CN111740303A - Femtosecond mode-locked laser based on disordered laser crystal and laser generation method - Google Patents
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Abstract
Description
技术领域technical field
本发明涉及中红外固体激光技术领域，具体涉及一种基于无序激光晶体的飞秒锁模激光器及激光产生方法。The invention relates to the technical field of mid-infrared solid-state lasers, in particular to a femtosecond mode-locked laser based on disordered laser crystals and a laser generation method.
背景技术Background technique
得益于激光晶体材料和锁模技术的快速发展，近红外波段的飞秒锁模激光技术已经非常成熟，相关商业化产品不断面世。随着激光物理的不断发展，人们发现许多光和物质相互作用的过程与激光波长密切相关，因此急需拓宽飞秒锁模激光的波长覆盖范围。特别的，2微米飞秒锁模激光在时间分辨分子光谱学、光学频率梳产生、光参量啁啾脉冲放大、半导体材料微加工等领域具有独特的优势。Thanks to the rapid development of laser crystal materials and mode-locking technology, the femtosecond mode-locking laser technology in the near-infrared band has become very mature, and related commercial products have been released continuously. With the continuous development of laser physics, it has been found that many processes of light-matter interaction are closely related to the laser wavelength. Therefore, it is urgent to broaden the wavelength coverage of femtosecond mode-locked lasers. In particular, the 2-micron femtosecond mode-locked laser has unique advantages in the fields of time-resolved molecular spectroscopy, optical frequency comb generation, optical parametric chirped pulse amplification, and semiconductor material micromachining.
目前，常用的2微米激光晶体材料主要包括Ho:YAG、Tm:YAG、Tm:YLF、Tm:YAP、Ho,Tm:YLF等，但是这些传统晶体材料的荧光光谱较窄，不易实现超短脉冲和宽调谐输出。近年来，人们提出无序激光晶体材料的概念，这种材料即保留了传统晶体材料良好的热力学和光学性能，又可以将荧光谱展宽，这将非常有利于超短脉冲激光的产生。据报道，目前已通过Tm:CLNGG、Tm:CNNGG、Tm,Ho:CLNGG、Tm,Ho:CNGG、Tm:CALYO、Tm,Ho:CALGO等无序激光晶体产生2微米飞秒锁模激光，其脉冲宽度可短至几十飞秒。由于产生超短脉宽飞秒锁模激光要求泵浦源具有较好的光束质量，因此通常采用钛宝石激光器作为泵浦源，然而钛宝石激光器存在体积庞大、价格昂贵等缺点；另外，受限于钛宝石激光器的输出功率，目前基于无序激光晶体的2微米飞秒锁模激光器输出功率尚处于较低水平(<400mW)。近年来，分布布拉格反射锥形半导体激光器得到飞速发展，目前已实现高功率(>10W)、高光束质量、窄线宽的半导体激光输出；相比于钛宝石激光器，分布布拉格反射锥形半导体激光器具有成本低、结构简单的优势，使之成为飞秒锁模激光器的一种非常有潜力的泵浦源。At present, the commonly used 2-micron laser crystal materials mainly include Ho:YAG, Tm:YAG, Tm:YLF, Tm:YAP, Ho,Tm:YLF, etc. However, the fluorescence spectrum of these traditional crystal materials is narrow and it is not easy to realize ultrashort pulses and wide tuned output. In recent years, the concept of disordered laser crystal materials has been proposed, which not only retains the good thermodynamic and optical properties of traditional crystal materials, but also broadens the fluorescence spectrum, which is very beneficial to the generation of ultrashort pulsed lasers. According to reports, 2-micron femtosecond mode-locked lasers have been generated by disordered laser crystals such as Tm:CLNGG, Tm:CNNGG, Tm,Ho:CLNGG, Tm,Ho:CNGG, Tm:CALYO, Tm,Ho:CALGO. The pulse width can be as short as tens of femtoseconds. Since the generation of ultra-short pulse width femtosecond mode-locked laser requires the pump source to have good beam quality, Ti:sapphire laser is usually used as the pump source. However, Ti:sapphire laser has disadvantages such as bulky and expensive; Due to the output power of Ti:sapphire lasers, the current output power of 2-micron femtosecond mode-locked lasers based on disordered laser crystals is still at a low level (<400 mW). In recent years, the distributed Bragg reflection conical semiconductor laser has been developed rapidly, and the semiconductor laser output with high power (>10W), high beam quality and narrow linewidth has been realized; compared with the Ti:sapphire laser, the distributed Bragg reflection conical semiconductor laser It has the advantages of low cost and simple structure, making it a very potential pump source for femtosecond mode-locked lasers.
