CN111980988A - Pressure cylinder, pressurizing device and hot-pressing sintering equipment - Google Patents
Pressure cylinder, pressurizing device and hot-pressing sintering equipment Download PDFInfo
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- CN111980988A CN111980988A CN202010970103.6A CN202010970103A CN111980988A CN 111980988 A CN111980988 A CN 111980988A CN 202010970103 A CN202010970103 A CN 202010970103A CN 111980988 A CN111980988 A CN 111980988A
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- 238000005245 sintering Methods 0.000 title claims abstract description 20
- 238000007731 hot pressing Methods 0.000 title abstract description 18
- 238000010438 heat treatment Methods 0.000 claims description 47
- 238000003825 pressing Methods 0.000 claims description 21
- 238000009413 insulation Methods 0.000 claims description 12
- 230000005540 biological transmission Effects 0.000 claims description 10
- 230000006835 compression Effects 0.000 claims 2
- 238000007906 compression Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 abstract description 10
- 238000007789 sealing Methods 0.000 description 11
- 238000005192 partition Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 238000004806 packaging method and process Methods 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000003028 elevating effect Effects 0.000 description 2
- 230000001965 increasing effect Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000033001 locomotion Effects 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 230000008094 contradictory effect Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 238000009766 low-temperature sintering Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
- F15B15/08—Characterised by the construction of the motor unit
- F15B15/14—Characterised by the construction of the motor unit of the straight-cylinder type
- F15B15/1404—Characterised by the construction of the motor unit of the straight-cylinder type in clusters, e.g. multiple cylinders in one block
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
- F15B15/08—Characterised by the construction of the motor unit
- F15B15/14—Characterised by the construction of the motor unit of the straight-cylinder type
- F15B15/1409—Characterised by the construction of the motor unit of the straight-cylinder type with two or more independently movable working pistons
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
- F15B15/08—Characterised by the construction of the motor unit
- F15B15/14—Characterised by the construction of the motor unit of the straight-cylinder type
- F15B15/1414—Characterised by the construction of the motor unit of the straight-cylinder type with non-rotatable piston
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
- F15B15/08—Characterised by the construction of the motor unit
- F15B15/14—Characterised by the construction of the motor unit of the straight-cylinder type
- F15B15/1423—Component parts; Constructional details
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
- F15B15/08—Characterised by the construction of the motor unit
- F15B15/14—Characterised by the construction of the motor unit of the straight-cylinder type
- F15B15/1423—Component parts; Constructional details
- F15B15/1457—Piston rods
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
- F15B15/08—Characterised by the construction of the motor unit
- F15B15/14—Characterised by the construction of the motor unit of the straight-cylinder type
- F15B15/149—Fluid interconnections, e.g. fluid connectors, passages
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
- F15B15/20—Other details, e.g. assembly with regulating devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B3/00—Intensifiers or fluid-pressure converters, e.g. pressure exchangers; Conveying pressure from one fluid system to another, without contact between the fluids
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Press Drives And Press Lines (AREA)
Abstract
The invention provides a pressure cylinder, a pressurizing device applying the pressure cylinder and hot-pressing sintering equipment applying the pressurizing device. The pressure cylinder includes: the cylinder body is internally provided with a plurality of pressure cavities, two adjacent pressure cavities are communicated through a first through hole, the cylinder body is also provided with a second through hole communicated with one pressure cavity, the second through hole and the first through hole are coaxially arranged, the cylinder body is provided with a plurality of air inlet holes and a plurality of air outlet holes, and one air inlet hole and one air outlet hole are communicated with one pressure cavity; each piston rod is movably arranged in one pressure cavity and penetrates through one first through hole to extend into the other pressure cavity, so that the piston rods are abutted in sequence, and one piston rod penetrates through the second through hole to extend out of the cylinder body. The technical scheme of the invention can improve the pressure adjusting range in the hot-pressing sintering equipment and meet the pressurizing requirements of different types of semiconductor devices.
Description
Technical Field
The invention relates to the technical field of semiconductor packaging, in particular to a pressure cylinder, a pressurizing device applying the pressure cylinder and hot-pressing sintering equipment applying the pressurizing device.
