CN106643463A - Flexible full-bridge resistance strain sheet - Google Patents
Flexible full-bridge resistance strain sheet Download PDFInfo
- Publication number
- CN106643463A CN106643463A CN201611176264.8A CN201611176264A CN106643463A CN 106643463 A CN106643463 A CN 106643463A CN 201611176264 A CN201611176264 A CN 201611176264A CN 106643463 A CN106643463 A CN 106643463A
- Authority
- CN
- China
- Prior art keywords
- resistance strain
- sensing unit
- strain sensing
- electrode
- bridge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims abstract description 16
- 239000011888 foil Substances 0.000 claims description 3
- 238000009413 insulation Methods 0.000 claims description 2
- 238000005259 measurement Methods 0.000 description 17
- 230000035945 sensitivity Effects 0.000 description 8
- 210000004204 blood vessel Anatomy 0.000 description 6
- 230000008859 change Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 239000002473 artificial blood Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000005452 bending Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 239000002041 carbon nanotube Substances 0.000 description 2
- 229910021393 carbon nanotube Inorganic materials 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000002238 carbon nanotube film Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000004205 dimethyl polysiloxane Substances 0.000 description 1
- 235000013870 dimethyl polysiloxane Nutrition 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 description 1
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 description 1
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
- G01B7/18—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in resistance
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
本发明属于应变片相关技术领域，其公开了一种柔性全桥式电阻应变片，所述柔性全桥式电阻应变片包括柔性基底、电阻应变传感单元、中间绝缘层及覆盖层。所述电阻应变传感单元包括构成惠斯通全桥电路的第一电阻应变传感单元、第二电阻应变传感单元、第三电阻应变传感单元及与第四电阻应变传感单元。所述第三电阻应变传感单元及所述第四电阻应变传感单元均贴附在所述柔性基底上；所述中间绝缘层覆盖所述第三电阻应变传感单元及所述第四电阻应变传感单元；所述第一电阻应变传感单元及所述第二电阻应变传感单元贴附在所述中间绝缘层上；所述覆盖层覆盖所述第一电阻应变传感单元及所述第二电阻应变传感单元。
The invention belongs to the related technical field of strain gauges, and discloses a flexible full-bridge resistance strain gauge. The flexible full-bridge resistance strain gauge comprises a flexible base, a resistance strain sensing unit, an intermediate insulating layer and a covering layer. The resistance strain sensing unit includes a first resistance strain sensing unit, a second resistance strain sensing unit, a third resistance strain sensing unit and a fourth resistance strain sensing unit constituting a Wheatstone full bridge circuit. Both the third resistance strain sensing unit and the fourth resistance strain sensing unit are attached on the flexible substrate; the intermediate insulating layer covers the third resistance strain sensing unit and the fourth resistance strain sensing unit A strain sensing unit; the first resistance strain sensing unit and the second resistance strain sensing unit are attached to the intermediate insulating layer; the covering layer covers the first resistance strain sensing unit and the Describe the second resistance strain sensing unit.
Description
技术领域technical field
本发明属于应变片制造相关技术领域，更具体地，涉及一种柔性全桥式电阻应变片。The invention belongs to the related technical field of strain gauge manufacturing, and more specifically relates to a flexible full-bridge resistance strain gauge.
背景技术Background technique
电阻应变片作为一种高精度测量元件，是利用与被测构件一起变形来测量构件的真实应变。在不同的工况下，电阻应变片的测量方法不同。对于几何形状规则的被测构件，传统测量方法通常是将四个单独的电阻应变片两两对称粘贴在被测构件的上下表面组成惠斯通全桥电路进行测量，使用该方法能够实现电阻应变片温度补偿，同时使输出电压的灵敏度最大。然而，此方法需要粘贴四次电阻应变片，这将给测量结果带来极大的误差，同时也增加了人力成本，降低了测量的效率。当被测构件几何形状不规则时，传统应变片无法在被测构件上形成有效的惠斯通全桥电路，只能采用单个电阻应变片测量，但单臂测量存在温度漂移误差，将会导致测量结构不准确，且影响输出电压的灵敏度。As a high-precision measuring element, the resistance strain gauge is used to measure the real strain of the component by deforming together with the measured component. Under different working conditions, the measurement methods of resistance strain gauges are different. For the measured component with regular geometric shape, the traditional measurement method is usually to paste four separate resistance strain gauges symmetrically on the upper and lower surfaces of the measured component to form a Wheatstone full-bridge circuit for measurement. Using this method, the resistance strain can be realized. chip temperature compensation while maximizing output voltage sensitivity. However, this method needs to paste the resistance strain gauges four times, which will bring great errors to the measurement results, and also increase the labor cost and reduce the efficiency of the measurement. When the geometric shape of the measured component is irregular, the traditional strain gauge cannot form an effective Wheatstone full-bridge circuit on the measured component, and only a single resistance strain gauge can be used for measurement, but there is a temperature drift error in the single-arm measurement, which will cause The measurement structure is inaccurate and affects the sensitivity of the output voltage.
