CN112054005B - 电子封装件及其制法 - Google Patents
电子封装件及其制法 Download PDFInfo
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- CN112054005B CN112054005B CN201910541797.9A CN201910541797A CN112054005B CN 112054005 B CN112054005 B CN 112054005B CN 201910541797 A CN201910541797 A CN 201910541797A CN 112054005 B CN112054005 B CN 112054005B
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Abstract
本发明涉及一种电子封装件及其制法,通过将两封装模块相堆叠,以于后续制作电子产品时,减少电子封装件占用母板的面积,因而有利于缩减该电子产品的体积。
Description
技术领域
本发明关于一种半导体封装制程,特别是关于一种具有多个封装模块的电子封装件及其制法。
背景技术
随着近年来可携式电子产品的蓬勃发展,各类相关产品的开发也朝向高密度、高性能以及轻、薄、短、小的趋势,各实施例的半导体封装结构也因而配合推陈出新,以期能符合轻薄短小与高密度的要求。
因应可携式电子产品功能越强大,所需半导体封装结构将越多,故半导体封装结构的配置趋势采用多模块(Multichip Module)形式,从而借此将两个或两个以上的半导体封装件组合在单一电子产品中,以缩减电子产品整体电路结构体积,并提升电性功能。
如图1所示,现有电子产品1包括一母板(Mother board)10及设于该母板10上的多个半导体封装模块1a,1b。
然而,现有电子产品1中,该母板10的表面需同时水平排设许多半导体封装模块1a,1b,造成占据该母板10的空间越多,故无法设计出足够的空间放置其它封装模块,或是电池容量无法增大而受到限制。另一方面,若将该母板10的表面积扩增,将迫使该电子产品1的体积增大,导致该电子产品1不符合轻薄短小的发展潮流。
因此,如何克服上述现有技术的种种问题,实已成目前亟欲解决的课题。
发明内容
鉴于上述现有技术的缺陷,本发明提供一种电子封装件及其制法,有利于缩减该电子产品的体积。
本发明的电子封装件,包括:一第一承载结构,其具有相对的第一表面与第二表面;至少一第一电子元件,其配置于该第一承载结构的第一表面上且电性连接该第一承载结构;多个导电体,其设于该第一承载结构的第二表面上且电性连接该第一承载结构;一第二承载结构,其经由至少一导电元件堆叠于该第一承载结构的第一表面上,且令该导电元件电性连接该第一与第二承载结构;至少一功能电子元件,其配置于该第二承载结构上且电性连接该第二承载结构;以及一封装层,其形成于该第一承载结构与该第二承载结构之间以包覆该第一电子元件、功能电子元件与导电元件。
本发明还提供一种电子封装件的制法,包括:提供一具有相对的第一表面与第二表面的第一承载结构,其中,该第一表面上配置有至少一电性连接该第一承载结构的第一电子元件,该第二表面上配置有多个电性连接该第一承载结构的导电体;将一配置有功能电子元件的第二承载结构经由至少一导电元件堆叠于该第一承载结构的第一表面上,且令该导电元件电性连接该第一与第二承载结构,其中,该功能电子元件电性连接该第二承载结构;以及形成封装层于该第一承载结构与该第二承载结构之间,以令该封装层包覆该第一电子元件、功能电子元件与导电元件。
前述的制法中,该导电元件先设于该第二承载结构上,再将该导电元件结合至该第一承载结构上。
前述的制法中,该导电元件先设于该第一承载结构的第一表面上,再将该第二承载结构结合至该导电元件上。