Background
In the hot pressing sintering equipment, an air cylinder is often used as a driving component of a pressurizing device to drive a pressure head to perform pressurization packaging on the semiconductor device. However, the single-layer cylinder in the conventional structure has a uniform volume, the adjustment range of the pressure applied to the pressure head is small, the heights and the specifications of the semiconductor devices are different, and the conventional pressurizing device cannot meet the pressurizing requirements of the semiconductor devices with different specifications and heights.
Disclosure of Invention
The invention mainly aims to provide a pressure cylinder, a pressurizing device applying the pressure cylinder and hot-pressing sintering equipment applying the pressurizing device, and aims to improve the pressure adjusting range in the hot-pressing sintering equipment and meet the pressurizing requirements of different types of semiconductor devices.
To achieve the above object, the present invention provides a pressure cylinder including:
the cylinder body is internally provided with a plurality of pressure cavities, two adjacent pressure cavities are communicated through a first through hole, the cylinder body is also provided with a second through hole communicated with one pressure cavity, the second through hole and the first through holes are coaxially arranged, the cylinder body is provided with a plurality of air inlet holes and a plurality of air outlet holes, and one air inlet hole and one air outlet hole are communicated with one pressure cavity; and
the piston rod, the piston rod is equipped with a plurality ofly, and each piston rod movably is located one the pressure chamber to pass one first through-hole stretches into another the pressure chamber, so that it is a plurality of the piston rod is the butt in proper order, and one of them the piston rod passes the second through-hole stretches out the cylinder body.
Optionally, each piston rod includes a supporting portion and a stopping portion connected to the supporting portion;
the stopping part can be movably limited in the pressure cavity, and one end of the abutting part, which is far away from the stopping part, penetrates through the first through hole to abut against the stopping part in the other pressure cavity.
Optionally, a plurality of pressure chambers in the cylinder body communicated through the first through hole are defined as a pressure chamber group, and the arrangement direction of the plurality of pressure chambers in the pressure chamber group is a first direction;
the cylinder body is provided with a plurality of pressure cavity groups, and the pressure cavity groups are arranged at intervals along a second direction perpendicular to the first direction.
Optionally, two pressure chambers arranged side by side in two adjacent pressure chamber groups are communicated through an air guide hole.
The invention also proposes a pressure device comprising:
a frame body;
the pressure cylinder in any one of the above items, wherein the pressure cylinder is arranged on the frame body;
the pressure head is in transmission connection with one end, protruding out of the cylinder body, of a piston rod of the pressure cylinder; and
the bearing mechanism is arranged on the frame body and is arranged at intervals with the pressure head, and the bearing mechanism is provided with a bearing platform for placing a product;
the pressure cylinder drives the pressure head to be close to or far away from the bearing platform, so that the pressure head presses the product of the bearing platform.
Optionally, the pressurizing device further comprises:
the heating mechanism is respectively contacted with the pressure head and the bearing platform to conduct heat so as to heat the product in the bearing platform.
Optionally, the heating mechanism comprises:
the first heating plate is arranged on one side, facing the bearing platform, of a pressure cylinder of the pressurizing device, and the pressure head penetrates through the first heating plate and is connected with a piston rod extending out of a cylinder body in the pressure cylinder;
the second hot plate is arranged on one side, deviating from the pressure head, of the bearing platform and is in contact with the bearing platform to conduct heat.
Optionally, a heat insulation structure is arranged between the pressure head and the piston rod;
and/or a heat insulation structure is arranged between the first heating plate and the pressure cylinder.
Optionally, the pressurizing device further comprises a lifting mechanism, and the lifting mechanism is in transmission connection with the bearing mechanism to drive the bearing platform to be close to or far away from the pressure head.
The invention also provides a hot-pressing sintering device, which comprises:
a frame;
the pressure device of any one of the preceding claims, wherein the pressure device is arranged on the frame.
