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CN111821818A - Method and device for multistage gas separation by inorganic membrane - Google Patents

Method and device for multistage gas separation by inorganic membrane Download PDF

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CN111821818A
CN111821818A CN202010476743.1A CN202010476743A CN111821818A CN 111821818 A CN111821818 A CN 111821818A CN 202010476743 A CN202010476743 A CN 202010476743A CN 111821818 A CN111821818 A CN 111821818A
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CN111821818B (en
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顾学红
谢继贤
王学瑞
张萍
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Nanjing Tech University
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Abstract

本发明公开的一种无机膜多级气体分离方法,步骤:S1、在预处理单元对原料气体进行预处理。S2、预处理过的原料气进入多级膜分离组件进行分离处理,渗透气进入下级组件,渗余气回流继续完成分离。S3、在第一级组件渗余侧和最后一级组件渗透侧采集气体产品并回收利用。装置中包括预处理模块、单级膜组件、气泵、质量流量控制器和背压阀。原料预处理后经质量流量控制器进入多级膜组件,背压阀控制第一级组件渗余侧压力,将多个组件通过管线串联起来,每一级渗透气作为原料气进入下一级,第一级渗余气接背压阀控制顶部采出,其余每级组件渗余气均通过气泵返回上级组件与进料气混合,在最后一级组件渗透侧气体产品在常压下收集。

Figure 202010476743

The invention discloses an inorganic membrane multi-stage gas separation method. The steps are: S1, pre-processing the raw gas in the pre-processing unit. S2. The pretreated raw material gas enters the multi-stage membrane separation module for separation treatment, the permeate gas enters the lower-level module, and the retentate gas flows back to complete the separation. S3. Collect gas products on the retentate side of the first-stage module and the permeate side of the last-stage module and recycle them. The device includes a pretreatment module, a single-stage membrane module, an air pump, a mass flow controller and a back pressure valve. After the raw material is pretreated, it enters the multi-stage membrane module through the mass flow controller. The back pressure valve controls the pressure on the retentate side of the first-stage module. Multiple modules are connected in series through the pipeline. The retentate gas of the first stage is connected to the back pressure valve to control the top production, and the retentate gas of the other components of each stage is returned to the upper-level component through the air pump to be mixed with the feed gas, and the gas product on the permeate side of the last-stage component is collected under normal pressure.

Figure 202010476743

Description

一种无机膜多级气体分离的方法及装置Method and device for multistage gas separation by inorganic membrane

技术领域technical field

本发明涉及一种无机膜多级气体分离的方法,特别涉及单级膜分离选择性较低的二元或多元混合气体的分离提纯。The invention relates to a method for multi-stage gas separation by inorganic membranes, in particular to the separation and purification of binary or multi-component mixed gases with low selectivity of single-stage membrane separation.

背景技术Background technique

气体产品作为现代工业重要的基础原料,应用范围十分广泛。除工业中常见的一般工业气体外,特种气体在电子信息、航空航天、石油化工和医疗环保等行业起着重要的作用。如超纯氮可以作为超大规模集成电路的保护器,氖同位素可以用于导弹制导等军工行业。但我国特种气体企业规模较小,自主研发的成果较少,目前我国不能规模生产亚微米级集成电路生产所用的气体,特种气体同位素分离的研究和应用尚属起步阶段,生产依存均需国外进口。混合气体的分离方法主要有低温精馏法、变压吸附法以及膜分离法。低温精馏法涉及相变分离,能耗较高,且装置规模较大,设备费用高;变压吸附法回收率低,需要不断对气体进行抽真空与压缩,也存在设备成本高、操作复杂等问题。特种气体分离提纯领域还涉及贵金属催化法、热扩散法和分子筛提纯技术等方法。但上述方法均存在成本高,能耗高,设备成本高以及操作复杂等问题。As an important basic raw material for modern industry, gas products have a wide range of applications. In addition to general industrial gases common in industry, special gases play an important role in electronic information, aerospace, petrochemical, medical and environmental protection industries. For example, ultra-pure nitrogen can be used as a protector for very large-scale integrated circuits, and neon isotopes can be used in military industries such as missile guidance. However, the scale of special gas enterprises in my country is relatively small, and there are few achievements in independent research and development. At present, my country cannot produce gases used in the production of sub-micron integrated circuits on a large scale. The research and application of isotope separation of special gases is still in its infancy, and production depends on foreign imports. . The separation methods of mixed gas mainly include cryogenic rectification, pressure swing adsorption and membrane separation. Cryogenic rectification involves phase change separation, high energy consumption, large device scale, and high equipment cost; pressure swing adsorption method has a low recovery rate, requires continuous vacuuming and compression of the gas, and also has high equipment costs and complex operations. And other issues. The field of special gas separation and purification also involves precious metal catalysis, thermal diffusion and molecular sieve purification technology. However, the above methods all have problems such as high cost, high energy consumption, high equipment cost and complicated operation.

在膜法分离气体的应用中,专利号为CN201310329942.X的专利中提到了一种两级膜分离与CO2液化耦合的沼气脱碳工艺,但该过程需与低温液化耦合,操作较为复杂;专利号为 CN201510045066.7的专利中设计了三段气体分离膜单元分离气体的装置,该装置回流过程增加额外混合容器且对于膜分离系数较低的体系难以达到分离要求,局限性较大。In the application of membrane separation of gas, the patent No. CN201310329942.X mentioned a biogas decarbonization process with two-stage membrane separation coupled with CO 2 liquefaction, but this process needs to be coupled with low-temperature liquefaction, and the operation is relatively complicated; The patent No. CN201510045066.7 designed a device for separating gas with a three-stage gas separation membrane unit. The reflux process of the device adds an additional mixing container, and it is difficult to meet the separation requirements for a system with a low membrane separation coefficient, and the limitations are relatively large.

另外,在一个具体的膜分离应用领域,In addition, in a specific membrane separation application field,

发明内容SUMMARY OF THE INVENTION

本发明的目的在于提供一种无机膜多级气体分离的方法实现气体的分离提纯,解决传统低温精馏、变压吸附等方法设备投资高,操作复杂,能耗高的问题。多级膜组件的串联能够有效的提高膜分离选择性较低的混合体系的分离纯度,实现目标气体的回收,可显著增加产能,提高经济效益。The purpose of the present invention is to provide a method for multi-stage gas separation by inorganic membranes to realize the separation and purification of gas, and to solve the problems of high equipment investment, complicated operation and high energy consumption of traditional cryogenic rectification, pressure swing adsorption and other methods. The series connection of multi-stage membrane modules can effectively improve the separation purity of the mixed system with low membrane separation selectivity, and realize the recovery of target gas, which can significantly increase the production capacity and improve the economic benefits.

