JP4704816B2 - Cutting equipment - Google Patents

Description

  The present invention relates to a cutting device, and more particularly, to a cutting device including a detecting means for detecting a state such as breakage or wear of a cutting blade, a position of the cutting blade, and the like.

  In a semiconductor device manufacturing process, circuits such as ICs and LSIs are formed in a large number of regions partitioned by streets (cutting lines) formed in a lattice shape on the surface of a substantially disc-shaped semiconductor wafer. Each semiconductor chip is manufactured by dividing each region along the street. As a dividing device for dividing a semiconductor wafer, a cutting device as a dicing device is generally used. This cutting device generally performs cutting by rotating a cutting blade formed of a grindstone portion generally made of diamond abrasive grains while relatively cutting and feeding along a street. The semiconductor chip thus divided is packaged and widely used in electric devices such as mobile phones and personal computers.

  In order to confirm the breakage of the cutting blade during cutting, the cutting device is provided with, for example, a breakage detection sensor that optically detects the breakage of the cutting blade on the cutting blade cover. Such a breakage detection sensor is provided, for example, so that a light emitting element and a light receiving element are arranged to face each other, and a cutting blade is positioned on an optical axis connecting the light emitting element and the light receiving element. The breakage state of the cutting blade is detected by the amount of light received by the light receiving element. However, if water droplets adhere to the light emitting surface of the light emitting element or the light receiving surface of the light receiving element, the light is refracted and scattered, and the accuracy of detecting the cutting blade breakage is lowered. Therefore, it is necessary to prevent water droplets from adhering to the light emitting surface of the light emitting element of the breakage detection sensor and the light receiving surface of the light receiving element.

Japanese Patent Laid-Open No. 11-8211 JP-A-4-22206

  The structure of the cutting blade cover basically prevents the cutting fluid from diffusing outside. For this reason, when the width of the cutting blade cover in the spindle axis direction is narrowed, the flow rate of the cutting fluid that rotates around the cutting blade increases. Further, when the flow rate of the cutting fluid is increased, the amount of the cutting fluid that moves around the cutting blade increases. As described above, when the width of the cutting blade cover is reduced or the flow rate of the cutting fluid is increased, the flow of the cutting fluid around the cutting blade generates turbulent flow, and the cutting fluid adheres to the light emitting element and the light receiving element. There was a problem that it was easy to do.

  Accordingly, the present invention has been made in view of the above problems, and an object of the present invention is to make it difficult for the cutting fluid to adhere to the breakage detection sensor and to prevent the cutting fluid from adhering to the breakage detection sensor. It is to provide a new and improved cutting device that is easily discharged.

  In order to solve the above-described problem, according to one aspect of the present invention, a light that connects a cutting blade attached to the tip of a spindle, a blade cover that covers the cutting blade, and a light emitting element and a light receiving element that are arranged to face each other. There is provided a cutting device including detection means for detecting a state of the cutting blade based on an amount of the shaft shielded by a cutting edge of the cutting blade. In the above cutting apparatus, the detection means has a pair of leg portions that respectively support the light emitting element and the light receiving element on both sides of the cutting edge of the cutting blade, and the end surface of each leg portion corresponds to the center position of the end surface of the leg portion and the cutting position. It is arranged perpendicular to a straight line connecting the rotation center axis of the blade. Further, the corner portion where the inner side surface of each leg portion on the cutting blade side and the end surface of each leg portion are joined has an R shape.

  With this configuration, the end surfaces of the leg portions of the detection means are disposed so as to be substantially parallel to the tangent line of the cutting blade. As a result, the end surface of each leg is made substantially parallel so that it does not oppose the flow of the cutting fluid that rotates with the rotation of the cutting blade around the detection location. Thus, the cutting fluid is smoothly discharged from the surface of the light emitting element or the light receiving element. Therefore, it becomes difficult for the cutting fluid to adhere to the light emitting surface of the light emitting element and the light receiving surface of the light receiving element arranged in the detecting means, and a reduction in detection accuracy can be prevented.