According to the technical scheme, a plurality of pressure cavities are arranged in a cylinder body of a pressure cylinder, a piston rod is arranged in each pressure cavity, each piston rod penetrates through a first through hole between two adjacent pressure cavities and is abutted against a piston rod in the other pressure cavity, so that the forces on the piston rods are sequentially superposed, the superposed pressure is transmitted to one end of the piston rod extending out of a second through hole of the cylinder body, and the pressure adjusting range of the pressure cylinder is enlarged; further, each pressure chamber is provided with a separate air inlet hole and air outlet hole to adjust the air pressure in the pressure chamber, so that the pressure applied to each piston rod can be adjusted separately, and when the required pressure is small, only part of the pressure chamber can be used for pressing. Namely, according to the technical scheme of the invention, the pressure adjusting range of the pressure cylinder is enlarged through multi-stage pressure superposition, so that the pressurizing requirements of different types of semiconductor devices can be met.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a hot pressing sintering apparatus according to an embodiment of the present invention;
FIG. 2 is a side view of the hot press sintering apparatus of FIG. 1;
FIG. 3 is a schematic structural diagram of the pressurizing device of FIG. 1;
FIG. 4 is a schematic structural view of the pressure cylinder of FIG. 3;
FIG. 5 is a cross-sectional view of the pressure tube, first heated plate, insulation structure, and ram.
The reference numbers illustrate:
the implementation, functional features and advantages of the present invention will be further explained with reference to the accompanying drawings.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that if directional indications such as up, down, left, right, front, and rear … … are involved in the embodiment of the present invention, the directional indications are only used to explain the relative positional relationship, motion, and the like between the components in a specific posture as shown in the drawings, and if the specific posture is changed, the directional indications are changed accordingly.
In addition, if there is a description of "first", "second", etc. in an embodiment of the present invention, the description of "first", "second", etc. is for descriptive purposes only and is not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In addition, the meaning of "and/or" appearing throughout is to include three juxtapositions, exemplified by "A and/or B," including either the A or B arrangement, or both A and B satisfied arrangement. In addition, technical solutions between various embodiments may be combined with each other, but must be realized by a person skilled in the art, and when the technical solutions are contradictory or cannot be realized, such a combination should not be considered to exist, and is not within the protection scope of the present invention.
The invention provides a pressure cylinder 21 applied to a pressurizing device 20.
Referring to fig. 4, the pressure cylinder 21 includes: the cylinder body 211 is provided with a plurality of pressure chambers 2111, two adjacent pressure chambers 2111 are communicated through a first through hole 2116, the cylinder body 211 is further provided with a second through hole 2117 for communicating the pressure chambers 2111 with the outside, the cylinder body 211 is provided with a plurality of air inlet holes 2112 and a plurality of air outlet holes 2113, and one air inlet hole 2112 and one air outlet hole 2113 are communicated with one pressure chamber 2111; each of the piston rods 212 is movably disposed in one of the pressure chambers 2111, and extends into the other pressure chamber 2111 through one of the first through holes 2116, so that the plurality of piston rods 212 are abutted in sequence, wherein one of the piston rods 212 extends out of the cylinder through the second through hole 2117.
According to the technical scheme of the invention, a plurality of pressure cavities 2111 are arranged in a cylinder body 211 of a pressure cylinder 21, a piston rod 212 is arranged in each pressure cavity 2111, a first through hole 2116, which is formed between two adjacent pressure cavities 2111, of each piston rod 212 is abutted to a piston rod 212 in the other pressure cavity 2111, so that the forces on the piston rods 212 are sequentially superposed, and the superposed pressure is transmitted to one end of the piston rod 212 extending out from a second through hole 2117 of the cylinder body 211, so that the pressure adjusting range of the pressure cylinder 21 is enlarged; further, each pressure chamber 2111 is pressurized by a separate air inlet hole 2112 and air outlet hole 2113 to adjust the air pressure in the pressure chamber 2111, and thus the pressure applied to each piston rod 212 can be individually adjusted, and when the required pressure is small, only a part of the pressure chamber 2111 can be used for pressurization. That is, according to the technical scheme of the present invention, the pressure adjustment range of the pressure cylinder 21 is increased by stacking the multiple cylinders, so as to satisfy the pressurization requirements of different types of semiconductor devices.
