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CN105066869B - Lateral deviation double sensitive grid interdigitated metal strain gauge capable of measuring lateral deflection of surface strain - Google Patents

Lateral deviation double sensitive grid interdigitated metal strain gauge capable of measuring lateral deflection of surface strain Download PDF

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CN105066869B
CN105066869B CN201510496626.0A CN201510496626A CN105066869B CN 105066869 B CN105066869 B CN 105066869B CN 201510496626 A CN201510496626 A CN 201510496626A CN 105066869 B CN105066869 B CN 105066869B
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张端
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Guangdong Gaohang Intellectual Property Operation Co ltd
Weimar Automobile Technology Group Co ltd
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Zhejiang University of Technology ZJUT
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Abstract

一种可测量表面应变横向偏导的横向偏差双敏感栅叉指型金属应变片,包括基底和两个敏感栅,每个敏感栅的两端分别连接一根引出线,基底上固定两个敏感栅;每一敏感栅包括敏感段和过渡段,所有敏感段的轴线为直线、平行布置并且在同一个平面内;在敏感段轴线所确定平面内,沿所述敏感段轴线方向即轴向,与轴向垂直的方向为横向;两个敏感栅电阻一致,在相同应变下电阻变化量一致,沿横向从上至下分别称为上敏感栅和下敏感栅,各敏感段轴线所确定平面上,上敏感栅与下敏感栅之间呈叉指布置;两个敏感栅中心在轴向上无偏差,在横向上有偏差。本发明既能测量应变更能有效检测表面应变横向一阶偏导。

A lateral deviation double sensitive grid interdigitated metal strain gauge capable of measuring the lateral deflection of surface strain, including a base and two sensitive grids, each of which is connected to a lead wire at both ends, and the two sensitive grids are fixed on the base ; Each sensitive grid includes a sensitive section and a transition section, and the axes of all sensitive sections are straight lines, arranged in parallel and in the same plane; in the plane determined by the axis of the sensitive section, along the axis direction of the sensitive section, that is, the axial direction, and The direction perpendicular to the axial direction is the transverse direction; the resistance of the two sensitive grids is the same, and the resistance change is the same under the same strain. They are respectively called the upper sensitive grid and the lower sensitive grid from top to bottom along the horizontal direction. On the plane determined by the axis of each sensitive section, The upper sensitive grid and the lower sensitive grid are interdigitated; the centers of the two sensitive grids have no deviation in the axial direction, but have deviations in the lateral direction. The invention can not only measure the strain, but also can effectively detect the transverse first-order partial derivative of the surface strain.

Description

可测量表面应变横向偏导的横向偏差双敏感栅叉指型金属应 变片The lateral deviation of the lateral deflection of the surface strain can be measured. The interdigitated metal strain of the double sensitive grid Variation

技术领域technical field

本发明涉及传感器领域,尤其是一种金属应变片。The invention relates to the field of sensors, in particular to a metal strain gauge.

背景技术Background technique

金属电阻应变片的工作原理是电阻应变效应,即金属丝在受到应变作用时,其电阻随着所发生机械变形(拉伸或压缩)的大小而发生相应的变化。电阻应变效应的理论公式如下:The working principle of the metal resistance strain gauge is the resistance strain effect, that is, when the metal wire is subjected to strain, its resistance changes correspondingly with the magnitude of the mechanical deformation (stretch or compression). The theoretical formula for the resistance strain effect is as follows:

其中R是其电阻值,ρ是金属材料电阻率,L是金属材料长度,S为金属材料截面积。金属丝在承受应变而发生机械变形的过程中,ρ、L、S三者都要发生变化,从而必然会引起金属材料电阻值的变化。当金属材料被拉伸时,长度增加,截面积减小,电阻值增加;当受压缩时,长度减小,截面积增大,电阻值减小。因此,只要能测出电阻值的变化,便可知金属丝的应变情况。由式(1)和材料力学等相关知识可导出金属材料电阻变化率公式Where R is its resistance value, ρ is the resistivity of the metal material, L is the length of the metal material, and S is the cross-sectional area of the metal material. During the process of mechanical deformation of the metal wire under strain, ρ, L, and S will all change, which will inevitably cause changes in the resistance value of the metal material. When the metal material is stretched, the length increases, the cross-sectional area decreases, and the resistance value increases; when it is compressed, the length decreases, the cross-sectional area increases, and the resistance value decreases. Therefore, as long as the change of the resistance value can be measured, the strain of the metal wire can be known. The formula for the resistance change rate of metal materials can be derived from formula (1) and related knowledge of material mechanics

其中ΔR为电阻变动量,ΔL为金属材料在拉力或者压力作用方向上长度的变化量,ε为同一方向上的应变常常称为轴向应变,K为金属材料应变灵敏度系数。Among them, ΔR is the change in resistance, ΔL is the change in the length of the metal material in the direction of tension or pressure, ε is the strain in the same direction, often called axial strain, and K is the strain sensitivity coefficient of the metal material.