  Furthermore, the shape of the corner portion where the inner side surface of each leg portion on the cutting blade side and the end surface of each leg portion are joined is a curved surface such as an R shape, so that the cutting fluid is surrounded around the light emitting element or the light receiving element. Even if it adheres, it tends to flow to the end face side of the leg along the curve. Therefore, the cutting fluid staying around the light emitting element and the light receiving element is easily discharged to the end face side of each leg.

  The detecting means can be arranged at an acute angle with respect to the tangent line on the outer periphery of the cutting blade from the upstream side in the cutting blade rotation direction. Here, the angle formed between the back surface of each leg portion on the downstream side in the rotation direction of the cutting blade and the end surface of each leg portion may be an acute angle. That is, since the acute angle portion is located downstream of the cutting blade rotation direction, the cutting fluid that is rotated by the cutting blade and adheres to the end surface concentrates on the acute angle portion, and the cutting fluid is easily detached from the acute angle portion of each leg. . The downstream side of the cutting blade rotation direction is the traveling direction side of the cutting blade with reference to the cutting blade detection position (that is, the position of the light emitting element or the light receiving element). Further, the upstream side of the cutting blade is the side opposite to the traveling direction of the cutting blade.

  Furthermore, the detection means may include a connecting portion that connects the pair of leg portions. Each leg part and connecting part may mutually connect a plurality of members formed separately, or may be integrally formed. The corner portion where the facing surface facing the cutting blade in the connecting portion and the front surface upstream of the connecting portion in the rotation direction of the cutting blade may be, for example, R-shaped. As a result, the corner of the connecting portion upstream of the cutting blade rotation direction is wide open, and the cutting fluid flows along the R shape, so that the cutting fluid flows without disturbing the flow of the cutting fluid accompanying the cutting blade. It can be discharged smoothly. Therefore, it becomes difficult for the cutting fluid to adhere to the surface of the light emitting element or the light receiving element, and a decrease in detection accuracy can be prevented.

  Further, in order to prevent the cutting fluid from adhering to the detection means, for example, the surface of the detection means may be subjected to sound blasting or coated with a hydrophilic substance. As the hydrophilic substance, for example, a surfactant or a hydrophilic resin can be used. As a result, the cutting fluid is less likely to adhere to the surface of the detection means, and a reduction in detection accuracy can be prevented.

  As described above, according to the present invention, it is possible to provide a cutting device that makes it difficult for the cutting fluid to adhere to the breakage detection sensor and that is easily discharged even if the cutting fluid adheres to the breakage detection sensor.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the present specification and drawings, components having substantially the same functional configuration are denoted by the same reference numerals, and redundant description is omitted.

(First embodiment)
First, based on FIG. 1, the cutting device concerning the 1st Embodiment of this invention is demonstrated. FIG. 1 is a perspective view showing the overall configuration of the dicing apparatus 10 according to the present embodiment.

  As shown in FIG. 1, the dicing apparatus 10 includes a cutting unit 20 that is a cutting unit that cuts a workpiece 12 such as a semiconductor wafer, and a chuck that is a workpiece holding unit that holds the workpiece 12. A table 15, a cutting unit moving mechanism (not shown), and a chuck table moving mechanism (not shown) are provided.

  The cutting unit 20 includes a cutting blade 22 mounted on a spindle (not shown). The cutting unit 20 cuts the workpiece 12 by cutting the workpiece 12 while rotating the cutting blade 22 at a high speed to form an extremely thin kerf.

  The chuck table 15 is, for example, a disk-shaped table having a substantially flat upper surface, and is provided with a vacuum chuck (not shown) on the upper surface. On the chuck table 15, for example, the workpiece 12 supported by the frame 14 via the wafer tape 13 is placed. The chuck table 15 stably holds the workpiece 12 by vacuum suction.

