CN106345543B - A kind of microring array chip of the charge inducing electric osmose based on fixed potential - Google Patents

Abstract

A kind of microring array chip of the charge inducing electric osmose based on fixed potential, is related to microring array chip field, solves the problems, such as the existing microring array chip manufacture complex steps based on charge inducing electric osmose, is difficult to operate.Setting is membrane electrode there are four exciting electrode and two suspension electrodes, the electrode in substrate of glass.The microchannel of chip is formed positioned at the first flow of PDMS cover plates lower surface, second flow channel, third flow channel and mixing runner.Substrate of glass and PDMS cover plate sealed sets, mixing runner both sides are bonded respectively with one end of first, second exciting electrode and third, one end of the 4th exciting electrode, first exciting electrode is opposite with the end of the 4th exciting electrode, and one end of the first suspension electrode is arranged on the centre position of the two；Second exciting electrode is opposite with the end of third exciting electrode, and one end of the second suspension electrode is arranged on the centre position of the two.Potential difference between two opposite exciting electrodes is equal.The present invention is suitable for the mixing of microfluid.

Description

A micro-hybrid chip based on fixed potential-induced charge electroosmosis

technical field

The invention relates to the field of micro-mixing chips, in particular to a micro-mixing chip based on fixed potential induction charge electroosmosis.

Background technique

Microfluidic Chip (Micro fluidic Chip), also known as Lab-on-A-Chip, refers to the integration of basic operating units such as sample preparation, reaction, separation and detection involved in the fields of biology and chemistry. Or basically integrated on a chip of a few square centimeters (or even smaller), the network is formed by microchannels, and the analysis process is automatically completed. promising research areas.

In the field of microfluidic chip technology, how to precisely control microfluidics has always been a hot topic for scholars to study. Traditional macroscopic fluids can be mixed by convection, while fluids in microchannels mainly rely on diffusion to achieve mixing due to their low Reynolds numbers. Therefore, in microsystems, external energy or components are indispensable in order to achieve efficient mixing of fluids in microchannels.

Existing micro-hybrid chips are divided into active micro-hybrid chips and passive micro-hybrid chips. Passive micro-mixing chips mainly rely on complex internal structure design or channel surface treatment to achieve fluid mixing in micro-channels. Active micro-mixing chips mainly rely on external energy such as acoustic field, magnetic field or electric field to realize the mixing of fluids in microchannels. Among them, micro-hybrid chips relying on electric fields are more widely used. The electrically driven micro-hybrid chip has the advantages of simple structure, no need for external components, and easy assembly.

Existing electrically driven micro-hybrid chips are mainly based on the principle of induced charge electroosmosis, by setting multiple three-dimensional complex conductor obstacles in the microchannel to generate induced charge electroosmosis, thereby promoting the mixing of fluids in the microchannel. Although this type of micro-hybrid chip has excellent mixing capability, the processing steps of this type of hybrid chip are cumbersome and difficult to operate due to the need to arrange three-dimensional and complex conductor obstacles in the microchannel.

Contents of the invention

In order to solve the problems of cumbersome processing steps and difficult operation of the existing micro-mix chip based on induced charge electroosmosis, the invention proposes a micro-mix chip based on fixed potential induced charge electroosmosis.

A micro-hybrid chip based on fixed potential induced charge electroosmosis according to the present invention includes a glass substrate 1, a PDMS cover sheet 2, a first excitation electrode 3, a second excitation electrode 4, a third excitation electrode 5, a fourth excitation electrode Electrode 6, first suspension electrode 7 and second suspension electrode 8;

The first excitation electrode 3, the second excitation electrode 4, the third excitation electrode 5, the fourth excitation electrode 6, the first suspension electrode 7 and the second suspension electrode 8 are thin film electrodes, and are all arranged on the glass substrate 1. upper surface;