另外，在一些特殊工况中，通常需要对一些曲率变化较大的曲面或者结构较为复杂的薄壁构件进行测量，这些零件发生变形时，不仅有拉伸应变同时还有弯曲应变，而目前市面上在售的电阻应变片测量范围太小且不适合由曲率变化导致的应变测量的情形，无法满足工业需求。针对上述问题，本领域相关技术人员已经做了一些研究，如专利CN104142118记载了在柔性基底上用碳纳米管(CNT)纤维结构的CNT薄膜作为敏感栅，使得电阻应变片能够检测大于80％的应变；又如专利CN104880206记载了采用橡胶作为柔性基底，具有微米或者纳米间隙的金属薄膜作为敏感栅，制备了可以测量最大200％的应变的电阻应变片。以上所述两个专利都采用柔性材料作为基底材料，能够使应变片具有一定延展性，适合于大拉伸应变的情形，但由于敏感栅的结构中含有微米或者纳米间隙，当应变片被弯曲时，应变片的稳定性和可靠性不确定，影响测量的精确性，而且也不适合曲率变化导致的曲面应变。相应地，本领域存在着发展一种能够适用于曲面应变测量的电阻应变片。In addition, in some special working conditions, it is usually necessary to measure some curved surfaces with large curvature changes or thin-walled components with complex structures. When these parts are deformed, there are not only tensile strains but also bending strains. The resistance strain gauges sold on the Internet have too small measurement ranges and are not suitable for strain measurement caused by curvature changes, and cannot meet industrial needs. In view of the above problems, some researches have been done by those skilled in the art, such as patent CN104142118 which records that a CNT film with a carbon nanotube (CNT) fiber structure is used as a sensitive grid on a flexible substrate, so that the resistance strain gauge can detect more than 80% of the Strain; as another example, patent CN104880206 records that rubber is used as a flexible substrate, and a metal film with a micron or nanometer gap is used as a sensitive grid to prepare a resistance strain gauge that can measure a maximum strain of 200%. The above two patents both use flexible materials as the base material, which can make the strain gauge have certain ductility, which is suitable for the situation of large tensile strain. However, since the structure of the sensitive grid contains micron or nanometer gaps, when the strain gauge is bent When , the stability and reliability of the strain gauge are uncertain, which affects the accuracy of the measurement, and it is not suitable for the surface strain caused by the curvature change. Correspondingly, there is a need in the art to develop a resistance strain gauge suitable for measuring strain on curved surfaces.
发明内容Contents of the invention
针对现有技术的以上缺陷或改进需求，本发明提供了一种柔性全桥式电阻应变片，其基于电阻应变片的工作特点，针对柔性全桥式电阻应变片的结构及部件之间的连接关系进行了设计。所述柔性全桥式电阻应变片自身构造有惠斯通全桥电路，既实现了应变片温度补偿，又保证了输出电压的灵敏度，同时降低了成本，提高了测量效率。此外，中间绝缘层对应第一电阻应变传感单元及第二电阻应变传感单元的区域分别形成有凸台，使得所述柔性全桥式电阻应变片仅受平面拉伸应变时，也能够保证所述柔性全桥式电阻应变片全桥输出。In view of the above defects or improvement needs of the prior art, the present invention provides a flexible full-bridge resistance strain gauge, which is based on the working characteristics of the resistance strain gauge, aiming at the structure of the flexible full-bridge resistance strain gauge and the connection between components Relationships are designed. The flexible full-bridge resistance strain gauge itself is constructed with a Wheatstone full-bridge circuit, which not only realizes the temperature compensation of the strain gauge, but also ensures the sensitivity of the output voltage, reduces the cost, and improves the measurement efficiency. In addition, bosses are respectively formed in the areas of the intermediate insulating layer corresponding to the first resistance strain sensing unit and the second resistance strain sensing unit, so that when the flexible full-bridge resistance strain gauge is only subjected to plane tensile strain, it can also ensure The full-bridge output of the flexible full-bridge resistance strain gauge.
为实现上述目的，本发明提供了一种柔性全桥式电阻应变片，其包括柔性基底、电阻应变传感单元、中间绝缘层及覆盖层，其特征在于：In order to achieve the above object, the present invention provides a flexible full-bridge resistance strain gauge, which includes a flexible substrate, a resistance strain sensing unit, an intermediate insulating layer and a cover layer, and is characterized in that:
所述电阻应变传感单元包括第一电阻应变传感单元、与所述第一电阻应变传感单元间隔设置的第二电阻应变传感单元、与所述第二电阻应变传感单元间隔设置的第三电阻应变传感单元及与所述第三电阻应变传感单元间隔设置的第四电阻应变传感单元；The resistance strain sensing unit includes a first resistance strain sensing unit, a second resistance strain sensing unit spaced apart from the first resistance strain sensing unit, and a second resistance strain sensing unit spaced apart from the second resistance strain sensing unit. a third resistance strain sensing unit and a fourth resistance strain sensing unit spaced apart from the third resistance strain sensing unit;
所述第三电阻应变传感单元及所述第四电阻应变传感单元均贴附在所述柔性基底上；所述中间绝缘层设置在所述柔性基底上且覆盖所述第三电阻应变传感单元及所述第四电阻应变传感单元；所述第一电阻应变传感单元及所述第二电阻应变传感单元贴附在所述中间绝缘层上；所述覆盖层设置在所述中间绝缘层上且覆盖所述第一电阻应变传感单元及所述第二电阻应变传感单元；所述第一电阻应变传感单元、所述第二电阻应变传感单元、所述第三电阻应变传感单元及所述第四电阻应变传感单元构成惠斯通全桥电路。Both the third resistance strain sensing unit and the fourth resistance strain sensing unit are attached on the flexible substrate; the intermediate insulating layer is arranged on the flexible substrate and covers the third resistance strain sensor sensing unit and the fourth resistance strain sensing unit; the first resistance strain sensing unit and the second resistance strain sensing unit are attached on the intermediate insulating layer; the covering layer is arranged on the On the intermediate insulating layer and covering the first resistance strain sensing unit and the second resistance strain sensing unit; the first resistance strain sensing unit, the second resistance strain sensing unit, the third resistance strain sensing unit The resistance strain sensing unit and the fourth resistance strain sensing unit form a Wheatstone full bridge circuit.
进一步的，所述电阻应变单元的栅极为自相似结构。Further, the gate of the resistance strain unit has a self-similar structure.
进一步的，所述栅极为箔式片。Further, the grid is a foil sheet.
进一步的，所述电极包括第一电极、第二电极、第三电极、第四电极、第五电极、第六电极、第七电极及第八电极，所述第一电极及所述第二电极分别连接于所述第一电阻应变传感单元的两端；所述第三电极及所述第四电极分别连接于所述第二电阻应变传感单元的两端；所述第五电极及所述第六电极分别连接于所述第三电阻应变传感单元的两端；所述第七电极及所述第八电极分别连接于所述第四电阻应变传感单元的两端。Further, the electrodes include a first electrode, a second electrode, a third electrode, a fourth electrode, a fifth electrode, a sixth electrode, a seventh electrode and an eighth electrode, and the first electrode and the second electrode respectively connected to both ends of the first resistance strain sensing unit; the third electrode and the fourth electrode are respectively connected to both ends of the second resistance strain sensing unit; the fifth electrode and the The sixth electrode is respectively connected to two ends of the third resistance strain sensing unit; the seventh electrode and the eighth electrode are respectively connected to two ends of the fourth resistance strain sensing unit.