本发明中的多级无机膜气体分离方法仅需膜分离过程即可达到分离要求,无需与其他过程耦合,每级渗余气可直接回流至上级;通过多级膜分离可以实现单级膜分离选择性较低的气体体系的分离,很大程度上提高分离效率,减少操作成本。该技术在空气中氧气、氮气和稀有气体的富集,高纯电子气体的制备,同位素气体的分离提纯以及石化行业中天然气除氮、烃类组分的回收分离等领域中有着巨大的应用潜力。The multi-stage inorganic membrane gas separation method in the present invention only needs the membrane separation process to meet the separation requirements, and does not need to be coupled with other processes, and the retentate gas of each stage can be directly returned to the upper stage; single-stage membrane separation can be achieved through multi-stage membrane separation The separation of the gas system with lower selectivity greatly improves the separation efficiency and reduces the operating cost. The technology has great application potential in the enrichment of oxygen, nitrogen and rare gases in the air, the preparation of high-purity electronic gases, the separation and purification of isotopic gases, the removal of nitrogen from natural gas, and the recovery and separation of hydrocarbon components in the petrochemical industry. .

在一个应用领域中,本发明还实现了采用DD3R分子筛膜用于闭路医疗氙气麻醉过程中氙气的在线回用技术,能够对CO2/Xe选择性分离。单组分二氧化碳渗透性为1.5×10-7mol·m-2·s-1·Pa-1,二氧化碳对氙气的分离选择性为570。渗透通量比传统膜材料高出一个数量级,DD3R分子筛的全硅特性使其具有一定的疏水性,可以有效削弱水蒸气对分子筛孔道的堵塞。In one application field, the present invention also realizes the on-line recycling technology of xenon gas in the closed-circuit medical xenon gas anesthesia process using DD3R molecular sieve membrane, which can selectively separate CO 2 /Xe. The single-component carbon dioxide permeability is 1.5×10 -7 mol·m -2 ·s -1 ·Pa -1 , and the separation selectivity of carbon dioxide to xenon is 570. The permeation flux is an order of magnitude higher than that of traditional membrane materials. The all-silicon feature of DD3R molecular sieve makes it have a certain degree of hydrophobicity, which can effectively reduce the blockage of molecular sieve channels by water vapor.

本发明的第一个方面,提供了:A first aspect of the present invention provides:

一种无机膜多级气体分离的方法,包括以下步骤:A method for inorganic membrane multistage gas separation, comprising the following steps:

第1步,将待分离的气体混合物送入气体分离设备中进行分离;The first step is to send the gas mixture to be separated into a gas separation device for separation;

所述的气体分离设备由多个膜组件相互串联而构成,上一级的渗透侧得到的物料送入下一级的渗余侧继续分离;下一级的渗余侧的得到的物料回流至上级的渗余侧继续分离;The gas separation equipment is composed of a plurality of membrane modules connected in series. The material obtained from the permeate side of the previous stage is sent to the retentate side of the next stage for further separation; the material obtained from the retentate side of the next stage is returned to The retentate side of the upper stage continues to separate;

第2步,在最后一级的渗透侧得到第一气体组分,在第一级的渗余侧采出第二气体组分。In the second step, the first gas component is obtained on the permeate side of the last stage, and the second gas component is produced on the retentate side of the first stage.

在一个实施方式中,第1步中,待分离的气体混合物通过预处理单元对混合气体进行预处理。In one embodiment, in the first step, the gas mixture to be separated is pretreated by a pretreatment unit.

在一个实施方式中,所述的预处理包括压缩、干燥、过滤或者加热。In one embodiment, the pretreatment includes compression, drying, filtration or heating.

在一个实施方式中,第1步中,第一级的渗余侧的气体产品接背压阀控制采出。In one embodiment, in the first step, the gas product on the retentate side of the first stage is connected to a back pressure valve to control the production.

在一个实施方式中,第1步中,下一级的渗余侧的得到的物料回流至上一级或者上几级的渗余侧。In one embodiment, in step 1, the material obtained from the retentate side of the next stage is refluxed to the retentate side of the previous stage or stages.

在一个实施方式中,第1步中,待分离的气体混合物送入至渗余侧的气体组成与待分离的气体混合物气体组成最为接近的膜组件中。In one embodiment, in the first step, the gas mixture to be separated is sent to the membrane module whose gas composition is the closest to the gas composition of the gas mixture to be separated on the retentate side.

在一个实施方式中,第1步中,待分离的气体混合物进料压力范围控制在0.1~5MPa。In one embodiment, in the first step, the feed pressure of the gas mixture to be separated is controlled in the range of 0.1-5 MPa.

在一个实施方式中,对于含有回流的渗余气的膜组件,需要设定回流比;其中回流比是指:该级膜组件渗余侧回流的气体量与进入气体分离设备的待分离的气体量。In one embodiment, for a membrane module containing refluxed retentate gas, a reflux ratio needs to be set; wherein the reflux ratio refers to: the amount of gas refluxed on the retentate side of the membrane module at this stage and the gas to be separated entering the gas separation equipment quantity.

在一个实施方式中,每一级膜组件的工作温度28K~973K。In one embodiment, the working temperature of each stage membrane module is 28K-973K.

在一个实施方式中,膜组件中安装的气体分离膜中所使用的材料可以是分子筛膜、陶瓷膜、碳膜等无机膜材料的一种或几种;气体分离膜的载体可以是管式或者中空纤维等形式。In one embodiment, the material used in the gas separation membrane installed in the membrane module may be one or more of inorganic membrane materials such as molecular sieve membrane, ceramic membrane, carbon membrane, etc.; the carrier of the gas separation membrane may be tubular or form of hollow fibers.

在一个实施方式中,所述的待分离的气体混合中含有N2、CO2、H2、O2、Kr、Xe、CH4、He中的一种或几种的混合。In one embodiment, the gas mixture to be separated contains one or a mixture of N 2 , CO 2 , H 2 , O 2 , Kr, Xe, CH 4 , and He.

在一个实施方式中,所述的待分离的气体混合物的成分是5%CO2,30%N2和65%Xe混合气,且还含有H2O,H2O的分压是2.3kPa;并且采用的气体分离膜是DD3R分子筛膜。In one embodiment, the composition of the gas mixture to be separated is a mixture of 5% CO 2 , 30% N 2 and 65% Xe, and also contains H 2 O, and the partial pressure of H 2 O is 2.3 kPa; And the gas separation membrane used is DD3R molecular sieve membrane.

