CN112606234A - Scribing machine blade monitoring device and scribing machine - Google Patents
Scribing machine blade monitoring device and scribing machine Download PDFInfo
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- CN112606234A CN112606234A CN202011575955.1A CN202011575955A CN112606234A CN 112606234 A CN112606234 A CN 112606234A CN 202011575955 A CN202011575955 A CN 202011575955A CN 112606234 A CN112606234 A CN 112606234A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
- B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/06—Grinders for cutting-off
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/12—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Dicing (AREA)
Abstract
The invention relates to the field of finish machining of semiconductor materials by using a rotary cutter. The invention protects a dicing saw blade monitoring device and a dicing saw, wherein the dicing saw blade monitoring device comprises a mounting seat, a light ray emitting piece and a light receiving piece; the installation seat is provided with an ejection piece protection cavity and a light receiving piece protection cavity, a light ejection end face, opposite to the light receiving piece, of the light ejection piece is located in the ejection piece protection cavity, and a light receiving end face, opposite to the light ejection piece, of the light receiving piece is located in the light receiving piece protection cavity. Ventilate to two protection intracavity through the air inlet on two protection chambeies, jet out the terminal surface and protect the photic terminal surface to the light, make external pollutant be difficult to get into the protection intracavity, be difficult to pollute photic terminal surface and light and jet out the terminal surface, owing to can continuously ventilate the protection chamber, can jet out the terminal surface and protect the photic terminal surface to the light in real time, solved present blade monitoring device and need shut down the lower technical problem of monitoring result degree of accuracy that washs and cause.
Description
Technical Field
The invention relates to the field of finish machining of semiconductor materials by using a rotary cutter.
Background
In the process of manufacturing chips, a rotary cutting tool is required to divide a processed object into usable single chips, the cutting tool generally adopts a diamond grinding wheel blade, and the diamond grinding wheel blade separates the chips in a grinding mode. The diamond grinding wheel blade is extremely thin, the thickness dimension is usually 20-90 mu m, the blade is easily affected by impurities and edge breakage of a workpiece in the high-speed cutting process to cause blade breakage, and meanwhile, continuous cutting causes the abrasion of the cutting blade, so that the cutting device is provided with a blade monitoring mechanism for monitoring the blade breakage and the abrasion of the blade in real time so as to remind a worker to replace the blade when the blade is broken or abraded to a certain degree.
The blade monitoring mechanism comprises a mounting seat, a light emitting piece and a light receiving piece which are arranged on the mounting seat, wherein the light receiving piece receives light emitted by the light emitting piece, the light received by the light receiving piece is converted into voltage corresponding to the light quantity of the light receiving piece, and therefore the real-time state of the annular cutting edge of the blade between the light emitting piece and the light receiving piece is monitored. In order to achieve the required cutting efficiency and ensure the cutting quality, the circular cutting blade needs to rotate at a high speed, and the maximum speed during rotation can reach 6000 revolutions per minute, so the cutting fluid for cooling and cleaning the cutting tool can splash along the tangent line of the outer circumference of the cutting tool, the splashed cutting fluid carries a large amount of cutting powder, the cutting powder is easy to adhere to the light emitting end surface of the light emitting piece and the light receiving end surface of the light receiving piece, the light emitting of the light emitting piece and the light receiving of the light receiving piece are influenced, and the tipping and the abrasion of the blade cannot be accurately monitored.
Chinese patent application publication No. CN109501015A, published as 2019.03.22, discloses a cutting apparatus, wherein a cutting unit of the cutting apparatus includes a spindle, a cutting tool, a spindle housing, and a tool monitor, the tool monitor has an end surface for monitoring a cutting edge of the cutting tool, and the end surface has a recess for storing a cleaning liquid and cleaning the end surface of the monitor. Wherein two end surfaces of the cutting edge monitoring are a light emitting end surface of the light emitting member and a light receiving end surface of the light receiving member. The cutter monitor is provided with an annular part, the annular part forms a concave part, an inner cavity of the annular part is communicated with a cleaning liquid pipe, after the cutter monitor is shut down, cleaning liquid can be supplied to the inner cavity of the annular part through the cleaning liquid pipe, and the cleaning liquid is kept in the inner cavity of the annular part under the action of surface tension to clean the end face in the annular part.