本发明还提供一种电子封装件的制法,包括:提供一具有相对的第一表面与第二表面的第一承载结构与一配置有功能电子元件的第二承载结构,其中,该第一表面上配置有至少一电性连接该第一承载结构的第一电子元件,且该第二表面上配置有多个电性连接该第一承载结构的导电体;形成至少一导电元件于该第一承载结构的第一表面或该第二承载结构上,且形成封装层于该第一承载结构的第一表面或该第二承载结构上;以及经由该导电元件堆叠该第一承载结构与该第二承载结构,使该封装层位于该第一承载结构与该第二承载结构之间,以令该封装层包覆该第一电子元件、功能电子元件与导电元件。
前述的制法中,于堆叠该第一承载结构与该第二承载结构前,该导电元件设于该第一承载结构与该第二承载结构的其中一者,且该封装层形成于该第一承载结构与该第二承载结构的另一者。
前述的制法中,于堆叠该第一承载结构与该第二承载结构前,该导电元件设于该第一承载结构与该第二承载结构的其中一者,且该封装层包覆该导电元件。
前述的电子封装件及其两种制法中,该第一承载结构的第二表面上设有至少一电性连接该第一承载结构的第二电子元件。
前述的电子封装件及其两种制法中,该第一承载结构的第二表面上设有一包覆该多个导电体的包覆层。例如,该导电体的部分表面外露于该包覆层。或者,该第一承载结构的第二表面上设有至少一电性连接该第一承载结构的第二电子元件,且该包覆层包覆该第二电子元件,例如,该第二电子元件的部分表面外露于该包覆层。
前述的电子封装件及其两种制法中,该功能电子元件位于该第一承载结构的第一表面与该第二承载结构之间。
前述的电子封装件及其两种制法中,该功能电子元件与该第一电子元件的配置相叠合。
前述的电子封装件及其两种制法中,还包括配置屏蔽结构于该第一承载结构或该第二承载结构上,且该封装层包覆该屏蔽结构。
由上可知,本发明的电子封装件及其制法中,主要经由将两承载结构相堆叠,以于后续制作电子产品时,能减少该电子封装件占用母板的空间或表面积,故相比于现有技术,本发明的电子封装件不仅能使母板有足够的空间放置其它封装模块或增加电池容量,且有利于缩减该电子产品的体积,使该电子产品符合轻薄短小的发展潮流。
附图说明
图1为现有电子产品的立体示意图。
图2A至图2E为本发明的电子封装件的制法的第一实施例的剖面示意图。
图2B’及图2B”为图2B的不同实施方式的示意图。
图2D’及图2D”为图2D的其它不同实施例的局部示意图。
图2E’为图2E的另一实施例的局部示意图。
图3A至图3C为本发明的电子封装件的制法的第二实施例的剖面示意图。
图3A’为图3A的另一实施方式的示意图。
图4A至图4C为本发明的电子封装件的屏蔽结构的不同布设状态的上视示意图。
符号说明
1 电子产品 1a,1b 半导体封装模块
10 母板 2 电子封装件
2a,2b 封装模块 20 第一承载结构
20a 第一表面 20b 第二表面
21,21’ 第一电子元件 210,220,230 导电凸块
22 第二电子元件 23 功能电子元件
24 第二承载结构 25 导电元件
26 屏蔽结构 27 封装层
28,28’ 导电体 28a 端面
29 包覆层 29a 表面
290 开孔 9 电子装置
90 焊锡凸块 A 侧面交错处
D 距离 S 切割路径。
具体实施方式
以下经由特定的具体实施例说明本发明的实施方式,本领域技术人员可由本说明书所揭示的内容轻易地了解本发明的其他优点及功效。
须知,本说明书所附图式所绘示的结构、比例、大小等,均仅用以配合说明书所揭示的内容,以供本领域技术人员的了解与阅读,并非用以限定本发明可实施的限定条件,故不具技术上的实质意义,任何结构的修饰、比例关系的改变或大小的调整,在不影响本发明所能产生的功效及所能达成的目的下,均应仍落在本发明所揭示的技术内容得能涵盖的范围内。同时,本说明书中所引用的如“第一”、“第二”、及“一”等的用语,也仅为便于叙述的明了,而非用以限定本发明可实施的范围,其相对关系的改变或调整,在无实质变更技术内容下,当也视为本发明可实施的范畴。
图2A至图2E为本发明的电子封装件2的制法的第一实施例的剖面示意图。
如图2A所示,提供一封装模块2a,其包含一第一承载结构20、至少一第一电子元件(本实施例中显示有两个第一电子元件21,21’)及多个导电体28。
