together;

separating the flexible film from the substrate;

The flexible film is attached to the sensor.

2. The coupling method according to claim 1, wherein the step of disposing the flexible film on the substrate comprises the following steps:

coating a flexible substrate on the substrate;

The flexible substrate is cured to form the flexible film.

3. The coupling method according to claim 2, wherein the material of the flexible film is one or more polymer materials.

4 . The coupling method according to claim 1 , wherein the scintillator is formed by evaporating a scintillator film layer on the surface of the flexible film away from the substrate. 5 .

5 . The coupling method according to claim 1 , wherein the step of disposing a scintillator on the surface of the flexible film away from the substrate comprises the following steps: 6 .

Disposing a water vapor barrier layer on the surface of the flexible film away from the substrate;

A scintillator is provided on the surface of the water vapor barrier layer away from the substrate.

6. The coupling method according to claim 1, wherein the step of encapsulating the scintillator and the flexible film together comprises the following steps:

making a protective film on the surface of the scintillator away from the flexible film;

A part of the protective film that is not adhered to the scintillator is adhered to the flexible film.

7 . The coupling method of claim 1 , wherein the flexible film is separated from the substrate by a laser lift-off process. 8 .

8 . The coupling method according to claim 1 , wherein the sensor is bonded to the surface of the flexible film away from the scintillator by an adhesive, and the light transmittance of the adhesive is 95 . %～99%.

9 . The coupling method according to claim 1 , wherein the surface area of the flexible film is larger than the surface area of the sensor, and the flexible film has a surface protruding from the surface extending plane of the flexible film. 10 . multiple edges of the sensor;

After the step of adhering the sensor on the flexible film of the flashing screen, the following steps are further included:

At least one of the edges is bent and fitted around the sensor.

10. A detector, comprising a scintillator assembly, a flexible film, and a sensor assembly, the flexible film having opposite first and second surfaces, and the scintillator assembly is encapsulated on the first surface of the flexible film. On one surface, the sensor assembly is attached to the second surface of the flexible membrane.

11 . The detector according to claim 10 , wherein the scintillator assembly comprises a protective film and a scintillator, the scintillator is attached to the first surface of the flexible film, and the protective film covers the 11 . The scintillator is away from the surface of the flexible film and encapsulates the scintillator.

12 . The detector according to claim 11 , wherein the protective film has a protective film middle portion, a protective film connecting portion and a protective film side edge, and the protective film connecting portion connects the protective film middle portion and the protective film side. 13 . a side edge of the protective film, the flexible film has a middle part of the flexible film and a plurality of edges of the flexible film, the edges of the plurality of flexible films are respectively connected to the outer periphery of the middle part of the flexible film;

The scintillator is attached to the middle part of the flexible film, the middle part of the protective film is attached to the surface of the scintillator away from the flexible film, and the connection part of the protective film is attached to the periphery of the scintillator, The side edge of the protective film is attached to the edge of the flexible film;

13 . The detector according to claim 11 , wherein the scintillator assembly further has a water vapor barrier layer, and the water vapor barrier layer is disposed between the protective film and the scintillator. 14 .

14 . The detector according to claim 11 , wherein the surface area of the flexible film is larger than the surface area of the sensor assembly, the sensor assembly is attached to the middle of the flexible film, and the edge of the flexible film The sensor assembly is protruded on the extension plane of the flexible film, and at least one edge of the flexible film can be bent and attached to the periphery of the sensor assembly.

15 . The detector according to claim 10 , wherein the sensor assembly comprises a sensor and a support layer, the sensor is attached to the second surface of the flexible film, and the support layer is attached to the second surface of the flexible film. 16 . The sensor is remote from the surface of the flexible membrane.

16 . The detector according to claim 15 , wherein the number of the sensors is plural, and the plural sensors are attached to the second surface of the flexible film in a tiled manner. 17 .

17 . The detector according to claim 16 , wherein there is a drop between two adjacent sensors, and a portion of the second surface of the flexible film corresponding to the drop is bent to adapt to the drop. 18 . deformation.

18 . The detector according to claim 16 , wherein the abutment surface of each sensor attached to the second surface of the flexible film is flush in the extending direction of the flexible film. 19 .

19 . The detector according to claim 10 , wherein the sensor assembly and the flexible film are bonded by an adhesive, and the light transmittance of the adhesive is 95%-99%. 20 .