本发明的第二个方面,提供了:A second aspect of the present invention provides:

一种无机膜多级气体分离的装置,包括:An inorganic membrane multistage gas separation device, comprising:

预处理单元,用于对待分离的气体混合物进行预处理;a pretreatment unit for pretreatment of the gas mixture to be separated;

气体分离设备,连接于预处理单元,用于对待分离的气体混合物中的气体组分进行分离;A gas separation device, connected to the pretreatment unit, for separating the gas components in the gas mixture to be separated;

所述的气体分离设备中包括有多个膜组件,膜组件相互之间为串联;上一级的膜组件的渗透侧出气口连接于下一级的膜组件的渗余侧进气口;下一级的膜组件的渗余侧出气口连接于上级的膜组件的渗余侧进气口;The gas separation equipment includes a plurality of membrane modules, and the membrane modules are connected in series with each other; the gas outlet on the permeate side of the membrane module in the upper stage is connected to the gas inlet on the retentate side of the membrane module in the lower stage; The retentate side air outlet of the first-stage membrane module is connected to the retentate-side air inlet of the upper-stage membrane module;

在最后一级的膜组件的渗透侧出气口连接有第一气体组分接收管路;在第一级的膜组件的渗余侧出气口连接有第二气体组分接收管路。A first gas component receiving pipeline is connected to the permeate side gas outlet of the last stage membrane module; a second gas component receiving pipeline is connected to the retentate side gas outlet of the first stage membrane module.

在一个实施方式中,所述的膜组件中包括有壳体以及安装于壳体中的气体分离膜;并且,渗余侧进气口和渗余侧出气口连接于壳体,气体分离膜的渗透侧连接于渗透侧出气口。In one embodiment, the membrane module includes a casing and a gas separation membrane installed in the casing; and the retentate-side gas inlet and the retentate-side gas outlet are connected to the casing, and the gas separation membrane The permeate side is connected to the permeate side outlet.

在一个实施方式中,所述的气体分离膜是管式或者中空纤维式。In one embodiment, the gas separation membrane is of tubular type or hollow fiber type.

在一个实施方式中,所述的气体分离膜的材质是分子筛膜、陶瓷膜或者碳膜。In one embodiment, the material of the gas separation membrane is molecular sieve membrane, ceramic membrane or carbon membrane.

在一个实施方式中,下一级的膜组件的渗余侧出气口连接于上一级或者上几级的膜组件的渗余侧进气口。In one embodiment, the retentate-side gas outlet of the membrane module of the next stage is connected to the retentate-side gas inlet of the membrane module of the previous stage or several stages above.

在一个实施方式中,下一级的膜组件的渗余侧出气口与上级的膜组件的之间通过微量气泵连接。In one embodiment, the air outlet on the retentate side of the membrane module of the next stage is connected to the membrane module of the upper stage through a micro air pump.

在一个实施方式中,预处理单元通过质量流量控制器与气体分离设备连接。In one embodiment, the pretreatment unit is connected to the gas separation device via a mass flow controller.

在一个实施方式中,预处理单元与任意一级的膜组件连接。In one embodiment, the pretreatment unit is connected to any stage of membrane modules.

在一个实施方式中,第一级的膜组件的渗余侧出气口连接有背压阀。In one embodiment, a back pressure valve is connected to the gas outlet on the retentate side of the membrane module of the first stage.

本发明的第三个方面,提供了:A third aspect of the present invention provides:

上述的无机膜多级气体分离的装置在对于多组分气体分离中的应用。Application of the above-mentioned inorganic membrane multistage gas separation device in multicomponent gas separation.

有益效果beneficial effect

本发明操作简便,仅需多级膜分离组件串联即可实现气体的分离和提浓。装置投资低,可以在常温下实现气体的分离,节能环保,经济效益显著。对于单级膜分离选择性低、分离产品纯度低的混合气体体系,多级膜分离可以显著提高气体分离的纯度,尤其是对于一些特种气体的分离和提浓,能够产生巨大的经济效益。The invention is simple and convenient to operate, and the separation and concentration of the gas can be realized only by connecting the multi-stage membrane separation components in series. The device investment is low, the gas separation can be realized at normal temperature, energy saving and environmental protection, and the economic benefit is remarkable. For mixed gas systems with low selectivity of single-stage membrane separation and low purity of separated products, multi-stage membrane separation can significantly improve the purity of gas separation, especially for the separation and concentration of some special gases, which can produce huge economic benefits.

附图说明Description of drawings

图1为一种多级串联膜分离装置分离过程示意图。FIG. 1 is a schematic diagram of the separation process of a multi-stage serial membrane separation device.

图2为几种典型的渗余气(第一级除外)回流方式示意图。Figure 2 is a schematic diagram of several typical retentate gas (except the first stage) recirculation mode.

图3为Xe摩尔组成对CO2/Xe混合气分离性能的影响(进料压力:3bar)。Figure 3 shows the effect of Xe molar composition on the separation performance of CO 2 /Xe mixture (feed pressure: 3 bar).

图4为DD3R分子筛膜分离性能。Figure 4 shows the separation performance of the DD3R molecular sieve membrane.

图5为DD3R分子筛膜对CO2和Xe的分离性能。Figure 5 shows the separation performance of DD3R molecular sieve membrane for CO and Xe.

其中,1、预处理单元;2、质量流量控制器;3、膜组件;4、壳体;5、气体分离膜;6、渗余侧进气口;7、渗余侧出气口;8、封头;9、渗透侧出气口;10、管线;11、微量气泵、12、背压阀。Among them, 1, pretreatment unit; 2, mass flow controller; 3, membrane module; 4, shell; 5, gas separation membrane; 6, retentate side air inlet; 7, retentate side air outlet; 8, Head; 9. Permeate side air outlet; 10. Pipeline; 11. Micro air pump, 12. Back pressure valve.