  The cutting unit moving mechanism moves the cutting unit 20 in the Y-axis direction. The Y-axis direction is a horizontal direction orthogonal to the cutting direction (X-axis direction), and coincides with the axial direction of the spindle extending in the cutting unit 20. By moving the cutting unit 20 in the Y-axis direction, the cutting edge of the cutting blade 22 can be aligned with the cutting position (cutting line) of the workpiece 12. The cutting unit moving mechanism also moves the cutting unit 20 in the Z-axis direction (vertical direction). Thereby, the cutting depth of the cutting blade 22 with respect to the workpiece 12 can be adjusted.

  The chuck table moving mechanism reciprocates the chuck table 15 holding the workpiece 12 in the cutting direction (X-axis direction) during the cutting process so that the cutting edge of the cutting blade 22 moves linearly with respect to the workpiece 12. Let it work with.

  The dicing apparatus 10 having such a configuration is arranged in a lattice shape of the workpiece 12 by relatively moving the cutting unit 20 and the chuck table 15 while cutting the cutting blade 22 rotating at high speed into the workpiece 12. Cutting multiple cutting lines. Thereby, the workpiece 12 can be diced and divided into a plurality of chips.

  Next, based on FIG. 2 and FIG. 3, the structure of the cutting unit 20 concerning this embodiment is demonstrated in detail. Here, FIG. 2 is a front view showing the cutting unit 20 according to the present embodiment. FIG. 3 is a right side view showing the cutting unit 20.

  As shown in FIG. 2, the cutting unit 20 mainly includes, for example, a cutting blade 22, a spindle 23, a blade cover 25, and a cutting fluid supply nozzle (blade cooler nozzle) 28.

  The cutting blade 22 is, for example, an extremely thin cutting grindstone having a substantially ring shape. The cutting blade 22 is attached to the tip of the spindle 23 by, for example, a flange and a nut. The cutting blade 22 according to the present embodiment is, for example, a hub blade in which a cutting grindstone portion 22 a disposed on the outer peripheral portion and a base portion 22 b for attaching the cutting grindstone portion 22 a to the spindle 23 are integrally configured. It is configured. However, the present invention is not limited to this example, and the cutting blade 22 may be a so-called washer blade, and may be pivotally attached to the spindle 23 by sandwiching both sides thereof with a flange and fixing with a nut.

  The spindle 23 is, for example, a rotating shaft for transmitting the rotational driving force of a motor (not shown) to the cutting blade 22, and the mounted cutting blade 22 can be rotated at a high speed of, for example, 30000 rpm. Most of the spindle is covered with a spindle housing (not shown), but its tip is exposed from the spindle housing, and a cutting blade 22 or the like is attached to the tip. The spindle extends in the Y-axis direction orthogonal to the cutting direction (X-axis direction). In this embodiment, it is assumed that the cutting blade 22 rotates in the direction of arrow F in FIG.

  The blade cover 25 is disposed so as to cover the outer periphery of the cutting blade 22, and is fixed to the tip of the spindle housing. The blade cover 25 protects the cutting blade 22 and prevents the cutting fluid, cutting waste, broken blade pieces, and the like accompanying the cutting from scattering outside the cutting unit 20. Specifically, the blade cover 25 includes, for example, a blade cover support portion 24 and an upper blade cover 26. The upper blade cover 26 is fixed and supported by the blade cover support portion 24 with screws or the like, and is disposed on the upper side (Z-axis positive direction side) of the cutting blade 22 so as to cover the outer periphery of the cutting blade 22.

  Further, the blade cover 25 is provided with a pair of cutting fluid supply nozzles (blade cooler nozzles) 28 for supplying the cutting fluid from the side surface side of the cutting blade 22. The cutting fluid supply nozzle 28 is disposed opposite to the front side and the back side of the cutting blade 22. The front surface of the cutting blade 22 is the side surface on the tip end side in the axial direction (Y-axis positive direction side) of the spindle 23, and the rear surface of the cutting blade 22 is the back side in the axial direction of the spindle 23 (Y-axis negative direction side). ) Side. The cutting fluid supply nozzle 28 injects the cutting fluid toward the lower portion of the side surface of the cutting blade 22 and the processing point. As the cutting fluid, for example, cutting water such as pure water or tap water can be used. By supplying the cutting fluid in this manner, the cutting blade 22 and the processing point can be cooled, and chipping can be prevented from occurring on the workpiece during the cutting process.