The lower surface of the PDMS cover sheet 2 is provided with a first flow channel 9, a second flow channel 10, a third flow channel 11 and a mixing flow channel 12, and the inflow end of the mixing flow channel 12 is connected with the first flow channel 9 at the same time. The outflow end is connected to the outflow end of the second flow channel 10, the outflow end of the mixing flow channel 12 is connected to the inflow end of the third flow channel 11, and the inflow end of the first flow channel 9 is provided with a first inflow groove 13, The inflow end of the second flow channel 10 is provided with a second inflow groove 14, and the outflow end of the third flow channel 11 is provided with an outflow through hole 15;

The bottom of the first inflow groove 13 is provided with a first inflow through hole, the bottom of the second inflow groove 14 is provided with a second inflow through hole, the first inflow through hole, the second inflow through hole and the outflow through hole The holes 15 all run through the PDMS cover slip 2;

The inflow end of the first inflow hole and the inflow end of the second inflow hole are respectively connected with a first metal connector 16 and a second metal connector 17;

The upper surface of the glass substrate 1 is opposite to the lower surface of the PDMS cover sheet 2 and sealed, and one end 18 of the first excitation electrode 3 and one end 19 of the second excitation electrode 4 are all attached to one side of the mixing channel 12. close, one end 20 of the third excitation electrode 5 and one end 21 of the fourth excitation electrode 6 are attached to the other side of the mixing channel 12;

One end 18 of the first excitation electrode 3 is arranged opposite to one end 21 of the fourth excitation electrode 6, and one end 22 of the first suspension electrode 7 is arranged between the two, and one end 22 of the first suspension electrode 7 is connected to both are equally spaced;

One end 19 of the second excitation electrode 4 is arranged opposite to one end 20 of the third excitation electrode 5, and one end 23 of the second suspension electrode 8 is arranged between the two, and one end 23 of the second suspension electrode 8 is connected to both are equally spaced;

The potential difference between one end 18 of the first excitation electrode 3 and one end 21 of the fourth excitation electrode 6 is equal to the potential difference between one end 19 of the second excitation electrode 4 and one end 20 of the third excitation electrode 5 .

Preferably, the size of one end 22 of the first suspension electrode 7 is the same as that of the end 23 of the second suspension electrode 8;

The length Lc of one end 22 of the first suspension electrode 7 is 1000 microns, the width Wc is 80 microns, and the distance Gc between the end 22 of the first suspension electrode 7 and the end 23 of the second suspension electrode 8 is 100 microns;

The length L of the mixing channel 12 is 2300 microns, the width W is 180 microns, and the height is 100 microns;

The distance between one end 18 of the first excitation electrode 3 and one end 21 of the fourth excitation electrode 6 is the same as the distance between one end 19 of the second excitation electrode 4 and one end 20 of the third excitation electrode 5;

The distance G1 between one end 22 of the first suspension electrode 7 and one end 20 of the third excitation electrode 5 is 30 microns;

The distance Gd between one end 18 of the first excitation electrode 3 and one end 19 of the second excitation electrode 4 is equal to the distance between one end 20 of the third excitation electrode 5 and one end 21 of the fourth excitation electrode 6, and the distance Gd is 140 microns .

Further, the inner diameters of the first metal connector 16 and the second metal connector 17 are both 1 mm, and the diameter of the outflow through hole 15 is 6 mm.

Preferably, the material of the thin film electrode is ITO.

Preferably, the film electrode is made of metal.

The potentials of one end 18 of the first excitation electrode 3 and one end 19 of the second excitation electrode 4 are both V ₁ . The potentials of one end 20 of the third excitation electrode 5 and one end 21 of the fourth excitation electrode 6 are both V ₂ . When no voltage is applied to one end 22 of the first floating electrode 7 and one end 23 of the second floating electrode 8 , the potentials of both are (V ₁ +V ₂ )/2. When the fluid in the mixing channel 12 is mixed, a voltage is applied to one end 22 of the first suspension electrode 7 and one end 23 of the second suspension electrode 8 respectively, so that the potential of one end 22 of the first suspension electrode 7 is greater than (V ₁ +V ₂ )/2, the potential of one end 23 of the second floating electrode 8 is less than (V ₁ +V ₂ )/2; or the potential of one end 22 of the first floating electrode 7 is less than (V ₁ +V ₂ )/2 , the potential of one end 23 of the second floating electrode 8 is greater than (V ₁ +V ₂ )/2.