进一步的，所述中间绝缘层开设有间隔设置的第一通孔、第二通孔、第三通孔及第四通孔，所述第一电极及所述第八电极通过所述第一通孔相连，所述第二电极及所述第六电极通过所述第二通孔相连，所述第三电极及所述第七电极通过所述第三通孔相连，所述第四电极及所述第五电极通过所述第四通孔相连。Further, the intermediate insulating layer is provided with a first through hole, a second through hole, a third through hole and a fourth through hole arranged at intervals, and the first electrode and the eighth electrode pass through the first through hole. holes, the second electrode and the sixth electrode are connected through the second through hole, the third electrode and the seventh electrode are connected through the third through hole, the fourth electrode and the The fifth electrode is connected through the fourth through hole.
进一步的，所述中间绝缘层对应所述第一电阻应变传感单元及所述第二电阻应变传感单元的区域分别形成有凸台，即所述第一电阻应变传感单元及所述第二电阻应变传感单元分别设置在所述凸台上。Further, bosses are respectively formed in regions of the intermediate insulating layer corresponding to the first resistance strain sensing unit and the second resistance strain sensing unit, that is, the first resistance strain sensing unit and the second resistance strain sensing unit The two resistance strain sensing units are respectively arranged on the boss.
进一步的，两个所述凸台的形状及大小相同；所述凸台沿垂直于所述柔性基底的方向具有预定高度。Further, the shape and size of the two bosses are the same; the bosses have a predetermined height along a direction perpendicular to the flexible base.
总体而言，通过本发明所构思的以上技术方案与现有技术相比，本发明提供的柔性全桥式电阻应变片，其自身构造有惠斯通全桥电路，既实现了应变片温度补偿，又保证了输出电压的灵敏度，同时降低了成本，提高了测量效率。此外，中间绝缘层对应第一电阻应变传感单元及第二电阻应变传感单元的区域分别形成有凸台，使得所述柔性全桥式电阻应变片仅受平面拉伸应变时，也能够保证所述柔性全桥式电阻应变片全桥输出。Generally speaking, compared with the prior art through the above technical solutions conceived by the present invention, the flexible full-bridge resistance strain gauge provided by the present invention has a Wheatstone full-bridge circuit in its own structure, which not only realizes the temperature compensation of the strain gauge , and ensure the sensitivity of the output voltage, while reducing the cost and improving the measurement efficiency. In addition, bosses are respectively formed in the areas of the intermediate insulating layer corresponding to the first resistance strain sensing unit and the second resistance strain sensing unit, so that when the flexible full-bridge resistance strain gauge is only subjected to plane tensile strain, it can also ensure The full-bridge output of the flexible full-bridge resistance strain gauge.
附图说明Description of drawings
图1是本发明第一实施方式提供的柔性全桥式电阻应变片的结构示意图。Fig. 1 is a schematic structural diagram of a flexible full-bridge resistance strain gauge provided by the first embodiment of the present invention.
图2是图1中的柔性全桥式电阻应变片沿A-A方向的剖视图。Fig. 2 is a cross-sectional view of the flexible full-bridge resistance strain gauge in Fig. 1 along the direction A-A.
图3是图1中的柔性全桥式电阻应变片的电阻应变传感单元联接成的惠斯通全桥电路的示意图。FIG. 3 is a schematic diagram of a Wheatstone full-bridge circuit formed by connecting the resistance strain sensing units of the flexible full-bridge resistance strain gauge in FIG. 1 .
图4是图1中的柔性全桥式电阻应变片的电阻应变传感单元的栅极的示意图。FIG. 4 is a schematic diagram of the gate of the resistance strain sensing unit of the flexible full-bridge resistance strain gauge in FIG. 1 .
图5是图1中的柔性全桥式电阻应变片作用于第一被测件时的使用状态示意图。Fig. 5 is a schematic view of the use state of the flexible full-bridge resistance strain gauge in Fig. 1 acting on the first tested object.
图6是图5中的柔性全桥式电阻应变片发生应变时的状态示意图。FIG. 6 is a schematic diagram of the state of the flexible full-bridge resistance strain gauge in FIG. 5 when it is strained.
图7是图1中的柔性全桥式电阻应变片作用于第二被测件时的使用状态示意图。Fig. 7 is a schematic view of the use state of the flexible full-bridge resistance strain gauge in Fig. 1 acting on the second tested object.
图8是本发明第二实施方式提供的柔性全桥式电阻应变片的结构示意图。Fig. 8 is a schematic structural diagram of a flexible full-bridge resistance strain gauge provided by the second embodiment of the present invention.
图9是图8中的柔性全桥式电阻应变片沿B-B方向的剖视图。Fig. 9 is a cross-sectional view of the flexible full-bridge resistance strain gauge in Fig. 8 along the B-B direction.
在所有附图中，相同的附图标记用来表示相同的元件或结构，其中：1-第一电极，2-第一电阻应变传感单元，3-第二电极，4-第三电极，5-第二电阻应变传感单元，6-第四电极，7-覆盖层，8-中间绝缘层，9-柔性基底，10-第五电极，11-第三电阻应变传感单元，12-第六电极，13-第七电极，14-第四电阻应变传感单元，15-第八电极，16-柔性全桥式电阻应变片，17-第一被测件，18-第二被测件。In all the drawings, the same reference numerals are used to represent the same elements or structures, wherein: 1-first electrode, 2-first resistance strain sensing unit, 3-second electrode, 4-third electrode, 5-second resistance strain sensing unit, 6-fourth electrode, 7-covering layer, 8-intermediate insulating layer, 9-flexible substrate, 10-fifth electrode, 11-third resistance strain sensing unit, 12- Sixth electrode, 13-seventh electrode, 14-fourth resistance strain sensing unit, 15-eighth electrode, 16-flexible full-bridge resistance strain gauge, 17-first tested part, 18-second tested pieces.