  Further, the blade cover 25 is provided with detection means 40 supported by the support base 50. Such detection means 40 detects breakage or wear of the cutting blade 22 during rotation of the cutting blade 22. The detection means 40 is fixed to the support base 50 by the first position adjustment bolt 51 and the second position adjustment bolt 56 of the detection means 40, and is arranged obliquely from the upstream side in the cutting blade rotation direction. At this time, the end face 43a of each leg 43 is substantially perpendicular to the straight line connecting the center position M of the end face 43a of the leg 43 of the detecting means 40 in the X-axis direction and the rotation center axis C of the cutting blade 22. It arrange | positions so that it may become.

  Further, as shown in FIG. 3, the detection means 40 includes a light emitting element 41a and a light receiving element 41b at each leg 43, 43, and a cutting blade between the optical axes connecting the light emitting element 41a and the light receiving element 41b. It is arranged so that 22 cutting edges are located. When the cutting blade 22 is broken, the light is not shielded by the cutting edge of the cutting blade (or the shielding amount is greatly reduced), so the amount of received light detected by the light receiving element 41b increases. This amount of received light is converted into an electrical signal by the photoelectric conversion unit and measured as a voltage value, and the voltage value increases as the amount of light received by the light receiving element 41b increases. Therefore, it is recognized that the cutting blade 22 is damaged when the measured voltage value is equal to or higher than a predetermined threshold value.

  The configuration of the cutting unit 20 according to the present embodiment has been described above. Next, based on FIG. 4 and FIG. 5, the detection means 40 that is a characteristic part of the present embodiment will be described in more detail. Such detection means 40 is characterized by having a shape that makes it difficult for the cutting fluid to adhere to the surface of the light emitting element 40a or the light receiving element 40b. FIG. 4 is an exploded perspective view showing the detection means 40 and the support base 50 according to the present embodiment. FIG. 5 is a perspective view showing the detection means 40 from the front surface upstream of the cutting blade rotation direction.

  As shown in FIG. 4, the detection means 40 is fixed to and supported by the support base 50 by two first position adjustment bolts 51, 51 and a second position adjustment bolt 56. The support base 50 is, for example, approximately L-shaped, and one surface constituting the approximately L-shaped is inclined by, for example, about 45 ° upstream of the cutting blade rotation direction with respect to the Z axis, and is disposed on the blade cover. The The detection means 40 is inserted along the inner surface 54 of the support base 50 having such a shape.

  A pair of guides 53 and 53 for guiding the detection means 40 are formed on the inner surface 54 of the support base 50. Further, the surface located between the pair of guides 53 is recessed so as to be fitted to the convex surface 40a of the detecting means 40. Slits 58 and 58 are formed in the recessed concave surface substantially in parallel with the guides 53 and 53. The detection means 40 inserted into the support base 50 is supported by screwing the first position adjusting bolts 51, 51 into the first through holes 48, 48 of the detection means 40 through the slits 58, 58. It is fixed to the base 50.

  Further, on the other surface of the support base 50, two through holes 52 through which the second through holes 57 and the optical fiber cables 42 and 42 respectively connected to the light emitting elements 41 a and the light receiving elements 41 b of the detection means 40 are inserted. , 52 are formed. The detecting means 40 inserted into the support base 50 is fixed to the support base 50 by screwing the second position adjusting bolt 56 with the second through hole 47 through the through hole 57.

  As described above, the detection means 40 is fixed to the support base 50 by the first position adjustment bolts 51 and 51 and the second position adjustment belt 56 from two orthogonal directions. By changing the fixing position of the detecting means 40 by the first position adjusting bolts 51 and 51 and the second position adjusting bolt 56, the light emitting element 41a and the light receiving element 41b are moved up and down to change the detection position of the cutting blade 22. Can be adjusted.