具体实施方式Detailed ways

图1显示,原料气经过预处理单元1的预处理,使得原料气中水分含量,压力以及温度等参数达到要求。本发明中所采用的预处理单元1没有特别的限定,可以是包含压缩装置、干燥装置、过滤装置或者加热装置,在原料进入串联膜分离组件前对其进预处理,以达到相应的气体状态要求。处理后的原料气通过质量流量控制器2在适当的进料位置进入多级膜分离组件。Figure 1 shows that the raw gas is pretreated by the pretreatment unit 1, so that the parameters such as moisture content, pressure and temperature in the raw gas meet the requirements. The pretreatment unit 1 used in the present invention is not particularly limited, and may include a compression device, a drying device, a filtering device or a heating device, and the raw materials are pretreated before entering the series membrane separation module to achieve the corresponding gas state Require. The treated raw gas enters the multi-stage membrane separation module through the mass flow controller 2 at an appropriate feeding position.

本发明中,膜组件进行串联时,处于最上游的组件为第1级,渗余气作为最终产品出料的(最下游)的为第n级。In the present invention, when the membrane modules are connected in series, the most upstream module is the first stage, and the (most downstream) stage where the retentate gas is discharged as the final product (the most downstream) is the nth stage.

本发明中所采用的单个膜组件图1显示,膜组件3包含壳体4和内部的气体分离膜5,壳体4采用不锈钢或尼龙材质,壳体4和气体分离膜5把组件内空间分为渗透测和渗余侧,图中是以管式的气体分离膜5为例,其构型为管状,选择分离层位于管式膜的外部。壳体上存在进气口6和出气口7,壳体两端采用带螺纹的封头8,一端有渗透侧出气口9,另一端为死端。单级的膜组件3采用串联的方式用管线10连接,上一级的渗透侧出气口9与下一级壳体进气口6相连,完成装置串联操作;下级组件渗余气出气口7与上一级组件的壳体进气口 6相连,完成回流操作。Figure 1 shows a single membrane module used in the present invention, the membrane module 3 includes a shell 4 and an internal gas separation membrane 5, the shell 4 is made of stainless steel or nylon, and the shell 4 and the gas separation membrane 5 divide the inner space of the module. For the permeation measurement and retentate side, the figure takes the tubular gas separation membrane 5 as an example, its configuration is tubular, and the separation layer is selected to be located outside the tubular membrane. There are an air inlet 6 and an air outlet 7 on the casing, and both ends of the casing are provided with threaded heads 8, one end has a permeation side air outlet 9, and the other end is a dead end. The single-stage membrane modules 3 are connected in series with pipelines 10, and the permeate side air outlet 9 of the upper stage is connected to the lower-stage shell air inlet 6 to complete the series operation of the device; the retentate gas outlet 7 of the lower-stage module is connected to The housing air inlet 6 of the upper-level assembly is connected to complete the recirculation operation.

采用上述的结构时,一个主要的改进点在于,采用了渗余气的向上一级的回流处理,当进料的待分离气体中含有A、B两种组分时,在采用单级的膜组件进行分离时,假设使组分 B进入渗透侧,而渗余气体(假设为A)往往不能达到足够的纯度,使得渗余气并不能有效地再次利用,而将渗余气向上级回流继续分离时,可以进一步将得到提浓的含有A的气体再一次对A进行提浓,而B气体继续向下一级的串联组件进料后,也进一步对主要含有B气体的物料进行分离,最终使得第一级得到较纯的A,在最后一级得到较纯的B。When the above structure is adopted, a major improvement is that the retentate gas is used for the upstream reflux treatment. When the feed gas to be separated contains two components, A and B, the single-stage membrane is used. When the components are separated, it is assumed that component B is allowed to enter the permeate side, and the retentate gas (assumed to be A) often cannot reach sufficient purity, so that the retentate gas cannot be effectively reused, and the retentate gas will continue to be refluxed to the upper stage. During separation, the concentrated gas containing A can be further enriched to A again, and after the B gas continues to be fed to the next-level series component, the material mainly containing the B gas is further separated, and finally This results in a purer A in the first stage and a purer B in the last stage.

图1显示,原料气在多级串联膜组件中完成分离处理,每级组件的渗透气进入下一级组件继续分离,渗余气通过气泵11返回上一级与进料气混合。Figure 1 shows that the raw gas is separated in the multi-stage series membrane module, the permeate gas of each stage module enters the next stage module for further separation, and the retentate gas is returned to the previous stage through the air pump 11 to be mixed with the feed gas.

图1显示,最后一级组件渗透测出气口4收集分离得到的渗透产品。第一级组件渗余侧出气口7接背压阀12控制渗余气的出气量,经背压阀12采出得到渗余产品。Figure 1 shows that the permeate outlet 4 of the last stage module collects the separated permeate product. The gas outlet 7 on the retentate side of the first-stage component is connected to the back pressure valve 12 to control the gas output of the retentate gas, and the retentate product is produced through the back pressure valve 12 .

渗余气回流包括但不限于返回上一级组件这一种回流方式,可根据需要调整渗余气回流至本级组件之前的其他膜组件进气口与进料气混合。对于渗余侧的气体的回流,如图2所示,既可以都依次回流至上一级,也可以回流至上几级,也可以多个膜组件回流至以上的同一级。The retentate gas return includes, but is not limited to, the return method of returning to the previous stage module. The retentate gas can be adjusted to be mixed with the feed gas before the retentate gas is returned to the other membrane modules before the current stage module. For the recirculation of the gas on the retentate side, as shown in Fig. 2, both can be recirculated to the upper stage in sequence, or can be recirculated to several upper stages, or multiple membrane modules can be recirculated to the same stage above.

另外,除第一级渗余测出气口外,当所需分离的体系中包含杂质且经过一定级数的分离后杂质被富集至高浓度时,可选择在适当级数渗余气出气口处增加支路采出,降低高浓度气体对于目标体系膜分离的影响。In addition, in addition to the first-stage retentate gas outlet, when the system to be separated contains impurities and the impurities are enriched to a high concentration after a certain number of stages of separation, the retentate gas outlet of an appropriate stage can be selected. Increase branch production to reduce the impact of high-concentration gas on the membrane separation of the target system.

上述第一级膜组件原料进料过程中,压力范围控制在0.1~5MPa。In the above-mentioned first-stage membrane module raw material feeding process, the pressure range is controlled within 0.1-5MPa.

上述每级组件的气体分离过程的操作温度范围28K~973K。The operating temperature range of the gas separation process of the above-mentioned components of each stage ranges from 28K to 973K.