综上，行业内急需研发一种既能输出高功率、高光束质量、超短脉宽的2微米飞秒锁模激光，而其泵浦源的体积和成本大大降低的锁模激光器。In summary, the industry urgently needs to develop a 2-micron femtosecond mode-locked laser capable of outputting high power, high beam quality, and ultra-short pulse width, and a mode-locked laser that greatly reduces the volume and cost of the pump source.
发明内容SUMMARY OF THE INVENTION
本发明的目的是为了克服以上现有技术存在的不足，提供了一种能实现高功率、高光束质量、超短脉宽的2微米飞秒锁模激光输出，并降低泵浦源的体积和成本的基于无序激光晶体的飞秒锁模激光器及激光产生方法。The purpose of the present invention is to overcome the above shortcomings of the prior art, provide a 2-micron femtosecond mode-locked laser output that can achieve high power, high beam quality, and ultra-short pulse width, and reduce the volume and size of the pump source. A cost-effective femtosecond mode-locked laser based on disordered laser crystals and a laser generation method.
本发明的目的通过以下的技术方案实现：The object of the present invention is achieved through the following technical solutions:
一种基于无序激光晶体的飞秒锁模激光器，包括：泵浦源(1)、准直镜(2)、聚焦镜(3)、凹面输入镜(4)、增益介质(5)、第一凹面高反镜(6)、第二凹面高反镜(7)、锁模元件(8)、第一平面啁啾镜(9)、第二平面啁啾镜(10)和耦合输出镜(11)；泵浦源(1)输出的泵浦光依次经过准直镜(2)、聚焦镜(3)和凹面输入镜(4)后注入增益介质(5)；凹面输入镜(4)、第一凹面高反镜(6)、第二凹面高反镜(7)、锁模元件(8)、第一平面啁啾镜(9)、第二平面啁啾镜(10)和平面输出镜(11)构成激光谐振腔，泵浦源(1)，用于输出泵浦光，泵浦光诱发增益介质(5)粒子数反转并在激光谐振腔内形成激光振荡，最后通过耦合输出镜(11)输出飞秒锁模激光；增益介质(5)为无序激光晶体。A femtosecond mode-locked laser based on a disordered laser crystal, comprising: a pump source (1), a collimating mirror (2), a focusing mirror (3), a concave input mirror (4), a gain medium (5), a A concave high-reflection mirror (6), a second concave high-reflection mirror (7), a mode-locking element (8), a first plane chirped mirror (9), a second plane chirped mirror (10) and a coupling-out mirror ( 11); the pump light output from the pump source (1) passes through the collimating mirror (2), the focusing mirror (3) and the concave input mirror (4) in sequence and then is injected into the gain medium (5); the concave input mirror (4), A first concave high-reflection mirror (6), a second concave high-reflection mirror (7), a mode locking element (8), a first plane chirped mirror (9), a second plane chirped mirror (10) and a plane output mirror (11) Constitute a laser resonator, and the pump source (1) is used to output the pump light, and the pump light induces the gain medium (5) Particle population inversion and laser oscillation are formed in the laser resonator, and finally pass the output mirror through the coupling output mirror (11) outputting a femtosecond mode-locked laser; the gain medium (5) is a disordered laser crystal.
优选地，增益介质(5)为Tm:GYAP、Tm:CLNGG、Tm:CNNGG、Tm:CALYO、Tm,Ho:CLNGG、Tm,Ho:CNGG、Tm,Ho:CALGO中的任意一种。Preferably, the gain medium (5) is any one of Tm:GYAP, Tm:CLNGG, Tm:CNNGG, Tm:CALYO, Tm,Ho:CLNGG, Tm,Ho:CNGG, Tm,Ho:CALGO.
优选地，泵浦源(1)为高功率高光束质量的分布布拉格反射锥形半导体激光器。Preferably, the pump source (1) is a distributed Bragg reflection conical semiconductor laser with high power and high beam quality.
优选地，锁模元件(8)为可饱和吸收镜、石墨烯和单璧碳纳米管饱和吸收体中的任意一种。Preferably, the mode-locking element (8) is any one of a saturable absorber mirror, graphene and a single-wall carbon nanotube saturable absorber.