  As shown in FIG. 5, the detection means 40 is formed in, for example, a U-shape, and includes a pair of leg portions 43 and 43 and a connection portion 45 positioned between the pair of leg portions 43 and 43. Become. The shape of each leg part 43 and 43 can be made into a substantially square pole, for example. Here, with respect to the leg portion 43, the surface opposite to the surface 40c from which the optical fiber cables 42 and 42 extend is the end surface 43a, and the surface opposite to the cutting blade 22 (the installation surface of the light emitting element 41a and the light receiving element 41b). The inner surface 43b, the surface opposite to the inner surface 43b is the outer surface 43c, the upstream surface in the cutting blade rotation direction is the front surface 43d, and the downstream surface in the cutting blade rotation direction is the rear surface 43e. Further, the surface of the connecting portion 45 that faces the cutting blade 22 is referred to as a facing surface 45a.

  The end surface 43a of the leg portion 43 of the detection means 40 and the back surface 43e of the leg portion 43 have an acute angle, for example, about 45 °, and are arranged so that the acute angle portion is located downstream in the cutting blade rotation direction. As a result, the cutting fluid 60 that is rotated along with the rotation of the cutting blade 22 is better cut off, and the cutting fluid 60 can be prevented from staying around the light emitting element 41a or the light receiving element 41b. Furthermore, the flow of the cutting fluid 60 becomes a laminar flow, and the cutting fluid 60 can be smoothly discharged from the surfaces of the light emitting element 41a and the light receiving element 41b.

  Further, the corner portion 44 where the end surface 43a of the leg portion 43 and the inner side surface 43b of the leg portion 43 are joined has an R shape. Thus, by making this corner part into R shape, there exists an effect that the cutting fluid 60 by the side of the inner surface 43b of the leg part 43 can be discharged | emitted to the end surface 43a side. The effect of the radius of the R shape is about 1.5 mm or more. For example, the radius can be about 2.5 mm.

  On the other hand, the facing surface 45a of the connecting portion 45 of the detecting means 40 facing the cutting blade 22 and the back surface 40a of the connecting portion 45 form an acute angle so as not to contact the cutting blade 22. This acute angle is, for example, about 45 °, and can be formed substantially parallel to the end face 43 a of the leg 43. Moreover, the corner part 45b where the opposing surface 45a of the connection part 45 and the front surface 40b of the connection part 45 join is formed in R shape, for example. Thereby, it can prevent that the flow of the cutting fluid 60 in the cutting blade rotation direction upstream of the connection part 45 becomes a turbulent flow, and can discharge the cutting fluid 60 smoothly.

  A light emitting element 41a and a light receiving element 41b are arranged to face each other on the inner side surfaces 43b, 43b of the pair of leg portions 43, 43 of the detecting means 40 having such a shape. The light emitting element 41a and the light receiving element 41b are connected to the optical fiber cables 42 and 42 and emit or receive light. Then, as shown in FIG. 2, the end surface 43a of the leg portion 43 of the detection means 40 is changed from the center position M in the X-axis direction of the end surface 43a of the leg portion 43 of the detection means 40 to the rotation center axis C of the cutting blade 22. It is arranged so as to be substantially perpendicular to the straight line connecting In this way, by arranging the end face 43a of the leg 43 substantially parallel to the tangent line of the cutting blade 22, the end face 43a of each leg 43 of the detecting means 40 becomes substantially parallel to the flow of the cutting fluid. , The cutting fluid is easily discharged. Furthermore, with this structure, the flow of the cutting fluid becomes a laminar flow, and the cutting fluid can be smoothly discharged from the surfaces of the light emitting element 41a and the light receiving element 41b.

