CN112928597A - Semiconductor laser optical fiber coupling module - Google Patents
Semiconductor laser optical fiber coupling module Download PDFInfo
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- CN112928597A CN112928597A CN201911233180.7A CN201911233180A CN112928597A CN 112928597 A CN112928597 A CN 112928597A CN 201911233180 A CN201911233180 A CN 201911233180A CN 112928597 A CN112928597 A CN 112928597A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/005—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping
- H01S5/0071—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping for beam steering, e.g. using a mirror outside the cavity to change the beam direction
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
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- Condensed Matter Physics & Semiconductors (AREA)
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- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Optical Couplings Of Light Guides (AREA)
- Semiconductor Lasers (AREA)
Abstract
The invention discloses an optical fiber coupling module of a semiconductor laser, which comprises: a plurality of first semiconductor laser assemblies for emitting a first combined beam in a first direction; a plurality of second semiconductor laser assemblies for emitting a second combined beam parallel to the first combined beam in a first direction; the first light beam adjusting assembly is used for adjusting the direction of the first combined light beam to enable the adjusted first combined light beam and the second combined light beam to be subjected to slow axis beam combination to form a third combined light beam; the second light beam adjusting assembly is used for adjusting the emergent angle of the third combined light beam; and the optical fiber is used for receiving and outputting the adjusted third combined beam. The semiconductor laser fiber coupling module can make full use of the numerical aperture of the optical fiber, and improve the optical fiber coupling efficiency and the output power.
Description
Technical Field
The invention relates to the technical field of semiconductor lasers, in particular to an optical fiber coupling module of a semiconductor laser.
Background
The high-power semiconductor laser optical fiber coupling module is widely applied to the field of optical fiber laser pumping at present due to high electro-optic conversion efficiency, small size, high reliability and low price per watt. In order to obtain high-power and high-brightness optical fiber coupling output of a semiconductor laser, techniques such as spatial beam combining, polarization beam combining, and wavelength beam combining are generally used to realize coupling between a combined beam of multiple semiconductor lasers and an optical fiber. At present, the optical fiber coupling modules of semiconductor lasers are all formed by one-dimensional stacking of single-tube semiconductor lasers. The design makes the numerical aperture of the optical fiber not fully utilized, and reduces the coupling efficiency and output power of the optical fiber.
Disclosure of Invention
In view of this, embodiments of the present invention provide an optical fiber coupling module for a semiconductor laser, so as to solve the problem that the numerical aperture of an optical fiber is not fully utilized, and the coupling efficiency and the output power of the optical fiber are reduced.
The embodiment of the invention provides an optical fiber coupling module of a semiconductor laser, which comprises: a plurality of first semiconductor laser assemblies for emitting a first combined beam in a first direction; a plurality of second semiconductor laser assemblies for emitting a second combined beam parallel to the first combined beam in a first direction; the first light beam adjusting assembly is used for adjusting the direction of the first combined light beam to enable the adjusted first combined light beam and the second combined light beam to be subjected to slow axis beam combination to form a third combined light beam; the second light beam adjusting assembly is used for adjusting the emergent angle of the third combined light beam; and the optical fiber is used for receiving and outputting the adjusted third combined beam.
Optionally, the first beam adjustment assembly comprises: the first reflector is used for adjusting a first emergent angle of the first combined beam; and the second reflector is used for adjusting the emergent angle of the first combined beam after being adjusted by the first reflector and carrying out slow-axis beam combination with the second combined beam.
Optionally, the second beam adjustment assembly is a third mirror.
Optionally, each first semiconductor laser assembly comprises: a first light emitting unit for emitting a first initial light beam; the third light beam adjusting assembly is used for adjusting the fast axis divergence angle and/or the slow axis divergence angle of the first initial light beam emitted by the first light emitting unit and the emergent angle of the first initial light beam; the adjusted first initial light beams emitted by the first semiconductor laser assemblies form first combined light beams.
Optionally, the third beam adjustment assembly comprises: the first fast-axis collimating lens is used for reducing the fast-axis divergence angle of the first initial light beam emitted by the first light-emitting unit; and/or a first slow-axis collimating lens for reducing a slow-axis divergence angle of the first initial light beam emitted by the first light-emitting unit; and the fourth reflector is used for adjusting the emergent angle of the first initial light beam emitted by the first light-emitting unit.