在实际应用中,将金属电阻应变片粘贴在传感器弹性元件或被测机械零件的表面。当传感器中的弹性元件或被测机械零件受作用力产生应变时,粘贴在其上的应变片也随之发生相同的机械变形,引起应变片电阻发生相应的变化。这时,电阻应变片便将力学量转换为电阻的变化量输出。In practical applications, the metal resistance strain gauge is pasted on the surface of the elastic element of the sensor or the mechanical part to be tested. When the elastic element in the sensor or the mechanical part under test is subjected to force to generate strain, the strain gauge pasted on it will also undergo the same mechanical deformation, causing a corresponding change in the resistance of the strain gauge. At this time, the resistance strain gauge converts the mechanical quantity into the output of the change of resistance.

但是有时我们也需要了解工件应变的偏导数,比如下面有三种场合,但不限于此三,需要用到工件表面应变偏导数:But sometimes we also need to know the partial derivative of the workpiece strain. For example, there are three occasions below, but not limited to these three. The partial derivative of the workpiece surface strain is needed:

第一,由于工件形状突变处附近会出现应变集中,往往成为工件首先出现损坏之处,监测形状突变处附近的应变偏导数,可直观的获取该处应变集中程度。First, due to the strain concentration near the sudden change in the shape of the workpiece, it is often the first place where the workpiece is damaged. Monitoring the partial strain derivative near the sudden change in shape can intuitively obtain the degree of strain concentration there.

第二,建筑、桥梁、机械设备中受弯件大量存在,材料力学有关知识告诉我们,弯曲梁表面轴向应变与截面弯矩成正比,截面弯矩的轴向偏导数与截面剪应变成正比,也就是可以通过表面轴向应变的轴向偏导数获知截面剪应变,而该剪应变无法用应变片在工件表面直接测量到;Second, there are a large number of bending parts in buildings, bridges, and mechanical equipment. The knowledge of material mechanics tells us that the axial strain on the surface of a curved beam is proportional to the section bending moment, and the axial partial derivative of the section bending moment and the section shear strain become Proportional, that is, the cross-sectional shear strain can be obtained through the axial partial derivative of the surface axial strain, and the shear strain cannot be directly measured on the workpiece surface with a strain gauge;

第三,应用弹性力学研究工件应变时,内部应变决定于偏微分方程,方程求解需要边界条件,而工件表面应变偏导数就是边界条件之一,这是一般应变片无法提供的。Third, when using elastic mechanics to study workpiece strain, the internal strain is determined by partial differential equations, and the solution of the equation requires boundary conditions, and the partial derivative of workpiece surface strain is one of the boundary conditions, which cannot be provided by general strain gauges.

发明内容Contents of the invention

为了克服已有金属应变片无法检测应变偏导的不足,本发明提供一种既能测量应变更能有效检测表面应变横向偏导的可测量表面应变横向偏导的横向偏差双敏感栅叉指型金属应变片。In order to overcome the deficiency that the existing metal strain gauges cannot detect the strain deflection, the present invention provides a lateral deviation double sensitive grid interdigitated type that can measure the strain and effectively detect the lateral deflection of the surface strain. Metal strain gauges.

本发明解决其技术问题所采用的技术方案是:The technical solution adopted by the present invention to solve its technical problems is:

一种可测量表面应变横向偏导的横向偏差双敏感栅叉指型金属应变片,包括基底,所述金属应变片还包括两个敏感栅,分别为下敏感栅和上敏感栅,每个敏感栅的两端分别连接一根引出线,所述基底上固定所述两个敏感栅;A lateral deviation double-sensing grid interdigitated metal strain gauge capable of measuring surface strain lateral deflection, including a base, and the metal strain gauge also includes two sensitive grids, respectively a lower sensitive grid and an upper sensitive grid, each sensitive Two ends of the grid are respectively connected to a lead wire, and the two sensitive grids are fixed on the substrate;

每一敏感栅包括敏感段和过渡段,所述敏感段的两端为过渡段,所述敏感段呈细长条形,所述过渡段呈粗短形,所述敏感段的电阻远大于所述过渡段的电阻,相同应变状态下所述敏感段的电阻变化值远大于所述过渡段的电阻变化值,所述过渡段的电阻变化值接近于0;Each sensitive grid includes a sensitive section and a transition section, the two ends of the sensitive section are transition sections, the sensitive section is in the shape of a long and thin strip, the transition section is in a thick and short shape, and the resistance of the sensitive section is much greater than the The resistance of the transition section, the resistance change value of the sensitive section under the same strain state is much greater than the resistance change value of the transition section, and the resistance change value of the transition section is close to 0;

每个敏感段的所有横截面形心构成敏感段轴线,该敏感段轴线为一条直线段,各敏感段的轴线平行并且位于同一平面中,敏感段轴线所确定平面内,沿所述敏感段轴线方向即轴向,与轴向垂直的方向为横向;每个敏感段的所有横截面形状尺寸一致;取每个敏感段的轴线中点位置并以该敏感段电阻值为名义质量构成所在敏感段的名义质点,各个敏感段的名义质点共同形成的质心位置为敏感栅的中心;All the centroids of the cross-sections of each sensitive section constitute the axis of the sensitive section. The axis of the sensitive section is a straight line segment. The axes of the sensitive sections are parallel and located in the same plane. In the plane defined by the axes of the sensitive section, The direction is the axial direction, and the direction perpendicular to the axial direction is the transverse direction; the shape and size of all cross-sections of each sensitive section are consistent; take the midpoint position of the axis of each sensitive section and use the resistance value of the sensitive section to form the nominal mass of the sensitive section The nominal mass point of each sensitive section, the centroid position formed by the nominal mass points of each sensitive section is the center of the sensitive grid;