  The detection unit 40 according to the present embodiment has been described above. Next, based on FIG. 6 and FIG. 7, the difference in the flow of the cutting fluid 60 between the case where the detection means 40 according to the present embodiment is used and the case where the conventional detection means is used will be described. FIG. 6 shows the detection means 40 according to the present embodiment, where (a) is a left side view and (b) is a front view. FIGS. 7A and 7B show the conventional detection means 1, wherein FIG. 7A is a left side view and FIG. 7B is a front view.

  First, the flow of the cutting fluid 60 around the detection means 1 when the conventional detection means 1 is used will be described. As shown in FIG. 7A, in the conventional detection means 1, the corner portion 5 where the end surface 3a of the leg portion 3 and the inner side surface 3b of the leg portion 3 are joined is formed at a substantially right angle. For this reason, the cutting fluid 60 remains on the surfaces of the light emitting element 4a and the light receiving element 4b due to the surface tension of the cutting fluid 60, and the cutting fluid 60 stays on the sensor optical axis.

  Further, as shown in FIG. 7B, the angle formed between the back surface 3e of the leg 3 and the end surface 3a of the leg 3 is substantially a right angle. For this reason, when the detection means 1 is arranged at the detection position, the cutting fluid 60 is applied to the substantially perpendicular corner portion 7 where the front surface 3d of the leg portion 3 and the end surface 3a of the leg portion 3 are joined immediately below the sensor optical axis. It tends to stay and the cutting fluid 60 concentrates in the vicinity of the sensor optical axis. Further, since the shape of the corner portion 6 where the facing surface 6a facing the cutting blade 22 of the connecting portion of the detecting means 1 and the inner side surface 3b of the leg portion 3 are joined is substantially perpendicular, the cutting fluid 60 tends to stay. It was.

  Furthermore, the facing surface 6a facing the cutting blade 22 of the connecting portion is substantially parallel to the cutting blade tangential direction at the detection position. For this reason, the distance between the facing surface 6a of the connecting portion on the upstream side in the rotation direction of the cutting blade and the cutting blade 22 is narrow, and the cutting fluid 60 flowing in from the upstream side in the rotation direction of the cutting blade flows in a complicated manner. A turbulent flow occurs around the element 4b. Therefore, the cutting fluid 60 around the light emitting element 4a or the light receiving element 4b is not smoothly discharged.

  As described above, when the conventional detection means 1 is used, the cutting fluid 60 tends to stay in the corners 5, 6 and 7 that are substantially perpendicular, so that the cutting fluid 60 is formed on the surfaces of the light emitting element 4a and the light receiving element 4b. As a result, the light was refracted and reflected, and the damage was not accurately detected.

  On the other hand, in the detection means 40 according to the present embodiment, as shown in FIG. 6A, the corner portion 44 where the inner surface 43b of the leg portion 43 and the end surface 43a of the leg portion 43 are joined has an R shape. Yes. As a result, the cutting fluid 60 on the inner side surface 43 b of the leg 43 can flow in the direction of arrow A along the R shape and escape to the end surface 43 a side of the leg 43. Further, the corner portion 45c of the connecting portion 45 of the detecting means 40 where the facing surface 45a facing the cutting blade 22 and the inner side surface 43b of the leg portion 43 are joined may be formed in an R shape. In the conventional detection means 1, since the corner portion 6 was substantially perpendicular, the cutting fluid 60 was likely to stay. However, like the detection means 40 according to the present embodiment, the corner portion 45c has an R shape. The amount of the cutting fluid 60 that stays in the corner portion 45c can be reduced.

  Further, as described above, the angle formed between the back surface 43e of the leg portion 43 and the end surface 43a of the leg portion 43 is formed at an acute angle (for example, 45 °) in order to improve drainage. The detection means 40 is arranged so that the end surface 43 a of the leg 43 is substantially parallel to the tangent line of the cutting blade 22. For this reason, the cutting fluid 60 flows in the direction of arrow B in FIG. 6 (b) according to the flow of the attached cutting fluid 60, and the cutting fluid 60 can be moved away from the optical axis.