具体实施方式detailed description
为了使本发明的目的、技术方案及优点更加清楚明白，以下结合附图及实施例，对本发明进行进一步详细说明。应当理解，此处所描述的具体实施例仅仅用以解释本发明，并不用于限定本发明。此外，下面所描述的本发明各个实施方式中所涉及到的技术特征只要彼此之间未构成冲突就可以相互组合。In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not constitute a conflict with each other.
请参阅图1、图2及图5，本发明第一实施方式提供的柔性全桥式电阻应变片16，所述柔性全桥式电阻应变片16为全桥结构。所述柔性全桥式电阻应变片16不仅适合测量拉伸应变，还适合测量弯曲应变。Referring to FIG. 1 , FIG. 2 and FIG. 5 , the flexible full-bridge strain gauge 16 provided by the first embodiment of the present invention has a full-bridge structure. The flexible full-bridge resistance strain gauge 16 is not only suitable for measuring tensile strain, but also suitable for measuring bending strain.
所述柔性全桥式电阻应变片16包括柔性基底9、电阻应变传感单元、电极、中间绝缘层8及覆盖层7。所述中间绝缘层8位于所述柔性基底9及所述覆盖层7之间。The flexible full-bridge resistance strain gauge 16 includes a flexible substrate 9 , a resistance strain sensing unit, electrodes, an intermediate insulating layer 8 and a covering layer 7 . The intermediate insulating layer 8 is located between the flexible substrate 9 and the covering layer 7 .
所述电阻应变传感单元包括第一电阻应变传感单元2、与所述第一电阻应变传感单元2间隔设置的第二电阻应变传感单元5、与所述第二电阻应变传感单元5相对设置的第三电阻应变传感单元11及与所述第三电阻应变传感单元11间隔设置的第四电阻应变传感单元14，所述第一电阻应变传感单元2、所述第二电阻应变传感单元5、所述第三电阻应变传感单元11及所述第四电阻应变传感单元14之间连接形成惠斯通全桥电路。The resistance strain sensing unit includes a first resistance strain sensing unit 2, a second resistance strain sensing unit 5 spaced apart from the first resistance strain sensing unit 2, and a second resistance strain sensing unit 5 connected to the second resistance strain sensing unit. 5. The third resistance strain sensing unit 11 disposed opposite to the third resistance strain sensing unit 11 and the fourth resistance strain sensing unit 14 disposed apart from the third resistance strain sensing unit 11, the first resistance strain sensing unit 2, the second resistance strain sensing unit The two resistance strain sensing units 5 , the third resistance strain sensing unit 11 and the fourth resistance strain sensing unit 14 are connected to form a Wheatstone full bridge circuit.
请参阅图3及图4，本实施方式中，所述电阻应变传感单元的栅极为箔式片，所述栅极为自相似结构，当电阻应变传感单元拉伸或者弯曲发生大变形时，所述栅极也能被延展，如此将不会破坏所述电阻应变传感单元的稳定性，有利于曲面结构的大应变测量。Please refer to FIG. 3 and FIG. 4. In this embodiment, the gate of the resistance strain sensing unit is a foil sheet, and the gate is a self-similar structure. When the resistance strain sensing unit is stretched or bent and undergoes large deformation, The gate can also be extended, so that the stability of the resistance strain sensing unit will not be damaged, which is beneficial to the large strain measurement of the curved surface structure.
所述电极包括第一电极1、第二电极3、第三电极4、第四电极6、第五电极10、第六电极12、第七电极13及第八电极15，所述第一电极1及所述第二电极3分别连接于所述第一电阻应变传感单元的两端。所述第三电极4及所述第四电极6分别连接于所述第二电阻应变传感单元5的两端，所述第五电极10及所述第六电极12分别连接于所述第三电阻应变传感单元11的两端，所述第七电极13及所述第八电极15分别连接于所述第四电阻应变传感单元14的两端。The electrodes include a first electrode 1, a second electrode 3, a third electrode 4, a fourth electrode 6, a fifth electrode 10, a sixth electrode 12, a seventh electrode 13 and an eighth electrode 15. The first electrode 1 and the second electrode 3 are respectively connected to two ends of the first resistance strain sensing unit. The third electrode 4 and the fourth electrode 6 are respectively connected to both ends of the second resistance strain sensing unit 5, and the fifth electrode 10 and the sixth electrode 12 are respectively connected to the third Both ends of the resistance strain sensing unit 11 , the seventh electrode 13 and the eighth electrode 15 are respectively connected to two ends of the fourth resistance strain sensing unit 14 .
所述第三电阻应变传感单元11、连接于所述第三电阻应变传感单元11的第五电极10及第六电极12、第四电阻应变传感单元14、以及连接于所述第四电阻应变传感单元14的第七电极13及第八电极15均设置在所述柔性基底9上，其中所述第三电阻应变传感单元11及所述第四电阻应变传感单元14分别贴附在所述柔性基底9上。The third resistance strain sensing unit 11, the fifth electrode 10 and the sixth electrode 12 connected to the third resistance strain sensing unit 11, the fourth resistance strain sensing unit 14, and the fourth resistance strain sensing unit 14 The seventh electrode 13 and the eighth electrode 15 of the resistance strain sensing unit 14 are both arranged on the flexible substrate 9, wherein the third resistance strain sensing unit 11 and the fourth resistance strain sensing unit 14 are respectively attached to Attached to the flexible base 9.