Although the monitor of the cutting device can clean the end faces of the light ray emitting piece and the light receiving piece, the cleaning can be carried out only by stopping the dicing saw, the cleaning cannot be carried out in time in the working process of the dicing saw, the end faces of the light ray emitting piece and the light receiving piece are possibly polluted, and the accuracy of a monitoring result is low. The machine is frequently required to be stopped and overhauled in the working process, so that the technical problem that the production efficiency of the dicing saw is low is caused.
Disclosure of Invention
The invention aims to provide a dicing saw blade monitoring device, which is used for solving the technical problem of low accuracy of monitoring results caused by the fact that the conventional blade monitoring device cannot be cleaned in time; in addition, the invention also aims to provide a dicing saw using the blade monitoring device, which is used for solving the technical problems that the conventional dicing saw blade monitoring device needs to be frequently stopped for cleaning, the dicing saw needs to be frequently stopped for maintenance and the production efficiency is low.
The blade monitoring device adopts the following technical scheme:
scribing machine blade monitoring devices includes:
the mounting seat is used for being arranged at one end of the scribing machine spindle, which is used for mounting the blade;
the light ray emitting piece is arranged on the mounting seat and used for emitting light rays;
the light receiving piece is arranged on the mounting seat and used for receiving light;
the light emitting piece and the light receiving piece are arranged on two sides of the blade to monitor the blade;
the mounting seat is provided with an ejection piece protection cavity and a light receiving piece protection cavity, the ejection piece protection cavity is provided with an ejection piece protection cavity air inlet, and air enters the ejection piece protection cavity air inlet to keep the air pressure in the ejection piece protection cavity larger than the air pressure outside the ejection piece protection cavity; the light receiving element protection cavity is provided with a light receiving element protection cavity air inlet, and air enters the light receiving element protection cavity air inlet to keep the air pressure in the light receiving element protection cavity larger than the air pressure outside the light receiving element protection cavity;
the light emitting end face of the light emitting piece, which is opposite to the light receiving piece, is positioned in the light emitting piece protection cavity, and the light receiving end face of the light receiving piece, which is opposite to the light emitting piece, is positioned in the light receiving piece protection cavity;
the ejection piece protection cavity is provided with a light outlet for light to be ejected, the light receiving piece protection cavity is also provided with a light inlet for light to enter, the ejection piece protection cavity and the light receiving piece protection cavity are arranged on two sides of the blade, and the light outlet is opposite to the light inlet.
Has the advantages that: the monitoring device is provided with an ejection piece protection cavity and a light receiving piece protection cavity, and light can be transmitted normally through a light outlet and a light inlet so as to detect the blade normally. Ventilate to two protection intracavity through the air inlet on two protection chambeies, protect light-emitting end face and photic terminal surface, under protection intracavity atmospheric pressure effect, external pollutant is difficult to get into the protection intracavity, just also is difficult to pollute photic terminal surface and light-emitting end face, owing to can continuously ventilate the protection chamber, can penetrate terminal surface and photic terminal surface to light in real time and protect, solved present blade monitoring devices and need shut down the lower technical problem of the monitoring result degree of accuracy that washs and cause.
The form of the ejected piece protection cavity is optimized, an ejected piece protection block is arranged on the mounting seat, an ejected piece through hole extending along the light ejection direction of the light ejected piece is formed in the ejected piece protection block, the ejected piece through hole and the mounting seat enclose the ejected piece protection cavity, and a hole opening at one end of the ejected piece through hole forms the light outlet. Through setting up the piece protection piece of ejing, the processing of being convenient for can not change the structure of original mount pad.
Further, the aperture of the through hole of the ejection member is larger than the outer diameter of the light ejection end surface. The end face of the through hole of the ejection piece is prevented from blocking the ejected light, the installation is convenient, and the requirement on processing precision is reduced.
Further, the air inlet of the ejected member protection cavity is arranged on the wall of the through hole of the ejected member. Simplify the structure of admitting air, the processing of being convenient for.