所述的第一承载结构20为整版面基板形式,即该整版面基板包含多个基板单元,例如为具有核心层与线路结构的封装基板或无核心层(coreless)的线路结构,其具有相对的第一表面20a与第二表面20b,且该线路结构包含至少一绝缘层及至少一结合该绝缘层的线路层,如至少一扇出(fan out)型重布线路层(redistribution layer,简称RDL)。应可理解地,该第一承载结构20也可为其它承载芯片的板材,如导线架(lead frame)、晶圆(wafer)、或其它具有金属布线(routing)的载板等,并不限于上述。
在本实施例中,该第一承载结构20的制程方式繁多,例如,可采用晶圆制程制作线路层,而以化学气相沉积(Chemical vapor deposition,简称CVD)形成氮化硅或氧化硅以作为绝缘层;或者,可采用一般非晶圆制程方式形成线路层,即采用成本较低的高分子介电材作为绝缘层,如聚酰亚胺(Polyimide,简称PI)、聚对二唑苯(Polybenzoxazole,简称PBO)、预浸材(Prepreg,简称PP)、封装胶体(molding compound)、感光型介电层或其它材料等以涂布方式形成。
所述的第一电子元件21,21’设于该承载结构20的第一表面20a上。
在本实施例中,该第一电子元件21,21’为主动元件(如图中标号21)、被动元件(如图中标号21’)或其组合者,其中,该主动元件为例如半导体芯片,而该被动元件为例如电阻、电容及电感。例如,该第一电子元件21为半导体芯片,其可经由多个如焊锡材料、金属柱(pillar)或其它等的导电凸块210以覆晶方式设于该第一承载结构20的线路层上并电性连接该线路层;或者,该第一电子元件21可经由多个焊线以打线方式电性连接该第一承载结构20的线路层;亦或,该第一电子元件21可直接接触该第一承载结构20的线路层。另该第一电子元件21’为被动元件。
此外,可依需求于该承载结构20的第二表面20b上配置第二电子元件22,其为主动元件、被动元件或其组合者,其中,该主动元件为例如半导体芯片,而该被动元件为例如电阻、电容及电感。例如,该第二电子元件22为半导体芯片,其可经由多个如焊锡材料、金属柱(pillar)或其它等的导电凸块220以覆晶方式设于该第一承载结构20的线路层上并电性连接该线路层;或者,该第二电子元件22可经由多个焊线以打线方式电性连接该第一承载结构20的线路层;亦或,该第二电子元件22可直接接触该第一承载结构20的线路层。
因此,可于该第一承载结构20的第一表面20a与第二表面20b接置任意种类或数量的电子元件,以提升其电性功能,且有关电子元件电性连接承载结构的方式繁多,并不限于上述。
所述的导电体28为如铜柱状的金属凸块、焊锡材、金属针或其它导电构造,其形成于该第一承载结构20的第二表面20b上。
在本实施例中,该导电体28以图案化方式,如电镀金属、沉积金属或蚀刻金属等制程形成于该第一承载结构20的第二表面20b上。
此外,可于该第一承载结构20的第二表面20b上形成一包覆层29,以包覆该些导电体28。具体地,该包覆层29为绝缘材,如聚酰亚胺(PI)、干膜(dry film)、如环氧树脂(epoxy)的封装胶体或封装材(molding compound),其可用压合(lamination)、涂布(coating)或模压(molding)的方式形成于该第一承载结构20的第二表面20b上。
如图2B所示,将另一封装模块2b(其包含一配置有至少一功能电子元件23的第二承载结构24)经由一个或多个导电元件25结合于该第一承载结构20的第一表面20a上。
所述的第二承载结构24为整版面基板形式,即该整版面基板包含多个基板单元,例如为具有核心层与线路结构的封装基板或无核心层(coreless)的线路结构,其包含至少一绝缘层及至少一结合该绝缘层的线路层,如至少一扇出(fan out)型重布线路层(RDL)。应可理解地,该第二承载结构24也可为其它承载芯片的板材,如导线架(lead frame)、晶圆(wafer)、或其它具有金属布线(routing)的载板等,并不限于上述。