Optionally, each second semiconductor laser assembly comprises: a second light emitting unit for emitting a second initial light beam; the fourth light beam adjusting component is used for adjusting the fast axis divergence angle and/or the slow axis divergence angle of the second initial light beam emitted by the second light emitting unit and the emergent angle of the second initial light beam; and the adjusted second initial light beams emitted by the second semiconductor laser assemblies form second combined light beams.
Optionally, the fourth beam adjustment assembly comprises: the second fast-axis collimating lens is used for reducing the fast-axis divergence angle of the second initial light beam emitted by the second light-emitting unit; and/or a second slow-axis collimating lens, the second fast axis for reducing the slow-axis divergence angle of the second initial light beam emitted by the second light-emitting unit; and the fifth reflector is used for adjusting the emergent angle of the second initial light beam emitted by the second light-emitting unit.
Optionally, the semiconductor laser fiber coupling module further includes: and the coupling mirror is arranged between the second beam adjusting assembly and the optical fiber and is used for focusing the third combined beam.
Optionally, the coupling mirror comprises: a single piece spherical lens, a single piece aspherical lens, or an orthogonal cylindrical lens.
Optionally, the semiconductor laser fiber coupling module further includes: and the volume Bragg grating is arranged between the second light beam adjusting assembly and the optical fiber and is used for transmitting part of the third combined light beam and reflecting the other part of the third combined light beam.
Optionally, the semiconductor laser fiber coupling module further includes: the side of the base opposite to the bottom surface is in a step shape; the plurality of first semiconductor laser assemblies are arranged in a first row and are respectively arranged on each step of the stepped shape of the base, the plurality of second semiconductor laser assemblies are arranged in a second row and are respectively arranged on each step of the stepped shape of the base, and the first semiconductor laser assemblies and the second semiconductor laser assemblies on each step of the stepped shape of the base are arranged in a staggered mode relatively and are the same in height.
According to the semiconductor laser optical fiber coupling module provided by the embodiment of the invention, the direction of the first combined beam is adjusted by arranging the first beam adjusting assembly, so that the adjusted first combined beam and the second combined beam are slowly combined to form the third combined beam, and thus, when the third combined beam passes through the optical fiber, the numerical aperture of the optical fiber can be fully utilized, and the optical fiber coupling efficiency and the output power are improved. And before the third combined beam enters the optical fiber, the second beam adjusting assembly is arranged to adjust the emergent angle of the third combined beam and deflect the angle of the third combined beam, so that the length of the semiconductor laser optical fiber coupling module in the emergent light direction of the first combined beam or the second combined beam can be reduced, the semiconductor laser optical fiber coupling module is more compact, and the volume and the weight of the semiconductor laser optical fiber coupling module are reduced.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
FIG. 1 is a schematic diagram showing a fiber coupling module of a semiconductor laser according to an embodiment of the present invention;
FIG. 2 shows a third combined beam spot in an embodiment of the invention;
FIG. 3 shows a prior art combined beam spot diagram;
fig. 4 shows a schematic structural diagram of another optical fiber coupling module of a semiconductor laser according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
This invention may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete and will fully convey the concept of the invention to those skilled in the art, and the present invention will only be defined by the appended claims. In the drawings, the size and relative sizes of layers and regions may be exaggerated for clarity.
An embodiment of the present invention provides an optical fiber coupling module of a semiconductor laser, as shown in fig. 1, including: a plurality of first semiconductor laser modules 1 for emitting a first combined beam in a first direction; a plurality of second semiconductor laser modules 2 for emitting second combined beams parallel to the first combined beam in a first direction; the first light beam adjusting component 3 is used for adjusting the direction of the first combined light beam to enable the adjusted first combined light beam and the second combined light beam to be subjected to slow axis beam combination to form a third combined light beam; the second light beam adjusting component 4 is used for adjusting the emergent angle of the third combined light beam; and the optical fiber 5 is used for receiving and outputting the adjusted third combined beam.