Further, be equipped with on the mount pad and be equipped with on the light-receiving piece protection piece along being equipped with on the light-receiving piece protection piece of light-receiving piece and inject into the light-receiving piece through-hole that extends in the direction, the light-receiving piece through-hole encloses with the mount pad and becomes light-receiving piece protection cavity, the one end drill way of light-receiving piece through-hole forms the light entry, the removable protective block base that is fixed with on the mount pad, light-receiving piece protection piece, the piece protection piece that jets out all are fixed with the protective block base, and light-receiving piece protection piece, the piece protection piece that jets out pass through the protective block base and fix on the mount pad. The light receiving part protection block and the ejection part protection block are arranged on the protection block base, so that the whole body and the mounting seat can be assembled conveniently, and the mounting efficiency is improved.
Further, the protection block base is provided with a gas supply channel, and the gas supply channel is communicated with the gas inlet of the light receiving element protection cavity and communicated with the gas inlet of the ejection element protection cavity so as to simultaneously supply gas to the light receiving element protection cavity and the ejection element protection cavity through the gas supply channel. The air inlet of the light receiving part protection cavity and the air inlet of the ejection part protection cavity share an air supply channel, so that an air supply structure is simplified.
Furthermore, be equipped with the photic piece protection piece on the mount pad, be equipped with on the photic piece protection piece along the photic light and penetrate the photic piece through-hole that extends in the direction, photic piece through-hole inner chamber forms photic piece protection cavity, the one end drill way of photic piece through-hole forms the light entry. The processing of the light receiving element protection cavity is facilitated, and the processing cost is reduced.
Furthermore, the aperture of the light receiving element through hole is larger than the outer diameter of the light emitting end face, so that the end face of the light receiving element through hole is prevented from blocking the emitted light, the installation is convenient, and the requirement on processing precision is reduced.
Further, the air inlet of the light receiving element protection cavity is positioned on the hole wall of the light receiving element through hole. Simplify the structure of admitting air, the processing of being convenient for.
The technical scheme of the dicing saw comprises the following steps:
the dicing saw comprises a frame;
the workbench is arranged on the rack and used for placing a workpiece;
a main shaft, one end of which is used for installing a blade;
scribing machine blade monitoring devices includes:
the mounting seat is used for being arranged at one end of the scribing machine spindle, which is used for mounting the blade;
the light ray emitting piece is arranged on the mounting seat and used for emitting light rays;
the light receiving piece is arranged on the mounting seat and used for receiving light;
the light emitting piece and the light receiving piece are arranged on two sides of the blade to monitor the blade;
the mounting seat is provided with an ejection piece protection cavity and a light receiving piece protection cavity, the ejection piece protection cavity is provided with an ejection piece protection cavity air inlet, and air enters the ejection piece protection cavity air inlet to keep the air pressure in the ejection piece protection cavity larger than the air pressure outside the ejection piece protection cavity; the light receiving element protection cavity is provided with a light receiving element protection cavity air inlet, and air enters the light receiving element protection cavity air inlet to keep the air pressure in the light receiving element protection cavity larger than the air pressure outside the light receiving element protection cavity;
the light emitting end face of the light emitting piece, which is opposite to the light receiving piece, is positioned in the light emitting piece protection cavity, and the light receiving end face of the light receiving piece, which is opposite to the light emitting piece, is positioned in the light receiving piece protection cavity;
the ejection piece protection cavity is provided with a light outlet for light to be ejected, the light receiving piece protection cavity is also provided with a light inlet for light to enter, the ejection piece protection cavity and the light receiving piece protection cavity are arranged on two sides of the blade, and the light outlet is opposite to the light inlet.
Has the advantages that: the monitoring device is provided with an ejection piece protection cavity and a light receiving piece protection cavity, and light can be transmitted normally through a light outlet and a light inlet so as to detect the blade normally. Ventilate to two protection intracavity through the air inlet on two protection chambeies, penetrate terminal surface and photic terminal surface to the light, under protection intracavity atmospheric pressure effect, external pollutant is difficult to get into the protection intracavity, just also be difficult to pollute photic terminal surface and light and penetrate the terminal surface, owing to can continuously ventilate the protection chamber, can penetrate terminal surface and photic terminal surface to the light in real time and protect, the frequency of shutting down the maintenance has been reduced, the technical problem that the production efficiency is low that causes is maintained to light penetrating terminal surface and photic terminal surface owing to need shut down to present scribing machine is solved.
The form of the ejected piece protection cavity is optimized, an ejected piece protection block is arranged on the mounting seat, an ejected piece through hole extending along the light ejection direction of the light ejected piece is formed in the ejected piece protection block, the ejected piece through hole and the mounting seat enclose the ejected piece protection cavity, and a hole opening at one end of the ejected piece through hole forms the light outlet. Through setting up the piece protection piece of ejing, the processing of being convenient for can not change the structure of original mount pad.