两个敏感栅的敏感段总电阻一致,所述两个敏感栅在相同的应变下敏感段的总电阻变化值一致,两个敏感栅之中心位于一条直线上,该一条直线垂直于两个敏感栅任何一条敏感段轴线,两个敏感栅沿此直线方向从上至下分别称为上敏感栅和下敏感栅;各敏感段轴线所确定平面上,上敏感栅与下敏感栅之间呈叉指布置;The total resistance of the sensitive section of the two sensitive grids is consistent, and the total resistance change value of the sensitive section of the two sensitive grids is the same under the same strain, and the centers of the two sensitive grids are located on a straight line, which is perpendicular to the two sensitive grids. The two sensitive grids are called the upper sensitive grid and the lower sensitive grid from top to bottom along the line direction of any sensitive section axis of the grid; on the plane determined by the axes of each sensitive section, there is a fork between the upper sensitive grid and the lower sensitive grid. refers to the layout;

两个敏感栅中心在轴向上无偏差,在横向上有偏差,上敏感栅中心与下敏感栅中心的距离为Δy。The centers of the two sensitive grids have no deviation in the axial direction, but have deviations in the lateral direction, and the distance between the center of the upper sensitive grid and the center of the lower sensitive grid is Δy.

本发明中,两个敏感栅之中心连线应与两个敏感栅任何一条敏感段轴线方向垂直,为此称两个敏感栅具有横向偏差。两个敏感栅之中心的距离为Δy,或者说横向偏差为Δy。Δy一般小于甚至远小于各敏感段的长度。所述叉指布置是指:两敏感栅的各敏感段轴线所在平面上,在与敏感段轴线垂直方向上两敏感栅的敏感段错落分布。对在该方向上两敏感栅之敏感段分别出现的次序和次数不做限制。利用金属材料电阻变化值与应变之间的线性关系,一方面,像普通应变片那样可以用于测量应变;另一方面,两敏感栅的电阻差与两个敏感栅之中心的距离之比反映了应变的横向偏导。In the present invention, the connecting line between the centers of the two sensitive grids should be perpendicular to the axial direction of any one of the sensitive sections of the two sensitive grids. Therefore, it is said that the two sensitive grids have a lateral deviation. The distance between the centers of the two sensitive grids is Δy, or the lateral deviation is Δy. Δy is generally smaller or even much smaller than the length of each sensitive section. The interdigital arrangement refers to that: on the plane where the axes of the sensitive sections of the two sensitive grids are located, the sensitive sections of the two sensitive grids are staggered in a direction perpendicular to the axes of the sensitive sections. There is no limitation on the order and times of the sensitive sections of the two sensitive gates appearing in this direction. Using the linear relationship between the resistance change value and strain of metal materials, on the one hand, it can be used to measure strain like ordinary strain gauges; on the other hand, the ratio of the resistance difference between the two sensitive grids and the distance between the centers of the two sensitive grids reflects Transverse deflector of strain.

在工艺上应注意保持各敏感栅过渡段总电阻以及过渡段电阻在外部应变下之变化量一致以调高测量精度,如果过渡段的电阻以及应变下电阻变化量不可忽略,也能作为系统误差在检测时加以消除。In the process, care should be taken to keep the total resistance of the transition section of each sensitive gate and the change of the transition section resistance under external strain consistent to increase the measurement accuracy. If the resistance of the transition section and the change of resistance under strain cannot be ignored, it can also be used as a system error. Eliminated during detection.

进一步,所述金属应变片还包括盖片,所述盖片覆盖于所述敏感栅和基底上。Further, the metal strain gauge also includes a cover sheet, and the cover sheet covers the sensitive grid and the base.

再进一步,所述敏感栅为丝式、箔式、薄膜式或厚膜式敏感栅。Still further, the sensitive grid is a wire-type, foil-type, film-type or thick-film-type sensitive grid.

更进一步,所述基底为胶膜基底、玻璃纤维基底、石棉基底、金属基底或临时基底。Furthermore, the base is an adhesive film base, a glass fiber base, an asbestos base, a metal base or a temporary base.

所述两个敏感栅上下布置在基底上。当然,也可以为其他的布置方式。The two sensitive gates are arranged on the base up and down. Of course, other arrangements are also possible.

本发明的有益效果主要表现在:不仅能测量工件表面应变,更能有效检测表面应变横向偏导数。The beneficial effects of the invention are mainly manifested in that not only the surface strain of the workpiece can be measured, but also the lateral partial derivative of the surface strain can be effectively detected.

