CN112254862A - Piezoelectric Multidimensional Sensor Based on Crack Sensing - Google Patents
Piezoelectric Multidimensional Sensor Based on Crack Sensing Download PDFInfo
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- 238000012360 testing method Methods 0.000 claims abstract description 14
- 230000035945 sensitivity Effects 0.000 abstract description 4
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- 238000005259 measurement Methods 0.000 description 11
- 238000005452 bending Methods 0.000 description 7
- 239000000758 substrate Substances 0.000 description 4
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- 238000007906 compression Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
- G01L5/167—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using piezoelectric means
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Abstract
The invention discloses a piezoelectric multi-dimensional sensor based on crack sensing, which comprises: the deformation beam comprises a test beam extending in the multi-axis direction; the crack sensing elements are fixed on the surface of the test beam and comprise a base body, a crack and a piezoelectric material, the crack is formed along the inner concave of one side of the base body and penetrates through the base body in the thickness direction, the crack is provided with a tip end portion, and the piezoelectric material is arranged on the base body on one side of the tip end portion of the crack. The invention has the advantages of high sensitivity, simple structure and no need of external power supply voltage.
Description
Technical Field
The invention belongs to the technical field of force sensors, and particularly relates to a piezoelectric type multidimensional sensor based on crack sensing.
Background
The current design of six-dimensional sensors is mainly based on the principle of resistance strain gauges. Chinese patent CN111272328A proposes a high-sensitivity low-coupling six-dimensional sensor, which has a simple structure and a low coupling degree between dimensions, and can measure forces and moments in six dimensions, but the measurement accuracy is easily affected by the ambient temperature and can be further improved, and meanwhile, a plurality of strain gauges need to additionally use a supply voltage to operate, and the power consumption is relatively high.
Therefore, in view of the above technical problems, it is necessary to provide a piezoelectric multi-dimensional sensor based on crack sensing.
Disclosure of Invention
The invention aims to provide a piezoelectric multi-dimensional sensor based on crack sensing, which can convert an external force signal into a voltage output, has the advantages of ensuring extremely high sensitivity, having a simple structure, avoiding the need of external power supply voltage and the like, and solves the problems in the prior art.
In order to achieve the above object, an embodiment of the present invention provides the following technical solutions:
in one embodiment, a crack sensing based piezoelectric multi-dimensional sensor is provided, comprising:
the deformation beam comprises a test beam extending in the multi-axis direction;
the crack sensing elements are fixed on the surface of the test beam and comprise a base body, a crack and a piezoelectric material, the crack is formed along the inner concave of one side of the base body and penetrates through the base body in the thickness direction, the crack is provided with a tip end portion, and the piezoelectric material is arranged on the base body on one side of the tip end portion of the crack.
As a further improvement of the invention, the surface of the test beam is provided with grooves, each groove is internally provided with one crack sensing element in a matching way, and the side surface of each crack sensing element is fixedly attached to the side wall of the corresponding groove.
As a further development of the invention, the recess has a side surface which is arranged in an open manner and the crack detection element has a crack arrangement direction which is perpendicular to the side surface.
As a further improvement of the invention, the grooves are square.
As a further improvement of the invention, the deformation beam further comprises an annular substrate, and the bottom end of the test beam is supported and fixed on the substrate.
As a further improvement of the invention, the test beam comprises an x-direction beam and a y-direction beam, wherein a crack sensing element for measuring a y-direction force is embedded on the horizontal surface of the x-direction beam, and a crack sensing element for measuring the x-direction force is embedded on the horizontal surface of the y-direction beam.
As a further improvement of the invention, the crack sensing elements for measuring the x-direction force are respectively R1 and R2, are adhered in the horizontal surface groove of the y-direction beam and are symmetrical about the x axis, and the opening direction of the crack is parallel to the x axis.
As a further improvement of the invention, the crack sensing elements for measuring the y-direction force are respectively R3 and R4, are adhered in the horizontal surface groove of the x-direction beam and are symmetrical about the y axis, and the opening direction of the crack is parallel to the y axis.
As a further improvement of the invention, crack sensing elements R5 and R6 for measuring z-direction force are embedded on the x-direction beam and/or the y-direction beam, are pasted in the vertical surface groove of the x-direction beam and are symmetrical about the y axis, and the direction of the crack is parallel to the z axis, and/or are pasted in the vertical surface groove of the y-direction beam and are symmetrical about the x axis, and the direction of the crack is parallel to the z axis.