It should be noted that, referring to fig. 4, in some embodiments, the cylinder body 211 is a split structure, the cylinder body 211 includes a bottom plate, a plurality of middle seat bodies, and an upper seat, which are sequentially stacked, and the upper seat and each of the middle seat bodies are provided with a pressure chamber 2111, and an air inlet 2112 and an air outlet 2113, which are communicated with the pressure chamber 2111. Specifically, the upper seat comprises a top plate and a side plate, the top plate and the side plate enclose the pressure chamber 2111 with one end open, and the air inlet 2112 and the air outlet 2113 are respectively arranged on the side plate; the middle seat body comprises a partition plate 2115 and a side plate, the partition plate 2115 and the side plate enclose the pressure chamber 2111 with one end open, the partition plate covers the opening of the pressure chamber 2111, and the partition plate 2115 is provided with the first through hole 2116; the bottom plate covers the opening of the pressure cavity 2111 of the middle seat body at the bottom layer, and the bottom plate is provided with the second through hole 2117. In this embodiment, in addition to independently controlling the air pressure in each pressure chamber 2111 to adjust the pressure generated by the pressure cylinder 21, the pressure adjusting range of the pressure cylinder 21 can be adjusted by increasing or decreasing the number of the intermediate base bodies, so that the pressure adjustment of the pressure cylinder 21 is more flexible; and the cylinder body 211 is designed in a split type, so that the piston rod 212 can be conveniently disassembled and assembled.
Referring to fig. 5, in some embodiments of the present invention, the piston rod 212 includes a supporting portion 2122 and a stopping portion 2121 connected to the supporting portion 2122, the stopping portion 2121 is movably limited in the pressure chamber 2111, and an end of the supporting portion 2122 away from the stopping portion 2122 passes through the first through hole 2116 to abut against the stopping portion 2121 in another pressure chamber. In the technical solution of the present invention, the pressure cylinder 21 includes a plurality of piston rods 212 that are abutted in sequence, so that the force on each piston rod 212 is superimposed to increase the pressure adjustment range of the pressure cylinder 21. In this embodiment, the piston rod 212 includes a supporting portion 2122 and a stopping portion 2121, each stopping portion 2121 is disposed in one of the pressure chambers 2111, one end of each supporting portion 2122 is fixedly connected to one of the pistons 2121, and the other end of each supporting portion 2122 is abutted to the stopping portion 2121 in the other pressure chamber 2111, so that the piston rods 212 are sequentially abutted, and the forces of the piston rods 212 are mutually superimposed.
Further, in the cylinder body 211, two adjacent pressure chambers 2111 are separated by a partition 2115, the partition 2115 is provided with the first through hole 2116, when the piston rod 212 reciprocates in the pressure chamber 2111, the stop portion 2121 abuts against the partition 2115 to prevent the piston rod 212 from coming out of the pressure chamber 2111, the bottom plate of the cylinder body 211 is provided with the second through hole 2117, and the stop portion of one of the piston rods 212 abuts against the bottom plate to prevent the piston rod 212 from coming out of the cylinder body 211.
Still further, in some embodiments of the present invention, the stopper 2121 divides the pressure chamber 2111 into two chambers isolated from each other, and the air inlet 2112 and the air outlet 2113 are respectively communicated with one of the chambers, and the pressure applied to the piston rod 212 is adjusted by adjusting the air pressure in the two chambers.
Referring to fig. 4, in some embodiments of the present invention, a plurality of pressure chambers 2111 in the cylinder 211, which are communicated through the first through hole 2116, are defined as a pressure chamber group, and an arrangement direction of the plurality of pressure chambers 2111 in the pressure chamber group is a first direction; the cylinder body 211 is provided with a plurality of pressure chamber sets, and the pressure chamber sets are arranged at intervals along a second direction perpendicular to the first direction. In the technical solution of the present invention, the pressure cylinder 21 is provided with a plurality of pressure chambers 2111 arranged in parallel to apply a superimposed pressure to the piston rod 212 to increase a pressure adjustment range. In this embodiment, a plurality of pressure chambers 2111 are provided in the pressure cylinder 21, a plurality of pressure chambers 2111 in the cylinder body 211 communicated through the first through hole 2116 are defined as pressure chamber groups, a plurality of pressure chamber groups are provided in the cylinder body 211, each pressure chamber group includes a plurality of pressure chambers 2111 arranged in parallel, and a plurality of pressure chambers 2111 are arranged in parallel; a plurality of mutually abutted piston rods 212 are correspondingly arranged in each group of pressure chambers 2111, and a second through hole 2117 is formed in the cylinder body 211 corresponding to each pressure chamber group so as to communicate one pressure chamber 2111 in the pressure chamber group; and, in the plurality of piston rods 212 corresponding to each pressure chamber group, one of the piston rods 212 extends out of the cylinder body 211 through the second through hole 2117, and each piston rod 212 extending out of the cylinder body 211 bears the superimposed pressure applied by one group of pressure chambers 2111, so that the pressure cylinder 21 can simultaneously apply pressure to a plurality of products to be pressurized, thereby improving the working efficiency.