附图说明Description of drawings

图1是可测量表面应变横向偏导的横向偏差双敏感栅叉指型金属应变片的示意图。Fig. 1 is a schematic diagram of a lateral deviation double-sensitive grid interdigitated metal strain gauge capable of measuring lateral deflection of surface strain.

图2是可测量表面应变横向偏导的横向偏差双敏感栅叉指型金属应变片俯视图。Fig. 2 is a top view of a lateral deviation double-sensitive grid interdigitated metal strain gauge capable of measuring lateral deflection of surface strain.

图3是测量电桥示意图。Figure 3 is a schematic diagram of the measuring bridge.

具体实施方式detailed description

下面结合附图对本发明作进一步描述。The present invention will be further described below in conjunction with the accompanying drawings.

参照图1~图3,一种可测量表面应变横向偏导的横向偏差双敏感栅叉指型金属应变片,包括基底,所述金属应变片还包括两个敏感栅,分别为下敏感栅和上敏感栅,每个敏感栅的两端分别连接一根引出线,所述基底上固定所述两个敏感栅;Referring to Figures 1 to 3, a lateral deviation double-sensing grid interdigitated metal strain gauge capable of measuring the lateral deflection of surface strain includes a base, and the metal strain gauge also includes two sensitive grids, which are the lower sensitive grid and the lower sensitive grid respectively. An upper sensitive grid, the two ends of each sensitive grid are respectively connected to a lead wire, and the two sensitive grids are fixed on the substrate;

每一敏感栅包括敏感段和过渡段,所述敏感段的两端为过渡段,所述敏感段呈细长条形,所述过渡段呈粗短形,所述敏感段的电阻远大于所述过渡段的电阻,相同应变状态下所述敏感段的电阻变化值远大于所述过渡段的电阻变化值,所述过渡段的电阻变化值接近于0;Each sensitive grid includes a sensitive section and a transition section, the two ends of the sensitive section are transition sections, the sensitive section is in the shape of a long and thin strip, the transition section is in a thick and short shape, and the resistance of the sensitive section is much greater than the The resistance of the transition section, the resistance change value of the sensitive section under the same strain state is much greater than the resistance change value of the transition section, and the resistance change value of the transition section is close to 0;

每个敏感段的所有横截面形心构成敏感段轴线,该敏感段轴线为一条直线段,各敏感段的轴线平行并且位于同一平面中,敏感段轴线所确定平面内,沿所述敏感段轴线方向即轴向,与轴向垂直的方向为横向;每个敏感段的所有横截面形状尺寸一致;取每个敏感段的轴线中点位置并以该敏感段电阻值为名义质量构成所在敏感段的名义质点,各个敏感段的名义质点共同形成的质心位置为敏感栅的中心;All the centroids of the cross-sections of each sensitive section constitute the axis of the sensitive section. The axis of the sensitive section is a straight line segment. The axes of the sensitive sections are parallel and located in the same plane. In the plane defined by the axes of the sensitive section, The direction is the axial direction, and the direction perpendicular to the axial direction is the transverse direction; the shape and size of all cross-sections of each sensitive section are consistent; take the midpoint position of the axis of each sensitive section and use the resistance value of the sensitive section to form the nominal mass of the sensitive section The nominal mass point of each sensitive section, the centroid position formed by the nominal mass points of each sensitive section is the center of the sensitive grid;

两个敏感栅的敏感段总电阻一致,所述两个敏感栅在相同的应变下敏感段的总电阻变化值一致,两个敏感栅之中心位于一条直线上,该一条直线垂直于两个敏感栅任何一条敏感段轴线,两个敏感栅沿此直线方向从上至下分别称为上敏感栅和下敏感栅;各敏感段轴线所确定平面上,上敏感栅与下敏感栅之间呈叉指布置;The total resistance of the sensitive section of the two sensitive grids is consistent, and the total resistance change value of the sensitive section of the two sensitive grids is the same under the same strain, and the centers of the two sensitive grids are located on a straight line, which is perpendicular to the two sensitive grids. The two sensitive grids are called the upper sensitive grid and the lower sensitive grid from top to bottom along the line direction of any sensitive section axis of the grid; on the plane determined by the axes of each sensitive section, there is a fork between the upper sensitive grid and the lower sensitive grid. refers to the layout;

两个敏感栅中心在轴向上无偏差,在横向上有偏差,上敏感栅中心与下敏感栅中心的距离为Δy。The centers of the two sensitive grids have no deviation in the axial direction, but have deviations in the lateral direction, and the distance between the center of the upper sensitive grid and the center of the lower sensitive grid is Δy.

本实施例的可测量表面应变横向偏导的横向偏差双敏感栅叉指型金属应变片,包括基底1,所述金属应变片还包括两个敏感栅,每个敏感栅的两端分别连接一根引出线,所述基底1上固定所述两个敏感栅。The double-sensing grid interdigitated metal strain gauge capable of measuring the lateral deviation of the lateral deflection of the surface strain in this embodiment includes a substrate 1, and the metal strain gauge also includes two sensitive grids, each of which is connected to a The two sensitive grids are fixed on the base 1.