As a further improvement of the invention, the test beam further comprises a rectangular beam, the rectangular beam uniformly extends from the tail end of the x-direction beam and/or the y-direction beam along a clockwise direction or a counterclockwise direction, and crack sensing elements for measuring x-direction moment, y-direction moment and z-direction moment are embedded on the rectangular beam.
And taking the straight line where the x-direction beam and the y-direction beam are positioned as the x direction and the y direction, taking the direction perpendicular to the x-direction beam and the y-direction beam as the z direction, and respectively connecting the tail ends of the x-direction beam and the y-direction beam with one rectangular beam to form a swastika structure.
As a further improvement of the swastika-shaped beam production method, the swastika-shaped beam production method further comprises a vertical beam which is arranged along the direction perpendicular to the plane where the swastika-shaped beam is located, the top end of the vertical beam is connected with the tail end of the corresponding rectangular cross beam, and the bottom end of the vertical beam is connected with the substrate.
As a further improvement of the invention, the substrate is a rectangular annular outer frame.
As a further improvement of the invention, crack sensing elements for measuring the x-direction moment are R7 and R8, respectively, are adhered in the vertical surface groove of a rectangular beam connected with the x-direction beam, are symmetrical about the y-axis, and have the crack direction parallel to the z-axis.
As a further improvement of the invention, crack sensing elements for measuring the y-direction moment are respectively R9 and R10, are adhered in the vertical surface groove of the rectangular beam connected with the y-direction beam, are symmetrical about the x-axis, and have the crack direction parallel to the z-axis.
As a further improvement of the invention, the crack sensing elements for measuring the z-direction moment are respectively R11, R12, R13 and R14, are pasted in the upper surface groove of the rectangular beam connected with the x-direction beam and the y-direction beam, are symmetrical about the origin, and the direction of the crack points to the inside of the multidimensional sensor.
As a further improvement of the invention, the longitudinal sections of the x-direction beam, the y-direction beam, the rectangular beam and the rectangular outer frame and the cross section of the vertical beam are all square.
As a further improvement of the invention, the x-direction cross beam and the y-direction cross beam form a cross beam, and the center of the cross beam is provided with a force application hole for applying force and moment.
Compared with the prior art, the invention has the beneficial effects that:
(1) based on the stress concentration effect of the crack tip, the externally applied force can be accurately captured and amplified by the crack sensing element through the deformation of the cross beam or the rectangular beam, so that the measurement sensitivity is extremely high.
(2) The piezoelectric material adopted in the crack sensing element can directly convert a force signal into an electric signal for output, and does not need to additionally use a power supply voltage for working, so that the complexity of the structure is reduced, and the energy consumption is saved.
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In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments described in the present application, and other drawings can be obtained by those skilled in the art without creative efforts.
FIG. 1 is a schematic overall structure diagram of a piezoelectric multi-dimensional sensor based on crack sensing according to an embodiment of the present disclosure;
FIG. 2 is a partial schematic view of a crack sensor element embedding location in one embodiment of the present application;
FIG. 3 is a schematic view of the crack sensing element location 1 in one embodiment of the present application;
FIG. 4 is a schematic illustration of the location of a crack sensing element in an embodiment of the present application 2.
Detailed Description
The present invention will be described in detail below with reference to embodiments shown in the drawings. The embodiments are not intended to limit the present invention, and structural, methodological, or functional changes made by those skilled in the art according to the embodiments are included in the scope of the present invention.
Referring to fig. 1, an embodiment of the present application provides a piezoelectric multi-dimensional sensor based on crack sensing, which includes a rectangular outer frame 1, a deformation beam, a vertical beam 3, and a crack sensing element R.
The swastika-shaped beam is formed by the deformation beam, the deformation beam comprises a swastika-shaped beam 5 and four rectangular beams 4 uniformly extending from the tail end of the swastika-shaped beam 5 along the clockwise direction or the anticlockwise direction, 14 square grooves 7 are symmetrically formed in the swastika-shaped beam 5 and the rectangular beams 4, each groove 7 is provided with a side face which is open, and the grooves 7 are used for installing the crack sensing element R; the cross beam 5 is preferably provided with four force application holes 2 in the center for the application of forces and moments.
Two crossbeams of the cross crossbeam 5 are respectively called an x-direction crossbeam and a y-direction crossbeam, the straight lines of the crossbeams are used as an x axis and a y axis, and the direction vertical to the cross crossbeam is used as a z axis.
The four vertical beams 3 are arranged along the z axis (perpendicular to the plane direction of the swastika-shaped beam), the top ends of the vertical beams 3 are connected with the tail ends of the corresponding rectangular cross beams 4, and the bottom ends of the vertical beams 3 are connected with the rectangular outer frame 1.