A micro-hybrid chip based on the induction charge electroosmosis of fixed potential according to the present invention affects the capacitive charging of the electric double layer at the junction of the suspension electrode and the fluid by changing the potential of the surface of the two suspension electrodes, so that the surface of the suspension electrode The electroosmotic flow is changed, and then two asymmetric electroosmotic vortices are generated, which stir the fluid in the microchannel to realize fluid mixing. The electrodes in the present invention are all thin-film electrodes, and compared with three-dimensional complex conductor obstacles, the thin-film electrodes are easier to prepare. Therefore, the micro-hybrid chip of the present invention has simple processing steps and is easy to operate, and can solve the problems of cumbersome processing steps and difficult operation of the existing micro-hybrid chip based on induced charge electroosmosis.

Description of drawings

In the following, a micro-hybrid chip based on fixed potential induced charge electroosmosis according to the present invention will be described in more detail based on the embodiments and with reference to the accompanying drawings, wherein:

Fig. 1 is the perspective view of a kind of micro-mixing chip based on the induction charge electroosmosis of fixed electric potential described in the embodiment;

Figure 2 is an enlarged view of the mixing channel in the embodiment;

Fig. 3 is the dimensional drawing of mixing channel and electrode end in the embodiment;

Fig. 4 is that 10Vpp voltage is applied on the first excitation electrode and the second excitation electrode in the embodiment, the third excitation electrode and the fourth excitation electrode are grounded, the first suspension electrode is applied with 8Vpp voltage, and the second suspension electrode is applied with 2Vpp voltage. When the frequency is 500Hz, the mixed flow field diagram of solution B and solution C in the mixed channel;

Fig. 5 is a flowchart of PDMS channel processing in the embodiment, a is a silicon substrate, b is a photoresist, c is a flow channel template, d is a mixture of PDMS and a curing agent, and UV is ultraviolet light;

Fig. 6 is the flowchart of ITO thin film electrode processing in the embodiment, e is ITO thin film, f is electrode template;

Fig. 7 is a bonding diagram of the PDMS cover sheet and the ITO substrate in the embodiment.

In the figures, the same parts are given the same reference numerals. The drawings are not to scale.

Detailed ways

A micro-hybrid chip based on fixed potential induced charge electroosmosis according to the present invention will be further described below with reference to the accompanying drawings.

Embodiment: The present embodiment will be described in detail below in conjunction with FIG. 1 to FIG. 7 .

A micro-hybrid chip based on fixed potential induced charge electroosmosis described in this embodiment includes a glass substrate 1, a PDMS cover sheet 2, a first excitation electrode 3, a second excitation electrode 4, a third excitation electrode 5, a Four excitation electrodes 6, a first suspension electrode 7 and a second suspension electrode 8;

The first excitation electrode 3, the second excitation electrode 4, the third excitation electrode 5, the fourth excitation electrode 6, the first suspension electrode 7 and the second suspension electrode 8 are thin film electrodes, and are all arranged on the glass substrate 1. upper surface;

The lower surface of the PDMS cover sheet 2 is provided with a first flow channel 9, a second flow channel 10, a third flow channel 11 and a mixing flow channel 12, and the inflow end of the mixing flow channel 12 is connected with the first flow channel 9 at the same time. The outflow end is connected to the outflow end of the second flow channel 10, the outflow end of the mixing flow channel 12 is connected to the inflow end of the third flow channel 11, and the inflow end of the first flow channel 9 is provided with a first inflow groove 13, The inflow end of the second flow channel 10 is provided with a second inflow groove 14, and the outflow end of the third flow channel 11 is provided with an outflow through hole 15;

The bottom of the first inflow groove 13 is provided with a first inflow through hole, the bottom of the second inflow groove 14 is provided with a second inflow through hole, the first inflow through hole, the second inflow through hole and the outflow through hole The holes 15 all run through the PDMS cover slip 2;