所述中间绝缘层8覆盖所述第三电阻应变传感单元11、第四电阻应变传感单元14及所述柔性基底9朝向所述覆盖层7的表面未被所述第三电阻应变传感单元11及所述第四电阻应变传感单元14覆盖的区域。本实施方式中，所述柔性基底9与所述中间绝缘层8之间相对的表面的形状及面积相同；所述第三电阻应变传感单元11及所述第四电阻应变传感单元14内嵌于所述中间绝缘层8内。The intermediate insulating layer 8 covers the third resistance strain sensing unit 11, the fourth resistance strain sensing unit 14 and the surface of the flexible substrate 9 facing the covering layer 7 which is not sensed by the third resistance strain sensing unit. The area covered by the unit 11 and the fourth resistance strain sensing unit 14 . In this embodiment, the shape and area of the opposite surface between the flexible substrate 9 and the intermediate insulating layer 8 are the same; the third resistance strain sensing unit 11 and the fourth resistance strain sensing unit 14 Embedded in the intermediate insulating layer 8.
所述第一电阻应变传感单元2、连接于所述第一电阻应变传感单元2的所述第一电极1及所述第二电极3、所述第二电阻应变传感单元5、以及连接于所述第二电阻应变传感单元5的第三电极4及第四电极6均设置在所述中间绝缘层8远离所述柔性基底9的一个表面上，其中所述第一电阻应变传感单元2及所述第二电阻应变传感单元5均贴附在所述中间绝缘层8上。The first resistance strain sensing unit 2, the first electrode 1 and the second electrode 3 connected to the first resistance strain sensing unit 2, the second resistance strain sensing unit 5, and The third electrode 4 and the fourth electrode 6 connected to the second resistance strain sensing unit 5 are both arranged on a surface of the intermediate insulating layer 8 away from the flexible substrate 9, wherein the first resistance strain sensing unit Both the sensing unit 2 and the second resistance strain sensing unit 5 are attached on the intermediate insulating layer 8 .
所述覆盖层7覆盖所第一电阻应变传感单元2及所述第二电阻应变传感单元5，以对所述第一电阻应变传感单元2及所述第二电阻应变传感单元5进行密封保护。The covering layer 7 covers the first resistance strain sensing unit 2 and the second resistance strain sensing unit 5, so as to control the first resistance strain sensing unit 2 and the second resistance strain sensing unit 5 Sealed for protection.
本实施方式中，所述中间绝缘层8开设有间隔设置的第一通孔、第二通孔、第三通孔及第四通孔，所述第一电极1及所述第八电极15通过所述第一通孔相连，所述第二电极3及所述第六电极12通过所述第二通孔相连，所述第三电极4及所述第七电极13通过所述第三通孔相连，所述第四电极6及所述第五电极10通过所述第四通孔相连。测量时，所述第二电极3及所述第三电极4通过引线与外部输入电压U1相连，所述第一电极1及所述第四电极6通过引线与外部输出电压U0相连。In this embodiment, the intermediate insulating layer 8 is provided with a first through hole, a second through hole, a third through hole and a fourth through hole arranged at intervals, and the first electrode 1 and the eighth electrode 15 pass through The first through hole is connected, the second electrode 3 and the sixth electrode 12 are connected through the second through hole, and the third electrode 4 and the seventh electrode 13 are connected through the third through hole The fourth electrode 6 and the fifth electrode 10 are connected through the fourth through hole. During measurement, the second electrode 3 and the third electrode 4 are connected to the external input voltage U1 through lead wires, and the first electrode 1 and the fourth electrode 6 are connected to the external output voltage U0 through lead wires.
请参阅图6，所述柔性全桥式电阻应变片16粘贴在所述第一被测件17上，所述第一被测件17为飞机机翼，飞机机翼的表面属于复杂曲面。当所述第一被测件17发生弯曲应变时，所述柔性全桥式电阻应变片16也会随之发生形变，对应的电阻值发生改变，从而测出所述第一被测件17的应变情况。Please refer to FIG. 6 , the flexible full-bridge resistance strain gauge 16 is pasted on the first tested part 17 , the first tested part 17 is an airplane wing, and the surface of the airplane wing belongs to a complex curved surface. When the first tested part 17 undergoes a bending strain, the flexible full-bridge resistance strain gauge 16 will also deform accordingly, and the corresponding resistance value will change, thereby measuring the resistance of the first tested part 17. Contingency situation.
所述第一被测件17发生变形时，所述第一电阻应变传感单元2(R1)和所述第二电阻应变传感单元5(R2)将受压，所述第三电阻应变传感单元11(R3)和所述第四电阻应变传感单元14(R4)将受拉，但四个电阻应变传感单元的电阻值变化量相同，故此时输出电压为全桥输出电压，电压灵敏度为单臂输出时的四倍。以下从理论上解释本实施方式的全桥测量：When the first device under test 17 is deformed, the first resistance strain sensing unit 2 (R1) and the second resistance strain sensing unit 5 (R2) will be pressed, and the third resistance strain sensing unit 5 (R2) will be pressed. The sensing unit 11 (R3) and the fourth resistance strain sensing unit 14 (R4) will be pulled, but the resistance values of the four resistance strain sensing units change in the same amount, so the output voltage is the full bridge output voltage at this time, and the voltage The sensitivity is four times that of single arm output. The full-bridge measurement of this embodiment is explained theoretically as follows:
所述柔性全桥式电阻应变片16未发生应变时：When the flexible full-bridge resistance strain gauge 16 is not strained:
由于R1＝R2＝R3＝R4＝R，故此时UO＝0，电桥保持平衡。Since R 1 =R 2 =R 3 =R 4 =R, U O =0 at this time, and the bridge maintains balance.
所述柔性全桥式电阻应变片16发生应变时：When the flexible full-bridge resistance strain gauge 16 is strained:
由于四个电阻应变传感单元的初始电阻值相同，并且变化的电阻值相同，即R1＝R2＝R3＝R4＝R且ΔR1＝ΔR，所以公式(2)可以化简为：Since the initial resistance values of the four resistance strain sensing units are the same, and the changed resistance values are the same, that is, R 1 =R 2 =R 3 =R 4 =R and ΔR 1 =ΔR, so formula (2) can be simplified as :
从公式(3)式可以看出，所述柔性全桥式电阻应变片16在进行曲面测量时，始终保持全桥输出，输出电压灵敏度为单臂输出时的四倍。本实施方式中，全桥电路构造于所述柔性全桥式电阻应变片16上，能够实现应变片温度补偿，避免了单臂测量时的温漂误差。It can be seen from the formula (3) that the flexible full-bridge resistance strain gauge 16 always maintains a full-bridge output when measuring a curved surface, and the output voltage sensitivity is four times that of a single-arm output. In this embodiment, the full-bridge circuit is constructed on the flexible full-bridge resistance strain gauge 16, which can realize temperature compensation of the strain gauge and avoid temperature drift error during single-arm measurement.