优选地，若锁模元件(8)为石墨烯和单璧碳纳米管饱和吸收体，则锁模元件(8)为石墨烯或单璧碳纳米管饱和吸收体通过化学气相沉积法生长，再转移到2微米波段的激光高反镜上形成的锁模元件。Preferably, if the mode-locking element (8) is a graphene and a single-wall carbon nanotube saturable absorber, the mode-locking element (8) is a graphene or a single-wall carbon nanotube saturable absorber grown by chemical vapor deposition, and then the A mode-locked element formed on a laser high-reflection mirror transferred to a 2-micron wavelength band.
优选地，增益介质(5)以布鲁斯特角置于激光谐振腔内。Preferably, the gain medium (5) is placed in the laser cavity at Brewster's angle.
优选地，耦合输出镜(11)输出的飞秒锁模激光为2微米飞秒锁模激光。Preferably, the femtosecond mode-locked laser output by the coupling-out mirror (11) is a 2-micron femtosecond mode-locked laser.
优选地，第一平面啁啾镜(9)和第二平面啁啾镜(10)通过均对飞秒激光多次反射来补偿激光谐振腔内的色散。Preferably, the first plane chirped mirror (9) and the second plane chirped mirror (10) compensate the dispersion in the laser resonator by both reflecting the femtosecond laser multiple times.
一种基于无序激光晶体的飞秒锁模激光的产生方法，包括：A method for generating a femtosecond mode-locked laser based on disordered laser crystals, comprising:
S1，泵浦源(1)发出的泵浦光依次经过准直镜(2)、聚焦镜(3)和凹面输入镜(4)后聚焦到以布儒斯特角放置的增益介质(5)中，引起增益介质(5)的粒子数反转并在激光谐振腔内形成激光振荡；其中增益介质(5)为无序激光晶体；S1, the pump light emitted by the pump source (1) passes through the collimating mirror (2), the focusing mirror (3) and the concave input mirror (4) in turn and then is focused to the gain medium (5) placed at the Brewster angle , the particle number inversion of the gain medium (5) is caused and laser oscillation is formed in the laser resonator; wherein the gain medium (5) is a disordered laser crystal;
S2，激光谐振腔内的激光经第一凹面高反镜(6)后反射到第二凹面反射镜(7)，再聚焦到锁模元件(8)上后沿原路返回，再依次通过第二凹面高反镜(7)、第一凹面高反镜(6)、增益介质(5)、凹面输入镜(4)，并由该凹面输入镜(4)偏转反射到第一平面啁啾镜(9)和第二平面啁啾镜(10)；S2, the laser light in the laser resonator is reflected to the second concave mirror (7) by the first concave high-reflection mirror (6), then focused on the mode-locking element (8) and then returned along the original path, and then passes through the first concave mirror (7) in turn Two concave high-reflection mirrors (7), a first concave high-reflection mirror (6), a gain medium (5), and a concave input mirror (4), which are deflected and reflected to the first plane chirped mirror by the concave input mirror (4) (9) and the second plane chirped mirror (10);
S3，激光在第一平面啁啾镜(9)和第二平面啁啾镜(10)之间多次反射来实现腔内色散补偿；S3, the laser is reflected multiple times between the first plane chirped mirror (9) and the second plane chirped mirror (10) to realize intra-cavity dispersion compensation;
S4，通过耦合输出镜(11)输出高功率、高光束质量、超短脉宽的2微米飞秒锁模激光。S4, a 2-micron femtosecond mode-locked laser with high power, high beam quality and ultra-short pulse width is output through the coupling output mirror (11).
本发明相对于现有技术具有如下优点：Compared with the prior art, the present invention has the following advantages:
1、选用具有较好热力学性能和较宽荧光光谱的无序激光晶体作为增益介质，成功实现了几十飞秒量级的2微米锁模脉冲激光输出。1. The disordered laser crystal with good thermodynamic properties and wide fluorescence spectrum was selected as the gain medium, and the 2-micron mode-locked pulsed laser output of the order of tens of femtoseconds was successfully realized.
2、采用分布布拉格反射锥形半导体激光器替代传统的钛宝石激光器作为泵浦源，降低了泵浦激光系统的体积和成本。2. The distributed Bragg reflection conical semiconductor laser is used to replace the traditional Ti:sapphire laser as the pump source, which reduces the volume and cost of the pump laser system.