上述每级组件渗余气回流过程中,通过微量气泵的气体回流比(回流比是指:(该级膜组件渗余侧回流的气体量-该级膜组件渗透的气体量)与进入气体分离设备的待分离的气体量的比值)范围控制在<10。例如:一个串联设备中包含10个膜组件,混合气体进料位置在第 5级膜组件,那么对于第4级膜组件来说,其同时具有从第5级渗余侧回流的气体,也含有第3级渗透侧得到的气体,那么回流比为:第4级渗余侧回流气体量(第3级渗透侧气体量+ 第5级渗余侧回流量-第4级气体渗透量)/进入气体分离设备的待分离的气体量。During the retentate gas backflow process of the above-mentioned modules of each stage, the gas backflow ratio (return ratio refers to: (the amount of gas flowing back from the retentate side of the membrane module of this stage - the amount of gas permeated by the membrane module of this stage) through the micro air pump is separated from the incoming gas. The ratio of the amount of gas to be separated in the equipment) is controlled in the range of <10. For example: a series equipment contains 10 membrane modules, and the mixed gas feed position is in the fifth-stage membrane module, then for the fourth-stage membrane module, it also has the gas flowing back from the fifth-stage retentate side, and also contains The gas obtained from the third stage permeate side, then the reflux ratio is: the amount of reflux gas on the fourth stage retentate side (the third stage permeate side gas volume + the fifth stage retentate side reflux volume - the fourth stage gas permeation volume) / enter The amount of gas to be separated in the gas separation plant.

上述分离装置中采用的无机膜的材料的孔径在2~200nm的范围内。The pore diameter of the material of the inorganic membrane used in the above separation device is in the range of 2 to 200 nm.

上述膜分离装置中采用的无机膜的材料可以是陶瓷膜、分子筛膜、碳膜的一种或几种。载体可以是管式或中空纤维等形式。The inorganic membrane material used in the above membrane separation device can be one or more of ceramic membrane, molecular sieve membrane and carbon membrane. The support may be in the form of tubular or hollow fibers, among others.

实施例1Example 1

将80%N2和20%O2混合气体通入预处理装置,除去混合气中的水分以及其他固体颗粒物,使得处理后的气体温度达到25℃,压力增压至1.5MPa。将预处理后的原料气经过质量流量控制器以一定的进料量通过第一级进气口进入分离装置,第一级组件渗余侧出气口接背压阀,控制渗余侧压力稳定在3.5~4bar(表压)。各级组件渗余气体通过气泵均返回上一级组件,回流比为0.8。各级膜分离组件中膜材料为TiO2涂覆氧化铝中空纤维膜,膜孔径为100nm,兼具高机械强度以及优异的抗氧化性能。The mixed gas of 80% N 2 and 20% O 2 was passed into the pretreatment device to remove the moisture and other solid particles in the mixed gas, so that the temperature of the treated gas reached 25°C, and the pressure was increased to 1.5MPa. The pretreated raw gas enters the separation device through the first-stage air inlet with a certain amount of feed through the mass flow controller, and the retentate side air outlet of the first-stage component is connected to the back pressure valve to control the retentate side pressure to be stable at 3.5~4bar (gauge pressure). The retentate gas of each component is returned to the previous component through the air pump, and the reflux ratio is 0.8. The membrane material in each membrane separation module is TiO2 -coated alumina hollow fiber membrane with a pore size of 100nm, which has both high mechanical strength and excellent anti-oxidation performance.

在此条件下,最后一级渗透气在常压下采出,经过45级膜分离,最后一级渗透气中N2的浓度>99%。第一级组件中经背压阀排出的渗透气可以直接排放至空气。Under this condition, the last-stage permeate gas is produced at normal pressure, and after 45-stage membrane separation, the N2 concentration in the last-stage permeate gas is >99%. The permeate exhausted from the back pressure valve in the first stage assembly can be exhausted directly to air.

实施例2Example 2

将组成为80%Kr和20%Xe的混合气体通入预处理单元,加压至3MPa且气体温度保持在25℃左右。将预处理的混合气通入串联装置的第10级膜组件进气口,通过质量流量控制器控制进料量,调控背压阀控制第一级渗余气出气量。各级组件渗余气体通过微量气泵返回上一级组件,回流比为1。采用无机陶瓷膜作为膜分离材料,膜孔径为50nm,兼具高机械强度以及优异的抗氧化性能。第一级组件经背压阀排出的渗余气回收利用,其中Xe的浓度约为35%。最后一级渗透气作为原料在常压下采出,达到不同理论纯度所需的分离级数如下表:The mixed gas with the composition of 80% Kr and 20% Xe was passed into the pretreatment unit, and the pressure was increased to 3MPa and the gas temperature was kept at about 25°C. The pretreated mixed gas is passed into the air inlet of the 10th-stage membrane module of the series device, the feed amount is controlled by the mass flow controller, and the outflow amount of the first-stage retentate gas is controlled by regulating the back pressure valve. The retentate gas of each component is returned to the previous component through the micro air pump, and the reflux ratio is 1. Inorganic ceramic membrane is used as the membrane separation material, the membrane pore size is 50nm, which has both high mechanical strength and excellent anti-oxidation performance. The retentate gas discharged from the first-stage assembly through the back pressure valve is recycled, and the concentration of Xe is about 35%. The last stage of permeate gas is extracted under normal pressure as the raw material, and the separation stages required to achieve different theoretical purities are as follows:

Figure RE-GDA0002669878740000061
Figure RE-GDA0002669878740000061

实施例3Example 3

将N2含量<10%的天然气(主要成分CH4>90%)通入预处理单元,除去混合气中的水分以及其他固体颗粒物,将混合气加压至0.7MPa,并将混合原料气体温度控制在25℃左右。将预处理的混合气通入串联装置的第10级膜组件进气口,通过质量流量控制器控制进料量,第一级调控背压阀控制第一级渗余气出气量使得第一级渗余侧压力稳定在3.5~4bar(表压)。各级组件渗余气体通过气泵返回上一级级组件,回流比为1.5。采用无极陶瓷膜作为分离材料,膜孔径在100~150nm。The natural gas with N 2 content <10% (the main component CH 4 >90%) is passed into the pretreatment unit to remove the moisture and other solid particles in the mixed gas, the mixed gas is pressurized to 0.7MPa, and the mixed raw material gas temperature Controlled at around 25°C. Pass the pretreated mixed gas into the air inlet of the 10th-stage membrane module of the series device, control the feeding amount through the mass flow controller, and control the first-stage retentate gas output by the first-stage regulating back pressure valve so that the first-stage The pressure on the retentate side is stable at 3.5 to 4 bar (gauge pressure). The retentate gas of each component is returned to the previous component through the air pump, and the reflux ratio is 1.5. The electrodeless ceramic membrane is used as the separation material, and the pore size of the membrane is 100-150 nm.