在本实施例中,该第二承载结构24的制程方式繁多,例如,可采用晶圆制程制作线路层,而以化学气相沉积(CVD)形成氮化硅或氧化硅以作为绝缘层;或者,可采用一般非晶圆制程方式形成线路层,即采用成本较低的高分子介电材作为绝缘层,如聚酰亚胺(PI)、聚对二唑苯(PBO)、预浸材(PP)、封装胶体、感光型介电层或其它等以涂布方式形成。
所述的功能电子元件23位于该承载结构20的第一表面20a与该第二承载结构24之间,且其与该第一电子元件21,21’的配置可相叠合(overlap)。例如,该功能电子元件23的侧面与该第一电子元件21的侧面相叠合,如侧面交错处A。
在本实施例中,该功能电子元件23为主动元件、被动元件或其组合者,其中,该主动元件为例如半导体芯片,而该被动元件为例如电阻、电容及电感。例如,该功能电子元件23为半导体芯片,其可经由多个如焊锡材料、金属柱(pillar)或其它等的导电凸块230以覆晶方式设于该第二承载结构24的线路层上并电性连接该线路层;或者,该功能电子元件23可经由多个焊线以打线方式电性连接该第二承载结构24的线路层;亦或,该功能电子元件23可直接接触该第二承载结构24的线路层。应可理解地,可于该第二承载结构24上接置任意种类或数量的电子元件,以提升其电性功能,且有关电子元件电性连接承载结构的方式繁多,并不限于上述。
所述的导电元件25电性连接该第一承载结构20的线路层与第二承载结构24的线路层,其可为如铜柱的金属柱、包覆有绝缘块的金属凸块、焊球(solder ball)、具有核心铜球(Cu core ball)的焊球或其它导电构造等,且其形状并未有特殊限制,如圆柱体、椭圆柱体或多边形柱体皆可。
在本实施例中,该导电元件25可先形成于该第二承载结构24上,再堆叠结合至该第一承载结构20的第一表面20a上,如图2B’所示;或者,该导电元件25也可先形成于该第一承载结构20的第一表面20a上,再将该第二承载结构24堆叠结合至该导电元件25上,如图2B”所示。
另一方面,可依需求,于该第一承载结构20的第一表面20a与该第二承载结构24之间形成至少一屏蔽结构26,以防止多个第一电子元件21之间或多个功能电子元件23之间的电磁波相互干扰,且防止外界电磁波干扰该第一电子元件21与功能电子元件23的内部电路。
所述的屏蔽结构26设于该第一承载结构20的第一表面20a上、该第二承载结构24上或两侧接固于该第一承载结构20与第二承载结构24上,且依需求电性连接该第一承载结构20的接地及/或第二承载结构24的接地,也可未电性连接该第一承载结构20与第二承载结构24。
在本实施例中,该屏蔽结构26呈框架状、墙状或柱状,且形成该屏蔽结构26的材料为导电材,如铜、金、镍或铝等的金属,并可以粘贴、电镀、沉积或其它方式配置于承载结构上。具体地,如图4A所示,该屏蔽结构26布设于多个第一电子元件21之间或多个功能电子元件23之间;或者,如图4B及图4C所示,该屏蔽结构26布设于所有该第一电子元件21的布设区域的周围或所有该功能电子元件23的布设区域的周围。应可理解地,有关该屏蔽结构26的构造与设置方式繁多,并不限于上述。
此外,该屏蔽结构26可配合该导电元件25配置于同一承载结构上,如图2B’及图2B”所示;或者,该屏蔽结构26也可自行配置,即不需配合该导电元件25配置于同一承载结构上。
如图2C所示,形成一封装层27于该第一承载结构20的第一表面20a与该第二承载结构24之间,以令该封装层27包覆该第一电子元件21、功能电子元件23、导电元件25与屏蔽结构26。
在本实施例中,该封装层27接触该第一承载结构20的第一表面20a与该第二承载结构24,且形成该封装层27的材料为绝缘材,如聚酰亚胺(PI)、环氧树脂(epoxy)的封装胶体或封装材,其可用模压(molding)方式形成。
如图2D所示,移除该包覆层29的部分材料,以露出该导电体28的部分表面。