基底1之上可固定下敏感栅2和上敏感栅3,用于保持各敏感栅固定的形状、位置和尺寸;基底1很薄,从而将试件表面的应变准确地传递到下敏感栅2和上敏感栅3。基底1可以是胶膜基底、玻璃纤维基底、石棉基底、金属基底和临时基底。通常用黏结、焊接、陶瓷喷涂等方式将基底固定于测试件的被测部位。基底1上还可印有一些用于应变片定位的线条。The lower sensitive grid 2 and the upper sensitive grid 3 can be fixed on the base 1 to maintain the fixed shape, position and size of each sensitive grid; the base 1 is very thin, so that the strain on the surface of the test piece can be accurately transmitted to the lower sensitive grid 2 And upper sensitive gate 3. The substrate 1 can be an adhesive film substrate, a fiberglass substrate, an asbestos substrate, a metal substrate, and a temporary substrate. The substrate is usually fixed on the tested part of the test piece by means of bonding, welding, ceramic spraying and the like. Some lines for positioning the strain gauges can also be printed on the substrate 1 .

盖片用纸或者胶等材料制成,覆盖于下敏感栅2、上敏感栅3和基底1上,起防潮、防蚀、防损等作用的保护层。The cover sheet is made of materials such as paper or glue, covering the lower sensitive grid 2, the upper sensitive grid 3 and the base 1, and serves as a protective layer for moisture-proof, corrosion-proof, damage-proof and other functions.

引线4用于连接敏感栅和测量电路,下敏感栅2或上敏感栅3各有两个引线4,对与箔式和膜式应变片,引线4与其所连接的下敏感栅2或上敏感栅3联为一体。The lead wire 4 is used to connect the sensitive grid and the measurement circuit. The lower sensitive grid 2 or the upper sensitive grid 3 each has two lead wires 4. For foil and film strain gauges, the lower sensitive grid 2 or the upper sensitive grid connected with the lead wire 4 The grid 3 is connected as one.

下敏感栅2和上敏感栅3按照其金属敏感材料和加工工艺的不同,可以为丝式、箔式、薄膜式、厚膜式。无论何种下敏感栅2或上敏感栅3的厚度均很小,使得下敏感栅2和上敏感栅3的轴向长度随其所依附工件的形变而变化。本发明基本的创新之处在于下敏感栅2和上敏感栅3之间的配合,有如下要点:The lower sensitive grid 2 and the upper sensitive grid 3 can be wire type, foil type, thin film type, thick film type according to their metal sensitive materials and processing technology. The thickness of the lower sensitive grid 2 or the upper sensitive grid 3 is very small, so that the axial lengths of the lower sensitive grid 2 and the upper sensitive grid 3 vary with the deformation of the workpiece to which they are attached. The basic innovation of the present invention lies in the cooperation between the lower sensitive grid 2 and the upper sensitive grid 3, which has the following main points:

第一,在基底上布置两个敏感栅,分别称为下敏感栅2、上敏感栅5。First, two sensitive gates are arranged on the substrate, which are respectively called the lower sensitive gate 2 and the upper sensitive gate 5 .

第二,下敏感栅2和上敏感栅3均可分为多个敏感段5和多个过渡段6,各过渡段6将各敏感段5连接形成敏感栅。比较而言,敏感段5呈细长形,电阻较大并且其阻值对应变较为敏感;所述过渡段6基本呈粗短形,使得所述过渡段的电阻很小并且对应变不敏感,工作状态下电阻变化接近于0,因此敏感段电阻的总和基本为单个敏感栅的总电阻。图2从更清晰的角度更详细地标出了敏感段5和过渡段6。Second, both the lower sensitive gate 2 and the upper sensitive gate 3 can be divided into a plurality of sensitive sections 5 and a plurality of transition sections 6, and each transition section 6 connects the sensitive sections 5 to form a sensitive gate. In comparison, the sensitive section 5 is elongated, has a large resistance and its resistance is more sensitive to strain; the transition section 6 is basically thick and short, so that the resistance of the transition section is small and insensitive to strain, In the working state, the resistance change is close to 0, so the sum of the resistance of the sensitive section is basically the total resistance of a single sensitive grid. Figure 2 marks the sensitive section 5 and the transition section 6 in more detail for a clearer perspective.

第三,下敏感栅2和上敏感栅3的敏感段5横截面形状均相同,并且下敏感栅2和上敏感栅3各自敏感段5长度的总和相同。忽略过渡段6的电阻,左下敏感栅2和上敏感栅3的总电阻都相等,并且两个敏感栅在相同的应变下敏感段总电阻变化量应一致。Third, the cross-sectional shapes of the sensitive sections 5 of the lower sensitive grid 2 and the upper sensitive grid 3 are the same, and the sum of the lengths of the sensitive sections 5 of the lower sensitive grid 2 and the upper sensitive grid 3 is the same. Neglecting the resistance of the transition section 6, the total resistances of the lower left sensitive grid 2 and the upper sensitive grid 3 are equal, and the total resistance change of the sensitive section of the two sensitive grids should be consistent under the same strain.

