CN112808332A - Bulk acoustic wave driven micro-fluid generator with concentration gradient adjustable in real time - Google Patents
Bulk acoustic wave driven micro-fluid generator with concentration gradient adjustable in real time Download PDFInfo
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- CN112808332A CN112808332A CN202011564392.6A CN202011564392A CN112808332A CN 112808332 A CN112808332 A CN 112808332A CN 202011564392 A CN202011564392 A CN 202011564392A CN 112808332 A CN112808332 A CN 112808332A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502769—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/08—Geometry, shape and general structure
- B01L2300/0861—Configuration of multiple channels and/or chambers in a single devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/08—Geometry, shape and general structure
- B01L2300/0861—Configuration of multiple channels and/or chambers in a single devices
- B01L2300/0867—Multiple inlets and one sample wells, e.g. mixing, dilution
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/12—Specific details about materials
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2400/00—Moving or stopping fluids
- B01L2400/04—Moving fluids with specific forces or mechanical means
- B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
- B01L2400/0433—Moving fluids with specific forces or mechanical means specific forces vibrational forces
- B01L2400/0439—Moving fluids with specific forces or mechanical means specific forces vibrational forces ultrasonic vibrations, vibrating piezo elements
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- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Dispersion Chemistry (AREA)
- Analytical Chemistry (AREA)
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Abstract
The invention relates to a microfluid generator driven by bulk acoustic waves and capable of adjusting concentration gradient in real time. The generator can enable a gas-liquid interface generated by a gas-liquid interface channel to be far away from or close to a main channel by changing the gas pressure difference at two ends of a PDMS wall based on the gas permeability of PDMS. The concentration gradient of the solution in the main channel can be adjusted in real time by changing the position of the gas-liquid interface excited by the sound wave. The concentration gradient generator consists of a glass substrate, a PDMS chip and a piezoelectric vibrator. When the gas-liquid interface is excited by sound waves, the solution nearby the gas-liquid interface generates a sound flow phenomenon, and then the solution is mixed. The real-time adjustable solution concentration gradient can be generated by adjusting the number, the position and the driving voltage of the gas-liquid interfaces for mixing the solution in the flow channel. The new device is easy to manufacture, sensitive in response, biocompatible, wide in application prospect and suitable for biochemical research with high requirements on time controllability.
Description
Technical Field
The invention relates to a generator for adjusting the concentration gradient of a solution in a micro-channel in real time by adjusting the position of a gas-liquid interface under the excitation of bulk acoustic waves, belonging to the micro-fluidic field of biological and chemical analysis.
Background
Currently, the concentration gradient generator driven by sound wave adjusts the concentration gradient of the solution in the flow channel in real time mainly through the process of switching off and on the power supply. In 2013, a focus-type active concentration gradient generator driven by surface acoustic wave is developed by Korean scientific and technical institute, and high-frequency acoustic waves are generated on the surface of a substrate under the drive of alternating current. The sound wave makes the fluid in the micro flow channel generate chaotic sound flow phenomenon and drives the solution to mix, thereby forming solution concentration gradient in the flow channel. In 2013, a novel active concentration gradient generator driven by bulk acoustic waves was developed at pennsylvania state university, a gas-liquid interface is generated in a horseshoe-shaped structure in a main channel and is arranged according to steps, and the gas-liquid interface is driven by the sound waves to vibrate so that surrounding solutions are mixed and then a concentration gradient is generated in the main channel. In 2015, pennsylvania state university also proposed a gradient generator with symmetrical step-shaped arrangement of sharp structures in the flow channel. The sharp structure is vibrated by the excitation of bulk acoustic waves, and the solution around the sharp end is mixed due to the acoustic flow phenomenon, so that the concentration gradient is generated. The concentration gradient generator driven by sound wave has the advantages of simple structure, convenient operation, good biocompatibility and the like, but the concentration gradient generator researched at present can only change the concentration gradient of the solution in the main channel along with time by switching off and on a power supply. The disadvantages of this approach are represented by: the position of a gas-liquid interface or a tip structure, which is a driving source for mixing the solution, cannot be changed, so that the mixing condition of the solution at any position in the flow channel cannot be adjusted. Secondly, the concentration gradient of the solution which is generated by switching on and off the power supply and changes along with the time can not keep the concentration gradient of a certain state stable.
Disclosure of Invention
The invention mainly aims to overcome the defects that the traditional sound wave driven gradient generator can not control the mixing of solutions at any position and can not maintain a certain concentration gradient and the like, and provides a method for controlling the mixing of the solutions at any position by adjusting the pressure difference between two ends of a PDMS wall. The working principle is as follows: when the piezoelectric vibrator is connected with a power supply, bulk acoustic waves can be generated, and when the frequency of the bulk acoustic waves reaches the resonant frequency value of the gas-liquid interface, the gas-liquid interface generates violent oscillation to enable the surrounding solution to generate vortex, so that the solution is mixed. The gas-liquid interface position in one or more gas-liquid interface channels is changed, so that the gas-liquid interface is controlled to participate in mixing, and the concentration gradient of the solution in the main channel is changed. In order to maintain the concentration gradient of certain main channel solution, the gas-liquid interface is only required to be static and kept in the state.
The working mechanism is that the gas-liquid interface in the gas-liquid interface channel is excited by bulk acoustic waves to vibrate, and the vibrating gas-liquid interface can enable the surrounding solution to generate acoustic flow, so that the solution is driven to be mixed. Because the gas-liquid interface is arranged in the main channel in a 'pin' shape, the solution around the gas-liquid interface can generate concentration gradient after being mixed. Based on the gas permeability of PDMS (polydimethylsiloxane), the gas-liquid interface generated by the gas-liquid interface channel can be far away from or close to the main channel by changing the gas pressure difference at two ends of the PDMS wall. The real-time adjustable solution concentration gradient can be generated by adjusting the number, the position and the driving voltage of the gas-liquid interfaces for mixing the solution in the flow channel. The concentration gradient generator can analyze migration, growth, chemotaxis and differentiation of cells under dynamic chemical gradient, and can also be applied to screening and toxicity detection of drugs based on activity and behavior of cells under dynamic gradient environment.
The generator adjusts the concentration in real time by controlling the position of a sound vibration gas-liquid interface, and comprises a PDMS chip 1, a piezoelectric vibrator 17 and a glass substrate I18; the PDMS chip 1 is provided with a liquid inlet I2, a liquid inlet II 13, a liquid inlet channel I3, a liquid inlet channel II 12, a gas-liquid interface channel I4, a gas channel I5, a gas channel port I6, a gas channel port II 9, a gas channel II 10, a gas-liquid interface channel II 11, a gas channel port III 14, a gas channel III 15, a gas-liquid interface channel III 16, a main flow channel 7 and a liquid outlet 8;
the liquid inlet I2, the liquid inlet II 13, the liquid outlet 8, the gas channel port I6, the gas channel port II 9 and the gas channel port III 14 penetrate through the PDMS chip 1;
the liquid inlet channel I3, the liquid inlet channel II 12, the gas-liquid interface channel I4, the gas channel I5, the main flow channel 7, the gas channel II 10, the gas-liquid interface channel II 11, the gas channel III 15 and the gas-liquid interface channel III 16 are the same in depth and are 100-200 microns;
the width of the liquid inlet channel I3 and the width of the liquid inlet channel II 12 are 200-400 mu m, the length of the liquid inlet channel I3 and the length of the liquid inlet channel II 12 are 2-15 mm, wherein one end of the liquid inlet channel I3 is connected with the liquid inlet I2, and the other end of the liquid inlet channel I3 is communicated with the main channel 7. One end of the liquid inlet channel II 12 is connected with the liquid inlet II 13, and the other end is connected with the main channel 7;
the width of the main channel 7 is 400-800 microns, one end of the main channel is communicated with the liquid outlet 8, and the other end of the main channel is respectively connected with the gas-liquid interface channel I4, the gas-liquid interface channel II 11, the gas-liquid interface channel III 16, the liquid inlet channel I3 and the liquid inlet channel II 12;
one end of the gas-liquid interface channel I4 is communicated with the main channel 7, and the other end of the gas-liquid interface channel I4 is connected with the gas channel I5 through a PDMS wall; the outline of the PDMS wall is composed of an outer semicircle at the lower side of the gas channel I5 and an outer semicircle at the upper side of the gas-liquid interface channel I4, and the outline of the PDMS wall structure is the same as that of the PDMS wall structure.
One end of the gas channel I5 is connected with the gas-liquid interface channel I4 through a PDMS wall, and the other end of the gas channel I5 is communicated with the gas channel port I6;
one end of the gas-liquid interface channel II 11 is communicated with the main channel 7, and the other end of the gas-liquid interface channel II 11 is connected with the gas channel II 10 through a PDMS wall;
one end of the gas channel II 10 is connected with the gas-liquid interface channel II 11 through a PDMS wall, and the other end of the gas channel II is communicated with a gas channel port II 9;
one end of the gas-liquid interface channel III 16 is communicated with the main channel 7, and the other end of the gas-liquid interface channel III is connected with the gas channel III 15 through a PDMS wall;
one end of the gas channel III 15 is connected with the gas-liquid interface channel III 16 through a PDMS wall, and the other end of the gas channel III is communicated with a gas channel port III 14;
the piezoelectric vibrator 17 is adhered to the upper surface of the glass substrate 18 and is adjacent to the PDMS chip 1.
The method for applying the device of the invention comprises the following steps:
(a) as shown in fig. 6, a target solution 19 and a buffer solution 20 are respectively introduced into a liquid inlet I2 and a liquid inlet II 13, and respectively flow into a main channel 7 through a liquid inlet channel I3 and a liquid inlet channel II 12, a gas-liquid interface I30 is formed at the intersection of the main channel 7 and a gas-liquid interface channel I4, a gas-liquid interface II 31 is formed at the intersection of the main channel 7 and a gas-liquid interface channel II 11, and a gas-liquid interface III 32 is formed at the intersection of the main channel 7 and a gas-liquid interface channel III 16;
(b) as shown in fig. 7, when an alternating voltage is applied to the piezoelectric vibrator, the piezoelectric vibrator 17 vibrates due to the piezoelectric effect, thereby generating a sound wave. When sound waves are transmitted to the gas-liquid interface I30, the gas-liquid interface II 31 and the gas-liquid interface III 32, radial vibration is generated on the gas-liquid interface, and meanwhile, solution around the gas-liquid interface can be caused to generate vortex, so that local fluid is mixed. At the moment, three gas-liquid interfaces are simultaneously mixed with the solution of the main channel, and the solution of the high-concentration layer 21, the solution of the medium-concentration layer 22 and the solution of the low-concentration layer 23 are sequentially obtained from the upper part to the lower part of the main channel 7;
(c) referring to fig. 8, the gas channel port ii 9 is connected to a negative pressure source, and the pressure of the gas channel ii 10 is lower than that of the gas-liquid interface channel ii 11. Because the PDMS connecting the two channels has good gas permeability (the permeability coefficient is 200-700Barrers), the gas can permeate from the gas-liquid interface channel II 11 to the gas channel II 10, and the gas-liquid interface II 31 is far away from the main channel 7 along the gas-liquid interface channel II 10. When the gas-liquid interface II 31 moves to 750 mu m away from the main channel, the gas channel port II 9 is communicated with the atmosphere, the pressure of the gas channel II 10 is equal to that of the gas-liquid interface channel II 11, and the gas-liquid interface II 31 stops moving and is stabilized at the position. Applying alternating voltage on the piezoelectric vibrator 17, wherein only the gas-liquid interface I30 and the gas-liquid interface III 32 can mix the solution of the main channel, and then sequentially obtaining a high-concentration layer solution 21, a medium-concentration layer solution 22 and a buffer solution 20 from top to bottom in the main channel 7;
(d) referring to fig. 9, the gas channel port ii 9 and the gas channel port i 6 are connected to a negative pressure source, the pressure of the gas channel ii 10 is lower than the pressure of the gas-liquid interface channel ii 11, and the pressure of the gas channel i 5 is lower than the pressure of the gas-liquid interface channel i 4. Based on the permeability of PDMS, gas can permeate gas channel II 10 from gas-liquid interface passageway II 11, and gas-liquid interface II 31 also can be kept away from main entrance 7 along gas-liquid interface passageway II 11, and gas can permeate gas channel I5 from gas-liquid interface passageway I4 simultaneously, and gas-liquid interface I30 also can be kept away from main entrance 7 along gas-liquid interface passageway I4. When the gas-liquid interface II 31 and the gas-liquid interface I30 both move to 750 mu m from the main channel, the atmospheric pressure is communicated with the gas channel port II 9 and the gas channel port I6, at the moment, the pressure of the gas channel II 10 is equal to the pressure of the gas-liquid interface channel II 11, the pressure of the gas channel I5 is equal to the pressure of the gas-liquid interface channel I4, and the gas-liquid interface II 31 and the gas-liquid interface I30 both stop moving and are stabilized at the positions. Applying alternating voltage to the piezoelectric vibrator 17, and only mixing the main channel solution with the gas-liquid interface III 32 to obtain a target solution 19, a medium-concentration layer solution 22 and a buffer solution 20 in the main channel 7 from top to bottom in sequence;
(e) as shown in the attached figure 10, a negative pressure source is communicated with a gas channel port I6, and the pressure of a gas channel I5 is lower than that of a gas-liquid interface channel I4. Based on the permeability of PDMS, gas can permeate to gas channel I5 from gas-liquid interface passageway I4, and gas-liquid interface I30 also can be along gas-liquid interface passageway I4 keeping away from main passageway 7. When the gas-liquid interface I30 moves to 750 mu m away from the main channel, the atmospheric pressure is communicated with the gas channel port I6, the pressure of the gas channel I5 is equal to that of the gas-liquid interface channel I4, and the gas-liquid interface I30 stops moving and is stabilized at the position. An alternating voltage is applied to the piezoelectric vibrator 17, and only the gas-liquid interface III 32 and the gas-liquid interface II 31 can mix the solution of the main channel, so that the target solution 19, the solution 22 of the medium concentration layer and the solution 23 of the low concentration layer are sequentially obtained from top to bottom in the main channel 7.
The invention is mainly characterized in that: 1) the scheme is easy to manufacture and integrate, sensitive in response and good in biocompatibility; 2) the invention can make the concentration gradient of the solution change steadily with time by moving the gas-liquid interface, and can control the size of the gas-liquid interface and the position of the gas-liquid interface; 3) the invention can keep any concentration gradient generated in the change process of the gas-liquid interface position for a period of time by controlling the movement process of the gas-liquid interface; 4) the invention can control the solution mixing at one specific side of the main channel, thereby completing the local adjustment of the solution concentration gradient; 5) can be widely applied to the fields of cell analysis, drug screening and the like, and meets the application requirements of biochemical detection and the like at present.
Drawings
FIG. 1: the appearance view of the concentration gradient generator of the invention;
FIG. 2: the concentration gradient generator of the invention has a first cross section (the cross section is a vertical plane where the circle center connecting straight line of the liquid outlet 8 and the gas channel port III 14 is located);
FIG. 3: the concentration gradient generator of the invention has a second cross section (the cross section is a vertical plane where the circle center connecting straight line of the gas channel port I6 and the gas channel port II 9 is located);
FIG. 4: the section of the concentration gradient generator of the invention is III (the section is a horizontal plane passing through all flow channels of the PDMS chip);
FIG. 5: the invention relates to a micro-channel structure diagram of a cavity layer of a concentration gradient generator;
FIG. 6: the working principle of the concentration gradient generator is shown as a schematic diagram I;
FIG. 7: the working principle of the concentration gradient generator is shown as a schematic diagram II;
FIG. 8: the working principle of the concentration gradient generator is shown schematically in the third diagram;
FIG. 9: the working principle of the concentration gradient generator is schematically shown in the fourth;
FIG. 10: the working principle of the concentration gradient generator is schematically shown as five;
FIG. 11: the invention relates to a first manufacturing process diagram of a concentration gradient generator;
FIG. 12: the invention relates to a process diagram II for manufacturing a concentration gradient generator;
FIG. 13: the invention relates to a manufacturing process diagram III of a concentration gradient generator;
FIG. 14: the invention relates to a manufacturing process diagram of a concentration gradient generator;
FIG. 15: the invention relates to a manufacturing process diagram of a concentration gradient generator;
FIG. 16: the invention relates to a manufacturing process diagram of a concentration gradient generator;
in the figure: the device comprises a PDMS chip, 2 liquid inlet I, 3 liquid inlet channels I, 4 gas-liquid interface channels I, 5 gas channels I, 6 gas channel ports I, 7 main flow channels, 8 liquid outlet ports, 9 gas channel ports II, 10 gas channels II, 11 gas-liquid interface channels II, 12 liquid inlet channels II, 13 liquid inlet ports II, 14 gas channel ports III, 15 gas channels III, 16 gas-liquid interface channels III, 17 piezoelectric vibrators, 18 glass substrates I, 19 target solutions, 20 buffer solutions, 21 high-concentration layer solutions, 22 medium-concentration layer solutions, 23 low-concentration layer solutions, 24 glass substrates II, 25 SU-8 negative gels, 26 mask plates, 27 SU-8 gel male molds, 28 rectangular groove molds, 29 PDMS, 30 gas-liquid interfaces I, 31 gas-liquid interfaces II, 32 gas-liquid interfaces.
Detailed Description
The principles and features of this invention are described below in conjunction with the following drawings, which are set forth by way of illustration only and are not intended to limit the scope of the invention.
The PDMS chip 1 of the invention adopts SU-8 type negative photoresist to make a male mold, and adopts Polydimethylsiloxane (PDMS) injection molding process to manufacture, and the specific process flow is as follows:
(a) FIG. 11 shows that a glass substrate II 24 is selected as a glass slide, washed with deionized water, and dried on a glue drying table at 120 ℃;
(b) FIG. 12 shows that a layer of SU-8 glue 25 is spin-coated on a glass substrate II 24, the thickness of the glue layer is 100-200 μm, prebaking is carried out by using a glue drying table, the temperature is firstly dried at 65 ℃ for 35min, then at 95 ℃ for 30-90min (the drying time is longer when the thickness is larger, which is related to the thickness of the glue layer), and then natural cooling is carried out to solidify the SU-8 glue 25, wherein the SU-8 glue 25 is a negative photoresist;
(c) in the attached figure 13, a mask plate 26 is placed above the surface of the cured SU-8 glue 25, and ultraviolet exposure is carried out for 2-6 min;
(d) in the attached figure 14, after exposure of SU-8 glue 25, post-baking heat treatment is carried out on a glue baking table, the glue is baked at the temperature of 65 ℃ for 25min and then at the temperature of 95 ℃ for 10-30min (the baking time is longer when the thickness is larger, which is related to the thickness of a glue layer), then the glue is naturally cooled, and after ultrasonic development and cleaning, a convex structure left on a glass substrate II 24 is an SU-8 glue male mold 27;
(e) FIG. 15 shows that the glass substrate II 24 with the SU-8 glue male mold 27 is placed in a rectangular groove mold 28 with the same size as the glass substrate II 24, PDMS 29 is poured, and heating and curing are carried out at 120 ℃;
(f) FIG. 16 shows that the cured PDMS 29 is peeled off from the glass substrate II 24, and a liquid inlet I2, a liquid inlet II 13, a liquid outlet 8, a gas channel port I6, a gas channel port II 9 and a gas channel port III 14 are processed by a method of punching with a puncher, so as to obtain a PDMS chip 1;
the packaging process of the invention is as follows:
(a) carrying out oxygen plasma treatment on the bonding surface of the PDMS chip 1 and the upper surface of the glass substrate I18, then mutually attaching and pressing the bonding surfaces of the microfluidic upper chip 1 and the glass substrate I18, and then heating the bonding surfaces on a glue drying table at 65 ℃ for 15-30min to complete bonding of the microfluidic upper chip 1 and the glass substrate I18;
(b) the piezoelectric vibrator 17 is adhered to the upper surface of the glass substrate I18, and the generator for adjusting the concentration in real time by controlling the position of a sound vibration gas-liquid interface is manufactured.
Claims (2)
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| CN202011564392.6A CN112808332A (en) | 2020-12-26 | 2020-12-26 | Bulk acoustic wave driven micro-fluid generator with concentration gradient adjustable in real time |
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| US20140146634A1 (en) * | 2012-11-27 | 2014-05-29 | The Penn State Research Foundation | Spatiotemporal control of chemical microenvironment using oscillating microstructures |
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| US20150017023A1 (en) * | 2013-07-11 | 2015-01-15 | The Penn State Research Foundation | Apparatuses and methods for modulating fluids using acoustically oscillating solid structures |
| CN107583696A (en) * | 2017-09-19 | 2018-01-16 | 北京工业大学 | A kind of particle capture and release device based on bulk acoustic wave excitation and moving bubble |
| CN107824105A (en) * | 2017-09-27 | 2018-03-23 | 北京工业大学 | A kind of micro-mixer of the adjustable solution concentration gradient based on moving bubble |
| CN110860321A (en) * | 2019-12-11 | 2020-03-06 | 河北工业大学 | A controllable micro-scale bubble chip and acoustofluidic particle separation method and system |
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- 2020-12-26 CN CN202011564392.6A patent/CN112808332A/en active Pending
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| US20140146634A1 (en) * | 2012-11-27 | 2014-05-29 | The Penn State Research Foundation | Spatiotemporal control of chemical microenvironment using oscillating microstructures |
| WO2014154501A1 (en) * | 2013-03-25 | 2014-10-02 | Thermo Electron Manufacturing Limited | Apparatus and method for mixing a liquid sample to be introduced in an analysis device |
| US20150017023A1 (en) * | 2013-07-11 | 2015-01-15 | The Penn State Research Foundation | Apparatuses and methods for modulating fluids using acoustically oscillating solid structures |
| CN107583696A (en) * | 2017-09-19 | 2018-01-16 | 北京工业大学 | A kind of particle capture and release device based on bulk acoustic wave excitation and moving bubble |
| CN107824105A (en) * | 2017-09-27 | 2018-03-23 | 北京工业大学 | A kind of micro-mixer of the adjustable solution concentration gradient based on moving bubble |
| CN110860321A (en) * | 2019-12-11 | 2020-03-06 | 河北工业大学 | A controllable micro-scale bubble chip and acoustofluidic particle separation method and system |
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