Referring to fig. 5, in some embodiments of the present invention, in two adjacent pressure chamber groups, two pressure chambers 2111 in the same row are located between the two pressure chambers 2111, wherein one of the pressure chambers 2111 is opened with an air hole 2114, and the air hole 2114 is communicated with an air inlet 2112 of the other pressure chamber 2111. In the technical solution of the present invention, a plurality of rows of pressure chambers 2111 arranged side by side are provided in the pressure cylinder 21, and a set of piston rods 212 is provided in each row of pressure chambers 2111, so that the pressure cylinder 21 can simultaneously pressurize a plurality of products to be pressurized. Further, in the present embodiment, two pressure chambers 2111 arranged side by side in two adjacent rows of pressure chambers 2111 are communicated through the air guide hole 2114, so that the pressure on each piston rod 212 of the pressure cylinder 21 is the same, thereby ensuring the stability of pressure application when a plurality of products are pressurized simultaneously.
Referring to fig. 3, the present invention further provides a pressure device 20, including: a frame body 22; the pressure cylinder 21 as described in any one of the above, wherein the pressure cylinder 21 is provided on the frame body 22; the pressure head 25 is in transmission connection with one end, protruding out of the cylinder body 211, of the piston rod 212; and the bearing mechanism 23 is arranged on the frame body 22 and is arranged at an interval with the pressure head 25, the bearing mechanism 23 is provided with a bearing platform 231, the pressure cylinder 21 drives the pressure head 25 to move towards or away from the bearing platform 231 along a direction perpendicular to the bearing platform 231, and then the pressure head 25 abuts against the product on the bearing platform 231 so as to apply pressure to the product.
Since the pressurizing device 20 provided by the present invention employs all technical solutions in all embodiments of the aforementioned pressure cylinder 21, at least all beneficial effects brought by the above embodiments are achieved, and are not repeated herein.
Referring to fig. 3, in some embodiments of the present invention, the heating mechanism 26 is in contact with the pressing head 25 and the carrying mechanism 23 to heat the product in the carrying mechanism 23. In some products, in addition to applying pressure to the product, the product is heated to reach a temperature range required by the process, and the product is conveniently pressed and molded. In this embodiment, the pressurizing device 20 is provided with a heating mechanism 26, so that when the pressurizing device 20 applies pressure to the product to be hot-pressed, the product is heated by the heating mechanism 26, so that the product meets the process requirement.
Specifically, the heating mechanism 26 includes: a first heating plate 261, the first heating plate 261 is located the pressure cylinder 21 orientation one side of load-bearing platform 231, and with pressure head 25 thermal connection, pressure head 25 wear to locate first heating plate 261 is in order to face or keep away from load-bearing platform 231 moves. In the technical solution of the present invention, the hot pressing sintering apparatus 100 includes a pressurizing device 20 and a heating mechanism 26, and the heating mechanism 26 is disposed on the pressurizing device 20 to heat the product to be hot pressed while the pressurizing device 20 pressurizes the product to be hot pressed. In this embodiment, the heating mechanism 26 includes a first heating plate 261, the first heating plate 261 is disposed on the pressure cylinder 21 and is located on a side of the pressure cylinder 21 facing the bearing mechanism 23, and one end of the pressure head 25 penetrates through the first heating plate 261 to be connected to one end of the cylinder body 211 protruding from the piston rod 212. And the pressing head 25 reciprocates in the first heating plate 261 under the driving of the pressure cylinder 21, and the first heating plate 261 heats the pressing head 25, so that the temperature of the pressing head 25 reaches the temperature required by the process, and further the pressing head 25 heats the device to be hot-pressed simultaneously when pressing the device to be hot-pressed.