第四,每个敏感栅的敏感段5呈细长条状,每个敏感段5的所有横截面形心构成敏感段轴线,该敏感段5轴线为一条直线段,各敏感段5的轴线平行并且位于同一平面中。每个敏感段5的所有横截面沿敏感段轴线方向的投影形状一致。取每个敏感段的轴线中点位置并以该敏感段电阻值为名义质量构成所在敏感段的名义质点,各个敏感段的名义质点共同形成的质心位置为敏感栅的中心。Fourth, the sensitive section 5 of each sensitive grid is in the shape of a long and thin strip, and all the cross-sectional centroids of each sensitive section 5 constitute the axis of the sensitive section, the axis of the sensitive section 5 is a straight line segment, and the axes of each sensitive section 5 are parallel and lie in the same plane. The projection shapes of all cross sections of each sensitive section 5 along the axis direction of the sensitive section are consistent. Take the midpoint position of the axis of each sensitive section and use the resistance value of the sensitive section to form the nominal mass of the sensitive section. The centroid position formed by the nominal mass points of each sensitive section is the center of the sensitive grid.

第五,俯视下敏感栅2和上敏感栅3的所有敏感段5,它们均具有对称轴且对称轴重合(图2中的y轴),下敏感栅2和上敏感栅3各自的敏感段5全都与该对称轴垂直,各敏感栅的敏感段5均关于此轴对称分布,下敏感栅2和上敏感栅3内各敏感段5沿x轴方向开始和结束位置相同。因此,可以说下敏感栅2和上敏感栅3无轴向偏差只有横向偏差,下敏感栅2和上敏感栅3的中心位置均在y轴上。根据图2中应变片的俯视图,下敏感栅2的中心在y轴与xL轴的交点,上敏感栅3的中心在y轴与xU轴的交点。下敏感栅2的中心与上敏感栅3的中心的连线中点为x轴与y轴的交点。The 5th, overlooking all sensitive sections 5 of lower sensitive grid 2 and upper sensitive grid 3, they all have symmetry axis and symmetry axis coincides (y-axis in Fig. 2), the respective sensitive segments of lower sensitive grid 2 and upper sensitive grid 3 5 are all perpendicular to the axis of symmetry, and the sensitive segments 5 of each sensitive grid are distributed symmetrically about this axis, and the starting and ending positions of each sensitive segment 5 in the lower sensitive grid 2 and the upper sensitive grid 3 along the x-axis direction are the same. Therefore, it can be said that the lower sensitive grid 2 and the upper sensitive grid 3 have no axial deviation but only lateral deviation, and the center positions of the lower sensitive grid 2 and the upper sensitive grid 3 are both on the y-axis. According to the top view of the strain gauge in Fig. 2, the center of the lower sensitive grid 2 is at the intersection of the y axis and the x L axis, and the center of the upper sensitive grid 3 is at the intersection of the y axis and the x U axis. The midpoint of the line connecting the center of the lower sensitive grid 2 and the center of the upper sensitive grid 3 is the intersection of the x-axis and the y-axis.

第六,下敏感栅2和上敏感栅3叉指布置,两个敏感栅的中心位置均在同一对称轴y轴上。可以注意到,叉指布置造成的直接结果是下敏感栅2中心与上敏感栅3中心较为接近,横向距离为Δy,如图2所示。由于下敏感栅2和上敏感栅3的相对位置由应变片生产工艺保证被相当精确地固定了,这也是本发明能检测工件应变轴向偏导数的关键之一。Sixth, the lower sensitive grid 2 and the upper sensitive grid 3 are interdigitated, and the centers of the two sensitive grids are on the same symmetry axis y-axis. It can be noticed that the direct result of the interdigitation arrangement is that the center of the lower sensitive grid 2 is relatively close to the center of the upper sensitive grid 3 with a lateral distance of Δy, as shown in FIG. 2 . Since the relative positions of the lower sensitive grid 2 and the upper sensitive grid 3 are ensured to be fairly accurately fixed by the strain gauge production process, this is also one of the keys for the invention to detect the axial partial derivative of workpiece strain.

综上所述,本发明下敏感栅2和上敏感栅3大小相等,敏感栅中心轴向距离为0、横向距离甚近为Δy。In summary, the lower sensitive grid 2 and the upper sensitive grid 3 of the present invention are equal in size, the axial distance between the sensitive grid centers is 0, and the lateral distance is very close to Δy.