在此条件下,经过20级的分离后,最后一级渗透气在常压下采出,其中CH4的浓度>99%,该渗透气作为产物收集,第一级组件渗余气除回流外经过背压阀排出后加以回收利用。Under this condition, after 20 stages of separation, the last stage permeate gas is produced at atmospheric pressure, where the concentration of CH4 is >99%, this permeate gas is collected as a product, and the first stage module retentate gas except for reflux It is recycled after being discharged through the back pressure valve.

实施例4Example 4

将组成为50%He和50%N2的混合气体通入与处理单元,将混合气体加压至1MPa,温度控制在室温。将预处理的原料混合器经第4级组件进气口进入6级串联膜组件进行分离,通过质量流量控制器控制进料量为1.5L/h。控制背压阀调控第一级渗余侧压力稳定在3~3.5 bar。第一级组件渗余气经背压阀直接回收,其余组件回流比均保持在0.66,保证每级组件的回流量为1L/h,且回流方向均返回上一级组件进料,且每级渗透量以及最后底部采出量维持在 0.5L/h。分离膜材料采用中空纤维分子筛膜,膜孔径为2nm,具有优良的机械稳定性。最后一级渗透气在常压下采出,作为产物收集。在此条件下,根据衡算得到每级参数见下表:A mixed gas with a composition of 50% He and 50% N was introduced into the treatment unit, the mixed gas was pressurized to 1 MPa, and the temperature was controlled at room temperature. The pre-treated raw material mixer is fed into the 6-stage serial membrane module through the air inlet of the 4-stage module for separation, and the feed rate is controlled by a mass flow controller to be 1.5L/h. Control the back pressure valve to regulate the pressure on the first-stage retentate side to stabilize at 3 to 3.5 bar. The retentate gas of the first-stage components is directly recovered through the back pressure valve, and the return ratio of the other components is kept at 0.66, ensuring that the return flow of each level component is 1L/h, and the return direction is returned to the upper level component feed, and each level The infiltration volume and the final bottom recovery volume were maintained at 0.5L/h. The separation membrane material is a hollow fiber molecular sieve membrane with a pore size of 2nm and excellent mechanical stability. The last stage permeate is produced at atmospheric pressure and collected as product. Under this condition, according to the balance calculation, the parameters of each level are shown in the following table:

Figure RE-GDA0002669878740000071
Figure RE-GDA0002669878740000071

实施例5Example 5

将组成为90%H2和10%CO2的混合气体通入预处理单元,加压至0.5MPa且气体温度保持在25℃左右。将预处理的混合气通入串联装置的第5级膜组件进气口,通过质量流量控制器控制进料量,调控背压阀控制第一级渗余气出气量,使得第一级渗余侧压力稳定在 2~2.4bar(表压)。各级组件渗余气体通过气泵均返回上一级组件,回流比为0.5。采用中空纤维分子筛膜作为分离膜材料。A mixed gas composed of 90% H2 and 10% CO2 was passed into the pretreatment unit, pressurized to 0.5 MPa and the gas temperature was maintained at about 25 °C. Pass the pretreated mixed gas into the air inlet of the fifth-stage membrane module of the series device, control the feed amount through the mass flow controller, and adjust the back pressure valve to control the outflow of the first-stage retentate gas, so that the first-stage retentate gas can be controlled. The side pressure is stable at 2 ~ 2.4bar (gauge pressure). The retentate gas of each component is returned to the previous component through the air pump, and the reflux ratio is 0.5. A hollow fiber molecular sieve membrane was used as the separation membrane material.

在此条件下,经过9级组件的分离,最后一级渗透气中氢气的浓度>99.9%,该渗透气作为原料在常压下采出,第一级组件经背压阀排出的渗余气回收利用,其中CO2的浓度约为30%,本实施例中,是第5级膜组件进料,经过该级的分离后,在第5级的渗余侧的气体中含有16.3%的CO2和84.7%的H2,通过对比可以看出,通过将该级的渗余侧气体回流至上一级后,最终实现了CO2气体的进一步提浓。Under this condition, after the separation of the 9-stage components, the concentration of hydrogen in the last-stage permeate gas is >99.9%, the permeate gas is produced as a raw material under normal pressure, and the retentate gas discharged from the first-stage components through the back pressure valve Recycling, in which the concentration of CO 2 is about 30%. In this embodiment, it is the feed to the fifth-stage membrane module. After this stage of separation, the gas on the retentate side of the fifth stage contains 16.3% CO. 2 and 84.7% H 2 , it can be seen from the comparison that the further enrichment of CO 2 gas is finally achieved by refluxing the gas from the retentate side of this stage to the previous stage.

实施例6Example 6

本实施例中,使用DD3R分子筛膜用于闭路医疗氙气麻醉过程中氙气的在线回用技术。单组分二氧化碳渗透性为1.5×10-7mol·m-2·s-1·Pa-1,二氧化碳对氙气的分离选择性为570。渗透通量比传统膜材料高出一个数量级。膜分离性能主要是由CO2和Xe分子在DD3R分子筛中扩散系数的差异所决定的。然而,CO2的传质速率却因Xe的存在却显著的降低,这与以前八元环分子筛膜在CO2/N2和CO2/CH4双元组分的分离结果差异很大。分子动力学模拟结果表明,Xe分子吸附在分子筛膜表面形成了CO2吸附和扩散的表面阻力。在医疗氙气麻醉相关条件下,即二氧化碳含量低于5%和水蒸气存在条件下,CO2渗透性和CO2/Xe分离选择性分别为2.0×10-8mol·m-2·s-1·Pa-1和67。由于DD3R分子筛膜的全硅特性,CO2的渗透性受水蒸气的影响较微弱,这与含铝分子筛膜孔道极易因吸附水而堵塞不同。高CO2通量和高CO2/Xe 选择性,以及长时间稳定性,确保了中空纤维DD3R分子筛膜在医疗麻醉氙气在线回用的良好前景。本实施例中所采用的DD3R分子筛膜,其制备过程可以参考现有技术,例如CN110745839A《一种无缺陷DD3R分子筛膜的活化工艺》。In this embodiment, the DD3R molecular sieve membrane is used for the on-line recycling technology of xenon gas in the closed-circuit medical xenon gas anesthesia process. The single-component carbon dioxide permeability is 1.5×10 -7 mol·m -2 ·s -1 ·Pa -1 , and the separation selectivity of carbon dioxide to xenon is 570. The permeate flux is an order of magnitude higher than conventional membrane materials. The membrane separation performance is mainly determined by the difference in the diffusion coefficients of CO2 and Xe molecules in DD3R molecular sieves. However, the mass transfer rate of CO 2 is significantly reduced by the presence of Xe, which is very different from the previous results of the separation of CO 2 /N 2 and CO 2 /CH 4 binary components by eight-membered ring zeolite membranes. The molecular dynamics simulation results show that the adsorption of Xe molecules on the surface of the molecular sieve membrane forms the surface resistance for CO adsorption and diffusion. The CO 2 permeability and CO 2 /Xe separation selectivity were 2.0 × 10 -8 mol·m -2 ·s -1 under conditions relevant to medical xenon anesthesia, i.e. carbon dioxide content below 5% and the presence of water vapour, respectively · Pa -1 and 67. Due to the all-silicon properties of the DD3R molecular sieve membrane, the permeability of CO 2 is weakly affected by water vapor, which is different from the fact that the pores of the aluminum-containing molecular sieve membrane are easily blocked by adsorbed water. High CO 2 flux and high CO 2 /Xe selectivity, as well as long-term stability, ensure a good prospect of the hollow fiber DD3R molecular sieve membrane in the on-line reuse of medical anesthesia xenon gas. For the preparation process of the DD3R molecular sieve membrane used in this embodiment, reference may be made to the prior art, for example, CN110745839A "An Activation Process of a Defect-Free DD3R Molecular Sieve Membrane".