请参阅图7，所述柔性全桥式电阻应变片16设置在第二被测件18上，所述第二被测件18为人造血管，人造血管是一种非常复杂的曲面结构，管径变化大，目前医学上并没有合适的检测方法检测其工作状态，但人造血管有一个特性，随着血管老化其会松弛导致表面曲率发生改变。因此可以利用本实施方式的所述柔性全桥式电阻应变片16适合检查曲面应变的特性来检验。所述柔性全桥式电阻应变片16通过测得人造血管表面应变导致的曲率变化来检测血管是否可以继续工作。Please refer to Fig. 7, the flexible full-bridge resistance strain gauge 16 is arranged on the second tested part 18, and the second tested part 18 is an artificial blood vessel, and the artificial blood vessel is a very complicated curved surface structure, the diameter of which is There is a large change, and there is currently no suitable detection method in medicine to detect its working status, but the artificial blood vessel has a characteristic that it will relax and cause the surface curvature to change as the blood vessel ages. Therefore, the flexible full-bridge resistance strain gauge 16 of this embodiment can be used for inspection, which is suitable for checking the strain of a curved surface. The flexible full-bridge resistance strain gauge 16 detects whether the blood vessel can continue to work by measuring the curvature change caused by the surface strain of the artificial blood vessel.
请参阅图8及图9，本发明第二实施方式提供的柔性全桥式电阻应变片与本发明第一实施方式提供的柔性全桥式电阻应变片16基本相同，不同点在于所述中间绝缘层8对应所述第一电阻应变传感单元2及所述第二电阻应变传感单元5的区域分别设置有凸台，即所述第一电阻应变传感单元2及所述第二电阻应变传感单元5分别设置在所述凸台上，两个所述凸台的形状及尺寸相同。所述凸台凸出于所述中间绝缘层远离所述柔性基底9的表面，其具有沿垂直于所述柔性基底9的方向的预定高度。本发明第二实施方式提供的柔性全桥式电阻应变片适合仅受平面拉伸应变时应变的测量，当所述柔性全桥式电阻应变片粘贴在表面平整的被测样件上且受到拉伸应变时，由于所述凸台的存在以及所述中间绝缘层8的材料的性质，两个所述凸台上的所述第一电阻应变传感单元2及所述第二电阻应变传感单元5将向中间收缩受压，所述第三电阻应变传感单元11及所述第四电阻应变传感单元14将受拉，当所述凸台的高度一定时，四个电阻应变传感单元的电阻值的变化量相同，故此时输出电压为全桥输出电压，电压灵敏度为单臂输出时的四倍。Please refer to Fig. 8 and Fig. 9, the flexible full-bridge strain gauge provided by the second embodiment of the present invention is basically the same as the flexible full-bridge strain gauge 16 provided by the first embodiment of the present invention, the difference lies in the intermediate insulation The areas of the layer 8 corresponding to the first resistance strain sensing unit 2 and the second resistance strain sensing unit 5 are respectively provided with bosses, that is, the first resistance strain sensing unit 2 and the second resistance strain sensing unit The sensing units 5 are respectively arranged on the bosses, and the shape and size of the two bosses are the same. The boss protrudes from the surface of the intermediate insulating layer away from the flexible base 9 , and has a predetermined height along a direction perpendicular to the flexible base 9 . The flexible full-bridge resistance strain gauge provided by the second embodiment of the present invention is suitable for the measurement of strain when it is only subjected to plane tensile strain. When stretching, due to the existence of the bosses and the properties of the material of the intermediate insulating layer 8, the first resistance strain sensing unit 2 and the second resistance strain sensing unit 2 on the two bosses The unit 5 will be compressed in the middle, and the third resistance strain sensing unit 11 and the fourth resistance strain sensing unit 14 will be pulled. When the height of the boss is constant, the four resistance strain sensing units The variation of the resistance value of the unit is the same, so the output voltage at this time is the output voltage of the full bridge, and the voltage sensitivity is four times that of the single arm output.
本实施方式中，所述柔性全桥式电阻应变片的厚度为35微米左右；所述柔性基底9是由柔性材料PDMS制成的；所述柔性全桥式电阻应变片是经旋涂、光刻和蒸镀工艺制成的。In this embodiment, the thickness of the flexible full-bridge resistance strain gauge is about 35 microns; the flexible substrate 9 is made of flexible material PDMS; the flexible full-bridge resistance strain gauge is spin-coated, optically Made by engraving and evaporation process.
本发明提供的柔性全桥式电阻应变片，其自身构造有惠斯通全桥电路，既实现了应变片温度补偿，又保证了输出电压的灵敏度，同时降低了成本，提高了测量效率。此外，中间绝缘层对应第一电阻应变传感单元及第二电阻应变传感单元的区域分别形成有凸台，使得所述柔性全桥式电阻应变片仅受平面拉伸应变时，也能够保证所述柔性全桥式电阻应变片全桥输出。The flexible full-bridge resistance strain gauge provided by the invention has a Wheatstone full-bridge circuit in its own structure, which not only realizes the temperature compensation of the strain gauge, but also ensures the sensitivity of the output voltage, reduces the cost, and improves the measurement efficiency. In addition, bosses are respectively formed in the areas of the intermediate insulating layer corresponding to the first resistance strain sensing unit and the second resistance strain sensing unit, so that when the flexible full-bridge resistance strain gauge is only subjected to plane tensile strain, it can also ensure The full-bridge output of the flexible full-bridge resistance strain gauge.