令自由状态下,下敏感栅2电阻为RL0,上敏感栅3电阻为RR0,应有RL0=RR0=R0。将本发明的应变片安置于某有应变表面时,下敏感栅2电阻为R0+ΔRL,上敏感栅3电阻为R0+ΔRU;另一方面,下敏感栅2以及上敏感栅3的中心分别位于图2中y轴与xL的交点以及y轴与xU的交点,两敏感栅中心在横向上相距Δy,所述横向即为x轴。下敏感栅2与上敏感栅3中心处应力的不同造成了下敏感栅2与上敏感栅3电阻的不同。利用敏感栅电阻与表面应变的关系有:In the free state, the resistance of the lower sensitive gate 2 is R L0 , and the resistance of the upper sensitive gate 3 is R R0 , so R L0 =R R0 =R 0 . When the strain gauge of the present invention is placed on a strained surface, the resistance of the lower sensitive grid 2 is R 0 +ΔR L , and the resistance of the upper sensitive grid 3 is R 0 +ΔR U ; on the other hand, the lower sensitive grid 2 and the upper sensitive grid The centers of 3 are respectively located at the intersections of the y-axis and xL and the intersections of the y -axis and xU in Figure 2, and the distance between the centers of the two sensitive grids is Δy in the transverse direction, and the transverse direction is the x-axis. The difference in stress at the center of the lower sensitive grid 2 and the upper sensitive grid 3 results in the difference in resistance between the lower sensitive grid 2 and the upper sensitive grid 3 . The relationship between the sensitive grid resistance and the surface strain is:

其中为两敏感栅中心连线中点位置,εL为下敏感栅2中心处的应变,εU为上敏感栅3中心处的应变。这即是本发明测量表面应变横向偏导的原理。in ε L is the strain at the center of the lower sensitive grid 2 , and ε U is the strain at the center of the upper sensitive grid 3 . This is the principle of the present invention to measure the lateral deflection of surface strain.

将本实施例配合电桥可用于测量应变、应变横向偏导,假设电桥输入电压为ui、输出电压为uo,测量电桥的示意图见图3。在无工件应变作用时,电桥各桥臂电阻依顺时针方向分别标记为R1、R2、R3、R4,在不会混淆的情况下也用这些符号标记电阻所在电桥。每个电桥上可以安放应变片的敏感栅或者电阻。与一般的应变片布置相同,如果在多个桥臂上安置敏感栅,对各安置位置的次序、应变有定性的要求。无工件应变作用时,电桥的输出电压公式为This embodiment can be used to measure strain and strain transverse deflection by combining this embodiment with an electric bridge. Assuming that the input voltage of the electric bridge is u i and the output voltage is u o , the schematic diagram of the measuring electric bridge is shown in FIG. 3 . When there is no workpiece strain, the resistances of the bridge arms of the bridge are respectively marked as R 1 , R 2 , R 3 , and R 4 in the clockwise direction, and these symbols are also used to mark the bridge where the resistance is located if there is no confusion. Sensitive gates or resistors of strain gauges can be placed on each bridge. Same as the general arrangement of strain gauges, if sensitive grids are installed on multiple bridge arms, there are qualitative requirements for the order and strain of each installation position. When there is no workpiece strain, the output voltage formula of the bridge is

此时,要求电桥平衡也就是uo=0,于是必须满足所谓电桥平衡条件R1R3-R2R4=0,采用的电桥进一步满足At this time, it is required that the bridge balance is u o = 0, so the so-called bridge balance condition R 1 R 3 -R 2 R 4 = 0 must be satisfied, and the bridge used further satisfies

R1=R2=R3=R4, (5)R 1 =R 2 =R 3 =R 4 , (5)

因为,第一,满足条件(5)时,根据有关理论应变片灵敏度最高;第二,测量应变或者应变横向偏导的方法均要求条件(5)成立。当应变片随外界应变也发生应变时,上述电桥平衡条件一般不再成立,此时Because, first, when the condition (5) is satisfied, the sensitivity of the strain gauge is the highest according to the relevant theory; second, the method of measuring the strain or the lateral deflection of the strain requires the condition (5) to be established. When the strain gage also strains with the external strain, the above bridge equilibrium condition is generally no longer valid, at this time

由于ΔRi<<Ri(i=1,2,3,4故)第一个≈,第二个≈忽略的部分ΔR1ΔR3-ΔR2ΔR4也很小,并在工程上可以使其远小于较保留部分。一般可用式(6)获取的电压测量应变;对应变横向偏导可结合式(3)和式(6),合理地设计安排各桥臂敏感栅和电阻可获得与应变横向偏导呈线性关系的电压值uo,该电压为微弱信号需进行放大。Since ΔR i << R i (i=1,2,3,4) the first ≈, the second ≈negligible part ΔR 1 ΔR 3 -ΔR 2 ΔR 4 is also very small, and can be used in engineering It is much smaller than the more reserved part. Generally, the voltage obtained by formula (6) can be used to measure the strain; for the strain transverse deflector, formula (3) and formula (6) can be combined to rationally design and arrange the sensitive grid and resistance of each bridge arm to obtain a linear relationship with the strain transverse deflector The voltage value u o is a weak signal that needs to be amplified.