Specifically, each first semiconductor laser module 1 has the same height difference, and the first initial beams emitted by each first semiconductor laser module are stacked in the fast axis direction and spatially combined to obtain a first combined beam. The second semiconductor laser assemblies 2 have the same height difference, and second initial light beams emitted by the second semiconductor laser assemblies are stacked in the fast axis direction and are spatially combined to obtain a second combined light beam. The first combined beam and the second combined beam are parallel and have a certain interval. Because a certain interval exists between the first combined beam and the second combined beam, slow-axis beam combination cannot be directly carried out, the first beam adjusting assembly 3 is arranged, and after the first combined beam is subjected to direction adjustment for multiple times, the first combined beam can keep the original emergent direction and the distance between the first combined beam and the second combined beam is close enough. And stacking the first combined beam and the second combined beam in the slow axis direction, and performing spatial beam combination to obtain a third combined beam. As shown in fig. 2, the third combined beam formed by combining the first combined beam and the second combined beam in the slow axis direction is two parallel spots. However, most of the optical fiber coupling modules of the semiconductor lasers in the prior art only perform one-dimensional stacking on the light beam, as shown in fig. 3, a beam spot is formed. Obviously, the third combined beam formed by slow-axis combination of the first combined beam and the second combined beam in the embodiment of the invention has a wider range, so that the third combined beam is input into the optical fiber 5 after the exit angle of the third combined beam is adjusted by the second beam adjusting assembly 4, the numerical aperture of the optical fiber can be fully utilized, the optical fiber coupling efficiency is improved, and finally, the output power of optical fiber coupling can be improved by outputting through the optical fiber 5.
According to the semiconductor laser optical fiber coupling module provided by the embodiment of the invention, the direction of the first combined beam is adjusted by arranging the first beam adjusting assembly, so that the adjusted first combined beam and the second combined beam are slowly combined to form the third combined beam, and thus, when the third combined beam passes through the optical fiber, the numerical aperture of the optical fiber can be fully utilized, and the optical fiber coupling efficiency and the output power are improved. And before the third combined beam enters the optical fiber, the second beam adjusting assembly is arranged to adjust the emergent angle of the third combined beam and deflect the angle of the third combined beam, so that the length of the semiconductor laser optical fiber coupling module in the emergent light direction of the first combined beam or the second combined beam can be reduced, the semiconductor laser optical fiber coupling module is more compact, and the volume and the weight of the semiconductor laser optical fiber coupling module are reduced.
In an alternative embodiment, as shown in fig. 1, the first beam steering assembly 3 comprises: a first reflecting mirror 31 for adjusting a first exit angle of the first combined beam; and the second reflecting mirror 32 is used for adjusting the emergent angle of the first combined beam adjusted by the first reflecting mirror and carrying out slow-axis beam combination with the second combined beam. Specifically, although the first combined beam and the second combined beam are parallel, a certain distance exists, slow-axis combining cannot be directly performed, and the distance between the first combined beam and the second combined beam can be changed by arranging the first beam adjusting assembly 3, so that slow-axis combining of the first combined beam and the second combined beam is realized. The first light beam adjusting component can be two reflecting mirrors, the first reflecting mirror 31 is arranged in the light outgoing direction of the first combined light beam, the first combined light beam is firstly subjected to first angle deflection, then the second reflecting mirror 32 is arranged in the light outgoing direction of the first combined light beam after the deflection angle, the first combined light beam is further subjected to second angle deflection, the emergent angle of the first combined light beam after the second angle deflection is enabled to be the same as the emergent angle of the first combined light beam before the first angle deflection is not carried out, the distance between the first combined light beam and the second combined light beam is reduced, and slow axis beam combination is carried out.
In an alternative embodiment, the second beam steering assembly 4 may be a third mirror. The third combined beam may be reflected by the third reflecting mirror to change the emitting direction of the third combined beam, for example, to rotate 90 degrees, or may be rotated to other angles as needed, but not limited thereto. The present embodiment will be described with an example of 90 degrees rotation. The third combined beam is emitted after rotating by 90 degrees, so that the length of the semiconductor laser optical fiber coupling module in the emergent light direction of the first combined beam or the second combined beam can be reduced, the semiconductor laser optical fiber coupling module is more compact, and the volume and the weight of the semiconductor laser optical fiber coupling module are reduced.