本领域的技术人员容易理解，以上所述仅为本发明的较佳实施例而已，并不用以限制本发明，凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等，均应包含在本发明的保护范围之内。It is easy for those skilled in the art to understand that the above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present invention, All should be included within the protection scope of the present invention.
Claims (7)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611176264.8A CN106643463B (en) | 2016-12-19 | 2016-12-19 | A kind of flexibility full-bridge type resistance strain gage |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611176264.8A CN106643463B (en) | 2016-12-19 | 2016-12-19 | A kind of flexibility full-bridge type resistance strain gage |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106643463A true CN106643463A (en) | 2017-05-10 |
| CN106643463B CN106643463B (en) | 2019-05-14 |
Family
ID=58823074
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611176264.8A Active CN106643463B (en) | 2016-12-19 | 2016-12-19 | A kind of flexibility full-bridge type resistance strain gage |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106643463B (en) |
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108709490A (en) * | 2018-06-27 | 2018-10-26 | 常州二维碳素科技股份有限公司 | Strain gauge transducer and the method and measurement device for utilizing its acquisition highly sensitive |
| CN108917587A (en) * | 2018-05-17 | 2018-11-30 | 大连理工大学 | A kind of resistance-strain type curvature sensor based on favour stone full-bridge principle |
| CN109341514A (en) * | 2018-12-11 | 2019-02-15 | 中国地质大学（武汉） | A new type of resistance strain gauge and strain measurement method |
| CN109883315A (en) * | 2019-03-22 | 2019-06-14 | 中国科学院力学研究所 | A double-sided resistive strain sensor and strain measurement method |
| CN109883316A (en) * | 2019-03-22 | 2019-06-14 | 中国科学院力学研究所 | A resistive strain sensor and strain measurement method |
| CN110455647A (en) * | 2019-09-09 | 2019-11-15 | 招商局重庆交通科研设计院有限公司 | Shear Strain Amplifier |
| CN111609955A (en) * | 2020-05-21 | 2020-09-01 | 浙江大学 | A flexible tactile sensor array and preparation method thereof |
| CN112305754A (en) * | 2019-07-26 | 2021-02-02 | 成都理想境界科技有限公司 | Scanning actuator, optical fiber scanning device and scanning display equipment |
| WO2021035743A1 (en) * | 2019-08-30 | 2021-03-04 | 深圳纽迪瑞科技开发有限公司 | Pressure sensing device, pressure sensing method, and apparatus |
| WO2021035742A1 (en) * | 2019-08-30 | 2021-03-04 | 深圳纽迪瑞科技开发有限公司 | Pressure sensing assembly, pressure sensing method and device |
| CN112747665A (en) * | 2020-12-25 | 2021-05-04 | 浙江清华柔性电子技术研究院 | Resistance strain gauge and manufacturing method thereof |
| CN112747775A (en) * | 2020-12-22 | 2021-05-04 | 浙江理工大学 | Multi-strain-sensing strip-shaped resistance strain gauge component |
| CN114322744A (en) * | 2022-01-13 | 2022-04-12 | 江南大学 | Fabrication method of improving the sensitivity coefficient of straight writing and printing strain gauge by fatigue control |
| CN114365071A (en) * | 2021-02-10 | 2022-04-15 | 歌尔股份有限公司 | Devices and electronics for force sensing |
| CN117288082A (en) * | 2023-08-23 | 2023-12-26 | 苏州城市学院 | Flexible strain sensor with space three-dimensional recognition capability |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000292283A (en) * | 1999-04-13 | 2000-10-20 | Matsushita Electric Ind Co Ltd | Strain detector |
| CN102135458A (en) * | 2010-12-30 | 2011-07-27 | 浙江大学 | Strain beam type soil pressure sensor |
| CN202126319U (en) * | 2011-06-05 | 2012-01-25 | 蚌埠高灵传感系统工程有限公司 | Sensor integrated with strain resistors and elastic element |
| US8596131B1 (en) * | 2000-11-30 | 2013-12-03 | Orbital Research Inc. | High performance pressure sensor |
| CN103604538A (en) * | 2013-11-29 | 2014-02-26 | 沈阳工业大学 | MEMS pressure sensor chip based on SOI technology and manufacturing method thereof |
| CN103727871A (en) * | 2013-12-20 | 2014-04-16 | 广西科技大学 | Resistance strain gauge |
| CN104880206A (en) * | 2015-06-09 | 2015-09-02 | 中国科学院深圳先进技术研究院 | Resistance strain gauge and resistance strain type sensor |
-
2016
- 2016-12-19 CN CN201611176264.8A patent/CN106643463B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000292283A (en) * | 1999-04-13 | 2000-10-20 | Matsushita Electric Ind Co Ltd | Strain detector |
| US8596131B1 (en) * | 2000-11-30 | 2013-12-03 | Orbital Research Inc. | High performance pressure sensor |
| CN102135458A (en) * | 2010-12-30 | 2011-07-27 | 浙江大学 | Strain beam type soil pressure sensor |
| CN202126319U (en) * | 2011-06-05 | 2012-01-25 | 蚌埠高灵传感系统工程有限公司 | Sensor integrated with strain resistors and elastic element |
| CN103604538A (en) * | 2013-11-29 | 2014-02-26 | 沈阳工业大学 | MEMS pressure sensor chip based on SOI technology and manufacturing method thereof |
| CN103727871A (en) * | 2013-12-20 | 2014-04-16 | 广西科技大学 | Resistance strain gauge |
| CN104880206A (en) * | 2015-06-09 | 2015-09-02 | 中国科学院深圳先进技术研究院 | Resistance strain gauge and resistance strain type sensor |
Cited By (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108917587A (en) * | 2018-05-17 | 2018-11-30 | 大连理工大学 | A kind of resistance-strain type curvature sensor based on favour stone full-bridge principle |
| CN108709490A (en) * | 2018-06-27 | 2018-10-26 | 常州二维碳素科技股份有限公司 | Strain gauge transducer and the method and measurement device for utilizing its acquisition highly sensitive |
| CN109341514A (en) * | 2018-12-11 | 2019-02-15 | 中国地质大学（武汉） | A new type of resistance strain gauge and strain measurement method |
| CN109883315A (en) * | 2019-03-22 | 2019-06-14 | 中国科学院力学研究所 | A double-sided resistive strain sensor and strain measurement method |