Referring to fig. 5, in some embodiments of the present invention, an insulation structure 27 is disposed between the ram 25 and the piston rod 212; and/or, a heat insulation structure 27 is arranged between the first heating plate 261 and the pressure cylinder 21. In the technical solution of the present invention, the first heating plate 261 is disposed on a side of the pressure cylinder 21 facing the bearing mechanism 23, and the pressure head 25 is disposed through the first heating plate 261, so that the pressure head 25 is heated by the first heating plate 261. In this embodiment, a heat insulation structure 27 is disposed between the pressure head 25 and the piston rod 212, so as to prevent heat of the pressure head 25 from being transferred to the pressure chamber 2111 through the piston rod 212, and prevent the gas in the pressure chamber 2111 from expanding due to heating, which results in an increase in the pressure chamber 2111 and affects the pressure applied to the pressure head 25; similarly, a heat insulation structure 27 is disposed between the first heating plate 261 and the pressure cylinder 21, so as to prevent the pressure cylinder 21 from being heated by the first heating plate 261, which causes the gas in the pressure chamber 2111 to expand due to heating, which causes the gas pressure in the pressure chamber 2111 to increase, and affects the pressure applied to the pressure head 25.
In some embodiments of the present invention, a sealing ring (not shown in the drawings) is disposed in each of the second through hole 2117 and each of the first through holes 2116, and one of the piston rods 212 is disposed through one of the sealing rings to improve the sealing performance of the piston rod 212 when the first through hole 2116 and the second through hole 2117 slide, so as to prevent gas or liquid in the pressure chamber 2111 from leaking and affecting the pressure adjustment accuracy of the pressure cylinder 21, where the sealing ring may be, but not limited to, rubber or silica gel; in this embodiment, the heat insulation structure 27 can effectively prevent the heat generated by the heating mechanism 26 from being transferred to the sealing ring, so as to prevent the sealing ring from being damaged by heat and affecting the sealing effect.
Similarly, in some embodiments, the stop portion 2121 of each piston rod 212 is disposed in the pressure chamber 2111, and one stop portion 2121 divides one pressure chamber 2111 into two chambers isolated from each other, and the air inlet 2112 and the air outlet 2113 are respectively communicated with one chamber, so as to adjust the pressure applied to the piston rod 212 by adjusting the air pressure in the two chambers; further, a sealing ring is sleeved on the outer edge of each stopping portion 2121, and the outer edge of each sealing ring abuts against the cavity wall of the pressure cavity 2111, so that gas or liquid between two cavities in each pressure cavity 2111 is prevented from leaking, and the pressure adjustment accuracy of the pressure cylinder 211 is prevented from being affected. The heat insulation structure 27 also prevents the sealing ring on the stopping portion 2121 from being damaged by heat, which affects the sealing effect.
Referring to fig. 4, in some embodiments of the present invention, one of the piston rods 212 in the pressure cylinder 21 extends from the second through hole 2117 on the bottom plate of the cylinder body 211 for connecting with the pressure head 25, so as to convert the air pressure in the pressure cylinder 21 into pressure and transmit the pressure to the pressure head 25. In this embodiment, a connecting hole 2118 is formed in the bottom plate of the cylinder block 211, and a fastening member such as a bolt is inserted into the connecting hole 2118 to fix the heat insulating structure 27 and the first heating plate 261 to the cylinder block 211. The connection mode in which the heat insulating structure 27 and the pressure cylinder 27 are fixed by the connection hole 2118 is illustrated, and is only one embodiment of the present embodiment. The connection manner of the heat insulation structure 27 and the pressure cylinder 21 may be, but is not limited to, bolt fastening, adhesion, or magnetic attraction, and is not limited in particular.
Referring to fig. 3, in some embodiments of the present invention, the heating mechanism 26 further includes: and the second heating plate 262 is arranged on the side, away from the pressure head 25, of the bearing platform 231, and is in contact with the bearing platform 231. In the technical solution of the present invention, the heating mechanism 26 and the pressing head 25 are in contact with the carrying mechanism 23, so as to heat the product to be hot-pressed simultaneously when the pressing device 20 presses the product to be hot-pressed. In this embodiment, the heating mechanism 26 includes a second heating plate 262, the second heating plate 262 is disposed on the bearing mechanism 23 and is located on a side of the bearing platform 231 away from the pressing head 25, and when the product to be hot-pressed is placed on the bearing platform 231, the second heating plate 262 heats the bearing platform 231 to transfer heat to the product to be hot-pressed, so that the product to be hot-pressed reaches the temperature required by the process.
Referring to fig. 2, in some embodiments of the present invention, the pressing device 20 further includes a lifting mechanism 24, and the lifting mechanism 24 is in transmission connection with the supporting mechanism 23 to drive the supporting platform 231 to move toward or away from the pressing head 25 along a direction perpendicular to the supporting platform 231. In the technical scheme of the invention, a bearing mechanism 23 is arranged in the pressurizing device 20 and used for placing a product to be pressurized, and the pressure cylinder 21 drives a pressure head 25 to move towards the bearing platform 231 along a direction vertical to the bearing platform 231 so as to pressurize the product to be pressurized; after the pressurization is completed, the pressure cylinder 21 drives the ram 25 away from the load-bearing platform 231, facilitating the removal of the pressurized product. In this embodiment, the pressing device 20 includes an elevating mechanism 24, and the elevating mechanism 24 is in transmission connection with the bearing mechanism 23 to drive the bearing platform 231 to move towards or away from the pressing head 25 in a direction perpendicular to the bearing platform 231. Specifically, the lifting mechanism 24 includes a driving element 241 and a transmission mechanism, where the driving element 241 may be, but is not limited to, a servo motor, an electric cylinder, an air cylinder, or a combination of any two or more of the foregoing driving elements 241, the driving element 241 is in transmission connection with the carrying mechanism 23 through the transmission mechanism, and the transmission mechanism may be a screw rod mechanism, a guide rail slider mechanism, a link mechanism, or the like, and is not limited in this respect.
With further reference to fig. 3, in some embodiments of the present invention, the frame body 22 of the pressing device 20 includes a guide rod 222 and a top plate 221, wherein the guide rod 222 is used for supporting the top plate 221 and is connected and fixed with an external mechanism through the guide rod 222; the pressure cylinder 21 is disposed on the top plate 221, the guide rod 222 is disposed through the bearing mechanism 23, when the lifting mechanism 24 drives the bearing mechanism 23 to reciprocate toward or away from the pressure head 25 and the pressure cylinder 21, the bearing mechanism 23 moves along the axial direction of the guide rod 222, and the guide rod 222 plays a role in guiding and positioning, so as to prevent the bearing mechanism 23 from deviating during movement. It should be noted that, in the illustrated embodiment, four guide rods 222 are provided, which is only one implementation manner in the technical solution of the present embodiment, and in practical use, a corresponding number of guide rods 222 may be arranged according to the size or shape of the bearing mechanism 23, and in the present embodiment, the number and specific positions of the guide rods 222 are not limited.
Referring to fig. 1 and fig. 2, the present invention further provides a hot pressing sintering apparatus 100, including: a frame 10 and a pressing device 20 as described in any of the preceding claims, said pressing device 20 being provided on said frame. The hot-pressing sintering equipment 100 provided by the invention is hot-pressing equipment for packaging a semiconductor device, and the hot-pressing sintering equipment 100 can meet the production requirement of packaging the semiconductor device by using low-temperature sintering materials such as nano silver and the like. In this embodiment, the hot pressing sintering apparatus 100 further includes a frame 10, the pressurizing device 20 is disposed in the frame 10, and the lifting mechanism 24 is located at a lower portion of the frame 10; an operation interface 11 is further disposed in the frame 10, and the operation of the pressurizing device 20 is controlled by a controller, so that the hot pressing sintering equipment 100 is more intelligent.
Specifically, in some embodiments, the hot press sintering apparatus 100 controls the operation of the pressurizing device 20 through the system, and first starts the heating mechanism 26 to make the temperatures of the upper heating plate and the second heating plate 262 reach the temperature required by the process. Thereafter, the product to be hot-pressed is placed in the supporting platform 231, and the supporting platform 231 is placed on the second heating plate 262. The lifting mechanism 24 is turned on, and the carrying mechanism 23 and the second heating plate 262 are driven to move upward until the surface of the product to be hot-pressed contacts the pressing head 25, and the position is maintained. The pressure of the air source is adjusted by the controller, the air path is opened to allow compressed air to enter each pressure chamber 2111 of the pressure cylinder 21, the piston rods 212 collectively move downward, and the pressure head 25 drivingly connected to the piston rods 212 generates a pressure to act on the surface of the device. And (3) keeping the pressure for the time required by the process, closing the gas source, reducing the pressure in the pressure cavity to normal pressure, starting the electric cylinder to enable the bearing mechanism 23 to descend to the working initial position, taking out the sintered device, and completing the operation of one period.