Further, the aperture of the through hole of the ejection member is larger than the outer diameter of the light ejection end surface. The end face of the through hole of the ejection piece is prevented from blocking the ejected light, the installation is convenient, and the requirement on processing precision is reduced.
Further, the air inlet of the ejected member protection cavity is arranged on the wall of the through hole of the ejected member. Simplify the structure of admitting air, the processing of being convenient for.
Further, be equipped with on the mount pad and be equipped with on the light-receiving piece protection piece along being equipped with on the light-receiving piece protection piece of light-receiving piece and inject into the light-receiving piece through-hole that extends in the direction, the light-receiving piece through-hole encloses with the mount pad and becomes light-receiving piece protection cavity, the one end drill way of light-receiving piece through-hole forms the light entry, the removable protective block base that is fixed with on the mount pad, light-receiving piece protection piece, the piece protection piece that jets out all are fixed with the protective block base, and light-receiving piece protection piece, the piece protection piece that jets out pass through the protective block base and fix on the mount pad. The light receiving part protection block and the ejection part protection block are arranged on the protection block base, so that the whole body and the mounting seat can be assembled conveniently, and the mounting efficiency is improved.
Further, the protection block base is provided with a gas supply channel, and the gas supply channel is communicated with the gas inlet of the light receiving element protection cavity and communicated with the gas inlet of the ejection element protection cavity so as to simultaneously supply gas to the light receiving element protection cavity and the ejection element protection cavity through the gas supply channel. The air inlet of the light receiving part protection cavity and the air inlet of the ejection part protection cavity share an air supply channel, so that an air supply structure is simplified.
Furthermore, be equipped with the photic piece protection piece on the mount pad, be equipped with on the photic piece protection piece along the photic light and penetrate the photic piece through-hole that extends in the direction, photic piece through-hole inner chamber forms photic piece protection cavity, the one end drill way of photic piece through-hole forms the light entry. The processing of the light receiving element protection cavity is facilitated, and the processing cost is reduced.
Furthermore, the aperture of the light receiving element through hole is larger than the outer diameter of the light emitting end face, so that the end face of the light receiving element through hole is prevented from blocking the emitted light, the installation is convenient, and the requirement on processing precision is reduced.
Further, the air inlet of the light receiving element protection cavity is positioned on the hole wall of the light receiving element through hole. Simplify the structure of admitting air, the processing of being convenient for.
Drawings
FIG. 1 is a schematic view of the structure of the spindle end in embodiment 1 of the dicing saw of the present invention;
FIG. 2 is a schematic structural diagram of a blade monitoring device in embodiment 1 of the dicing saw of the present invention;
FIG. 3 is a cross-sectional view of a blade monitoring device in embodiment 1 of the dicing saw of the invention (three parallel arrows in the figure indicate the incident direction of light rays);
FIG. 4 is a side view of a blade monitoring device in exemplary embodiment 1 of a dicing saw of the invention;
FIG. 5 is an isometric view of a blade monitoring device in accordance with exemplary embodiment 1 of the dicing saw of the present invention;
summary of reference numerals: 1-a main shaft; 2-a blade; 3-a main spray head; 4-side shower nozzle; 5-mounting a substrate; 6-a blade monitoring device; 61-a mounting seat; 611-U-shaped groove; 62-a light emitting member; 621-light exit end face; 63-a light-receiving member; 631-a light-receiving end face; 64-an ejector guard block; 65-an ejector through-hole; 66-an ejector guard chamber; 661-air inlet of injection member protection chamber; 662-light exit; 67-light-receiving element protection block; 68-light-receiving element through hole; 69-light receiving element protection cavity; 691-an air inlet of the light receiving element protection chamber; 692-light inlet; 610-a guard block base; 6101-bolt holes; 7-air inlet nozzle.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the detailed description and specific examples, while indicating the preferred embodiment of the invention, are intended for purposes of illustration only and are not intended to limit the scope of the invention. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present invention without making any creative effort, shall fall within the protection scope of the present invention.
It is noted that relational terms such as "first" and "second," and the like, may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
The features and properties of the present invention are described in further detail below in conjunction with the following embodiments.