The inflow end of the first inflow hole and the inflow end of the second inflow hole are respectively connected with a first metal connector 16 and a second metal connector 17;

The upper surface of the glass substrate 1 is opposite to the lower surface of the PDMS cover sheet 2 and sealed, and one end 18 of the first excitation electrode 3 and one end 19 of the second excitation electrode 4 are all attached to one side of the mixing channel 12. close, one end 20 of the third excitation electrode 5 and one end 21 of the fourth excitation electrode 6 are attached to the other side of the mixing channel 12;

One end 18 of the first excitation electrode 3 is arranged opposite to one end 21 of the fourth excitation electrode 6, and one end 22 of the first suspension electrode 7 is arranged between the two, and one end 22 of the first suspension electrode 7 is connected to both are equally spaced;

One end 19 of the second excitation electrode 4 is arranged opposite to one end 20 of the third excitation electrode 5, and one end 23 of the second suspension electrode 8 is arranged between the two, and one end 23 of the second suspension electrode 8 is connected to both are equally spaced;

The potential difference between one end 18 of the first excitation electrode 3 and one end 21 of the fourth excitation electrode 6 is equal to the potential difference between one end 19 of the second excitation electrode 4 and one end 20 of the third excitation electrode 5;

One end 22 of the first floating electrode 7 has the same size as the one end 23 of the second floating electrode 8;

The length Lc of one end 22 of the first suspension electrode 7 is 1000 microns, the width Wc is 80 microns, and the distance Gc between the end 22 of the first suspension electrode 7 and the end 23 of the second suspension electrode 8 is 100 microns;

The length L of the mixing channel 12 is 2300 microns, the width W is 180 microns, and the height is 100 microns;

The distance between one end 18 of the first excitation electrode 3 and one end 21 of the fourth excitation electrode 6 is the same as the distance between one end 19 of the second excitation electrode 4 and one end 20 of the third excitation electrode 5;

The distance G1 between one end 22 of the first suspension electrode 7 and one end 20 of the third excitation electrode 5 is 30 microns;

The distance Gd between one end 18 of the first excitation electrode 3 and one end 19 of the second excitation electrode 4 is equal to the distance between one end 20 of the third excitation electrode 5 and one end 21 of the fourth excitation electrode 6, and the distance Gd is 140 microns .

The inner diameters of the first metal connector 16 and the second metal connector 17 are both 1 mm, and the diameter of the outflow through hole 15 is 6 mm;

The material of the thin film electrode is ITO.

Based on the Helmholtz-Smruchowski formula, the time-average velocity of the electroosmotic slip on the suspended electrode can be obtained:

Among them, <v _s > is the time-average flow rate of electroosmotic slip, ε is the dielectric constant of the solution, η is the solution viscosity, is the induced zeta potential, is the metal surface potential, is the electric potential outside the double layer, is the complex amplitude of the electric field intensity, is the complex amplitude of the tangential component of the electric field, δ is the ratio of the capacitance of the diffusion layer to the adsorption layer, and n is the normal vector.

Fig. 3 is a dimensional drawing of the mixing channel and the electrode end. The size parameters in the figure are obtained through optimization based on Comsol simulation.

The preparation method of a micro-mixed chip based on fixed potential induced charge electroosmosis described in this embodiment is carried out according to the following steps:

1. PDMS channel processing:

(1) Cleaning the silicon substrate: first, the silicon substrate is washed by hand with a cleaning agent. Secondly, the silicon substrate was ultrasonically cleaned in acetone and isopropanol for 10 minutes respectively. Again, the silicon substrate was rinsed with plasma water and dried with nitrogen gas. Finally, the dried silicon substrate was placed in a baking oven, and heated at a temperature of 80° C. for 15 minutes.

(2) Tiling of photoresist: First, a layer of photoresist is coated on the upper surface of the silicon substrate. Secondly, the silicon substrate is placed on a glue spinner and rotated at a speed of 1500r/s until the thickness of the photoresist is 100 microns. Finally, pre-bake the silicon substrate, place the silicon substrate on a hot plate at 60° C., heat the hot plate to 95° C., and heat the silicon substrate at this temperature for 1 hour. The photoresist is a negative photoresist of the SU-82050 model.