The cross beams 5, the rectangular cross beams 4 and the rectangular outer frame 1 are preferably square in longitudinal section and the cross section of the vertical beams 3.
Referring to fig. 2, the crack sensing element R is embedded in the groove 7 and fixedly arranged with the side surface of the groove 7, and is used for measuring the x-direction force, the y-direction force, the z-direction force, the x-direction moment, the y-direction moment and the z-direction moment.
Wherein, the crack sensing elements R for measuring the x-direction force, the y-direction force and the z-direction force are all embedded in the grooves of the cross beam 5, and the crack sensing elements for measuring the x-direction moment, the y-direction moment and the z-direction moment are all embedded on the rectangular beam 4.
The crack sensing element R embedded in the beam groove 7 has three side surfaces in contact with the beam groove 7 bonded by strong adhesive bonding, and a lower surface in free contact with the groove bottom surface to ensure smooth opening and closing of the crack sensing element R.
The crack sensor element R includes a base body 8, a crack 9, and a piezoelectric material 10, the base body 8 is configured in a shape matching the shape of the groove 7, the crack 9 is formed along the base body 8 from a side surface of the groove 7 in an open arrangement and penetrates through the base body 8 in the thickness direction, the crack 9 has a tip portion, and the piezoelectric material 10 is embedded on the base body 8 on the side of the tip portion of the crack 9 for converting a vibration signal generated by the crack 8 into an electric signal.
There are several crack sensing elements R, and in this example, there are preferably 14 crack sensing elements R in total, the corresponding numbers are R1, R2, R3, R4, R5, R6, R7, R8, R9, R10, R11, R12, R13, and R14, the arrangement positions are as shown in fig. 3 and 4, and all the crack sensing elements R are identical except for the numbers.
When the crack sensing element R is compressed and stretched, the surface of the piezoelectric material 10 has electric charge output, and the electric charge output is converted into voltage output through subsequent circuit processing, and the voltage output during compression and stretching is opposite under the condition of the same external force.
Specifically, in this embodiment:
crack sensing elements constituting the x-direction force measurement are R1 and R2, respectively, embedded in a horizontal surface groove (either the upper surface or the lower surface) of the y-direction beam, and are symmetrical about the x-axis with the crack orientation in the x-direction.
The crack sensing elements constituting the y-direction force measurement are R3 and R4, respectively, embedded in the horizontal surface groove of the x-direction beam (either the upper surface or the lower surface is acceptable), and are symmetrical about the y-axis with the crack orientation in the y-direction.
The crack sensing elements constituting the z-direction force measurement are R5, R6, respectively, embedded in the vertical surface grooves of the x-direction beam (either the right vertical surface or the left vertical surface is possible), and are symmetrical about the y-axis with the crack orientation in the z-direction.
In other embodiments, crack sensing elements R5 and R6, which form a z-direction force measurement, may also be affixed in a vertical surface groove of the y-beam in the cross beam and be symmetrical about the x-axis, with the direction of the crack parallel to the z-axis.
The crack sensing elements constituting the x-direction moment measurement are R7 and R8, respectively, embedded in the grooves of the outer side surface of the rectangular beam 4 connected to the x-direction beam and are symmetrical about the y-axis with the crack orientation in the z-direction.
The crack sensing elements constituting the y-direction moment measurement are R9 and R10, respectively, embedded in the grooves of the outer side surface of the rectangular beam 4 connected to the y-direction beam, and are symmetrical about the x-axis with the crack orientation in the z-direction.
The crack sensing elements forming the z-direction moment measurement are respectively R11, R12, R13 and R14, are embedded in the upper surface groove of the rectangular beam 4 connected with the cross beam 5, are symmetrical about the origin, and have crack directions pointing to the inside of the sensor.
The measurement principle of the sensor of the embodiment is as follows:
the input force acts on the force application hole 2, the cross beam generates bending deformation due to the action of force, cracks in the crack sensing element R on the cross beam can generate compression and stretching effects due to the deformation of the cross beam, the tips of the cracks can generate a stress concentration effect at the moment, piezoelectric materials in the tip region generate charges due to the stress of the tips and are converted into voltage to be output through an external circuit, the voltage generated by compression and stretching has positive and negative values, and the stress direction of each shaft can be judged through the positive and negative values of the voltage. Specifically, the method comprises the following steps:
(1) when positive force in the x direction acts on the six-dimensional sensor, the y direction cross beam generates bending deformation, the crack sensing elements R1 and R2 are extruded by the deformation of the cross beam in the x direction, so that the crack tips generate a stress concentration effect, the piezoelectric materials in the tip regions generate charge output and are converted into voltage output through an external circuit, the magnitude of the force in the x direction can be judged according to the magnitude of the voltage output, and when negative force in the x direction acts on the six-dimensional sensor, the voltage output is opposite to the positive force.