Specific embodiment 1 of the dicing saw of the present invention:
the dicing saw comprises a rack, wherein a workbench is arranged on the rack, when the dicing saw is used, a workpiece is positioned and placed on the workbench, the workpiece is firmly fixed by means of vacuum adsorption and the like, and the workbench can reciprocate along the Y-axis direction. The machine frame is also provided with a moving frame which can move in the X direction and can move relative to the workbench to drive the main shaft 1 to move, and the main shaft 1 is an air static pressure high-speed main shaft 1. As shown in fig. 1, a main shaft 1 extends in the Y direction, and a blade 2 is attached to one end of the main shaft 1, and the blade 2 rotates with the rotation of the main shaft 1 to divide a workpiece.
As shown in fig. 1 to 3, in order to cool the blade 2 and take away the cut debris in time when the blade 2 cuts, a tool cooling device is installed at one end of the spindle 1, and the tool cooling device and the blade 2 are located at the same end of the aerostatic high-speed spindle 1. The cutter cooling device comprises a main spray head 3 and a side spray head 4, wherein the main spray head 3 and the side spray head 4 are used for cooling the blade 2.
The one end that sets up blade 2 on the main shaft 1 is fixed with mounting substrate 5, and main shower nozzle 3 and side shower nozzle 4 are all fixed on mounting substrate 5, still are fixed with blade monitoring devices 6 on mounting substrate 5, and blade monitoring devices 6 are used for monitoring the real-time status of blade 2.
As shown in fig. 2 and 3, the blade monitoring device 6 includes a mounting base 61, the mounting base 61 is fixed on the mounting substrate 5, the mounting base 61 is provided with a light emitting element 62 and a light receiving element 63, in this embodiment, the light emitting element 62 and the light receiving element 63 are optical fibers embedded in the mounting base 61, and the light receiving element 63 is further connected with a photoelectric conversion device for converting received light into voltage. The mounting base, the light receiving element and the light emitting element in the embodiment are a contrast type plastic optical fiber, and belong to standard elements in the prior art.
The light emitting member 62 has a light emitting end surface 621, in order to prevent the light emitting end surface 621 from being contaminated, in the embodiment, the mounting base 61 is provided with an emitting member protection block 64, the emitting member protection block 64 is provided with an emitting member through hole 65 extending along the light emitting direction of the light emitting member 62, and one end of the emitting member through hole 65 and the mounting base 61 are attached to form an emitting member protection cavity 66.
The ejector protection cavity 66 is provided with an ejector protection cavity air inlet 661 for allowing air to enter the ejector protection cavity 66 and form a micro positive pressure inside the ejector protection cavity 66 so that the air pressure inside the ejector protection cavity 66 is greater than the air pressure outside the ejector protection cavity 66.
In this embodiment, the injection member protection chamber air inlet 661 is disposed on the wall of the injection member through hole 65, and the air inlet direction is perpendicular to the normal direction of the light injection end surface 621, and the air inlet direction of the injection member protection chamber air inlet 661 is the direction toward which the injection member protection chamber air inlet 661 faces.
In the embodiment, the aperture of the through hole 65 is larger than the outer diameter of the light emitting end surface 621, the light emitting end surface 621 of the light emitting member 62 is not coaxial with the through hole 65, and the center of the light emitting end surface 621 is located below the axis of the through hole 65.
The light receiving element 63 has a light receiving end face 631, and in order to prevent the light receiving end face 631 from being contaminated, the mounting base 61 is further provided with a light receiving element protection block 64, the light receiving element protection block 67 is provided with a light receiving element through hole 68 extending in the light incident direction, the inner cavity of the light receiving element through hole 68 forms a light receiving element protection cavity 69, one end opening of the light receiving element through hole 68 forms a light entrance 692 for light to enter, and the other end opening is attached to the mounting base 61.
The light receiving element protection chamber 69 is provided with a light receiving element protection chamber air inlet 691 for allowing air to enter the light receiving element protection chamber 69, a micro-positive pressure is formed in the light receiving element protection chamber 69, so that the air pressure in the light receiving element protection chamber 69 is greater than the air pressure outside the ejector protection chamber 66, the air pressure in the light receiving element protection chamber 69 is positive pressure when the air is ventilated, and in other embodiments, if the blade is in a negative pressure environment, the light receiving element protection chamber 69 may be negative pressure or positive pressure.