| CN109883316A (en) * | 2019-03-22 | 2019-06-14 | 中国科学院力学研究所 | A resistive strain sensor and strain measurement method |
| CN109883315B (en) * | 2019-03-22 | 2021-01-01 | 中国科学院力学研究所 | A double-sided resistive strain sensor and strain measurement method |
| CN109883316B (en) * | 2019-03-22 | 2021-01-29 | 中国科学院力学研究所 | A resistive strain sensor and strain measurement method |
| CN112305754A (en) * | 2019-07-26 | 2021-02-02 | 成都理想境界科技有限公司 | Scanning actuator, optical fiber scanning device and scanning display equipment |
| US12078559B2 (en) | 2019-08-30 | 2024-09-03 | Shenzhen New Degree Technology Co., Ltd. | Pressure sensing assembly and method with increased precision and reliability |
| US12104970B2 (en) | 2019-08-30 | 2024-10-01 | Shenzhen New Degree Technology Co., Ltd. | Pressure sensing device, pressure sensing method and equipment with temperature compensation |
| WO2021035743A1 (en) * | 2019-08-30 | 2021-03-04 | 深圳纽迪瑞科技开发有限公司 | Pressure sensing device, pressure sensing method, and apparatus |
| WO2021035742A1 (en) * | 2019-08-30 | 2021-03-04 | 深圳纽迪瑞科技开发有限公司 | Pressure sensing assembly, pressure sensing method and device |
| CN110455647A (en) * | 2019-09-09 | 2019-11-15 | 招商局重庆交通科研设计院有限公司 | Shear Strain Amplifier |
| CN110455647B (en) * | 2019-09-09 | 2022-03-11 | 招商局重庆交通科研设计院有限公司 | Shear strain amplification device |
| CN111609955A (en) * | 2020-05-21 | 2020-09-01 | 浙江大学 | A flexible tactile sensor array and preparation method thereof |
| CN112747775A (en) * | 2020-12-22 | 2021-05-04 | 浙江理工大学 | Multi-strain-sensing strip-shaped resistance strain gauge component |
| CN112747665A (en) * | 2020-12-25 | 2021-05-04 | 浙江清华柔性电子技术研究院 | Resistance strain gauge and manufacturing method thereof |
| CN114365071A (en) * | 2021-02-10 | 2022-04-15 | 歌尔股份有限公司 | Devices and electronics for force sensing |
| CN114322744A (en) * | 2022-01-13 | 2022-04-12 | 江南大学 | Fabrication method of improving the sensitivity coefficient of straight writing and printing strain gauge by fatigue control |
| CN114322744B (en) * | 2022-01-13 | 2022-11-04 | 江南大学 | Manufacturing method for improving sensitivity coefficient of direct writing printing strain gauge through fatigue regulation and control |
| CN117288082A (en) * | 2023-08-23 | 2023-12-26 | 苏州城市学院 | Flexible strain sensor with space three-dimensional recognition capability |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106643463B (en) | 2019-05-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106643463A (en) | Flexible full-bridge resistance strain sheet | |
| CN105091731B (en) | Axial deviation double-sensitive grid interdigitated metal strain gauge capable of measuring axial deflection of surface strain | |
| CN105066870B (en) | The double interdigitated metal foil gauges of axial deviation full-bridge of the axial local derviation of measurable surface strain | |
| CN105066871B (en) | Can measure the axial deflection of the surface strain axial deflection full bridge full interdigital metal strain gauge | |
| CN105066869B (en) | Lateral deviation double sensitive grid interdigitated metal strain gauge capable of measuring lateral deflection of surface strain | |
| CN109883316B (en) | A resistive strain sensor and strain measurement method | |
| CN103196526B (en) | Dynamometry weighing sensor with unbalance loading isolating function and isolating measuring method thereof | |
| CN208223387U (en) | A kind of resistance strain | |
| CN112816112A (en) | Flexible sensor assembly | |
| CN106092391A (en) | A kind of split type 2 D force sensor | |
| CN105547132B (en) | The sensitive grid metal strain plate of cross direction profiles three of measurable biasing sensitive grid central cross local derviation | |
| CN105865321B (en) | It can measure the interdigital metal strain plate of three sensitive grid of axial deviation of axial local derviation on the outside of biasing sensitive grid | |
| CN204924166U (en) | Two sensitive grid interdigital metal strain gauge of lateral deviation of horizontal local derviation but measured surface meets an emergency | |
| CN205981504U (en) | Split type two -dimentional force transducer | |
| CN214040441U (en) | Full-bridge strain gauge capable of measuring shear stress | |
| CN105423895B (en) | The interdigital metal strain plate of the sensitive grid of lateral deviation three of horizontal local derviation outside measurable | |
| CN105180793B (en) | It can measure the lateral deflection of the lateral deflection of the surface strain, the full bridge and the interdigitated metal strain gauge | |
| CN205449348U (en) | Sensor device | |
| CN105486217B (en) | Six sensitive grid full-bridge of cross direction profiles, the three interdigital metal strain plate of measurable unilateral double offset sensitive grid local derviation laterally outside | |
| CN105371747B (en) | The sensitive grid full-bridge metal strain plate of cross direction profiles six of horizontal local derviation outside measurable bilateral piece | |
| CN211954514U (en) | Half-bridge semiconductor strain gauge | |
| CN108318175A (en) | A kind of gas pressure sensor device based on graphene conductive characteristic | |
| CN209085809U (en) | A kind of strain gauge transducer measuring soil pressure | |
| CN105547137B (en) | The interdigital metal strain plate of three sensitive grid of lateral deviation of measurable biasing sensitive grid central cross local derviation | |
| CN105547134B (en) | The interdigital metal strain plate of three sensitive grid of lateral deviation of measurable biasing sensitive grid local derviation laterally outside |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |