CN112028378A - Integrated treatment system for semiconductor industrial wastewater - Google Patents

Abstract

The invention discloses an integrated treatment system for semiconductor industry wastewater, comprising a wastewater collection tank, an MBR membrane treatment unit, an activated carbon filter unit, and an MF treatment unit. The unit and the MF treatment unit are connected, and the water storage tank is connected by pipes to form an integrated treatment system. The treated semiconductor wastewater is mainly organic wastewater, and the purified water is mainly used for cooling towers, waste gas washing towers and greening in the factory area. This integrated treatment system can not only save a lot of water resources, but also reduce environmental pollution, solve the problem of recycling and reuse of wastewater in the semiconductor industry, and realize the recycling of wastewater.

Description

An integrated treatment system for semiconductor industry wastewater

technical field

The invention belongs to the field of industrial regeneration water treatment, and in particular relates to an integrated treatment system for semiconductor industrial wastewater.

Background technique

The semiconductor industry is a high energy consumption industry, and a large amount of industrial waste water will be generated during the semiconductor manufacturing process. With the increasing shortage of water and other resources and the increasing urgency of environmental pollution control, the development trend of industrial wastewater is to recycle water and pollutants as useful resources and implement closed-circuit circulation. Membrane separation technology can perfectly meet the above standards. With the development of water treatment technology, this process has gradually been applied in water treatment.

In the field of sewage treatment and water resource reuse, MBR, also known as Membrane Bio-Reactor, is a new type of water treatment technology that combines activated sludge process and membrane separation technology.

The application number is: CN201820915919.7, the application date is: 20180613, and the title is: A convective MBR wastewater treatment equipment patent, discloses a convective MBR wastewater treatment equipment, including MBR pool, MBR diaphragm and fan, The inner lower side of the MBR pool is connected with a first connection block, and the top of the first connection block is connected with an MBR membrane connection block, and the lower right side of the MBR pool is provided with a fourth valve, and the fourth valve passes through The double-pass water pipe is connected to the MBR pool, the fan is connected to the MBR membrane connecting block through the double-pass water pipe, and the left side of the fan is provided with a first valve, and the first valve is located on the right side of the MBR pool, the MBR membrane The upper and lower sides of the sheet are provided with blocks connected to the MBR film. The convective MBR wastewater treatment equipment.

The application number is: CN201620520752.5, the application date is: 20160601 The patent titled: A water treatment equipment discloses a water treatment equipment, the water treatment equipment at least includes a grid filter, an advanced oxidation unit, a biological Activated carbon adsorption tank and MF filter unit, the first ozone contact tank and the biological activated carbon adsorption tank are connected in parallel to the pre-grid filter tank through the filtered water tank, and the second ozone contact tank unit is bidirectionally connected to the biological activated carbon adsorption tank The biological activated carbon adsorption tank is connected to the MF filter unit, and the MF filter unit is connected to the MF water production tank; , filtered water tank, filtered water lift pump and backwash pump; the advanced oxidation unit includes a first ozone contact pool and a second ozone contact pool. The invention has great significance in saving energy, reducing consumption and protecting the environment.

SUMMARY OF THE INVENTION

The technical problem solved by the present invention is to provide an integrated treatment system for semiconductor industry wastewater.

The purpose of the present invention can be achieved through the following technical solutions:

An integrated treatment system for semiconductor industry wastewater, comprising a wastewater collection tank, an MBR membrane treatment unit, an activated carbon filter unit, and an MF treatment unit. unit connection, reservoir;

The MBR membrane treatment unit includes a pH adjustment tank, an anaerobic tank, an anoxic tank, an aerobic tank, an MBR integrated device, an MBR water production tank, the pH adjustment tank, the anaerobic tank, the anoxic tank, the aerobic tank, MBR integrated device, MBR water production pools are sequentially connected through pipelines, the MBR integrated device is provided with an MBR membrane module, a bioreactor, and a blower, and the MBR membrane module is arranged inside the bioreactor;

The activated carbon filter unit includes an activated carbon filter, and the activated carbon filter is a pressure vessel filled with a coarse quartz sand cushion and activated carbon,

The MF processing unit includes a filter element, and the filter element includes a microfiltration membrane, an inner and outer diversion layer, an end cover of the filter element, a casing and a center rod.

Preferably, the MBR integrated device includes an activated sludge system, the activated sludge system is arranged before the MBR membrane module, and the waste water enters the activated sludge system through a pipeline through an aerobic tank.

More preferably, a suction pump is provided between the MBR water storage tank and the MBR water production tank.

More preferably, the pore size of the MBR membrane module is 0.01 μm-0.03 μm.

More preferably, the MBR membrane treatment unit further includes a sludge return system and a backwash pump, the sludge return system is arranged in the MBR integrated device, and the backwash pump is arranged in the sludge return system.

Preferably, the shell of the activated carbon filter is stainless steel or glass fiber reinforced plastic.

Preferably, the microfiltration membrane of the MF processing unit is an organic polymer membrane.

Beneficial effects of the present invention:

The system wastewater collection tank, MBR membrane treatment unit, activated carbon filter unit, and MF treatment unit are set up, so that this system can not only effectively remove the pollutants from the semiconductor industry wastewater, but also realize the recycling of wastewater, which can not only save a lot of water resources, And reduce environmental pollution.

Description of drawings

FIG. 1 is a schematic structural diagram of an integrated treatment system for wastewater in the semiconductor industry.

Detailed ways

As shown in conjunction with the accompanying drawings, the technical scheme of the present invention is further described:

An integrated treatment system for semiconductor industry wastewater, comprising a wastewater collection tank, an MBR membrane treatment unit, an activated carbon filter unit, and an MF treatment unit. unit connection, reservoir;

The MBR membrane treatment unit includes a pH adjustment tank, an anaerobic tank, an anoxic tank, an aerobic tank, an MBR integrated device, an MBR water production tank, the pH adjustment tank, the anaerobic tank, the anoxic tank, the aerobic tank, MBR integrated device, MBR water production pools are sequentially connected through pipelines, the MBR integrated device is provided with an MBR membrane module, a bioreactor, and a blower, and the MBR membrane module is arranged inside the bioreactor;

The activated carbon filter unit includes an activated carbon filter, and the activated carbon filter is a pressure vessel filled with a coarse quartz sand cushion and activated carbon,

The MF processing unit includes a filter element, and the filter element includes a microfiltration membrane, an inner and outer diversion layer, an end cover of the filter element, a casing and a center rod.

In this embodiment, preferably, the MBR integrated device includes an activated sludge system, the activated sludge system is arranged before the MBR membrane module, and the waste water enters the activated sludge system through a pipeline through an aerobic tank.

In this embodiment, preferably, a suction pump is provided between the MBR water storage tank and the MBR water production tank.

In this embodiment, preferably, the pore size of the MBR membrane module is 0.01 μm-0.03 μm.

In this embodiment, preferably, the MBR membrane treatment unit further includes a sludge return system and a backwash pump, the sludge return system is arranged in the MBR integrated device, and the backwash pump is arranged in the sludge return system Inside.

In this embodiment, preferably, the shell of the activated carbon filter is stainless steel or glass fiber reinforced plastic.

In this embodiment, preferably, the microfiltration membrane of the MF processing unit is an organic polymer membrane.

The MBR membrane treatment unit includes a pH adjustment tank, an anaerobic tank, an anoxic tank, an aerobic tank, an MBR integrated device, and a water production tank. The wastewater from the semiconductor industry is firstly discharged into the wastewater collection tank, and then enters the pH adjustment tank, the anaerobic tank, the anoxic tank and the aerobic tank in turn. After the front-end biochemical treatment of the activated sludge system, it enters the MBR integrated device. The device is provided with an activated sludge system and a bioreactor, as well as a blower, a suction pump, a sludge return system, and a backwash pump, wherein the MBR membrane module is placed inside the bioreactor.

Among them, the MBR process is an integrated structure. The membrane module is placed inside the bioreactor, and the influent water enters the membrane-bioreactor. Most of the pollutants in it have been removed by the activated sludge in the mixed solution. The blower is used for continuous aeration. Under the action of negative pressure, the water is filtered through the MBR membrane. It enters the MBR production pool through the suction pump. The effluent enters the MBR water production tank, and then enters the activated carbon filter device through the pump, and uses the strong adsorption performance of activated carbon to further treat the wastewater, and then the effluent enters the microfiltration filter. The final effluent is mainly used for cooling towers, waste gas washing towers and green irrigation in the plant Wait for water.

The activated carbon filter unit is mainly activated carbon filter, which is a pressure vessel filled with coarse quartz sand cushion and high-quality activated carbon. The shell is generally stainless steel or glass fiber reinforced plastic. Part of heavy metal ions, and can effectively reduce the color of water.

The activated carbon filter mainly uses activated carbon organic flocs with high carbon content, large molecular weight and large specific surface area to physically adsorb impurities in the water to meet the water quality requirements. When the water flows through the pores of the activated carbon, various suspended particles, organic matter, etc. At the same time, the chlorine (hypochlorous acid) adsorbed on the surface of the activated carbon undergoes a chemical reaction on the surface of the activated carbon and is reduced to chloride ions, thereby effectively removing the chlorine and ensuring that the residual chlorine in the effluent is less than 0.1 ppm. Granular activated carbon is used to further remove residual chlorine, organic matter, and suspended matter impurities in the effluent of the MBR membrane reactor, providing good conditions for subsequent MF treatment.

The principle of activated carbon adsorption is to form a layer of balanced surface concentration on the surface of the particles, and then adsorb organic substances into the activated carbon particles, and the adsorption effect at the initial stage of use is very high. But over time, the adsorption capacity of activated carbon will be weakened to varying degrees, and the adsorption effect will also decrease. The difference in the performance of the activated carbon loaded can achieve different treatment effects, mainly to remove organic matter, chromaticity, residual chlorine, some heavy metal ions, detergents, bacteria and viruses in the water; among them, the content of the activated carbon filter effluent should also be regularly detected. When chlorine is greater than 0.1mg/l, it means that the adsorption has been saturated, and the effluent must not be sent to the microfiltration filter treatment device, and the activated carbon must be replaced in time.

After the wastewater is filtered by activated carbon, the water quality is further purified, and then pumped into the microfiltration treatment unit of the precision filter. The microfiltration operation is simple, the water flow is large, the working pressure is low, and the water production rate is high; It belongs to precision filtration, which traps grit, silt, clay and other particles in the solution and Giardia, Cryptosporidium, algae and some bacteria, etc., while a large amount of solvent, small molecules and a small amount of macromolecular solutes can pass through the separation process of the membrane .

The MF processing unit is an organic combination of microfiltration equipment and some supporting equipment to assemble an independent microfiltration system, which includes microfiltration membrane, inner and outer diversion layers, filter element end caps, shell and center rod, etc. Can form a filter element. What determines the separation effect of the membrane is the physical structure, shape and size of the macropores of the membrane. According to the retention position of particles in the microfiltration process, it can be divided into 3 retention mechanisms: sieving, adsorption and bridging. After the wastewater is filtered by activated carbon, the water quality is further purified, and then pumped into the microfiltration treatment unit of the precision filter. The microfiltration operation is simple, the water flow is large, the working pressure is low, and the water production rate is high; It belongs to precision filtration, which traps grit, silt, clay and other particles in the solution and Giardia, Cryptosporidium, algae and some bacteria, etc., while a large amount of solvent, small molecules and a small amount of macromolecular solutes can pass through the separation process of the membrane .

The semiconductor industry wastewater after microfiltration treatment is mainly used for cooling towers, waste gas washing towers and green irrigation water in the factory area.

Among them, the main water quality indicators of organic wastewater: pH is 5.5-8.5, COD is 500-1000mg/l, NH3-N is 50-100mg/l, SS is 10-100mg/l,; after the combined process treatment, the effluent index pH is 6.5-7.5, COD is 10-30mg/l, NH ₃ -N is 0.1-1mg/l, the removal rate of main pollutants can reach more than 95%, the removal rate of SS is 100%, and the effluent quality meets the requirements of "Urban Sewage Recycling and Utilization Engineering". Water Quality", the effluent quality is good and stable.

The MBR treatment unit sequentially includes: pH adjustment tank, anaerobic tank, anoxic tank, aerobic tank, and MBR integrated device. The pore size of the MBR membrane module is 0.01 μm-0.03 μm; the MBR membrane bioreactor is a biological treatment technology and membrane separation. A new technology combined with technology, which replaces the secondary sedimentation tank in the traditional process, it can efficiently carry out solid-liquid separation and obtain stable reclaimed water for direct use. It can also maintain a high concentration of microorganisms in the biological pool, with less residual sludge in the process, extremely effective removal of ammonia nitrogen, effluent suspended solids and turbidity close to zero, bacteria and viruses in effluent water are largely removed, low energy consumption, land occupation Small area.

The MF treatment unit selects the microporous membrane as the filter medium, and removes the impurity particles of a certain size in the water by means of physical interception. Driven by pressure, small-sized substances such as water, low organic molecules, and inorganic ions in the solution can pass through the micropores on the fiber wall to reach the other side of the membrane. Substances cannot pass through the fiber wall and are retained, so as to achieve the purpose of sieving different components in the solution. The process is operated at room temperature, with no phase change and no secondary pollution.

Finally, it should be noted that:

Those skilled in the art can refer to the content herein, implement the method, and realize its application. It should be particularly pointed out that all similar replacements and modifications are obvious to those skilled in the art, and they are all considered to be included in the present invention. The method and application of the present invention have been described through preferred embodiments, and it is obvious that relevant persons can make changes or appropriate changes and combinations to the methods and applications of the present invention without departing from the content, spirit and scope of the present invention. and application of the technology of the present invention.

The above embodiments are only used to illustrate rather than limit the technical solutions of the present invention. Although the present invention has been described in detail with reference to the above embodiments, those of ordinary skill in the art should understand that the present invention can still be modified or equivalently replaced without departing from the The spirit and scope of the invention and the appended claims are intended to cover such modifications or equivalents as fall within the spirit and scope of the invention.

Claims (7)

1. The utility model provides a be used for semiconductor industrial waste water integration processing system which characterized in that:

the device comprises a wastewater collection tank, an MBR membrane treatment unit, an active carbon filtration unit and an MF treatment unit, wherein the wastewater collection tank is sequentially connected with the MBR membrane treatment unit, the active carbon filtration unit and the MF treatment unit through pipelines, and a water storage tank;

the MBR membrane treatment unit comprises a pH adjusting tank, an anaerobic tank, an anoxic tank, an aerobic tank, an MBR integrated device and an MBR water production tank, wherein the pH adjusting tank, the anaerobic tank, the anoxic tank, the aerobic tank and the MBR integrated device are sequentially connected through a pipeline;

the active carbon filtering unit comprises an active carbon filter, the active carbon filter is a pressure container filled with a coarse quartz sand cushion layer and active carbon,

the MF treatment unit comprises a filter element, wherein the filter element comprises a microfiltration membrane, an inner flow guide layer, an outer flow guide layer, a filter element end cover, a shell and a center rod.

2. The integrated semiconductor industrial wastewater treatment system according to claim 1, wherein: the MBR integrated device comprises an activated sludge system, wherein the activated sludge system is arranged in front of an MBR membrane module, and the wastewater enters the activated sludge system through a pipeline through an aerobic tank.

3. The integrated semiconductor industrial wastewater treatment system according to claim 2, wherein: and a suction pump is arranged between the MBR water storage tank and the MBR water production tank.

4. The integrated semiconductor industrial wastewater treatment system according to claim 3, wherein: the aperture of the MBR membrane module is 0.01-0.03 μm.

5. The integrated semiconductor industrial wastewater treatment system according to claim 4, wherein: the MBR membrane treatment unit further comprises a sludge backflow system and a backwashing pump, the sludge backflow system is arranged in the MBR integrated device, and the backwashing pump is arranged in the sludge backflow system.

6. The integrated semiconductor industrial wastewater treatment system according to claim 1, wherein: the shell of the activated carbon filter is made of stainless steel or glass fiber reinforced plastic.

7. The integrated semiconductor industrial wastewater treatment system according to claim 1, wherein: and the microfiltration membrane of the MF treatment unit is an organic polymer membrane.

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