在本实施例中,经由如研磨方式的整平制程移除该包覆层29的部分材料,使该导电体28的端面28a齐平该包覆层29的表面29a。或者,如图2D’所示,以如激光的钻孔方式于该包覆层29的表面29a上形成多个外露该导电体28的开孔290。亦或,如图2D”所示,于移除该包覆层29的部分材料后,该导电体28的端面28a可凸出该包覆层29的表面29a。
此外,于移除该包覆层29的部分材料后,该第二电子元件22未外露于该包覆层29的表面29a。应可理解地,该第二电子元件22也可外露于该包覆层29的表面29a,且该第二电子元件22外露的方式可如图2D、图2D’或图2D”所述的导电体28的外露方式。
如图2E所示,沿如图2D所示的切割路径S进行切单制程,以得到多个电子封装件2。
在本实施例中,若该导电体28为非焊锡构造,可形成多个焊锡凸块90于各该导电体28的外露端面28a上,以于回焊该焊锡凸块90后接置于一如电路板或母板的电子装置9上;亦或如图2E’所示,若该导电体28’为焊锡材,则回焊该导电体28’以结合至一如电路板或母板的电子装置9上。
图3A至图3C为本发明的电子封装件2的制法的第二实施例的剖面示意图。本实施例与第一实施例的差异在于封装层的制作方式,其它制程大致相同,故以下不再赘述相同处。
如图3A所示,对应于图2A的制程中,形成一封装层27于该封装模块2a的第一承载结构20的第一表面20a上,以令该封装层27包覆该第一电子元件21,21’,再采用图2B’的堆叠方式,将该第二承载结构24压合于该封装层27上,且令该导电元件25与该屏蔽结构26插入该封装层27中,如图3B所示。
在本实施例中,该封装层27为如聚酰亚胺(PI)、干膜(dry film)、如环氧树脂(epoxy)的封装胶体或封装材(molding compound),其可用压合(lamination)或涂布(coating)的方式形成。
此外,也可将该封装层27形成于该第二承载结构24上以包覆该功能电子元件23,如图3A’所示,再采用图2B”的堆叠方式,将该第二承载结构24经由该封装层27压合于该第一承载结构20的第一表面20a上,且该第一电子元件21,21’、导电元件25与该屏蔽结构26埋入该封装层27中,如图3B所示。或者,可先将该封装层27与该导电于件25形成于同一承载结构上,再将另一承载结构压合于该封装层27上。
如图3C所示,进行图2D至图2E的制程,且令该第二电子元件22外露于该包覆层29的表面,以获取该电子封装件2。
本发明的电子封装件2的制法中,主要经由将两封装模块2a,2b相堆叠,且以该些导电体28,28’作为外接点,以于后续制作电子产品时,能减少该电子封装件2占用该电子装置9的空间或表面积,故相比于现有技术,本发明的电子封装件2不仅能使该电子装置9有足够的空间放置其它封装模块或增加电池容量,且有利于缩减该电子产品的体积,使该电子产品符合轻薄短小的发展趋势。
此外,于该第一承载结构2a上可依需求层层堆叠多组封装模块2b(或多组配置有功能电子元件23的第二承载结构24)。
另外,由于该些导电体28,28’作为外接点,故该第二承载结构24(或最外侧的第二承载结构24)的上表面不需设计外接点。
另外,经由该功能电子元件23与该第一电子元件21,21’的叠合(overlap)配置,可缩减该第一承载结构20与第二承载结构24之间的距离D,以薄化该电子封装件2。
本发明还提供一种电子封装件2,其包括:第一承载结构20、第一电子元件21,21’、多个导电体28,28’、第二承载结构24、功能电子元件23以及封装层27。
所述的第一承载结构20具有相对的第一表面20a与第二表面20b。
所述的第一电子元件21,21’设于该第一承载结构20的第一表面20a上且电性连接该第一承载结构20。
所述的导电体28,28’设于该第一承载结构20的第二表面20b上且电性连接该第一承载结构20。
所述的第二承载结构24经由至少一导电元件25堆叠于该第一承载结构20的第一表面20a上,且该导电元件25电性连接该第一与第二承载结构20,24。