Since the hot pressing sintering apparatus 100 provided by the present invention employs all technical solutions of all embodiments of the aforementioned pressure cylinder 21 and the aforementioned pressurizing device 20, at least all beneficial effects of the above embodiments are achieved, and detailed descriptions thereof are omitted here.
The above description is only an alternative embodiment of the present invention, and not intended to limit the scope of the present invention, and all modifications and equivalents of the present invention, which are made by the contents of the present specification and the accompanying drawings, or directly/indirectly applied to other related technical fields, are included in the scope of the present invention.
Claims (10)
1. A pressure cylinder, comprising:
the cylinder body is internally provided with a plurality of pressure cavities, two adjacent pressure cavities are communicated through first through holes, the cylinder body is also provided with a second through hole communicated with one pressure cavity, the second through hole and the first through holes are coaxially arranged, the cylinder body is provided with a plurality of air inlet holes and a plurality of air outlet holes, and one air inlet hole and one air outlet hole are both communicated with one pressure cavity; and
the piston rod, the piston rod is equipped with a plurality ofly, and each piston rod movably is located one the pressure chamber to pass one first through-hole stretches into another the pressure chamber, so that it is a plurality of the piston rod is the butt in proper order, and one of them the piston rod passes the second through-hole stretches out the cylinder body.
2. The pressure cylinder as claimed in claim 1, wherein each of said piston rods includes an abutting portion and a stopper portion connected to said abutting portion;
the stopping part can be movably limited in the pressure cavity, and one end of the abutting part, which is far away from the stopping part, penetrates through the first through hole to abut against the stopping part in the other pressure cavity.
3. The cylinder according to claim 1, wherein a plurality of the pressure chambers in the cylinder body communicating through the first through hole are defined as a pressure chamber group, and an arrangement direction of the plurality of the pressure chambers in the pressure chamber group is a first direction;
the cylinder body is provided with a plurality of pressure cavity groups, and the pressure cavity groups are arranged at intervals along a second direction perpendicular to the first direction.
4. The cylinder as claimed in claim 3, wherein two of said pressure chambers arranged side by side in two adjacent pressure chamber groups communicate with each other through an air vent.
5. A compression device, comprising:
a frame body;
the pressure cylinder as claimed in any one of claims 1 to 4, which is provided to the frame body;
the pressure head is in transmission connection with one end, protruding out of the cylinder body, of a piston rod of the pressure cylinder; and
the bearing mechanism is arranged on the frame body and is arranged at intervals with the pressure head, and the bearing mechanism is provided with a bearing platform for placing a product;
the pressure cylinder drives the pressure head to be close to or far away from the bearing platform, so that the pressure head presses the product of the bearing platform.
6. The pressurization device according to claim 5, further comprising:
the heating mechanism is respectively contacted with the pressure head and the bearing platform to conduct heat so as to heat the product in the bearing platform.
7. The pressing device as claimed in claim 6, wherein said heating mechanism comprises:
the first heating plate is arranged on one side, facing the bearing platform, of the pressure cylinder, and the pressure head penetrates through the first heating plate; and
the second hot plate is arranged on one side, deviating from the pressure head, of the bearing platform and is in contact with the bearing platform to conduct heat.
8. The compression device of claim 7, wherein an insulation structure is disposed between the ram and the piston rod;
and/or a heat insulation structure is arranged between the first heating plate and the pressure cylinder.
9. The pressing device as claimed in claim 5, further comprising a lifting mechanism in driving connection with the carrying mechanism to drive the carrying platform closer to or farther from the press head.
10. A hot press sintering apparatus, comprising:
a frame;
a pressurizing device as claimed in any one of claims 5 to 9, which is provided on the frame.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010970103.6A CN111980988A (en) | 2020-09-15 | 2020-09-15 | Pressure cylinder, pressurizing device and hot-pressing sintering equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010970103.6A CN111980988A (en) | 2020-09-15 | 2020-09-15 | Pressure cylinder, pressurizing device and hot-pressing sintering equipment |
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| CN111980988A true CN111980988A (en) | 2020-11-24 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010970103.6A Pending CN111980988A (en) | 2020-09-15 | 2020-09-15 | Pressure cylinder, pressurizing device and hot-pressing sintering equipment |
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| CN (1) | CN111980988A (en) |
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| CN113380667A (en) * | 2021-04-29 | 2021-09-10 | 林超峰 | Hot-pressing sintering machine for packaging high-power semiconductor device |
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