3、分布布拉格反射锥形半导体激光器具有输出功率高、光束质量好、线宽窄的特点，容易获得高功率、高光束质量、超短脉宽的2微米飞秒锁模激光输出。3. The distributed Bragg reflection conical semiconductor laser has the characteristics of high output power, good beam quality and narrow line width. It is easy to obtain 2 micron femtosecond mode-locked laser output with high power, high beam quality and ultra-short pulse width.
附图说明Description of drawings
构成本申请的一部分的说明书附图用来提供对本发明的进一步理解，本发明的示意性实施例及其说明用于解释本发明，并不构成对本发明的不当限定。在附图中：The accompanying drawings forming a part of the present application are used to provide further understanding of the present invention, and the exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the attached image:
图1为实施例1的基于无序激光晶体的飞秒锁模激光器的结构示意图。FIG. 1 is a schematic structural diagram of a femtosecond mode-locked laser based on disordered laser crystals in Example 1. FIG.
图2为实施例2的基于无序激光晶体的飞秒锁模激光器的结构示意图。FIG. 2 is a schematic structural diagram of the femtosecond mode-locked laser based on disordered laser crystals in Example 2. FIG.
具体实施方式Detailed ways
下面结合附图和实施例对本发明作进一步说明。The present invention will be further described below with reference to the accompanying drawings and embodiments.
实施例1Example 1
图1是实施例1的一种基于无序激光晶体的2微米飞秒锁模激光器光路结构示意图，包括794nm分布布拉格反射锥形半导体激光器1、准直镜2、聚焦镜3、凹面输入镜4、增益介质5、第一凹面高反镜6、第二凹面高反镜7、锁模元件8、第一平面啁啾镜9、第二平面啁啾镜10和耦合输出镜11。增益介质5为无序激光晶体(Tm:GYAP)。1 is a schematic diagram of the optical path structure of a 2-micron femtosecond mode-locked laser based on a disordered laser crystal according to
794nm分布布拉格反射锥形半导体激光器1发出的泵浦光依次经过准直镜2、聚焦镜3和凹面输入镜4后聚焦到以布儒斯特角放置的增益介质5中，引起粒子数反转并在谐振腔内形成激光振荡。谐振腔内的激光经第一凹面高反镜6后反射到第二凹面反射镜7，再聚焦到锁模元件8上后沿原路返回，再依次通过第二凹面高反镜7、第一凹面高反镜6、增益介质5、凹面输入镜4，并由该凹面输入镜4偏转反射到第一平面啁啾镜9和第二平面啁啾镜10，激光在第一平面啁啾镜9和第二平面啁啾镜10之间多次反射来实现腔内色散补偿，最后通过耦合输出镜11输出高功率、高光束质量、超短脉宽的2微米飞秒锁模激光。The pump light emitted by the 794nm distributed Bragg reflection
实施例2Example 2
图2是实施例2的另一种基于无序激光晶体的2微米飞秒锁模激光器光路结构示意图，该实施例是在实施例1的基础上进行了进一步的改进，其与实施例1的区别在于：激光谐振腔内插入了Loyt型双折射调谐滤光片12，以实现2微米飞秒锁模激光的调谐输出。2 is a schematic diagram of the optical path structure of another 2-micron femtosecond mode-locked laser based on disordered laser crystals in Example 2. This example is further improved on the basis of Example 1, which is similar to Example 1. The difference is that a Loyt-type
综上，本发明采用具有较大受激吸收截面和受激发射截面、较宽荧光光谱的无序激光晶体作为增益介质，利用高功率高光束质量的分布布拉格反射锥形半导体激光器作为泵浦源，可实现高功率、高光束质量、超短脉宽的2微米飞秒锁模激光输出。To sum up, the present invention uses disordered laser crystals with larger stimulated absorption cross-sections, stimulated emission cross-sections, and wider fluorescence spectra as gain media, and uses distributed Bragg reflection tapered semiconductor lasers with high power and high beam quality as pump sources. , can achieve high power, high beam quality,
上述具体实施方式为本发明的优选实施例，并不能对本发明进行限定，其他的任何未背离本发明的技术方案而所做的改变或其它等效的置换方式，都包含在本发明的保护范围之内。The above-mentioned specific embodiments are the preferred embodiments of the present invention, and do not limit the present invention. Any other changes or other equivalent replacement methods that do not deviate from the technical solutions of the present invention are included in the protection scope of the present invention. within.
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