所述的功能电子元件23配置于该第二承载结构24上且电性连接该第二承载结构24。
所述的封装层27形成于该第一承载结构20的第一表面20a与该第二承载结构24之间以包覆该第一电子元件21,21’、功能电子元件23与导电元件25。
在一实施例中,该第一承载结构20的第二表面20b上设有至少一电性连接该第一承载结构20的第二电子元件22。
在一实施例中,该第一承载结构20的第二表面20b上设有一包覆该多个导电体28,28’的包覆层29。例如,该导电体28,28’的部分表面外露于该包覆层29。或者,该第一承载结构20的第二表面20b上设有至少一电性连接该第一承载结构20的第二电子元件22,且该包覆层29包覆该第二电子元件22。进一步,该第二电子元件22的部分表面外露于该包覆层29。
在一实施例中,该功能电子元件23位于该第一承载结构20的第一表面20a与该第二承载结构24之间。
在一实施例中,该功能电子元件23的位置叠合该第一电子元件21的位置。
在一实施例中,所述的电子封装件2还包括形成于该第一承载结构20或该第二承载结构24上的屏蔽结构26,且该封装层27包覆该屏蔽结构26。
综上所述,本发明的电子封装件及其制法,主要经由将两承载结构相堆叠,以于后续制作电子产品时,能减少电子封装件占用母板的空间或表面积,故相比于现有技术,本发明的电子封装件不仅能使母板有足够的空间放置其它封装模块或增加电池容量,且有利于缩减该电子产品的体积,使该电子产品符合轻薄短小的发展潮流。
上述实施例仅用以例示性说明本发明的原理及其功效,而非用于限制本发明。任何本领域技术人员均可在不违背本发明的精神及范畴下,对上述实施例进行修改。因此本发明的权利保护范围,应如权利要求书所列。
Claims (19)
1.一种电子封装件,其特征在于,包括:
一第一承载结构,其具有相对的第一表面与第二表面;
至少一第一电子元件,其配置于该第一承载结构的第一表面上且电性连接该第一承载结构;
多个导电体,其设于该第一承载结构的第二表面上且电性连接该第一承载结构;
一第二承载结构,其经由至少一导电元件堆叠于该第一承载结构的第一表面上,且令该导电元件电性连接该第一承载结构与第二承载结构;
至少一功能电子元件,其配置于该第二承载结构上且电性连接该第二承载结构;
屏蔽结构,其设于该第一承载结构与第二承载结构之間,且该屏蔽结构两侧接固于该第一承载结构与第二承载结构;以及
一封装层,其形成于该第一承载结构与该第二承载结构之间以包覆该第一电子元件、该功能电子元件、该屏蔽结构与该导电元件。
2.根据权利要求1所述的电子封装件,其特征在于,该第一承载结构的第二表面上设有至少一电性连接该第一承载结构的第二电子元件。
3.根据权利要求1所述的电子封装件,其特征在于,该第一承载结构的第二表面上设有一包覆该多个导电体的包覆层。
4.根据权利要求3所述的电子封装件,其特征在于,该导电体的部分表面外露于该包覆层。
5.根据权利要求3所述的电子封装件,其特征在于,该第一承载结构的第二表面上设有至少一电性连接该第一承载结构的第二电子元件,且该包覆层包覆该第二电子元件。
6.根据权利要求5所述的电子封装件,其特征在于,该第二电子元件的部分表面外露于该包覆层。
7.根据权利要求1所述的电子封装件,其特征在于,该功能电子元件与该第一电子元件的配置相叠合。
8.一种电子封装件的制法,其特征在于,包括:
提供一具有相对的第一表面与第二表面的第一承载结构,其中,该第一表面上配置有至少一电性连接该第一承载结构的第一电子元件,且该第二表面上配置有多个电性连接该第一承载结构的导电体;
将一配置有功能电子元件的第二承载结构经由至少一导电元件及屏蔽结构堆叠于该第一承载结构的第一表面上,且令该导电元件电性连接该第一承载结构与第二承载结构,其中,该功能电子元件电性连接该第二承载结构,其中,于堆叠前配置屏蔽结构于该第一承载结构或该第二承载结构上,使堆叠后的屏蔽结构设于该第一承载结构的第一表面与第二承载结构之間,且该屏蔽结构两侧接固于该第一承载结构与第二承载结构;以及