In an alternative embodiment, each first semiconductor laser assembly 1 comprises: a first light emitting unit 11 for emitting a first primary light beam; the third light beam adjusting assembly 12 is configured to adjust a fast axis divergence angle and/or a slow axis divergence angle of the first initial light beam emitted by the first light emitting unit and an exit angle of the first initial light beam; the adjusted first initial light beams emitted by the first semiconductor laser assemblies form first combined light beams.
Specifically, the first light emitting unit 11 may be a single-tube semiconductor laser, and the third beam adjustment assembly 12 may include: a first fast axis collimating lens 121 for reducing a fast axis divergence angle of the first initial light beam emitted from the first light emitting unit; and/or a first slow-axis collimating lens 122 for reducing the slow-axis divergence of the first initial light beam emitted by the first light-emitting unit; and a fourth reflecting mirror 123 for adjusting the emitting angle of the first primary beam emitted by the first light emitting unit. The third beam adjustment assembly 12 may include a first fast axis collimator 121 and a reflector 123, a first slow axis collimator 122 and a fourth reflector 123, or a first fast axis collimator 121, a first slow axis collimator 122 and a fourth reflector 123. Preferably, the third beam steering assembly 12 includes a first fast axis collimator 121, a first slow axis collimator 122, and a fourth mirror 123. Each first initial light beam emitted by each first light reflecting unit 11 passes through each first fast axis collimating mirror 121 and each first slow axis collimating mirror 122, and after being collimated by the fast axis and the slow axis, the first initial light beams are respectively reflected by the corresponding fourth reflecting mirror 123, stacked in the fast axis direction, and spatially combined to form a first combined light beam.
In an alternative embodiment, each second semiconductor laser assembly 2 comprises: a second light emitting unit 21 for emitting a second primary light beam; the fourth light beam adjusting component is used for adjusting the fast axis divergence angle and/or the slow axis divergence angle of the second initial light beam emitted by the second light emitting unit and the emergent angle of the second initial light beam; and the adjusted second initial light beams emitted by the second semiconductor laser assemblies form second combined light beams.
Specifically, the second light emitting unit 21 may be a single-tube semiconductor laser, and the fourth beam adjustment assembly may include: a second fast-axis collimating lens 221 for reducing a fast-axis divergence angle of the second initial light beam emitted from the second light emitting unit; and/or a second slow-axis collimating lens 222, the second fast axis for reducing the slow-axis divergence of the second initial light beam emitted by the second light-emitting unit; and a fifth reflecting mirror 223 for adjusting the emitting angle of the second primary light beam emitted from the second light emitting unit. The fourth beam adjustment assembly may include the second fast axis collimator 221 and the fifth reflector 223, may also include the second slow axis collimator 222 and the fifth reflector 223, and may also include the second fast axis collimator 221, the second slow axis collimator 222 and the fifth reflector 223. Preferably, the fourth beam steering assembly includes a second fast axis collimator mirror 221, a second slow axis collimator mirror 222, and a fifth mirror 123. Each second initial light beam emitted by each second light reflecting unit 21 passes through each second fast axis collimating mirror 221 and second slow axis collimating mirror 222, and after being collimated by the fast axis and the slow axis, the second initial light beams are respectively reflected by the corresponding fifth reflecting mirror 223, stacked in the fast axis direction, and spatially combined to form a second combined light beam.
In an alternative embodiment, as shown in fig. 1, the semiconductor laser fiber coupling module further includes: and the coupling mirror 6 is arranged between the second beam adjusting assembly 4 and the optical fiber 5 and is used for focusing the third combined beam. Specifically, the coupling mirror includes: a single piece spherical lens, a single piece aspherical lens, or an orthogonal cylindrical lens.
In an optional embodiment, the semiconductor laser fiber coupling module further includes: and the volume Bragg grating 7 is arranged between the second light beam adjusting component 4 and the optical fiber 5 and is used for transmitting part of the third combined light beam and reflecting the other part of the third combined light beam. Specifically, the volume bragg grating 7 is arranged between the second light beam adjusting component 4 and the coupling mirror 6, the volume bragg grating 7 is inserted into any position of a light path before the coupling mirror 6 focuses on the second light beam adjusting component 4, a part of the third combined light beam can be transmitted, the other part of the third combined light beam is reflected, external cavity feedback is formed, the original path of the part of the third combined light beam returns to each first semiconductor laser component and each second semiconductor laser component, the external cavity feedback wavelength locking function of each first light emitting unit 11 and each second light emitting unit 21 is realized, the spectrum width is compressed, the wavelength width of the light beam finally output by the semiconductor laser fiber coupling module is ensured to be narrow, and the output performance of the semiconductor laser fiber coupling module can be optimized.