首先,进行了CO2/Xe混合气体的分离试验,图3展示的是Xe摩尔组成对CO2/Xe混合气分离性能的影响(进料压力:3bar),CO2渗透性的下降随着Xe组成的增加而更加显著(图2的c区域)。最终,当CO2含量降至5%时,CO2渗透性为0.24×10-7mol·m-2·s-1·Pa-1;然而,CO2/Xe的分离选择性始终为43左右,表现出CO2低浓度下很好的分离选择性。First, the separation test of CO 2 /Xe mixed gas was carried out. Figure 3 shows the effect of Xe molar composition on the separation performance of CO 2 /Xe mixed gas (feed pressure: 3 bar). The CO 2 permeability decreased with the increase of Xe This is even more pronounced as the composition increases (panel c in Figure 2). Finally, when the CO content was reduced to 5%, the CO permeability was 0.24×10 -7 mol·m -2 ·s -1 ·Pa -1 ; however, the separation selectivity of CO 2 /Xe was always around 43 , showing good separation selectivity at low CO2 concentrations.

本申请报道的中空纤维DD3R分子筛膜的CO2单组分渗透性为1.5×10-7mol·m-2·s-1·Pa-1,比目前文献报道结果高一个数量级(图4的a区域)。不同温度下,DD3R分子筛膜对CO2单组分,CO2/H2O二元组分和CO2/H2O/Xe三元组分分离性能如图4的b区域所示;图4的c区域是DD3R分子筛膜在3bara下对组成为0.76%H2O、4.96%CO2、29.77%N2和64.51%Xe的混合物中回收Xe的长期稳定性。水蒸气往往存在于麻醉呼出气中。由于水蒸气的存在,CO2单组分渗透性下降了37~45%(图4的b区域);然而,相同条件下,含铝型8元环分子筛膜的气体渗透性下降更为显著,DD3R分子筛膜具有更好的疏水特性,可有效削弱因水蒸气吸附而带来的CO2渗透性降低。利用非质子型的模板剂和无离子合成溶液用于制备更为疏水的DD3R分子筛膜,用于湿气环境下CO2/Xe的分离。进一步研究了水蒸气对CO2渗透性和选择性的影响,如图3的b区域和图5的a区域所示。在水蒸气环境下,膜的分离选择性要高于干燥气体。分子筛膜层晶界处的Si-OH可以较强吸附水分子,从而堵塞气体分子在该类孔道处的扩散。因此,在湿气环境下,Xe的渗透性要低于干燥气体中。水蒸气的渗透随着温度的升高而逐渐减弱,例如,在100℃下降低了55%;在125℃下降低了52%;在150℃下降低了42%。然而,无论是在湿气和干燥气体中,CO2分子的渗透性主要是由DD3R分子筛所贡献。The CO 2 single-component permeability of the hollow fiber DD3R molecular sieve membrane reported in this application is 1.5×10 -7 mol·m -2 ·s -1 ·Pa -1 , which is one order of magnitude higher than the results reported in the current literature (Fig. 4a area). At different temperatures, the separation performance of DD3R molecular sieve membrane for CO 2 single component, CO 2 /H 2 O binary component and CO 2 /H 2 O/Xe ternary component is shown in the b area of Fig. 4; Fig. 4 The c region is the long-term stability of the DD3R molecular sieve membrane at 3 bara for the recovery of Xe in a mixture consisting of 0.76% H 2 O, 4.96% CO 2 , 29.77% N 2 and 64.51% Xe. Water vapor is often present in anesthetized exhaled breath. Due to the presence of water vapor, the CO2 single-component permeability decreased by 37-45% (region b of Fig. 4); however, under the same conditions, the gas permeability of the aluminum-containing 8-membered ring molecular sieve membrane decreased more significantly, The DD3R molecular sieve membrane has better hydrophobic properties, which can effectively weaken the CO2 permeability reduction caused by water vapor adsorption. The use of aprotic template agent and non-ionic synthesis solution was used to prepare a more hydrophobic DD3R molecular sieve membrane for the separation of CO 2 /Xe in a humid environment. The effect of water vapor on CO permeability and selectivity was further investigated, as shown in area b of Fig. 3 and area a of Fig. 5. In the water vapor environment, the separation selectivity of the membrane is higher than that of the dry gas. The Si-OH at the grain boundaries of the molecular sieve film layer can strongly adsorb water molecules, thereby blocking the diffusion of gas molecules in such pores. Therefore, in a humid environment, the permeability of Xe is lower than in a dry gas. The permeation of water vapor gradually weakened with increasing temperature, for example, it decreased by 55% at 100°C; by 52% at 125°C; and by 42% at 150°C. However, in both wet and dry gases, the permeability of CO2 molecules is mainly contributed by DD3R molecular sieves.