In this embodiment, the light-receiving-element-protection-chamber air inlet 691 is located on the wall of the light-receiving-element through hole 68, the air intake direction of the light-receiving-element-protection-chamber air inlet 691 is perpendicular to the normal direction of the light-receiving end surface 631, and the air intake direction of the light-receiving-element-protection-chamber air inlet 691 is the direction toward which the light-receiving-element-protection-chamber air inlet 691 faces.
In the present embodiment, the aperture of the light receiving element through hole 68 is larger than the outer diameter of the light receiving end surface 631, the light receiving end surface 631 is not coaxial with the light receiving element through hole 68, and the center of the light receiving end surface 631 is located below the axis of the light receiving element through hole 68. In this embodiment, the light-receiving element protection block 67 is fixed to the mounting base 61, and is limited by the position of the blade, and the length of the ejecting element through hole 65 is longer than that of the light-receiving element through hole 68.
The mounting base 61 is provided with a U-shaped groove 611, the opening of the U-shaped groove 611 faces the blade 2 and allows the blade edge of the blade 2 to extend into, the light receiving element 63 and the light emitting element extend out from two groove walls opposite to the U-shaped groove 611, and the emitting element protecting block 64 and the light receiving element protecting block 67 are respectively attached to two groove wall surfaces opposite to the U-shaped groove 611.
In this embodiment, the mounting base 61 is detachably fixed with a protection block base 610, and the light receiving element protection block 67 and the ejection element protection block 64 are fixed with the protection block base 610. The protection block base 610 is located on one side of the mount base 61, and the light-receiving element protection block 67 and the emitting element protection block 64 are fixed to the lower end of the protection block base 610 and extend into the U-shaped groove 611.
As shown in fig. 4 and 5, a bolt hole 6101 is formed in the protection block base 610, a threaded hole is formed in the mounting base 61, and a bolt for fixing the protection block base 610 passes through the bolt hole 6101 and is threadedly assembled in the threaded hole.
In order to simplify the gas passage, in this embodiment, a gas supply passage is provided in the protection block base 610, and the ejector protection chamber gas inlet 661 and the photo acceptor protection chamber gas inlet 691 are communicated with the gas supply passage to supply gas to the photo acceptor protection chamber 69 and the ejector protection chamber 66 simultaneously through the gas supply passage. An air inlet nozzle 7 is arranged at an air inlet of the air supply channel in the embodiment, and the air inlet nozzle 7 is used for being connected with an air source. The structure of the gas circuit can be simplified by sharing the gas inlet channel between the two ejected part protection cavity gas inlets 661 and the light receiving part protection cavity gas inlet 691, and meanwhile, the gas inlet nozzle 7 of the gas inlet channel is arranged on the protection block base 610, so that the arrangement space is large, and the installation is convenient.
When the dicing saw of the invention works, the blade 2 cuts a workpiece on the workbench, the cooling device cools the blade 2, and the light receiving piece 63 of the blade monitoring device 6 is matched with the light emitting piece 62 to realize the real-time monitoring of the state of the blade 2. Meanwhile, clean compressed air is introduced into the light receiving part protection cavity 69 and the ejection part protection cavity 66 to form micro positive pressure, the cutting fluid with powder is difficult to enter the protection cavities, the cleanness of the light ejection end face 621 and the light receiving end face 631 is kept, the air inflow of the two protection cavities can be controlled, the maintenance time of the monitoring mechanism is prolonged to seven to ten days, the labor intensity of operators is greatly reduced, and the production efficiency is improved.
A specific embodiment 2 of the dicing saw of the present invention, the difference between the dicing saw of the present embodiment and the above embodiment is: in this embodiment, the light-receiving member protection cavity and the emitting member protection cavity are disposed on the mounting seat, and the two opposite groove walls of the U-shaped groove on the mounting seat are directly provided with grooves, and the notches of the grooves on the two groove walls are opposite to each other. Of course, in other embodiments, the form of disposing the light-receiving-element protection cavity and the emitting-element protection cavity on the mounting seat is not limited to the form given in the above embodiments, for example, a cover plate may be added on the mounting seat, and the cover plate and the mounting seat may enclose a protection cavity.