In an alternative embodiment, as shown in fig. 4, the semiconductor laser fiber coupling module further includes: a base 8, wherein one side of the base 8 opposite to the bottom surface is in a ladder shape; the plurality of first semiconductor laser assemblies 1 are arranged on each step of the stepped shape of the base 8 in a first row, the plurality of second semiconductor laser assemblies 2 are arranged on each step of the stepped shape of the base 8 in a second row, and the first semiconductor laser assemblies 1 and the second semiconductor laser assemblies 2 on each step of the stepped shape of the base 8 are arranged in a staggered mode relatively and are the same in height. Specifically, the first semiconductor laser component 1 and the second semiconductor laser component 2 on each step of the stepped base 8 have the same height, and the two optical paths are staggered with each other, so that the residual space between the optical paths is effectively utilized, a group of optical paths can be additionally arranged under the condition that the volumes of the group of optical paths are the same, the optical path volume of the optical fiber coupling module of the semiconductor laser is reduced, and the optical fiber coupling module of the semiconductor laser has a compact structure, a reduced volume and a reduced weight; meanwhile, the first laser assembly 1 and the second laser assembly 2 are ensured to have larger intervals, and good thermal stability is achieved. The method is favorable for the application of the semiconductor laser fiber coupling module in the application environment with definite requirements on quality, volume, stability and high brightness.
Although the embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art may make various modifications and variations without departing from the spirit and scope of the invention, and such modifications and variations fall within the scope defined by the appended claims.
Claims (11)
1. A fiber coupling module for a semiconductor laser, comprising:
a plurality of first semiconductor laser assemblies for emitting a first combined beam in a first direction;
a plurality of second semiconductor laser assemblies for emitting a second combined beam parallel to the first combined beam in the first direction;
the first light beam adjusting assembly is used for adjusting the direction of the first combined light beam to enable the adjusted first combined light beam and the second combined light beam to be subjected to slow axis beam combination to form a third combined light beam;
the second light beam adjusting assembly is used for adjusting the emergent angle of the third combined light beam;
and the optical fiber is used for receiving and outputting the adjusted third combined beam.
2. A semiconductor laser fiber coupling module as claimed in claim 1 wherein the first beam conditioning assembly comprises:
the first reflector is used for adjusting a first emergent angle of the first combined beam;
and the second reflector is used for adjusting the emergent angle of the first combined beam after being adjusted by the first reflector and carrying out slow-axis beam combination with the second combined beam.
3. The semiconductor laser fiber coupling module of claim 1,
the second light beam adjusting component is a third reflector.
4. A semiconductor laser fiber coupling module as claimed in claim 1 wherein each of the first semiconductor laser assemblies comprises:
a first light emitting unit for emitting a first initial light beam;
the third light beam adjusting assembly is used for adjusting the fast axis divergence angle and/or the slow axis divergence angle of the first initial light beam emitted by the first light emitting unit and the emergent angle of the first initial light beam;
and the adjusted first initial light beam emitted by each first semiconductor laser component forms the first combined light beam.
5. A semiconductor laser fiber coupling module as defined in claim 4, wherein the third beam conditioning assembly comprises:
a first fast axis collimating lens for reducing a fast axis divergence angle of the first initial light beam emitted by the first light emitting unit; and/or
A first slow-axis collimating lens for reducing a slow-axis divergence angle of the first initial light beam emitted by the first light-emitting unit; and
and the fourth reflector is used for adjusting the emergent angle of the first initial light beam emitted by the first light-emitting unit.
6. A semiconductor laser fiber coupling module as defined in claim 1, wherein each of the second semiconductor laser assemblies comprises:
a second light emitting unit for emitting a second initial light beam;
the fourth light beam adjusting component is used for adjusting the fast axis divergence angle and/or the slow axis divergence angle of the second initial light beam emitted by the second light emitting unit and the emergent angle of the second initial light beam;
and the adjusted second initial light beams emitted by the second semiconductor laser assemblies form second combined light beams.