  In addition, the corner portion 45b where the opposing surface 45a of the connecting portion 45 and the front surface 40b of the detecting means 40 are joined is formed in an R shape, so that the cutting fluid 60 flows in an orderly manner. As described above, the flow of the cutting fluid 60 becomes a laminar flow, so that the cutting fluid 60 can be smoothly discharged from the surfaces of the light emitting element 41a and the light receiving element 41b.

  Thus, like the detection means 40 according to the present embodiment, the corner portion in which the cutting fluid 60 is likely to stay is formed in an R shape, so that the cutting fluid 60 is less likely to stay and the light emitting element 41a and the light receiving element 41b The cutting fluid 60 can be made difficult to adhere to the surface. Therefore, it is possible to prevent the accuracy of detecting the cutting blade breakage from being lowered.

  Furthermore, the cutting fluid 60 can be made less likely to adhere to the surface of the detection means 40 than when, for example, a sound blast process or a hydrophilic substance coating process is performed. The hydrophilic coding process is performed, for example, by spraying a liquid containing a hydrophilic substance by spraying or the like. As the hydrophilic substance, for example, a hydrophilic resin such as a surfactant, hydrophilic silicon, hydrophilic acrylic, and hydrophilic urethane can be used.

  The detection unit 40 according to the first embodiment has been described above. By configuring the breakage detection means 40 of the cutting blade 22 of the dicing apparatus 10 as described above, it is possible to make it difficult for the cutting fluid 60 to stay around the detection means 40. Thereby, it is possible to make it difficult for the cutting fluid 60 to adhere to the surface of the light emitting element 41a or the light receiving element 41b, and to prevent a decrease in detection accuracy. Next, an experiment was conducted to verify the effect of the detection means 40 having the above structure. The contents of the experiment are described below.

(Experiment: Comparison of light transmission due to differences in detection means shape)
In this experiment, the amount of light detected by each of the detection means is measured and stabilized by the light receiving element when the detection means 40 according to the first embodiment is used and when the conventional detection means 1 is used. From the viewpoint of whether or not the light can be received.

  The experiment was performed using the dicing apparatus 10 according to the first embodiment, and the detection means 40 according to the first embodiment was mounted on a blade cover whose spindle axial width was reduced by about 30% of the conventional one. The measurement was performed for the case where the conventional detection means 1 was inserted and the case where the conventional detection means 1 was inserted. Then, the cutting edge of the 2-inch cutting blade 22 is cut, and a cutting blade formed so that the cutting blade 22 does not exist on the optical axis connecting the light emitting element and the light receiving element of the detecting means is attached to the spindle, The spindle was rotated at a rotational speed of 60000 rpm / min. Here, the measured light quantity is converted into a voltage value. In this experiment, the voltage value in the state where there is no workpiece on the optical axis was adjusted to 5V.

  In this state, the flow rate of the cutting fluid 60 is changed to 0.5 liter / minute, 1.0 liter / minute, and 1.5 liter / minute, and the amount of light when the light receiving element receives the light emitted from the light emitting element is changed. It was measured. The results are shown in FIGS. In addition, FIG. 8 is a graph which shows the permeation | transmission amount average value when the detection means 40 concerning this embodiment is used. FIG. 9 is a graph showing the average transmission amount when the conventional detection means 1 is used.

  When the conventional detection means 1 was used, the transmission amount of the detected light varied as shown in FIG. This is considered because the cutting fluid 60 adhered to the surface of the light emitting element 4a or the light receiving element 4b, and the light was refracted and scattered by the adhered cutting fluid 60. For this reason, the amount of light actually received and the amount of light originally received are different, and the amount of transmitted light cannot be measured accurately.

  On the other hand, when the detection means 40 according to the first embodiment is used, as shown in FIG. 8, the detected transmission amount stably shows a substantially constant value. This is considered because the cutting fluid 60 is easily discharged from the periphery of the detection means 40 due to the shape of the detection means 40. For this reason, the cutting fluid 60 is less likely to adhere to the surface of the light emitting element 43a or the light receiving element 43b, and light refraction and scattering are less likely to occur. Therefore, the amount of transmitted light can be measured more accurately by using the detection means 40 according to the first embodiment.