A specific embodiment 3 of the dicing saw of the present invention, the difference between the dicing saw of the present embodiment and the above embodiment is: the light ray ejection member includes an optical fiber and a prism at an end of the optical fiber, and the light ray ejection end face is on the prism. The structure of the light emitting member in this embodiment is the same as that of the optical fiber and the right-angle prism in application publication No. CN 109501015A. In other embodiments, the light receiving element may also adopt a combination of an optical fiber and a prism, which can prevent the optical fiber from being bent and prevent the optical fiber from being easily broken. The light emitting member of the present invention is not limited to the above-described form, and for example, the light emitting member may be a combination of a light source and an optical fiber.
A specific embodiment 4 of the dicing saw of the present invention, the difference between the dicing saw of the present embodiment and the above embodiment is: in this embodiment, the aperture of the through hole of the emitting member is equal to the outer diameter of the light emitting end surface. Similarly, in other embodiments, the aperture of the light receiving element through hole may be equal to the outer diameter of the light receiving end surface.
A specific embodiment 5 of the dicing saw of the present invention, the dicing saw of the present embodiment is different from the above embodiment in that: in this embodiment, an included angle between the air inlet direction of the air inlet of the injection member protection cavity and the light injection end surface is greater than 0 degree and smaller than 90 degrees, and the included angle faces the light injection end surface. Similarly, in other embodiments, the air inlet direction of the air inlet of the light receiving element protection cavity may also include an angle greater than 0 degree and smaller than 90 degrees with the light receiving end surface, and face the light receiving end surface. The injection member protection chamber air inlet may also be provided on the mounting base.
A specific embodiment 6 of the dicing saw of the present invention, wherein the dicing saw of the present embodiment is different from the above embodiment in that: in this embodiment, the ejected member protection cavity in this embodiment is not a cylindrical cavity, and the cross section of the ejected member protection cavity is square, but may be an ellipse or the like. The cross section of the light receiving element protection cavity can also be in a square shape, an oval shape and the like. For the light receiving element protection chamber and the emitting element protection chamber, in addition to the forms provided in the above embodiments, the number of openings may be increased, for example, an air outlet may be provided at the bottom of the light receiving element protection and emitting element protection chamber.
A specific embodiment 7 of the dicing saw of the present invention, the dicing saw of the present embodiment is different from the above embodiment in that: the top of the light-receiving piece protection block and the top of the ejection piece protection block are connected together. In other embodiments, the mounting seat may be directly provided with an emitting member protection cavity and a light receiving member protection cavity.
A specific embodiment 8 of the dicing saw of the present invention, wherein the dicing saw of the present embodiment is different from the above embodiment in that: in this embodiment, the light-receiving element protection block and the emitting element protection block are independently fixed to the mounting base, respectively. At this time, both the light receiving part protection block and the emitting part protection block are directly connected with the air supply pipeline.
In the specific embodiment of the dicing saw blade monitoring device of the invention, the structure of the dicing saw blade monitoring device in this embodiment is the same as that of the monitoring device in any specific embodiment of the dicing saw, and the detailed description is omitted.
The above description is only a preferred embodiment of the present invention, and not intended to limit the present invention, the scope of the present invention is defined by the appended claims, and all structural changes that can be made by using the contents of the description and the drawings of the present invention are intended to be embraced therein.
Claims (10)
1. Dicing saw blade monitoring device includes:
the mounting seat (61) is used for being arranged at one end of the scribing machine spindle (1) for mounting the blade (2);
a light emitting member (62) provided on the mount base (61) for emitting light;
the light receiving piece (63) is arranged on the mounting seat (61) and used for receiving light;
the light emitting piece (62) and the light receiving piece (63) are arranged on two sides of the blade (2) for monitoring the blade (2);
it is characterized in that the preparation method is characterized in that,
an ejection piece protection cavity (66) and a light receiving piece protection cavity (69) are arranged on the mounting seat (61), an ejection piece protection cavity air inlet (661) is formed in the ejection piece protection cavity (66), and air enters the ejection piece protection cavity air inlet (661) to keep the air pressure in the ejection piece protection cavity (66) larger than the air pressure outside the ejection piece protection cavity (66); the light receiving element protection cavity (69) is provided with a light receiving element protection cavity air inlet (691), and air enters the light receiving element protection cavity air inlet (691) to keep the air pressure in the light receiving element protection cavity (69) larger than the air pressure outside the light receiving element protection cavity (69);
a light emitting end surface (621) of the light emitting piece (62) opposite to the light receiving piece (63) is positioned in the light emitting piece protection cavity (66), and a light receiving end surface (631) of the light receiving piece (63) opposite to the light emitting piece (62) is positioned in the light receiving piece protection cavity (69);
the emergent piece protecting cavity (66) is provided with a light outlet (662) for light to be emergent, the light receiving piece protecting cavity 69 is also provided with a light inlet (692) for light to enter, the emergent piece protecting cavity (66) and the light receiving piece protecting cavity (69) are arranged on two sides of the blade (2), and the light outlet (662) and the light inlet (692) are arranged oppositely.