麻醉过程中,呼出麻醉气体的杂质除了CO2以外,人体组织器官在麻醉初始阶段会释放氮气。将其用于5%CO2,30%N2和65%Xe混合气中回收氙气。当引入2.3kP水蒸气后,CO2和N2的渗透性都略微下降(图3).最终,二氧化碳的渗透性稳定在2.0×10-8mol·m-2·s-1·Pa-1, CO2/Xe选择性为67±12;N2渗透性为2.4×10-9mol·m-2·s-1·Pa-1,N2/Xe选择性为8±2。During the anesthesia process, except for CO 2 , the impurities in the exhaled anesthetic gas, the human tissues and organs will release nitrogen gas in the initial stage of anesthesia. It was used to recover xenon in a mixture of 5% CO 2 , 30% N 2 and 65% Xe. When 2.3kP water vapor was introduced, the permeability of both CO2 and N2 decreased slightly (Fig. 3). Finally, the permeability of CO2 stabilized at 2.0× 10-8 mol·m -2 ·s -1 ·Pa -1 , the CO 2 /Xe selectivity is 67±12; the N 2 permeability is 2.4×10 -9 mol·m -2 ·s -1 ·Pa -1 , and the N 2 /Xe selectivity is 8±2.

以上进行了对采用一级DD3R分离膜进行回收氙气的分离实验,接下来,采用多级分离进行深度回收。当采用3级串联分离过程时,依照同样的操作条件,在第2级和第3级中依次得到了含有Xe 99.19%和99.23%的回收氙气,说明通过多级串联分离可以获得纯度更高的氙气。The separation experiment of recovering xenon gas using one-stage DD3R separation membrane was carried out above. Next, multi-stage separation was used for deep recovery. When using the 3-stage series separation process, according to the same operating conditions, the recovered xenon containing 99.19% and 99.23% Xe was obtained in the second and third stages in turn, indicating that higher purity can be obtained through multi-stage series separation. Xenon.

Claims (10)

1. A method for inorganic membrane multistage gas separation, comprising the steps of:
step 1, sending a gas mixture to be separated into gas separation equipment for separation;
the gas separation equipment is formed by connecting a plurality of membrane modules in series, and materials obtained from the permeation side of the previous stage are sent to the permeation side of the next stage for continuous separation; the obtained material on the retentate side of the next stage flows back to the retentate side of the upper stage for continuous separation;
and 2, obtaining a first gas component on the permeation side of the last stage, and obtaining a second gas component on the retentate side of the first stage.
2. The inorganic membrane multistage gas separation method of claim 1, wherein in step 1, the gas mixture to be separated is pretreated by a pretreatment unit for the mixed gas;
in one embodiment, the pretreatment comprises compression, drying, filtration, or heating.
3. The inorganic membrane multi-stage gas separation process of claim 1 wherein in step 1, the gas product on the retentate side of the first stage is withdrawn under a back pressure valve control;
in one embodiment, in step 1, the resulting material from the retentate side of the next stage is refluxed to the retentate side of the previous stage or stages;
in one embodiment, in step 1, the gas mixture to be separated is fed to the membrane module whose gas composition on the retentate side is closest to the gas composition of the gas mixture to be separated;
in one embodiment, in step 1, the feed pressure of the gas mixture to be separated is controlled in the range of 0.1 to 5 MPa.
4. The method for multistage inorganic membrane gas separation according to claim 1, wherein a reflux ratio is required to be set for the membrane module containing the refluxed retentate gas; wherein the reflux ratio is as follows: the return gas quantity of the retentate side of the membrane module and the gas quantity to be separated entering the gas separation equipment;
in one embodiment, the working temperature of each stage of membrane module is 28K-973K;
in one embodiment, the material used in the gas separation membrane installed in the membrane module may be one or more of inorganic membrane materials such as a molecular sieve membrane, a ceramic membrane, and a carbon membrane; the carrier of the gas separation membrane may be in the form of a tube or hollow fiber, etc.
5. The method of inorganic membrane multi-stage gas separation of claim 1, wherein in one embodiment, the gas mixture to be separated contains N2、CO2、H2、O2、Kr、Xe、CH4And one or more of He;
in one embodiment, the composition of the gas mixture to be separated is 5% CO2, 30% N2And 65% Xe gas mixture, and further contains H2O, H2The partial pressure of O was 2.3 kPa; and the gas separation membrane used was a DD3R molecular sieve membrane.
6. An apparatus for inorganic membrane multistage gas separation, comprising:
a pre-treatment unit (1) for pre-treating a gas mixture to be separated;
the gas separation equipment is connected with the pretreatment unit (1) and is used for separating gas components in a gas mixture to be separated;
the gas separation equipment comprises a plurality of membrane modules (3), and the membrane modules (3) are connected in series; the permeation side air outlet (9) of the upper stage membrane component (3) is connected with the residual side air inlet (6) of the lower stage membrane component (3); a surplus side air outlet (7) of the membrane module (3) at the next stage is connected with a surplus side air inlet (6) of the membrane module (3) at the upper stage;
an air outlet (9) at the permeation side of the membrane component (3) at the last stage is connected with a first gas component receiving pipeline; a second gas component receiving pipeline is connected with a gas outlet (7) at the retentate side of the membrane component (3) of the first stage.
7. The inorganic membrane multistage gas separation device according to claim 6, wherein in one embodiment, the membrane module (3) comprises a shell (4) and a gas separation membrane (5) installed in the shell (4); the residual side gas inlet (6) and the residual side gas outlet (7) are connected to the shell (4), and the permeation side of the gas separation membrane (5) is connected to the permeation side gas outlet (9);
in one embodiment, the gas separation membrane (5) is of tubular or hollow fiber type;
in one embodiment, the material of the gas separation membrane (5) is a molecular sieve membrane, a ceramic membrane or a carbon membrane.
8. The inorganic membrane multistage gas separation apparatus according to claim 6, wherein in one embodiment, the retentate side gas outlet (7) of the membrane module (3) of the next stage is connected to the retentate side gas inlet (6) of the membrane module (3) of the previous stage or stages;
in one embodiment, the retentate side air outlet (7) of the membrane module (3) at the next stage is connected with the membrane module (3) at the upper stage by a micro air pump (11).
9. The apparatus for inorganic membrane multistage gas separation according to claim 6, characterized in that in one embodiment the pretreatment unit (1) is connected to the gas separation device by means of a mass flow controller (2);
in one embodiment, the pretreatment unit (1) is connected to the membrane module (3) of any stage;
in one embodiment, a back pressure valve (12) is connected to the retentate side gas outlet (7) of the first stage membrane module (3).
10. Use of the apparatus for inorganic membrane multistage gas separation of claim 6 for multi-component gas separation.
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