(3) Exposure: First, place the runner template on the photoresist surface. Secondly, use a light-transmitting plate to press the flow channel template and the photoresist surface tightly. Finally, it is exposed using a UV lamp.

(4) Developing: First, after-baking the exposed silicon substrate, place the silicon substrate on a hot plate at 60° C., heat the hot plate to 95° C., and heat the silicon substrate at this temperature for 35 minutes. Secondly, place the cooled silicon substrate in SU-8 developer solution for 10 minutes for development. Again, the silicon substrate was cleaned with plasma water and dried with nitrogen gas. Finally, the silicon substrate is placed in a baking oven and heated at a temperature of 80° C. for 10 minutes to 20 minutes to obtain a PDMS flow channel mold.

(5) Pouring PDMS: First, mix PDMS and curing agent at a mass ratio of 10:1, and stir with a clean glass rod for 15 to 20 minutes to make it evenly mixed. Second, the mixture of PDMS and curing agent was evacuated for 30 minutes using a vacuum pump to eliminate air bubbles in the mixture. Thirdly, carry out silanization treatment to the PDMS flow channel mold, so that a layer of silane is deposited on the surface of the PDMS flow channel mold. Finally, pour the mixture of PDMS and curing agent on the silane surface of the PDMS flow channel mold, and use a vacuum pump to evacuate it for 20 minutes to eliminate air bubbles in the mixture, and heat it at 80°C for 2 hours to cure it. .

The silane layer on the surface of the PDMS runner mold was used to prevent the PDMS runner mold from sticking to the mixture.

(6) PDMS channel treatment: First, slowly peel off the cured PDMS from the PDMS flow channel mold. Second, it is cut with a blade to match the shape of the glass substrate. Finally, the first inflow groove, the second inflow groove, the first inflow through hole, the second inflow through hole and the outflow through hole are set by using a groove digger and a hole puncher to obtain a PDMS cover sheet.

Figure 5 is a flowchart of PDMS channel processing.

2. Processing of ITO thin film electrodes:

(1) Cleaning the ITO substrate: the ITO substrate includes a glass substrate and an ITO film, and the cleaning method of the ITO substrate is the same as that of the silicon substrate.

(2) Tiling of photoresist: First, coat a layer of photoresist on the ITO film. Secondly, the ITO substrate was placed on a spinner and rotated at a speed of 3100r/s for 40 seconds. Finally, soft-bake the ITO substrate, place the ITO substrate on a hot plate at 100° C., and heat it for 6 minutes.

The photoresist is AZ4620 photoresist.

(3) Exposure: place the ITO substrate under an ultraviolet lamp for exposure.

(4) Developing: place the exposed ITO substrate in AZ developing solution, and develop for 4 to 5 minutes.

(5) Corrosion of the ITO film: the developed ITO substrate is placed in a hydrochloric acid solution with a mass ratio of 60%, and ferric chloride is added as a catalyst, soaked for 40 minutes, and the ITO film is corroded. During this process, the exposed and cured photoresist layer plays a role in protecting the ITO film, and the ITO film not covered by the photoresist is etched away.

(6) Removing the photoresist: After the etching of the ITO thin film is completed, the ITO substrate is soaked in a 5% NaOH solution by mass, and the cured photoresist is removed to obtain an ITO thin film electrode.

Fig. 6 is a flow chart of ITO thin film electrode processing.

3. Bonding of PDMS cover sheet and ITO substrate

First, set the PDMS cover on the ITO substrate, place it in the chamber of the plasma machine, and perform plasma treatment according to the use steps of the plasma machine, so that the PDMS cover and the ITO substrate are sealed to form a micro-hybrid chip.

Secondly, take out the micro-mixing chip, and under the microscope, calibrate the relative position of the mixing channel and the membrane electrode.

Finally, after the calibration is completed, press firmly for a few minutes, then place it in a baking oven, and heat it at 80°C for 30 minutes to obtain a micro-hybrid chip.