2. A dicing saw blade monitoring apparatus according to claim 1, wherein the mount base (61) is provided with an ejector protection block (64), the ejector protection block (64) is provided with an ejector through hole (65) extending in a light-ejecting direction of the light ejector (62), the ejector through hole (65) and the mount base (61) enclose the ejector protection chamber (66), and an end opening of the ejector through hole (65) forms the light exit port (662).
3. The dicing saw blade monitoring apparatus according to claim 2, wherein the diameter of the ejector through hole (65) is larger than the outer diameter of the light-emitting end face (621).
4. A dicing saw blade monitoring apparatus according to claim 2, wherein the ejector guard chamber air inlet (661) is provided on a wall of the ejector through hole (65).
5. The dicing saw blade monitoring device according to claim 2, wherein the mounting base (61) is provided with a light-receiving piece protection block (67), the light-receiving piece protection block (67) is provided with a light-receiving piece through hole (68) extending in the light-receiving piece (63) light-entering direction, the light-receiving piece through hole (68) and the mounting base (61) enclose the light-receiving piece protection cavity (69), one end hole of the light-receiving piece through hole (68) forms the light-entering port (692), the mounting base (61) is detachably fixed with a protection block base (610), the light-receiving piece protection block (67) and the light-emitting piece protection block (64) are both fixed with the protection block base (610), and the light-receiving piece protection block (67) and the light-emitting piece protection block (64) are fixed on the mounting base (61) through the protection block base (610).
6. The dicing saw blade monitoring apparatus according to claim 5, wherein the protection block base (610) is provided with an air supply passage communicating with the light-receiving member protection chamber air inlet (691) and communicating with the ejector protection chamber air inlet (661) to supply air to the light-receiving member protection chamber (69) and the ejector protection chamber (66) simultaneously through the air supply passage.
7. A dicing saw blade monitoring apparatus according to any one of claims 1 to 4, wherein the mount base (61) is provided with a light-receiving member protection block (67), the light-receiving member protection block (67) is provided with a light-receiving member through hole (68) extending in a light incident direction of the light-receiving member (63), the light-receiving member through hole (68) and the mount base enclose the light-receiving member protection chamber (69), and one end opening of the light-receiving member through hole (68) forms the light entrance opening (692).
8. The dicing saw blade monitoring device according to claim 8, wherein the aperture of the light-receiving member through hole (68) is larger than the outer diameter of the light-emitting end face (621).
9. The dicing saw blade monitoring device according to claim 6, wherein the light receptor guard chamber air inlet (691) is on a hole wall of the light receptor through hole (68).
10. A dicing saw, comprising:
a frame;
the workbench is arranged on the rack and used for placing a workpiece;
a spindle (1) having one end for mounting a blade (2);
it is characterized by also comprising:
a dicing saw blade monitoring device installed at one end of a main shaft (1) where a blade (2) is located, the dicing saw blade monitoring device being as claimed in any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011575955.1A CN112606234A (en) | 2020-12-28 | 2020-12-28 | Scribing machine blade monitoring device and scribing machine |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011575955.1A CN112606234A (en) | 2020-12-28 | 2020-12-28 | Scribing machine blade monitoring device and scribing machine |
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| CN112606234A true CN112606234A (en) | 2021-04-06 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202011575955.1A Pending CN112606234A (en) | 2020-12-28 | 2020-12-28 | Scribing machine blade monitoring device and scribing machine |
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| Country | Link |
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| CN (1) | CN112606234A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113118950A (en) * | 2021-05-10 | 2021-07-16 | 沈阳和研科技有限公司 | Antifouling device for optical fiber sensor |
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