  As mentioned above, although preferred embodiment of this invention was described referring an accompanying drawing, it cannot be overemphasized that this invention is not limited to the example which concerns. It will be apparent to those skilled in the art that various changes and modifications can be made within the scope of the claims, and these are naturally within the technical scope of the present invention. Understood.

  For example, in the above embodiment, the detection means 40 is used for detecting breakage of the cutting blade 22, but the present invention is not limited to such an example. The detection means 40 can be applied as long as it measures the side surface including the cutting edge of the cutting blade. For example, the detection means 40 can be used to detect the reference position in the height direction of the cutting blade or to detect wear of the cutting blade. can do.

  Moreover, in the said embodiment, although the shape of the detection means 40 was a substantially U shape, this invention is not limited to this example, For example, it forms only with a pair of leg part, without providing a connection part. You can also.

  Furthermore, although the said embodiment gave and demonstrated the example of the dicing apparatus 10 as a cutting device, without providing a connection part, this invention is not limited to this example. For example, as long as it is a device that cuts the workpiece 12 using a cutting blade 22 that rotates at high speed with a spindle, various cutting devices that perform cutting other than dicing may be used.

  The present invention can be applied to a cutting apparatus, and in particular, can be applied to a cutting apparatus provided with a detecting means for detecting a state such as breakage or wear of the cutting blade, a position of the cutting blade, and the like.

1 is a perspective view showing a dicing apparatus according to a first embodiment of the present invention. It is a front view which shows the cutting unit of the cutting device concerning the embodiment. It is a right view which shows the cutting unit of the cutting device concerning the embodiment. It is a disassembled perspective view which shows the detection means and support base concerning the embodiment. It is a perspective view which shows the detection means concerning the embodiment. It is the left view (a) which showed the detection means concerning the embodiment, and the front view (b). It is the left view (a) which showed the conventional detection means, and the front view (b). It is a graph which shows the permeation | transmission amount average value when the detection means concerning the 1st Embodiment of this invention is used. It is a graph which shows the permeation | transmission amount average value when the conventional detection means is used.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Dicing apparatus 20 Cutting unit 22 Cutting blade 23 Spindle 40 Detection means 41a Light emitting element 41b Light receiving element 42 Optical fiber cable 43 Leg part 45 Connecting part 50 Support base 51 First position adjusting bolt 56 Second position adjusting bolt 60 Cutting fluid

Claims (4)

Based on the amount that the cutting blade attached to the tip of the spindle, the blade cover that covers the cutting blade, and the optical axis that connects the light emitting element and the light receiving element that are arranged to face each other are shielded by the cutting edge of the cutting blade, In a cutting device comprising: detecting means for detecting the state of the cutting blade:
The detection means has a pair of legs that respectively support the light emitting element and the light receiving element on both sides of the cutting edge of the cutting blade,
The end face of each leg is arranged perpendicular to a straight line connecting the center position of the end face of the leg and the rotation center axis of the cutting blade,
The corners end face and are bonded to said inner surface of the cutting blade side each leg of each leg, Ri R shape der,
The detection means is disposed at an acute angle from the upstream side in the rotation direction of the cutting blade with respect to the tangent of the outer periphery of the cutting blade,
The cutting apparatus according to claim 1, wherein an angle formed between a back surface of each leg portion on the downstream side in the rotation direction of the cutting blade and an end surface of each leg portion is an acute angle . A connecting portion for connecting the pair of legs,
2. The cutting apparatus according to claim 1 , wherein a corner portion of the coupling portion where the facing surface facing the cutting blade and the front surface upstream of the cutting blade rotation direction are R-shaped. The cutting device according to claim 1 or 2 , wherein the surface of the detecting means is subjected to a sound blasting process. The cutting device according to claim 1 or 2 , wherein a surface of the detection means is coated with a hydrophilic substance.

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