Claims (5)

1.一种可测量表面应变横向偏导的横向偏差双敏感栅叉指型金属应变片,包括基底,其特征在于:所述金属应变片还包括两个敏感栅,分别为下敏感栅和上敏感栅,每个敏感栅的两端分别连接一根引出线,所述基底上固定所述两个敏感栅;1. A lateral deviation double-sensitive grid interdigitated metal strain gauge capable of measuring surface strain lateral deflection, including a base, is characterized in that: the metal strain gauge also includes two sensitive grids, which are respectively a lower sensitive grid and an upper sensitive grid. Sensitive grids, two ends of each sensitive grid are respectively connected to a lead wire, and the two sensitive grids are fixed on the substrate; 每一敏感栅包括敏感段和过渡段,所述敏感段的两端为过渡段,所述敏感段呈细长条形,所述过渡段呈粗短形,所述敏感段的电阻远大于所述过渡段的电阻,相同应变状态下所述敏感段的电阻变化值远大于所述过渡段的电阻变化值,所述过渡段的电阻变化值接近于0;Each sensitive grid includes a sensitive section and a transition section, the two ends of the sensitive section are transition sections, the sensitive section is in the shape of a long and thin strip, the transition section is in a thick and short shape, and the resistance of the sensitive section is much greater than the The resistance of the transition section, the resistance change value of the sensitive section under the same strain state is much greater than the resistance change value of the transition section, and the resistance change value of the transition section is close to 0; 每个敏感段的所有横截面形心构成敏感段轴线,该敏感段轴线为一条直线段,各敏感段的轴线平行并且位于同一平面中,敏感段轴线所确定平面内,沿所述敏感段轴线方向即轴向,与轴向垂直的方向为横向;每个敏感段的所有横截面形状尺寸一致;取每个敏感段的轴线中点位置并以该敏感段电阻值为名义质量构成所在敏感段的名义质点,各个敏感段的名义质点共同形成的质心位置为敏感栅的中心;All the centroids of the cross-sections of each sensitive section constitute the axis of the sensitive section. The axis of the sensitive section is a straight line segment. The axes of the sensitive sections are parallel and located in the same plane. In the plane defined by the axes of the sensitive section, The direction is the axial direction, and the direction perpendicular to the axial direction is the transverse direction; the shape and size of all cross-sections of each sensitive section are consistent; take the midpoint position of the axis of each sensitive section and use the resistance value of the sensitive section to form the nominal mass of the sensitive section The nominal mass point of each sensitive section, the centroid position formed by the nominal mass points of each sensitive section is the center of the sensitive grid; 两个敏感栅的敏感段总电阻一致,所述两个敏感栅在相同的应变下敏感段的总电阻变化值一致,两个敏感栅之中心位于一条直线上,该一条直线垂直于两个敏感栅任何一条敏感段轴线,两个敏感栅沿此直线方向从上至下分别称为上敏感栅和下敏感栅;各敏感段轴线所确定平面上,上敏感栅与下敏感栅之间呈叉指布置;The total resistance of the sensitive section of the two sensitive grids is consistent, and the total resistance change value of the sensitive section of the two sensitive grids is the same under the same strain, and the centers of the two sensitive grids are located on a straight line, which is perpendicular to the two sensitive grids. The two sensitive grids are called the upper sensitive grid and the lower sensitive grid from top to bottom along the line direction of any sensitive section axis of the grid; on the plane determined by the axes of each sensitive section, there is a fork between the upper sensitive grid and the lower sensitive grid. refers to the layout; 两个敏感栅中心在轴向上无偏差,在横向上有偏差,上敏感栅中心与下敏感栅中心的距离为Δy。The centers of the two sensitive grids have no deviation in the axial direction, but have deviations in the lateral direction, and the distance between the center of the upper sensitive grid and the center of the lower sensitive grid is Δy. 2.如权利要求1所述的可测量表面应变横向偏导的横向偏差双敏感栅叉指型金属应变片,其特征在于:所所述金属应变片还包括盖片,所述盖片覆盖于所述敏感栅和基底上。2. The lateral deviation double-sensitive gate interdigitated metal strain gauge capable of measuring lateral deflection of surface strain according to claim 1, characterized in that: the metal strain gauge also includes a cover sheet, and the cover sheet covers the the sensitive grid and the substrate. 3.如权利要求1或2所述的可测量表面应变横向偏导的横向偏差双敏感栅叉指型金属应变片,其特征在于:所述敏感栅为丝式、箔式、薄膜式或厚膜式敏感栅。3. The lateral deviation double-sensitive grid interdigitated metal strain gauge capable of measuring lateral deflection of surface strain as claimed in claim 1 or 2, characterized in that: the sensitive grid is wire type, foil type, film type or thick Membrane sensitive grid. 4.如权利要求1或2所述的可测量表面应变横向偏导的横向偏差双敏感栅叉指型金属应变片,其特征在于:所述基底为胶膜基底、玻璃纤维基底、石棉基底、金属基底或临时基底。4. The lateral deviation double-sensitive grid interdigitated metal strain gauge capable of measuring lateral deflection of surface strain according to claim 1 or 2, characterized in that: the substrate is an adhesive film substrate, a glass fiber substrate, an asbestos substrate, Metal base or temporary base. 5.如权利要求1或2所述的可测量表面应变横向偏导的横向偏差双敏感栅叉指型金属应变片,其特征在于:所述两个敏感栅上下布置在基底上。5. The interdigitated metal strain gauge with double sensitive grids capable of measuring the lateral deviation of lateral deflection of surface strain according to claim 1 or 2, characterized in that: the two sensitive grids are arranged up and down on the substrate.
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