形成封装层于该第一承载结构与该第二承载结构之间,以令该封装层包覆该第一电子元件、功能电子元件、屏蔽结构与导电元件。
9.根据权利要求8所述的电子封装件的制法,其特征在于,该导电元件先设于该第二承载结构上,再将该导电元件结合至该第一承载结构上。
10.根据权利要求8所述的电子封装件的制法,其特征在于,该导电元件先设于该第一承载结构的第一表面上,再将该第二承载结构结合至该导电元件上。
11.一种电子封装件的制法,其特征在于,包括:
提供一具有相对的第一表面与第二表面的第一承载结构与一配置有功能电子元件的第二承载结构,其中,该第一表面上配置有至少一电性连接该第一承载结构的第一电子元件,且该第二表面上配置有多个电性连接该第一承载结构的导电体;
形成至少一导电元件及屏蔽结构于该第一承载结构的第一表面或该第二承载结构上,且形成封装层于该第一承载结构的第一表面或该第二承载结构上;以及
经由该导电元件及该屏蔽结构堆叠该第一承载结构与该第二承载结构,且该屏蔽结构两侧接固于该第一承载结构与第二承载结构,使该封装层位于该第一承载结构与该第二承载结构之间,且令该封装层包覆该第一电子元件、该功能电子元件、该屏蔽结构与该导电元件。
12.根据权利要求11所述的电子封装件的制法,其特征在于,于堆叠该第一承载结构与该第二承载结构前,该导电元件设于该第一承载结构与该第二承载结构的其中一者,且该封装层形成于该第一承载结构与该第二承载结构的另一者。
13.根据权利要求11所述的电子封装件的制法,其特征在于,于堆叠该第一承载结构与该第二承载结构前,该导电元件设于该第一承载结构与该第二承载结构的其中一者,且该封装层包覆该导电元件。
14.根据权利要求8或11所述的电子封装件的制法,其特征在于,该第一承载结构的第二表面上设有至少一电性连接该第一承载结构的第二电子元件。
15.根据权利要求8或11所述的电子封装件的制法,其特征在于,该第一承载结构的第二表面上设有一包覆该多个导电体的包覆层。
16.根据权利要求15所述的电子封装件的制法,其特征在于,该导电体的部分表面外露于该包覆层。
17.根据权利要求15所述的电子封装件的制法,其特征在于,该第一承载结构的第二表面上设有至少一电性连接该第一承载结构的第二电子元件,且该包覆层包覆该第二电子元件。
18.根据权利要求17所述的电子封装件的制法,其特征在于,该第二电子元件的部分表面外露于该包覆层。
19.根据权利要求8或11所述的电子封装件的制法,其特征在于,该功能电子元件与该第一电子元件的配置相叠合。
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JP2005340469A (ja) * | 2004-05-26 | 2005-12-08 | Matsushita Electric Ind Co Ltd | 回路基板用コンポジットシート、積層シート、シート構造体、回路基板、シート構造体の製造方法及び回路基板の製造方法 |
US7885081B2 (en) * | 2005-09-20 | 2011-02-08 | Murata Manufacturing Co., Ltd. | Component incorporating module |
CN109509722A (zh) * | 2017-09-15 | 2019-03-22 | 新科金朋私人有限公司 | 形成嵌入式管芯衬底的半导体器件和方法,以及具有所述嵌入式管芯衬底的系统级封装模块 |
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US12009340B2 (en) | 2024-06-11 |
US20200388591A1 (en) | 2020-12-10 |
US20220005786A1 (en) | 2022-01-06 |
US11152331B2 (en) | 2021-10-19 |
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