(2) When a positive force in the y direction acts on the six-dimensional sensor, the x-direction beam generates bending deformation, the crack sensing elements R3 and R4 are stretched by the deformation of the beam in the y direction, so that the crack tips generate a stress concentration effect, the piezoelectric materials in the tip regions generate charge output and are converted into voltage output through an external circuit, the magnitude of the force in the y direction can be judged according to the magnitude of the voltage output, and when a negative force in the y direction acts on the six-dimensional sensor, the voltage output is opposite to the positive force.
(3) When positive force in the z direction acts on the six-dimensional sensor, the x-direction cross beam generates bending deformation, the crack sensing elements R5 and R6 are extruded by the deformation of the cross beam in the x direction, so that the crack tips generate a stress concentration effect, the piezoelectric materials in the tip regions generate charge output and are converted into voltage output through an external circuit, the magnitude of the force in the z direction can be judged according to the magnitude of the voltage output, and when negative force in the z direction acts on the six-dimensional sensor, the voltage output is opposite to the positive force.
(4) When x acts on the six-dimensional sensor to clockwise moment, x can produce bending deformation to the continuous rectangle crossbeam of crossbeam, crack sensing element R7, R8 can receive the tensile that the rectangle crossbeam warp in the x direction, make the crack tip produce stress concentration effect, thereby piezoelectric material in the tip region can produce charge output, and convert voltage output into through external circuit, according to voltage output size, can judge the size of x to clockwise moment, when x is acted on the six-dimensional sensor to anticlockwise moment power, voltage output is opposite with clockwise moment.
(5) When y acts on the six-dimensional sensor to clockwise moment, the rectangular beam that the y links to each other to the crossbeam can produce bending deformation, crack sensing element R9, R10 can receive the tensile that the rectangular beam warp in the x direction, make the crack tip produce stress concentration effect, thereby piezoelectric material in the tip region can produce charge output, and convert voltage output into through external circuit, according to voltage output size, can judge the size of y to clockwise moment, when y is acted on the six-dimensional sensor to anticlockwise moment power, voltage output is opposite with clockwise moment.
(6) When z is to clockwise moment effect on six-dimensional sensor, the rectangle crossbeam that the cross crossbeam links to each other can produce bending deformation, crack sensing element R11, R12, R13, R14 can receive the tensile of rectangle crossbeam deformation in the x direction for the crack tip produces stress concentration effect, thereby piezoelectric material in the tip region can produce charge output, and convert voltage output into through external circuit, according to voltage output size, can judge the size of z to clockwise moment, when z is to anticlockwise moment effect on six-dimensional sensor, voltage output is opposite with clockwise moment.
Compared with the prior art, the invention has the beneficial effects that:
(1) based on the stress concentration effect of the crack tip, the externally applied force can be accurately captured and amplified by the crack sensing element through the deformation of the cross beam or the rectangular beam, so that the measurement sensitivity is extremely high.
(2) The piezoelectric material adopted in the crack sensing element can directly convert a force signal into an electric signal for output, and does not need to additionally use a power supply voltage for working, so that the complexity of the structure is reduced, and the energy consumption is saved.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (10)
1. A piezoelectric multi-dimensional sensor based on crack sensing, comprising:
the deformation beam comprises a test beam extending in the multi-axis direction;
the crack sensing elements are fixed on the surface of the test beam and comprise a base body, a crack and a piezoelectric material, the crack is formed along the inner concave of one side of the base body and penetrates through the base body in the thickness direction, the crack is provided with a tip end portion, and the piezoelectric material is arranged on the base body on one side of the tip end portion of the crack.
2. The piezoelectric multidimensional sensor based on crack sensing of claim 1, wherein the surface of the test beam is provided with grooves, each groove is internally provided with one crack sensing element in a matching manner, and the side surfaces of the crack sensing elements are fixedly attached to the side walls of the grooves.
3. The piezoelectric multi-dimensional crack sensing based sensor according to claim 2, wherein the groove has a side surface with an open configuration, and the crack sensing element has a crack configuration perpendicular to the side surface.
4. The piezoelectric multi-dimensional crack sensing based sensor according to claim 1, wherein the deformation beam further comprises an annular base, and the bottom end of the test beam is supported and fixed on the base.