7. A semiconductor laser fiber coupling module as defined in claim 6, wherein the fourth beam conditioning assembly comprises:
a second fast axis collimating lens for reducing a fast axis divergence angle of the second initial light beam emitted by the second light emitting unit; and/or
A second slow-axis collimating lens, the second fast axis for reducing the slow-axis divergence angle of the second initial light beam emitted by the second light-emitting unit; and
and the fifth reflector is used for adjusting the emergent angle of the second initial light beam emitted by the second light-emitting unit.
8. A semiconductor laser fiber coupling module according to claim 1, further comprising:
and the coupling mirror is arranged between the second light beam adjusting assembly and the optical fiber and is used for focusing the third combined light beam.
9. A semiconductor laser fiber coupling module as defined in claim 8, wherein the coupling mirror comprises:
a single piece spherical lens, a single piece aspherical lens, or an orthogonal cylindrical lens.
10. A semiconductor laser fiber coupling module according to claim 1, further comprising:
and the volume Bragg grating is arranged between the second light beam adjusting assembly and the optical fiber and is used for transmitting part of the third combined light beam and reflecting the other part of the third combined light beam.
11. A semiconductor laser fiber coupling module according to claim 1, further comprising:
the side of the base opposite to the bottom surface is in a step shape;
the plurality of first semiconductor laser assemblies are arranged in a first row and are respectively arranged on each step of the stepped base, the plurality of second semiconductor laser assemblies are arranged in a second row and are respectively arranged on each step of the stepped base, and the first semiconductor laser assemblies and the second semiconductor laser assemblies on each step of the stepped base are staggered relatively and are the same in height.
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113794108A (en) * | 2021-08-04 | 2021-12-14 | 大族激光科技产业集团股份有限公司 | Optical fiber coupling semiconductor laser |
| CN114006269A (en) * | 2021-12-29 | 2022-02-01 | 深圳市星汉激光科技股份有限公司 | Direct output system of high-power semiconductor laser and polarization beam combining structure thereof |
| CN114465088A (en) * | 2022-04-13 | 2022-05-10 | 苏州长光华芯光电技术股份有限公司 | Wavelength locking system |
| CN115097643A (en) * | 2022-06-01 | 2022-09-23 | 牛牛帮(杭州)激光有限公司 | Laser coupling device and semiconductor laser system |
| CN115882340A (en) * | 2022-11-14 | 2023-03-31 | 深圳活力激光技术有限公司 | Semiconductor laser device |
| CN119093157A (en) * | 2024-11-04 | 2024-12-06 | 丰睿成科技(深圳)股份有限公司 | Two-in-one multifunctional laser module and mounting assembly |
| WO2025002336A1 (en) * | 2023-06-30 | 2025-01-02 | 深圳市创客工场科技有限公司 | Laser module, laser processing apparatus, and laser processing device |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113794108A (en) * | 2021-08-04 | 2021-12-14 | 大族激光科技产业集团股份有限公司 | Optical fiber coupling semiconductor laser |
| CN114006269A (en) * | 2021-12-29 | 2022-02-01 | 深圳市星汉激光科技股份有限公司 | Direct output system of high-power semiconductor laser and polarization beam combining structure thereof |
| CN114465088A (en) * | 2022-04-13 | 2022-05-10 | 苏州长光华芯光电技术股份有限公司 | Wavelength locking system |
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| CN115882340A (en) * | 2022-11-14 | 2023-03-31 | 深圳活力激光技术有限公司 | Semiconductor laser device |
| WO2025002336A1 (en) * | 2023-06-30 | 2025-01-02 | 深圳市创客工场科技有限公司 | Laser module, laser processing apparatus, and laser processing device |
| CN119093157A (en) * | 2024-11-04 | 2024-12-06 | 丰睿成科技(深圳)股份有限公司 | Two-in-one multifunctional laser module and mounting assembly |
| CN119093157B (en) * | 2024-11-04 | 2025-01-10 | 丰睿成科技(深圳)股份有限公司 | Two-in-one multifunctional laser module and mounting assembly |
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Application publication date: 20210608 |