Figure 7 is a bonding diagram of the PDMS cover sheet and the ITO substrate.

The application of a micro-hybrid chip based on fixed potential induced charge electroosmosis described in this embodiment is carried out according to the following steps:

1. Granule preparation:

(1), preparation of buffer solution: add potassium chloride and ammonia water to deionized water, configure the buffer solution with a pH value of 9.2 and a conductivity of 1mS/m.

(2) Mix the buffer solution with the fluorescein powder to obtain a fluorescein solution with a concentration of 1.32×10 ^-5 mol/L.

(3) First, mix absolute ethanol and Tween solution at a volume ratio of 9:1 to obtain solution A (its main function is to reduce the adhesion of particles on the flow channel or the surface of the ITO substrate). Secondly, solution A and buffer are mixed at a volume ratio of 1:99 to obtain solution B. Finally, solution A and fluorescein solution were mixed at a volume ratio of 1:99 to obtain solution C.

2. Experimental operation:

(1) Turn on the computer, signal generator, signal amplifier, oscilloscope, CCD and fluorescent light switch connected to the microscope to observe whether the equipment is operating normally, and then open the Q-Capture Pro image acquisition software to observe the microscope stage in real time.

(2) First, place the plasma-treated micro-hybrid chip on the stage of the microscope, and adjust the position of the chip and the focal length of the objective lens. Secondly, inject a small amount of B solution into the micro-mixing chip through the outflow through hole, and observe through a microscope to ensure that the flow channel inside the micro-mixing chip is completely wet. Again, fix two 25 microliter microsamplers on the syringe pump, and inhale a certain amount of solution B and solution C respectively. Finally, through the metal connector, the two syringe pump output ports are respectively arranged in the first inflow through hole and the second inflow through hole.

(3) First, connect the first excitation electrode, the second excitation electrode, the third excitation electrode, the fourth excitation electrode, the first suspension electrode and the second suspension electrode to the signal amplifier. Second, connect the signal amplifier to the signal generator. Finally, adjust the amplitude, phase, and frequency of the signal generator output voltage signal, as well as the flow control parameters of the syringe pump.

The optimal values of the amplitude, phase and frequency of the output voltage signal are obtained through Comsol simulation optimization.

(4) Start the syringe pump, so that solution B and solution C flow into the first flow channel and the second flow channel at a given flow rate, and when the fluid flow rate in the mixing flow channel is stable, start the signal generator.

(5) Observe the mixing channel through a microscope, and adjust the position of the micro-mixing chip and the focal length of the objective lens again until the observed fluorescein particles are clear and stable, then video detection and recording are performed.

(6) Repeat (3) to (5), continuously adjust the voltage, frequency and flow rate, observe and record the experimental phenomena.

(7) Processing and analysis of experimental data.

Figure 4 shows that 10Vpp voltage is applied to the first excitation electrode and the second excitation electrode, the third excitation electrode and the fourth excitation electrode are grounded, 8Vpp voltage is applied to the first suspension electrode, and 2Vpp voltage is applied to the second suspension electrode, and the voltage frequency is 500Hz. , in the mixing flow channel, the mixing flow field diagram of solution B and solution C. It can be observed from Figure 4 that at the outflow end of the mixing channel, solution B and solution C are well mixed.

Although the invention is described herein with reference to specific embodiments, it should be understood that these embodiments are merely illustrative of the principles and applications of the invention. It is therefore to be understood that numerous modifications may be made to the exemplary embodiments and that other arrangements may be devised without departing from the spirit and scope of the invention as defined by the appended claims. It shall be understood that different dependent claims and features described herein may be combined in a different way than that described in the original claims. It will also be appreciated that features described in connection with individual embodiments can be used in other described embodiments.