5. The piezoelectric multidimensional sensor based on crack sensing of claim 2, wherein the test beam comprises an x-direction beam and a y-direction beam, a crack sensing element for measuring a y-direction force is embedded on a horizontal surface of the x-direction beam, and a crack sensing element for measuring an x-direction force is embedded on a horizontal surface of the y-direction beam.
6. The piezoelectric multi-dimensional sensor based on crack sensing as claimed in claim 5, wherein the crack sensing elements for measuring the x-direction force are R1 and R2, respectively, are adhered in the horizontal surface groove of the y-direction beam and are symmetrical about the x-axis, and the opening direction of the crack is parallel to the x-axis.
7. The piezoelectric multi-dimensional sensor based on crack sensing as claimed in claim 5, wherein the crack sensing elements for measuring the y-direction force are R3 and R4, respectively, which are adhered in the horizontal surface groove of the x-direction beam and are symmetrical about the y-axis, and the opening direction of the crack is parallel to the y-axis.
8. The piezoelectric multidimensional sensor based on crack sensing of claim 5, wherein crack sensing elements R5 and R6 for measuring z-direction force are embedded on the x-direction beam and/or the y-direction beam, are pasted in a vertical surface groove of the x-direction beam and are symmetrical about the y-axis, and the direction of the crack is parallel to the z-axis, and/or are pasted in a vertical surface groove of the y-direction beam and are symmetrical about the x-axis, and the direction of the crack is parallel to the z-axis.
9. The piezoelectric multidimensional sensor based on crack sensing of claim 5, wherein the test beam further comprises a rectangular beam, the rectangular beam uniformly extends from the end of the x-direction beam and/or the y-direction beam along a clockwise direction or a counterclockwise direction, and crack sensing elements for measuring x-direction moment, y-direction moment and z-direction moment are embedded on the rectangular beam.
10. The piezoelectric multi-dimensional sensor based on crack sensing as claimed in claim 9, wherein the crack sensing elements for measuring the x-direction moment are R7 and R8, respectively, are adhered in the vertical surface groove of the rectangular beam connected to the x-direction beam, and are symmetrical about the y-axis, and the direction of the crack is parallel to the z-axis;
and/or
Crack sensing elements for measuring the y-direction moment are respectively R9 and R10, are pasted in a groove on the vertical surface of a rectangular cross beam connected with the y-direction cross beam, are symmetrical about the x axis, and have the crack direction parallel to the z axis;
and/or
The crack sensing elements for measuring the z-direction moment are respectively R11, R12, R13 and R14, are pasted in the grooves of the upper surface of the rectangular beam connected with the x-direction beam and the y-direction beam, are symmetrical about the origin, and the direction of the crack points to the inside of the multi-dimensional sensor.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113112024A (en) * | 2021-04-12 | 2021-07-13 | 西南石油大学 | Prediction and control method and system for random multi-crack random expansion |
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| US4924708A (en) * | 1989-02-09 | 1990-05-15 | General Electric Company | Method for calculating crack lengths of conductive sensors |
| CN1841032A (en) * | 2005-03-28 | 2006-10-04 | 发那科株式会社 | Six-axis force sensor |
| CN105067439A (en) * | 2015-08-26 | 2015-11-18 | 中国特种设备检测研究院 | Crack tip strain field sensor and measuring method thereof |
| CN204924795U (en) * | 2015-08-26 | 2015-12-30 | 中国特种设备检测研究院 | Crack tip strain field sensor |
| CN111272328A (en) * | 2020-02-25 | 2020-06-12 | 东南大学 | High-sensitivity low-dimensional coupling six-dimensional force sensor |
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2020
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4924708A (en) * | 1989-02-09 | 1990-05-15 | General Electric Company | Method for calculating crack lengths of conductive sensors |
| CN1841032A (en) * | 2005-03-28 | 2006-10-04 | 发那科株式会社 | Six-axis force sensor |
| CN105067439A (en) * | 2015-08-26 | 2015-11-18 | 中国特种设备检测研究院 | Crack tip strain field sensor and measuring method thereof |
| CN204924795U (en) * | 2015-08-26 | 2015-12-30 | 中国特种设备检测研究院 | Crack tip strain field sensor |
| CN111272328A (en) * | 2020-02-25 | 2020-06-12 | 东南大学 | High-sensitivity low-dimensional coupling six-dimensional force sensor |
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| CN113112024A (en) * | 2021-04-12 | 2021-07-13 | 西南石油大学 | Prediction and control method and system for random multi-crack random expansion |
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Application publication date: 20210122 |
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