Claims (5)

1. A micro-mixed chip based on the induction charge electroosmosis of fixed electric potential, described chip comprises glass substrate (1) and PDMS cover slip (2), the upper surface of described glass substrate (1) and PDMS cover slip (2) ) The lower surface of ) is opposite and sealed; The lower surface of the PDMS cover sheet (2) is provided with a first flow channel (9), a second flow channel (10), a third flow channel (11) and a mixing flow channel (12), and the mixing flow channel ( 12) The inflow end is connected with the outflow end of the first flow channel (9) and the outflow end of the second flow channel (10) at the same time, the outflow end of the mixed flow channel (12) is connected with the inflow end of the third flow channel (11) end connection, the inflow end of the first flow channel (9) is provided with a first inflow groove (13), the inflow end of the second flow channel (10) is provided with a second inflow groove (14), and the third The outflow end of the flow channel (11) is provided with an outflow through hole (15); The bottom of the first inflow groove (13) is provided with a first inflow through hole, the bottom of the second inflow groove (14) is provided with a second inflow through hole, the first inflow through hole, the second inflow through hole Both the hole and the outflow through hole (15) run through the PDMS cover slip (2); It is characterized in that the chip also includes a first excitation electrode (3), a second excitation electrode (4), a third excitation electrode (5), a fourth excitation electrode (6), a first suspension electrode (7) and a first excitation electrode (7). Two suspension electrodes (8); The first excitation electrode (3), the second excitation electrode (4), the third excitation electrode (5), the fourth excitation electrode (6), the first suspension electrode (7) and the second suspension electrode (8) are all are thin film electrodes, and are all arranged on the upper surface of the glass substrate (1); The inflow end of the first inflow hole and the inflow end of the second inflow hole are respectively connected with a first metal connector (16) and a second metal connector (17); One end (18) of the first excitation electrode (3) and one end (19) of the second excitation electrode (4) are bonded to one side of the mixing channel (12), and the third excitation electrode (5) One end (20) of the fourth excitation electrode (6) and one end (21) of the fourth excitation electrode (6) are all attached to the other side of the mixing channel (12); One end (18) of the first excitation electrode (3) is arranged opposite to one end (21) of the fourth excitation electrode (6), and one end (22) of the first suspension electrode (7) is arranged between the two, so One end (22) of the first suspension electrode (7) is equal to the distance between the two; One end (19) of the second excitation electrode (4) is arranged opposite to one end (20) of the third excitation electrode (5), and one end (23) of the second suspension electrode (8) is arranged between the two, so One end (23) of the second suspension electrode (8) is equal to the distance between the two; The potential difference between one end (18) of the first excitation electrode (3) and one end (21) of the fourth excitation electrode (6) is equal to that between one end (19) of the second excitation electrode (4) and the third excitation electrode ( 5) The potential difference at one end (20). 2. micro-mixing chip as claimed in claim 1, is characterized in that, the size of one end (22) of the first suspension electrode (7) is identical with the size of an end (23) of the second suspension electrode (8); The length Lc of one end (22) of the first suspension electrode (7) is 1000 microns, and the width Wc is 80 microns, and the end (22) of the first suspension electrode (7) and the second suspension electrode (8) The distance Gc at one end (23) is 100 microns; The length L of the mixing channel (12) is 2300 microns, the width W is 180 microns, and the height is 100 microns; The distance between one end (18) of the first excitation electrode (3) and one end (21) of the fourth excitation electrode (6) and the distance between one end (19) of the second excitation electrode (4) and the third excitation electrode ( 5) the spacing of one end (20) is the same; The distance G1 between one end (22) of the first suspension electrode (7) and one end (20) of the third excitation electrode (5) is 30 microns; The distance Gd between one end (18) of the first excitation electrode (3) and one end (19) of the second excitation electrode (4) is equal to the distance Gd between one end (20) of the third excitation electrode (5) and the fourth excitation electrode (6). ), the distance Gd at one end (21) of ) is 140 microns. 3. micro hybrid chip as claimed in claim 2, is characterized in that, the internal diameter of described first metal connector (16) and second metal connector (17) is 1 millimeter, and described outflow through hole (15 ) is 6 mm in diameter. 4. The micro-hybrid chip according to claim 1, wherein the material of the thin film electrode is ITO. 5. The micro-hybrid chip according to claim 1, wherein the material of the thin film electrode is metal.